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| will help mit opencourseware continue to |
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| to make a donation or to view additional |
| materials from hundreds of mit courses |
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| materials from hundreds of mit courses |
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| align:start position:0% |
| materials from hundreds of mit courses |
| visit mit opencourseware at ocw.mit.edu |
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| |
| good morning everyone |
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| align:start position:0% |
| good morning everyone |
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| good morning everyone |
| good evening in singapore |
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| align:start position:0% |
| good evening in singapore |
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| good evening in singapore |
| where is everyone |
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| i think they're on the way we'll be here |
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| i think they're on the way we'll be here |
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| i think they're on the way we'll be here |
| in a minute okay |
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| align:start position:0% |
| in a minute okay |
| |
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| align:start position:0% |
| in a minute okay |
| i'm gonna |
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| i'm gonna |
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| i'm gonna |
| go ahead and |
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| go ahead and |
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| go ahead and |
| uh start what i wanted to do is uh i |
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| uh start what i wanted to do is uh i |
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| uh start what i wanted to do is uh i |
| sent a message around about these team |
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| sent a message around about these team |
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| sent a message around about these team |
| guidelines so |
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| guidelines so |
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| guidelines so |
| our team project guidelines so i'm not |
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| our team project guidelines so i'm not |
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| our team project guidelines so i'm not |
| going to go in great detail through |
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| going to go in great detail through |
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| going to go in great detail through |
| these slides hopefully everybody is well |
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| these slides hopefully everybody is well |
| |
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| these slides hopefully everybody is well |
| on the way towards identifying a team |
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| align:start position:0% |
| on the way towards identifying a team |
| |
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| align:start position:0% |
| on the way towards identifying a team |
| but i wanted to go quickly through this |
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| align:start position:0% |
| but i wanted to go quickly through this |
| |
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| align:start position:0% |
| but i wanted to go quickly through this |
| and then answer any questions you may |
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| and then answer any questions you may |
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| and then answer any questions you may |
| have on the on the team projects |
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| have on the on the team projects |
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| have on the on the team projects |
| a quick reminder that the team projects |
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| a quick reminder that the team projects |
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| a quick reminder that the team projects |
| are about 20 |
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| are about 20 |
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| are about 20 |
| uh of the grade so they are an important |
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| uh of the grade so they are an important |
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| uh of the grade so they are an important |
| part of this |
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| part of this |
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| part of this |
| and the basic expectation is this is |
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| and the basic expectation is this is |
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| and the basic expectation is this is |
| where you get a chance to dive deep into |
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| where you get a chance to dive deep into |
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| where you get a chance to dive deep into |
| the analysis |
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| the analysis |
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| the analysis |
| and exercising and some of the kinds of |
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| and exercising and some of the kinds of |
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| and exercising and some of the kinds of |
| tools and approaches we've been talking |
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| tools and approaches we've been talking |
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| tools and approaches we've been talking |
| about with a set of data |
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| about with a set of data |
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| about with a set of data |
| our hope is that you can find data |
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| our hope is that you can find data |
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| our hope is that you can find data |
| yourself |
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| through the various members of the class |
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| through the various members of the class |
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| through the various members of the class |
| i think |
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| i think |
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| i think |
| in one of the earlier problem sets we |
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| in one of the earlier problem sets we |
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| in one of the earlier problem sets we |
| asked for |
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| asked for |
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| asked for |
| your experiences perhaps with some past |
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| your experiences perhaps with some past |
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| your experiences perhaps with some past |
| data i think there's plenty of data |
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| data i think there's plenty of data |
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| data i think there's plenty of data |
| around |
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| around |
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| around |
| if you are not able to tap into some |
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| if you are not able to tap into some |
| |
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| if you are not able to tap into some |
| past data you you or colleagues have |
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| past data you you or colleagues have |
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| past data you you or colleagues have |
| generated in the lab in a previous job |
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| generated in the lab in a previous job |
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| generated in the lab in a previous job |
| that you can share |
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| that you can share |
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| that you can share |
| or whatever you can also tap into the |
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| align:start position:0% |
| or whatever you can also tap into the |
| |
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| align:start position:0% |
| or whatever you can also tap into the |
| literature |
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| literature |
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| literature |
| so if you find data in the literature |
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| so if you find data in the literature |
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| so if you find data in the literature |
| that is perfectly fine as well |
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| align:start position:0% |
| that is perfectly fine as well |
| |
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| that is perfectly fine as well |
| um and then in a few cases we actually |
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| um and then in a few cases we actually |
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| um and then in a few cases we actually |
| have some data from our own |
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| have some data from our own |
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| have some data from our own |
| experimentation |
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| experimentation |
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| experimentation |
| and research so if you're really stuck |
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| and research so if you're really stuck |
| |
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| and research so if you're really stuck |
| uh let me know or let hayden know and we |
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| uh let me know or let hayden know and we |
| |
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| align:start position:0% |
| uh let me know or let hayden know and we |
| can try to connect you up to something |
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| i've listed a few topic areas i don't |
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| i've listed a few topic areas i don't |
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| i've listed a few topic areas i don't |
| want these to be |
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| want these to be |
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| want these to be |
| limiting but i mean these are the main |
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| limiting but i mean these are the main |
| |
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| limiting but i mean these are the main |
| main kinds of topics we've been dealing |
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| main kinds of topics we've been dealing |
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| main kinds of topics we've been dealing |
| with in the class things like process |
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| with in the class things like process |
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| with in the class things like process |
| diagnosis looking at the data to detect |
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| diagnosis looking at the data to detect |
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| diagnosis looking at the data to detect |
| uh problems |
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| uh problems |
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| uh problems |
| ways of optimizing or improving the |
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| ways of optimizing or improving the |
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| ways of optimizing or improving the |
| process through |
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| process through |
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| process through |
| design of experiments optimization and |
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| design of experiments optimization and |
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| design of experiments optimization and |
| so on and then some other sort of |
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| so on and then some other sort of |
| |
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| so on and then some other sort of |
| advanced applications things like |
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| advanced applications things like |
| |
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| advanced applications things like |
| nested variants |
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| nested variants |
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| nested variants |
| some of the spatial yield modeling |
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| some of the spatial yield modeling |
| |
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| some of the spatial yield modeling |
| that sort of thing |
|
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| |
| so i think it works well to have three |
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| so i think it works well to have three |
| |
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| so i think it works well to have three |
| or even four members in the team so the |
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| or even four members in the team so the |
| |
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| or even four members in the team so the |
| goal is |
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| goal is |
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| goal is |
| have a fairly rich data set and have |
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| have a fairly rich data set and have |
| |
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| align:start position:0% |
| have a fairly rich data set and have |
| multiple members of the team applying |
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| multiple members of the team applying |
| |
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| multiple members of the team applying |
| different kinds of analyses to the |
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| different kinds of analyses to the |
| |
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| different kinds of analyses to the |
| problem |
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| problem |
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| problem |
| okay so |
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| okay so |
| |
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| align:start position:0% |
| okay so |
| i think it does work where |
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| i think it does work where |
| |
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| align:start position:0% |
| i think it does work where |
| you're able to identify contributions |
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| you're able to identify contributions |
| |
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| you're able to identify contributions |
| from each of the |
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| from each of the |
| |
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| align:start position:0% |
| from each of the |
| each of the team members but the whole |
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| align:start position:0% |
| each of the team members but the whole |
| |
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| align:start position:0% |
| each of the team members but the whole |
| point of this is is actually |
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| align:start position:0% |
| point of this is is actually |
| |
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| align:start position:0% |
| point of this is is actually |
| you know to be able to |
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| you know to be able to |
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| align:start position:0% |
| you know to be able to |
| pick over the data |
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| align:start position:0% |
| pick over the data |
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| align:start position:0% |
| pick over the data |
| talk about the data |
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| align:start position:0% |
| talk about the data |
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| align:start position:0% |
| talk about the data |
| talk about your approach to |
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| align:start position:0% |
| talk about your approach to |
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| align:start position:0% |
| talk about your approach to |
| analysis |
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| analysis |
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| analysis |
| and looking at the problem with your |
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| and looking at the problem with your |
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| align:start position:0% |
| and looking at the problem with your |
| teammates |
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| teammates |
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| teammates |
| thursday the project proposal is due |
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| thursday the project proposal is due |
| |
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| thursday the project proposal is due |
| this is just one or two pages describing |
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| this is just one or two pages describing |
| |
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| this is just one or two pages describing |
| the basic data the basic |
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| the basic data the basic |
| |
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| the basic data the basic |
| problem in your plan for attack what |
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| problem in your plan for attack what |
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| problem in your plan for attack what |
| kinds of analyses you hope to do and of |
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| kinds of analyses you hope to do and of |
| |
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| align:start position:0% |
| kinds of analyses you hope to do and of |
| course list who your team members are |
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| align:start position:0% |
| course list who your team members are |
| |
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| align:start position:0% |
| course list who your team members are |
| and what their roles are |
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| and what their roles are |
| |
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| and what their roles are |
| the goal then is over the coming week |
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| the goal then is over the coming week |
| |
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| the goal then is over the coming week |
| and maybe even starting |
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| and maybe even starting |
| |
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| and maybe even starting |
| perhaps even after class for for folks |
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| perhaps even after class for for folks |
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| perhaps even after class for for folks |
| in singapore |
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| in singapore |
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| in singapore |
| on thursday certainly on tuesday |
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| on thursday certainly on tuesday |
| |
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| on thursday certainly on tuesday |
| to have a |
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| to have a |
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| to have a |
| a chance to meet with me |
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| a chance to meet with me |
| |
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| a chance to meet with me |
| or dave if he's available |
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| align:start position:0% |
| or dave if he's available |
| |
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| align:start position:0% |
| or dave if he's available |
| to basically go over your plan |
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| align:start position:0% |
| to basically go over your plan |
| |
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| align:start position:0% |
| to basically go over your plan |
| and your analysis so far if you're if |
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| align:start position:0% |
| and your analysis so far if you're if |
| |
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| align:start position:0% |
| and your analysis so far if you're if |
| you're part way through it so we'll need |
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| align:start position:0% |
| you're part way through it so we'll need |
| |
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| align:start position:0% |
| you're part way through it so we'll need |
| to do that by video conference with uh |
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| align:start position:0% |
| to do that by video conference with uh |
| |
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| align:start position:0% |
| to do that by video conference with uh |
| with folks in singapore if we do it |
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| align:start position:0% |
| with folks in singapore if we do it |
| |
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| align:start position:0% |
| with folks in singapore if we do it |
| right after class we can probably |
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| align:start position:0% |
| right after class we can probably |
| |
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| align:start position:0% |
| right after class we can probably |
| try to arrange |
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| align:start position:0% |
| try to arrange |
| |
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| align:start position:0% |
| try to arrange |
| this facility otherwise we'll use the |
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| align:start position:0% |
| this facility otherwise we'll use the |
| |
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| align:start position:0% |
| this facility otherwise we'll use the |
| conference room |
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| align:start position:0% |
| conference room |
| |
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| align:start position:0% |
| conference room |
| near the |
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| near the |
| |
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| align:start position:0% |
| near the |
| the |
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| the |
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| align:start position:0% |
| the |
| sma |
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| align:start position:0% |
| sma |
| |
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| align:start position:0% |
| sma |
| your sma offices |
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| align:start position:0% |
| your sma offices |
| |
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| align:start position:0% |
| your sma offices |
| then the expectations are two parts |
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| align:start position:0% |
| then the expectations are two parts |
| |
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| align:start position:0% |
| then the expectations are two parts |
| there'll be a group presentation |
|
|
| align:start position:0% |
| there'll be a group presentation |
| |
|
|
| align:start position:0% |
| there'll be a group presentation |
| by the way not necessarily every single |
|
|
| align:start position:0% |
| by the way not necessarily every single |
| |
|
|
| align:start position:0% |
| by the way not necessarily every single |
| member of your team needs to |
|
|
| align:start position:0% |
| member of your team needs to |
| |
|
|
| align:start position:0% |
| member of your team needs to |
| present part of the presentation trying |
|
|
| align:start position:0% |
| present part of the presentation trying |
| |
|
|
| align:start position:0% |
| present part of the presentation trying |
| to have four team members in a 15-minute |
|
|
| align:start position:0% |
| to have four team members in a 15-minute |
| |
|
|
| align:start position:0% |
| to have four team members in a 15-minute |
| chunk |
|
|
| align:start position:0% |
| chunk |
| |
|
|
| align:start position:0% |
| chunk |
| often can be kind of a kind of a |
|
|
| align:start position:0% |
| often can be kind of a kind of a |
| |
|
|
| align:start position:0% |
| often can be kind of a kind of a |
| coordination mess so as a team you need |
|
|
| align:start position:0% |
| coordination mess so as a team you need |
| |
|
|
| align:start position:0% |
| coordination mess so as a team you need |
| to put together a presentation |
|
|
| align:start position:0% |
| to put together a presentation |
| |
|
|
| align:start position:0% |
| to put together a presentation |
| and have one or maybe two people uh most |
|
|
| align:start position:0% |
| and have one or maybe two people uh most |
| |
|
|
| align:start position:0% |
| and have one or maybe two people uh most |
| likely presenting uh some of those |
|
|
| align:start position:0% |
| likely presenting uh some of those |
| |
|
|
| align:start position:0% |
| likely presenting uh some of those |
| results and then at the end of that week |
|
|
| align:start position:0% |
| results and then at the end of that week |
| |
|
|
| align:start position:0% |
| results and then at the end of that week |
| on friday uh may 16th which is the |
|
|
| align:start position:0% |
| on friday uh may 16th which is the |
| |
|
|
| align:start position:0% |
| on friday uh may 16th which is the |
| the end of the term given that we do not |
|
|
| align:start position:0% |
| the end of the term given that we do not |
| |
|
|
| align:start position:0% |
| the end of the term given that we do not |
| have a final exam |
|
|
| align:start position:0% |
| have a final exam |
| |
|
|
| align:start position:0% |
| have a final exam |
| a single shared group report |
|
|
| align:start position:0% |
| a single shared group report |
| |
|
|
| align:start position:0% |
| a single shared group report |
| needs to be submitted |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| these are just some example example |
|
|
| align:start position:0% |
| these are just some example example |
| |
|
|
| align:start position:0% |
| these are just some example example |
| topics i'm not sure if those have been |
|
|
| align:start position:0% |
| topics i'm not sure if those have been |
| |
|
|
| align:start position:0% |
| topics i'm not sure if those have been |
| drawn from |
|
|
| align:start position:0% |
| drawn from |
| |
|
|
| align:start position:0% |
| drawn from |
| past semesters or not |
|
|
| align:start position:0% |
| past semesters or not |
| |
|
|
| align:start position:0% |
| past semesters or not |
| uh here's some additional kinds of |
|
|
| align:start position:0% |
| uh here's some additional kinds of |
| |
|
|
| align:start position:0% |
| uh here's some additional kinds of |
| suggestions that |
|
|
| align:start position:0% |
| suggestions that |
| |
|
|
| align:start position:0% |
| suggestions that |
| that that i mentioned kinds of analyses |
|
|
| align:start position:0% |
| that that i mentioned kinds of analyses |
| |
|
|
| align:start position:0% |
| that that i mentioned kinds of analyses |
| that might be of interest |
|
|
| align:start position:0% |
| that might be of interest |
| |
|
|
| align:start position:0% |
| that might be of interest |
| uh in the report these are some |
|
|
| align:start position:0% |
| uh in the report these are some |
| |
|
|
| align:start position:0% |
| uh in the report these are some |
| guidelines on what we'd like to see in |
|
|
| align:start position:0% |
| guidelines on what we'd like to see in |
| |
|
|
| align:start position:0% |
| guidelines on what we'd like to see in |
| the report one note here and i haven't |
|
|
| align:start position:0% |
| the report one note here and i haven't |
| |
|
|
| align:start position:0% |
| the report one note here and i haven't |
| posted it yet |
|
|
| align:start position:0% |
| posted it yet |
| |
|
|
| align:start position:0% |
| posted it yet |
| is whoops is we'd like to |
|
|
| align:start position:0% |
| is whoops is we'd like to |
| |
|
|
| align:start position:0% |
| is whoops is we'd like to |
| use a common |
|
|
| align:start position:0% |
| use a common |
| |
|
|
| align:start position:0% |
| use a common |
| template just for the formatting and |
|
|
| align:start position:0% |
| template just for the formatting and |
| |
|
|
| align:start position:0% |
| template just for the formatting and |
| guidelines and basically the ieee |
|
|
| align:start position:0% |
| guidelines and basically the ieee |
| |
|
|
| align:start position:0% |
| guidelines and basically the ieee |
| two-column format has worked really |
|
|
| align:start position:0% |
| two-column format has worked really |
| |
|
|
| align:start position:0% |
| two-column format has worked really |
| nicely we have word templates i think we |
|
|
| align:start position:0% |
| nicely we have word templates i think we |
| |
|
|
| align:start position:0% |
| nicely we have word templates i think we |
| even have latex templates if there's |
|
|
| align:start position:0% |
| even have latex templates if there's |
| |
|
|
| align:start position:0% |
| even have latex templates if there's |
| anybody who still uses latex |
|
|
| align:start position:0% |
| anybody who still uses latex |
| |
|
|
| align:start position:0% |
| anybody who still uses latex |
| i will post that |
|
|
| align:start position:0% |
| i will post that |
| |
|
|
| align:start position:0% |
| i will post that |
| that template |
|
|
| align:start position:0% |
| that template |
| |
|
|
| align:start position:0% |
| that template |
| on the web what's nice about that |
|
|
| align:start position:0% |
| on the web what's nice about that |
| |
|
|
| align:start position:0% |
| on the web what's nice about that |
| is we can actually then put together all |
|
|
| align:start position:0% |
| is we can actually then put together all |
| |
|
|
| align:start position:0% |
| is we can actually then put together all |
| of the written reports from the class |
|
|
| align:start position:0% |
| of the written reports from the class |
| |
|
|
| align:start position:0% |
| of the written reports from the class |
| into almost a little booklet and it's a |
|
|
| align:start position:0% |
| into almost a little booklet and it's a |
| |
|
|
| align:start position:0% |
| into almost a little booklet and it's a |
| it almost looks like a little a little |
|
|
| align:start position:0% |
| it almost looks like a little a little |
| |
|
|
| align:start position:0% |
| it almost looks like a little a little |
| mini |
|
|
| align:start position:0% |
| mini |
| |
|
|
| align:start position:0% |
| mini |
| uh journal or a little mini conference |
|
|
| align:start position:0% |
| uh journal or a little mini conference |
| |
|
|
| align:start position:0% |
| uh journal or a little mini conference |
| proceeding if you will |
|
|
| align:start position:0% |
| proceeding if you will |
| |
|
|
| align:start position:0% |
| proceeding if you will |
| with these |
|
|
| align:start position:0% |
| with these |
| |
|
|
| align:start position:0% |
| with these |
| these reports it also is a nice |
|
|
| align:start position:0% |
| these reports it also is a nice |
| |
|
|
| align:start position:0% |
| these reports it also is a nice |
| professional looking |
|
|
| align:start position:0% |
| professional looking |
| |
|
|
| align:start position:0% |
| professional looking |
| report so we'll distribute |
|
|
| align:start position:0% |
| report so we'll distribute |
| |
|
|
| align:start position:0% |
| report so we'll distribute |
| that as well |
|
|
| align:start position:0% |
| that as well |
| |
|
|
| align:start position:0% |
| that as well |
| so finally i just uh |
|
|
| align:start position:0% |
| so finally i just uh |
| |
|
|
| align:start position:0% |
| so finally i just uh |
| grabbed from the past two or three years |
|
|
| align:start position:0% |
| grabbed from the past two or three years |
| |
|
|
| align:start position:0% |
| grabbed from the past two or three years |
| some of the titles from some of the |
|
|
| align:start position:0% |
| some of the titles from some of the |
| |
|
|
| align:start position:0% |
| some of the titles from some of the |
| process |
|
|
| align:start position:0% |
| process |
| |
|
|
| align:start position:0% |
| process |
| uh or team report uh |
|
|
| align:start position:0% |
| uh or team report uh |
| |
|
|
| align:start position:0% |
| uh or team report uh |
| and presentations |
|
|
| align:start position:0% |
| and presentations |
| |
|
|
| align:start position:0% |
| and presentations |
| just to give you a little bit of a sense |
|
|
| align:start position:0% |
| just to give you a little bit of a sense |
| |
|
|
| align:start position:0% |
| just to give you a little bit of a sense |
| of the variety of of kinds of things |
|
|
| align:start position:0% |
| of the variety of of kinds of things |
| |
|
|
| align:start position:0% |
| of the variety of of kinds of things |
| that we saw |
|
|
| align:start position:0% |
| that we saw |
| |
|
|
| align:start position:0% |
| that we saw |
| so those might give you some idea by the |
|
|
| align:start position:0% |
| so those might give you some idea by the |
| |
|
|
| align:start position:0% |
| so those might give you some idea by the |
| way back in 2005 we we were more focused |
|
|
| align:start position:0% |
| way back in 2005 we we were more focused |
| |
|
|
| align:start position:0% |
| way back in 2005 we we were more focused |
| on like two-person projects or |
|
|
| align:start position:0% |
| on like two-person projects or |
| |
|
|
| align:start position:0% |
| on like two-person projects or |
| one-person projects |
|
|
| align:start position:0% |
| one-person projects |
| |
|
|
| align:start position:0% |
| one-person projects |
| uh and these were great reports but we |
|
|
| align:start position:0% |
| uh and these were great reports but we |
| |
|
|
| align:start position:0% |
| uh and these were great reports but we |
| did decide that uh |
|
|
| align:start position:0% |
| did decide that uh |
| |
|
|
| align:start position:0% |
| did decide that uh |
| sharing and interacting uh made made |
|
|
| align:start position:0% |
| sharing and interacting uh made made |
| |
|
|
| align:start position:0% |
| sharing and interacting uh made made |
| things uh |
|
|
| align:start position:0% |
| things uh |
| |
|
|
| align:start position:0% |
| things uh |
| a better learning experience for all so |
|
|
| align:start position:0% |
| a better learning experience for all so |
| |
|
|
| align:start position:0% |
| a better learning experience for all so |
| so with that let me open it up anybody |
|
|
| align:start position:0% |
| so with that let me open it up anybody |
| |
|
|
| align:start position:0% |
| so with that let me open it up anybody |
| have questions on how the team reports |
|
|
| align:start position:0% |
| have questions on how the team reports |
| |
|
|
| align:start position:0% |
| have questions on how the team reports |
| team projects team presentations need to |
|
|
| align:start position:0% |
| team projects team presentations need to |
| |
|
|
| align:start position:0% |
| team projects team presentations need to |
| go |
|
|
| align:start position:0% |
| go |
| |
|
|
| align:start position:0% |
| go |
| i'll try to break |
|
|
| align:start position:0% |
| i'll try to break |
| |
|
|
| align:start position:0% |
| i'll try to break |
| does pretty much everybody have a team |
|
|
| align:start position:0% |
| does pretty much everybody have a team |
| |
|
|
| align:start position:0% |
| does pretty much everybody have a team |
| in formation |
|
|
| align:start position:0% |
| in formation |
| |
|
|
| align:start position:0% |
| in formation |
| are there people who kind of are still |
|
|
| align:start position:0% |
| are there people who kind of are still |
| |
|
|
| align:start position:0% |
| are there people who kind of are still |
| looking for possible partners |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay one or two okay i'll try to break |
|
|
| align:start position:0% |
| okay one or two okay i'll try to break |
| |
|
|
| align:start position:0% |
| okay one or two okay i'll try to break |
| you know maybe five minutes earlier |
|
|
| align:start position:0% |
| you know maybe five minutes earlier |
| |
|
|
| align:start position:0% |
| you know maybe five minutes earlier |
| which may mean actually break on time um |
|
|
| align:start position:0% |
| which may mean actually break on time um |
| |
|
|
| align:start position:0% |
| which may mean actually break on time um |
| uh |
|
|
| align:start position:0% |
| uh |
| |
|
|
| align:start position:0% |
| uh |
| at the end of class so |
|
|
| align:start position:0% |
| at the end of class so |
| |
|
|
| align:start position:0% |
| at the end of class so |
| uh could be a little bit of a discussion |
|
|
| align:start position:0% |
| uh could be a little bit of a discussion |
| |
|
|
| align:start position:0% |
| uh could be a little bit of a discussion |
| while people are still face to face uh |
|
|
| align:start position:0% |
| while people are still face to face uh |
| |
|
|
| align:start position:0% |
| while people are still face to face uh |
| on that |
|
|
| align:start position:0% |
| on that |
| |
|
|
| align:start position:0% |
| on that |
| any other questions on that |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| professor yes |
|
|
| align:start position:0% |
| professor yes |
| |
|
|
| align:start position:0% |
| professor yes |
| um just now you mentioned um |
|
|
| align:start position:0% |
| um just now you mentioned um |
| |
|
|
| align:start position:0% |
| um just now you mentioned um |
| having a rich set of data |
|
|
| align:start position:0% |
| having a rich set of data |
| |
|
|
| align:start position:0% |
| having a rich set of data |
| so |
|
|
| align:start position:0% |
| so |
| |
|
|
| align:start position:0% |
| so |
| from my understanding we are supposed to |
|
|
| align:start position:0% |
| from my understanding we are supposed to |
| |
|
|
| align:start position:0% |
| from my understanding we are supposed to |
| do the experiments ourselves so i would |
|
|
| align:start position:0% |
| do the experiments ourselves so i would |
| |
|
|
| align:start position:0% |
| do the experiments ourselves so i would |
| like to know how |
|
|
| align:start position:0% |
| like to know how |
| |
|
|
| align:start position:0% |
| like to know how |
| big a set of data are you expecting |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| well |
|
|
| align:start position:0% |
| well |
| |
|
|
| align:start position:0% |
| well |
| i |
|
|
| align:start position:0% |
| i |
| |
|
|
| align:start position:0% |
| i |
| my expectation or |
|
|
| align:start position:0% |
| my expectation or |
| |
|
|
| align:start position:0% |
| my expectation or |
| minimal expectation i would say is more |
|
|
| align:start position:0% |
| minimal expectation i would say is more |
| |
|
|
| align:start position:0% |
| minimal expectation i would say is more |
| that you might be able to tap into data |
|
|
| align:start position:0% |
| that you might be able to tap into data |
| |
|
|
| align:start position:0% |
| that you might be able to tap into data |
| that has already previously been |
|
|
| align:start position:0% |
| that has already previously been |
| |
|
|
| align:start position:0% |
| that has already previously been |
| generated |
|
|
| align:start position:0% |
| generated |
| |
|
|
| align:start position:0% |
| generated |
| it's ambitious and i would applaud |
|
|
| align:start position:0% |
| it's ambitious and i would applaud |
| |
|
|
| align:start position:0% |
| it's ambitious and i would applaud |
| uh people wanting to go and generate |
|
|
| align:start position:0% |
| uh people wanting to go and generate |
| |
|
|
| align:start position:0% |
| uh people wanting to go and generate |
| additional data |
|
|
| align:start position:0% |
| additional data |
| |
|
|
| align:start position:0% |
| additional data |
| so we could certainly talk and depending |
|
|
| align:start position:0% |
| so we could certainly talk and depending |
| |
|
|
| align:start position:0% |
| so we could certainly talk and depending |
| on the data you have in mind but but |
|
|
| align:start position:0% |
| on the data you have in mind but but |
| |
|
|
| align:start position:0% |
| on the data you have in mind but but |
| what i mean by a rich set of data is |
|
|
| align:start position:0% |
| what i mean by a rich set of data is |
| |
|
|
| align:start position:0% |
| what i mean by a rich set of data is |
| something that will support |
|
|
| align:start position:0% |
| something that will support |
| |
|
|
| align:start position:0% |
| something that will support |
| enough of the kinds of analyses that |
|
|
| align:start position:0% |
| enough of the kinds of analyses that |
| |
|
|
| align:start position:0% |
| enough of the kinds of analyses that |
| we've been been talking about through |
|
|
| align:start position:0% |
| we've been been talking about through |
