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grandiflorum commited on May 11, 2025

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@@ -9,7 +9,7 @@ size_categories:
 - 100B<n<1T
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-The benchmark of "LithoSim: Large Multi-scale Benchmark for hybrid ML-based Lithography Simulation"
 The corresponding GitHub repo can be found at https://github.com/dw-hongquan/LithoSim

 - 100B<n<1T
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+The benchmark of "LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing"
 The corresponding GitHub repo can be found at https://github.com/dw-hongquan/LithoSim