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README.md
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The benchmark of "LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing"
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The corresponding GitHub repo can be found at https://
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## Data Construction
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The benchmark of "LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing"
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The corresponding GitHub repo can be found at https://dw-hongquan.github.io/LithoSim/
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## Data Construction
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