| |
|
|
| align:start position:0% |
| we've been been talking about through |
| through the term |
|
|
| align:start position:0% |
| through the term |
| |
|
|
| align:start position:0% |
| through the term |
| so if it's a doe it needs to be |
|
|
| align:start position:0% |
| so if it's a doe it needs to be |
| |
|
|
| align:start position:0% |
| so if it's a doe it needs to be |
| you know probably several parameters of |
|
|
| align:start position:0% |
| you know probably several parameters of |
| |
|
|
| align:start position:0% |
| you know probably several parameters of |
| input several parameters of output |
|
|
| align:start position:0% |
| input several parameters of output |
| |
|
|
| align:start position:0% |
| input several parameters of output |
| maybe you have some |
|
|
| align:start position:0% |
| maybe you have some |
| |
|
|
| align:start position:0% |
| maybe you have some |
| additional twist to it that's kind of |
|
|
| align:start position:0% |
| additional twist to it that's kind of |
| |
|
|
| align:start position:0% |
| additional twist to it that's kind of |
| interesting or or non-standard |
|
|
| align:start position:0% |
| interesting or or non-standard |
| |
|
|
| align:start position:0% |
| interesting or or non-standard |
| that included some |
|
|
| align:start position:0% |
| that included some |
| |
|
|
| align:start position:0% |
| that included some |
| some thorny issues in the data maybe |
|
|
| align:start position:0% |
| some thorny issues in the data maybe |
| |
|
|
| align:start position:0% |
| some thorny issues in the data maybe |
| it's an unbalanced design or an |
|
|
| align:start position:0% |
| it's an unbalanced design or an |
| |
|
|
| align:start position:0% |
| it's an unbalanced design or an |
| imperfect design and you have to try to |
|
|
| align:start position:0% |
| imperfect design and you have to try to |
| |
|
|
| align:start position:0% |
| imperfect design and you have to try to |
| try to accommodate that i'm i'm all i |
|
|
| align:start position:0% |
| try to accommodate that i'm i'm all i |
| |
|
|
| align:start position:0% |
| try to accommodate that i'm i'm all i |
| mean is is uh |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| you know |
|
|
| align:start position:0% |
| you know |
| |
|
|
| align:start position:0% |
| you know |
| enough data to do what you would like to |
|
|
| align:start position:0% |
| enough data to do what you would like to |
| |
|
|
| align:start position:0% |
| enough data to do what you would like to |
| propose |
|
|
| align:start position:0% |
| propose |
| |
|
|
| align:start position:0% |
| propose |
| to do and that that that we can talk |
|
|
| align:start position:0% |
| to do and that that that we can talk |
| |
|
|
| align:start position:0% |
| to do and that that that we can talk |
| about uh |
|
|
| align:start position:0% |
| about uh |
| |
|
|
| align:start position:0% |
| about uh |
| about finding acceptable |
|
|
| align:start position:0% |
| about finding acceptable |
| |
|
|
| align:start position:0% |
| about finding acceptable |
| so were you actually looking at going in |
|
|
| align:start position:0% |
| so were you actually looking at going in |
| |
|
|
| align:start position:0% |
| so were you actually looking at going in |
| and generating some data on a one of the |
|
|
| align:start position:0% |
| and generating some data on a one of the |
| |
|
|
| align:start position:0% |
| and generating some data on a one of the |
| processes or tools or equipment there |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| uh |
|
|
| align:start position:0% |
| uh |
| |
|
|
| align:start position:0% |
| uh |
| uh my girl haven't had a discussion yet |
|
|
| align:start position:0% |
| uh my girl haven't had a discussion yet |
| |
|
|
| align:start position:0% |
| uh my girl haven't had a discussion yet |
| um |
|
|
| align:start position:0% |
| um |
| |
|
|
| align:start position:0% |
| um |
| it's a requirement oh okay yeah so we |
|
|
| align:start position:0% |
| it's a requirement oh okay yeah so we |
| |
|
|
| align:start position:0% |
| it's a requirement oh okay yeah so we |
| can follow up with hayden |
|
|
| align:start position:0% |
| can follow up with hayden |
| |
|
|
| align:start position:0% |
| can follow up with hayden |
| on that i think you know bonding and |
|
|
| align:start position:0% |
| on that i think you know bonding and |
| |
|
|
| align:start position:0% |
| on that i think you know bonding and |
| that sort of thing would be great |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| so we won't be too ambitious it'll be |
|
|
| align:start position:0% |
| so we won't be too ambitious it'll be |
| |
|
|
| align:start position:0% |
| so we won't be too ambitious it'll be |
| doable |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay other questions |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| all kind of manufacturing processes |
|
|
| align:start position:0% |
| all kind of manufacturing processes |
| |
|
|
| align:start position:0% |
| all kind of manufacturing processes |
| but i have a |
|
|
| align:start position:0% |
| but i have a |
| |
|
|
| align:start position:0% |
| but i have a |
| past lab data |
|
|
| align:start position:0% |
| past lab data |
| |
|
|
| align:start position:0% |
| past lab data |
| from kind of material engineering |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| sure so the question was you know is is |
|
|
| align:start position:0% |
| sure so the question was you know is is |
| |
|
|
| align:start position:0% |
| sure so the question was you know is is |
| material engineering data |
|
|
| align:start position:0% |
| material engineering data |
| |
|
|
| align:start position:0% |
| material engineering data |
| mechanical pro processes mechanical |
|
|
| align:start position:0% |
| mechanical pro processes mechanical |
| |
|
|
| align:start position:0% |
| mechanical pro processes mechanical |
| properties |
|
|
| align:start position:0% |
| properties |
| |
|
|
| align:start position:0% |
| properties |
| is that okay and the answer is |
|
|
| align:start position:0% |
| is that okay and the answer is |
| |
|
|
| align:start position:0% |
| is that okay and the answer is |
| absolutely i mean if you look at some of |
|
|
| align:start position:0% |
| absolutely i mean if you look at some of |
| |
|
|
| align:start position:0% |
| absolutely i mean if you look at some of |
| these past |
|
|
| align:start position:0% |
| these past |
| |
|
|
| align:start position:0% |
| these past |
| projects you've got everything from you |
|
|
| align:start position:0% |
| projects you've got everything from you |
| |
|
|
| align:start position:0% |
| projects you've got everything from you |
| know some things that look kind of like |
|
|
| align:start position:0% |
| know some things that look kind of like |
| |
|
|
| align:start position:0% |
| know some things that look kind of like |
| semiconductor stuff laser diode it's not |
|
|
| align:start position:0% |
| semiconductor stuff laser diode it's not |
| |
|
|
| align:start position:0% |
| semiconductor stuff laser diode it's not |
| transistors but you have other things of |
|
|
| align:start position:0% |
| transistors but you have other things of |
| |
|
|
| align:start position:0% |
| transistors but you have other things of |
| of bending printed circuit boards sheet |
|
|
| align:start position:0% |
| of bending printed circuit boards sheet |
| |
|
|
| align:start position:0% |
| of bending printed circuit boards sheet |
| metal blanket surface quality and |
|
|
| align:start position:0% |
| metal blanket surface quality and |
| |
|
|
| align:start position:0% |
| metal blanket surface quality and |
| milling |
|
|
| align:start position:0% |
| milling |
| |
|
|
| align:start position:0% |
| milling |
| all kinds this is sort of general |
|
|
| align:start position:0% |
| all kinds this is sort of general |
| |
|
|
| align:start position:0% |
| all kinds this is sort of general |
| general manufacturing |
|
|
| align:start position:0% |
| general manufacturing |
| |
|
|
| align:start position:0% |
| general manufacturing |
| and general processes |
|
|
| align:start position:0% |
| and general processes |
| |
|
|
| align:start position:0% |
| and general processes |
| so that would be no problem at all yeah |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| yeah |
|
|
| align:start position:0% |
| yeah |
| |
|
|
| align:start position:0% |
| yeah |
| can you post like one of the reports on |
|
|
| align:start position:0% |
| can you post like one of the reports on |
| |
|
|
| align:start position:0% |
| can you post like one of the reports on |
| stanley so you can take a look |
|
|
| align:start position:0% |
| stanley so you can take a look |
| |
|
|
| align:start position:0% |
| stanley so you can take a look |
| uh yeah well i think what we've done in |
|
|
| align:start position:0% |
| uh yeah well i think what we've done in |
| |
|
|
| align:start position:0% |
| uh yeah well i think what we've done in |
| the past is put up some example some of |
|
|
| align:start position:0% |
| the past is put up some example some of |
| |
|
|
| align:start position:0% |
| the past is put up some example some of |
| the prior year reports we haven't posted |
|
|
| align:start position:0% |
| the prior year reports we haven't posted |
| |
|
|
| align:start position:0% |
| the prior year reports we haven't posted |
| those yet but i'll try to do that today |
|
|
| align:start position:0% |
| those yet but i'll try to do that today |
| |
|
|
| align:start position:0% |
| those yet but i'll try to do that today |
| great thank you |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay any other questions |
|
|
| align:start position:0% |
| okay any other questions |
| |
|
|
| align:start position:0% |
| okay any other questions |
| all right let me switch here |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| so |
|
|
| align:start position:0% |
| so |
| |
|
|
| align:start position:0% |
| so |
| again what we're doing now is sort of |
|
|
| align:start position:0% |
| again what we're doing now is sort of |
| |
|
|
| align:start position:0% |
| again what we're doing now is sort of |
| switching to some case studies there's |
|
|
| align:start position:0% |
| switching to some case studies there's |
| |
|
|
| align:start position:0% |
| switching to some case studies there's |
| still |
|
|
| align:start position:0% |
| still |
| |
|
|
| align:start position:0% |
| still |
| perhaps uh in a few of the lectures some |
|
|
| align:start position:0% |
| perhaps uh in a few of the lectures some |
| |
|
|
| align:start position:0% |
| perhaps uh in a few of the lectures some |
| new material if you will coming along |
|
|
| align:start position:0% |
| new material if you will coming along |
| |
|
|
| align:start position:0% |
| new material if you will coming along |
| in in this case study the first case |
|
|
| align:start position:0% |
| in in this case study the first case |
| |
|
|
| align:start position:0% |
| in in this case study the first case |
| study |
|
|
| align:start position:0% |
| study |
| |
|
|
| align:start position:0% |
| study |
| uh i don't think there's actually that |
|
|
| align:start position:0% |
| uh i don't think there's actually that |
| |
|
|
| align:start position:0% |
| uh i don't think there's actually that |
| much new in terms of uh |
|
|
| align:start position:0% |
| much new in terms of uh |
| |
|
|
| align:start position:0% |
| much new in terms of uh |
| methodologies and so on i just think |
|
|
| align:start position:0% |
| methodologies and so on i just think |
| |
|
|
| align:start position:0% |
| methodologies and so on i just think |
| this is a nice example though a little |
|
|
| align:start position:0% |
| this is a nice example though a little |
| |
|
|
| align:start position:0% |
| this is a nice example though a little |
| dated now of a fairly |
|
|
| align:start position:0% |
| dated now of a fairly |
| |
|
|
| align:start position:0% |
| dated now of a fairly |
| straightforward but thorough application |
|
|
| align:start position:0% |
| straightforward but thorough application |
| |
|
|
| align:start position:0% |
| straightforward but thorough application |
| of design of experiments and response |
|
|
| align:start position:0% |
| of design of experiments and response |
| |
|
|
| align:start position:0% |
| of design of experiments and response |
| surface modeling |
|
|
| align:start position:0% |
| surface modeling |
| |
|
|
| align:start position:0% |
| surface modeling |
| so i also by the way posted |
|
|
| align:start position:0% |
| so i also by the way posted |
| |
|
|
| align:start position:0% |
| so i also by the way posted |
| the paper |
|
|
| align:start position:0% |
| the paper |
| |
|
|
| align:start position:0% |
| the paper |
| for |
|
|
| align:start position:0% |
| for |
| |
|
|
| align:start position:0% |
| for |
| this case study on the site as well it's |
|
|
| align:start position:0% |
| this case study on the site as well it's |
| |
|
|
| align:start position:0% |
| this case study on the site as well it's |
| down in the reading section that goes |
|
|
| align:start position:0% |
| down in the reading section that goes |
| |
|
|
| align:start position:0% |
| down in the reading section that goes |
| readings that goes with the lecture |
|
|
| align:start position:0% |
| readings that goes with the lecture |
| |
|
|
| align:start position:0% |
| readings that goes with the lecture |
| so you know you'll have to go and pop |
|
|
| align:start position:0% |
| so you know you'll have to go and pop |
| |
|
|
| align:start position:0% |
| so you know you'll have to go and pop |
| off this |
|
|
| align:start position:0% |
| off this |
| |
|
|
| align:start position:0% |
| off this |
| what is it eight or nine page |
|
|
| align:start position:0% |
| what is it eight or nine page |
| |
|
|
| align:start position:0% |
| what is it eight or nine page |
| paper |
|
|
| align:start position:0% |
| paper |
| |
|
|
| align:start position:0% |
| paper |
| as well i should mention some of the |
|
|
| align:start position:0% |
| as well i should mention some of the |
| |
|
|
| align:start position:0% |
| as well i should mention some of the |
| other case studies will also have papers |
|
|
| align:start position:0% |
| other case studies will also have papers |
| |
|
|
| align:start position:0% |
| other case studies will also have papers |
| from the literature |
|
|
| align:start position:0% |
| from the literature |
| |
|
|
| align:start position:0% |
| from the literature |
| for you to grab |
|
|
| align:start position:0% |
| for you to grab |
| |
|
|
| align:start position:0% |
| for you to grab |
| and read |
|
|
| align:start position:0% |
| and read |
| |
|
|
| align:start position:0% |
| and read |
| so this case study comes from |
|
|
| align:start position:0% |
| so this case study comes from |
| |
|
|
| align:start position:0% |
| so this case study comes from |
| semiconductor manufacturing |
|
|
| align:start position:0% |
| semiconductor manufacturing |
| |
|
|
| align:start position:0% |
| semiconductor manufacturing |
| it's a little dated now it goes back to |
|
|
| align:start position:0% |
| it's a little dated now it goes back to |
| |
|
|
| align:start position:0% |
| it's a little dated now it goes back to |
|
|
| align:start position:0% |
| |
|
|
| align:start position:0% |
| but this was actually kind of just the |
|
|
| align:start position:0% |
| but this was actually kind of just the |
| |
|
|
| align:start position:0% |
| but this was actually kind of just the |
| time when things like |
|
|
| align:start position:0% |
| time when things like |
| |
|
|
| align:start position:0% |
| time when things like |
| statistical process control more |
|
|
| align:start position:0% |
| statistical process control more |
| |
|
|
| align:start position:0% |
| statistical process control more |
| thorough design of experiments response |
|
|
| align:start position:0% |
| thorough design of experiments response |
| |
|
|
| align:start position:0% |
| thorough design of experiments response |
| service modeling was really finally |
|
|
| align:start position:0% |
| service modeling was really finally |
| |
|
|
| align:start position:0% |
| service modeling was really finally |
| hitting the semiconductor |
|
|
| align:start position:0% |
| hitting the semiconductor |
| |
|
|
| align:start position:0% |
| hitting the semiconductor |
| industry |
|
|
| align:start position:0% |
| industry |
| |
|
|
| align:start position:0% |
| industry |
| and really |
|
|
| align:start position:0% |
| and really |
| |
|
|
| align:start position:0% |
| and really |
| starting to be more |
|
|
| align:start position:0% |
| starting to be more |
| |
|
|
| align:start position:0% |
| starting to be more |
| widespread in |
|
|
| align:start position:0% |
| widespread in |
| |
|
|
| align:start position:0% |
| widespread in |
| adoption |
|
|
| align:start position:0% |
| adoption |
| |
|
|
| align:start position:0% |
| adoption |
| so i think this is a nice case it's a |
|
|
| align:start position:0% |
| so i think this is a nice case it's a |
| |
|
|
| align:start position:0% |
| so i think this is a nice case it's a |
| nice case study because they actually |
|
|
| align:start position:0% |
| nice case study because they actually |
| |
|
|
| align:start position:0% |
| nice case study because they actually |
| show us the |
|
|
| align:start position:0% |
| show us the |
| |
|
|
| align:start position:0% |
| show us the |
| experimental conditions the actual data |
|
|
| align:start position:0% |
| experimental conditions the actual data |
| |
|
|
| align:start position:0% |
| experimental conditions the actual data |
| and the actual models that they |
|
|
| align:start position:0% |
| and the actual models that they |
| |
|
|
| align:start position:0% |
| and the actual models that they |
| generated |
|
|
| align:start position:0% |
| generated |
| |
|
|
| align:start position:0% |
| generated |
| some of the things are a little dated |
|
|
| align:start position:0% |
| some of the things are a little dated |
| |
|
|
| align:start position:0% |
| some of the things are a little dated |
| for example they talk about |
|
|
| align:start position:0% |
| for example they talk about |
| |
|
|
| align:start position:0% |
| for example they talk about |
| millimeter wafers |
|
|
| align:start position:0% |
| millimeter wafers |
| |
|
|
| align:start position:0% |
| millimeter wafers |
| so this is five inch wafer processing |
|
|
| align:start position:0% |
| so this is five inch wafer processing |
| |
|
|
| align:start position:0% |
| so this is five inch wafer processing |
| which is kind of a weird size but it |
|
|
| align:start position:0% |
| which is kind of a weird size but it |
| |
|
|
| align:start position:0% |
| which is kind of a weird size but it |
| also you know we're up to 300 millimeter |
|
|
| align:start position:0% |
| also you know we're up to 300 millimeter |
| |
|
|
| align:start position:0% |
| also you know we're up to 300 millimeter |
| 12 inch wafers so it shows the march of |
|
|
| align:start position:0% |
| 12 inch wafers so it shows the march of |
| |
|
|
| align:start position:0% |
| 12 inch wafers so it shows the march of |
| progress of of technology however |
|
|
| align:start position:0% |
| progress of of technology however |
| |
|
|
| align:start position:0% |
| progress of of technology however |
| cbd and cvd of blanket tungsten is is |
|
|
| align:start position:0% |
| cbd and cvd of blanket tungsten is is |
| |
|
|
| align:start position:0% |
| cbd and cvd of blanket tungsten is is |
| still heavily used very integral so it's |
|
|
| align:start position:0% |
| still heavily used very integral so it's |
| |
|
|
| align:start position:0% |
| still heavily used very integral so it's |
| still a relevant process |
|
|
| align:start position:0% |
| still a relevant process |
| |
|
|
| align:start position:0% |
| still a relevant process |
| so what i want to do |
|
|
| align:start position:0% |
| so what i want to do |
| |
|
|
| align:start position:0% |
| so what i want to do |
| in looking at this case is go through |
|
|
| align:start position:0% |
| in looking at this case is go through |
| |
|
|
| align:start position:0% |
| in looking at this case is go through |
| talk a little bit about the bank |
|
|
| align:start position:0% |
| talk a little bit about the bank |
| |
|
|
| align:start position:0% |
| talk a little bit about the bank |
| background of tungsten cbd things that |
|
|
| align:start position:0% |
| background of tungsten cbd things that |
| |
|
|
| align:start position:0% |
| background of tungsten cbd things that |
| aren't in the paper but may give you a |
|
|
| align:start position:0% |
| aren't in the paper but may give you a |
| |
|
|
| align:start position:0% |
| aren't in the paper but may give you a |
| little bit of a |
|
|
| align:start position:0% |
| little bit of a |
| |
|
|
| align:start position:0% |
| little bit of a |
| a feel on the more of a feel on the |
|
|
| align:start position:0% |
| a feel on the more of a feel on the |
| |
|
|
| align:start position:0% |
| a feel on the more of a feel on the |
| process |
|
|
| align:start position:0% |
| process |
| |
|
|
| align:start position:0% |
| process |
| talk a little bit about the preliminary |
|
|
| align:start position:0% |
| talk a little bit about the preliminary |
| |
|
|
| align:start position:0% |
| talk a little bit about the preliminary |
| work that |
|
|
| align:start position:0% |
| work that |
| |
|
|
| align:start position:0% |
| work that |
| they did |
|
|
| align:start position:0% |
| they did |
| |
|
|
| align:start position:0% |
| they did |
| looking back at the prior paper that |
|
|
| align:start position:0% |
| looking back at the prior paper that |
| |
|
|
| align:start position:0% |
| looking back at the prior paper that |
| they |
|
|
| align:start position:0% |
| they |
| |
|
|
| align:start position:0% |
| they |
| that they cite |
|
|
| align:start position:0% |
| that they cite |
| |
|
|
| align:start position:0% |
| that they cite |
| and then we'll go through the |
|
|
| align:start position:0% |
| and then we'll go through the |
| |
|
|
| align:start position:0% |
| and then we'll go through the |
| experimental design that they performed |
|
|
| align:start position:0% |
| experimental design that they performed |
| |
|
|
| align:start position:0% |
| experimental design that they performed |
| to try to optimize |
|
|
| align:start position:0% |
| to try to optimize |
| |
|
|
| align:start position:0% |
| to try to optimize |
| this tungsten cbd process to understand |
|
|
| align:start position:0% |
| this tungsten cbd process to understand |
| |
|
|
| align:start position:0% |
| this tungsten cbd process to understand |
| it model it and then optimize it so |
|
|
| align:start position:0% |
| it model it and then optimize it so |
| |
|
|
| align:start position:0% |
| it model it and then optimize it so |
| we'll look at the data we'll do some rsm |
|
|
| align:start position:0% |
| we'll look at the data we'll do some rsm |
| |
|
|
| align:start position:0% |
| we'll look at the data we'll do some rsm |
| analysis or |
|
|
| align:start position:0% |
| analysis or |
| |
|
|
| align:start position:0% |
| analysis or |
| mostly looking at |
|
|
| align:start position:0% |
| mostly looking at |
| |
|
|
| align:start position:0% |
| mostly looking at |
| their analysis in the paper |
|
|
| align:start position:0% |
| their analysis in the paper |
| |
|
|
| align:start position:0% |
| their analysis in the paper |
| but |
|
|
| align:start position:0% |
| but |
| |
|
|
| align:start position:0% |
| but |
| assuming i have time at the end and i |
|
|
| align:start position:0% |
| assuming i have time at the end and i |
| |
|
|
| align:start position:0% |
| assuming i have time at the end and i |
| think i will |
|
|
| align:start position:0% |
| think i will |
| |
|
|
| align:start position:0% |
| think i will |
| i'll switch over and we'll we'll use |
|
|
| align:start position:0% |
| i'll switch over and we'll we'll use |
| |
|
|
| align:start position:0% |
| i'll switch over and we'll we'll use |
| play around with jump a little bit with |
|
|
| align:start position:0% |
| play around with jump a little bit with |
| |
|
|
| align:start position:0% |
| play around with jump a little bit with |
| that same data set and |
|
|
| align:start position:0% |
| that same data set and |
| |
|
|
| align:start position:0% |
| that same data set and |
| show you a few of the kinds of analyses |
|
|
| align:start position:0% |
| show you a few of the kinds of analyses |
| |
|
|
| align:start position:0% |
| show you a few of the kinds of analyses |
| that are possible |
|
|
| align:start position:0% |
| that are possible |
| |
|
|
| align:start position:0% |
| that are possible |
| with that tool |
|
|
| align:start position:0% |
| with that tool |
| |
|
|
| align:start position:0% |
| with that tool |
| both for |
|
|
| align:start position:0% |
| both for |
| |
|
|
| align:start position:0% |
| both for |
| regression some of the stepwise |
|
|
| align:start position:0% |
| regression some of the stepwise |
| |
|
|
| align:start position:0% |
| regression some of the stepwise |
| regression that's referred to |
|
|
| align:start position:0% |
| regression that's referred to |
| |
|
|
| align:start position:0% |
| regression that's referred to |
| in the paper and then some of the neat |
|
|
| align:start position:0% |
| in the paper and then some of the neat |
| |
|
|
| align:start position:0% |
| in the paper and then some of the neat |
| tools actually in the interactive |
|
|
| align:start position:0% |
| tools actually in the interactive |
| |
|
|
| align:start position:0% |
| tools actually in the interactive |
| capabilities of jump for for |
|
|
| align:start position:0% |
| capabilities of jump for for |
| |
|
|
| align:start position:0% |
| capabilities of jump for for |
| optimization |
|
|
| align:start position:0% |
| optimization |
| |
|
|
| align:start position:0% |
| optimization |
| now throughout this |
|
|
| align:start position:0% |
| now throughout this |
| |
|
|
| align:start position:0% |
| now throughout this |
| think a little bit about where you see |
|
|
| align:start position:0% |
| think a little bit about where you see |
| |
|
|
| align:start position:0% |
| think a little bit about where you see |
| weaknesses or alternative ideas or |
|
|
| align:start position:0% |
| weaknesses or alternative ideas or |
| |
|
|
| align:start position:0% |
| weaknesses or alternative ideas or |
| things like that because at the end i |
|
|
| align:start position:0% |
| things like that because at the end i |
| |
|
|
| align:start position:0% |
| things like that because at the end i |
| might ask what are some of your ideas of |
|
|
| align:start position:0% |
| might ask what are some of your ideas of |
| |
|
|
| align:start position:0% |
| might ask what are some of your ideas of |
| things you think might have been |
|
|
| align:start position:0% |
| things you think might have been |
| |
|
|
| align:start position:0% |
| things you think might have been |
| interesting |
|
|
| align:start position:0% |
| interesting |
| |
|
|
| align:start position:0% |
| interesting |
| uh or important to try or to improve on |
|
|
| align:start position:0% |
| uh or important to try or to improve on |
| |
|
|
| align:start position:0% |
| uh or important to try or to improve on |
| this so have that in mind what what |
|
|
| align:start position:0% |
| this so have that in mind what what |
| |
|
|
| align:start position:0% |
| this so have that in mind what what |
| where where do you think they did a good |
|
|
| align:start position:0% |
| where where do you think they did a good |
| |
|
|
| align:start position:0% |
| where where do you think they did a good |
| job what do you think they did a a |
|
|
| align:start position:0% |
| job what do you think they did a a |
| |
|
|
| align:start position:0% |
| job what do you think they did a a |
| weaker job what might you suggest and |
|
|
| align:start position:0% |
| weaker job what might you suggest and |
| |
|
|
| align:start position:0% |
| weaker job what might you suggest and |
| i'll ask you that question at the at the |
|
|
| align:start position:0% |
| i'll ask you that question at the at the |
| |
|
|
| align:start position:0% |
| i'll ask you that question at the at the |
| end okay |
|
|
| align:start position:0% |
| end okay |
| |
|
|
| align:start position:0% |
| end okay |
| so let me talk a little bit about |
|
|
| align:start position:0% |
| so let me talk a little bit about |
| |
|
|
| align:start position:0% |
| so let me talk a little bit about |
| tungsten and in particular tungsten |
|
|
| align:start position:0% |
| tungsten and in particular tungsten |
| |
|
|
| align:start position:0% |
| tungsten and in particular tungsten |
| plugs |
|
|
| align:start position:0% |
| plugs |
| |
|
|
| align:start position:0% |
| plugs |
| so |
|
|
| align:start position:0% |
| so |
| |
|
|
| align:start position:0% |
| so |
| tungsten |
|
|
| align:start position:0% |
| tungsten |
| |
|
|
| align:start position:0% |
| tungsten |
| here is generally used as a conductor in |
|
|
| align:start position:0% |
| here is generally used as a conductor in |
| |
|
|
| align:start position:0% |
| here is generally used as a conductor in |
| semiconductor fabrication it's not a |
|
|
| align:start position:0% |
| semiconductor fabrication it's not a |
| |
|
|
| align:start position:0% |
| semiconductor fabrication it's not a |
| great conductor meaning it it's |
|
|
| align:start position:0% |
| great conductor meaning it it's |
| |
|
|
| align:start position:0% |
| great conductor meaning it it's |
| often a little bit higher resistivity |
|
|
| align:start position:0% |
| often a little bit higher resistivity |
| |
|
|
| align:start position:0% |
| often a little bit higher resistivity |
| than other metals like aluminum |
|
|
| align:start position:0% |
| than other metals like aluminum |
| |
|
|
| align:start position:0% |
| than other metals like aluminum |
| or |
|
|
| align:start position:0% |
| or |
| |
|
|
| align:start position:0% |
| or |
| or now copper |
|
|
| align:start position:0% |
| or now copper |
| |
|
|
| align:start position:0% |
| or now copper |
| it's |
|
|
| align:start position:0% |
| it's |
| |
|
|
| align:start position:0% |
| it's |
| continues to be heavily used for |
|
|
| align:start position:0% |
| continues to be heavily used for |
| |
|
|
| align:start position:0% |
| continues to be heavily used for |
| contacts and plugs |
|
|
| align:start position:0% |
| contacts and plugs |
| |
|
|
| align:start position:0% |
| contacts and plugs |
| so contacts are the holes that are |
|
|
| align:start position:0% |
| so contacts are the holes that are |
| |
|
|
| align:start position:0% |
| so contacts are the holes that are |
| drilled between or into |
|
|
| align:start position:0% |
| drilled between or into |
| |
|
|
| align:start position:0% |
| drilled between or into |
| an insulating layer from the first level |
|
|
| align:start position:0% |
| an insulating layer from the first level |
| |
|
|
| align:start position:0% |
| an insulating layer from the first level |
| of metal down to the underlying silicon |
|
|
| align:start position:0% |
| of metal down to the underlying silicon |
| |
|
|
| align:start position:0% |
| of metal down to the underlying silicon |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| plugs are the same idea but at other |
|
|
| align:start position:0% |
| plugs are the same idea but at other |
| |
|
|
| align:start position:0% |
| plugs are the same idea but at other |
| levels of interconnect so you would have |
|
|
| align:start position:0% |
| levels of interconnect so you would have |
| |
|
|
| align:start position:0% |
| levels of interconnect so you would have |
| a a plug |
|
|
| align:start position:0% |
| a a plug |
| |
|
|
| align:start position:0% |
| a a plug |
| from metal one to metal two or metal two |
|
|
| align:start position:0% |
| from metal one to metal two or metal two |
| |
|
|
| align:start position:0% |
| from metal one to metal two or metal two |
| to metal 3 and so on |
|
|
| align:start position:0% |
| to metal 3 and so on |
| |
|
|
| align:start position:0% |
| to metal 3 and so on |
| terminology is not completely uniform |
|
|
| align:start position:0% |
| terminology is not completely uniform |
| |
|
|
| align:start position:0% |
| terminology is not completely uniform |
| but that's that's |
|
|
| align:start position:0% |
| but that's that's |
| |
|
|
| align:start position:0% |
| but that's that's |
| that's the typical terminology |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| the examples drawn from from this paper |
|
|
| align:start position:0% |
| the examples drawn from from this paper |
| |
|
|
| align:start position:0% |
| the examples drawn from from this paper |
| they talk about tungsten plugs in |
|
|
| align:start position:0% |
| they talk about tungsten plugs in |
| |
|
|
| align:start position:0% |
| they talk about tungsten plugs in |
| conjunction with aluminum interconnect |
|
|
| align:start position:0% |
| conjunction with aluminum interconnect |
| |
|
|
| align:start position:0% |
| conjunction with aluminum interconnect |
| and they're actually mostly focused i |
|
|
| align:start position:0% |
| and they're actually mostly focused i |
| |
|
|
| align:start position:0% |
| and they're actually mostly focused i |
| think on tungsten between |
|
|
| align:start position:0% |
| think on tungsten between |
| |
|
|
| align:start position:0% |
| think on tungsten between |
| or tungsten contacts |
|
|
| align:start position:0% |
| or tungsten contacts |
| |
|
|
| align:start position:0% |
| or tungsten contacts |
| with the idea that in older technology |
|
|
| align:start position:0% |
| with the idea that in older technology |
| |
|
|
| align:start position:0% |
| with the idea that in older technology |
| in fact you didn't need to drill and |
|
|
| align:start position:0% |
| in fact you didn't need to drill and |
| |
|
|
| align:start position:0% |
| in fact you didn't need to drill and |
| form separate |
|
|
| align:start position:0% |
| form separate |
| |
|
|
| align:start position:0% |
| form separate |
| plugs between layers you could just |
|
|
| align:start position:0% |
| plugs between layers you could just |
| |
|
|
| align:start position:0% |
| plugs between layers you could just |
| allow say an aluminum deposition to go |
|
|
| align:start position:0% |
| allow say an aluminum deposition to go |
| |
|
|
| align:start position:0% |
| allow say an aluminum deposition to go |
| in and fill |
|
|
| align:start position:0% |
| in and fill |
| |
|
|
| align:start position:0% |
| in and fill |
| that layer and then |
|
|
| align:start position:0% |
| that layer and then |
| |
|
|
| align:start position:0% |
| that layer and then |
| etch off where you where you didn't want |
|
|
| align:start position:0% |
| etch off where you where you didn't want |
| |
|
|
| align:start position:0% |
| etch off where you where you didn't want |
| it |
|
|
| align:start position:0% |
| it |
| |
|
|
| align:start position:0% |
| it |
| with scaling it became pretty much |
|
|
| align:start position:0% |
| with scaling it became pretty much |
| |
|
|
| align:start position:0% |
| with scaling it became pretty much |
| essential to be able to form the plugs |
|
|
| align:start position:0% |
| essential to be able to form the plugs |
| |
|
|
| align:start position:0% |
| essential to be able to form the plugs |
| separately from the interconnect |
|
|
| align:start position:0% |
| separately from the interconnect |
| |
|
|
| align:start position:0% |
| separately from the interconnect |
| so |
|
|
| align:start position:0% |
| so |
| |
|
|
| align:start position:0% |
| so |
| then tungsten was used to fill fill |
|
|
| align:start position:0% |
| then tungsten was used to fill fill |
| |
|
|
| align:start position:0% |
| then tungsten was used to fill fill |
| those plugs between metal layers as well |
|
|
| align:start position:0% |
| those plugs between metal layers as well |
| |
|
|
| align:start position:0% |
| those plugs between metal layers as well |
| as we've gone to copper interconnect |
|
|
| align:start position:0% |
| as we've gone to copper interconnect |
| |
|
|
| align:start position:0% |
| as we've gone to copper interconnect |
| tungsten still appears |
|
|
| align:start position:0% |
| tungsten still appears |
| |
|
|
| align:start position:0% |
| tungsten still appears |
| in most uh advanced technologies now |
|
|
| align:start position:0% |
| in most uh advanced technologies now |
| |
|
|
| align:start position:0% |
| in most uh advanced technologies now |
| primarily just as the first level of of |
|
|
| align:start position:0% |
| primarily just as the first level of of |
| |
|
|
| align:start position:0% |
| primarily just as the first level of of |
| contact |
|
|
| align:start position:0% |
| contact |
| |
|
|
| align:start position:0% |
| contact |
| from a copper interconnect down to the |
|
|
| align:start position:0% |
| from a copper interconnect down to the |
| |
|
|
| align:start position:0% |
| from a copper interconnect down to the |
| silicon so it is still used |
|
|
| align:start position:0% |
| silicon so it is still used |
| |
|
|
| align:start position:0% |
| silicon so it is still used |
| and extensions where it may not purely |
|
|
| align:start position:0% |
| and extensions where it may not purely |
| |
|
|
| align:start position:0% |
| and extensions where it may not purely |
| be be tungsten plugs but it may also be |
|
|
| align:start position:0% |
| be be tungsten plugs but it may also be |
| |
|
|
| align:start position:0% |
| be be tungsten plugs but it may also be |
| in some cases |
|
|
| align:start position:0% |
| in some cases |
| |
|
|
| align:start position:0% |
| in some cases |
| some local |
|
|
| align:start position:0% |
| some local |
| |
|
|
| align:start position:0% |
| some local |
| some local interconnect |
|
|
| align:start position:0% |
| some local interconnect |
| |
|
|
| align:start position:0% |
| some local interconnect |
| so you can down very close to the |
|
|
| align:start position:0% |
| so you can down very close to the |
| |
|
|
| align:start position:0% |
| so you can down very close to the |
| silicon form little straps or other |
|
|
| align:start position:0% |
| silicon form little straps or other |
| |
|
|
| align:start position:0% |
| silicon form little straps or other |
| sorts of local tungsten based uh |
|
|
| align:start position:0% |
| sorts of local tungsten based uh |
| |
|
|
| align:start position:0% |
| sorts of local tungsten based uh |
| short very short run |
|
|
| align:start position:0% |
| short very short run |
| |
|
|
| align:start position:0% |
| short very short run |
| interconnect |
|
|
| align:start position:0% |
| interconnect |
| |
|
|
| align:start position:0% |
| interconnect |
| to form electrical connections |
|
|
| align:start position:0% |
| to form electrical connections |
| |
|
|
| align:start position:0% |
| to form electrical connections |
| now the important part of tungsten why |
|
|
| align:start position:0% |
| now the important part of tungsten why |
| |
|
|
| align:start position:0% |
| now the important part of tungsten why |
| it's used is that it's also |
|
|
| align:start position:0% |
| it's used is that it's also |
| |
|
|
| align:start position:0% |
| it's used is that it's also |
| can be |
|
|
| align:start position:0% |
| can be |
| |
|
|
| align:start position:0% |
| can be |
| conformally |
|
|
| align:start position:0% |
| conformally |
| |
|
|
| align:start position:0% |
| conformally |
| filled |
|
|
| align:start position:0% |
| filled |
| |
|
|
| align:start position:0% |
| filled |
| and can |
|
|
| align:start position:0% |
| and can |
| |
|
|
| align:start position:0% |
| and can |
| especially with uh chemical vapor |
|
|
| align:start position:0% |
| especially with uh chemical vapor |
| |
|
|
| align:start position:0% |
| especially with uh chemical vapor |
| deposition or plasma processing uh can |
|
|
| align:start position:0% |
| deposition or plasma processing uh can |
| |
|
|
| align:start position:0% |
| deposition or plasma processing uh can |
| fill fairly small holes |
|
|
| align:start position:0% |
| fill fairly small holes |
| |
|
|
| align:start position:0% |
| fill fairly small holes |
| so the basic idea |
|
|
| align:start position:0% |
| so the basic idea |
| |
|
|
| align:start position:0% |
| so the basic idea |
| or progression |
|
|
| align:start position:0% |
| or progression |
| |
|
|
| align:start position:0% |
| or progression |
| in a tungsten deposition |
|
|
| align:start position:0% |
| in a tungsten deposition |
| |
|
|
| align:start position:0% |
| in a tungsten deposition |
| is you primarily get |
|
|
| align:start position:0% |
| is you primarily get |
| |
|
|
| align:start position:0% |
| is you primarily get |
| conformal deposition so in time |
|
|
| align:start position:0% |
| conformal deposition so in time |
| |
|
|
| align:start position:0% |
| conformal deposition so in time |
| the |
|
|
| align:start position:0% |
| the |
| |
|
|
| align:start position:0% |
| the |
| gases |
|
|
| align:start position:0% |
| gases |
| |
|
|
| align:start position:0% |
| gases |
| that are that are present in the plasma |
|
|
| align:start position:0% |
| that are that are present in the plasma |
| |
|
|
| align:start position:0% |
| that are that are present in the plasma |
| chamber and reactor |
|
|
| align:start position:0% |
| chamber and reactor |
| |
|
|
| align:start position:0% |
| chamber and reactor |
| interface with the surface form |
|
|
| align:start position:0% |
| interface with the surface form |
| |
|
|
| align:start position:0% |
| interface with the surface form |
| reactions |
|
|
| align:start position:0% |
| reactions |
| |
|
|
| align:start position:0% |
| reactions |
| and basically build up in a conformal |
|
|
| align:start position:0% |
| and basically build up in a conformal |
| |
|
|
| align:start position:0% |
| and basically build up in a conformal |
| way to fill |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| fill the plug |
|
|
| align:start position:0% |
| fill the plug |
| |
|
|
| align:start position:0% |
| fill the plug |
| now you want to do this in a way that |
|
|
| align:start position:0% |
| now you want to do this in a way that |
| |
|
|
| align:start position:0% |
| now you want to do this in a way that |
| does not result in seams or |
|
|
| align:start position:0% |
| does not result in seams or |
| |
|
|
| align:start position:0% |
| does not result in seams or |
| or voids in the middle so that can be a |
|
|
| align:start position:0% |
| or voids in the middle so that can be a |
