Pixel-scale NIR-VIS Spectral Routers Based on 2D Mie-type Metagratings
Abstract
A silicon nitride metagrating structure enables efficient spatial separation of near-infrared and visible light at the pixel level, improving imaging performance through multipolar scattering mechanisms.
The out-of-band energy loss caused by in-built color filters significantly degrades the signal-to-noise ratio and the dynamic range of conventional image sensors, which has restricted the attempt to develop ultrahigh-density imaging devices by merely shrinking the pixel size. This issue will be more serious for security cameras which need to collect visible (VIS) light and near-infrared (NIR) photons as well. The existing solutions mostly explore complex photonic nanostructures, which are often too complicated for production. In this work, we demonstrate a pixel-scale spectral router utilizing two-dimensional (2D) Si3N4 Mie scattering metagratings that can spatially divide NIR (850 nm) and VIS (400-700 nm) light to different pixels at high efficiencies. It has a minimum feature size larger than 360 nm, highly promising for massive production. Compared with the traditional filter design, our router can gain about 42% and 30% signal enhancement for NIR and VIS band, respectively. We show that it also has good polarization insensitivity and incident angle tolerance. The NIR-VIS simultaneous imaging is inspected without any complex reconstruction algorithm. Mode analysis indicates that the multipolar scattering of our Mie-type metagratings provides the necessary degrees of freedom to spatially optimize the routing functions for broadband photons.
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