import numpy as np import plotly.graph_objects as go import plotly.express as px from plotly.subplots import make_subplots from skimage import measure def get_color_gradient(start_hex, end_hex, n): def hex_to_rgb(h): h = h.lstrip('#') return tuple(int(h[i:i+2], 16) for i in (0, 2, 4)) if n <= 1: return [f'rgb{hex_to_rgb(end_hex)}'] s, e = hex_to_rgb(start_hex), hex_to_rgb(end_hex) return [ f'rgb({int(s[0] + (e[0]-s[0])*i/(n-1))}, {int(s[1] + (e[1]-s[1])*i/(n-1))}, {int(s[2] + (e[2]-s[2])*i/(n-1))})' for i in range(n) ] def plot_focus_exposure(data_list, dose_ary, cmap_idx, **kwargs): dpi = kwargs.get('dpi', 600) fig_w = kwargs.get('fig_width_cm', 5) / 2.54 * dpi fig_h = kwargs.get('fig_height_cm', 1.5) / 2.54 * dpi text_px = int(kwargs.get('text_font_size', 1.5) / 72 * dpi) tick_px = int(kwargs.get('ticklabel_font_size', 2) / 72 * dpi) show_x_ticks = kwargs.get('show_x_ticks', True) show_x_ticklabels = kwargs.get('show_x_ticklabels', True) show_y_ticks = kwargs.get('show_y_ticks', True) show_y_ticklabels = kwargs.get('show_y_ticklabels', True) n = len(data_list) fig = make_subplots(rows=1, cols=n, subplot_titles=[title for _, title in data_list]) target_color = px.colors.qualitative.Plotly[cmap_idx] sorted_doses = sorted(dose_ary) colors = get_color_gradient("#D0D0D0", target_color, len(sorted_doses)) dose_color = {dose: colors[i] for i, dose in enumerate(sorted_doses)} for col_idx, (data, title) in enumerate(data_list, start=1): for dose in dose_ary: if dose not in data: continue focus_p, cd_p = data[dose] fig.add_trace(go.Scatter( x=focus_p, y=cd_p, mode='lines', name=f'{dose} mJ/cm²', line=dict(color=dose_color[dose], width=4), legendgroup=f'{dose}', showlegend=(col_idx == 1), ), row=1, col=col_idx) axis_common = dict( showline=True, linecolor='black', mirror=True, linewidth=1, tickfont=dict(size=tick_px, color='black'), ) for col_idx in range(1, n + 1): s = '' if col_idx == 1 else str(col_idx) fig.update_layout(**{ f'xaxis{s}': dict( **axis_common, title=dict(text=kwargs.get('x_label', 'Focus [nm]')), range=[-160, 160], nticks=5, ticks='inside' if show_x_ticks else '', showticklabels=show_x_ticklabels, ), f'yaxis{s}': dict( **axis_common, title=dict(text=kwargs.get('y_label', 'CD [nm]') if col_idx == 1 else '', standoff=text_px * 0.8), range=[0, 310], ticks='inside' if show_y_ticks else '', showticklabels=show_y_ticklabels if col_idx == 1 else False, ), }) fig.update_layout( autosize=False, width=int(fig_w), height=int(fig_h), paper_bgcolor='rgba(255,255,255,1)', plot_bgcolor='rgba(255,255,255,1)', font=dict(family='Arial, sans-serif', size=text_px, color='black'), showlegend=kwargs.get('showlegend', False), ) fig.update_annotations(font=dict(family='Arial, sans-serif', size=text_px, color='black')) return fig def plot_profiles(bot, top, sem, **kwargs): dpi = kwargs.get('dpi', 600) text_px = int(kwargs.get('text_font_size', 1.5) / 72 * dpi) scale = kwargs.get('scale', 1.5) dose_ary = kwargs.get('dose_ary', [34, 26, 18]) focus_ary = kwargs.get('focus_ary', [-100 + 20*i for i in range(11)]) ny, nx = kwargs.get('ny', 50), kwargs.get('nx', 35) nc = 512 // 2 - 1 n_rows, n_cols = len(dose_ary), len(focus_ary) cell_h, cell_w = 2*ny + 1, 2*nx + 1 margin_l = kwargs.get('margin_l', text_px * 10) margin_t = kwargs.get('margin_t', text_px * 4) to_np = lambda t: t.float().numpy() if hasattr(t, 'numpy') else np.array(t, dtype=float) fig = make_subplots( rows=n_rows, cols=n_cols, subplot_titles=[f'{focus_ary[c]} nm' if r == 0 else '' for r in range(n_rows) for c in range(n_cols)], horizontal_spacing=0.01, vertical_spacing=0.01, ) for row_idx, dose in enumerate(dose_ary): for col_idx, focus in enumerate(focus_ary): r, c = row_idx + 1, col_idx + 1 crop = lambda d: to_np(d[dose][focus][nc-ny:nc+ny+1, nc-nx:nc+nx+1]) bot_c, top_c, sem_c = crop(bot), crop(top), crop(sem) fig.add_trace(go.Heatmap( z=sem_c, colorscale=[[0, 'black'], [1, 'white']], zmin=0, zmax=255, showscale=False, ), row=r, col=c) for contour in measure.find_contours(bot_c, 0.5): fig.add_trace(go.Scatter( x=contour[:, 1], y=contour[:, 0], mode='lines', line=dict(color='rgba(255,0,0,0.5)', width=4), showlegend=False, ), row=r, col=c) for contour in measure.find_contours(top_c, 0.5): fig.add_trace(go.Scatter( x=contour[:, 1], y=contour[:, 0], mode='lines', line=dict(color='rgba(0,0,255,0.5)', width=4), showlegend=False, ), row=r, col=c) for row_idx in range(n_rows): for col_idx in range(n_cols): idx = row_idx * n_cols + col_idx + 1 s = '' if idx == 1 else str(idx) fig.update_layout(**{ f'xaxis{s}': dict(showline=False, showticklabels=False, ticks='', showgrid=False, zeroline=False, range=[-0.5, cell_w - 0.5]), f'yaxis{s}': dict(showline=False, showticklabels=False, ticks='', showgrid=False, zeroline=False, range=[cell_h - 0.5, -0.5]), }) for row_idx, dose in enumerate(dose_ary): fig.add_annotation( x=0, y=1 - (row_idx + 0.5) / n_rows, xref='paper', yref='paper', xanchor='right', yanchor='middle', xshift=-4, text=f'{dose} mJ/cm²', showarrow=False, ) fig.update_layout( width=int(n_cols * cell_w * scale + margin_l), height=int(n_rows * cell_h * scale + margin_t), autosize=False, paper_bgcolor='white', plot_bgcolor='white', font=dict(family='Arial, sans-serif', size=text_px, color='black'), title_text='Resist profiles [Red: Bottom, Blue: Top, Background: SEM]', title_x=0.5, showlegend=False, margin=dict(l=margin_l, t=margin_t, r=10, b=10), ) fig.update_annotations(font=dict(family='Arial, sans-serif', size=text_px, color='black')) return fig