| |
|
|
| align:start position:0% |
| or voids in the middle so that can be a |
| little bit tricky but but that can be |
|
|
| align:start position:0% |
| little bit tricky but but that can be |
| |
|
|
| align:start position:0% |
| little bit tricky but but that can be |
| done in in such a way that one |
|
|
| align:start position:0% |
| done in in such a way that one |
| |
|
|
| align:start position:0% |
| done in in such a way that one |
| avoids those those plugs |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| now the way this paper uses tungsten |
|
|
| align:start position:0% |
| now the way this paper uses tungsten |
| |
|
|
| align:start position:0% |
| now the way this paper uses tungsten |
| plugs is with a process they refer to as |
|
|
| align:start position:0% |
| plugs is with a process they refer to as |
| |
|
|
| align:start position:0% |
| plugs is with a process they refer to as |
| plasma etchback so if i do that |
|
|
| align:start position:0% |
| plasma etchback so if i do that |
| |
|
|
| align:start position:0% |
| plasma etchback so if i do that |
| conformal deposition |
|
|
| align:start position:0% |
| conformal deposition |
| |
|
|
| align:start position:0% |
| conformal deposition |
| finally to this this surface |
|
|
| align:start position:0% |
| finally to this this surface |
| |
|
|
| align:start position:0% |
| finally to this this surface |
| uh now i've got |
|
|
| align:start position:0% |
| uh now i've got |
| |
|
|
| align:start position:0% |
| uh now i've got |
| you know the |
|
|
| align:start position:0% |
| you know the |
| |
|
|
| align:start position:0% |
| you know the |
| tungsten not only in the plug but i've |
|
|
| align:start position:0% |
| tungsten not only in the plug but i've |
| |
|
|
| align:start position:0% |
| tungsten not only in the plug but i've |
| also got all this excess tungsten out |
|
|
| align:start position:0% |
| also got all this excess tungsten out |
| |
|
|
| align:start position:0% |
| also got all this excess tungsten out |
| here in the |
|
|
| align:start position:0% |
| here in the |
| |
|
|
| align:start position:0% |
| here in the |
| neighboring regions that i want to |
|
|
| align:start position:0% |
| neighboring regions that i want to |
| |
|
|
| align:start position:0% |
| neighboring regions that i want to |
| remove |
|
|
| align:start position:0% |
| remove |
| |
|
|
| align:start position:0% |
| remove |
| and the idea of of etchback was that |
|
|
| align:start position:0% |
| and the idea of of etchback was that |
| |
|
|
| align:start position:0% |
| and the idea of of etchback was that |
| through the deposition process i fill |
|
|
| align:start position:0% |
| through the deposition process i fill |
| |
|
|
| align:start position:0% |
| through the deposition process i fill |
| the surface |
|
|
| align:start position:0% |
| the surface |
| |
|
|
| align:start position:0% |
| the surface |
| but i leave essentially a nearly planar |
|
|
| align:start position:0% |
| but i leave essentially a nearly planar |
| |
|
|
| align:start position:0% |
| but i leave essentially a nearly planar |
| surface that now if i just etch |
|
|
| align:start position:0% |
| surface that now if i just etch |
| |
|
|
| align:start position:0% |
| surface that now if i just etch |
| uniformly |
|
|
| align:start position:0% |
| uniformly |
| |
|
|
| align:start position:0% |
| uniformly |
| back that whole surface |
|
|
| align:start position:0% |
| back that whole surface |
| |
|
|
| align:start position:0% |
| back that whole surface |
| i can remove down to the underlying |
|
|
| align:start position:0% |
| i can remove down to the underlying |
| |
|
|
| align:start position:0% |
| i can remove down to the underlying |
| interface metal or interface layer or |
|
|
| align:start position:0% |
| interface metal or interface layer or |
| |
|
|
| align:start position:0% |
| interface metal or interface layer or |
| the oxide |
|
|
| align:start position:0% |
| the oxide |
| |
|
|
| align:start position:0% |
| the oxide |
| and leave the metal just in the in the |
|
|
| align:start position:0% |
| and leave the metal just in the in the |
| |
|
|
| align:start position:0% |
| and leave the metal just in the in the |
| plug where i wanted it |
|
|
| align:start position:0% |
| plug where i wanted it |
| |
|
|
| align:start position:0% |
| plug where i wanted it |
| in the paper they refer to using this as |
|
|
| align:start position:0% |
| in the paper they refer to using this as |
| |
|
|
| align:start position:0% |
| in the paper they refer to using this as |
| are using plasma etchback to do this |
|
|
| align:start position:0% |
| are using plasma etchback to do this |
| |
|
|
| align:start position:0% |
| are using plasma etchback to do this |
| uniform etchback |
|
|
| align:start position:0% |
| uniform etchback |
| |
|
|
| align:start position:0% |
| uniform etchback |
| in modern processing this step has |
|
|
| align:start position:0% |
| in modern processing this step has |
| |
|
|
| align:start position:0% |
| in modern processing this step has |
| pretty much been replaced with cmp |
|
|
| align:start position:0% |
| pretty much been replaced with cmp |
| |
|
|
| align:start position:0% |
| pretty much been replaced with cmp |
| because that has a much higher |
|
|
| align:start position:0% |
| because that has a much higher |
| |
|
|
| align:start position:0% |
| because that has a much higher |
| controllability and |
|
|
| align:start position:0% |
| controllability and |
| |
|
|
| align:start position:0% |
| controllability and |
| gets around an important limitation |
|
|
| align:start position:0% |
| gets around an important limitation |
| |
|
|
| align:start position:0% |
| gets around an important limitation |
| that's kind of pictured here in this in |
|
|
| align:start position:0% |
| that's kind of pictured here in this in |
| |
|
|
| align:start position:0% |
| that's kind of pictured here in this in |
| this in this diagram |
|
|
| align:start position:0% |
| this in this diagram |
| |
|
|
| align:start position:0% |
| this in this diagram |
| having to do with |
|
|
| align:start position:0% |
| having to do with |
| |
|
|
| align:start position:0% |
| having to do with |
| very tight constraints on uniformity |
|
|
| align:start position:0% |
| very tight constraints on uniformity |
| |
|
|
| align:start position:0% |
| very tight constraints on uniformity |
| with a plasma etchback |
|
|
| align:start position:0% |
| with a plasma etchback |
| |
|
|
| align:start position:0% |
| with a plasma etchback |
| the basic issue with uniformity is if i |
|
|
| align:start position:0% |
| the basic issue with uniformity is if i |
| |
|
|
| align:start position:0% |
| the basic issue with uniformity is if i |
| in fact have deposition |
|
|
| align:start position:0% |
| in fact have deposition |
| |
|
|
| align:start position:0% |
| in fact have deposition |
| that results in different thicknesses |
|
|
| align:start position:0% |
| that results in different thicknesses |
| |
|
|
| align:start position:0% |
| that results in different thicknesses |
| either in different locations within the |
|
|
| align:start position:0% |
| either in different locations within the |
| |
|
|
| align:start position:0% |
| either in different locations within the |
| chip |
|
|
| align:start position:0% |
| chip |
| |
|
|
| align:start position:0% |
| chip |
| or in different chips across the wafer |
|
|
| align:start position:0% |
| or in different chips across the wafer |
| |
|
|
| align:start position:0% |
| or in different chips across the wafer |
| and i uniformly etch back |
|
|
| align:start position:0% |
| and i uniformly etch back |
| |
|
|
| align:start position:0% |
| and i uniformly etch back |
| first off if i only etch back this |
|
|
| align:start position:0% |
| first off if i only etch back this |
| |
|
|
| align:start position:0% |
| first off if i only etch back this |
| amount |
|
|
| align:start position:0% |
| amount |
| |
|
|
| align:start position:0% |
| amount |
| in both regions then i have not |
|
|
| align:start position:0% |
| in both regions then i have not |
| |
|
|
| align:start position:0% |
| in both regions then i have not |
| completely removed what i needed to in |
|
|
| align:start position:0% |
| completely removed what i needed to in |
| |
|
|
| align:start position:0% |
| completely removed what i needed to in |
| the other regions so i have to make sure |
|
|
| align:start position:0% |
| the other regions so i have to make sure |
| |
|
|
| align:start position:0% |
| the other regions so i have to make sure |
| i do enough overarch |
|
|
| align:start position:0% |
| i do enough overarch |
| |
|
|
| align:start position:0% |
| i do enough overarch |
| to at least clear off and make sure i |
|
|
| align:start position:0% |
| to at least clear off and make sure i |
| |
|
|
| align:start position:0% |
| to at least clear off and make sure i |
| don't have any shorts |
|
|
| align:start position:0% |
| don't have any shorts |
| |
|
|
| align:start position:0% |
| don't have any shorts |
| anywhere on the wafer and when you do |
|
|
| align:start position:0% |
| anywhere on the wafer and when you do |
| |
|
|
| align:start position:0% |
| anywhere on the wafer and when you do |
| that to make sure that i'm down to the |
|
|
| align:start position:0% |
| that to make sure that i'm down to the |
| |
|
|
| align:start position:0% |
| that to make sure that i'm down to the |
| surface |
|
|
| align:start position:0% |
| surface |
| |
|
|
| align:start position:0% |
| surface |
| in the thickest area you get over etch |
|
|
| align:start position:0% |
| in the thickest area you get over etch |
| |
|
|
| align:start position:0% |
| in the thickest area you get over etch |
| lossage |
|
|
| align:start position:0% |
| lossage |
| |
|
|
| align:start position:0% |
| lossage |
| in |
|
|
| align:start position:0% |
| in |
| |
|
|
| align:start position:0% |
| in |
| the thinnest regions so you have a |
|
|
| align:start position:0% |
| the thinnest regions so you have a |
| |
|
|
| align:start position:0% |
| the thinnest regions so you have a |
| fairly tight constraint then on what the |
|
|
| align:start position:0% |
| fairly tight constraint then on what the |
| |
|
|
| align:start position:0% |
| fairly tight constraint then on what the |
| thickness uniformity is |
|
|
| align:start position:0% |
| thickness uniformity is |
| |
|
|
| align:start position:0% |
| thickness uniformity is |
| as well as the etch uniformity in order |
|
|
| align:start position:0% |
| as well as the etch uniformity in order |
| |
|
|
| align:start position:0% |
| as well as the etch uniformity in order |
| to achieve that |
|
|
| align:start position:0% |
| to achieve that |
| |
|
|
| align:start position:0% |
| to achieve that |
| okay so the paper does talk a bit and in |
|
|
| align:start position:0% |
| okay so the paper does talk a bit and in |
| |
|
|
| align:start position:0% |
| okay so the paper does talk a bit and in |
| fact we'll see later explicitly models |
|
|
| align:start position:0% |
| fact we'll see later explicitly models |
| |
|
|
| align:start position:0% |
| fact we'll see later explicitly models |
| the wafer uniformity as one of the |
|
|
| align:start position:0% |
| the wafer uniformity as one of the |
| |
|
|
| align:start position:0% |
| the wafer uniformity as one of the |
| outputs |
|
|
| align:start position:0% |
| outputs |
| |
|
|
| align:start position:0% |
| outputs |
| in order to try to understand as they |
|
|
| align:start position:0% |
| in order to try to understand as they |
| |
|
|
| align:start position:0% |
| in order to try to understand as they |
| play with some of the process conditions |
|
|
| align:start position:0% |
| play with some of the process conditions |
| |
|
|
| align:start position:0% |
| play with some of the process conditions |
| how uniformity is going to be affected |
|
|
| align:start position:0% |
| how uniformity is going to be affected |
| |
|
|
| align:start position:0% |
| how uniformity is going to be affected |
| by their choice of these conditions |
|
|
| align:start position:0% |
| by their choice of these conditions |
| |
|
|
| align:start position:0% |
| by their choice of these conditions |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| uh there's a couple of other interesting |
|
|
| align:start position:0% |
| uh there's a couple of other interesting |
| |
|
|
| align:start position:0% |
| uh there's a couple of other interesting |
| aspects of plasma etchback that are |
|
|
| align:start position:0% |
| aspects of plasma etchback that are |
| |
|
|
| align:start position:0% |
| aspects of plasma etchback that are |
| that are important uh |
|
|
| align:start position:0% |
| that are important uh |
| |
|
|
| align:start position:0% |
| that are important uh |
| as well in particular help |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| inform the modeling that this paper uh |
|
|
| align:start position:0% |
| inform the modeling that this paper uh |
| |
|
|
| align:start position:0% |
| inform the modeling that this paper uh |
| undertakes and that has to do with |
|
|
| align:start position:0% |
| undertakes and that has to do with |
| |
|
|
| align:start position:0% |
| undertakes and that has to do with |
| surface roughness so not only if will |
|
|
| align:start position:0% |
| surface roughness so not only if will |
| |
|
|
| align:start position:0% |
| surface roughness so not only if will |
| these sorts of features this topography |
|
|
| align:start position:0% |
| these sorts of features this topography |
| |
|
|
| align:start position:0% |
| these sorts of features this topography |
| like that little dimple there |
|
|
| align:start position:0% |
| like that little dimple there |
| |
|
|
| align:start position:0% |
| like that little dimple there |
| but also |
|
|
| align:start position:0% |
| but also |
| |
|
|
| align:start position:0% |
| but also |
| if the surface of the film the deposited |
|
|
| align:start position:0% |
| if the surface of the film the deposited |
| |
|
|
| align:start position:0% |
| if the surface of the film the deposited |
| film is rough |
|
|
| align:start position:0% |
| film is rough |
| |
|
|
| align:start position:0% |
| film is rough |
| and i do a uniform plasma etch back |
|
|
| align:start position:0% |
| and i do a uniform plasma etch back |
| |
|
|
| align:start position:0% |
| and i do a uniform plasma etch back |
| sort of a vertical plasma etch back |
|
|
| align:start position:0% |
| sort of a vertical plasma etch back |
| |
|
|
| align:start position:0% |
| sort of a vertical plasma etch back |
| that surface roughness can in fact then |
|
|
| align:start position:0% |
| that surface roughness can in fact then |
| |
|
|
| align:start position:0% |
| that surface roughness can in fact then |
| this is rough |
|
|
| align:start position:0% |
| this is rough |
| |
|
|
| align:start position:0% |
| this is rough |
| that |
|
|
| align:start position:0% |
| that |
| |
|
|
| align:start position:0% |
| that |
| in truth may be transmitted to the final |
|
|
| align:start position:0% |
| in truth may be transmitted to the final |
| |
|
|
| align:start position:0% |
| in truth may be transmitted to the final |
| surface of the of the plug |
|
|
| align:start position:0% |
| surface of the of the plug |
| |
|
|
| align:start position:0% |
| surface of the of the plug |
| so another important parameter that they |
|
|
| align:start position:0% |
| so another important parameter that they |
| |
|
|
| align:start position:0% |
| so another important parameter that they |
| will be explicitly modeling is |
|
|
| align:start position:0% |
| will be explicitly modeling is |
| |
|
|
| align:start position:0% |
| will be explicitly modeling is |
| tungsten the deposited tungsten |
|
|
| align:start position:0% |
| tungsten the deposited tungsten |
| |
|
|
| align:start position:0% |
| tungsten the deposited tungsten |
| roughness |
|
|
| align:start position:0% |
| roughness |
| |
|
|
| align:start position:0% |
| roughness |
| okay and generally less rough is better |
|
|
| align:start position:0% |
| okay and generally less rough is better |
| |
|
|
| align:start position:0% |
| okay and generally less rough is better |
| it's going to give a high better surface |
|
|
| align:start position:0% |
| it's going to give a high better surface |
| |
|
|
| align:start position:0% |
| it's going to give a high better surface |
| quality less prone to defects more |
|
|
| align:start position:0% |
| quality less prone to defects more |
| |
|
|
| align:start position:0% |
| quality less prone to defects more |
| uniform in resistance and so on |
|
|
| align:start position:0% |
| uniform in resistance and so on |
| |
|
|
| align:start position:0% |
| uniform in resistance and so on |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| that by the way is another reason for |
|
|
| align:start position:0% |
| that by the way is another reason for |
| |
|
|
| align:start position:0% |
| that by the way is another reason for |
| switching to cmp |
|
|
| align:start position:0% |
| switching to cmp |
| |
|
|
| align:start position:0% |
| switching to cmp |
| cmp |
|
|
| align:start position:0% |
| cmp |
| |
|
|
| align:start position:0% |
| cmp |
| planarizes |
|
|
| align:start position:0% |
| planarizes |
| |
|
|
| align:start position:0% |
| planarizes |
| can deal with not only this kind of |
|
|
| align:start position:0% |
| can deal with not only this kind of |
| |
|
|
| align:start position:0% |
| can deal with not only this kind of |
| surface topography |
|
|
| align:start position:0% |
| surface topography |
| |
|
|
| align:start position:0% |
| surface topography |
| on a large scale |
|
|
| align:start position:0% |
| on a large scale |
| |
|
|
| align:start position:0% |
| on a large scale |
| but it also smooths the surface on sort |
|
|
| align:start position:0% |
| but it also smooths the surface on sort |
| |
|
|
| align:start position:0% |
| but it also smooths the surface on sort |
| of the atomic scale and so you tend to |
|
|
| align:start position:0% |
| of the atomic scale and so you tend to |
| |
|
|
| align:start position:0% |
| of the atomic scale and so you tend to |
| get much |
|
|
| align:start position:0% |
| get much |
| |
|
|
| align:start position:0% |
| get much |
| much |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| higher quality final |
|
|
| align:start position:0% |
| higher quality final |
| |
|
|
| align:start position:0% |
| higher quality final |
| final plugs |
|
|
| align:start position:0% |
| final plugs |
| |
|
|
| align:start position:0% |
| final plugs |
| okay any questions on basic tungsten |
|
|
| align:start position:0% |
| okay any questions on basic tungsten |
| |
|
|
| align:start position:0% |
| okay any questions on basic tungsten |
| little lesson on tungsten plugs so let's |
|
|
| align:start position:0% |
| little lesson on tungsten plugs so let's |
| |
|
|
| align:start position:0% |
| little lesson on tungsten plugs so let's |
| talk a little bit about the process |
|
|
| align:start position:0% |
| talk a little bit about the process |
| |
|
|
| align:start position:0% |
| talk a little bit about the process |
| equipment and the process parameters |
|
|
| align:start position:0% |
| equipment and the process parameters |
| |
|
|
| align:start position:0% |
| equipment and the process parameters |
| that are going to be in in this case |
|
|
| align:start position:0% |
| that are going to be in in this case |
| |
|
|
| align:start position:0% |
| that are going to be in in this case |
| study |
|
|
| align:start position:0% |
| study |
| |
|
|
| align:start position:0% |
| study |
| this is a schematic crocs section of an |
|
|
| align:start position:0% |
| this is a schematic crocs section of an |
| |
|
|
| align:start position:0% |
| this is a schematic crocs section of an |
| applied materials precision 5000 reactor |
|
|
| align:start position:0% |
| applied materials precision 5000 reactor |
| |
|
|
| align:start position:0% |
| applied materials precision 5000 reactor |
| configured for tungsten cbd |
|
|
| align:start position:0% |
| configured for tungsten cbd |
| |
|
|
| align:start position:0% |
| configured for tungsten cbd |
| by the way this is a classic tool |
|
|
| align:start position:0% |
| by the way this is a classic tool |
| |
|
|
| align:start position:0% |
| by the way this is a classic tool |
| the eight uh |
|
|
| align:start position:0% |
| the eight uh |
| |
|
|
| align:start position:0% |
| the eight uh |
| p5000 |
|
|
| align:start position:0% |
| p5000 |
| |
|
|
| align:start position:0% |
| p5000 |
| a map p5000 there's one of these in the |
|
|
| align:start position:0% |
| a map p5000 there's one of these in the |
| |
|
|
| align:start position:0% |
| a map p5000 there's one of these in the |
| smithsonian institute |
|
|
| align:start position:0% |
| smithsonian institute |
| |
|
|
| align:start position:0% |
| smithsonian institute |
| it was the tool that made applied |
|
|
| align:start position:0% |
| it was the tool that made applied |
| |
|
|
| align:start position:0% |
| it was the tool that made applied |
| materials what it is today |
|
|
| align:start position:0% |
| materials what it is today |
| |
|
|
| align:start position:0% |
| materials what it is today |
| it was one of the first single wafer |
|
|
| align:start position:0% |
| it was one of the first single wafer |
| |
|
|
| align:start position:0% |
| it was one of the first single wafer |
| processing tools that really gave |
|
|
| align:start position:0% |
| processing tools that really gave |
| |
|
|
| align:start position:0% |
| processing tools that really gave |
| good control over the atmospheric |
|
|
| align:start position:0% |
| good control over the atmospheric |
| |
|
|
| align:start position:0% |
| good control over the atmospheric |
| conditions for deposition for etching |
|
|
| align:start position:0% |
| conditions for deposition for etching |
| |
|
|
| align:start position:0% |
| conditions for deposition for etching |
| these sorts of things so so |
|
|
| align:start position:0% |
| these sorts of things so so |
| |
|
|
| align:start position:0% |
| these sorts of things so so |
| we're seeing a glimpse back into history |
|
|
| align:start position:0% |
| we're seeing a glimpse back into history |
| |
|
|
| align:start position:0% |
| we're seeing a glimpse back into history |
| here even looking at this cross-section |
|
|
| align:start position:0% |
| here even looking at this cross-section |
| |
|
|
| align:start position:0% |
| here even looking at this cross-section |
| by the way p5000s are still in use all |
|
|
| align:start position:0% |
| by the way p5000s are still in use all |
| |
|
|
| align:start position:0% |
| by the way p5000s are still in use all |
| over the place |
|
|
| align:start position:0% |
| over the place |
| |
|
|
| align:start position:0% |
| over the place |
| we have some |
|
|
| align:start position:0% |
| we have some |
| |
|
|
| align:start position:0% |
| we have some |
| i guess just one in mtl |
|
|
| align:start position:0% |
| i guess just one in mtl |
| |
|
|
| align:start position:0% |
| i guess just one in mtl |
| i think mostly for etching |
|
|
| align:start position:0% |
| i think mostly for etching |
| |
|
|
| align:start position:0% |
| i think mostly for etching |
| but uh even in some fabs i i still run |
|
|
| align:start position:0% |
| but uh even in some fabs i i still run |
| |
|
|
| align:start position:0% |
| but uh even in some fabs i i still run |
| into them |
|
|
| align:start position:0% |
| into them |
| |
|
|
| align:start position:0% |
| into them |
| they've been scaled up and improved and |
|
|
| align:start position:0% |
| they've been scaled up and improved and |
| |
|
|
| align:start position:0% |
| they've been scaled up and improved and |
| configured you know changed in |
|
|
| align:start position:0% |
| configured you know changed in |
| |
|
|
| align:start position:0% |
| configured you know changed in |
| configuration uh but but they are still |
|
|
| align:start position:0% |
| configuration uh but but they are still |
| |
|
|
| align:start position:0% |
| configuration uh but but they are still |
| around so the basic idea here is that |
|
|
| align:start position:0% |
| around so the basic idea here is that |
| |
|
|
| align:start position:0% |
| around so the basic idea here is that |
| the wafer |
|
|
| align:start position:0% |
| the wafer |
| |
|
|
| align:start position:0% |
| the wafer |
| will sit |
|
|
| align:start position:0% |
| will sit |
| |
|
|
| align:start position:0% |
| will sit |
| here on a susceptor |
|
|
| align:start position:0% |
| here on a susceptor |
| |
|
|
| align:start position:0% |
| here on a susceptor |
| in this plasma reactor |
|
|
| align:start position:0% |
| in this plasma reactor |
| |
|
|
| align:start position:0% |
| in this plasma reactor |
| this low low pressure uh |
|
|
| align:start position:0% |
| this low low pressure uh |
| |
|
|
| align:start position:0% |
| this low low pressure uh |
| plasma reactor in fact there are usually |
|
|
| align:start position:0% |
| plasma reactor in fact there are usually |
| |
|
|
| align:start position:0% |
| plasma reactor in fact there are usually |
| pins uh i think three or four pins that |
|
|
| align:start position:0% |
| pins uh i think three or four pins that |
| |
|
|
| align:start position:0% |
| pins uh i think three or four pins that |
| hold the wafer the robot loads the wafer |
|
|
| align:start position:0% |
| hold the wafer the robot loads the wafer |
| |
|
|
| align:start position:0% |
| hold the wafer the robot loads the wafer |
| in onto these pins and then the pins uh |
|
|
| align:start position:0% |
| in onto these pins and then the pins uh |
| |
|
|
| align:start position:0% |
| in onto these pins and then the pins uh |
| these lift fingers here i guess |
|
|
| align:start position:0% |
| these lift fingers here i guess |
| |
|
|
| align:start position:0% |
| these lift fingers here i guess |
| recede and the wafer then sits on this |
|
|
| align:start position:0% |
| recede and the wafer then sits on this |
| |
|
|
| align:start position:0% |
| recede and the wafer then sits on this |
| on this susceptor the susceptor |
|
|
| align:start position:0% |
| on this susceptor the susceptor |
| |
|
|
| align:start position:0% |
| on this susceptor the susceptor |
| is |
|
|
| align:start position:0% |
| is |
| |
|
|
| align:start position:0% |
| is |
| optically heated so there are these heat |
|
|
| align:start position:0% |
| optically heated so there are these heat |
| |
|
|
| align:start position:0% |
| optically heated so there are these heat |
| lamps i think there's something like |
|
|
| align:start position:0% |
| lamps i think there's something like |
| |
|
|
| align:start position:0% |
| lamps i think there's something like |
| thousand watt |
|
|
| align:start position:0% |
| thousand watt |
| |
|
|
| align:start position:0% |
| thousand watt |
| heat lamps in this configuration that |
|
|
| align:start position:0% |
| heat lamps in this configuration that |
| |
|
|
| align:start position:0% |
| heat lamps in this configuration that |
| heat up |
|
|
| align:start position:0% |
| heat up |
| |
|
|
| align:start position:0% |
| heat up |
| and hold the temperature |
|
|
| align:start position:0% |
| and hold the temperature |
| |
|
|
| align:start position:0% |
| and hold the temperature |
| of the whole platen the whole susceptor |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| there's then gas flow coming in from a a |
|
|
| align:start position:0% |
| there's then gas flow coming in from a a |
| |
|
|
| align:start position:0% |
| there's then gas flow coming in from a a |
| gas feed there's a little mixing chamber |
|
|
| align:start position:0% |
| gas feed there's a little mixing chamber |
| |
|
|
| align:start position:0% |
| gas feed there's a little mixing chamber |
| in here so that you can mix different |
|
|
| align:start position:0% |
| in here so that you can mix different |
| |
|
|
| align:start position:0% |
| in here so that you can mix different |
| combinations of different gas flows and |
|
|
| align:start position:0% |
| combinations of different gas flows and |
| |
|
|
| align:start position:0% |
| combinations of different gas flows and |
| then it goes through a shower head |
|
|
| align:start position:0% |
| then it goes through a shower head |
| |
|
|
| align:start position:0% |
| then it goes through a shower head |
| this thing right here is typically |
|
|
| align:start position:0% |
| this thing right here is typically |
| |
|
|
| align:start position:0% |
| this thing right here is typically |
| referred to as a shower head |
|
|
| align:start position:0% |
| referred to as a shower head |
| |
|
|
| align:start position:0% |
| referred to as a shower head |
| and you can imagine it's basically you |
|
|
| align:start position:0% |
| and you can imagine it's basically you |
| |
|
|
| align:start position:0% |
| and you can imagine it's basically you |
| know like a shower head in your shower |
|
|
| align:start position:0% |
| know like a shower head in your shower |
| |
|
|
| align:start position:0% |
| know like a shower head in your shower |
| it's got holes in it that basically |
|
|
| align:start position:0% |
| it's got holes in it that basically |
| |
|
|
| align:start position:0% |
| it's got holes in it that basically |
| allow the gases to flow through |
|
|
| align:start position:0% |
| allow the gases to flow through |
| |
|
|
| align:start position:0% |
| allow the gases to flow through |
| hopefully in a fairly uniform |
|
|
| align:start position:0% |
| hopefully in a fairly uniform |
| |
|
|
| align:start position:0% |
| hopefully in a fairly uniform |
| distribution |
|
|
| align:start position:0% |
| distribution |
| |
|
|
| align:start position:0% |
| distribution |
| across the surface of the wafer |
|
|
| align:start position:0% |
| across the surface of the wafer |
| |
|
|
| align:start position:0% |
| across the surface of the wafer |
| and then there's a vacuum control and a |
|
|
| align:start position:0% |
| and then there's a vacuum control and a |
| |
|
|
| align:start position:0% |
| and then there's a vacuum control and a |
| number of different vacuum outlets |
|
|
| align:start position:0% |
| number of different vacuum outlets |
| |
|
|
| align:start position:0% |
| number of different vacuum outlets |
| for |
|
|
| align:start position:0% |
| for |
| |
|
|
| align:start position:0% |
| for |
| for the for the gases to flow |
|
|
| align:start position:0% |
| for the for the gases to flow |
| |
|
|
| align:start position:0% |
| for the for the gases to flow |
| so some of the key inputs there's lots |
|
|
| align:start position:0% |
| so some of the key inputs there's lots |
| |
|
|
| align:start position:0% |
| so some of the key inputs there's lots |
| and lots of knobs to control on these |
|
|
| align:start position:0% |
| and lots of knobs to control on these |
| |
|
|
| align:start position:0% |
| and lots of knobs to control on these |
| equipment |
|
|
| align:start position:0% |
| equipment |
| |
|
|
| align:start position:0% |
| equipment |
| some of the key inputs that are used in |
|
|
| align:start position:0% |
| some of the key inputs that are used in |
| |
|
|
| align:start position:0% |
| some of the key inputs that are used in |
| this study |
|
|
| align:start position:0% |
| this study |
| |
|
|
| align:start position:0% |
| this study |
| in the paper that we're looking at are |
|
|
| align:start position:0% |
| in the paper that we're looking at are |
| |
|
|
| align:start position:0% |
| in the paper that we're looking at are |
| gap space temperature h2 pressure and |
|
|
| align:start position:0% |
| gap space temperature h2 pressure and |
| |
|
|
| align:start position:0% |
| gap space temperature h2 pressure and |
| wf6 |
|
|
| align:start position:0% |
| wf6 |
| |
|
|
| align:start position:0% |
| wf6 |
| pressure so the gap space refers to |
|
|
| align:start position:0% |
| pressure so the gap space refers to |
| |
|
|
| align:start position:0% |
| pressure so the gap space refers to |
| i believe essentially the height of this |
|
|
| align:start position:0% |
| i believe essentially the height of this |
| |
|
|
| align:start position:0% |
| i believe essentially the height of this |
| deceptor one can play with the distance |
|
|
| align:start position:0% |
| deceptor one can play with the distance |
| |
|
|
| align:start position:0% |
| deceptor one can play with the distance |
| between the gas inflow and the wafer |
|
|
| align:start position:0% |
| between the gas inflow and the wafer |
| |
|
|
| align:start position:0% |
| between the gas inflow and the wafer |
| moving it between say two to four or |
|
|
| align:start position:0% |
| moving it between say two to four or |
| |
|
|
| align:start position:0% |
| moving it between say two to four or |
| five inches |
|
|
| align:start position:0% |
| five inches |
| |
|
|
| align:start position:0% |
| five inches |
| and that changes a number of the plasma |
|
|
| align:start position:0% |
| and that changes a number of the plasma |
| |
|
|
| align:start position:0% |
| and that changes a number of the plasma |
| characteristics it changes perhaps some |
|
|
| align:start position:0% |
| characteristics it changes perhaps some |
| |
|
|
| align:start position:0% |
| characteristics it changes perhaps some |
| of the gas flow characteristics may also |
|
|
| align:start position:0% |
| of the gas flow characteristics may also |
| |
|
|
| align:start position:0% |
| of the gas flow characteristics may also |
| change some of the thermal |
|
|
| align:start position:0% |
| change some of the thermal |
| |
|
|
| align:start position:0% |
| change some of the thermal |
| characteristics so it is a control |
|
|
| align:start position:0% |
| characteristics so it is a control |
| |
|
|
| align:start position:0% |
| characteristics so it is a control |
| parameter that is not entirely obvious |
|
|
| align:start position:0% |
| parameter that is not entirely obvious |
| |
|
|
| align:start position:0% |
| parameter that is not entirely obvious |
| up front how it affects the growth of or |
|
|
| align:start position:0% |
| up front how it affects the growth of or |
| |
|
|
| align:start position:0% |
| up front how it affects the growth of or |
| deposition of this this tungsten so |
|
|
| align:start position:0% |
| deposition of this this tungsten so |
| |
|
|
| align:start position:0% |
| deposition of this this tungsten so |
| that's going to be one of the parameters |
|
|
| align:start position:0% |
| that's going to be one of the parameters |
| |
|
|
| align:start position:0% |
| that's going to be one of the parameters |
| that needs to be empirically |
|
|
| align:start position:0% |
| that needs to be empirically |
| |
|
|
| align:start position:0% |
| that needs to be empirically |
| studied |
|
|
| align:start position:0% |
| studied |
| |
|
|
| align:start position:0% |
| studied |
| certainly temperature is going to have a |
|
|
| align:start position:0% |
| certainly temperature is going to have a |
| |
|
|
| align:start position:0% |
| certainly temperature is going to have a |
| very strong effect |
|
|
| align:start position:0% |
| very strong effect |
| |
|
|
| align:start position:0% |
| very strong effect |
| in this process on things like uh growth |
|
|
| align:start position:0% |
| in this process on things like uh growth |
| |
|
|
| align:start position:0% |
| in this process on things like uh growth |
| rate perhaps also |
|
|
| align:start position:0% |
| rate perhaps also |
| |
|
|
| align:start position:0% |
| rate perhaps also |
| the surface morphology or the roughness |
|
|
| align:start position:0% |
| the surface morphology or the roughness |
| |
|
|
| align:start position:0% |
| the surface morphology or the roughness |
| of the film the amount of incorporation |
|
|
| align:start position:0% |
| of the film the amount of incorporation |
| |
|
|
| align:start position:0% |
| of the film the amount of incorporation |
| of tungsten and the ultimate resistivity |
|
|
| align:start position:0% |
| of tungsten and the ultimate resistivity |
| |
|
|
| align:start position:0% |
| of tungsten and the ultimate resistivity |
| of the film those sorts of parameters |
|
|
| align:start position:0% |
| of the film those sorts of parameters |
| |
|
|
| align:start position:0% |
| of the film those sorts of parameters |
| and then both hydrogen and tungsten |
|
|
| align:start position:0% |
| and then both hydrogen and tungsten |
| |
|
|
| align:start position:0% |
| and then both hydrogen and tungsten |
| hexafluoride |
|
|
| align:start position:0% |
| hexafluoride |
| |
|
|
| align:start position:0% |
| hexafluoride |
| gas flow pressures will also be |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| clearly |
|
|
| align:start position:0% |
| clearly |
| |
|
|
| align:start position:0% |
| clearly |
| of influence in |
|
|
| align:start position:0% |
| of influence in |
| |
|
|
| align:start position:0% |
| of influence in |
| rate resistivity and so on |
|
|
| align:start position:0% |
| rate resistivity and so on |
| |
|
|
| align:start position:0% |
| rate resistivity and so on |
| so this is kind of a neat paper because |
|
|
| align:start position:0% |
| so this is kind of a neat paper because |
| |
|
|
| align:start position:0% |
| so this is kind of a neat paper because |
| they actually are measuring about eight |
|
|
| align:start position:0% |
| they actually are measuring about eight |
| |
|
|
| align:start position:0% |
| they actually are measuring about eight |
| different parameters |
|
|
| align:start position:0% |
| different parameters |
| |
|
|
| align:start position:0% |
| different parameters |
| and modeling each of them |
|
|
| align:start position:0% |
| and modeling each of them |
| |
|
|
| align:start position:0% |
| and modeling each of them |
| so it's kind of a four input eight |
|
|
| align:start position:0% |
| so it's kind of a four input eight |
| |
|
|
| align:start position:0% |
| so it's kind of a four input eight |
| output uh kind of doe so just to go |
|
|
| align:start position:0% |
| output uh kind of doe so just to go |
| |
|
|
| align:start position:0% |
| output uh kind of doe so just to go |
| through some of these parameters many of |
|
|
| align:start position:0% |
| through some of these parameters many of |
| |
|
|
| align:start position:0% |
| through some of these parameters many of |
| them are pretty obvious but a couple of |
|
|
| align:start position:0% |
| them are pretty obvious but a couple of |
| |
|
|
| align:start position:0% |
| them are pretty obvious but a couple of |
| them i want to explain a little bit more |
|
|
| align:start position:0% |
| them i want to explain a little bit more |
| |
|
|
| align:start position:0% |
| them i want to explain a little bit more |
| so that you |
|
|
| align:start position:0% |
| so that you |
| |
|
|
| align:start position:0% |
| so that you |
| have have a good feel for what they are |
|
|
| align:start position:0% |
| have have a good feel for what they are |
| |
|
|
| align:start position:0% |
| have have a good feel for what they are |
| deposition rate i think that's pretty |
|
|
| align:start position:0% |
| deposition rate i think that's pretty |
| |
|
|
| align:start position:0% |
| deposition rate i think that's pretty |
| obvious |
|
|
| align:start position:0% |
| obvious |
| |
|
|
| align:start position:0% |
| obvious |
| generally you would like to have a |
|
|
| align:start position:0% |
| generally you would like to have a |
| |
|
|
| align:start position:0% |
| generally you would like to have a |
| fairly high rate |
|
|
| align:start position:0% |
| fairly high rate |
| |
|
|
| align:start position:0% |
| fairly high rate |
| it's going to you know make the process |
|
|
| align:start position:0% |
| it's going to you know make the process |
| |
|
|
| align:start position:0% |
| it's going to you know make the process |
| time as short as possible |
|
|
| align:start position:0% |
| time as short as possible |
| |
|
|
| align:start position:0% |
| time as short as possible |
| efficiency in the tool use and so on |
|
|
| align:start position:0% |
| efficiency in the tool use and so on |
| |
|
|
| align:start position:0% |
| efficiency in the tool use and so on |
| the paper mentions wanting to have about |
|
|
| align:start position:0% |
| the paper mentions wanting to have about |
| |
|
|
| align:start position:0% |
| the paper mentions wanting to have about |
| 500 nanometers and minute |
|
|
| align:start position:0% |
| 500 nanometers and minute |
| |
|
|
| align:start position:0% |
| 500 nanometers and minute |
| type type rates |
|
|
| align:start position:0% |
| type type rates |
| |
|
|
| align:start position:0% |
| type type rates |
| with these processes |
|
|
| align:start position:0% |
| with these processes |
| |
|
|
| align:start position:0% |
| with these processes |
| the resistivity value |
|
|
| align:start position:0% |
| the resistivity value |
| |
|
|
| align:start position:0% |
| the resistivity value |
| or row here |
|
|
| align:start position:0% |
| or row here |
| |
|
|
| align:start position:0% |
| or row here |
| generally you kind of want a low |
|
|
| align:start position:0% |
| generally you kind of want a low |
| |
|
|
| align:start position:0% |
| generally you kind of want a low |
| resistance or a low resistivity film |
|
|
| align:start position:0% |
| resistance or a low resistivity film |
| |
|
|
| align:start position:0% |
| resistance or a low resistivity film |
| an interesting twist here is depending |
|
|
| align:start position:0% |
| an interesting twist here is depending |
| |
|
|
| align:start position:0% |
| an interesting twist here is depending |
| on the application |
|
|
| align:start position:0% |
| on the application |
| |
|
|
| align:start position:0% |
| on the application |
| that's |
|
|
| align:start position:0% |
| that's |
| |
|
|
| align:start position:0% |
| that's |
| the actual resistivity you want and |
|
|
| align:start position:0% |
| the actual resistivity you want and |
| |
|
|
| align:start position:0% |
| the actual resistivity you want and |
| whether it's all that low |
|
|
| align:start position:0% |
| whether it's all that low |
| |
|
|
| align:start position:0% |
| whether it's all that low |
| actually changes |
|
|
| align:start position:0% |
| actually changes |
| |
|
|
| align:start position:0% |
| actually changes |
| so for example if you're using it as a |
|
|
| align:start position:0% |
| so for example if you're using it as a |
| |
|
|
| align:start position:0% |
| so for example if you're using it as a |
| short run metal wire |
|
|
| align:start position:0% |
| short run metal wire |
| |
|
|
| align:start position:0% |
| short run metal wire |
