| import numpy as np |
| import plotly.graph_objects as go |
| import plotly.express as px |
| from plotly.subplots import make_subplots |
| from skimage import measure |
|
|
|
|
| def get_color_gradient(start_hex, end_hex, n): |
| def hex_to_rgb(h): |
| h = h.lstrip('#') |
| return tuple(int(h[i:i+2], 16) for i in (0, 2, 4)) |
|
|
| if n <= 1: |
| return [f'rgb{hex_to_rgb(end_hex)}'] |
|
|
| s, e = hex_to_rgb(start_hex), hex_to_rgb(end_hex) |
| return [ |
| f'rgb({int(s[0] + (e[0]-s[0])*i/(n-1))}, {int(s[1] + (e[1]-s[1])*i/(n-1))}, {int(s[2] + (e[2]-s[2])*i/(n-1))})' |
| for i in range(n) |
| ] |
|
|
|
|
| def plot_focus_exposure(data_list, dose_ary, cmap_idx, **kwargs): |
| dpi = kwargs.get('dpi', 600) |
| fig_w = kwargs.get('fig_width_cm', 5) / 2.54 * dpi |
| fig_h = kwargs.get('fig_height_cm', 1.5) / 2.54 * dpi |
| text_px = int(kwargs.get('text_font_size', 1.5) / 72 * dpi) |
| tick_px = int(kwargs.get('ticklabel_font_size', 2) / 72 * dpi) |
|
|
| show_x_ticks = kwargs.get('show_x_ticks', True) |
| show_x_ticklabels = kwargs.get('show_x_ticklabels', True) |
| show_y_ticks = kwargs.get('show_y_ticks', True) |
| show_y_ticklabels = kwargs.get('show_y_ticklabels', True) |
|
|
| n = len(data_list) |
| fig = make_subplots(rows=1, cols=n, subplot_titles=[title for _, title in data_list]) |
|
|
| target_color = px.colors.qualitative.Plotly[cmap_idx] |
| sorted_doses = sorted(dose_ary) |
| colors = get_color_gradient("#D0D0D0", target_color, len(sorted_doses)) |
| dose_color = {dose: colors[i] for i, dose in enumerate(sorted_doses)} |
|
|
| for col_idx, (data, title) in enumerate(data_list, start=1): |
| for dose in dose_ary: |
| if dose not in data: |
| continue |
| focus_p, cd_p = data[dose] |
| fig.add_trace(go.Scatter( |
| x=focus_p, y=cd_p, mode='lines', |
| name=f'{dose} mJ/cm²', |
| line=dict(color=dose_color[dose], width=4), |
| legendgroup=f'{dose}', showlegend=(col_idx == 1), |
| ), row=1, col=col_idx) |
|
|
| axis_common = dict( |
| showline=True, linecolor='black', mirror=True, linewidth=1, |
| tickfont=dict(size=tick_px, color='black'), |
| ) |
|
|
| for col_idx in range(1, n + 1): |
| s = '' if col_idx == 1 else str(col_idx) |
| fig.update_layout(**{ |
| f'xaxis{s}': dict( |
| **axis_common, |
| title=dict(text=kwargs.get('x_label', 'Focus [nm]')), |
| range=[-160, 160], nticks=5, |
| ticks='inside' if show_x_ticks else '', |
| showticklabels=show_x_ticklabels, |
| ), |
| f'yaxis{s}': dict( |
| **axis_common, |
| title=dict(text=kwargs.get('y_label', 'CD [nm]') if col_idx == 1 else '', standoff=text_px * 0.8), |
| range=[0, 310], |
| ticks='inside' if show_y_ticks else '', |
| showticklabels=show_y_ticklabels if col_idx == 1 else False, |
| ), |
| }) |
|
|
| fig.update_layout( |
| autosize=False, width=int(fig_w), height=int(fig_h), |
| paper_bgcolor='rgba(255,255,255,1)', plot_bgcolor='rgba(255,255,255,1)', |
| font=dict(family='Arial, sans-serif', size=text_px, color='black'), |
| showlegend=kwargs.get('showlegend', False), |
| ) |
| fig.update_annotations(font=dict(family='Arial, sans-serif', size=text_px, color='black')) |
