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maxpooling190
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LithoSim

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Feature Extraction
Modalities:
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Formats:
csv
Languages:
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Size:
1M - 10M
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code
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maxpooling190 grandiflorum commited on
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Duplicate from grandiflorum/LithoSim

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Co-authored-by: Hongquan He <grandiflorum@users.noreply.huggingface.co>

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  1. .gitattributes +67 -0
  2. README.md +52 -0
  3. gen_litho_path.py +35 -0
  4. lithosim/metal/test/10_to_14564.tar.gz +3 -0
  5. lithosim/metal/test/1457_to_18864.tar.gz +3 -0
  6. lithosim/metal/test/18869_to_23400.tar.gz +3 -0
  7. lithosim/metal/test/23402_to_28151.tar.gz +3 -0
  8. lithosim/metal/test/28155_to_32632.tar.gz +3 -0
  9. lithosim/metal/test/32634_to_37105.tar.gz +3 -0
  10. lithosim/metal/test/6265_to_9995.tar.gz +3 -0
  11. lithosim/metal/train_val/11107_to_12239.tar.gz +3 -0
  12. lithosim/metal/train_val/1224_to_13383.tar.gz +3 -0
  13. lithosim/metal/train_val/13384_to_14500.tar.gz +3 -0
  14. lithosim/metal/train_val/14501_to_15640.tar.gz +3 -0
  15. lithosim/metal/train_val/15641_to_16793.tar.gz +3 -0
  16. lithosim/metal/train_val/16795_to_1794.tar.gz +3 -0
  17. lithosim/metal/train_val/17941_to_19077.tar.gz +3 -0
  18. lithosim/metal/train_val/19078_to_20192.tar.gz +3 -0
  19. lithosim/metal/train_val/1_to_11105.tar.gz +3 -0
  20. lithosim/metal/train_val/20194_to_21294.tar.gz +3 -0
  21. lithosim/metal/train_val/21295_to_22450.tar.gz +3 -0
  22. lithosim/metal/train_val/22452_to_2359.tar.gz +3 -0
  23. lithosim/metal/train_val/23590_to_24707.tar.gz +3 -0
  24. lithosim/metal/train_val/24709_to_25818.tar.gz +3 -0
  25. lithosim/metal/train_val/2582_to_26932.tar.gz +3 -0
  26. lithosim/metal/train_val/26934_to_28055.tar.gz +3 -0
  27. lithosim/metal/train_val/28056_to_29176.tar.gz +3 -0
  28. lithosim/metal/train_val/29177_to_30309.tar.gz +3 -0
  29. lithosim/metal/train_val/3031_to_31444.tar.gz +3 -0
  30. lithosim/metal/train_val/31446_to_32595.tar.gz +3 -0
  31. lithosim/metal/train_val/32597_to_33712.tar.gz +3 -0
  32. lithosim/metal/train_val/33713_to_34885.tar.gz +3 -0
  33. lithosim/metal/train_val/34886_to_36027.tar.gz +3 -0
  34. lithosim/metal/train_val/36028_to_37128.tar.gz +3 -0
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  36. lithosim/metal/train_val/38228_to_3952.tar.gz +3 -0
  37. lithosim/metal/train_val/3953_to_515.tar.gz +3 -0
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  41. lithosim/metal/train_val/8505_to_9662.tar.gz +3 -0
  42. lithosim/metal/train_val/9663_to_9999.tar.gz +3 -0
  43. lithosim/ood/test/ood.tar.gz +3 -0
  44. lithosim/opc_metal/test/50001_to_51000.tar.gz +3 -0
  45. lithosim/opc_metal/test/51001_to_52000.tar.gz +3 -0
  46. lithosim/opc_metal/test/52001_to_53000.tar.gz +3 -0
  47. lithosim/opc_metal/test/53001_to_54000.tar.gz +3 -0
  48. lithosim/opc_metal/test/54001_to_55000.tar.gz +3 -0
  49. lithosim/opc_metal/test/55001_to_56000.tar.gz +3 -0
  50. lithosim/opc_metal/train_val/11092_to_12168.tar.gz +3 -0
.gitattributes ADDED
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+ *.7z filter=lfs diff=lfs merge=lfs -text
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+ *.arrow filter=lfs diff=lfs merge=lfs -text
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+ *.bin filter=lfs diff=lfs merge=lfs -text
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+ *.bz2 filter=lfs diff=lfs merge=lfs -text
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+ *.ckpt filter=lfs diff=lfs merge=lfs -text
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+ *.ftz filter=lfs diff=lfs merge=lfs -text
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+ *.gz filter=lfs diff=lfs merge=lfs -text
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+ *.h5 filter=lfs diff=lfs merge=lfs -text
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+ *.joblib filter=lfs diff=lfs merge=lfs -text
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+ *.lfs.* filter=lfs diff=lfs merge=lfs -text
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+ *.lz4 filter=lfs diff=lfs merge=lfs -text
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+ *.mds filter=lfs diff=lfs merge=lfs -text