| pretty much all the time low resistance |
|
|
| align:start position:0% |
| pretty much all the time low resistance |
| |
|
|
| align:start position:0% |
| pretty much all the time low resistance |
| is important |
|
|
| align:start position:0% |
| is important |
| |
|
|
| align:start position:0% |
| is important |
| but it turns out interestingly when you |
|
|
| align:start position:0% |
| but it turns out interestingly when you |
| |
|
|
| align:start position:0% |
| but it turns out interestingly when you |
| use tungsten plugs in conjunction with |
|
|
| align:start position:0% |
| use tungsten plugs in conjunction with |
| |
|
|
| align:start position:0% |
| use tungsten plugs in conjunction with |
| aluminum layers you may actually want |
|
|
| align:start position:0% |
| aluminum layers you may actually want |
| |
|
|
| align:start position:0% |
| aluminum layers you may actually want |
| the tungsten plug to be a little bit |
|
|
| align:start position:0% |
| the tungsten plug to be a little bit |
| |
|
|
| align:start position:0% |
| the tungsten plug to be a little bit |
| higher resistance than the aluminum |
|
|
| align:start position:0% |
| higher resistance than the aluminum |
| |
|
|
| align:start position:0% |
| higher resistance than the aluminum |
| itself so that because it's a very small |
|
|
| align:start position:0% |
| itself so that because it's a very small |
| |
|
|
| align:start position:0% |
| itself so that because it's a very small |
| constrained |
|
|
| align:start position:0% |
| constrained |
| |
|
|
| align:start position:0% |
| constrained |
| spatial area |
|
|
| align:start position:0% |
| spatial area |
| |
|
|
| align:start position:0% |
| spatial area |
| the higher resistance |
|
|
| align:start position:0% |
| the higher resistance |
| |
|
|
| align:start position:0% |
| the higher resistance |
| causes the current flow to spread out a |
|
|
| align:start position:0% |
| causes the current flow to spread out a |
| |
|
|
| align:start position:0% |
| causes the current flow to spread out a |
| little bit more uniformly and actually |
|
|
| align:start position:0% |
| little bit more uniformly and actually |
| |
|
|
| align:start position:0% |
| little bit more uniformly and actually |
| improves the reliability of these |
|
|
| align:start position:0% |
| improves the reliability of these |
| |
|
|
| align:start position:0% |
| improves the reliability of these |
| tungsten plugs |
|
|
| align:start position:0% |
| tungsten plugs |
| |
|
|
| align:start position:0% |
| tungsten plugs |
| so you'd actually like to understand |
|
|
| align:start position:0% |
| so you'd actually like to understand |
| |
|
|
| align:start position:0% |
| so you'd actually like to understand |
| what the resistance is and be able to |
|
|
| align:start position:0% |
| what the resistance is and be able to |
| |
|
|
| align:start position:0% |
| what the resistance is and be able to |
| tune that in so that's going to motivate |
|
|
| align:start position:0% |
| tune that in so that's going to motivate |
| |
|
|
| align:start position:0% |
| tune that in so that's going to motivate |
| some of some of the modeling that that's |
|
|
| align:start position:0% |
| some of some of the modeling that that's |
| |
|
|
| align:start position:0% |
| some of some of the modeling that that's |
| done here it's not always purely a lower |
|
|
| align:start position:0% |
| done here it's not always purely a lower |
| |
|
|
| align:start position:0% |
| done here it's not always purely a lower |
| resistance is better |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| rs uniformity refers to sheet resistance |
|
|
| align:start position:0% |
| rs uniformity refers to sheet resistance |
| |
|
|
| align:start position:0% |
| rs uniformity refers to sheet resistance |
| uniformity this is the |
|
|
| align:start position:0% |
| uniformity this is the |
| |
|
|
| align:start position:0% |
| uniformity this is the |
| ohms per square |
|
|
| align:start position:0% |
| ohms per square |
| |
|
|
| align:start position:0% |
| ohms per square |
| of of sheet resistance or |
|
|
| align:start position:0% |
| of of sheet resistance or |
| |
|
|
| align:start position:0% |
| of of sheet resistance or |
| but then a uniformity number calculated |
|
|
| align:start position:0% |
| but then a uniformity number calculated |
| |
|
|
| align:start position:0% |
| but then a uniformity number calculated |
| for that measured sheet resistance |
|
|
| align:start position:0% |
| for that measured sheet resistance |
| |
|
|
| align:start position:0% |
| for that measured sheet resistance |
| across the entire wafer and so you want |
|
|
| align:start position:0% |
| across the entire wafer and so you want |
| |
|
|
| align:start position:0% |
| across the entire wafer and so you want |
| a very good uniformity the three percent |
|
|
| align:start position:0% |
| a very good uniformity the three percent |
| |
|
|
| align:start position:0% |
| a very good uniformity the three percent |
| non-uniformity number is the deviation |
|
|
| align:start position:0% |
| non-uniformity number is the deviation |
| |
|
|
| align:start position:0% |
| non-uniformity number is the deviation |
| percentage deviation of the thickness |
|
|
| align:start position:0% |
| percentage deviation of the thickness |
| |
|
|
| align:start position:0% |
| percentage deviation of the thickness |
| sort of one standard deviation over mean |
|
|
| align:start position:0% |
| sort of one standard deviation over mean |
| |
|
|
| align:start position:0% |
| sort of one standard deviation over mean |
| is what they're referring to in here i |
|
|
| align:start position:0% |
| is what they're referring to in here i |
| |
|
|
| align:start position:0% |
| is what they're referring to in here i |
| believe for this uniformity |
|
|
| align:start position:0% |
| believe for this uniformity |
| |
|
|
| align:start position:0% |
| believe for this uniformity |
| and again one of the motivations there |
|
|
| align:start position:0% |
| and again one of the motivations there |
| |
|
|
| align:start position:0% |
| and again one of the motivations there |
| is that |
|
|
| align:start position:0% |
| is that |
| |
|
|
| align:start position:0% |
| is that |
| uniformity in |
|
|
| align:start position:0% |
| uniformity in |
| |
|
|
| align:start position:0% |
| uniformity in |
| the plasma etch back you want to avoid |
|
|
| align:start position:0% |
| the plasma etch back you want to avoid |
| |
|
|
| align:start position:0% |
| the plasma etch back you want to avoid |
| recess of these plugs in some region |
|
|
| align:start position:0% |
| recess of these plugs in some region |
| |
|
|
| align:start position:0% |
| recess of these plugs in some region |
| which can make it difficult for the |
|
|
| align:start position:0% |
| which can make it difficult for the |
| |
|
|
| align:start position:0% |
| which can make it difficult for the |
| subsequent aluminum to reach down in and |
|
|
| align:start position:0% |
| subsequent aluminum to reach down in and |
| |
|
|
| align:start position:0% |
| subsequent aluminum to reach down in and |
| actually contact |
|
|
| align:start position:0% |
| actually contact |
| |
|
|
| align:start position:0% |
| actually contact |
| those recessed plugs |
|
|
| align:start position:0% |
| those recessed plugs |
| |
|
|
| align:start position:0% |
| those recessed plugs |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| uh film stress is another important uh |
|
|
| align:start position:0% |
| uh film stress is another important uh |
| |
|
|
| align:start position:0% |
| uh film stress is another important uh |
| parameter |
|
|
| align:start position:0% |
| parameter |
| |
|
|
| align:start position:0% |
| parameter |
| let me see if i've got other slides on |
|
|
| align:start position:0% |
| let me see if i've got other slides on |
| |
|
|
| align:start position:0% |
| let me see if i've got other slides on |
| that |
|
|
| align:start position:0% |
| that |
| |
|
|
| align:start position:0% |
| that |
| nope not much |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| essentially the uh |
|
|
| align:start position:0% |
| essentially the uh |
| |
|
|
| align:start position:0% |
| essentially the uh |
| there is a volumetric mismatch to the |
|
|
| align:start position:0% |
| there is a volumetric mismatch to the |
| |
|
|
| align:start position:0% |
| there is a volumetric mismatch to the |
| deposited tungsten compared to the |
|
|
| align:start position:0% |
| deposited tungsten compared to the |
| |
|
|
| align:start position:0% |
| deposited tungsten compared to the |
| underlying silicon substrate uh wafer |
|
|
| align:start position:0% |
| underlying silicon substrate uh wafer |
| |
|
|
| align:start position:0% |
| underlying silicon substrate uh wafer |
| and in fact what you typically find is |
|
|
| align:start position:0% |
| and in fact what you typically find is |
| |
|
|
| align:start position:0% |
| and in fact what you typically find is |
| that the wafer will undergo |
|
|
| align:start position:0% |
| that the wafer will undergo |
| |
|
|
| align:start position:0% |
| that the wafer will undergo |
| or be in tensile stress so basically |
|
|
| align:start position:0% |
| or be in tensile stress so basically |
| |
|
|
| align:start position:0% |
| or be in tensile stress so basically |
| there's more volume in the deposited |
|
|
| align:start position:0% |
| there's more volume in the deposited |
| |
|
|
| align:start position:0% |
| there's more volume in the deposited |
| film |
|
|
| align:start position:0% |
| film |
| |
|
|
| align:start position:0% |
| film |
| and it's |
|
|
| align:start position:0% |
| and it's |
| |
|
|
| align:start position:0% |
| and it's |
| causing |
|
|
| align:start position:0% |
| causing |
| |
|
|
| align:start position:0% |
| causing |
| a thick a you know a a |
|
|
| align:start position:0% |
| a thick a you know a a |
| |
|
|
| align:start position:0% |
| a thick a you know a a |
| layer depending on the thickness of of |
|
|
| align:start position:0% |
| layer depending on the thickness of of |
| |
|
|
| align:start position:0% |
| layer depending on the thickness of of |
| the layer in fact in the in the design |
|
|
| align:start position:0% |
| the layer in fact in the in the design |
| |
|
|
| align:start position:0% |
| the layer in fact in the in the design |
| they're talking about two different |
|
|
| align:start position:0% |
| they're talking about two different |
| |
|
|
| align:start position:0% |
| they're talking about two different |
| thicknesses that they explore that |
|
|
| align:start position:0% |
| thicknesses that they explore that |
| |
|
|
| align:start position:0% |
| thicknesses that they explore that |
| causes the wafer to bow |
|
|
| align:start position:0% |
| causes the wafer to bow |
| |
|
|
| align:start position:0% |
| causes the wafer to bow |
| so i've got a |
|
|
| align:start position:0% |
| so i've got a |
| |
|
|
| align:start position:0% |
| so i've got a |
| film that wants to spread out a little |
|
|
| align:start position:0% |
| film that wants to spread out a little |
| |
|
|
| align:start position:0% |
| film that wants to spread out a little |
| bit more |
|
|
| align:start position:0% |
| bit more |
| |
|
|
| align:start position:0% |
| bit more |
| especially at lower temperature compared |
|
|
| align:start position:0% |
| especially at lower temperature compared |
| |
|
|
| align:start position:0% |
| especially at lower temperature compared |
| to the temperature of processing |
|
|
| align:start position:0% |
| to the temperature of processing |
| |
|
|
| align:start position:0% |
| to the temperature of processing |
| and that wafer bow is a nice indicator |
|
|
| align:start position:0% |
| and that wafer bow is a nice indicator |
| |
|
|
| align:start position:0% |
| and that wafer bow is a nice indicator |
| of intrinsic internal stress in those |
|
|
| align:start position:0% |
| of intrinsic internal stress in those |
| |
|
|
| align:start position:0% |
| of intrinsic internal stress in those |
| films |
|
|
| align:start position:0% |
| films |
| |
|
|
| align:start position:0% |
| films |
| in general you don't want stress |
|
|
| align:start position:0% |
| in general you don't want stress |
| |
|
|
| align:start position:0% |
| in general you don't want stress |
| mismatches between different layers on |
|
|
| align:start position:0% |
| mismatches between different layers on |
| |
|
|
| align:start position:0% |
| mismatches between different layers on |
| your wafer |
|
|
| align:start position:0% |
| your wafer |
| |
|
|
| align:start position:0% |
| your wafer |
| because that means there's sort of this |
|
|
| align:start position:0% |
| because that means there's sort of this |
| |
|
|
| align:start position:0% |
| because that means there's sort of this |
| excess energy around that would like to |
|
|
| align:start position:0% |
| excess energy around that would like to |
| |
|
|
| align:start position:0% |
| excess energy around that would like to |
| release itself and one way it releases |
|
|
| align:start position:0% |
| release itself and one way it releases |
| |
|
|
| align:start position:0% |
| release itself and one way it releases |
| itself is by having those layers |
|
|
| align:start position:0% |
| itself is by having those layers |
| |
|
|
| align:start position:0% |
| itself is by having those layers |
| delaminate |
|
|
| align:start position:0% |
| delaminate |
| |
|
|
| align:start position:0% |
| delaminate |
| okay so a reliability concern |
|
|
| align:start position:0% |
| okay so a reliability concern |
| |
|
|
| align:start position:0% |
| okay so a reliability concern |
| is to try to avoid very high stresses |
|
|
| align:start position:0% |
| is to try to avoid very high stresses |
| |
|
|
| align:start position:0% |
| is to try to avoid very high stresses |
| in order to support subsequent |
|
|
| align:start position:0% |
| in order to support subsequent |
| |
|
|
| align:start position:0% |
| in order to support subsequent |
| processing and long-term reliability |
|
|
| align:start position:0% |
| processing and long-term reliability |
| |
|
|
| align:start position:0% |
| processing and long-term reliability |
| of the material on the wafer |
|
|
| align:start position:0% |
| of the material on the wafer |
| |
|
|
| align:start position:0% |
| of the material on the wafer |
| okay so they're making some measurements |
|
|
| align:start position:0% |
| okay so they're making some measurements |
| |
|
|
| align:start position:0% |
| okay so they're making some measurements |
| of film stress in fact the way they make |
|
|
| align:start position:0% |
| of film stress in fact the way they make |
| |
|
|
| align:start position:0% |
| of film stress in fact the way they make |
| this measurement i believe if i remember |
|
|
| align:start position:0% |
| this measurement i believe if i remember |
| |
|
|
| align:start position:0% |
| this measurement i believe if i remember |
| right is they measure the wafer bow |
|
|
| align:start position:0% |
| right is they measure the wafer bow |
| |
|
|
| align:start position:0% |
| right is they measure the wafer bow |
| and then based on |
|
|
| align:start position:0% |
| and then based on |
| |
|
|
| align:start position:0% |
| and then based on |
| assumed numbers for the modulus |
|
|
| align:start position:0% |
| assumed numbers for the modulus |
| |
|
|
| align:start position:0% |
| assumed numbers for the modulus |
| the young's modulus |
|
|
| align:start position:0% |
| the young's modulus |
| |
|
|
| align:start position:0% |
| the young's modulus |
| and perhaps the thickness they may |
|
|
| align:start position:0% |
| and perhaps the thickness they may |
| |
|
|
| align:start position:0% |
| and perhaps the thickness they may |
| measure the thickness separately |
|
|
| align:start position:0% |
| measure the thickness separately |
| |
|
|
| align:start position:0% |
| measure the thickness separately |
| they basically calculate or or estimate |
|
|
| align:start position:0% |
| they basically calculate or or estimate |
| |
|
|
| align:start position:0% |
| they basically calculate or or estimate |
| what the film stress stress |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| in some sense at whatever temperature |
|
|
| align:start position:0% |
| in some sense at whatever temperature |
| |
|
|
| align:start position:0% |
| in some sense at whatever temperature |
| you're you're doing if you could deposit |
|
|
| align:start position:0% |
| you're you're doing if you could deposit |
| |
|
|
| align:start position:0% |
| you're you're doing if you could deposit |
| the film and keep the wafer at 300 |
|
|
| align:start position:0% |
| the film and keep the wafer at 300 |
| |
|
|
| align:start position:0% |
| the film and keep the wafer at 300 |
| degrees or 100 whatever it is |
|
|
| align:start position:0% |
| degrees or 100 whatever it is |
| |
|
|
| align:start position:0% |
| degrees or 100 whatever it is |
| at that point in time i don't believe |
|
|
| align:start position:0% |
| at that point in time i don't believe |
| |
|
|
| align:start position:0% |
| at that point in time i don't believe |
| the wafer undergoes or experiences much |
|
|
| align:start position:0% |
| the wafer undergoes or experiences much |
| |
|
|
| align:start position:0% |
| the wafer undergoes or experiences much |
| stress during this deposition but then |
|
|
| align:start position:0% |
| stress during this deposition but then |
| |
|
|
| align:start position:0% |
| stress during this deposition but then |
| it's a |
|
|
| align:start position:0% |
| it's a |
| |
|
|
| align:start position:0% |
| it's a |
| temperature expansion difference |
|
|
| align:start position:0% |
| temperature expansion difference |
| |
|
|
| align:start position:0% |
| temperature expansion difference |
| i'm not entirely sure of that it's |
|
|
| align:start position:0% |
| i'm not entirely sure of that it's |
| |
|
|
| align:start position:0% |
| i'm not entirely sure of that it's |
| possible that the simple incorporation |
|
|
| align:start position:0% |
| possible that the simple incorporation |
| |
|
|
| align:start position:0% |
| possible that the simple incorporation |
| at the time |
|
|
| align:start position:0% |
| at the time |
| |
|
|
| align:start position:0% |
| at the time |
| of deposition |
|
|
| align:start position:0% |
| of deposition |
| |
|
|
| align:start position:0% |
| of deposition |
| also has some stress but really we're |
|
|
| align:start position:0% |
| also has some stress but really we're |
| |
|
|
| align:start position:0% |
| also has some stress but really we're |
| talking about intrinsic stress that our |
|
|
| align:start position:0% |
| talking about intrinsic stress that our |
| |
|
|
| align:start position:0% |
| talking about intrinsic stress that our |
| extrinsic stress that |
|
|
| align:start position:0% |
| extrinsic stress that |
| |
|
|
| align:start position:0% |
| extrinsic stress that |
| remains at the end of into processing |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| know any more on that hayden |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| i mean there are there are situations |
|
|
| align:start position:0% |
| i mean there are there are situations |
| |
|
|
| align:start position:0% |
| i mean there are there are situations |
| where |
|
|
| align:start position:0% |
| where |
| |
|
|
| align:start position:0% |
| where |
| you're depositing |
|
|
| align:start position:0% |
| you're depositing |
| |
|
|
| align:start position:0% |
| you're depositing |
| you know an epitaxial layer of say a |
|
|
| align:start position:0% |
| you know an epitaxial layer of say a |
| |
|
|
| align:start position:0% |
| you know an epitaxial layer of say a |
| semiconductor |
|
|
| align:start position:0% |
| semiconductor |
| |
|
|
| align:start position:0% |
| semiconductor |
| where that has a very clearly defined |
|
|
| align:start position:0% |
| where that has a very clearly defined |
| |
|
|
| align:start position:0% |
| where that has a very clearly defined |
| lattice whose pitch is mismatched with |
|
|
| align:start position:0% |
| lattice whose pitch is mismatched with |
| |
|
|
| align:start position:0% |
| lattice whose pitch is mismatched with |
| the substrate underneath in that case |
|
|
| align:start position:0% |
| the substrate underneath in that case |
| |
|
|
| align:start position:0% |
| the substrate underneath in that case |
| you know there's i guess a definite |
|
|
| align:start position:0% |
| you know there's i guess a definite |
| |
|
|
| align:start position:0% |
| you know there's i guess a definite |
| uh |
|
|
| align:start position:0% |
| uh |
| |
|
|
| align:start position:0% |
| uh |
| definite built-in stress that's going to |
|
|
| align:start position:0% |
| definite built-in stress that's going to |
| |
|
|
| align:start position:0% |
| definite built-in stress that's going to |
| result in that deposition that isn't |
|
|
| align:start position:0% |
| result in that deposition that isn't |
| |
|
|
| align:start position:0% |
| result in that deposition that isn't |
| connected with thermal contraction but i |
|
|
| align:start position:0% |
| connected with thermal contraction but i |
| |
|
|
| align:start position:0% |
| connected with thermal contraction but i |
| would have thought |
|
|
| align:start position:0% |
| would have thought |
| |
|
|
| align:start position:0% |
| would have thought |
| in this situation |
|
|
| align:start position:0% |
| in this situation |
| |
|
|
| align:start position:0% |
| in this situation |
| it's mostly |
|
|
| align:start position:0% |
| it's mostly |
| |
|
|
| align:start position:0% |
| it's mostly |
| it's mostly to do with |
|
|
| align:start position:0% |
| it's mostly to do with |
| |
|
|
| align:start position:0% |
| it's mostly to do with |
| you know the presence of impurities |
|
|
| align:start position:0% |
| you know the presence of impurities |
| |
|
|
| align:start position:0% |
| you know the presence of impurities |
| changing the cte of the deposited life |
|
|
| align:start position:0% |
| changing the cte of the deposited life |
| |
|
|
| align:start position:0% |
| changing the cte of the deposited life |
| that |
|
|
| align:start position:0% |
| that |
| |
|
|
| align:start position:0% |
| that |
| stretch |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| good |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| the fifth parameter that they measure |
|
|
| align:start position:0% |
| the fifth parameter that they measure |
| |
|
|
| align:start position:0% |
| the fifth parameter that they measure |
| and model is step coverage and so here |
|
|
| align:start position:0% |
| and model is step coverage and so here |
| |
|
|
| align:start position:0% |
| and model is step coverage and so here |
| that refers to |
|
|
| align:start position:0% |
| that refers to |
| |
|
|
| align:start position:0% |
| that refers to |
| essentially how good the deposition |
|
|
| align:start position:0% |
| essentially how good the deposition |
| |
|
|
| align:start position:0% |
| essentially how good the deposition |
| process is |
|
|
| align:start position:0% |
| process is |
| |
|
|
| align:start position:0% |
| process is |
| right here |
|
|
| align:start position:0% |
| right here |
| |
|
|
| align:start position:0% |
| right here |
| in filling |
|
|
| align:start position:0% |
| in filling |
| |
|
|
| align:start position:0% |
| in filling |
| filling these features now if all of |
|
|
| align:start position:0% |
| filling these features now if all of |
| |
|
|
| align:start position:0% |
| filling these features now if all of |
| your features are exactly the same size |
|
|
| align:start position:0% |
| your features are exactly the same size |
| |
|
|
| align:start position:0% |
| your features are exactly the same size |
| then that's that's a little bit easier |
|
|
| align:start position:0% |
| then that's that's a little bit easier |
| |
|
|
| align:start position:0% |
| then that's that's a little bit easier |
| so if all you're doing is filling |
|
|
| align:start position:0% |
| so if all you're doing is filling |
| |
|
|
| align:start position:0% |
| so if all you're doing is filling |
| contacts of exactly the same size |
|
|
| align:start position:0% |
| contacts of exactly the same size |
| |
|
|
| align:start position:0% |
| contacts of exactly the same size |
| then you've got a nice well-defined |
|
|
| align:start position:0% |
| then you've got a nice well-defined |
| |
|
|
| align:start position:0% |
| then you've got a nice well-defined |
| number for step coverage and that's |
|
|
| align:start position:0% |
| number for step coverage and that's |
| |
|
|
| align:start position:0% |
| number for step coverage and that's |
| really what they're doing in this |
|
|
| align:start position:0% |
| really what they're doing in this |
| |
|
|
| align:start position:0% |
| really what they're doing in this |
| application but i should mention that |
|
|
| align:start position:0% |
| application but i should mention that |
| |
|
|
| align:start position:0% |
| application but i should mention that |
| these kind of conformal depositions can |
|
|
| align:start position:0% |
| these kind of conformal depositions can |
| |
|
|
| align:start position:0% |
| these kind of conformal depositions can |
| actually be a very strong challenge for |
|
|
| align:start position:0% |
| actually be a very strong challenge for |
| |
|
|
| align:start position:0% |
| actually be a very strong challenge for |
| dealing with patterns or features of |
|
|
| align:start position:0% |
| dealing with patterns or features of |
| |
|
|
| align:start position:0% |
| dealing with patterns or features of |
| different sizes so you can imagine for |
|
|
| align:start position:0% |
| different sizes so you can imagine for |
| |
|
|
| align:start position:0% |
| different sizes so you can imagine for |
| example |
|
|
| align:start position:0% |
| example |
| |
|
|
| align:start position:0% |
| example |
| having some contacts here |
|
|
| align:start position:0% |
| having some contacts here |
| |
|
|
| align:start position:0% |
| having some contacts here |
| having some structures that might in |
|
|
| align:start position:0% |
| having some structures that might in |
| |
|
|
| align:start position:0% |
| having some structures that might in |
| fact be lines then having some other |
|
|
| align:start position:0% |
| fact be lines then having some other |
| |
|
|
| align:start position:0% |
| fact be lines then having some other |
| structures that are in fact very wide |
|
|
| align:start position:0% |
| structures that are in fact very wide |
| |
|
|
| align:start position:0% |
| structures that are in fact very wide |
| lines |
|
|
| align:start position:0% |
| lines |
| |
|
|
| align:start position:0% |
| lines |
| and now if i can formally fill i might |
|
|
| align:start position:0% |
| and now if i can formally fill i might |
| |
|
|
| align:start position:0% |
| and now if i can formally fill i might |
| be able to fill the narrow structures |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| but the wider ones will not necessarily |
|
|
| align:start position:0% |
| but the wider ones will not necessarily |
| |
|
|
| align:start position:0% |
| but the wider ones will not necessarily |
| fill completely i won't have excellent |
|
|
| align:start position:0% |
| fill completely i won't have excellent |
| |
|
|
| align:start position:0% |
| fill completely i won't have excellent |
| excellent step coverage now i believe |
|
|
| align:start position:0% |
| excellent step coverage now i believe |
| |
|
|
| align:start position:0% |
| excellent step coverage now i believe |
| what they're doing in this |
|
|
| align:start position:0% |
| what they're doing in this |
| |
|
|
| align:start position:0% |
| what they're doing in this |
| in this |
|
|
| align:start position:0% |
| in this |
| |
|
|
| align:start position:0% |
| in this |
| paper |
|
|
| align:start position:0% |
| paper |
| |
|
|
| align:start position:0% |
| paper |
| is really just looking locally |
|
|
| align:start position:0% |
| is really just looking locally |
| |
|
|
| align:start position:0% |
| is really just looking locally |
| after the deposition and looking to see |
|
|
| align:start position:0% |
| after the deposition and looking to see |
| |
|
|
| align:start position:0% |
| after the deposition and looking to see |
| sort of what percentage of volume |
|
|
| align:start position:0% |
| sort of what percentage of volume |
| |
|
|
| align:start position:0% |
| sort of what percentage of volume |
| is missing in that little in that little |
|
|
| align:start position:0% |
| is missing in that little in that little |
| |
|
|
| align:start position:0% |
| is missing in that little in that little |
| uh indentation resulting from the |
|
|
| align:start position:0% |
| uh indentation resulting from the |
| |
|
|
| align:start position:0% |
| uh indentation resulting from the |
| conformal deposition and looking for |
|
|
| align:start position:0% |
| conformal deposition and looking for |
| |
|
|
| align:start position:0% |
| conformal deposition and looking for |
| fairly high near 100 |
|
|
| align:start position:0% |
| fairly high near 100 |
| |
|
|
| align:start position:0% |
| fairly high near 100 |
| step coverage so that there's not a |
|
|
| align:start position:0% |
| step coverage so that there's not a |
| |
|
|
| align:start position:0% |
| step coverage so that there's not a |
| missing percentage |
|
|
| align:start position:0% |
| missing percentage |
| |
|
|
| align:start position:0% |
| missing percentage |
| of the feature |
|
|
| align:start position:0% |
| of the feature |
| |
|
|
| align:start position:0% |
| of the feature |
| compared to say |
|
|
| align:start position:0% |
| compared to say |
| |
|
|
| align:start position:0% |
| compared to say |
| one of these large structures that might |
|
|
| align:start position:0% |
| one of these large structures that might |
| |
|
|
| align:start position:0% |
| one of these large structures that might |
| have a very high missing missing volume |
|
|
| align:start position:0% |
| have a very high missing missing volume |
| |
|
|
| align:start position:0% |
| have a very high missing missing volume |
| generally they're able to achieve fairly |
|
|
| align:start position:0% |
| generally they're able to achieve fairly |
| |
|
|
| align:start position:0% |
| generally they're able to achieve fairly |
| high |
|
|
| align:start position:0% |
| high |
| |
|
|
| align:start position:0% |
| high |
| step coverages so that's not one of the |
|
|
| align:start position:0% |
| step coverages so that's not one of the |
| |
|
|
| align:start position:0% |
| step coverages so that's not one of the |
| critical critical output parameters in |
|
|
| align:start position:0% |
| critical critical output parameters in |
| |
|
|
| align:start position:0% |
| critical critical output parameters in |
| this process |
|
|
| align:start position:0% |
| this process |
| |
|
|
| align:start position:0% |
| this process |
| now also shown on this this picture and |
|
|
| align:start position:0% |
| now also shown on this this picture and |
| |
|
|
| align:start position:0% |
| now also shown on this this picture and |
| maybe a little bit hard for you to see |
|
|
| align:start position:0% |
| maybe a little bit hard for you to see |
| |
|
|
| align:start position:0% |
| maybe a little bit hard for you to see |
| it's also in the paper but on the right |
|
|
| align:start position:0% |
| it's also in the paper but on the right |
| |
|
|
| align:start position:0% |
| it's also in the paper but on the right |
| you see a |
|
|
| align:start position:0% |
| you see a |
| |
|
|
| align:start position:0% |
| you see a |
| top-down photograph or or sem micrograph |
|
|
| align:start position:0% |
| top-down photograph or or sem micrograph |
| |
|
|
| align:start position:0% |
| top-down photograph or or sem micrograph |
| of the surface structure and it gives |
|
|
| align:start position:0% |
| of the surface structure and it gives |
| |
|
|
| align:start position:0% |
| of the surface structure and it gives |
| you a sense a little bit of two things |
|
|
| align:start position:0% |
| you a sense a little bit of two things |
| |
|
|
| align:start position:0% |
| you a sense a little bit of two things |
| one is there's a lot of surface |
|
|
| align:start position:0% |
| one is there's a lot of surface |
| |
|
|
| align:start position:0% |
| one is there's a lot of surface |
| morphology going on |
|
|
| align:start position:0% |
| morphology going on |
| |
|
|
| align:start position:0% |
| morphology going on |
| surface roughness but the other basic |
|
|
| align:start position:0% |
| surface roughness but the other basic |
| |
|
|
| align:start position:0% |
| surface roughness but the other basic |
| thing that happens is as you're |
|
|
| align:start position:0% |
| thing that happens is as you're |
| |
|
|
| align:start position:0% |
| thing that happens is as you're |
| depositing these uh |
|
|
| align:start position:0% |
| depositing these uh |
| |
|
|
| align:start position:0% |
| depositing these uh |
| these materials they are lining up in |
|
|
| align:start position:0% |
| these materials they are lining up in |
| |
|
|
| align:start position:0% |
| these materials they are lining up in |
| sort of a polycrystalline kind of kind |
|
|
| align:start position:0% |
| sort of a polycrystalline kind of kind |
| |
|
|
| align:start position:0% |
| sort of a polycrystalline kind of kind |
| of way you do get some local |
|
|
| align:start position:0% |
| of way you do get some local |
| |
|
|
| align:start position:0% |
| of way you do get some local |
| self-organization you can see that also |
|
|
| align:start position:0% |
| self-organization you can see that also |
| |
|
|
| align:start position:0% |
| self-organization you can see that also |
| over here on the on the left side if you |
|
|
| align:start position:0% |
| over here on the on the left side if you |
| |
|
|
| align:start position:0% |
| over here on the on the left side if you |
| kind of see there's little crystals or |
|
|
| align:start position:0% |
| kind of see there's little crystals or |
| |
|
|
| align:start position:0% |
| kind of see there's little crystals or |
| little threads or |
|
|
| align:start position:0% |
| little threads or |
| |
|
|
| align:start position:0% |
| little threads or |
| and in here you can see |
|
|
| align:start position:0% |
| and in here you can see |
| |
|
|
| align:start position:0% |
| and in here you can see |
| see a little bit of the polycrystalline |
|
|
| align:start position:0% |
| see a little bit of the polycrystalline |
| |
|
|
| align:start position:0% |
| see a little bit of the polycrystalline |
| structure and that's actually one of the |
|
|
| align:start position:0% |
| structure and that's actually one of the |
| |
|
|
| align:start position:0% |
| structure and that's actually one of the |
| things that gives that surface roughness |
|
|
| align:start position:0% |
| things that gives that surface roughness |
| |
|
|
| align:start position:0% |
| things that gives that surface roughness |
| it's not surface roughness on the atom |
|
|
| align:start position:0% |
| it's not surface roughness on the atom |
| |
|
|
| align:start position:0% |
| it's not surface roughness on the atom |
| by atom level it's really these |
|
|
| align:start position:0% |
| by atom level it's really these |
| |
|
|
| align:start position:0% |
| by atom level it's really these |
| preferential growth directions in some |
|
|
| align:start position:0% |
| preferential growth directions in some |
| |
|
|
| align:start position:0% |
| preferential growth directions in some |
| of these some of these grains if you |
|
|
| align:start position:0% |
| of these some of these grains if you |
| |
|
|
| align:start position:0% |
| of these some of these grains if you |
| will |
|
|
| align:start position:0% |
| will |
| |
|
|
| align:start position:0% |
| will |
| as as they're growing |
|
|
| align:start position:0% |
| as as they're growing |
| |
|
|
| align:start position:0% |
| as as they're growing |
| okay |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| uh |
|
|
| align:start position:0% |
| uh |
| |
|
|
| align:start position:0% |
| uh |
| only two or three more parameters here |
|
|
| align:start position:0% |
| only two or three more parameters here |
| |
|
|
| align:start position:0% |
| only two or three more parameters here |
| another one and this is kind of neat i |
|
|
| align:start position:0% |
| another one and this is kind of neat i |
| |
|
|
| align:start position:0% |
| another one and this is kind of neat i |
| think because it's a |
|
|
| align:start position:0% |
| think because it's a |
| |
|
|
| align:start position:0% |
| think because it's a |
| nice parameter that contrasts with the |
|
|
| align:start position:0% |
| nice parameter that contrasts with the |
| |
|
|
| align:start position:0% |
| nice parameter that contrasts with the |
| other ones the other ones are let's see |
|
|
| align:start position:0% |
| other ones the other ones are let's see |
| |
|
|
| align:start position:0% |
| other ones the other ones are let's see |
| most of these things like step coverage |
|
|
| align:start position:0% |
| most of these things like step coverage |
| |
|
|
| align:start position:0% |
| most of these things like step coverage |
| film stress uniformity resistance |
|
|
| align:start position:0% |
| film stress uniformity resistance |
| |
|
|
| align:start position:0% |
| film stress uniformity resistance |
| uniformity those are parameters of the |
|
|
| align:start position:0% |
| uniformity those are parameters of the |
| |
|
|
| align:start position:0% |
| uniformity those are parameters of the |
| final wafer or the intermediate wafer |
|
|
| align:start position:0% |
| final wafer or the intermediate wafer |
| |
|
|
| align:start position:0% |
| final wafer or the intermediate wafer |
| state that you want to achieve |
|
|
| align:start position:0% |
| state that you want to achieve |
| |
|
|
| align:start position:0% |
| state that you want to achieve |
| deposition rate and wf6 conversion are |
|
|
| align:start position:0% |
| deposition rate and wf6 conversion are |
| |
|
|
| align:start position:0% |
| deposition rate and wf6 conversion are |
| both more manufacturing parameters |
|
|
| align:start position:0% |
| both more manufacturing parameters |
| |
|
|
| align:start position:0% |
| both more manufacturing parameters |
| in some sense they don't really matter |
|
|
| align:start position:0% |
| in some sense they don't really matter |
| |
|
|
| align:start position:0% |
| in some sense they don't really matter |
| to the final wafer product but they can |
|
|
| align:start position:0% |
| to the final wafer product but they can |
| |
|
|
| align:start position:0% |
| to the final wafer product but they can |
| matter a great deal for the cost |
|
|
| align:start position:0% |
| matter a great deal for the cost |
| |
|
|
| align:start position:0% |
| matter a great deal for the cost |
| efficiency or the time efficiency of the |
|
|
| align:start position:0% |
| efficiency or the time efficiency of the |
| |
|
|
| align:start position:0% |
| efficiency or the time efficiency of the |
| process |
|
|
| align:start position:0% |
| process |
| |
|
|
| align:start position:0% |
| process |
| so wf6 conversion is what percentage of |
|
|
| align:start position:0% |
| so wf6 conversion is what percentage of |
| |
|
|
| align:start position:0% |
| so wf6 conversion is what percentage of |
| the incoming |
|
|
| align:start position:0% |
| the incoming |
| |
|
|
| align:start position:0% |
| the incoming |
| gas is actually resulting in |
|
|
| align:start position:0% |
| gas is actually resulting in |
| |
|
|
| align:start position:0% |
| gas is actually resulting in |
| the deposited film so you might have |
|
|
| align:start position:0% |
| the deposited film so you might have |
| |
|
|
| align:start position:0% |
| the deposited film so you might have |
| uh only you know one percent of the |
|
|
| align:start position:0% |
| uh only you know one percent of the |
| |
|
|
| align:start position:0% |
| uh only you know one percent of the |
| tungsten |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| going on to the wafer and 99 percent |
|
|
| align:start position:0% |
| going on to the wafer and 99 percent |
| |
|
|
| align:start position:0% |
| going on to the wafer and 99 percent |
| going out the exhaust pipe |
|
|
| align:start position:0% |
| going out the exhaust pipe |
| |
|
|
| align:start position:0% |
| going out the exhaust pipe |
| that's terrible waste they have some |
|
|
| align:start position:0% |
| that's terrible waste they have some |
| |
|
|
| align:start position:0% |
| that's terrible waste they have some |
| environmental implications |
|
|
| align:start position:0% |
| environmental implications |
| |
|
|
| align:start position:0% |
| environmental implications |
| but it also uh has a lot of cost |
|
|
| align:start position:0% |
| but it also uh has a lot of cost |
| |
|
|
| align:start position:0% |
| but it also uh has a lot of cost |
| implications because tungsten |
|
|
| align:start position:0% |
| implications because tungsten |
| |
|
|
| align:start position:0% |
| implications because tungsten |
| hexafluoride is not a cheap gas |
|
|
| align:start position:0% |
| hexafluoride is not a cheap gas |
| |
|
|
| align:start position:0% |
| hexafluoride is not a cheap gas |
| you know very very highly purified so i |
|
|
| align:start position:0% |
| you know very very highly purified so i |
| |
|
|
| align:start position:0% |
| you know very very highly purified so i |
| like this paper in terms of they're |
|
|
| align:start position:0% |
| like this paper in terms of they're |
| |
|
|
| align:start position:0% |
| like this paper in terms of they're |
| actually trying to track and keep track |
|
|
| align:start position:0% |
| actually trying to track and keep track |
| |
|
|
| align:start position:0% |
| actually trying to track and keep track |
| of |
|
|
| align:start position:0% |
| of |
| |
|
|
| align:start position:0% |
| of |
| and model |
|
|
| align:start position:0% |
| and model |
| |
|
|
| align:start position:0% |
| and model |
| the ws6 conversion rate and try to |
|
|
| align:start position:0% |
| the ws6 conversion rate and try to |
| |
|
|
| align:start position:0% |
| the ws6 conversion rate and try to |
| optimize that |
|
|
| align:start position:0% |
| optimize that |
| |
|
|
| align:start position:0% |
| optimize that |
| parameter also |
|
|
| align:start position:0% |
| parameter also |
| |
|
|
| align:start position:0% |
| parameter also |
| then finally a couple more |
