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| <span class="text-blue-600 font-medium">SEMICONDUCTOR MANUFACTURING</span> | |
| <h1 class="text-4xl md:text-5xl font-bold leading-tight mb-6 text-gray-800"> | |
| Class 100 Cleanroom Retrofit Design | |
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| <span>Durham, NC</span> | |
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| <span>Completed 2024</span> | |
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| <h2 class="text-2xl font-bold mb-8 text-center">Key Technical Features</h2> | |
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| <h3 class="text-lg font-bold mb-3">Prime/Project Lead</h3> | |
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| Essential Engineering was responsible for managing our key design partners including the Architect, Structural Engineer and Controls Engineer to deliver a turn-key design to the client. | |
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| <h3 class="text-lg font-bold mb-3">Walkable Ceilings within Existing Facility</h3> | |
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| Coordinated demolition and/or relocation of existing utilities above new designated cleanroom space to incorporate a walkable ceiling with Fan Powered HEPA Filters (FFU) for ease of maintenance and service and to achieve required air changes per hour. | |
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| <h3 class="text-lg font-bold mb-3">Renovation in Existing Facility</h3> | |
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| Renovation of dry laboratory space into a Class 100 cleanroom with wet chemistry fume hoods, Acid Exhaust, Grade I Water, Process Vacuum, Process Gases and Acid and Process Waste Systems. | |
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| <h2 class="text-2xl font-bold mb-6">Project Overview</h2> | |
| <p class="text-gray-600 mb-6"> | |
| Essential Engineering designed the MEP systems for a 5,000 square foot renovation to an existing semiconductor fab. The design required detailed coordination for intgegrating new MEP systems into existing systems while minimizing or eliminating shutdowns that would impact critical operations of adjacent spaces. | |
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| <h3 class="text-xl font-bold mt-8 mb-4">Design Highlights</h3> | |
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| <h4 class="font-bold mb-2">Space Constaints</h4> | |
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| Due to space constraints a new air handling unit to provide the required air changes per hour was not an option. After our on site investigation and finalzing the load calculations Essential Engineering determined an existing make-up air unit had sufficient capacity to provide the required airflow to effecetively pressurize the cleanroom and offset both the sensible and exhaust loads. The required air changes per hour was achieved by utilizing fan powered HEPA units (FFU). The design also included a new humidificaiton system dedicated to the project. | |
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| <h4 class="font-bold mb-2">Cleanroom Systems</h4> | |
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| ISO Class 3 (Class 1) minienvironments with 0.5μm particle control, temperature stability ±0.1°C, and humidity control ±1% RH. | |
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| <h4 class="font-bold mb-2">Engineered Waste Systems</h4> | |
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| Acid and Process Waste Systems | |
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| <h4 class="font-bold mb-2">Specialty Gases</h4> | |
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| Ultra-high purity Nitrogen, Oxygen, Compressed Dry Air, Process Vacuum, Grade I Deionized Water | |
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| <h3 class="text-lg font-bold mb-4">Project Details</h3> | |
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| <h4 class="text-sm font-medium text-gray-500">Client</h4> | |
| <p class="font-medium">Wolfspeed</p> | |
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| <h4 class="text-sm font-medium text-gray-500">Size</h4> | |
| <p class="font-medium">5,000 square foot expansion</p> | |
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| <h4 class="text-sm font-medium text-gray-500">Completion</h4> | |
| <p class="font-medium">2024</p> | |
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| <h4 class="text-sm font-medium text-gray-500">Services</h4> | |
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| <span>Cleanroom Design</span> | |
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| <span>HVAC</span> | |
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| <span>Ultra-High Purity Gas Distribution</span> | |
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| <span>Acid & Process Waste Systems</span> | |
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| <h3 class="text-lg font-bold mb-4 text-blue-600">Environmental Controls</h3> | |
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| <li>ISO Class 3 (Class 1) minienvironments</li> | |
| <li>Temperature control: 22°C ±0.1°C</li> | |
| <li>Humidity control: 45% ±1% RH</li> | |
| <li>Air changes: 250-300 per hour</li> | |
| <li>HEPA filtration: 99.999% at 0.12μm</li> | |
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| <h3 class="text-lg font-bold mb-4 text-blue-600">Utility Systems</h3> | |
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| <li>Ultrapure water: 18.2 MΩ·cm> | |
| <li>Process cooling water: ±0.1°C stability</li> | |
| <li>Bulk gas delivery: 50+ systems</li> | |
| <li>Power quality: <2% voltage variation</li> | |
| <li>Vibration: VC-D criteria for EUV tools</li> | |
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| "Essential Engineering's expertise in semiconductor facility design was critical in achieving our aggressive ramp schedule. Their vibration control solutions allowed us to install EUV tools with no yield-impacting issues." | |
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| <p>Sarah Chen</p> | |
| <p class="text-blue-200">VP of Fab Operations, Client Company</p> | |
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