{"file_name":"images/validation_atomic-layer-etching_experimental-usecase_10_fig_3.jpg","caption":"Fig. 3 Schematic reresentations of the ractors used in this work: a) an Oxford Instruments FlexAL reactor and (b) a home-built ALD reactor equipped with an in situ FTIR setup, shown here in transmission mode for powder samples. The angle of the IR mirrors on the detector and source side can be adjusted such that planar samples can be studied in reflection mode. Both systems are pumped with turbo pumps and use an inductively coupled plasma source supplied with 13.56 MHz RF power.","id":"validation/atomic-layer-etching/experimental-usecase/10/fig_3","sample_id":"atomic-layer-etching/experimental-usecase/10/fig_3","subset":"device-structure-diagram","split":"validation","classification":[{"panel_id":"a","label":"device structure diagram"},{"panel_id":"b","label":"device structure diagram"}],"summarization":"[]","data_extraction":"[]","vqa":"[]","bbox":[{"panel_id":"a","x":8,"y":7,"width":502,"height":490},{"panel_id":"b","x":524,"y":6,"width":591,"height":489}],"source":"icdar2026-competition-data/dev/atomic-layer-etching/experimental-usecase/10/images/fig_3.jpg","provenance":{"source_annotation":"icdar2026-competition-data/dev/atomic-layer-etching/experimental-usecase/10/images/fig_3.json","source_content":"icdar2026-competition-data/dev/atomic-layer-etching/experimental-usecase/10/content.json","source_pdf":["icdar2026-competition-data/dev/atomic-layer-etching/experimental-usecase/10/Investigation of the atomic layer etching mechanism for Al2O3.pdf"],"main_category":"atomic-layer-etching","sub_category":"experimental-usecase","paper_id":"10","first_classification_panel_id":"a","first_classification_label":"device structure diagram","caption_source":"content.json:img_caption"},"width":1122,"height":497,"image_format":"jpeg","image_sha256":"0696a2f4d9b52ae8006667213f7520d7359e7395b7fa42d2cc4a28c02f727283","metadata_license":"CC BY 4.0","image_license":"source_publisher_rights_reserved","image_reuse_status":"non_commercial_research_use_only","schema_version":"1.0.0"}