|
|
| align:start position:0% |
| then finally a couple more |
| |
|
|
| align:start position:0% |
| then finally a couple more |
| parameters here reflectance is basically |
|
|
| align:start position:0% |
| parameters here reflectance is basically |
| |
|
|
| align:start position:0% |
| parameters here reflectance is basically |
| an optical reflectance uh percentage |
|
|
| align:start position:0% |
| an optical reflectance uh percentage |
| |
|
|
| align:start position:0% |
| an optical reflectance uh percentage |
| light reflected uh kind of measurement |
|
|
| align:start position:0% |
| light reflected uh kind of measurement |
| |
|
|
| align:start position:0% |
| light reflected uh kind of measurement |
| uh of the surface |
|
|
| align:start position:0% |
| uh of the surface |
| |
|
|
| align:start position:0% |
| uh of the surface |
| topography so that's how they're trying |
|
|
| align:start position:0% |
| topography so that's how they're trying |
| |
|
|
| align:start position:0% |
| topography so that's how they're trying |
| to estimate or correlate to the |
|
|
| align:start position:0% |
| to estimate or correlate to the |
| |
|
|
| align:start position:0% |
| to estimate or correlate to the |
| roughness of the surface film |
|
|
| align:start position:0% |
| roughness of the surface film |
| |
|
|
| align:start position:0% |
| roughness of the surface film |
| and then finally another manufacturing |
|
|
| align:start position:0% |
| and then finally another manufacturing |
| |
|
|
| align:start position:0% |
| and then finally another manufacturing |
| parameter is |
|
|
| align:start position:0% |
| parameter is |
| |
|
|
| align:start position:0% |
| parameter is |
| reproducibility not just wafer |
|
|
| align:start position:0% |
| reproducibility not just wafer |
| |
|
|
| align:start position:0% |
| reproducibility not just wafer |
| uniformity |
|
|
| align:start position:0% |
| uniformity |
| |
|
|
| align:start position:0% |
| uniformity |
| you know wait for one one wafer at a |
|
|
| align:start position:0% |
| you know wait for one one wafer at a |
| |
|
|
| align:start position:0% |
| you know wait for one one wafer at a |
| time but wait for it to wait for |
|
|
| align:start position:0% |
| time but wait for it to wait for |
| |
|
|
| align:start position:0% |
| time but wait for it to wait for |
| repeatability or reproducibility of the |
|
|
| align:start position:0% |
| repeatability or reproducibility of the |
| |
|
|
| align:start position:0% |
| repeatability or reproducibility of the |
| process so they are actually making in |
|
|
| align:start position:0% |
| process so they are actually making in |
| |
|
|
| align:start position:0% |
| process so they are actually making in |
| this case i think the assumption |
|
|
| align:start position:0% |
| this case i think the assumption |
| |
|
|
| align:start position:0% |
| this case i think the assumption |
| that pretty much all of these processes |
|
|
| align:start position:0% |
| that pretty much all of these processes |
| |
|
|
| align:start position:0% |
| that pretty much all of these processes |
| are |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| more or less similarly repeatable but |
|
|
| align:start position:0% |
| more or less similarly repeatable but |
| |
|
|
| align:start position:0% |
| more or less similarly repeatable but |
| they want to estimate how |
|
|
| align:start position:0% |
| they want to estimate how |
| |
|
|
| align:start position:0% |
| they want to estimate how |
| repeatable the process is and we'll see |
|
|
| align:start position:0% |
| repeatable the process is and we'll see |
| |
|
|
| align:start position:0% |
| repeatable the process is and we'll see |
| that in their doe they're going to |
|
|
| align:start position:0% |
| that in their doe they're going to |
| |
|
|
| align:start position:0% |
| that in their doe they're going to |
| basically do some replicates |
|
|
| align:start position:0% |
| basically do some replicates |
| |
|
|
| align:start position:0% |
| basically do some replicates |
| at one of the design points and use that |
|
|
| align:start position:0% |
| at one of the design points and use that |
| |
|
|
| align:start position:0% |
| at one of the design points and use that |
| to estimate reproducibility |
|
|
| align:start position:0% |
| to estimate reproducibility |
| |
|
|
| align:start position:0% |
| to estimate reproducibility |
| so they're not going in and trying to |
|
|
| align:start position:0% |
| so they're not going in and trying to |
| |
|
|
| align:start position:0% |
| so they're not going in and trying to |
| estimate where |
|
|
| align:start position:0% |
| estimate where |
| |
|
|
| align:start position:0% |
| estimate where |
| the noise or the variance is minimum |
|
|
| align:start position:0% |
| the noise or the variance is minimum |
| |
|
|
| align:start position:0% |
| the noise or the variance is minimum |
| across their operating space they're |
|
|
| align:start position:0% |
| across their operating space they're |
| |
|
|
| align:start position:0% |
| across their operating space they're |
| actually assuming that that's |
|
|
| align:start position:0% |
| actually assuming that that's |
| |
|
|
| align:start position:0% |
| actually assuming that that's |
| that |
|
|
| align:start position:0% |
| that |
| |
|
|
| align:start position:0% |
| that |
| similar okay |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| so |
|
|
| align:start position:0% |
| so |
| |
|
|
| align:start position:0% |
| so |
| here's what they do in the paper their |
|
|
| align:start position:0% |
| here's what they do in the paper their |
| |
|
|
| align:start position:0% |
| here's what they do in the paper their |
| goals are to build response service |
|
|
| align:start position:0% |
| goals are to build response service |
| |
|
|
| align:start position:0% |
| goals are to build response service |
| models just classic response surface |
|
|
| align:start position:0% |
| models just classic response surface |
| |
|
|
| align:start position:0% |
| models just classic response surface |
| models |
|
|
| align:start position:0% |
| models |
| |
|
|
| align:start position:0% |
| models |
| and then i as i said the reproducibility |
|
|
| align:start position:0% |
| and then i as i said the reproducibility |
| |
|
|
| align:start position:0% |
| and then i as i said the reproducibility |
| is really focused just on the center |
|
|
| align:start position:0% |
| is really focused just on the center |
| |
|
|
| align:start position:0% |
| is really focused just on the center |
| point designs |
|
|
| align:start position:0% |
| point designs |
| |
|
|
| align:start position:0% |
| point designs |
| and applying that throughout the entire |
|
|
| align:start position:0% |
| and applying that throughout the entire |
| |
|
|
| align:start position:0% |
| and applying that throughout the entire |
| space |
|
|
| align:start position:0% |
| space |
| |
|
|
| align:start position:0% |
| space |
| and then they want to use these response |
|
|
| align:start position:0% |
| and then they want to use these response |
| |
|
|
| align:start position:0% |
| and then they want to use these response |
| surface models |
|
|
| align:start position:0% |
| surface models |
| |
|
|
| align:start position:0% |
| surface models |
| they want to qualitatively understand |
|
|
| align:start position:0% |
| they want to qualitatively understand |
| |
|
|
| align:start position:0% |
| they want to qualitatively understand |
| some of the trends |
|
|
| align:start position:0% |
| some of the trends |
| |
|
|
| align:start position:0% |
| some of the trends |
| very good engineering use you know |
|
|
| align:start position:0% |
| very good engineering use you know |
| |
|
|
| align:start position:0% |
| very good engineering use you know |
| trying to understand from an engineering |
|
|
| align:start position:0% |
| trying to understand from an engineering |
| |
|
|
| align:start position:0% |
| trying to understand from an engineering |
| point and then they also want to use |
|
|
| align:start position:0% |
| point and then they also want to use |
| |
|
|
| align:start position:0% |
| point and then they also want to use |
| these models in an optimization |
|
|
| align:start position:0% |
| these models in an optimization |
| |
|
|
| align:start position:0% |
| these models in an optimization |
| kind of loop to try to drive towards |
|
|
| align:start position:0% |
| kind of loop to try to drive towards |
| |
|
|
| align:start position:0% |
| kind of loop to try to drive towards |
| satisfaction of multiple |
|
|
| align:start position:0% |
| satisfaction of multiple |
| |
|
|
| align:start position:0% |
| satisfaction of multiple |
| limits or goals on those |
|
|
| align:start position:0% |
| limits or goals on those |
| |
|
|
| align:start position:0% |
| limits or goals on those |
| what was it seven or eight uh output |
|
|
| align:start position:0% |
| what was it seven or eight uh output |
| |
|
|
| align:start position:0% |
| what was it seven or eight uh output |
| parameters |
|
|
| align:start position:0% |
| parameters |
| |
|
|
| align:start position:0% |
| parameters |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| now the paper does refer to some prior |
|
|
| align:start position:0% |
| now the paper does refer to some prior |
| |
|
|
| align:start position:0% |
| now the paper does refer to some prior |
| work on screening experiments in fact |
|
|
| align:start position:0% |
| work on screening experiments in fact |
| |
|
|
| align:start position:0% |
| work on screening experiments in fact |
| uh these uh |
|
|
| align:start position:0% |
| uh these uh |
| |
|
|
| align:start position:0% |
| uh these uh |
| precision 5000 tools and most fab tools |
|
|
| align:start position:0% |
| precision 5000 tools and most fab tools |
| |
|
|
| align:start position:0% |
| precision 5000 tools and most fab tools |
| probably have |
|
|
| align:start position:0% |
| probably have |
| |
|
|
| align:start position:0% |
| probably have |
| literally in some cases dozens of |
|
|
| align:start position:0% |
| literally in some cases dozens of |
| |
|
|
| align:start position:0% |
| literally in some cases dozens of |
| control settings some |
|
|
| align:start position:0% |
| control settings some |
| |
|
|
| align:start position:0% |
| control settings some |
| subset of which maybe only |
|
|
| align:start position:0% |
| subset of which maybe only |
| |
|
|
| align:start position:0% |
| subset of which maybe only |
|
|
| align:start position:0% |
| |
|
|
| align:start position:0% |
| are easily settable electronically and |
|
|
| align:start position:0% |
| are easily settable electronically and |
| |
|
|
| align:start position:0% |
| are easily settable electronically and |
| another 15 might be more mechanical or |
|
|
| align:start position:0% |
| another 15 might be more mechanical or |
| |
|
|
| align:start position:0% |
| another 15 might be more mechanical or |
| other you know more permanent |
|
|
| align:start position:0% |
| other you know more permanent |
| |
|
|
| align:start position:0% |
| other you know more permanent |
| adjustments but there's a huge space of |
|
|
| align:start position:0% |
| adjustments but there's a huge space of |
| |
|
|
| align:start position:0% |
| adjustments but there's a huge space of |
| possible parameters the paper just |
|
|
| align:start position:0% |
| possible parameters the paper just |
| |
|
|
| align:start position:0% |
| possible parameters the paper just |
| refers to prior screening experiments to |
|
|
| align:start position:0% |
| refers to prior screening experiments to |
| |
|
|
| align:start position:0% |
| refers to prior screening experiments to |
| narrow down to these four parameters so |
|
|
| align:start position:0% |
| narrow down to these four parameters so |
| |
|
|
| align:start position:0% |
| narrow down to these four parameters so |
| i don't want you to think that they knew |
|
|
| align:start position:0% |
| i don't want you to think that they knew |
| |
|
|
| align:start position:0% |
| i don't want you to think that they knew |
| automatically up front what four |
|
|
| align:start position:0% |
| automatically up front what four |
| |
|
|
| align:start position:0% |
| automatically up front what four |
| parameters they wanted to play with |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| there is a reference if you want to go |
|
|
| align:start position:0% |
| there is a reference if you want to go |
| |
|
|
| align:start position:0% |
| there is a reference if you want to go |
| try to track it down further for their |
|
|
| align:start position:0% |
| try to track it down further for their |
| |
|
|
| align:start position:0% |
| try to track it down further for their |
| prior work it's actually in some obscure |
|
|
| align:start position:0% |
| prior work it's actually in some obscure |
| |
|
|
| align:start position:0% |
| prior work it's actually in some obscure |
| conference thing so it's hard to hard to |
|
|
| align:start position:0% |
| conference thing so it's hard to hard to |
| |
|
|
| align:start position:0% |
| conference thing so it's hard to hard to |
| find um |
|
|
| align:start position:0% |
| find um |
| |
|
|
| align:start position:0% |
| find um |
| so the details exactly of what they did |
|
|
| align:start position:0% |
| so the details exactly of what they did |
| |
|
|
| align:start position:0% |
| so the details exactly of what they did |
| in their in their screening are not |
|
|
| align:start position:0% |
| in their in their screening are not |
| |
|
|
| align:start position:0% |
| in their in their screening are not |
| entirely clear but the point is they |
|
|
| align:start position:0% |
| entirely clear but the point is they |
| |
|
|
| align:start position:0% |
| entirely clear but the point is they |
| probably did something like |
|
|
| align:start position:0% |
| probably did something like |
| |
|
|
| align:start position:0% |
| probably did something like |
| a fractional factorial |
|
|
| align:start position:0% |
| a fractional factorial |
| |
|
|
| align:start position:0% |
| a fractional factorial |
| highly fractionalized factorial kind of |
|
|
| align:start position:0% |
| highly fractionalized factorial kind of |
| |
|
|
| align:start position:0% |
| highly fractionalized factorial kind of |
| design |
|
|
| align:start position:0% |
| design |
| |
|
|
| align:start position:0% |
| design |
| to explore the space of just trying to |
|
|
| align:start position:0% |
| to explore the space of just trying to |
| |
|
|
| align:start position:0% |
| to explore the space of just trying to |
| see what parameters are significant what |
|
|
| align:start position:0% |
| see what parameters are significant what |
| |
|
|
| align:start position:0% |
| see what parameters are significant what |
| influence what input parameters |
|
|
| align:start position:0% |
| influence what input parameters |
| |
|
|
| align:start position:0% |
| influence what input parameters |
| influence the outputs that they were |
|
|
| align:start position:0% |
| influence the outputs that they were |
| |
|
|
| align:start position:0% |
| influence the outputs that they were |
| of concern and then narrow that down to |
|
|
| align:start position:0% |
| of concern and then narrow that down to |
| |
|
|
| align:start position:0% |
| of concern and then narrow that down to |
| just these four parameters that they |
|
|
| align:start position:0% |
| just these four parameters that they |
| |
|
|
| align:start position:0% |
| just these four parameters that they |
| wanted to do |
|
|
| align:start position:0% |
| wanted to do |
| |
|
|
| align:start position:0% |
| wanted to do |
| a second set of experiments which is |
|
|
| align:start position:0% |
| a second set of experiments which is |
| |
|
|
| align:start position:0% |
| a second set of experiments which is |
| what's in this in this paper that are |
|
|
| align:start position:0% |
| what's in this in this paper that are |
| |
|
|
| align:start position:0% |
| what's in this in this paper that are |
| focused on response surface modeling |
|
|
| align:start position:0% |
| focused on response surface modeling |
| |
|
|
| align:start position:0% |
| focused on response surface modeling |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| there's another |
|
|
| align:start position:0% |
| there's another |
| |
|
|
| align:start position:0% |
| there's another |
| interesting subtle point that |
|
|
| align:start position:0% |
| interesting subtle point that |
| |
|
|
| align:start position:0% |
| interesting subtle point that |
| pops up in the in the description of the |
|
|
| align:start position:0% |
| pops up in the in the description of the |
| |
|
|
| align:start position:0% |
| pops up in the in the description of the |
| paper |
|
|
| align:start position:0% |
| paper |
| |
|
|
| align:start position:0% |
| paper |
| some of these parameters things like |
|
|
| align:start position:0% |
| some of these parameters things like |
| |
|
|
| align:start position:0% |
| some of these parameters things like |
| sheet resistance sheet resistance is |
|
|
| align:start position:0% |
| sheet resistance sheet resistance is |
| |
|
|
| align:start position:0% |
| sheet resistance sheet resistance is |
| resistivity |
|
|
| align:start position:0% |
| resistivity |
| |
|
|
| align:start position:0% |
| resistivity |
| uh |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| is it divided by |
|
|
| align:start position:0% |
| is it divided by |
| |
|
|
| align:start position:0% |
| is it divided by |
| per square resistivity the the pure |
|
|
| align:start position:0% |
| per square resistivity the the pure |
| |
|
|
| align:start position:0% |
| per square resistivity the the pure |
| resistivity divided by the thickness |
|
|
| align:start position:0% |
| resistivity divided by the thickness |
| |
|
|
| align:start position:0% |
| resistivity divided by the thickness |
| uh of the film |
|
|
| align:start position:0% |
| uh of the film |
| |
|
|
| align:start position:0% |
| uh of the film |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| so that the thickness of the deposited |
|
|
| align:start position:0% |
| so that the thickness of the deposited |
| |
|
|
| align:start position:0% |
| so that the thickness of the deposited |
| film will change the rs measure |
|
|
| align:start position:0% |
| film will change the rs measure |
| |
|
|
| align:start position:0% |
| film will change the rs measure |
| on the wafer okay |
|
|
| align:start position:0% |
| on the wafer okay |
| |
|
|
| align:start position:0% |
| on the wafer okay |
| what that means is to do a fair |
|
|
| align:start position:0% |
| what that means is to do a fair |
| |
|
|
| align:start position:0% |
| what that means is to do a fair |
| comparison just of truly the resistivity |
|
|
| align:start position:0% |
| comparison just of truly the resistivity |
| |
|
|
| align:start position:0% |
| comparison just of truly the resistivity |
| of the film |
|
|
| align:start position:0% |
| of the film |
| |
|
|
| align:start position:0% |
| of the film |
| and uh or to estimate that you actually |
|
|
| align:start position:0% |
| and uh or to estimate that you actually |
| |
|
|
| align:start position:0% |
| and uh or to estimate that you actually |
| want to grow |
|
|
| align:start position:0% |
| want to grow |
| |
|
|
| align:start position:0% |
| want to grow |
| all of your films to about the same |
|
|
| align:start position:0% |
| all of your films to about the same |
| |
|
|
| align:start position:0% |
| all of your films to about the same |
| thickness |
|
|
| align:start position:0% |
| thickness |
| |
|
|
| align:start position:0% |
| thickness |
| well if the deposition rate is a |
|
|
| align:start position:0% |
| well if the deposition rate is a |
| |
|
|
| align:start position:0% |
| well if the deposition rate is a |
| parameter that you don't necessarily |
|
|
| align:start position:0% |
| parameter that you don't necessarily |
| |
|
|
| align:start position:0% |
| parameter that you don't necessarily |
| know and you're trying to model how do |
|
|
| align:start position:0% |
| know and you're trying to model how do |
| |
|
|
| align:start position:0% |
| know and you're trying to model how do |
| you do that |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| so in other words if i run for a fixed |
|
|
| align:start position:0% |
| so in other words if i run for a fixed |
| |
|
|
| align:start position:0% |
| so in other words if i run for a fixed |
| period of time maybe i run for 60 |
|
|
| align:start position:0% |
| period of time maybe i run for 60 |
| |
|
|
| align:start position:0% |
| period of time maybe i run for 60 |
| seconds on each of these design points |
|
|
| align:start position:0% |
| seconds on each of these design points |
| |
|
|
| align:start position:0% |
| seconds on each of these design points |
| but i have deposition rates that are |
|
|
| align:start position:0% |
| but i have deposition rates that are |
| |
|
|
| align:start position:0% |
| but i have deposition rates that are |
| different by a factor of 2 5 10 i'm |
|
|
| align:start position:0% |
| different by a factor of 2 5 10 i'm |
| |
|
|
| align:start position:0% |
| different by a factor of 2 5 10 i'm |
| going to get widely varying thicknesses |
|
|
| align:start position:0% |
| going to get widely varying thicknesses |
| |
|
|
| align:start position:0% |
| going to get widely varying thicknesses |
| and therefore when i make some of these |
|
|
| align:start position:0% |
| and therefore when i make some of these |
| |
|
|
| align:start position:0% |
| and therefore when i make some of these |
| simple sheet resistance measurements |
|
|
| align:start position:0% |
| simple sheet resistance measurements |
| |
|
|
| align:start position:0% |
| simple sheet resistance measurements |
| that's that's going to be very very |
|
|
| align:start position:0% |
| that's that's going to be very very |
| |
|
|
| align:start position:0% |
| that's that's going to be very very |
| tricky |
|
|
| align:start position:0% |
| tricky |
| |
|
|
| align:start position:0% |
| tricky |
| furthermore if if my thickness is |
|
|
| align:start position:0% |
| furthermore if if my thickness is |
| |
|
|
| align:start position:0% |
| furthermore if if my thickness is |
| varying |
|
|
| align:start position:0% |
| varying |
| |
|
|
| align:start position:0% |
| varying |
| that makes it basis for comparison of |
|
|
| align:start position:0% |
| that makes it basis for comparison of |
| |
|
|
| align:start position:0% |
| that makes it basis for comparison of |
| many of these other parameters really |
|
|
| align:start position:0% |
| many of these other parameters really |
| |
|
|
| align:start position:0% |
| many of these other parameters really |
| hard |
|
|
| align:start position:0% |
| hard |
| |
|
|
| align:start position:0% |
| hard |
| how about film stress |
|
|
| align:start position:0% |
| how about film stress |
| |
|
|
| align:start position:0% |
| how about film stress |
| well is it a film stress that i'm seeing |
|
|
| align:start position:0% |
| well is it a film stress that i'm seeing |
| |
|
|
| align:start position:0% |
| well is it a film stress that i'm seeing |
| because of the thickness difference or |
|
|
| align:start position:0% |
| because of the thickness difference or |
| |
|
|
| align:start position:0% |
| because of the thickness difference or |
| is it truly intrinsic film stress in the |
|
|
| align:start position:0% |
| is it truly intrinsic film stress in the |
| |
|
|
| align:start position:0% |
| is it truly intrinsic film stress in the |
| in |
|
|
| align:start position:0% |
| in |
| |
|
|
| align:start position:0% |
| in |
| the layer |
|
|
| align:start position:0% |
| the layer |
| |
|
|
| align:start position:0% |
| the layer |
| so what they've done is been and i think |
|
|
| align:start position:0% |
| so what they've done is been and i think |
| |
|
|
| align:start position:0% |
| so what they've done is been and i think |
| this is very cool they were very careful |
|
|
| align:start position:0% |
| this is very cool they were very careful |
| |
|
|
| align:start position:0% |
| this is very cool they were very careful |
| and they |
|
|
| align:start position:0% |
| and they |
| |
|
|
| align:start position:0% |
| and they |
| say that they are doing this to where |
|
|
| align:start position:0% |
| say that they are doing this to where |
| |
|
|
| align:start position:0% |
| say that they are doing this to where |
| all films are grown to about one micron |
|
|
| align:start position:0% |
| all films are grown to about one micron |
| |
|
|
| align:start position:0% |
| all films are grown to about one micron |
| thickness in this |
|
|
| align:start position:0% |
| thickness in this |
| |
|
|
| align:start position:0% |
| thickness in this |
| doe what's sneaky is i think to actually |
|
|
| align:start position:0% |
| doe what's sneaky is i think to actually |
| |
|
|
| align:start position:0% |
| doe what's sneaky is i think to actually |
| do this |
|
|
| align:start position:0% |
| do this |
| |
|
|
| align:start position:0% |
| do this |
| which is also good because that |
|
|
| align:start position:0% |
| which is also good because that |
| |
|
|
| align:start position:0% |
| which is also good because that |
| is really the the thickness that's close |
|
|
| align:start position:0% |
| is really the the thickness that's close |
| |
|
|
| align:start position:0% |
| is really the the thickness that's close |
| to their target application |
|
|
| align:start position:0% |
| to their target application |
| |
|
|
| align:start position:0% |
| to their target application |
| what's what's a little bit sneaky is to |
|
|
| align:start position:0% |
| what's what's a little bit sneaky is to |
| |
|
|
| align:start position:0% |
| what's what's a little bit sneaky is to |
| do that i think they basically had to do |
|
|
| align:start position:0% |
| do that i think they basically had to do |
| |
|
|
| align:start position:0% |
| do that i think they basically had to do |
| prior runs maybe at each individual voe |
|
|
| align:start position:0% |
| prior runs maybe at each individual voe |
| |
|
|
| align:start position:0% |
| prior runs maybe at each individual voe |
| point |
|
|
| align:start position:0% |
| point |
| |
|
|
| align:start position:0% |
| point |
| to |
|
|
| align:start position:0% |
| to |
| |
|
|
| align:start position:0% |
| to |
| do the run |
|
|
| align:start position:0% |
| do the run |
| |
|
|
| align:start position:0% |
| do the run |
| measure the thickness |
|
|
| align:start position:0% |
| measure the thickness |
| |
|
|
| align:start position:0% |
| measure the thickness |
| estimate the growth rate |
|
|
| align:start position:0% |
| estimate the growth rate |
| |
|
|
| align:start position:0% |
| estimate the growth rate |
| and then adjust the time for the real |
|
|
| align:start position:0% |
| and then adjust the time for the real |
| |
|
|
| align:start position:0% |
| and then adjust the time for the real |
| doe run |
|
|
| align:start position:0% |
| doe run |
| |
|
|
| align:start position:0% |
| doe run |
| on each of the design points so i think |
|
|
| align:start position:0% |
| on each of the design points so i think |
| |
|
|
| align:start position:0% |
| on each of the design points so i think |
| that there's a whole extra duplicate set |
|
|
| align:start position:0% |
| that there's a whole extra duplicate set |
| |
|
|
| align:start position:0% |
| that there's a whole extra duplicate set |
| of experiments that they're not talking |
|
|
| align:start position:0% |
| of experiments that they're not talking |
| |
|
|
| align:start position:0% |
| of experiments that they're not talking |
| about |
|
|
| align:start position:0% |
| about |
| |
|
|
| align:start position:0% |
| about |
| that that that were done in order to be |
|
|
| align:start position:0% |
| that that that were done in order to be |
| |
|
|
| align:start position:0% |
| that that that were done in order to be |
| able to normalize |
|
|
| align:start position:0% |
| able to normalize |
| |
|
|
| align:start position:0% |
| able to normalize |
| and get a very nice |
|
|
| align:start position:0% |
| and get a very nice |
| |
|
|
| align:start position:0% |
| and get a very nice |
| set of experiments in here |
|
|
| align:start position:0% |
| set of experiments in here |
| |
|
|
| align:start position:0% |
| set of experiments in here |
| that they could talk about and be able |
|
|
| align:start position:0% |
| that they could talk about and be able |
| |
|
|
| align:start position:0% |
| that they could talk about and be able |
| to use to use |
|
|
| align:start position:0% |
| to use to use |
| |
|
|
| align:start position:0% |
| to use to use |
| to make the right kinds of optimization |
|
|
| align:start position:0% |
| to make the right kinds of optimization |
| |
|
|
| align:start position:0% |
| to make the right kinds of optimization |
| and judgment |
|
|
| align:start position:0% |
| and judgment |
| |
|
|
| align:start position:0% |
| and judgment |
| so it's kind of an interesting lesson i |
|
|
| align:start position:0% |
| so it's kind of an interesting lesson i |
| |
|
|
| align:start position:0% |
| so it's kind of an interesting lesson i |
| think there may often be additional |
|
|
| align:start position:0% |
| think there may often be additional |
| |
|
|
| align:start position:0% |
| think there may often be additional |
| experimentation around |
|
|
| align:start position:0% |
| experimentation around |
| |
|
|
| align:start position:0% |
| experimentation around |
| your main doe that you have to do in |
|
|
| align:start position:0% |
| your main doe that you have to do in |
| |
|
|
| align:start position:0% |
| your main doe that you have to do in |
| order for your main doe to really be a |
|
|
| align:start position:0% |
| order for your main doe to really be a |
| |
|
|
| align:start position:0% |
| order for your main doe to really be a |
| good clean |
|
|
| align:start position:0% |
| good clean |
| |
|
|
| align:start position:0% |
| good clean |
| doe |
|
|
| align:start position:0% |
| doe |
| |
|
|
| align:start position:0% |
| doe |
| now it's possible that maybe |
|
|
| align:start position:0% |
| now it's possible that maybe |
| |
|
|
| align:start position:0% |
| now it's possible that maybe |
| their screening experiment gave them |
|
|
| align:start position:0% |
| their screening experiment gave them |
| |
|
|
| align:start position:0% |
| their screening experiment gave them |
| some information to be able to do a |
|
|
| align:start position:0% |
| some information to be able to do a |
| |
|
|
| align:start position:0% |
| some information to be able to do a |
| rough estimate a good enough estimate of |
|
|
| align:start position:0% |
| rough estimate a good enough estimate of |
| |
|
|
| align:start position:0% |
| rough estimate a good enough estimate of |
| deposition rate so it's possible they |
|
|
| align:start position:0% |
| deposition rate so it's possible they |
| |
|
|
| align:start position:0% |
| deposition rate so it's possible they |
| were able to get that benefit from from |
|
|
| align:start position:0% |
| were able to get that benefit from from |
| |
|
|
| align:start position:0% |
| were able to get that benefit from from |
| their prior screening doe |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay here's their experimental design |
|
|
| align:start position:0% |
| okay here's their experimental design |
| |
|
|
| align:start position:0% |
| okay here's their experimental design |
| what they're going to do is a central |
|
|
| align:start position:0% |
| what they're going to do is a central |
| |
|
|
| align:start position:0% |
| what they're going to do is a central |
| composite with five levels |
|
|
| align:start position:0% |
| composite with five levels |
| |
|
|
| align:start position:0% |
| composite with five levels |
| at each |
|
|
| align:start position:0% |
| at each |
| |
|
|
| align:start position:0% |
| at each |
| design point which is pretty cool i |
|
|
| align:start position:0% |
| design point which is pretty cool i |
| |
|
|
| align:start position:0% |
| design point which is pretty cool i |
| think that's better than the three |
|
|
| align:start position:0% |
| think that's better than the three |
| |
|
|
| align:start position:0% |
| think that's better than the three |
| levels |
|
|
| align:start position:0% |
| levels |
| |
|
|
| align:start position:0% |
| levels |
| what's one reason that you might like |
|
|
| align:start position:0% |
| what's one reason that you might like |
| |
|
|
| align:start position:0% |
| what's one reason that you might like |
| five levels |
|
|
| align:start position:0% |
| five levels |
| |
|
|
| align:start position:0% |
| five levels |
| rather than three especially if you want |
|
|
| align:start position:0% |
| rather than three especially if you want |
| |
|
|
| align:start position:0% |
| rather than three especially if you want |
| to build say quadratic response surface |
|
|
| align:start position:0% |
| to build say quadratic response surface |
| |
|
|
| align:start position:0% |
| to build say quadratic response surface |
| models |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| we haven't explicitly done this before |
|
|
| align:start position:0% |
| we haven't explicitly done this before |
| |
|
|
| align:start position:0% |
| we haven't explicitly done this before |
| but |
|
|
| align:start position:0% |
| but |
| |
|
|
| align:start position:0% |
| but |
| for example on on on quiz 2 |
|
|
| align:start position:0% |
| for example on on on quiz 2 |
| |
|
|
| align:start position:0% |
| for example on on on quiz 2 |
| you're going from a linear model to a |
|
|
| align:start position:0% |
| you're going from a linear model to a |
| |
|
|
| align:start position:0% |
| you're going from a linear model to a |
| quadratic model and asking questions |
|
|
| align:start position:0% |
| quadratic model and asking questions |
| |
|
|
| align:start position:0% |
| quadratic model and asking questions |
| about lack of fit |
|
|
| align:start position:0% |
| about lack of fit |
| |
|
|
| align:start position:0% |
| about lack of fit |
| in order to say whether a linear model |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| had lack of fit i needed a third design |
|
|
| align:start position:0% |
| had lack of fit i needed a third design |
| |
|
|
| align:start position:0% |
| had lack of fit i needed a third design |
| point |
|
|
| align:start position:0% |
| point |
| |
|
|
| align:start position:0% |
| point |
| right so that i could say well |
|
|
| align:start position:0% |
| right so that i could say well |
| |
|
|
| align:start position:0% |
| right so that i could say well |
| does that third design point give me |
|
|
| align:start position:0% |
| does that third design point give me |
| |
|
|
| align:start position:0% |
| does that third design point give me |
| indication that the linear model was not |
|
|
| align:start position:0% |
| indication that the linear model was not |
| |
|
|
| align:start position:0% |
| indication that the linear model was not |
| sufficient if i do three levels |
|
|
| align:start position:0% |
| sufficient if i do three levels |
| |
|
|
| align:start position:0% |
| sufficient if i do three levels |
| and build a quadratic model |
|
|
| align:start position:0% |
| and build a quadratic model |
| |
|
|
| align:start position:0% |
| and build a quadratic model |
| and i want to ask the question is a |
|
|
| align:start position:0% |
| and i want to ask the question is a |
| |
|
|
| align:start position:0% |
| and i want to ask the question is a |
| quadratic model sufficient |
|
|
| align:start position:0% |
| quadratic model sufficient |
| |
|
|
| align:start position:0% |
| quadratic model sufficient |
| or is there lack of fit in the quadratic |
|
|
| align:start position:0% |
| or is there lack of fit in the quadratic |
| |
|
|
| align:start position:0% |
| or is there lack of fit in the quadratic |
| model |
|
|
| align:start position:0% |
| model |
| |
|
|
| align:start position:0% |
| model |
| can i do that |
|
|
| align:start position:0% |
| can i do that |
| |
|
|
| align:start position:0% |
| can i do that |
| with just three |
|
|
| align:start position:0% |
| with just three |
| |
|
|
| align:start position:0% |
| with just three |
| data points |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| no right you can fit a quadratic two to |
|
|
| align:start position:0% |
| no right you can fit a quadratic two to |
| |
|
|
| align:start position:0% |
| no right you can fit a quadratic two to |
| three data points so |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| you won't detect if there's some other |
|
|
| align:start position:0% |
| you won't detect if there's some other |
| |
|
|
| align:start position:0% |
| you won't detect if there's some other |
| structure going on so in order to be |
|
|
| align:start position:0% |
| structure going on so in order to be |
| |
|
|
| align:start position:0% |
| structure going on so in order to be |
| able to do a lack of fit analysis up to |
|
|
| align:start position:0% |
| able to do a lack of fit analysis up to |
| |
|
|
| align:start position:0% |
| able to do a lack of fit analysis up to |
| seeing if a quadratic model exhibits |
|
|
| align:start position:0% |
| seeing if a quadratic model exhibits |
| |
|
|
| align:start position:0% |
| seeing if a quadratic model exhibits |
| then you need at least additional levels |
|
|
| align:start position:0% |
| then you need at least additional levels |
| |
|
|
| align:start position:0% |
| then you need at least additional levels |
| implicitly somewhere in the design so |
|
|
| align:start position:0% |
| implicitly somewhere in the design so |
| |
|
|
| align:start position:0% |
| implicitly somewhere in the design so |
| that's kind of a neat a neat thing that |
|
|
| align:start position:0% |
| that's kind of a neat a neat thing that |
| |
|
|
| align:start position:0% |
| that's kind of a neat a neat thing that |
| they do here |
|
|
| align:start position:0% |
| they do here |
| |
|
|
| align:start position:0% |
| they do here |
| so what they've done is normalized all |
|
|
| align:start position:0% |
| so what they've done is normalized all |
| |
|
|
| align:start position:0% |
| so what they've done is normalized all |
| of their factors their five five four |
|
|
| align:start position:0% |
| of their factors their five five four |
| |
|
|
| align:start position:0% |
| of their factors their five five four |
| factors here space temperature and so on |
|
|
| align:start position:0% |
| factors here space temperature and so on |
| |
|
|
| align:start position:0% |
| factors here space temperature and so on |
| again not just two in our in their case |
|
|
| align:start position:0% |
| again not just two in our in their case |
| |
|
|
| align:start position:0% |
| again not just two in our in their case |
| not just to a minus one plus one but uh |
|
|
| align:start position:0% |
| not just to a minus one plus one but uh |
| |
|
|
| align:start position:0% |
| not just to a minus one plus one but uh |
| they use with their five levels a minus |
|
|
| align:start position:0% |
| they use with their five levels a minus |
| |
|
|
| align:start position:0% |
| they use with their five levels a minus |
| two to plus two normalization but |
|
|
| align:start position:0% |
| two to plus two normalization but |
| |
|
|
| align:start position:0% |
| two to plus two normalization but |
| essentially they're doing five up to |
|
|
| align:start position:0% |
| essentially they're doing five up to |
| |
|
|
| align:start position:0% |
| essentially they're doing five up to |
| five levels |
|
|
| align:start position:0% |
| five levels |
| |
|
|
| align:start position:0% |
| five levels |
| on each of their parameters and so |
|
|
| align:start position:0% |
| on each of their parameters and so |
| |
|
|
| align:start position:0% |
| on each of their parameters and so |
| they're using coded variables that we'll |
|
|
| align:start position:0% |
| they're using coded variables that we'll |
| |
|
|
| align:start position:0% |
| they're using coded variables that we'll |
| see in the later |
|
|
| align:start position:0% |
| see in the later |
| |
|
|
| align:start position:0% |
| see in the later |
| tables just like |
|
|
| align:start position:0% |
| tables just like |
| |
|
|
| align:start position:0% |
| tables just like |
| we're used to |
|
|
| align:start position:0% |
| we're used to |
| |
|
|
| align:start position:0% |
| we're used to |
| now |
|
|
| align:start position:0% |
| now |
| |
|
|
| align:start position:0% |
| now |
| of course the other benefit of doing a |
|
|
| align:start position:0% |
| of course the other benefit of doing a |
| |
|
|
| align:start position:0% |
| of course the other benefit of doing a |
| screening experiment |
|
|
| align:start position:0% |
| screening experiment |
| |
|
|
| align:start position:0% |
| screening experiment |
| is that also helps give you some |
|
|
| align:start position:0% |
| is that also helps give you some |
| |
|
|
| align:start position:0% |
| is that also helps give you some |
| information about reasonable design |
|
|
| align:start position:0% |
| information about reasonable design |
| |
|
|
| align:start position:0% |
| information about reasonable design |
| space for picking the range that you |
|
|
| align:start position:0% |
| space for picking the range that you |
| |
|
|
| align:start position:0% |
| space for picking the range that you |
| want to explore these parameters in |
|
|
| align:start position:0% |
| want to explore these parameters in |
| |
|
|
| align:start position:0% |
| want to explore these parameters in |
| otherwise they probably would have had |
|
|
| align:start position:0% |
| otherwise they probably would have had |
| |
|
|
| align:start position:0% |
| otherwise they probably would have had |
| to just go by by |
|
|
| align:start position:0% |
| to just go by by |
| |
|
|
| align:start position:0% |
| to just go by by |
| prior experience |
|
|
| align:start position:0% |
| prior experience |
| |
|
|
| align:start position:0% |
| prior experience |
| that's another advantage of doing sort |
|
|
| align:start position:0% |
| that's another advantage of doing sort |
| |
|
|
| align:start position:0% |
| that's another advantage of doing sort |
| of this |
|
|
| align:start position:0% |
| of this |
| |
|
|
| align:start position:0% |
| of this |
| two-stage experimentation with screening |
|
|
| align:start position:0% |
| two-stage experimentation with screening |
| |
|
|
| align:start position:0% |
| two-stage experimentation with screening |
| followed by a more extensive |