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+ *.mlmodel filter=lfs diff=lfs merge=lfs -text
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+ *.model filter=lfs diff=lfs merge=lfs -text
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+ *.msgpack filter=lfs diff=lfs merge=lfs -text
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+ *.npy filter=lfs diff=lfs merge=lfs -text
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+ *.npz filter=lfs diff=lfs merge=lfs -text
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+ *.onnx filter=lfs diff=lfs merge=lfs -text
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+ *.ot filter=lfs diff=lfs merge=lfs -text
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+ *.parquet filter=lfs diff=lfs merge=lfs -text
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+ *.pb filter=lfs diff=lfs merge=lfs -text
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+ *.pickle filter=lfs diff=lfs merge=lfs -text
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+ *.pkl filter=lfs diff=lfs merge=lfs -text
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+ *.pt filter=lfs diff=lfs merge=lfs -text
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+ *.pth filter=lfs diff=lfs merge=lfs -text
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+ *.rar filter=lfs diff=lfs merge=lfs -text
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+ *.safetensors filter=lfs diff=lfs merge=lfs -text
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+ saved_model/**/* filter=lfs diff=lfs merge=lfs -text
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+ *.tar.* filter=lfs diff=lfs merge=lfs -text
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+ *.tar filter=lfs diff=lfs merge=lfs -text
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+ *.tflite filter=lfs diff=lfs merge=lfs -text
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+ *.tgz filter=lfs diff=lfs merge=lfs -text
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+ *.wasm filter=lfs diff=lfs merge=lfs -text
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+ *.xz filter=lfs diff=lfs merge=lfs -text
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+ *.zip filter=lfs diff=lfs merge=lfs -text
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+ *.zst filter=lfs diff=lfs merge=lfs -text
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+ *tfevents* filter=lfs diff=lfs merge=lfs -text
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+ # Audio files - uncompressed
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+ *.pcm filter=lfs diff=lfs merge=lfs -text
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+ *.sam filter=lfs diff=lfs merge=lfs -text
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+ *.raw filter=lfs diff=lfs merge=lfs -text
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+ # Audio files - compressed
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+ *.aac filter=lfs diff=lfs merge=lfs -text
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+ *.flac filter=lfs diff=lfs merge=lfs -text
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+ *.mp3 filter=lfs diff=lfs merge=lfs -text
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+ *.ogg filter=lfs diff=lfs merge=lfs -text
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+ *.wav filter=lfs diff=lfs merge=lfs -text
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+ # Image files - uncompressed
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+ *.bmp filter=lfs diff=lfs merge=lfs -text
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+ *.gif filter=lfs diff=lfs merge=lfs -text
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+ *.png filter=lfs diff=lfs merge=lfs -text
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+ *.tiff filter=lfs diff=lfs merge=lfs -text
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+ # Image files - compressed
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+ *.jpg filter=lfs diff=lfs merge=lfs -text
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+ *.jpeg filter=lfs diff=lfs merge=lfs -text
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+ *.webp filter=lfs diff=lfs merge=lfs -text
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+ # Video files - compressed
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+ *.mp4 filter=lfs diff=lfs merge=lfs -text
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+ *.webm filter=lfs diff=lfs merge=lfs -text
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+ lithosim_path/opc_via_test.csv filter=lfs diff=lfs merge=lfs -text
