| {"features": ["power_mW", "repetition_rate_kHz", "scan_speed_mm_s", "pulse_duration_fs", "wavelength_nm", "num_passes", "spot_diameter_um", "focal_offset_um", "water_content", "threshold_fluence_J_cm2", "absorption_depth_nm", "incubation_coefficient", "refractive_index", "youngs_modulus_kPa", "degree_of_methacrylation", "crosslink_density_mol_m3", "two_photon_cross_section_GM", "pulse_energy_uJ", "peak_fluence_J_cm2", "effective_pulses", "overlap_percent"], "targets": ["etch_depth_um", "etch_width_um", "surface_roughness_Sa_um", "aspect_ratio", "side_wall_angle_deg"]} |