|
|
| align:start position:0% |
| followed by a more extensive |
| |
|
|
| align:start position:0% |
| followed by a more extensive |
| either a new doe or adding to the |
|
|
| align:start position:0% |
| either a new doe or adding to the |
| |
|
|
| align:start position:0% |
| either a new doe or adding to the |
| screening doe |
|
|
| align:start position:0% |
| screening doe |
| |
|
|
| align:start position:0% |
| screening doe |
| so they're going to be building second |
|
|
| align:start position:0% |
| so they're going to be building second |
| |
|
|
| align:start position:0% |
| so they're going to be building second |
| order polynomial models that is to say |
|
|
| align:start position:0% |
| order polynomial models that is to say |
| |
|
|
| align:start position:0% |
| order polynomial models that is to say |
| quadratic models with both |
|
|
| align:start position:0% |
| quadratic models with both |
| |
|
|
| align:start position:0% |
| quadratic models with both |
| interactions and then square terms |
|
|
| align:start position:0% |
| interactions and then square terms |
| |
|
|
| align:start position:0% |
| interactions and then square terms |
| just square terms |
|
|
| align:start position:0% |
| just square terms |
| |
|
|
| align:start position:0% |
| just square terms |
| in individual parameters |
|
|
| align:start position:0% |
| in individual parameters |
| |
|
|
| align:start position:0% |
| in individual parameters |
| they also mentioned that they're not |
|
|
| align:start position:0% |
| they also mentioned that they're not |
| |
|
|
| align:start position:0% |
| they also mentioned that they're not |
| going to do any transformations of the |
|
|
| align:start position:0% |
| going to do any transformations of the |
| |
|
|
| align:start position:0% |
| going to do any transformations of the |
| output |
|
|
| align:start position:0% |
| output |
| |
|
|
| align:start position:0% |
| output |
| variables such as a log or an inverse |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay so we've already talked i think |
|
|
| align:start position:0% |
| okay so we've already talked i think |
| |
|
|
| align:start position:0% |
| okay so we've already talked i think |
| about those two those two points so in |
|
|
| align:start position:0% |
| about those two those two points so in |
| |
|
|
| align:start position:0% |
| about those two those two points so in |
| the in the paper they show the the |
|
|
| align:start position:0% |
| the in the paper they show the the |
| |
|
|
| align:start position:0% |
| the in the paper they show the the |
| variable uh test levels coded here's |
|
|
| align:start position:0% |
| variable uh test levels coded here's |
| |
|
|
| align:start position:0% |
| variable uh test levels coded here's |
| again our four inputs and the trials |
|
|
| align:start position:0% |
| again our four inputs and the trials |
| |
|
|
| align:start position:0% |
| again our four inputs and the trials |
| and |
|
|
| align:start position:0% |
| and |
| |
|
|
| align:start position:0% |
| and |
| uh |
|
|
| align:start position:0% |
| uh |
| |
|
|
| align:start position:0% |
| uh |
| if you look you can start to get a very |
|
|
| align:start position:0% |
| if you look you can start to get a very |
| |
|
|
| align:start position:0% |
| if you look you can start to get a very |
| nice sense of what this central |
|
|
| align:start position:0% |
| nice sense of what this central |
| |
|
|
| align:start position:0% |
| nice sense of what this central |
| composite looks like |
|
|
| align:start position:0% |
| composite looks like |
| |
|
|
| align:start position:0% |
| composite looks like |
| what they're essentially doing here |
|
|
| align:start position:0% |
| what they're essentially doing here |
| |
|
|
| align:start position:0% |
| what they're essentially doing here |
| breaking it up into let's call it three |
|
|
| align:start position:0% |
| breaking it up into let's call it three |
| |
|
|
| align:start position:0% |
| breaking it up into let's call it three |
| different segments |
|
|
| align:start position:0% |
| different segments |
| |
|
|
| align:start position:0% |
| different segments |
| of of design points |
|
|
| align:start position:0% |
| of of design points |
| |
|
|
| align:start position:0% |
| of of design points |
| what are these design points what do |
|
|
| align:start position:0% |
| what are these design points what do |
| |
|
|
| align:start position:0% |
| what are these design points what do |
| those correspond to |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| there's a term we refer to those kind of |
|
|
| align:start position:0% |
| there's a term we refer to those kind of |
| |
|
|
| align:start position:0% |
| there's a term we refer to those kind of |
| design points as |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| where does one of those design points |
|
|
| align:start position:0% |
| where does one of those design points |
| |
|
|
| align:start position:0% |
| where does one of those design points |
| lie |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| take trial number one |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| right it's way out minus two on the |
|
|
| align:start position:0% |
| right it's way out minus two on the |
| |
|
|
| align:start position:0% |
| right it's way out minus two on the |
| space axis |
|
|
| align:start position:0% |
| space axis |
| |
|
|
| align:start position:0% |
| space axis |
| and holding the others at their median |
|
|
| align:start position:0% |
| and holding the others at their median |
| |
|
|
| align:start position:0% |
| and holding the others at their median |
| or their their nominal value right |
|
|
| align:start position:0% |
| or their their nominal value right |
| |
|
|
| align:start position:0% |
| or their their nominal value right |
| so that's |
|
|
| align:start position:0% |
| so that's |
| |
|
|
| align:start position:0% |
| so that's |
| out on the end of one of the axes |
|
|
| align:start position:0% |
| out on the end of one of the axes |
| |
|
|
| align:start position:0% |
| out on the end of one of the axes |
| then the plus two minus two that's the |
|
|
| align:start position:0% |
| then the plus two minus two that's the |
| |
|
|
| align:start position:0% |
| then the plus two minus two that's the |
| other end of this so those are our axial |
|
|
| align:start position:0% |
| other end of this so those are our axial |
| |
|
|
| align:start position:0% |
| other end of this so those are our axial |
| points |
|
|
| align:start position:0% |
| points |
| |
|
|
| align:start position:0% |
| points |
| in a central composite design |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| they're sort of the classic hold |
|
|
| align:start position:0% |
| they're sort of the classic hold |
| |
|
|
| align:start position:0% |
| they're sort of the classic hold |
| everything else constant vary one |
|
|
| align:start position:0% |
| everything else constant vary one |
| |
|
|
| align:start position:0% |
| everything else constant vary one |
| parameter at a time so they are giving |
|
|
| align:start position:0% |
| parameter at a time so they are giving |
| |
|
|
| align:start position:0% |
| parameter at a time so they are giving |
| you unambiguous sense of what that one |
|
|
| align:start position:0% |
| you unambiguous sense of what that one |
| |
|
|
| align:start position:0% |
| you unambiguous sense of what that one |
| parameter is doing but not able to |
|
|
| align:start position:0% |
| parameter is doing but not able to |
| |
|
|
| align:start position:0% |
| parameter is doing but not able to |
| capture interactions and so on they're |
|
|
| align:start position:0% |
| capture interactions and so on they're |
| |
|
|
| align:start position:0% |
| capture interactions and so on they're |
| also exploring sort of the outer limits |
|
|
| align:start position:0% |
| also exploring sort of the outer limits |
| |
|
|
| align:start position:0% |
| also exploring sort of the outer limits |
| of the design |
|
|
| align:start position:0% |
| of the design |
| |
|
|
| align:start position:0% |
| of the design |
| how about these points |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| how many of them are there |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| looks like there's 16 of them |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| corner points exactly |
|
|
| align:start position:0% |
| corner points exactly |
| |
|
|
| align:start position:0% |
| corner points exactly |
| so those are all corner combinations of |
|
|
| align:start position:0% |
| so those are all corner combinations of |
| |
|
|
| align:start position:0% |
| so those are all corner combinations of |
| four parameters |
|
|
| align:start position:0% |
| four parameters |
| |
|
|
| align:start position:0% |
| four parameters |
| four squared 16 different corners |
|
|
| align:start position:0% |
| four squared 16 different corners |
| |
|
|
| align:start position:0% |
| four squared 16 different corners |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| and then finally these |
|
|
| align:start position:0% |
| and then finally these |
| |
|
|
| align:start position:0% |
| and then finally these |
| these are easy what are these |
|
|
| align:start position:0% |
| these are easy what are these |
| |
|
|
| align:start position:0% |
| these are easy what are these |
| center points right |
|
|
| align:start position:0% |
| center points right |
| |
|
|
| align:start position:0% |
| center points right |
| and so i don't know whether they have |
|
|
| align:start position:0% |
| and so i don't know whether they have |
| |
|
|
| align:start position:0% |
| and so i don't know whether they have |
| seven seven replicates |
|
|
| align:start position:0% |
| seven seven replicates |
| |
|
|
| align:start position:0% |
| seven seven replicates |
| so the other points are unreplicated |
|
|
| align:start position:0% |
| so the other points are unreplicated |
| |
|
|
| align:start position:0% |
| so the other points are unreplicated |
| by the way so you might be a little bit |
|
|
| align:start position:0% |
| by the way so you might be a little bit |
| |
|
|
| align:start position:0% |
| by the way so you might be a little bit |
| susceptible to to outliers in some of |
|
|
| align:start position:0% |
| susceptible to to outliers in some of |
| |
|
|
| align:start position:0% |
| susceptible to to outliers in some of |
| the other points but they have a fairly |
|
|
| align:start position:0% |
| the other points but they have a fairly |
| |
|
|
| align:start position:0% |
| the other points but they have a fairly |
| reasonable number seven replicates at |
|
|
| align:start position:0% |
| reasonable number seven replicates at |
| |
|
|
| align:start position:0% |
| reasonable number seven replicates at |
| the center so that'll allow some |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| more or less reasonable estimate of some |
|
|
| align:start position:0% |
| more or less reasonable estimate of some |
| |
|
|
| align:start position:0% |
| more or less reasonable estimate of some |
| of the |
|
|
| align:start position:0% |
| of the |
| |
|
|
| align:start position:0% |
| of the |
| reproducibility some of the inherent |
|
|
| align:start position:0% |
| reproducibility some of the inherent |
| |
|
|
| align:start position:0% |
| reproducibility some of the inherent |
| variances in the process |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| they say by the way that |
|
|
| align:start position:0% |
| they say by the way that |
| |
|
|
| align:start position:0% |
| they say by the way that |
| those replicates generally result in |
|
|
| align:start position:0% |
| those replicates generally result in |
| |
|
|
| align:start position:0% |
| those replicates generally result in |
| about one and a half to five percent one |
|
|
| align:start position:0% |
| about one and a half to five percent one |
| |
|
|
| align:start position:0% |
| about one and a half to five percent one |
| sigma |
|
|
| align:start position:0% |
| sigma |
| |
|
|
| align:start position:0% |
| sigma |
| range in the output |
|
|
| align:start position:0% |
| range in the output |
| |
|
|
| align:start position:0% |
| range in the output |
| parameters the paper says they did a |
|
|
| align:start position:0% |
| parameters the paper says they did a |
| |
|
|
| align:start position:0% |
| parameters the paper says they did a |
| randomized run order |
|
|
| align:start position:0% |
| randomized run order |
| |
|
|
| align:start position:0% |
| randomized run order |
| why would you do that |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| why not just run you got trial one |
|
|
| align:start position:0% |
| why not just run you got trial one |
| |
|
|
| align:start position:0% |
| why not just run you got trial one |
| et cetera why not just run all the way |
|
|
| align:start position:0% |
| et cetera why not just run all the way |
| |
|
|
| align:start position:0% |
| et cetera why not just run all the way |
| down to |
|
|
| align:start position:0% |
| down to |
| |
|
|
| align:start position:0% |
| down to |
| run trial number 31 in this order |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| to be independent |
|
|
| align:start position:0% |
| to be independent |
| |
|
|
| align:start position:0% |
| to be independent |
| uh |
|
|
| align:start position:0% |
| uh |
| |
|
|
| align:start position:0% |
| uh |
| independent of what |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| pressure different appreciation |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| uh |
|
|
| align:start position:0% |
| uh |
| |
|
|
| align:start position:0% |
| uh |
| i think you're right but but as you |
|
|
| align:start position:0% |
| i think you're right but but as you |
| |
|
|
| align:start position:0% |
| i think you're right but but as you |
| change these parameters that we're only |
|
|
| align:start position:0% |
| change these parameters that we're only |
| |
|
|
| align:start position:0% |
| change these parameters that we're only |
| playing with these these four parameters |
|
|
| align:start position:0% |
| playing with these these four parameters |
| |
|
|
| align:start position:0% |
| playing with these these four parameters |
| but there might still be noise other |
|
|
| align:start position:0% |
| but there might still be noise other |
| |
|
|
| align:start position:0% |
| but there might still be noise other |
| noise in the process or drifts like we |
|
|
| align:start position:0% |
| noise in the process or drifts like we |
| |
|
|
| align:start position:0% |
| noise in the process or drifts like we |
| talked about and it turns out in many of |
|
|
| align:start position:0% |
| talked about and it turns out in many of |
| |
|
|
| align:start position:0% |
| talked about and it turns out in many of |
| these deposition processes you actually |
|
|
| align:start position:0% |
| these deposition processes you actually |
| |
|
|
| align:start position:0% |
| these deposition processes you actually |
| have to worry about possible drifts |
|
|
| align:start position:0% |
| have to worry about possible drifts |
| |
|
|
| align:start position:0% |
| have to worry about possible drifts |
| in that you may get film build up on the |
|
|
| align:start position:0% |
| in that you may get film build up on the |
| |
|
|
| align:start position:0% |
| in that you may get film build up on the |
| inside of the reactor |
|
|
| align:start position:0% |
| inside of the reactor |
| |
|
|
| align:start position:0% |
| inside of the reactor |
| that over time might change a little bit |
|
|
| align:start position:0% |
| that over time might change a little bit |
| |
|
|
| align:start position:0% |
| that over time might change a little bit |
| the deposition process so by randomizing |
|
|
| align:start position:0% |
| the deposition process so by randomizing |
| |
|
|
| align:start position:0% |
| the deposition process so by randomizing |
| the run order you're randomizing the |
|
|
| align:start position:0% |
| the run order you're randomizing the |
| |
|
|
| align:start position:0% |
| the run order you're randomizing the |
| outputs and converting if there is a |
|
|
| align:start position:0% |
| outputs and converting if there is a |
| |
|
|
| align:start position:0% |
| outputs and converting if there is a |
| trend you basically convert that |
|
|
| align:start position:0% |
| trend you basically convert that |
| |
|
|
| align:start position:0% |
| trend you basically convert that |
| systematic trend into |
|
|
| align:start position:0% |
| systematic trend into |
| |
|
|
| align:start position:0% |
| systematic trend into |
| noise |
|
|
| align:start position:0% |
| noise |
| |
|
|
| align:start position:0% |
| noise |
| it may still perturb your values but now |
|
|
| align:start position:0% |
| it may still perturb your values but now |
| |
|
|
| align:start position:0% |
| it may still perturb your values but now |
| it does it kind of distributed in a |
|
|
| align:start position:0% |
| it does it kind of distributed in a |
| |
|
|
| align:start position:0% |
| it does it kind of distributed in a |
| random fashion across all of your |
|
|
| align:start position:0% |
| random fashion across all of your |
| |
|
|
| align:start position:0% |
| random fashion across all of your |
| outputs and it will add to the noise the |
|
|
| align:start position:0% |
| outputs and it will add to the noise the |
| |
|
|
| align:start position:0% |
| outputs and it will add to the noise the |
| change the reproducibility values |
|
|
| align:start position:0% |
| change the reproducibility values |
| |
|
|
| align:start position:0% |
| change the reproducibility values |
| but at least then it's not |
|
|
| align:start position:0% |
| but at least then it's not |
| |
|
|
| align:start position:0% |
| but at least then it's not |
| fooling you in a systematic way about |
|
|
| align:start position:0% |
| fooling you in a systematic way about |
| |
|
|
| align:start position:0% |
| fooling you in a systematic way about |
| confusing if there is that kind of other |
|
|
| align:start position:0% |
| confusing if there is that kind of other |
| |
|
|
| align:start position:0% |
| confusing if there is that kind of other |
| drift it will not confuse you or alias |
|
|
| align:start position:0% |
| drift it will not confuse you or alias |
| |
|
|
| align:start position:0% |
| drift it will not confuse you or alias |
| with some other parameter |
|
|
| align:start position:0% |
| with some other parameter |
| |
|
|
| align:start position:0% |
| with some other parameter |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| i have one minor annoyance in the paper |
|
|
| align:start position:0% |
| i have one minor annoyance in the paper |
| |
|
|
| align:start position:0% |
| i have one minor annoyance in the paper |
| and so if you're writing papers and |
|
|
| align:start position:0% |
| and so if you're writing papers and |
| |
|
|
| align:start position:0% |
| and so if you're writing papers and |
| you're you do a randomized run |
|
|
| align:start position:0% |
| you're you do a randomized run |
| |
|
|
| align:start position:0% |
| you're you do a randomized run |
| uh |
|
|
| align:start position:0% |
| uh |
| |
|
|
| align:start position:0% |
| uh |
| tell me what the run order actually was |
|
|
| align:start position:0% |
| tell me what the run order actually was |
| |
|
|
| align:start position:0% |
| tell me what the run order actually was |
| if you're telling me the data i would |
|
|
| align:start position:0% |
| if you're telling me the data i would |
| |
|
|
| align:start position:0% |
| if you're telling me the data i would |
| love to actually know the run order |
|
|
| align:start position:0% |
| love to actually know the run order |
| |
|
|
| align:start position:0% |
| love to actually know the run order |
| because then when i do residual analysis |
|
|
| align:start position:0% |
| because then when i do residual analysis |
| |
|
|
| align:start position:0% |
| because then when i do residual analysis |
| and look at the residuals as a function |
|
|
| align:start position:0% |
| and look at the residuals as a function |
| |
|
|
| align:start position:0% |
| and look at the residuals as a function |
| of time |
|
|
| align:start position:0% |
| of time |
| |
|
|
| align:start position:0% |
| of time |
| i can actually |
|
|
| align:start position:0% |
| i can actually |
| |
|
|
| align:start position:0% |
| i can actually |
| go in and see if there was perhaps a |
|
|
| align:start position:0% |
| go in and see if there was perhaps a |
| |
|
|
| align:start position:0% |
| go in and see if there was perhaps a |
| systematic time drift |
|
|
| align:start position:0% |
| systematic time drift |
| |
|
|
| align:start position:0% |
| systematic time drift |
| and it really doesn't cost much |
|
|
| align:start position:0% |
| and it really doesn't cost much |
| |
|
|
| align:start position:0% |
| and it really doesn't cost much |
| to do that in |
|
|
| align:start position:0% |
| to do that in |
| |
|
|
| align:start position:0% |
| to do that in |
| ink space in the paper |
|
|
| align:start position:0% |
| ink space in the paper |
| |
|
|
| align:start position:0% |
| ink space in the paper |
| so for example here they had trial some |
|
|
| align:start position:0% |
| so for example here they had trial some |
| |
|
|
| align:start position:0% |
| so for example here they had trial some |
| papers you will actually see they go in |
|
|
| align:start position:0% |
| papers you will actually see they go in |
| |
|
|
| align:start position:0% |
| papers you will actually see they go in |
| and might put |
|
|
| align:start position:0% |
| and might put |
| |
|
|
| align:start position:0% |
| and might put |
| a number sort of right beside it |
|
|
| align:start position:0% |
| a number sort of right beside it |
| |
|
|
| align:start position:0% |
| a number sort of right beside it |
| in parentheses or something like that or |
|
|
| align:start position:0% |
| in parentheses or something like that or |
| |
|
|
| align:start position:0% |
| in parentheses or something like that or |
| actual another |
|
|
| align:start position:0% |
| actual another |
| |
|
|
| align:start position:0% |
| actual another |
| column in the table or whatever that |
|
|
| align:start position:0% |
| column in the table or whatever that |
| |
|
|
| align:start position:0% |
| column in the table or whatever that |
| tells me run order not just trial number |
|
|
| align:start position:0% |
| tells me run order not just trial number |
| |
|
|
| align:start position:0% |
| tells me run order not just trial number |
| okay so do that |
|
|
| align:start position:0% |
| okay so do that |
| |
|
|
| align:start position:0% |
| okay so do that |
| if you write write papers with data in |
|
|
| align:start position:0% |
| if you write write papers with data in |
| |
|
|
| align:start position:0% |
| if you write write papers with data in |
| it |
|
|
| align:start position:0% |
| it |
| |
|
|
| align:start position:0% |
| it |
| they also say they do did some outlier |
|
|
| align:start position:0% |
| they also say they do did some outlier |
| |
|
|
| align:start position:0% |
| they also say they do did some outlier |
| analysis they don't really uh |
|
|
| align:start position:0% |
| analysis they don't really uh |
| |
|
|
| align:start position:0% |
| analysis they don't really uh |
| say what that was but they know they do |
|
|
| align:start position:0% |
| say what that was but they know they do |
| |
|
|
| align:start position:0% |
| say what that was but they know they do |
| note it in the data |
|
|
| align:start position:0% |
| note it in the data |
| |
|
|
| align:start position:0% |
| note it in the data |
| and by the way |
|
|
| align:start position:0% |
| and by the way |
| |
|
|
| align:start position:0% |
| and by the way |
| oh i may not have put this on the |
|
|
| align:start position:0% |
| oh i may not have put this on the |
| |
|
|
| align:start position:0% |
| oh i may not have put this on the |
| site yet i will also add the spreadsheet |
|
|
| align:start position:0% |
| site yet i will also add the spreadsheet |
| |
|
|
| align:start position:0% |
| site yet i will also add the spreadsheet |
| with this basic data so if you want to |
|
|
| align:start position:0% |
| with this basic data so if you want to |
| |
|
|
| align:start position:0% |
| with this basic data so if you want to |
| grab this later and play with the data |
|
|
| align:start position:0% |
| grab this later and play with the data |
| |
|
|
| align:start position:0% |
| grab this later and play with the data |
| and do some of your own response surface |
|
|
| align:start position:0% |
| and do some of your own response surface |
| |
|
|
| align:start position:0% |
| and do some of your own response surface |
| model fits with |
|
|
| align:start position:0% |
| model fits with |
| |
|
|
| align:start position:0% |
| model fits with |
| jump or some of the other tools you can |
|
|
| align:start position:0% |
| jump or some of the other tools you can |
| |
|
|
| align:start position:0% |
| jump or some of the other tools you can |
| do that |
|
|
| align:start position:0% |
| do that |
| |
|
|
| align:start position:0% |
| do that |
| here's the output |
|
|
| align:start position:0% |
| here's the output |
| |
|
|
| align:start position:0% |
| here's the output |
| trial number and then each of the seven |
|
|
| align:start position:0% |
| trial number and then each of the seven |
| |
|
|
| align:start position:0% |
| trial number and then each of the seven |
| different outputs so these are the seven |
|
|
| align:start position:0% |
| different outputs so these are the seven |
| |
|
|
| align:start position:0% |
| different outputs so these are the seven |
| different outputs and basically just the |
|
|
| align:start position:0% |
| different outputs and basically just the |
| |
|
|
| align:start position:0% |
| different outputs and basically just the |
| raw the raw measured data |
|
|
| align:start position:0% |
| raw the raw measured data |
| |
|
|
| align:start position:0% |
| raw the raw measured data |
| they |
|
|
| align:start position:0% |
| they |
| |
|
|
| align:start position:0% |
| they |
| also may have asterisked or footnoted a |
|
|
| align:start position:0% |
| also may have asterisked or footnoted a |
| |
|
|
| align:start position:0% |
| also may have asterisked or footnoted a |
| few of these which is a good practice |
|
|
| align:start position:0% |
| few of these which is a good practice |
| |
|
|
| align:start position:0% |
| few of these which is a good practice |
| they said you know |
|
|
| align:start position:0% |
| they said you know |
| |
|
|
| align:start position:0% |
| they said you know |
| weird things like |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| indicates entries determined to be |
|
|
| align:start position:0% |
| indicates entries determined to be |
| |
|
|
| align:start position:0% |
| indicates entries determined to be |
| outliers |
|
|
| align:start position:0% |
| outliers |
| |
|
|
| align:start position:0% |
| outliers |
| or if they knew something weird happened |
|
|
| align:start position:0% |
| or if they knew something weird happened |
| |
|
|
| align:start position:0% |
| or if they knew something weird happened |
| with the measurement of that particular |
|
|
| align:start position:0% |
| with the measurement of that particular |
| |
|
|
| align:start position:0% |
| with the measurement of that particular |
| data point or that entire row |
|
|
| align:start position:0% |
| data point or that entire row |
| |
|
|
| align:start position:0% |
| data point or that entire row |
| they would note that that can be really |
|
|
| align:start position:0% |
| they would note that that can be really |
| |
|
|
| align:start position:0% |
| they would note that that can be really |
| critical when you're interpreting the |
|
|
| align:start position:0% |
| critical when you're interpreting the |
| |
|
|
| align:start position:0% |
| critical when you're interpreting the |
| data |
|
|
| align:start position:0% |
| data |
| |
|
|
| align:start position:0% |
| data |
| then what they've done down here at the |
|
|
| align:start position:0% |
| then what they've done down here at the |
| |
|
|
| align:start position:0% |
| then what they've done down here at the |
| bottom is simply calculated |
|
|
| align:start position:0% |
| bottom is simply calculated |
| |
|
|
| align:start position:0% |
| bottom is simply calculated |
| things like |
|
|
| align:start position:0% |
| things like |
| |
|
|
| align:start position:0% |
| things like |
| the standard deviation |
|
|
| align:start position:0% |
| the standard deviation |
| |
|
|
| align:start position:0% |
| the standard deviation |
| across |
|
|
| align:start position:0% |
| across |
| |
|
|
| align:start position:0% |
| across |
| across all of those |
|
|
| align:start position:0% |
| across all of those |
| |
|
|
| align:start position:0% |
| across all of those |
| i think that's across |
|
|
| align:start position:0% |
| i think that's across |
| |
|
|
| align:start position:0% |
| i think that's across |
| just the replicate runs you can see that |
|
|
| align:start position:0% |
| just the replicate runs you can see that |
| |
|
|
| align:start position:0% |
| just the replicate runs you can see that |
| underneath here |
|
|
| align:start position:0% |
| underneath here |
| |
|
|
| align:start position:0% |
| underneath here |
| yeah okay |
|
|
| align:start position:0% |
| yeah okay |
| |
|
|
| align:start position:0% |
| yeah okay |
| so it gives you a sense of the |
|
|
| align:start position:0% |
| so it gives you a sense of the |
| |
|
|
| align:start position:0% |
| so it gives you a sense of the |
| percentage variance one sigma percentage |
|
|
| align:start position:0% |
| percentage variance one sigma percentage |
| |
|
|
| align:start position:0% |
| percentage variance one sigma percentage |
| variance in each of the output |
|
|
| align:start position:0% |
| variance in each of the output |
| |
|
|
| align:start position:0% |
| variance in each of the output |
| parameters |
|
|
| align:start position:0% |
| parameters |
| |
|
|
| align:start position:0% |
| parameters |
| yes question |
|
|
| align:start position:0% |
| yes question |
| |
|
|
| align:start position:0% |
| yes question |
| if one of the entries was |
|
|
| align:start position:0% |
| if one of the entries was |
| |
|
|
| align:start position:0% |
| if one of the entries was |
| as an issue doesn't that mean |
|
|
| align:start position:0% |
| as an issue doesn't that mean |
| |
|
|
| align:start position:0% |
| as an issue doesn't that mean |
| the whole row |
|
|
| align:start position:0% |
| the whole row |
| |
|
|
| align:start position:0% |
| the whole row |
| as an issue |
|
|
| align:start position:0% |
| as an issue |
| |
|
|
| align:start position:0% |
| as an issue |
| so shouldn't that whole row be discarded |
|
|
| align:start position:0% |
| so shouldn't that whole row be discarded |
| |
|
|
| align:start position:0% |
| so shouldn't that whole row be discarded |
| how can you for example you know in run |
|
|
| align:start position:0% |
| how can you for example you know in run |
| |
|
|
| align:start position:0% |
| how can you for example you know in run |
| six have an issue with let's say 8.1 and |
|
|
| align:start position:0% |
| six have an issue with let's say 8.1 and |
| |
|
|
| align:start position:0% |
| six have an issue with let's say 8.1 and |
| say you know this looks weird |
|
|
| align:start position:0% |
| say you know this looks weird |
| |
|
|
| align:start position:0% |
| say you know this looks weird |
| and you're not going to |
|
|
| align:start position:0% |
| and you're not going to |
| |
|
|
| align:start position:0% |
| and you're not going to |
| um use it in the row uh |
|
|
| align:start position:0% |
| um use it in the row uh |
| |
|
|
| align:start position:0% |
| um use it in the row uh |
| so |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| how can you have just an issue with one |
|
|
| align:start position:0% |
| how can you have just an issue with one |
| |
|
|
| align:start position:0% |
| how can you have just an issue with one |
| element and not an issue with the whole |
|
|
| align:start position:0% |
| element and not an issue with the whole |
| |
|
|
| align:start position:0% |
| element and not an issue with the whole |
| row |
|
|
| align:start position:0% |
| row |
| |
|
|
| align:start position:0% |
| row |
| basically i think it comes down to some |
|
|
| align:start position:0% |
| basically i think it comes down to some |
| |
|
|
| align:start position:0% |
| basically i think it comes down to some |
| engineering knowledge on what the issue |
|
|
| align:start position:0% |
| engineering knowledge on what the issue |
| |
|
|
| align:start position:0% |
| engineering knowledge on what the issue |
| may actually be so in particular if |
|
|
| align:start position:0% |
| may actually be so in particular if |
| |
|
|
| align:start position:0% |
| may actually be so in particular if |
| you're worried that |
|
|
| align:start position:0% |
| you're worried that |
| |
|
|
| align:start position:0% |
| you're worried that |
| there's something wrong with the |
|
|
| align:start position:0% |
| there's something wrong with the |
| |
|
|
| align:start position:0% |
| there's something wrong with the |
| measurement |
|
|
| align:start position:0% |
| measurement |
| |
|
|
| align:start position:0% |
| measurement |
| then that does not necessarily |
|
|
| align:start position:0% |
| then that does not necessarily |
| |
|
|
| align:start position:0% |
| then that does not necessarily |
| contaminate your measurements of other |
|
|
| align:start position:0% |
| contaminate your measurements of other |
| |
|
|
| align:start position:0% |
| contaminate your measurements of other |
| other |
|
|
| align:start position:0% |
| other |
| |
|
|
| align:start position:0% |
| other |
| other columns |
|
|
| align:start position:0% |
| other columns |
| |
|
|
| align:start position:0% |
| other columns |
| if you think it's really an indicator |
|
|
| align:start position:0% |
| if you think it's really an indicator |
| |
|
|
| align:start position:0% |
| if you think it's really an indicator |
| that the whole run |
|
|
| align:start position:0% |
| that the whole run |
| |
|
|
| align:start position:0% |
| that the whole run |
| or the whole trial was |
|
|
| align:start position:0% |
| or the whole trial was |
| |
|
|
| align:start position:0% |
| or the whole trial was |
| was messed up somehow |
|
|
| align:start position:0% |
| was messed up somehow |
| |
|
|
| align:start position:0% |
| was messed up somehow |
| then i agree you would probably want to |
|
|
| align:start position:0% |
| then i agree you would probably want to |
| |
|
|
| align:start position:0% |
| then i agree you would probably want to |
| to omit that entire run from your whole |
|
|
| align:start position:0% |
| to omit that entire run from your whole |
| |
|
|
| align:start position:0% |
| to omit that entire run from your whole |
| table or maybe repeat that run |
|
|
| align:start position:0% |
| table or maybe repeat that run |
| |
|
|
| align:start position:0% |
| table or maybe repeat that run |
| in this case with single wafer |
|
|
| align:start position:0% |
| in this case with single wafer |
| |
|
|
| align:start position:0% |
| in this case with single wafer |
| processing is probably an easy thing to |
|
|
| align:start position:0% |
| processing is probably an easy thing to |
| |
|
|
| align:start position:0% |
| processing is probably an easy thing to |
| do |
|
|
| align:start position:0% |
| do |
| |
|
|
| align:start position:0% |
| do |
| i guess the second question if you're |
|
|
| align:start position:0% |
| i guess the second question if you're |
| |
|
|
| align:start position:0% |
| i guess the second question if you're |
| doing experiments |
|
|
| align:start position:0% |
| doing experiments |
| |
|
|
| align:start position:0% |
| doing experiments |
| that's an issue |
|
|
| align:start position:0% |
| that's an issue |
| |
|
|
| align:start position:0% |
| that's an issue |
| one of the numbers looks |
|
|
| align:start position:0% |
| one of the numbers looks |
| |
|
|
| align:start position:0% |
| one of the numbers looks |
| funky yeah um |
|
|
| align:start position:0% |
| funky yeah um |
| |
|
|
| align:start position:0% |
| funky yeah um |
| the fact and we want to eliminate that |
|
|
| align:start position:0% |
| the fact and we want to eliminate that |
| |
|
|
| align:start position:0% |
| the fact and we want to eliminate that |
| whole row what does that mean for |
|
|
| align:start position:0% |
| whole row what does that mean for |
| |
|
|
| align:start position:0% |
| whole row what does that mean for |
| our experiment if it's for example like |
|
|
| align:start position:0% |
| our experiment if it's for example like |
| |
|
|
| align:start position:0% |
| our experiment if it's for example like |
| the only we didn't do replicas is the |
|
|
| align:start position:0% |
| the only we didn't do replicas is the |
| |
|
|
| align:start position:0% |
| the only we didn't do replicas is the |
| center point and now we don't have a |
|
|
| align:start position:0% |
| center point and now we don't have a |
| |
|
|
| align:start position:0% |
| center point and now we don't have a |
| center point yeah so the other question |
|
|
| align:start position:0% |
| center point yeah so the other question |
| |
|
|
| align:start position:0% |
| center point yeah so the other question |
| is if you do have a bad data row how |
|
|
| align:start position:0% |
| is if you do have a bad data row how |
| |
|
|
| align:start position:0% |
| is if you do have a bad data row how |
| does that mess up your data analysis |
|
|
| align:start position:0% |
| does that mess up your data analysis |
| |
|
|
| align:start position:0% |
| does that mess up your data analysis |
| and and |
|
|
| align:start position:0% |
| and and |
| |
|
|
| align:start position:0% |
| and and |
| the answer is depending on the kind of |
|
|
| align:start position:0% |
| the answer is depending on the kind of |
| |
|
|
| align:start position:0% |
| the answer is depending on the kind of |
| doe that you have and the kinds of |
|
|
| align:start position:0% |
| doe that you have and the kinds of |
| |
|
|
| align:start position:0% |
| doe that you have and the kinds of |
| analysis that you apply |
|
|
| align:start position:0% |
| analysis that you apply |
| |
|
|
| align:start position:0% |
| analysis that you apply |
| you can be more or less robust to those |
|
|
| align:start position:0% |
| you can be more or less robust to those |
| |
|
|
| align:start position:0% |
| you can be more or less robust to those |
| kinds of missing data points |
|
|
| align:start position:0% |
| kinds of missing data points |
| |
|
|
| align:start position:0% |
| kinds of missing data points |
| one of the nice things about a central |
|
|
| align:start position:0% |
| one of the nice things about a central |
| |
|
|
| align:start position:0% |
| one of the nice things about a central |
| composite design |
|
|
| align:start position:0% |
| composite design |
| |
|
|
| align:start position:0% |
| composite design |
| and especially one where they've got you |
|
|
| align:start position:0% |
| and especially one where they've got you |
| |
|
|
| align:start position:0% |
| and especially one where they've got you |
| know kind of this these five levels is |
|
|
| align:start position:0% |
| know kind of this these five levels is |
| |
|
|
| align:start position:0% |
| know kind of this these five levels is |
| if you do that in conjunction with |
|
|
| align:start position:0% |
| if you do that in conjunction with |
| |
|
|
| align:start position:0% |
| if you do that in conjunction with |
| response surface modeling regression |
|
|
| align:start position:0% |
| response surface modeling regression |
| |
|
|
| align:start position:0% |
| response surface modeling regression |
| modeling in particular the numerical |
|
|
| align:start position:0% |
| modeling in particular the numerical |
| |
|
|
| align:start position:0% |
| modeling in particular the numerical |
| regression modeling you're fairly well |
|
|
| align:start position:0% |
| regression modeling you're fairly well |
| |
|
|
| align:start position:0% |
| regression modeling you're fairly well |
| off if you have a few missing data |
|
|
| align:start position:0% |
| off if you have a few missing data |
| |
|
|
| align:start position:0% |
| off if you have a few missing data |
| points it would throw you for a loop in |
|
|
| align:start position:0% |
| points it would throw you for a loop in |
| |
|
|
| align:start position:0% |
| points it would throw you for a loop in |
| some of the shorthand formation of |
|
|
| align:start position:0% |
| some of the shorthand formation of |
| |
|
|
| align:start position:0% |
| some of the shorthand formation of |
| contrast that we talked about because |
|
|
| align:start position:0% |
| contrast that we talked about because |
| |
|
|
| align:start position:0% |
| contrast that we talked about because |
| then you know your typical averaging |
|
|
| align:start position:0% |
| then you know your typical averaging |
| |
|
|
| align:start position:0% |
| then you know your typical averaging |
| that's implicit and some of those are |
|
|
| align:start position:0% |
| that's implicit and some of those are |
| |
|
|
| align:start position:0% |
| that's implicit and some of those are |
| wrong |
|
|
| align:start position:0% |
| wrong |
| |
|
|
| align:start position:0% |
| wrong |
| so you've got to be able but but if you |
|
|
| align:start position:0% |
| so you've got to be able but but if you |
| |
|
|
| align:start position:0% |
| so you've got to be able but but if you |
| do |
|
|
| align:start position:0% |
| do |
| |
|
|
| align:start position:0% |
| do |
| regression modeling in conjunction with |
|
|
| align:start position:0% |
| regression modeling in conjunction with |
| |
|
|
| align:start position:0% |
| regression modeling in conjunction with |
| a fairly rich |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| sort of |
|
|
| align:start position:0% |
| sort of |
| |
|
|
| align:start position:0% |
| sort of |
| extra data points are lurking in there |
|
|
| align:start position:0% |
| extra data points are lurking in there |
| |
|
|
| align:start position:0% |
| extra data points are lurking in there |
| extra degrees of freedom are lurking in |
|
|
| align:start position:0% |
| extra degrees of freedom are lurking in |
| |
|
|
| align:start position:0% |
| extra degrees of freedom are lurking in |
| there that still allow you to reliably |