| return fig |
|
|
|
|
| def plot_profiles(bot, top, sem, **kwargs): |
| dpi = kwargs.get('dpi', 600) |
| text_px = int(kwargs.get('text_font_size', 1.5) / 72 * dpi) |
| scale = kwargs.get('scale', 1.5) |
|
|
| dose_ary = kwargs.get('dose_ary', [34, 26, 18]) |
| focus_ary = kwargs.get('focus_ary', [-100 + 20*i for i in range(11)]) |
| ny, nx = kwargs.get('ny', 50), kwargs.get('nx', 35) |
| nc = 512 // 2 - 1 |
|
|
| n_rows, n_cols = len(dose_ary), len(focus_ary) |
| cell_h, cell_w = 2*ny + 1, 2*nx + 1 |
| margin_l = kwargs.get('margin_l', text_px * 10) |
| margin_t = kwargs.get('margin_t', text_px * 4) |
|
|
| to_np = lambda t: t.float().numpy() if hasattr(t, 'numpy') else np.array(t, dtype=float) |
|
|
| fig = make_subplots( |
| rows=n_rows, cols=n_cols, |
| subplot_titles=[f'{focus_ary[c]} nm' if r == 0 else '' for r in range(n_rows) for c in range(n_cols)], |
| horizontal_spacing=0.01, vertical_spacing=0.01, |
| ) |
|
|
| for row_idx, dose in enumerate(dose_ary): |
| for col_idx, focus in enumerate(focus_ary): |
| r, c = row_idx + 1, col_idx + 1 |
| crop = lambda d: to_np(d[dose][focus][nc-ny:nc+ny+1, nc-nx:nc+nx+1]) |
| bot_c, top_c, sem_c = crop(bot), crop(top), crop(sem) |
|
|
| fig.add_trace(go.Heatmap( |
| z=sem_c, colorscale=[[0, 'black'], [1, 'white']], |
| zmin=0, zmax=255, showscale=False, |
| ), row=r, col=c) |
|
|
| for contour in measure.find_contours(bot_c, 0.5): |
| fig.add_trace(go.Scatter( |
| x=contour[:, 1], y=contour[:, 0], mode='lines', |
| line=dict(color='rgba(255,0,0,0.5)', width=4), showlegend=False, |
| ), row=r, col=c) |
|
|
| for contour in measure.find_contours(top_c, 0.5): |
| fig.add_trace(go.Scatter( |
| x=contour[:, 1], y=contour[:, 0], mode='lines', |
| line=dict(color='rgba(0,0,255,0.5)', width=4), showlegend=False, |
| ), row=r, col=c) |
|
|
| for row_idx in range(n_rows): |
| for col_idx in range(n_cols): |
| idx = row_idx * n_cols + col_idx + 1 |
| s = '' if idx == 1 else str(idx) |
| fig.update_layout(**{ |
| f'xaxis{s}': dict(showline=False, showticklabels=False, ticks='', showgrid=False, zeroline=False, range=[-0.5, cell_w - 0.5]), |
| f'yaxis{s}': dict(showline=False, showticklabels=False, ticks='', showgrid=False, zeroline=False, range=[cell_h - 0.5, -0.5]), |
| }) |
|
|
| for row_idx, dose in enumerate(dose_ary): |
| fig.add_annotation( |
| x=0, y=1 - (row_idx + 0.5) / n_rows, |
| xref='paper', yref='paper', |
| xanchor='right', yanchor='middle', xshift=-4, |
| text=f'{dose} mJ/cm²', showarrow=False, |
| ) |
|
|
| fig.update_layout( |
| width=int(n_cols * cell_w * scale + margin_l), |
| height=int(n_rows * cell_h * scale + margin_t), |
| autosize=False, |
| paper_bgcolor='white', plot_bgcolor='white', |
| font=dict(family='Arial, sans-serif', size=text_px, color='black'), |
| title_text='Resist profiles [Red: Bottom, Blue: Top, Background: SEM]', |
| title_x=0.5, showlegend=False, |
| margin=dict(l=margin_l, t=margin_t, r=10, b=10), |
| ) |
| fig.update_annotations(font=dict(family='Arial, sans-serif', size=text_px, color='black')) |
| return fig |
