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README.md
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The benchmark of "LithoSim: Large Multi-scale Benchmark for hybrid ML-based Lithography Simulation"
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The corresponding GitHub repo can be found at https://github.com/dw-hongquan/LithoSim
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The benchmark of "LithoSim: Large Multi-scale Benchmark for hybrid ML-based Lithography Simulation"
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The corresponding GitHub repo can be found at https://github.com/dw-hongquan/LithoSim
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## Data Construction
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- 4 in-distributed dataset (OPC_Metal/Metal/OPC_Via/Via).
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- 1 out-of-distribution (OOD) dataset.
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- each main dataset has a train_val and a test folder with compressed data file.
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- Each set of data contains a source_simple.src description of the source, a layout.png, a mask.png, and a number of RI under different process variations.
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