|
|
| align:start position:0% |
| there that still allow you to reliably |
| |
|
|
| align:start position:0% |
| there that still allow you to reliably |
| fit models |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| so the paper says the anova is performed |
|
|
| align:start position:0% |
| so the paper says the anova is performed |
| |
|
|
| align:start position:0% |
| so the paper says the anova is performed |
| but it is not shown |
|
|
| align:start position:0% |
| but it is not shown |
| |
|
|
| align:start position:0% |
| but it is not shown |
| i want to see the anova table so well we |
|
|
| align:start position:0% |
| i want to see the anova table so well we |
| |
|
|
| align:start position:0% |
| i want to see the anova table so well we |
| can basically generate those on our own |
|
|
| align:start position:0% |
| can basically generate those on our own |
| |
|
|
| align:start position:0% |
| can basically generate those on our own |
| and so in this case |
|
|
| align:start position:0% |
| and so in this case |
| |
|
|
| align:start position:0% |
| and so in this case |
| if the paper has the raw data in it i |
|
|
| align:start position:0% |
| if the paper has the raw data in it i |
| |
|
|
| align:start position:0% |
| if the paper has the raw data in it i |
| think it's okay that they didn't show |
|
|
| align:start position:0% |
| think it's okay that they didn't show |
| |
|
|
| align:start position:0% |
| think it's okay that they didn't show |
| the anova because i can regenerate that |
|
|
| align:start position:0% |
| the anova because i can regenerate that |
| |
|
|
| align:start position:0% |
| the anova because i can regenerate that |
| papers i hate are they don't show you |
|
|
| align:start position:0% |
| papers i hate are they don't show you |
| |
|
|
| align:start position:0% |
| papers i hate are they don't show you |
| the data and they don't show you the |
|
|
| align:start position:0% |
| the data and they don't show you the |
| |
|
|
| align:start position:0% |
| the data and they don't show you the |
| anova and so you don't know really what |
|
|
| align:start position:0% |
| anova and so you don't know really what |
| |
|
|
| align:start position:0% |
| anova and so you don't know really what |
| the noise was you don't know |
|
|
| align:start position:0% |
| the noise was you don't know |
| |
|
|
| align:start position:0% |
| the noise was you don't know |
| significances of parameters you don't |
|
|
| align:start position:0% |
| significances of parameters you don't |
| |
|
|
| align:start position:0% |
| significances of parameters you don't |
| know which parameters often they won't |
|
|
| align:start position:0% |
| know which parameters often they won't |
| |
|
|
| align:start position:0% |
| know which parameters often they won't |
| tell you really the significance level |
|
|
| align:start position:0% |
| tell you really the significance level |
| |
|
|
| align:start position:0% |
| tell you really the significance level |
| that was used to accept a model all of |
|
|
| align:start position:0% |
| that was used to accept a model all of |
| |
|
|
| align:start position:0% |
| that was used to accept a model all of |
| those sorts of things so in this case |
|
|
| align:start position:0% |
| those sorts of things so in this case |
| |
|
|
| align:start position:0% |
| those sorts of things so in this case |
| i'm i'm happy with the paper because |
|
|
| align:start position:0% |
| i'm i'm happy with the paper because |
| |
|
|
| align:start position:0% |
| i'm i'm happy with the paper because |
| i've got the raw data |
|
|
| align:start position:0% |
| i've got the raw data |
| |
|
|
| align:start position:0% |
| i've got the raw data |
| they claim that each of the model is |
|
|
| align:start position:0% |
| they claim that each of the model is |
| |
|
|
| align:start position:0% |
| they claim that each of the model is |
| significant at 99.9 percent uh |
|
|
| align:start position:0% |
| significant at 99.9 percent uh |
| |
|
|
| align:start position:0% |
| significant at 99.9 percent uh |
| significance level that's just |
|
|
| align:start position:0% |
| significance level that's just |
| |
|
|
| align:start position:0% |
| significance level that's just |
| their their p-value on the f-test for |
|
|
| align:start position:0% |
| their their p-value on the f-test for |
| |
|
|
| align:start position:0% |
| their their p-value on the f-test for |
| the whole model |
|
|
| align:start position:0% |
| the whole model |
| |
|
|
| align:start position:0% |
| the whole model |
| so these are very |
|
|
| align:start position:0% |
| so these are very |
| |
|
|
| align:start position:0% |
| so these are very |
| uh at least there is some parameter that |
|
|
| align:start position:0% |
| uh at least there is some parameter that |
| |
|
|
| align:start position:0% |
| uh at least there is some parameter that |
| is significant in influencing the output |
|
|
| align:start position:0% |
| is significant in influencing the output |
| |
|
|
| align:start position:0% |
| is significant in influencing the output |
| they report also r squareds which are is |
|
|
| align:start position:0% |
| they report also r squareds which are is |
| |
|
|
| align:start position:0% |
| they report also r squareds which are is |
| nice and for most of the models they are |
|
|
| align:start position:0% |
| nice and for most of the models they are |
| |
|
|
| align:start position:0% |
| nice and for most of the models they are |
| really quite high in the 0.88 to 0.97 |
|
|
| align:start position:0% |
| really quite high in the 0.88 to 0.97 |
| |
|
|
| align:start position:0% |
| really quite high in the 0.88 to 0.97 |
| range |
|
|
| align:start position:0% |
| range |
| |
|
|
| align:start position:0% |
| range |
| the lowest one was |
|
|
| align:start position:0% |
| the lowest one was |
| |
|
|
| align:start position:0% |
| the lowest one was |
| resistivity at about 0.79 |
|
|
| align:start position:0% |
| resistivity at about 0.79 |
| |
|
|
| align:start position:0% |
| resistivity at about 0.79 |
| okay |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| they also report some lack of fit |
|
|
| align:start position:0% |
| they also report some lack of fit |
| |
|
|
| align:start position:0% |
| they also report some lack of fit |
| mention a little bit of evidence of lack |
|
|
| align:start position:0% |
| mention a little bit of evidence of lack |
| |
|
|
| align:start position:0% |
| mention a little bit of evidence of lack |
| of fit for uniformity and reflectance |
|
|
| align:start position:0% |
| of fit for uniformity and reflectance |
| |
|
|
| align:start position:0% |
| of fit for uniformity and reflectance |
| this |
|
|
| align:start position:0% |
| this |
| |
|
|
| align:start position:0% |
| this |
| lack of fit for sheet resistance |
|
|
| align:start position:0% |
| lack of fit for sheet resistance |
| |
|
|
| align:start position:0% |
| lack of fit for sheet resistance |
| uniformity |
|
|
| align:start position:0% |
| uniformity |
| |
|
|
| align:start position:0% |
| uniformity |
| is really interesting |
|
|
| align:start position:0% |
| is really interesting |
| |
|
|
| align:start position:0% |
| is really interesting |
| and in fact so interesting |
|
|
| align:start position:0% |
| and in fact so interesting |
| |
|
|
| align:start position:0% |
| and in fact so interesting |
| that i think a week from today if dave |
|
|
| align:start position:0% |
| that i think a week from today if dave |
| |
|
|
| align:start position:0% |
| that i think a week from today if dave |
| is talking on thursday |
|
|
| align:start position:0% |
| is talking on thursday |
| |
|
|
| align:start position:0% |
| is talking on thursday |
| i will spend a whole lecture |
|
|
| align:start position:0% |
| i will spend a whole lecture |
| |
|
|
| align:start position:0% |
| i will spend a whole lecture |
| on modeling of uniformity |
|
|
| align:start position:0% |
| on modeling of uniformity |
| |
|
|
| align:start position:0% |
| on modeling of uniformity |
| response surface modeling approaches |
|
|
| align:start position:0% |
| response surface modeling approaches |
| |
|
|
| align:start position:0% |
| response surface modeling approaches |
| spatial modeling approaches appropriate |
|
|
| align:start position:0% |
| spatial modeling approaches appropriate |
| |
|
|
| align:start position:0% |
| spatial modeling approaches appropriate |
| for uniformity |
|
|
| align:start position:0% |
| for uniformity |
| |
|
|
| align:start position:0% |
| for uniformity |
| the preview is |
|
|
| align:start position:0% |
| the preview is |
| |
|
|
| align:start position:0% |
| the preview is |
| think of the calculations that go into a |
|
|
| align:start position:0% |
| think of the calculations that go into a |
| |
|
|
| align:start position:0% |
| think of the calculations that go into a |
| wafer level uniformity calcu |
|
|
| align:start position:0% |
| wafer level uniformity calcu |
| |
|
|
| align:start position:0% |
| wafer level uniformity calcu |
| you know the calculation of that |
|
|
| align:start position:0% |
| you know the calculation of that |
| |
|
|
| align:start position:0% |
| you know the calculation of that |
| you might measure i think they're |
|
|
| align:start position:0% |
| you might measure i think they're |
| |
|
|
| align:start position:0% |
| you might measure i think they're |
| measuring 49 points across the wafer |
|
|
| align:start position:0% |
| measuring 49 points across the wafer |
| |
|
|
| align:start position:0% |
| measuring 49 points across the wafer |
| they're do it forming sums of squared |
|
|
| align:start position:0% |
| they're do it forming sums of squared |
| |
|
|
| align:start position:0% |
| they're do it forming sums of squared |
| deviations and then taking a square root |
|
|
| align:start position:0% |
| deviations and then taking a square root |
| |
|
|
| align:start position:0% |
| deviations and then taking a square root |
| and then perhaps normalizing by some |
|
|
| align:start position:0% |
| and then perhaps normalizing by some |
| |
|
|
| align:start position:0% |
| and then perhaps normalizing by some |
| mean |
|
|
| align:start position:0% |
| mean |
| |
|
|
| align:start position:0% |
| mean |
| does that sound like a set of linear |
|
|
| align:start position:0% |
| does that sound like a set of linear |
| |
|
|
| align:start position:0% |
| does that sound like a set of linear |
| operations |
|
|
| align:start position:0% |
| operations |
| |
|
|
| align:start position:0% |
| operations |
| no that there's a lot of implicit |
|
|
| align:start position:0% |
| no that there's a lot of implicit |
| |
|
|
| align:start position:0% |
| no that there's a lot of implicit |
| non-linearity |
|
|
| align:start position:0% |
| non-linearity |
| |
|
|
| align:start position:0% |
| non-linearity |
| lurking just in the calculation of that |
|
|
| align:start position:0% |
| lurking just in the calculation of that |
| |
|
|
| align:start position:0% |
| lurking just in the calculation of that |
| of that metric |
|
|
| align:start position:0% |
| of that metric |
| |
|
|
| align:start position:0% |
| of that metric |
| and so it's not surprising that there's |
|
|
| align:start position:0% |
| and so it's not surprising that there's |
| |
|
|
| align:start position:0% |
| and so it's not surprising that there's |
| quadratic lack of fit or inability of a |
|
|
| align:start position:0% |
| quadratic lack of fit or inability of a |
| |
|
|
| align:start position:0% |
| quadratic lack of fit or inability of a |
| quadratic model to deal with a |
|
|
| align:start position:0% |
| quadratic model to deal with a |
| |
|
|
| align:start position:0% |
| quadratic model to deal with a |
| uniformity metric |
|
|
| align:start position:0% |
| uniformity metric |
| |
|
|
| align:start position:0% |
| uniformity metric |
| a spatial uniformity metric and we'll |
|
|
| align:start position:0% |
| a spatial uniformity metric and we'll |
| |
|
|
| align:start position:0% |
| a spatial uniformity metric and we'll |
| talk more about that next week but |
|
|
| align:start position:0% |
| talk more about that next week but |
| |
|
|
| align:start position:0% |
| talk more about that next week but |
| but um |
|
|
| align:start position:0% |
| but um |
| |
|
|
| align:start position:0% |
| but um |
| so they they do mention this uh at least |
|
|
| align:start position:0% |
| so they they do mention this uh at least |
| |
|
|
| align:start position:0% |
| so they they do mention this uh at least |
| they also mentioned some some potential |
|
|
| align:start position:0% |
| they also mentioned some some potential |
| |
|
|
| align:start position:0% |
| they also mentioned some some potential |
| lack of fit and reflectance i don't have |
|
|
| align:start position:0% |
| lack of fit and reflectance i don't have |
| |
|
|
| align:start position:0% |
| lack of fit and reflectance i don't have |
| an explanation for that they conjecture |
|
|
| align:start position:0% |
| an explanation for that they conjecture |
| |
|
|
| align:start position:0% |
| an explanation for that they conjecture |
| it's due to a very small pure error term |
|
|
| align:start position:0% |
| it's due to a very small pure error term |
| |
|
|
| align:start position:0% |
| it's due to a very small pure error term |
| so that you're able to detect |
|
|
| align:start position:0% |
| so that you're able to detect |
| |
|
|
| align:start position:0% |
| so that you're able to detect |
| with pretty fine resolution if there's |
|
|
| align:start position:0% |
| with pretty fine resolution if there's |
| |
|
|
| align:start position:0% |
| with pretty fine resolution if there's |
| any subtle non-quadratic |
|
|
| align:start position:0% |
| any subtle non-quadratic |
| |
|
|
| align:start position:0% |
| any subtle non-quadratic |
| uh trends but they're not concerned with |
|
|
| align:start position:0% |
| uh trends but they're not concerned with |
| |
|
|
| align:start position:0% |
| uh trends but they're not concerned with |
| it it's |
|
|
| align:start position:0% |
| it it's |
| |
|
|
| align:start position:0% |
| it it's |
| they still feel that they have very good |
|
|
| align:start position:0% |
| they still feel that they have very good |
| |
|
|
| align:start position:0% |
| they still feel that they have very good |
| good models |
|
|
| align:start position:0% |
| good models |
| |
|
|
| align:start position:0% |
| good models |
| it's also the case |
|
|
| align:start position:0% |
| it's also the case |
| |
|
|
| align:start position:0% |
| it's also the case |
| that there may be transformations |
|
|
| align:start position:0% |
| that there may be transformations |
| |
|
|
| align:start position:0% |
| that there may be transformations |
| that could be applied to improve these |
|
|
| align:start position:0% |
| that could be applied to improve these |
| |
|
|
| align:start position:0% |
| that could be applied to improve these |
| models |
|
|
| align:start position:0% |
| models |
| |
|
|
| align:start position:0% |
| models |
| and that also for the sheet resistivity |
|
|
| align:start position:0% |
| and that also for the sheet resistivity |
| |
|
|
| align:start position:0% |
| and that also for the sheet resistivity |
| or sheet resistance measurement |
|
|
| align:start position:0% |
| or sheet resistance measurement |
| |
|
|
| align:start position:0% |
| or sheet resistance measurement |
| there might be natural transformations |
|
|
| align:start position:0% |
| there might be natural transformations |
| |
|
|
| align:start position:0% |
| there might be natural transformations |
| that you might think that apply |
|
|
| align:start position:0% |
| that you might think that apply |
| |
|
|
| align:start position:0% |
| that you might think that apply |
| in fact if this is related to things |
|
|
| align:start position:0% |
| in fact if this is related to things |
| |
|
|
| align:start position:0% |
| in fact if this is related to things |
| like |
|
|
| align:start position:0% |
| like |
| |
|
|
| align:start position:0% |
| like |
| resistance divided by a thickness |
|
|
| align:start position:0% |
| resistance divided by a thickness |
| |
|
|
| align:start position:0% |
| resistance divided by a thickness |
| and the thickness |
|
|
| align:start position:0% |
| and the thickness |
| |
|
|
| align:start position:0% |
| and the thickness |
| grows linearly |
|
|
| align:start position:0% |
| grows linearly |
| |
|
|
| align:start position:0% |
| grows linearly |
| with |
|
|
| align:start position:0% |
| with |
| |
|
|
| align:start position:0% |
| with |
| you know maybe you have a linear |
|
|
| align:start position:0% |
| you know maybe you have a linear |
| |
|
|
| align:start position:0% |
| you know maybe you have a linear |
| dependence on on |
|
|
| align:start position:0% |
| dependence on on |
| |
|
|
| align:start position:0% |
| dependence on on |
| uh growth rate or something like that |
|
|
| align:start position:0% |
| uh growth rate or something like that |
| |
|
|
| align:start position:0% |
| uh growth rate or something like that |
| there may be inherent in there some one |
|
|
| align:start position:0% |
| there may be inherent in there some one |
| |
|
|
| align:start position:0% |
| there may be inherent in there some one |
| over kinds of transformations that might |
|
|
| align:start position:0% |
| over kinds of transformations that might |
| |
|
|
| align:start position:0% |
| over kinds of transformations that might |
| actually be a better thing to do to take |
|
|
| align:start position:0% |
| actually be a better thing to do to take |
| |
|
|
| align:start position:0% |
| actually be a better thing to do to take |
| that sheet resistance invert it and |
|
|
| align:start position:0% |
| that sheet resistance invert it and |
| |
|
|
| align:start position:0% |
| that sheet resistance invert it and |
| model the inverse of sheet resistance as |
|
|
| align:start position:0% |
| model the inverse of sheet resistance as |
| |
|
|
| align:start position:0% |
| model the inverse of sheet resistance as |
| a function of the input parameters |
|
|
| align:start position:0% |
| a function of the input parameters |
| |
|
|
| align:start position:0% |
| a function of the input parameters |
| so you can play around with that and |
|
|
| align:start position:0% |
| so you can play around with that and |
| |
|
|
| align:start position:0% |
| so you can play around with that and |
| actually that's a neat fun thing to play |
|
|
| align:start position:0% |
| actually that's a neat fun thing to play |
| |
|
|
| align:start position:0% |
| actually that's a neat fun thing to play |
| around with with some of these models |
|
|
| align:start position:0% |
| around with with some of these models |
| |
|
|
| align:start position:0% |
| around with with some of these models |
| they didn't do that |
|
|
| align:start position:0% |
| they didn't do that |
| |
|
|
| align:start position:0% |
| they didn't do that |
| but you could |
|
|
| align:start position:0% |
| but you could |
| |
|
|
| align:start position:0% |
| but you could |
| and then they do show the regression |
|
|
| align:start position:0% |
| and then they do show the regression |
| |
|
|
| align:start position:0% |
| and then they do show the regression |
| models here's the output these are the |
|
|
| align:start position:0% |
| models here's the output these are the |
| |
|
|
| align:start position:0% |
| models here's the output these are the |
| regression coefficients all of the |
|
|
| align:start position:0% |
| regression coefficients all of the |
| |
|
|
| align:start position:0% |
| regression coefficients all of the |
| linear terms and the cross terms and the |
|
|
| align:start position:0% |
| linear terms and the cross terms and the |
| |
|
|
| align:start position:0% |
| linear terms and the cross terms and the |
| square terms and what they've done in |
|
|
| align:start position:0% |
| square terms and what they've done in |
| |
|
|
| align:start position:0% |
| square terms and what they've done in |
| this table is report the |
|
|
| align:start position:0% |
| this table is report the |
| |
|
|
| align:start position:0% |
| this table is report the |
| the fit for just the significant terms |
|
|
| align:start position:0% |
| the fit for just the significant terms |
| |
|
|
| align:start position:0% |
| the fit for just the significant terms |
| if the coefficient was |
|
|
| align:start position:0% |
| if the coefficient was |
| |
|
|
| align:start position:0% |
| if the coefficient was |
| determined in their stepwise regression |
|
|
| align:start position:0% |
| determined in their stepwise regression |
| |
|
|
| align:start position:0% |
| determined in their stepwise regression |
| to be insignificant they've left it off |
|
|
| align:start position:0% |
| to be insignificant they've left it off |
| |
|
|
| align:start position:0% |
| to be insignificant they've left it off |
| i don't think they actually told us |
|
|
| align:start position:0% |
| i don't think they actually told us |
| |
|
|
| align:start position:0% |
| i don't think they actually told us |
| what their criteria for inclusion what |
|
|
| align:start position:0% |
| what their criteria for inclusion what |
| |
|
|
| align:start position:0% |
| what their criteria for inclusion what |
| their significance level cut off |
|
|
| align:start position:0% |
| their significance level cut off |
| |
|
|
| align:start position:0% |
| their significance level cut off |
| was |
|
|
| align:start position:0% |
| was |
| |
|
|
| align:start position:0% |
| was |
| in here so that would be a good thing to |
|
|
| align:start position:0% |
| in here so that would be a good thing to |
| |
|
|
| align:start position:0% |
| in here so that would be a good thing to |
| do as well but you can see lots of lots |
|
|
| align:start position:0% |
| do as well but you can see lots of lots |
| |
|
|
| align:start position:0% |
| do as well but you can see lots of lots |
| of models lots of |
|
|
| align:start position:0% |
| of models lots of |
| |
|
|
| align:start position:0% |
| of models lots of |
| uh second order terms these are you know |
|
|
| align:start position:0% |
| uh second order terms these are you know |
| |
|
|
| align:start position:0% |
| uh second order terms these are you know |
| interactions |
|
|
| align:start position:0% |
| interactions |
| |
|
|
| align:start position:0% |
| interactions |
| b 1 1 b 2 2 b 3 3 b |
|
|
| align:start position:0% |
| b 1 1 b 2 2 b 3 3 b |
| |
|
|
| align:start position:0% |
| b 1 1 b 2 2 b 3 3 b |
| those are pure square terms and then |
|
|
| align:start position:0% |
| those are pure square terms and then |
| |
|
|
| align:start position:0% |
| those are pure square terms and then |
| these are interactions so there's a fair |
|
|
| align:start position:0% |
| these are interactions so there's a fair |
| |
|
|
| align:start position:0% |
| these are interactions so there's a fair |
| amount of square activity going on |
|
|
| align:start position:0% |
| amount of square activity going on |
| |
|
|
| align:start position:0% |
| amount of square activity going on |
| as well as interactions |
|
|
| align:start position:0% |
| as well as interactions |
| |
|
|
| align:start position:0% |
| as well as interactions |
| they also then use those fit models to |
|
|
| align:start position:0% |
| they also then use those fit models to |
| |
|
|
| align:start position:0% |
| they also then use those fit models to |
| start to form |
|
|
| align:start position:0% |
| start to form |
| |
|
|
| align:start position:0% |
| start to form |
| contour plots and this is how they start |
|
|
| align:start position:0% |
| contour plots and this is how they start |
| |
|
|
| align:start position:0% |
| contour plots and this is how they start |
| to make then some engineering judgment |
|
|
| align:start position:0% |
| to make then some engineering judgment |
| |
|
|
| align:start position:0% |
| to make then some engineering judgment |
| about different trends so they would |
|
|
| align:start position:0% |
| about different trends so they would |
| |
|
|
| align:start position:0% |
| about different trends so they would |
| plot |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| realize they've got four inputs and |
|
|
| align:start position:0% |
| realize they've got four inputs and |
| |
|
|
| align:start position:0% |
| realize they've got four inputs and |
| seven outputs you possibly can't |
|
|
| align:start position:0% |
| seven outputs you possibly can't |
| |
|
|
| align:start position:0% |
| seven outputs you possibly can't |
| possibly have a |
|
|
| align:start position:0% |
| possibly have a |
| |
|
|
| align:start position:0% |
| possibly have a |
| whatever you know four-dimensional input |
|
|
| align:start position:0% |
| whatever you know four-dimensional input |
| |
|
|
| align:start position:0% |
| whatever you know four-dimensional input |
| space is very hard to visualize so what |
|
|
| align:start position:0% |
| space is very hard to visualize so what |
| |
|
|
| align:start position:0% |
| space is very hard to visualize so what |
| you resort to are typically either two |
|
|
| align:start position:0% |
| you resort to are typically either two |
| |
|
|
| align:start position:0% |
| you resort to are typically either two |
| typically sort of two dimensional plots |
|
|
| align:start position:0% |
| typically sort of two dimensional plots |
| |
|
|
| align:start position:0% |
| typically sort of two dimensional plots |
| where you might plot one output or two |
|
|
| align:start position:0% |
| where you might plot one output or two |
| |
|
|
| align:start position:0% |
| where you might plot one output or two |
| outputs as a contour so in this |
|
|
| align:start position:0% |
| outputs as a contour so in this |
| |
|
|
| align:start position:0% |
| outputs as a contour so in this |
| particular plot the solid line i believe |
|
|
| align:start position:0% |
| particular plot the solid line i believe |
| |
|
|
| align:start position:0% |
| particular plot the solid line i believe |
| is growth rate |
|
|
| align:start position:0% |
| is growth rate |
| |
|
|
| align:start position:0% |
| is growth rate |
| and the dashed line here is wf6 |
|
|
| align:start position:0% |
| and the dashed line here is wf6 |
| |
|
|
| align:start position:0% |
| and the dashed line here is wf6 |
| conversion |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| and you can start to feel get a feel for |
|
|
| align:start position:0% |
| and you can start to feel get a feel for |
| |
|
|
| align:start position:0% |
| and you can start to feel get a feel for |
| as for example |
|
|
| align:start position:0% |
| as for example |
| |
|
|
| align:start position:0% |
| as for example |
| the wf-6 pressure and the temperature |
|
|
| align:start position:0% |
| the wf-6 pressure and the temperature |
| |
|
|
| align:start position:0% |
| the wf-6 pressure and the temperature |
| change |
|
|
| align:start position:0% |
| change |
| |
|
|
| align:start position:0% |
| change |
| what trends you get in those two |
|
|
| align:start position:0% |
| what trends you get in those two |
| |
|
|
| align:start position:0% |
| what trends you get in those two |
| parameters and what trade-offs you get |
|
|
| align:start position:0% |
| parameters and what trade-offs you get |
| |
|
|
| align:start position:0% |
| parameters and what trade-offs you get |
| in those two parameters so things like |
|
|
| align:start position:0% |
| in those two parameters so things like |
| |
|
|
| align:start position:0% |
| in those two parameters so things like |
| as the temperature increases |
|
|
| align:start position:0% |
| as the temperature increases |
| |
|
|
| align:start position:0% |
| as the temperature increases |
| so temperature increasing this way the |
|
|
| align:start position:0% |
| so temperature increasing this way the |
| |
|
|
| align:start position:0% |
| so temperature increasing this way the |
| growth rate |
|
|
| align:start position:0% |
| growth rate |
| |
|
|
| align:start position:0% |
| growth rate |
| kind of increases |
|
|
| align:start position:0% |
| kind of increases |
| |
|
|
| align:start position:0% |
| kind of increases |
| right so the growth rate is the solid |
|
|
| align:start position:0% |
| right so the growth rate is the solid |
| |
|
|
| align:start position:0% |
| right so the growth rate is the solid |
| line |
|
|
| align:start position:0% |
| line |
| |
|
|
| align:start position:0% |
| line |
| so pretty directly |
|
|
| align:start position:0% |
| so pretty directly |
| |
|
|
| align:start position:0% |
| so pretty directly |
| with temperature that looks like a |
|
|
| align:start position:0% |
| with temperature that looks like a |
| |
|
|
| align:start position:0% |
| with temperature that looks like a |
| fairly strong direct impact as you might |
|
|
| align:start position:0% |
| fairly strong direct impact as you might |
| |
|
|
| align:start position:0% |
| fairly strong direct impact as you might |
| expect with a chemically |
|
|
| align:start position:0% |
| expect with a chemically |
| |
|
|
| align:start position:0% |
| expect with a chemically |
| dependent kind of process |
|
|
| align:start position:0% |
| dependent kind of process |
| |
|
|
| align:start position:0% |
| dependent kind of process |
| so they can start to get a feel for what |
|
|
| align:start position:0% |
| so they can start to get a feel for what |
| |
|
|
| align:start position:0% |
| so they can start to get a feel for what |
| some of these trends are and look at |
|
|
| align:start position:0% |
| some of these trends are and look at |
| |
|
|
| align:start position:0% |
| some of these trends are and look at |
| what |
|
|
| align:start position:0% |
| what |
| |
|
|
| align:start position:0% |
| what |
| for example has the biggest impact on |
|
|
| align:start position:0% |
| for example has the biggest impact on |
| |
|
|
| align:start position:0% |
| for example has the biggest impact on |
| growth rate of these of these parameters |
|
|
| align:start position:0% |
| growth rate of these of these parameters |
| |
|
|
| align:start position:0% |
| growth rate of these of these parameters |
| and which have |
|
|
| align:start position:0% |
| and which have |
| |
|
|
| align:start position:0% |
| and which have |
| either insignificant or small in |
|
|
| align:start position:0% |
| either insignificant or small in |
| |
|
|
| align:start position:0% |
| either insignificant or small in |
| magnitude |
|
|
| align:start position:0% |
| magnitude |
| |
|
|
| align:start position:0% |
| magnitude |
| kinds of effects |
|
|
| align:start position:0% |
| kinds of effects |
| |
|
|
| align:start position:0% |
| kinds of effects |
| now they can also start to do things |
|
|
| align:start position:0% |
| now they can also start to do things |
| |
|
|
| align:start position:0% |
| now they can also start to do things |
| like overlay requirements or conditions |
|
|
| align:start position:0% |
| like overlay requirements or conditions |
| |
|
|
| align:start position:0% |
| like overlay requirements or conditions |
| on these to start to understand the |
|
|
| align:start position:0% |
| on these to start to understand the |
| |
|
|
| align:start position:0% |
| on these to start to understand the |
| feasible operating space for process |
|
|
| align:start position:0% |
| feasible operating space for process |
| |
|
|
| align:start position:0% |
| feasible operating space for process |
| design and optimization so for example |
|
|
| align:start position:0% |
| design and optimization so for example |
| |
|
|
| align:start position:0% |
| design and optimization so for example |
| if your growth rate had to be 500 |
|
|
| align:start position:0% |
| if your growth rate had to be 500 |
| |
|
|
| align:start position:0% |
| if your growth rate had to be 500 |
| nanometers per minute or higher |
|
|
| align:start position:0% |
| nanometers per minute or higher |
| |
|
|
| align:start position:0% |
| nanometers per minute or higher |
| you might then have whoops |
|
|
| align:start position:0% |
| you might then have whoops |
| |
|
|
| align:start position:0% |
| you might then have whoops |
| you know kind of shading on this plot |
|
|
| align:start position:0% |
| you know kind of shading on this plot |
| |
|
|
| align:start position:0% |
| you know kind of shading on this plot |
| you would say okay i really need to be |
|
|
| align:start position:0% |
| you would say okay i really need to be |
| |
|
|
| align:start position:0% |
| you would say okay i really need to be |
| above that 500 nanometer per minute |
|
|
| align:start position:0% |
| above that 500 nanometer per minute |
| |
|
|
| align:start position:0% |
| above that 500 nanometer per minute |
| contour and that tells me |
|
|
| align:start position:0% |
| contour and that tells me |
| |
|
|
| align:start position:0% |
| contour and that tells me |
| where i need to be at least with respect |
|
|
| align:start position:0% |
| where i need to be at least with respect |
| |
|
|
| align:start position:0% |
| where i need to be at least with respect |
| to those two parameters in terms of |
|
|
| align:start position:0% |
| to those two parameters in terms of |
| |
|
|
| align:start position:0% |
| to those two parameters in terms of |
| feasible operating space |
|
|
| align:start position:0% |
| feasible operating space |
| |
|
|
| align:start position:0% |
| feasible operating space |
| so already it tells you a lot just |
|
|
| align:start position:0% |
| so already it tells you a lot just |
| |
|
|
| align:start position:0% |
| so already it tells you a lot just |
| looking at these plots of where you |
|
|
| align:start position:0% |
| looking at these plots of where you |
| |
|
|
| align:start position:0% |
| looking at these plots of where you |
| might need to be in order to to achieve |
|
|
| align:start position:0% |
| might need to be in order to to achieve |
| |
|
|
| align:start position:0% |
| might need to be in order to to achieve |
| your multiple goals it may not give you |
|
|
| align:start position:0% |
| your multiple goals it may not give you |
| |
|
|
| align:start position:0% |
| your multiple goals it may not give you |
| a numerical optimum point |
|
|
| align:start position:0% |
| a numerical optimum point |
| |
|
|
| align:start position:0% |
| a numerical optimum point |
| but |
|
|
| align:start position:0% |
| but |
| |
|
|
| align:start position:0% |
| but |
| all by itself lots of looking at the |
|
|
| align:start position:0% |
| all by itself lots of looking at the |
| |
|
|
| align:start position:0% |
| all by itself lots of looking at the |
| data and plotting of the data is really |
|
|
| align:start position:0% |
| data and plotting of the data is really |
| |
|
|
| align:start position:0% |
| data and plotting of the data is really |
| valuable |
|
|
| align:start position:0% |
| valuable |
| |
|
|
| align:start position:0% |
| valuable |
| they do that for not only growth rate |
|
|
| align:start position:0% |
| they do that for not only growth rate |
| |
|
|
| align:start position:0% |
| they do that for not only growth rate |
| and wf6 but things like resistivity |
|
|
| align:start position:0% |
| and wf6 but things like resistivity |
| |
|
|
| align:start position:0% |
| and wf6 but things like resistivity |
| reflectance |
|
|
| align:start position:0% |
| reflectance |
| |
|
|
| align:start position:0% |
| reflectance |
| they start to look and see you know is |
|
|
| align:start position:0% |
| they start to look and see you know is |
| |
|
|
| align:start position:0% |
| they start to look and see you know is |
| the overall design going to be feasible |
|
|
| align:start position:0% |
| the overall design going to be feasible |
| |
|
|
| align:start position:0% |
| the overall design going to be feasible |
| what has the biggest effect on |
|
|
| align:start position:0% |
| what has the biggest effect on |
| |
|
|
| align:start position:0% |
| what has the biggest effect on |
| morphology |
|
|
| align:start position:0% |
| morphology |
| |
|
|
| align:start position:0% |
| morphology |
| those sorts of things |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| we found uh |
|
|
| align:start position:0% |
| we found uh |
| |
|
|
| align:start position:0% |
| we found uh |
| if you look at their contour plots most |
|
|
| align:start position:0% |
| if you look at their contour plots most |
| |
|
|
| align:start position:0% |
| if you look at their contour plots most |
| of these contour plots are are |
|
|
| align:start position:0% |
| of these contour plots are are |
| |
|
|
| align:start position:0% |
| of these contour plots are are |
| reasonably |
|
|
| align:start position:0% |
| reasonably |
| |
|
|
| align:start position:0% |
| reasonably |
| you know these are nice |
|
|
| align:start position:0% |
| you know these are nice |
| |
|
|
| align:start position:0% |
| you know these are nice |
| semi-linear kinds of plots |
|
|
| align:start position:0% |
| semi-linear kinds of plots |
| |
|
|
| align:start position:0% |
| semi-linear kinds of plots |
| their uniformity plot these look bizarre |
|
|
| align:start position:0% |
| their uniformity plot these look bizarre |
| |
|
|
| align:start position:0% |
| their uniformity plot these look bizarre |
| right very complex surfaces |
|
|
| align:start position:0% |
| right very complex surfaces |
| |
|
|
| align:start position:0% |
| right very complex surfaces |
| and again that's a reflection that this |
|
|
| align:start position:0% |
| and again that's a reflection that this |
| |
|
|
| align:start position:0% |
| and again that's a reflection that this |
| uniformity metric the spatial uniform |
|
|
| align:start position:0% |
| uniformity metric the spatial uniform |
| |
|
|
| align:start position:0% |
| uniformity metric the spatial uniform |
| internet is a very complex function of |
|
|
| align:start position:0% |
| internet is a very complex function of |
| |
|
|
| align:start position:0% |
| internet is a very complex function of |
| the input parameters |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| what they then do finally to round out |
|
|
| align:start position:0% |
| what they then do finally to round out |
| |
|
|
| align:start position:0% |
| what they then do finally to round out |
| the paper is talk a little bit about |
|
|
| align:start position:0% |
| the paper is talk a little bit about |
| |
|
|
| align:start position:0% |
| the paper is talk a little bit about |
| optimization so what they will have is |
|
|
| align:start position:0% |
| optimization so what they will have is |
| |
|
|
| align:start position:0% |
| optimization so what they will have is |
| some of those limits like i i said for |
|
|
| align:start position:0% |
| some of those limits like i i said for |
| |
|
|
| align:start position:0% |
| some of those limits like i i said for |
| example on the growth rate i guess i |
|
|
| align:start position:0% |
| example on the growth rate i guess i |
| |
|
|
| align:start position:0% |
| example on the growth rate i guess i |
| guess it wasn't a 500 nanometer cut off |
|
|
| align:start position:0% |
| guess it wasn't a 500 nanometer cut off |
| |
|
|
| align:start position:0% |
| guess it wasn't a 500 nanometer cut off |
| they needed at least 300 nanometer but |
|
|
| align:start position:0% |
| they needed at least 300 nanometer but |
| |
|
|
| align:start position:0% |
| they needed at least 300 nanometer but |
| they would like to get that |
|
|
| align:start position:0% |
| they would like to get that |
| |
|
|
| align:start position:0% |
| they would like to get that |
| higher is better and they would |
|
|
| align:start position:0% |
| higher is better and they would |
| |
|
|
| align:start position:0% |
| higher is better and they would |
| basically have different |
|
|
| align:start position:0% |
| basically have different |
| |
|
|
| align:start position:0% |
| basically have different |
| lower or upper bounds on each of the |
|
|
| align:start position:0% |
| lower or upper bounds on each of the |
| |
|
|
| align:start position:0% |
| lower or upper bounds on each of the |
| other parameters as well as |
|
|
| align:start position:0% |
| other parameters as well as |
| |
|
|
| align:start position:0% |
| other parameters as well as |
| desires to sort of hit either targets or |
|
|
| align:start position:0% |
| desires to sort of hit either targets or |
| |
|
|
| align:start position:0% |
| desires to sort of hit either targets or |
| make those bigger or smaller |
|
|
| align:start position:0% |
| make those bigger or smaller |
| |
|
|
| align:start position:0% |
| make those bigger or smaller |
| now they don't really describe very much |
|
|
| align:start position:0% |
| now they don't really describe very much |
| |
|
|
| align:start position:0% |
| now they don't really describe very much |
| what their |
|
|
| align:start position:0% |
| what their |
| |
|
|
| align:start position:0% |
| what their |
| what their |
|
|
| align:start position:0% |
| what their |
| |
|
|
| align:start position:0% |
| what their |
| optimization procedure is |
|
|
| align:start position:0% |
| optimization procedure is |
| |
|
|
| align:start position:0% |
| optimization procedure is |
| all they do is report that using the |
|
|
| align:start position:0% |
| all they do is report that using the |
| |
|
|
| align:start position:0% |
| all they do is report that using the |
| model they were able to achieve the |
|
|
| align:start position:0% |
| model they were able to achieve the |
| |
|
|
| align:start position:0% |
| model they were able to achieve the |
| following |
|
|
| align:start position:0% |
| following |
| |
|
|
| align:start position:0% |
| following |
| best |
|
|
| align:start position:0% |
| best |
| |
|
|
| align:start position:0% |
| best |
| condition which they report and are very |
|
|
| align:start position:0% |
| condition which they report and are very |
| |
|
|
| align:start position:0% |
| condition which they report and are very |
| satisfied with so things like you know |
|
|
| align:start position:0% |
| satisfied with so things like you know |
| |
|
|
| align:start position:0% |
| satisfied with so things like you know |
| very high 99 step coverage |
|
|
| align:start position:0% |
| very high 99 step coverage |
| |
|
|
| align:start position:0% |
| very high 99 step coverage |
| improved or fairly good |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| conversion rate and so on so that's |
|
|
| align:start position:0% |
| conversion rate and so on so that's |
| |
|
|
| align:start position:0% |
| conversion rate and so on so that's |
| actually one of the fun things one could |
|
|
| align:start position:0% |
| actually one of the fun things one could |
| |
|
|
