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Datasets:
OpenLithoHub
/
litho-tiny
like
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OpenLithoHub — Computational Lithography Benchmarks
1
Tasks:
Image Segmentation
Image-to-Image
Modalities:
Tabular
Text
Formats:
parquet
Languages:
English
Size:
< 1K
Tags:
lithography
semiconductor
EUV
OPC
mask-optimization
inverse-lithography
Libraries:
Datasets
pandas
Polars
+ 1
License:
apache-2.0
Dataset card
Data Studio
Files
Files and versions
xet
Community
1
main
litho-tiny
/
.gitattributes
Commit History
initial commit
f9b52d4
verified
tellerlin
commited on
4 days ago
tellerlin commited on 