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+ lithosim_path/opc_via_train_val.csv filter=lfs diff=lfs merge=lfs -text
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+ lithosim_path/metal_test.csv filter=lfs diff=lfs merge=lfs -text
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+ lithosim_path/metal_train_val.csv filter=lfs diff=lfs merge=lfs -text
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+ lithosim_path/opc_metal_test.csv filter=lfs diff=lfs merge=lfs -text
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+ lithosim_path/opc_metal_train_val.csv filter=lfs diff=lfs merge=lfs -text
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+ lithosim_path/via_test.csv filter=lfs diff=lfs merge=lfs -text
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+ lithosim_path/via_train_val.csv filter=lfs diff=lfs merge=lfs -text
README.md ADDED
@@ -0,0 +1,52 @@
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
1
+ ---
2
+ configs:
3
+ - config_name: metal
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+ data_files:
5
+ - split: train
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+ path: lithosim_path/metal_train_val.csv
7
+ - split: test
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+ path: lithosim_path/metal_test.csv
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+ - config_name: opc_metal
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+ data_files:
11
+ - split: train
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+ path: lithosim_path/opc_metal_train_val.csv
13
+ - split: test
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+ path: lithosim_path/opc_metal_test.csv
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+ - config_name: via
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+ data_files:
17
+ - split: train
18
+ path: lithosim_path/via_train_val.csv
19
+ - split: test
20
+ path: lithosim_path/via_test.csv
21
+ - config_name: opc_via
22
+ data_files:
23
+ - split: train
24
+ path: lithosim_path/opc_via_train_val.csv
25
+ - split: test
26
+ path: lithosim_path/opc_via_test.csv
27
+ - config_name: ood
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+ data_files:
29
+ - split: test
30
+ path: lithosim_path/ood.csv
31
+ license: afl-3.0
32
+ language:
33
+ - en
34
+ tags:
35
+ - code
36
+ pretty_name: litho
37
+ size_categories:
38
+ - 1B<n<10B
39
+ task_categories:
40
+ - feature-extraction
41
+ ---
42
+
43
+ The benchmark of "LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing"
44
+
45
+ The corresponding GitHub repo can be found at https://dw-hongquan.github.io/LithoSim/
46
+
47
+ ## Data Construction
48
+
49
+ - 4 in-distributed dataset (OPC_Metal/Metal/OPC_Via/Via).
50
+ - 1 out-of-distribution (OOD) dataset.
51
+ - Each main dataset has a train_val and a test folder with compressed data file.
52
+ - Each set of data contains a source_simple.src description of the source, a layout.png, a mask.png, and a number of RI under different process variations.
gen_litho_path.py ADDED
@@ -0,0 +1,35 @@
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
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+ '''
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+ Author: Hongquan
3
+ Date: Apr. 02, 2025
4
+ '''
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+
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+ import os
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+
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+ def gen_litho_path(
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+ dataset_dir: str = './lithosim/opc_metal/train_val',
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+ txt_path: str = './lithosim/opc_metal_train_val.txt'
11
+ ):
12
+ dose_list = [-0.12, -0.1, -0.08, -0.06, -0.04, -0.02, 0, 0.02, 0.04, 0.06, 0.08, 0.1, 0.12]
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+ defocus_list = [-80, -40, 0, 40, 80]
14
+
15
+ with open(txt_path, 'w'):
16
+ print(f'Creat {txt_path}')
17
+
18
+ with open(txt_path, 'a') as file:
19
+ for sub_name in os.listdir(dataset_dir):
20
+ sub_dir = os.path.join(dataset_dir, sub_name)
21
+ source = os.path.join(sub_dir, 'source_simple.src')
22
+ mask = os.path.join(sub_dir, 'mask.png')
23
+
24
+ if not (os.path.exists(source) and os.path.exists(mask)):
25
+ continue
26
+
27
+ for dose in dose_list:
28
+ for defocus in defocus_list:
29
+ resist_name = f'RI_dose_{dose}_defocus_{defocus}.png'
30
+ resist = os.path.join(sub_dir, resist_name)
31
+
32
+ if os.path.exists(resist):
33
+ new_line = f'{source} {mask} {dose} {defocus} {resist}\n'
34
+ file.write(new_line)
35
+ print(new_line, end='')
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