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| <p><strong>Testing and Characterization of Resonant and Nonlinear MEMS</strong></p> | |
| <p>Kimberly L. Turner, UCSB</p> | |
| <p>This talk will focus on a technique and procedure to quantify the motion of resonant MEMS. This technique uses a laser Doppler vibrometer coupled to an optical microscope to get high accuracy and fast measurements of real-time MEMS. The interface uses LabView, so the testing can be quite sophisticated and automated. In addition, devices can be under controlled pressure and temperature, to get information on how temperature cycling or pressure cycling affects the performance. Such a test setup is invaluable for the study of MEMS reliability, due to the need for repeatable tests in controlled environments. A variety of structures will be used as examples, to show the breadth of the technique.</p> | |
| <p><em>Session 6 -- MEMS Reliability</em></p> | |
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