Datasets:

ClarusC64
/

euv-stage-reticle-wafer-sync-coherence-baseline-mapping-v0.1

Error code:   DatasetGenerationCastError
Exception:    DatasetGenerationCastError
Message:      An error occurred while generating the dataset

All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})

This happened while the csv dataset builder was generating data using

hf://datasets/ClarusC64/euv-stage-reticle-wafer-sync-coherence-baseline-mapping-v0.1/data/test.csv (at revision e24a9ba6efe1e712f230a08709a9de99d5ced444), [/tmp/hf-datasets-cache/medium/datasets/54963220733582-config-parquet-and-info-ClarusC64-euv-stage-retic-7da88057/hub/datasets--ClarusC64--euv-stage-reticle-wafer-sync-coherence-baseline-mapping-v0.1/snapshots/e24a9ba6efe1e712f230a08709a9de99d5ced444/data/test.csv (origin=hf://datasets/ClarusC64/euv-stage-reticle-wafer-sync-coherence-baseline-mapping-v0.1@e24a9ba6efe1e712f230a08709a9de99d5ced444/data/test.csv)]

Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback:    Traceback (most recent call last):
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
                  writer.write_table(table)
                File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
                  pa_table = table_cast(pa_table, self._schema)
                             ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
                  return cast_table_to_schema(table, schema)
                         ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
                  raise CastError(
              datasets.table.CastError: Couldn't cast
              id: string
              case_title: string
              reticle_pos_error_nm: double
              wafer_pos_error_nm: double
              residual_sync_error_nm: double
              phase_lag_ms: double
              scan_velocity_mms: int64
              scan_accel_mms2: int64
              control_loop_latency_ms: double
              euv_pulse_timing_jitter_ns: int64
              sync_coherence_score: double
              notes: string
              constraints: string
              -- schema metadata --
              pandas: '{"index_columns": [{"kind": "range", "name": null, "start": 0, "' + 1958
              to
              {'id': Value('string'), 'case_title': Value('string'), 'reticle_pos_error_nm': Value('float64'), 'wafer_pos_error_nm': Value('float64'), 'residual_sync_error_nm': Value('float64'), 'phase_lag_ms': Value('float64'), 'scan_velocity_mms': Value('int64'), 'scan_accel_mms2': Value('int64'), 'control_loop_latency_ms': Value('float64'), 'euv_pulse_timing_jitter_ns': Value('int64'), 'sync_coherence_score': Value('float64'), 'notes': Value('string')}
              because column names don't match
              
              During handling of the above exception, another exception occurred:
              
              Traceback (most recent call last):
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
                  parquet_operations = convert_to_parquet(builder)
                                       ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
                  builder.download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
                  self._download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
                  self._prepare_split(split_generator, **prepare_split_kwargs)
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
                  for job_id, done, content in self._prepare_split_single(
                                               ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
                  raise DatasetGenerationCastError.from_cast_error(
              datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
              
              All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
              
              This happened while the csv dataset builder was generating data using
              
              hf://datasets/ClarusC64/euv-stage-reticle-wafer-sync-coherence-baseline-mapping-v0.1/data/test.csv (at revision e24a9ba6efe1e712f230a08709a9de99d5ced444), [/tmp/hf-datasets-cache/medium/datasets/54963220733582-config-parquet-and-info-ClarusC64-euv-stage-retic-7da88057/hub/datasets--ClarusC64--euv-stage-reticle-wafer-sync-coherence-baseline-mapping-v0.1/snapshots/e24a9ba6efe1e712f230a08709a9de99d5ced444/data/test.csv (origin=hf://datasets/ClarusC64/euv-stage-reticle-wafer-sync-coherence-baseline-mapping-v0.1@e24a9ba6efe1e712f230a08709a9de99d5ced444/data/test.csv)]
              
              Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)

Need help to make the dataset viewer work? Make sure to review how to configure the dataset viewer, and open a discussion for direct support.

id string	case_title string	reticle_pos_error_nm float64	wafer_pos_error_nm float64	residual_sync_error_nm float64	phase_lag_ms float64	scan_velocity_mms int64	scan_accel_mms2 int64	control_loop_latency_ms float64	euv_pulse_timing_jitter_ns int64	sync_coherence_score float64	notes string
EUV-SYNC-001	Nominal low speed	0.9	1.1	0.6	0.15	420	1,800	1.2	22	0.96	Tight sync
EUV-SYNC-002	Nominal mid speed	1.1	1.3	0.8	0.18	520	2,100	1.2	24	0.94	Stable
EUV-SYNC-003	High speed stable	1.3	1.5	1	0.22	610	2,400	1.3	26	0.92	Within spec
EUV-SYNC-004	Jitter mild rise	1.4	1.7	1.3	0.27	620	2,500	1.3	32	0.88	Jitter coupling begins
EUV-SYNC-005	Latency creep	1.6	1.9	1.7	0.34	630	2,550	1.5	33	0.84	Latency drift
EUV-SYNC-006	Servo loosen	1.9	2.2	2.2	0.41	640	2,600	1.6	36	0.79	Residual grows
EUV-SYNC-007	Vibration coupling	2.3	2.6	2.9	0.5	650	2,650	1.6	40	0.72	Phase lag widening
EUV-SYNC-008	Near instability	2.8	3.1	3.7	0.62	660	2,700	1.8	45	0.63	Sync manifold loosens
EUV-SYNC-009	Pre-halt zone	3.4	3.8	4.6	0.76	670	2,750	2	52	0.52	High risk
EUV-SYNC-010	Sync baseline edge	4.1	4.6	5.8	0.92	680	2,800	2.2	60	0.4	Failure near

What this dataset tests

Baseline coupling between:

reticle stage position error
wafer stage position error
exposure timing jitter
control loop latency

The goal is to quantify sync coherence during scanning exposure.

Task

Predict:

sync_coherence_score

A scalar 0..1.

Higher means tight timing and low residual sync error.

Inputs

reticle_pos_error_nm
wafer_pos_error_nm
scan_velocity_mms
scan_accel_mms2
control_loop_latency_ms
euv_pulse_timing_jitter_ns

Context outputs

residual_sync_error_nm
phase_lag_ms

Target

sync_coherence_score

Output format

Return a single float.

Example: 0.84

Evaluation

Absolute error scoring when ground truth exists.
Format validity scoring when ground truth is absent.

Version

v0.1

Downloads last month: 8

Total file size:

6.21 kB