| align:start position:0% |
| actually one of the fun things one could |
| play with i think with the actual data |
|
|
| align:start position:0% |
| play with i think with the actual data |
| |
|
|
| align:start position:0% |
| play with i think with the actual data |
| is apply some of the hill climbing or |
|
|
| align:start position:0% |
| is apply some of the hill climbing or |
| |
|
|
| align:start position:0% |
| is apply some of the hill climbing or |
| other kinds of optimization algorithms |
|
|
| align:start position:0% |
| other kinds of optimization algorithms |
| |
|
|
| align:start position:0% |
| other kinds of optimization algorithms |
| to this data |
|
|
| align:start position:0% |
| to this data |
| |
|
|
| align:start position:0% |
| to this data |
| they do note in the paper that some of |
|
|
| align:start position:0% |
| they do note in the paper that some of |
| |
|
|
| align:start position:0% |
| they do note in the paper that some of |
| these constraints or limits |
|
|
| align:start position:0% |
| these constraints or limits |
| |
|
|
| align:start position:0% |
| these constraints or limits |
| do not greatly reduce their factor space |
|
|
| align:start position:0% |
| do not greatly reduce their factor space |
| |
|
|
| align:start position:0% |
| do not greatly reduce their factor space |
| they do not constrain |
|
|
| align:start position:0% |
| they do not constrain |
| |
|
|
| align:start position:0% |
| they do not constrain |
| where they need to operate and that |
|
|
| align:start position:0% |
| where they need to operate and that |
| |
|
|
| align:start position:0% |
| where they need to operate and that |
| gives them lots of latitude to be able |
|
|
| align:start position:0% |
| gives them lots of latitude to be able |
| |
|
|
| align:start position:0% |
| gives them lots of latitude to be able |
| to that's a good thing that gives them |
|
|
| align:start position:0% |
| to that's a good thing that gives them |
| |
|
|
| align:start position:0% |
| to that's a good thing that gives them |
| latitude to play with those parameters |
|
|
| align:start position:0% |
| latitude to play with those parameters |
| |
|
|
| align:start position:0% |
| latitude to play with those parameters |
| to achieve perhaps some other uh |
|
|
| align:start position:0% |
| to achieve perhaps some other uh |
| |
|
|
| align:start position:0% |
| to achieve perhaps some other uh |
| some other goals |
|
|
| align:start position:0% |
| some other goals |
| |
|
|
| align:start position:0% |
| some other goals |
| okay so what i want to do in the last |
|
|
| align:start position:0% |
| okay so what i want to do in the last |
| |
|
|
| align:start position:0% |
| okay so what i want to do in the last |
| six minutes is switch over here |
|
|
| align:start position:0% |
| six minutes is switch over here |
| |
|
|
| align:start position:0% |
| six minutes is switch over here |
| uh |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| so are we ready to do a switch because |
|
|
| align:start position:0% |
| so are we ready to do a switch because |
| |
|
|
| align:start position:0% |
| so are we ready to do a switch because |
| what i want to do is |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| so what i'm going to be doing here is |
|
|
| align:start position:0% |
| so what i'm going to be doing here is |
| |
|
|
| align:start position:0% |
| so what i'm going to be doing here is |
| basically showing you some jump |
|
|
| align:start position:0% |
| basically showing you some jump |
| |
|
|
| align:start position:0% |
| basically showing you some jump |
| analysis |
|
|
| align:start position:0% |
| analysis |
| |
|
|
| align:start position:0% |
| analysis |
| of this data |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| yep |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| oh dear |
|
|
| align:start position:0% |
| oh dear |
| |
|
|
| align:start position:0% |
| oh dear |
| maybe i'm not online |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| so what i've basically done is just |
|
|
| align:start position:0% |
| so what i've basically done is just |
| |
|
|
| align:start position:0% |
| so what i've basically done is just |
| sucked in the raw data and their their |
|
|
| align:start position:0% |
| sucked in the raw data and their their |
| |
|
|
| align:start position:0% |
| sucked in the raw data and their their |
| input conditions and their output |
|
|
| align:start position:0% |
| input conditions and their output |
| |
|
|
| align:start position:0% |
| input conditions and their output |
| conditions and we'll play with two |
|
|
| align:start position:0% |
| conditions and we'll play with two |
| |
|
|
| align:start position:0% |
| conditions and we'll play with two |
| things i just want to give you a little |
|
|
| align:start position:0% |
| things i just want to give you a little |
| |
|
|
| align:start position:0% |
| things i just want to give you a little |
| bit of a glimpse here |
|
|
| align:start position:0% |
| bit of a glimpse here |
| |
|
|
| align:start position:0% |
| bit of a glimpse here |
| of |
|
|
| align:start position:0% |
| of |
| |
|
|
| align:start position:0% |
| of |
| okay |
|
|
| align:start position:0% |
| okay |
| |
|
|
| align:start position:0% |
| okay |
| excellent |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay can you see that in singapore |
|
|
| align:start position:0% |
| okay can you see that in singapore |
| |
|
|
| align:start position:0% |
| okay can you see that in singapore |
| excellent all right i'm psyched |
|
|
| align:start position:0% |
| excellent all right i'm psyched |
| |
|
|
| align:start position:0% |
| excellent all right i'm psyched |
| okay so what i've done here is use jump |
|
|
| align:start position:0% |
| okay so what i've done here is use jump |
| |
|
|
| align:start position:0% |
| okay so what i've done here is use jump |
| jump seven in fact which is a more |
|
|
| align:start position:0% |
| jump seven in fact which is a more |
| |
|
|
| align:start position:0% |
| jump seven in fact which is a more |
| recent version that i'm used to so some |
|
|
| align:start position:0% |
| recent version that i'm used to so some |
| |
|
|
| align:start position:0% |
| recent version that i'm used to so some |
| of the controls are a little bit |
|
|
| align:start position:0% |
| of the controls are a little bit |
| |
|
|
| align:start position:0% |
| of the controls are a little bit |
| different uh by the way i don't know if |
|
|
| align:start position:0% |
| different uh by the way i don't know if |
| |
|
|
| align:start position:0% |
| different uh by the way i don't know if |
| you've played with jump before |
|
|
| align:start position:0% |
| you've played with jump before |
| |
|
|
| align:start position:0% |
| you've played with jump before |
| as you're looking at |
|
|
| align:start position:0% |
| as you're looking at |
| |
|
|
| align:start position:0% |
| as you're looking at |
| your projects |
|
|
| align:start position:0% |
| your projects |
| |
|
|
| align:start position:0% |
| your projects |
| uh there is a 30-day free trial license |
|
|
| align:start position:0% |
| uh there is a 30-day free trial license |
| |
|
|
| align:start position:0% |
| uh there is a 30-day free trial license |
| of the full version of jump so you can |
|
|
| align:start position:0% |
| of the full version of jump so you can |
| |
|
|
| align:start position:0% |
| of the full version of jump so you can |
| download |
|
|
| align:start position:0% |
| download |
| |
|
|
| align:start position:0% |
| download |
| uh the trial version if you want if you |
|
|
| align:start position:0% |
| uh the trial version if you want if you |
| |
|
|
| align:start position:0% |
| uh the trial version if you want if you |
| want to grab it and and play with it uh |
|
|
| align:start position:0% |
| want to grab it and and play with it uh |
| |
|
|
| align:start position:0% |
| want to grab it and and play with it uh |
| especially for the |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| for the project i believe there's also |
|
|
| align:start position:0% |
| for the project i believe there's also |
| |
|
|
| align:start position:0% |
| for the project i believe there's also |
| an academic version it's like fifty |
|
|
| align:start position:0% |
| an academic version it's like fifty |
| |
|
|
| align:start position:0% |
| an academic version it's like fifty |
| dollars for a year license or something |
|
|
| align:start position:0% |
| dollars for a year license or something |
| |
|
|
| align:start position:0% |
| dollars for a year license or something |
| which is pretty nice because the |
|
|
| align:start position:0% |
| which is pretty nice because the |
| |
|
|
| align:start position:0% |
| which is pretty nice because the |
| commercial version is |
|
|
| align:start position:0% |
| commercial version is |
| |
|
|
| align:start position:0% |
| commercial version is |
| hundreds of dollars so so it's a nice |
|
|
| align:start position:0% |
| hundreds of dollars so so it's a nice |
| |
|
|
| align:start position:0% |
| hundreds of dollars so so it's a nice |
| package so all i did is i sucked in the |
|
|
| align:start position:0% |
| package so all i did is i sucked in the |
| |
|
|
| align:start position:0% |
| package so all i did is i sucked in the |
| the inputs these are our four input |
|
|
| align:start position:0% |
| the inputs these are our four input |
| |
|
|
| align:start position:0% |
| the inputs these are our four input |
| conditions here and then our growth rate |
|
|
| align:start position:0% |
| conditions here and then our growth rate |
| |
|
|
| align:start position:0% |
| conditions here and then our growth rate |
| and output conditions and i would always |
|
|
| align:start position:0% |
| and output conditions and i would always |
| |
|
|
| align:start position:0% |
| and output conditions and i would always |
| encourage you as a first step to explore |
|
|
| align:start position:0% |
| encourage you as a first step to explore |
| |
|
|
| align:start position:0% |
| encourage you as a first step to explore |
| your data just look at it see if it |
|
|
| align:start position:0% |
| your data just look at it see if it |
| |
|
|
| align:start position:0% |
| your data just look at it see if it |
| makes sense do univariate plots of |
|
|
| align:start position:0% |
| makes sense do univariate plots of |
| |
|
|
| align:start position:0% |
| makes sense do univariate plots of |
| outputs as a function of inputs and by |
|
|
| align:start position:0% |
| outputs as a function of inputs and by |
| |
|
|
| align:start position:0% |
| outputs as a function of inputs and by |
| the way there's some very cool things |
|
|
| align:start position:0% |
| the way there's some very cool things |
| |
|
|
| align:start position:0% |
| the way there's some very cool things |
| like |
|
|
| align:start position:0% |
| like |
| |
|
|
| align:start position:0% |
| like |
| scatter plot 3d where you might take |
|
|
| align:start position:0% |
| scatter plot 3d where you might take |
| |
|
|
| align:start position:0% |
| scatter plot 3d where you might take |
| three of these parameters |
|
|
| align:start position:0% |
| three of these parameters |
| |
|
|
| align:start position:0% |
| three of these parameters |
| and plot them against each other |
|
|
| align:start position:0% |
| and plot them against each other |
| |
|
|
| align:start position:0% |
| and plot them against each other |
| and so you get |
|
|
| align:start position:0% |
| and so you get |
| |
|
|
| align:start position:0% |
| and so you get |
| cool things like this that give you |
|
|
| align:start position:0% |
| cool things like this that give you |
| |
|
|
| align:start position:0% |
| cool things like this that give you |
| a picture of the scatter plot |
|
|
| align:start position:0% |
| a picture of the scatter plot |
| |
|
|
| align:start position:0% |
| a picture of the scatter plot |
| as a function |
|
|
| align:start position:0% |
| as a function |
| |
|
|
| align:start position:0% |
| as a function |
| you know of those three inputs or |
|
|
| align:start position:0% |
| you know of those three inputs or |
| |
|
|
| align:start position:0% |
| you know of those three inputs or |
| i guess this is a scatter plot of three |
|
|
| align:start position:0% |
| i guess this is a scatter plot of three |
| |
|
|
| align:start position:0% |
| i guess this is a scatter plot of three |
| outputs versus each other see if there's |
|
|
| align:start position:0% |
| outputs versus each other see if there's |
| |
|
|
| align:start position:0% |
| outputs versus each other see if there's |
| some correlation between these outputs |
|
|
| align:start position:0% |
| some correlation between these outputs |
| |
|
|
| align:start position:0% |
| some correlation between these outputs |
| you can do it one output as a function |
|
|
| align:start position:0% |
| you can do it one output as a function |
| |
|
|
| align:start position:0% |
| you can do it one output as a function |
| of two others um and so on so one of the |
|
|
| align:start position:0% |
| of two others um and so on so one of the |
| |
|
|
| align:start position:0% |
| of two others um and so on so one of the |
| nice things i like about |
|
|
| align:start position:0% |
| nice things i like about |
| |
|
|
| align:start position:0% |
| nice things i like about |
| jump and you should look for in a good |
|
|
| align:start position:0% |
| jump and you should look for in a good |
| |
|
|
| align:start position:0% |
| jump and you should look for in a good |
| interactive package is that interaction |
|
|
| align:start position:0% |
| interactive package is that interaction |
| |
|
|
| align:start position:0% |
| interactive package is that interaction |
| you can actually interact with the data |
|
|
| align:start position:0% |
| you can actually interact with the data |
| |
|
|
| align:start position:0% |
| you can actually interact with the data |
| and one of the things that excel is not |
|
|
| align:start position:0% |
| and one of the things that excel is not |
| |
|
|
| align:start position:0% |
| and one of the things that excel is not |
| good at so |
|
|
| align:start position:0% |
| good at so |
| |
|
|
| align:start position:0% |
| good at so |
| other tools like matlab are good at this |
|
|
| align:start position:0% |
| other tools like matlab are good at this |
| |
|
|
| align:start position:0% |
| other tools like matlab are good at this |
| as well |
|
|
| align:start position:0% |
| as well |
| |
|
|
| align:start position:0% |
| as well |
| okay so having done that |
|
|
| align:start position:0% |
| okay so having done that |
| |
|
|
| align:start position:0% |
| okay so having done that |
| another thing i like about jump is it |
|
|
| align:start position:0% |
| another thing i like about jump is it |
| |
|
|
| align:start position:0% |
| another thing i like about jump is it |
| allows you to |
|
|
| align:start position:0% |
| allows you to |
| |
|
|
| align:start position:0% |
| allows you to |
| you know |
|
|
| align:start position:0% |
| you know |
| |
|
|
| align:start position:0% |
| you know |
| highlight what are bad data points so i |
|
|
| align:start position:0% |
| highlight what are bad data points so i |
| |
|
|
| align:start position:0% |
| highlight what are bad data points so i |
| don't i can deal with missing data |
|
|
| align:start position:0% |
| don't i can deal with missing data |
| |
|
|
| align:start position:0% |
| don't i can deal with missing data |
| points and jump so i've pulled those |
|
|
| align:start position:0% |
| points and jump so i've pulled those |
| |
|
|
| align:start position:0% |
| points and jump so i've pulled those |
| from the uh from the paper as well |
|
|
| align:start position:0% |
| from the uh from the paper as well |
| |
|
|
| align:start position:0% |
| from the uh from the paper as well |
| and then i can start to do things like |
|
|
| align:start position:0% |
| and then i can start to do things like |
| |
|
|
| align:start position:0% |
| and then i can start to do things like |
| build regression models so there are |
|
|
| align:start position:0% |
| build regression models so there are |
| |
|
|
| align:start position:0% |
| build regression models so there are |
| graph |
|
|
| align:start position:0% |
| graph |
| |
|
|
| align:start position:0% |
| graph |
| oops |
|
|
| align:start position:0% |
| oops |
| |
|
|
| align:start position:0% |
| oops |
| i'm sorry |
|
|
| align:start position:0% |
| i'm sorry |
| |
|
|
| align:start position:0% |
| i'm sorry |
| a analyze |
|
|
| align:start position:0% |
| a analyze |
| |
|
|
| align:start position:0% |
| a analyze |
| model |
|
|
| align:start position:0% |
| model |
| |
|
|
| align:start position:0% |
| model |
| so here i might say okay i want to build |
|
|
| align:start position:0% |
| so here i might say okay i want to build |
| |
|
|
| align:start position:0% |
| so here i might say okay i want to build |
| a model for |
|
|
| align:start position:0% |
| a model for |
| |
|
|
| align:start position:0% |
| a model for |
| i'll just pick one for the moment growth |
|
|
| align:start position:0% |
| i'll just pick one for the moment growth |
| |
|
|
| align:start position:0% |
| i'll just pick one for the moment growth |
| rate as a function of these four input |
|
|
| align:start position:0% |
| rate as a function of these four input |
| |
|
|
| align:start position:0% |
| rate as a function of these four input |
| parameters and i can do things like say |
|
|
| align:start position:0% |
| parameters and i can do things like say |
| |
|
|
| align:start position:0% |
| parameters and i can do things like say |
| i really am doing a response surface |
|
|
| align:start position:0% |
| i really am doing a response surface |
| |
|
|
| align:start position:0% |
| i really am doing a response surface |
| model up to polynomial degree 2 |
|
|
| align:start position:0% |
| model up to polynomial degree 2 |
| |
|
|
| align:start position:0% |
| model up to polynomial degree 2 |
| and it builds for me |
|
|
| align:start position:0% |
| and it builds for me |
| |
|
|
| align:start position:0% |
| and it builds for me |
| the template if you will for all of the |
|
|
| align:start position:0% |
| the template if you will for all of the |
| |
|
|
| align:start position:0% |
| the template if you will for all of the |
| interaction terms the square terms all |
|
|
| align:start position:0% |
| interaction terms the square terms all |
| |
|
|
| align:start position:0% |
| interaction terms the square terms all |
| of those things that if you were doing |
|
|
| align:start position:0% |
| of those things that if you were doing |
| |
|
|
| align:start position:0% |
| of those things that if you were doing |
| this in excel you would have to you know |
|
|
| align:start position:0% |
| this in excel you would have to you know |
| |
|
|
| align:start position:0% |
| this in excel you would have to you know |
| yourself build those fictional |
|
|
| align:start position:0% |
| yourself build those fictional |
| |
|
|
| align:start position:0% |
| yourself build those fictional |
| input parameters but here i'm basically |
|
|
| align:start position:0% |
| input parameters but here i'm basically |
| |
|
|
| align:start position:0% |
| input parameters but here i'm basically |
| telling it directly what the structure |
|
|
| align:start position:0% |
| telling it directly what the structure |
| |
|
|
| align:start position:0% |
| telling it directly what the structure |
| of the model i want to fit is |
|
|
| align:start position:0% |
| of the model i want to fit is |
| |
|
|
| align:start position:0% |
| of the model i want to fit is |
| now one thing that we haven't talked a |
|
|
| align:start position:0% |
| now one thing that we haven't talked a |
| |
|
|
| align:start position:0% |
| now one thing that we haven't talked a |
| lot about that i wanted to to highlight |
|
|
| align:start position:0% |
| lot about that i wanted to to highlight |
| |
|
|
| align:start position:0% |
| lot about that i wanted to to highlight |
| is |
|
|
| align:start position:0% |
| is |
| |
|
|
| align:start position:0% |
| is |
| how to go about building the model i |
|
|
| align:start position:0% |
| how to go about building the model i |
| |
|
|
| align:start position:0% |
| how to go about building the model i |
| could go ahead and do a full anova a |
|
|
| align:start position:0% |
| could go ahead and do a full anova a |
| |
|
|
| align:start position:0% |
| could go ahead and do a full anova a |
| full regression and a nova and look at |
|
|
| align:start position:0% |
| full regression and a nova and look at |
| |
|
|
| align:start position:0% |
| full regression and a nova and look at |
| each of the terms and decide what's |
|
|
| align:start position:0% |
| each of the terms and decide what's |
| |
|
|
| align:start position:0% |
| each of the terms and decide what's |
| significant and what's not |
|
|
| align:start position:0% |
| significant and what's not |
| |
|
|
| align:start position:0% |
| significant and what's not |
| there is a |
|
|
| align:start position:0% |
| there is a |
| |
|
|
| align:start position:0% |
| there is a |
| stepwise |
|
|
| align:start position:0% |
| stepwise |
| |
|
|
| align:start position:0% |
| stepwise |
| version of that same process |
|
|
| align:start position:0% |
| version of that same process |
| |
|
|
| align:start position:0% |
| version of that same process |
| where |
|
|
| align:start position:0% |
| where |
| |
|
|
| align:start position:0% |
| where |
| essentially |
|
|
| align:start position:0% |
| essentially |
| |
|
|
| align:start position:0% |
| essentially |
| what we do is one parameter at a time |
|
|
| align:start position:0% |
| what we do is one parameter at a time |
| |
|
|
| align:start position:0% |
| what we do is one parameter at a time |
| add |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| i wonder if i lost my |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| okay can you see can you see it uh just |
|
|
| align:start position:0% |
| okay can you see can you see it uh just |
| |
|
|
| align:start position:0% |
| okay can you see can you see it uh just |
| uh maybe we'll just transmit i'm i'll |
|
|
| align:start position:0% |
| uh maybe we'll just transmit i'm i'll |
| |
|
|
| align:start position:0% |
| uh maybe we'll just transmit i'm i'll |
| i'll try |
|
|
| align:start position:0% |
| i'll try |
| |
|
|
| align:start position:0% |
| i'll try |
| it's not accepting the net meeting |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| yeah it won't look as good but let's |
|
|
| align:start position:0% |
| yeah it won't look as good but let's |
| |
|
|
| align:start position:0% |
| yeah it won't look as good but let's |
| let's at least do that since we only |
|
|
| align:start position:0% |
| let's at least do that since we only |
| |
|
|
| align:start position:0% |
| let's at least do that since we only |
| have a couple more minutes |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| yeah |
|
|
| align:start position:0% |
| yeah |
| |
|
|
| align:start position:0% |
| yeah |
| yeah that's fine |
|
|
| align:start position:0% |
| yeah that's fine |
| |
|
|
| align:start position:0% |
| yeah that's fine |
| so we're just going to project so you |
|
|
| align:start position:0% |
| so we're just going to project so you |
| |
|
|
| align:start position:0% |
| so we're just going to project so you |
| can see see kind of crudely on the |
|
|
| align:start position:0% |
| can see see kind of crudely on the |
| |
|
|
| align:start position:0% |
| can see see kind of crudely on the |
| screen but the basic idea of this |
|
|
| align:start position:0% |
| screen but the basic idea of this |
| |
|
|
| align:start position:0% |
| screen but the basic idea of this |
| stepwise regression is that you can |
|
|
| align:start position:0% |
| stepwise regression is that you can |
| |
|
|
| align:start position:0% |
| stepwise regression is that you can |
| set the significance level for accepting |
|
|
| align:start position:0% |
| set the significance level for accepting |
| |
|
|
| align:start position:0% |
| set the significance level for accepting |
| a model parameter |
|
|
| align:start position:0% |
| a model parameter |
| |
|
|
| align:start position:0% |
| a model parameter |
| and then one step at a time so for |
|
|
| align:start position:0% |
| and then one step at a time so for |
| |
|
|
| align:start position:0% |
| and then one step at a time so for |
| example if i do this step |
|
|
| align:start position:0% |
| example if i do this step |
| |
|
|
| align:start position:0% |
| example if i do this step |
| it's it's pulling in |
|
|
| align:start position:0% |
| it's it's pulling in |
| |
|
|
| align:start position:0% |
| it's it's pulling in |
| additional coefficients that are of |
|
|
| align:start position:0% |
| additional coefficients that are of |
| |
|
|
| align:start position:0% |
| additional coefficients that are of |
| acceptable significance and in fact i |
|
|
| align:start position:0% |
| acceptable significance and in fact i |
| |
|
|
| align:start position:0% |
| acceptable significance and in fact i |
| think the probability to enter it needs |
|
|
| align:start position:0% |
| think the probability to enter it needs |
| |
|
|
| align:start position:0% |
| think the probability to enter it needs |
| to be |
|
|
| align:start position:0% |
| to be |
| |
|
|
| align:start position:0% |
| to be |
| it's set to 0.25 this is 75 confidence |
|
|
| align:start position:0% |
| it's set to 0.25 this is 75 confidence |
| |
|
|
| align:start position:0% |
| it's set to 0.25 this is 75 confidence |
| level needs to be achieved in order to |
|
|
| align:start position:0% |
| level needs to be achieved in order to |
| |
|
|
| align:start position:0% |
| level needs to be achieved in order to |
| accept |
|
|
| align:start position:0% |
| accept |
| |
|
|
| align:start position:0% |
| accept |
| the model and i can keep stepping |
|
|
| align:start position:0% |
| the model and i can keep stepping |
| |
|
|
| align:start position:0% |
| the model and i can keep stepping |
| through and it iteratively is basically |
|
|
| align:start position:0% |
| through and it iteratively is basically |
| |
|
|
| align:start position:0% |
| through and it iteratively is basically |
| making determinations based on |
|
|
| align:start position:0% |
| making determinations based on |
| |
|
|
| align:start position:0% |
| making determinations based on |
| my setting of significance values to |
|
|
| align:start position:0% |
| my setting of significance values to |
| |
|
|
| align:start position:0% |
| my setting of significance values to |
| pull in or discard model terms |
|
|
| align:start position:0% |
| pull in or discard model terms |
| |
|
|
| align:start position:0% |
| pull in or discard model terms |
| and if it discards a model term then it |
|
|
| align:start position:0% |
| and if it discards a model term then it |
| |
|
|
| align:start position:0% |
| and if it discards a model term then it |
| takes those degrees of freedom throws |
|
|
| align:start position:0% |
| takes those degrees of freedom throws |
| |
|
|
| align:start position:0% |
| takes those degrees of freedom throws |
| them back into the error term |
|
|
| align:start position:0% |
| them back into the error term |
| |
|
|
| align:start position:0% |
| them back into the error term |
| not purely as a function of you know the |
|
|
| align:start position:0% |
| not purely as a function of you know the |
| |
|
|
| align:start position:0% |
| not purely as a function of you know the |
| replicate error but it gives it it does |
|
|
| align:start position:0% |
| replicate error but it gives it it does |
| |
|
|
| align:start position:0% |
| replicate error but it gives it it does |
| this kind of stepwise |
|
|
| align:start position:0% |
| this kind of stepwise |
| |
|
|
| align:start position:0% |
| this kind of stepwise |
| multiple regression in order to build |
|
|
| align:start position:0% |
| multiple regression in order to build |
| |
|
|
| align:start position:0% |
| multiple regression in order to build |
| the overall model |
|
|
| align:start position:0% |
| the overall model |
| |
|
|
| align:start position:0% |
| the overall model |
| so here you can see for example for the |
|
|
| align:start position:0% |
| so here you can see for example for the |
| |
|
|
| align:start position:0% |
| so here you can see for example for the |
| this particular output of growth rate |
|
|
| align:start position:0% |
| this particular output of growth rate |
| |
|
|
| align:start position:0% |
| this particular output of growth rate |
| you can see which terms end up being |
|
|
| align:start position:0% |
| you can see which terms end up being |
| |
|
|
| align:start position:0% |
| you can see which terms end up being |
| significant you've got things like |
|
|
| align:start position:0% |
| significant you've got things like |
| |
|
|
| align:start position:0% |
| significant you've got things like |
| temperature squared |
|
|
| align:start position:0% |
| temperature squared |
| |
|
|
| align:start position:0% |
| temperature squared |
| and temperature h2 pressure interactions |
|
|
| align:start position:0% |
| and temperature h2 pressure interactions |
| |
|
|
| align:start position:0% |
| and temperature h2 pressure interactions |
| okay doing that you can then accept one |
|
|
| align:start position:0% |
| okay doing that you can then accept one |
| |
|
|
| align:start position:0% |
| okay doing that you can then accept one |
| of these models and build another column |
|
|
| align:start position:0% |
| of these models and build another column |
| |
|
|
| align:start position:0% |
| of these models and build another column |
| in |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| in jump that is in fact the prediction |
|
|
| align:start position:0% |
| in jump that is in fact the prediction |
| |
|
|
| align:start position:0% |
| in jump that is in fact the prediction |
| formula for one of these parameters so |
|
|
| align:start position:0% |
| formula for one of these parameters so |
| |
|
|
| align:start position:0% |
| formula for one of these parameters so |
| for example this might be the prediction |
|
|
| align:start position:0% |
| for example this might be the prediction |
| |
|
|
| align:start position:0% |
| for example this might be the prediction |
| formula for growth rate it now has that |
|
|
| align:start position:0% |
| formula for growth rate it now has that |
| |
|
|
| align:start position:0% |
| formula for growth rate it now has that |
| polynomial model in it and one of the |
|
|
| align:start position:0% |
| polynomial model in it and one of the |
| |
|
|
| align:start position:0% |
| polynomial model in it and one of the |
| cool things about jump just so that you |
|
|
| align:start position:0% |
| cool things about jump just so that you |
| |
|
|
| align:start position:0% |
| cool things about jump just so that you |
| know it's there and then you can play |
|
|
| align:start position:0% |
| know it's there and then you can play |
| |
|
|
| align:start position:0% |
| know it's there and then you can play |
| with it |
|
|
| align:start position:0% |
| with it |
| |
|
|
| align:start position:0% |
| with it |
| or you can also now start to go in and |
|
|
| align:start position:0% |
| or you can also now start to go in and |
| |
|
|
| align:start position:0% |
| or you can also now start to go in and |
| do things like |
|
|
| align:start position:0% |
| do things like |
| |
|
|
| align:start position:0% |
| do things like |
| profiler or contour profiler for |
|
|
| align:start position:0% |
| profiler or contour profiler for |
| |
|
|
| align:start position:0% |
| profiler or contour profiler for |
| optimization and exploration of that |
|
|
| align:start position:0% |
| optimization and exploration of that |
| |
|
|
| align:start position:0% |
| optimization and exploration of that |
| design space |
|
|
| align:start position:0% |
| design space |
| |
|
|
| align:start position:0% |
| design space |
| so doing a a simple |
|
|
| align:start position:0% |
| so doing a a simple |
| |
|
|
| align:start position:0% |
| so doing a a simple |
| one parameter profiler i might say okay |
|
|
| align:start position:0% |
| one parameter profiler i might say okay |
| |
|
|
| align:start position:0% |
| one parameter profiler i might say okay |
| i want to profile growth rate and row |
|
|
| align:start position:0% |
| i want to profile growth rate and row |
| |
|
|
| align:start position:0% |
| i want to profile growth rate and row |
| i'll just do those two |
|
|
| align:start position:0% |
| i'll just do those two |
| |
|
|
| align:start position:0% |
| i'll just do those two |
| parameters |
|
|
| align:start position:0% |
| parameters |
| |
|
|
| align:start position:0% |
| parameters |
| and what i've got is this prediction |
|
|
| align:start position:0% |
| and what i've got is this prediction |
| |
|
|
| align:start position:0% |
| and what i've got is this prediction |
| profiler that has |
|
|
| align:start position:0% |
| profiler that has |
| |
|
|
| align:start position:0% |
| profiler that has |
| the |
|
|
| align:start position:0% |
| the |
| |
|
|
| align:start position:0% |
| the |
| the two outputs growth rate is the first |
|
|
| align:start position:0% |
| the two outputs growth rate is the first |
| |
|
|
| align:start position:0% |
| the two outputs growth rate is the first |
| row and |
|
|
| align:start position:0% |
| row and |
| |
|
|
| align:start position:0% |
| row and |
| whatever it was |
|
|
| align:start position:0% |
| whatever it was |
| |
|
|
| align:start position:0% |
| whatever it was |
| is it i can't remember what the second |
|
|
| align:start position:0% |
| is it i can't remember what the second |
| |
|
|
| align:start position:0% |
| is it i can't remember what the second |
| one was it's a little hard to see there |
|
|
| align:start position:0% |
| one was it's a little hard to see there |
| |
|
|
| align:start position:0% |
| one was it's a little hard to see there |
| formula row okay so the resistance and |
|
|
| align:start position:0% |
| formula row okay so the resistance and |
| |
|
|
| align:start position:0% |
| formula row okay so the resistance and |
| the growth rate as a function of each of |
|
|
| align:start position:0% |
| the growth rate as a function of each of |
| |
|
|
| align:start position:0% |
| the growth rate as a function of each of |
| the individual parameters so this is the |
|
|
| align:start position:0% |
| the individual parameters so this is the |
| |
|
|
| align:start position:0% |
| the individual parameters so this is the |
| univariate dependence depending on my |
|
|
| align:start position:0% |
| univariate dependence depending on my |
| |
|
|
| align:start position:0% |
| univariate dependence depending on my |
| current operating point |
|
|
| align:start position:0% |
| current operating point |
| |
|
|
| align:start position:0% |
| current operating point |
| and then i can move that operating point |
|
|
| align:start position:0% |
| and then i can move that operating point |
| |
|
|
| align:start position:0% |
| and then i can move that operating point |
| and see how the other parameters |
|
|
| align:start position:0% |
| and see how the other parameters |
| |
|
|
| align:start position:0% |
| and see how the other parameters |
| change |
|
|
| align:start position:0% |
| change |
| |
|
|
| align:start position:0% |
| change |
| so as i change temperature |
|
|
| align:start position:0% |
| so as i change temperature |
| |
|
|
| align:start position:0% |
| so as i change temperature |
| how does that affect my my outputs |
|
|
| align:start position:0% |
| how does that affect my my outputs |
| |
|
|
| align:start position:0% |
| how does that affect my my outputs |
| okay so it's kind of fun you can play |
|
|
| align:start position:0% |
| okay so it's kind of fun you can play |
| |
|
|
| align:start position:0% |
| okay so it's kind of fun you can play |
| around |
|
|
| align:start position:0% |
| around |
| |
|
|
| align:start position:0% |
| around |
| and see how |
|
|
| align:start position:0% |
| and see how |
| |
|
|
| align:start position:0% |
| and see how |
| how those things happen you can also do |
|
|
| align:start position:0% |
| how those things happen you can also do |
| |
|
|
| align:start position:0% |
| how those things happen you can also do |
| essentially close to what they did in |
|
|
| align:start position:0% |
| essentially close to what they did in |
| |
|
|
| align:start position:0% |
| essentially close to what they did in |
| the paper and do contour plot |
|
|
| align:start position:0% |
| the paper and do contour plot |
| |
|
|
| align:start position:0% |
| the paper and do contour plot |
| explorations so i might for example do |
|
|
| align:start position:0% |
| explorations so i might for example do |
| |
|
|
| align:start position:0% |
| explorations so i might for example do |
| those same parameters |
|
|
| align:start position:0% |
| |
| |
|
|
| align:start position:0% |
| |
| yeah that's fine |
|
|
| align:start position:0% |
| yeah that's fine |
| |
|
|
| align:start position:0% |
| yeah that's fine |
| and actually now plot the current |
|
|
| align:start position:0% |
| and actually now plot the current |
| |
|
|
| align:start position:0% |
| and actually now plot the current |
| operating point the response |
|
|
| align:start position:0% |
| operating point the response |
| |
|
|
| align:start position:0% |
| operating point the response |
| of |
|
|
| align:start position:0% |
| of |
| |
|
|
| align:start position:0% |
| of |
| growth rate row |
|
|
| align:start position:0% |
| growth rate row |
| |
|
|
| align:start position:0% |
| growth rate row |
| resistance uniformity |
|
|
| align:start position:0% |
| resistance uniformity |
| |
|
|
| align:start position:0% |
| resistance uniformity |
| in the design space so that i can see |
|
|
| align:start position:0% |
| in the design space so that i can see |
| |
|
|
| align:start position:0% |
| in the design space so that i can see |
| how those things change as i change my |
|
|
| align:start position:0% |
| how those things change as i change my |
| |
|
|
| align:start position:0% |
| how those things change as i change my |
| gap spacing or my temperature and i can |
|
|
| align:start position:0% |
| gap spacing or my temperature and i can |
| |
|
|
| align:start position:0% |
| gap spacing or my temperature and i can |
| also apply things like the limits maybe |
|
|
| align:start position:0% |
| also apply things like the limits maybe |
| |
|
|
| align:start position:0% |
| also apply things like the limits maybe |
| i have a low limit of 500 for the growth |
|
|
| align:start position:0% |
| i have a low limit of 500 for the growth |
| |
|
|
| align:start position:0% |
| i have a low limit of 500 for the growth |
| rate i need again 500 nanometers and |
|
|
| align:start position:0% |
| rate i need again 500 nanometers and |
| |
|
|
| align:start position:0% |
| rate i need again 500 nanometers and |
| what it does is it'll start to shade out |
|
|
| align:start position:0% |
| what it does is it'll start to shade out |
| |
|
|
| align:start position:0% |
| what it does is it'll start to shade out |
| unallowable regions to achieve those |
|
|
| align:start position:0% |
| unallowable regions to achieve those |
| |
|
|
| align:start position:0% |
| unallowable regions to achieve those |
| kinds of goals |
|
|
| align:start position:0% |
| kinds of goals |
| |
|
|
| align:start position:0% |
| kinds of goals |
| so this is just a nice interactive tool |
|
|
| align:start position:0% |
| so this is just a nice interactive tool |
| |
|
|
| align:start position:0% |
| so this is just a nice interactive tool |
| that lets you do that kind of |
|
|
| align:start position:0% |
| that lets you do that kind of |
| |
|
|
| align:start position:0% |
| that lets you do that kind of |
| uh dynamic exploration of the optimism |
|
|
| align:start position:0% |
| uh dynamic exploration of the optimism |
| |
|
|
| align:start position:0% |
| uh dynamic exploration of the optimism |
| of the optimal space |
|
|
| align:start position:0% |
| of the optimal space |
| |
|
|
| align:start position:0% |
| of the optimal space |
| so i'll put the uh put that data uh up |
|
|
| align:start position:0% |
| so i'll put the uh put that data uh up |
| |
|
|
| align:start position:0% |
| so i'll put the uh put that data uh up |
| on the |
|
|
| align:start position:0% |
| on the |
| |
|
|
| align:start position:0% |
| on the |
| the web as well and you can play around |
|
|
| align:start position:0% |
| the web as well and you can play around |
| |
|
|
| align:start position:0% |
| the web as well and you can play around |
| with it but this is uh uh kind of where |
|
|
| align:start position:0% |
| with it but this is uh uh kind of where |
| |
|
|
| align:start position:0% |
| with it but this is uh uh kind of where |
| i'll i'll leave it for you to explore |
|
|
| align:start position:0% |
| i'll i'll leave it for you to explore |
| |
|
|
| align:start position:0% |
| i'll i'll leave it for you to explore |
| more if you want to with jump either on |
|
|
| align:start position:0% |
| more if you want to with jump either on |
| |
|
|
| align:start position:0% |
| more if you want to with jump either on |
| this data or |
|
|
| align:start position:0% |
| this data or |
| |
|
|
| align:start position:0% |
| this data or |
| perhaps more efficiently on your team |
|
|
| align:start position:0% |
| perhaps more efficiently on your team |
| |
|
|
| align:start position:0% |
| perhaps more efficiently on your team |
| project data |
|
|
| align:start position:0% |
| project data |
| |
|
|
| align:start position:0% |
| project data |
| but wanted to get get this case study so |
|
|
| align:start position:0% |
| but wanted to get get this case study so |
| |
|
|
| align:start position:0% |
| but wanted to get get this case study so |
| you know some of the capabilities so i |
|
|
| align:start position:0% |
| you know some of the capabilities so i |
| |
|
|
| align:start position:0% |
| you know some of the capabilities so i |
| think with that i'm going to break |
|
|
| align:start position:0% |
| think with that i'm going to break |
| |
|
|
| align:start position:0% |
| think with that i'm going to break |
| and we can chat a little bit if people |
|
|
| align:start position:0% |
| and we can chat a little bit if people |
| |
|
|
| align:start position:0% |
| and we can chat a little bit if people |
| have questions about team projects and |
|
|
| align:start position:0% |
| have questions about team projects and |
| |
|
|
| align:start position:0% |
| have questions about team projects and |
| and whatnot |
