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The dataset generation failed because of a cast error
Error code: DatasetGenerationCastError
Exception: DatasetGenerationCastError
Message: An error occurred while generating the dataset
All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
This happened while the csv dataset builder was generating data using
hf://datasets/ClarusC64/euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1/data/test.csv (at revision 7b09ff2a93d291e0ee6c960114984ebef145ce06), [/tmp/hf-datasets-cache/medium/datasets/59392624391241-config-parquet-and-info-ClarusC64-euv-projection--3c6243bc/hub/datasets--ClarusC64--euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1/snapshots/7b09ff2a93d291e0ee6c960114984ebef145ce06/data/test.csv (origin=hf://datasets/ClarusC64/euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1@7b09ff2a93d291e0ee6c960114984ebef145ce06/data/test.csv)]
Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback: Traceback (most recent call last):
File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
writer.write_table(table)
File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
pa_table = table_cast(pa_table, self._schema)
^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
return cast_table_to_schema(table, schema)
^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
raise CastError(
datasets.table.CastError: Couldn't cast
id: string
case_title: string
thermal_mode1_nm: double
thermal_mode2_nm: double
thermal_mode3_nm: double
overlay_error_nm: double
overlay_within_spec: int64
baseline_coherence: double
overlay_drift_score: double
drift_flag: double
dominant_cause_axis: double
notes: string
constraints: string
-- schema metadata --
pandas: '{"index_columns": [{"kind": "range", "name": null, "start": 0, "' + 1918
to
{'id': Value('string'), 'case_title': Value('string'), 'thermal_mode1_nm': Value('float64'), 'thermal_mode2_nm': Value('float64'), 'thermal_mode3_nm': Value('float64'), 'overlay_error_nm': Value('float64'), 'overlay_within_spec': Value('int64'), 'baseline_coherence': Value('float64'), 'overlay_drift_score': Value('float64'), 'drift_flag': Value('int64'), 'dominant_cause_axis': Value('string'), 'notes': Value('string')}
because column names don't match
During handling of the above exception, another exception occurred:
Traceback (most recent call last):
File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
parquet_operations = convert_to_parquet(builder)
^^^^^^^^^^^^^^^^^^^^^^^^^^^
File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
builder.download_and_prepare(
File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
self._download_and_prepare(
File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
self._prepare_split(split_generator, **prepare_split_kwargs)
File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
for job_id, done, content in self._prepare_split_single(
^^^^^^^^^^^^^^^^^^^^^^^^^^^
File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
raise DatasetGenerationCastError.from_cast_error(
datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
This happened while the csv dataset builder was generating data using
hf://datasets/ClarusC64/euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1/data/test.csv (at revision 7b09ff2a93d291e0ee6c960114984ebef145ce06), [/tmp/hf-datasets-cache/medium/datasets/59392624391241-config-parquet-and-info-ClarusC64-euv-projection--3c6243bc/hub/datasets--ClarusC64--euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1/snapshots/7b09ff2a93d291e0ee6c960114984ebef145ce06/data/test.csv (origin=hf://datasets/ClarusC64/euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1@7b09ff2a93d291e0ee6c960114984ebef145ce06/data/test.csv)]
Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)Need help to make the dataset viewer work? Make sure to review how to configure the dataset viewer, and open a discussion for direct support.
id string | case_title string | thermal_mode1_nm float64 | thermal_mode2_nm float64 | thermal_mode3_nm float64 | overlay_error_nm float64 | overlay_within_spec int64 | baseline_coherence float64 | overlay_drift_score float64 | drift_flag int64 | dominant_cause_axis string | notes string |
|---|---|---|---|---|---|---|---|---|---|---|---|
EUV-POD-001 | Nominal overlay | 0.9 | 0.6 | 0.4 | 1.4 | 1 | 0.95 | 0.04 | 0 | none | Stable overlay |
EUV-POD-002 | Minor overlay creep | 1.4 | 0.9 | 0.6 | 2.1 | 1 | 0.92 | 0.09 | 0 | thermal | Small drift |
EUV-POD-003 | Moderate deformation | 2 | 1.3 | 0.9 | 3.2 | 1 | 0.89 | 0.16 | 0 | thermal | Monitor |
EUV-POD-004 | Overlay coupling noise | 2.5 | 1.8 | 1.2 | 4.6 | 1 | 0.84 | 0.25 | 1 | metrology | Drift onset |
EUV-POD-005 | Cooling imbalance | 3.1 | 2.2 | 1.5 | 6.1 | 1 | 0.79 | 0.34 | 1 | cooling | Coupling weakening |
EUV-POD-006 | Mount sensitivity | 3.7 | 2.8 | 1.9 | 7.9 | 0 | 0.73 | 0.46 | 1 | mount | Spec breached |
EUV-POD-007 | Contamination heat load | 4.4 | 3.5 | 2.4 | 9.6 | 0 | 0.66 | 0.58 | 1 | contamination | Nonlinear drift |
EUV-POD-008 | Severe overlay drift | 5.2 | 4.2 | 3 | 12.5 | 0 | 0.58 | 0.71 | 1 | cooling | Escalating |
EUV-POD-009 | Metrology mismatch severe | 5.9 | 4.8 | 3.5 | 14.8 | 0 | 0.51 | 0.83 | 1 | metrology | Overlay model failing |
EUV-POD-010 | Pre-failure overlay | 6.6 | 5.4 | 4 | 17.2 | 0 | 0.44 | 0.92 | 1 | thermal | Failure imminent |
What this dataset tests
When thermo-mechanical deformation stops predicting overlay error cleanly.
This is the second layer of projection optics thermo-mechanical decoupling:
deformation modes
overlay error growth
cause-axis attribution
Task
Given deformation modes and overlay state, predict:
overlay_drift_score (0..1)
drift_flag (0/1)
dominant_cause_axis
Output format: float,int,string
Example: 0.58,1,cooling
Fields
Inputs
- thermal_mode1_nm
- thermal_mode2_nm
- thermal_mode3_nm
- overlay_error_nm
- overlay_within_spec
- baseline_coherence
Targets
- overlay_drift_score
- drift_flag
- dominant_cause_axis
Cause axis meanings
thermal: global heating trend
cooling: flow imbalance or coolant loss
mount: clamp or support drift
metrology: measurement/model mismatch
contamination: absorbed power rise from fouling
none: stable regime
Evaluation
Absolute error for drift score
Bonus for correct drift flag
Bonus for correct cause axis
Version
v0.1
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