19 GHz Single-Ended-to-Balanced Modified Ladder-Lattice Filters Realized Using Periodically Polarized AlScN BAW Resonators

We present a single-ended to balanced modified ladder-lattice filter topology, realized with periodically polarized piezoelectric (P3F) AlScN resonators, for single-ended to differential filtering applications. This filter topology eliminates the need for baluns or other passive components and can interface, for instance, directly between differential antennas and single-ended power and low noise amplifiers. Two filter designs operating at 19 GHz were implemented. The first design exhibited a minimum insertion loss of 1.3 dB, a 6.26% fractional 3-dB bandwidth, an average out-of-band rejection of 30 dB and occupied a 348 um x 476 um footprint, while the second higher-selectivity filter achieved 1.58 dB of minimum insertion loss, 5.11% fractional 3-dB bandwidth, 33 dB of average out-of-band rejection, and occupied a 392 um x 476 um footprint - Making them highly competitive for wireless communications filters. The working principle of the modified ladder-lattice topology is discussed, the design of the filters are presented, and the linearity of the filters is explored through intermodulation and power handling measurements.