| Rank,Heat,Name,Nationality,Time,Notes | |
| 1,1,Dwain Chambers,Great Britain,6.51,Q | |
| 2,2,Trell Kimmons,United States,6.55,"Q, SB" | |
| 3,3,Mike Rodgers,United States,6.56,Q | |
| 4,2,Daniel Bailey,Antigua and Barbuda,6.62,Q | |
| 5,1,Nesta Carter,Jamaica,6.64,Q | |
| 6,3,Ronald Pognon,France,6.64,Q | |
| DQ,2,Samuel Francis,Qatar,6.64,"q, Doping" | |
| 7,2,Ibrahim Kabia,Sierra Leone,6.65,"q, NR" | |
| 8,3,Churandy Martina,Netherlands Antilles,6.65,- | |
| 9,3,Rodney Green,Bahamas,6.65,NR | |
| 10,1,Peter Emelieze,Nigeria,6.66,- | |
| 11,1,Abraham Morlu,Liberia,6.67,NR | |
| 12,1,Barakat Mubarak Al-Harthi,Oman,6.67,NR | |
| 13,2,Ogho-Oghene Egwero,Nigeria,6.68,- | |
| 14,3,Vicente de Lima,Brazil,6.69,SB | |
| 15,1,Ángel David Rodríguez,Spain,6.69,- | |
| 16,2,Pascal Mancini,Switzerland,6.70,- | |
| 17,3,Ryan Moseley,Austria,6.71,- | |
| 18,3,Roman Smirnov,Russia,6.74,- | |
| 19,1,Masashi Eriguchi,Japan,6.77,- | |
| 20,2,Aleksandr Vashurkin,Russia,6.77,- | |
| 21,1,Reza Ghasemi,Iran,6.80,- | |
| -,2,Harry Aikines-Aryeetey,Great Britain,DNF,- | |
| -,3,Brian Mariano,Netherlands Antilles,DQ,FS | |