Datasets:

ClarusC64
/

euv-focus-dose-coherence-landscape-baseline-mapping-v0.1

Error code:   DatasetGenerationCastError
Exception:    DatasetGenerationCastError
Message:      An error occurred while generating the dataset

All the data files must have the same columns, but at some point there are 2 new columns ({'__index_level_0__', 'constraints'})

This happened while the csv dataset builder was generating data using

hf://datasets/ClarusC64/euv-focus-dose-coherence-landscape-baseline-mapping-v0.1/data/test.csv (at revision 75897ee5ebcc4bdf88f9c99553523f666687f3d1), [/tmp/hf-datasets-cache/medium/datasets/36962901116107-config-parquet-and-info-ClarusC64-euv-focus-dose--b05f59ac/hub/datasets--ClarusC64--euv-focus-dose-coherence-landscape-baseline-mapping-v0.1/snapshots/75897ee5ebcc4bdf88f9c99553523f666687f3d1/data/test.csv (origin=hf://datasets/ClarusC64/euv-focus-dose-coherence-landscape-baseline-mapping-v0.1@75897ee5ebcc4bdf88f9c99553523f666687f3d1/data/test.csv)]

Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback:    Traceback (most recent call last):
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
                  writer.write_table(table)
                File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
                  pa_table = table_cast(pa_table, self._schema)
                             ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
                  return cast_table_to_schema(table, schema)
                         ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
                  raise CastError(
              datasets.table.CastError: Couldn't cast
              id: string
              case_title: int64
              focus_offset_nm: double
              dose_offset_pct: double
              focus_dose_coupling_index: double
              epe_p50_nm: double
              epe_p95_nm: double
              epe_sigma_nm: double
              process_window_area_norm: string
              epe_dispersion_index: string
              coherence_surface_score: double
              notes: string
              constraints: string
              __index_level_0__: string
              -- schema metadata --
              pandas: '{"index_columns": ["__index_level_0__"], "column_indexes": [{"na' + 2000
              to
              {'id': Value('string'), 'case_title': Value('string'), 'focus_offset_nm': Value('int64'), 'dose_offset_pct': Value('float64'), 'focus_dose_coupling_index': Value('float64'), 'epe_p50_nm': Value('float64'), 'epe_p95_nm': Value('float64'), 'epe_sigma_nm': Value('float64'), 'process_window_area_norm': Value('float64'), 'epe_dispersion_index': Value('float64'), 'coherence_surface_score': Value('float64'), 'notes': Value('string')}
              because column names don't match
              
              During handling of the above exception, another exception occurred:
              
              Traceback (most recent call last):
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
                  parquet_operations = convert_to_parquet(builder)
                                       ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
                  builder.download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
                  self._download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
                  self._prepare_split(split_generator, **prepare_split_kwargs)
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
                  for job_id, done, content in self._prepare_split_single(
                                               ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
                  raise DatasetGenerationCastError.from_cast_error(
              datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
              
              All the data files must have the same columns, but at some point there are 2 new columns ({'__index_level_0__', 'constraints'})
              
              This happened while the csv dataset builder was generating data using
              
              hf://datasets/ClarusC64/euv-focus-dose-coherence-landscape-baseline-mapping-v0.1/data/test.csv (at revision 75897ee5ebcc4bdf88f9c99553523f666687f3d1), [/tmp/hf-datasets-cache/medium/datasets/36962901116107-config-parquet-and-info-ClarusC64-euv-focus-dose--b05f59ac/hub/datasets--ClarusC64--euv-focus-dose-coherence-landscape-baseline-mapping-v0.1/snapshots/75897ee5ebcc4bdf88f9c99553523f666687f3d1/data/test.csv (origin=hf://datasets/ClarusC64/euv-focus-dose-coherence-landscape-baseline-mapping-v0.1@75897ee5ebcc4bdf88f9c99553523f666687f3d1/data/test.csv)]
              
              Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)

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id string	case_title string	focus_offset_nm int64	dose_offset_pct float64	focus_dose_coupling_index float64	epe_p50_nm float64	epe_p95_nm float64	epe_sigma_nm float64	process_window_area_norm float64	epe_dispersion_index float64	coherence_surface_score float64	notes string
FD-BASE-001	Centered nominal	0	0	0.92	1.8	3.6	0.7	0.95	0.12	0.94	Healthy landscape
FD-BASE-002	Slight focus bias	20	0	0.9	1.9	3.8	0.8	0.92	0.14	0.91	Still stable
FD-BASE-003	Slight dose bias	0	1	0.89	2	4	0.9	0.91	0.15	0.9	Still stable
FD-BASE-004	Coupled offset	20	1	0.86	2.2	4.4	1	0.87	0.18	0.86	Window tightening
FD-BASE-005	Focus drift	40	0	0.82	2.4	4.9	1.2	0.82	0.22	0.82	More EPE spread
FD-BASE-006	Dose drift	0	2	0.8	2.5	5.1	1.3	0.8	0.24	0.8	More tails
FD-BASE-007	Landscape warping	40	2	0.74	2.9	6	1.6	0.72	0.32	0.73	Process window shrinks
FD-BASE-008	Near spec edge	60	2.5	0.66	3.3	7.2	2	0.6	0.44	0.64	Edge placement tails
FD-BASE-009	Severe shrink	80	3	0.54	3.9	8.8	2.5	0.44	0.58	0.52	Unstable
FD-BASE-010	Collapse zone	100	3.5	0.4	4.6	10.5	3.1	0.3	0.72	0.38	Window collapsing

What this dataset tests

The baseline focus–dose coherence landscape.

It links:

focus offset
dose offset
focus–dose coupling stability

to:

edge placement error distribution across wafer
process window area shrink

Task

Predict:

coherence_surface_score

0..1

Higher means a wide, stable process window.

Lower means landscape degradation and hidden window collapse.

Inputs

focus_offset_nm
dose_offset_pct
focus_dose_coupling_index

epe_p50_nm
epe_p95_nm
epe_sigma_nm

process_window_area_norm
epe_dispersion_index

Output format

Return one float.

Example 0.82

Evaluation

Absolute error scoring when ground truth exists.
Format validity scoring when ground truth is absent.

Version

v0.1

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Total file size:

6.13 kB