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Datasets:
OpenLithoHub
/
litho-tiny
like
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OpenLithoHub — Computational Lithography Benchmarks
1
Tasks:
Image Segmentation
Image-to-Image
Modalities:
Tabular
Text
Formats:
parquet
Languages:
English
Size:
< 1K
Tags:
lithography
semiconductor
EUV
OPC
mask-optimization
inverse-lithography
Libraries:
Datasets
pandas
Polars
+ 1
License:
apache-2.0
Dataset card
Data Studio
Files
Files and versions
xet
Community
1
refs/convert/parquet
litho-tiny
/
default
14.6 MB
1 contributor
History:
1 commit
parquet-converter
Update parquet files
ecf4183
3 days ago
train
Update parquet files
3 days ago
