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{"file_name":"images/test_atomic-layer-deposition_simulation-usecase_47_figure_5.jpg","caption":"Figure 5. Pidc table of metals and semi-metals, highiging those that have ben deosited as elements or metal lloys by thmal ALD (solid black box) or pulsed-CVD (dashed black box). Atomic numbers are shown above the atom symbols and Pauling electronegativities are shown below for values with two decimal places, the oxidation state is: I for groups 1 and 11, II for groups 2, 4-10 and 12, III for groups 3 and 13, and IV for group 14. Non-metals (including semi-metals) and elements without significant natural abundance are shown in white. Transition metals are shaded in light grey, while other metals are dark grey. Reproduced with permission.[72] Copyright 2013, Elsevier.","id":"test/atomic-layer-deposition/simulation-usecase/47/figure_5","sample_id":"atomic-layer-deposition/simulation-usecase/47/figure_5","subset":"periodic-table-map","split":"test","classification":[{"panel_id":"a","label":"periodic table map"}],"summarization":"[]","data_extraction":"[]","vqa":"[]","bbox":[{"panel_id":"a","x":0,"y":0,"width":1011,"height":622}],"source":"icdar2026-competition-data/test/gold_standard_test_set/atomic-layer-deposition/simulation-usecase/47/images/figure_5.jpg","provenance":{"source_annotation":"icdar2026-competition-data/test/gold_standard_test_set/atomic-layer-deposition/simulation-usecase/47/images/figure_5.json","source_content":"icdar2026-competition-data/test/gold_standard_test_set/atomic-layer-deposition/simulation-usecase/47/content.json","source_pdf":["icdar2026-competition-data/test/gold_standard_test_set/atomic-layer-deposition/simulation-usecase/47/Simon D. Elliott et al.pdf"],"main_category":"atomic-layer-deposition","sub_category":"simulation-usecase","paper_id":"47","first_classification_panel_id":"a","first_classification_label":"periodic table map","caption_source":"content.json:image_caption"},"width":1011,"height":622,"image_format":"jpeg","image_sha256":"69acfce56d4f7e25be15e1567d2679afe640a016727db9fa0588b915f8556b1e","metadata_license":"CC BY 4.0","image_license":"source_publisher_rights_reserved","image_reuse_status":"non_commercial_research_use_only","schema_version":"1.0.0"}
{"file_name":"images/test_atomic-layer-etching_simulation-usecase_21_figure_3.jpg","caption":"Figure 3. Color map of surface binding energies $(E_0)$ of elemental materials, from values independently given by Yamamura and Tawara. Materials with high $E_0$ values, such as carbon and the refractory metals, are most likely to exhibit high synergy in directional ALE.","id":"test/atomic-layer-etching/simulation-usecase/21/figure_3","sample_id":"atomic-layer-etching/simulation-usecase/21/figure_3","subset":"periodic-table-map","split":"test","classification":[{"panel_id":"a","label":"periodic table map"}],"summarization":"[{\"panel_id\":\"a\",\"text\":\"The periodic table is color-coded to show surface binding energy E₀ for elemental solids using discrete ranges from <2 eV to >7 eV. Elements with high E₀, including carbon and refractory transition metals, occupy the darkest bins, indicating strong lattice cohesion and resistance to removal. Alkali metals and weakly bound elements fall into the lowest categories, reflecting low surface stability. The map provides a qualitative basis for anticipating where strong chemical–physical synergy is required for effective directional ALE\"}]","data_extraction":"[{\"panel_id\":\"a\",\"text\":\"| Element | Surface binding energy E₀ (categorical) |\\n|---------|------------------------------------------|\\n| H, Li,Na, K, Rb, Cs, Mg, Ca, Sr, Ba, Zn, Cd, Hg, Tl, Po, Br, I, At, He, Ne, Ar, Kr, Xe, Rn| < 2 eV |\\n| Be, Sc, Y, La, Ti, Cr, Mn, Fe, Co, Ni, Pd, Cu, Ag, Au,Al, Si, Ge, Sn, N, P, As,Sb, Cl| 25 eV |\\n| B, O, F, V, Rh, Pt, | 5-6 eV |\\n| Zr, Mo, Tc, Ru, Hf, Ir | 6-7 eV |\\n| C, Nb, Ta, W, Re, Os | 7+ eV |\"}]","vqa":"[{\"panel_id\":\"a\",\"items\":[{\"question_type\":\"Process-Oriented\",\"questions\":\"\",\"answer_type\":\"Paragraph\",\"answer\":\"Materials with low surface binding energies can often be removed using chemically driven or thermally assisted steps, since only modest bond weakening is required for detachment. In contrast, high-E₀ materials such as refractory metals and carbon require a deliberate sequence in which surface chemistry first reduces local binding strength, followed by directional energy input to complete removal. This separation of chemical modification and physical activation enables atomic-scale control even for strongly bound solids.\"},{\"question_type\":\"Comparative/Trend\",\"questions\":\"\",\"answer_type\":\"Paragraph\",\"answer\":\"-Refractory transition metals and carbon cluster in the highest E₀ ranges.\\n-Alkali metals appear in the lowest E₀ category, indicating weak surface cohesion.\\n-Several p-block elements (e.g., B, O, F) show elevated E₀ relative to neighbors.\\n-Intermediate E₀ values dominate among common semiconductors and metals, suggesting mixed chemical and physical contributions.\"},{\"question_type\":\"Structure-Property\",\"questions\":\"\",\"answer_type\":\"Factoid\",\"answer\":\"Carbon and refractory transition metals (e.g., Ta, W, Re, Os).\"},{\"question_type\":\"Application/Performance\",\"questions\":\"\",\"answer_type\":\"Yes/No\",\"answer\":\"Yes\"}]}]","bbox":[{"panel_id":"a","x":2,"y":0,"width":1407,"height":374}],"source":"icdar2026-competition-data/test/gold_standard_test_set/atomic-layer-etching/simulation-usecase/21/images/figure_3.jpg","provenance":{"source_annotation":"icdar2026-competition-data/test/gold_standard_test_set/atomic-layer-etching/simulation-usecase/21/images/figure_3.json","source_content":"icdar2026-competition-data/test/gold_standard_test_set/atomic-layer-etching/simulation-usecase/21/content.json","source_pdf":["icdar2026-competition-data/test/gold_standard_test_set/atomic-layer-etching/simulation-usecase/21/Review Paper -- Atomic Layer Etching Rethinking the Art of Etch.pdf"],"main_category":"atomic-layer-etching","sub_category":"simulation-usecase","paper_id":"21","first_classification_panel_id":"a","first_classification_label":"periodic table map","caption_source":"content.json:img_caption"},"width":1408,"height":375,"image_format":"jpeg","image_sha256":"5d71082e5cdfe8dbaa25741a238d55079e439f3b749a9b386626a292f159f4b6","metadata_license":"CC BY 4.0","image_license":"source_publisher_rights_reserved","image_reuse_status":"non_commercial_research_use_only","schema_version":"1.0.0"}