Datasets:

ClarusC64
/

euv-stochastic-source-resist-coherence-baseline-mapping-v0.1

Error code:   DatasetGenerationCastError
Exception:    DatasetGenerationCastError
Message:      An error occurred while generating the dataset

All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})

This happened while the csv dataset builder was generating data using

hf://datasets/ClarusC64/euv-stochastic-source-resist-coherence-baseline-mapping-v0.1/data/test.csv (at revision baeddc0a5c3ddf8a4047cabc1fcfc548f6dca795), [/tmp/hf-datasets-cache/medium/datasets/95904730762704-config-parquet-and-info-ClarusC64-euv-stochastic--d4ce4926/hub/datasets--ClarusC64--euv-stochastic-source-resist-coherence-baseline-mapping-v0.1/snapshots/baeddc0a5c3ddf8a4047cabc1fcfc548f6dca795/data/test.csv (origin=hf://datasets/ClarusC64/euv-stochastic-source-resist-coherence-baseline-mapping-v0.1@baeddc0a5c3ddf8a4047cabc1fcfc548f6dca795/data/test.csv)]

Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback:    Traceback (most recent call last):
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
                  writer.write_table(table)
                File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
                  pa_table = table_cast(pa_table, self._schema)
                             ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
                  return cast_table_to_schema(table, schema)
                         ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
                  raise CastError(
              datasets.table.CastError: Couldn't cast
              id: string
              case_title: string
              photon_flux_mean_w: int64
              photon_flux_cv: double
              source_pulse_energy_cv: double
              resist_sensitivity_mj_cm2: int64
              acid_diffusion_length_nm: int64
              blur_length_nm: int64
              ler_sigma_nm: double
              stochastic_defect_rate_ppm: double
              coherence_score: string
              stochastic_risk_band: double
              notes: string
              constraints: string
              -- schema metadata --
              pandas: '{"index_columns": [{"kind": "range", "name": null, "start": 0, "' + 2088
              to
              {'id': Value('string'), 'case_title': Value('string'), 'photon_flux_mean_w': Value('int64'), 'photon_flux_cv': Value('float64'), 'source_pulse_energy_cv': Value('float64'), 'resist_sensitivity_mj_cm2': Value('int64'), 'acid_diffusion_length_nm': Value('int64'), 'blur_length_nm': Value('int64'), 'ler_sigma_nm': Value('float64'), 'stochastic_defect_rate_ppm': Value('int64'), 'coherence_score': Value('float64'), 'stochastic_risk_band': Value('string'), 'notes': Value('string')}
              because column names don't match
              
              During handling of the above exception, another exception occurred:
              
              Traceback (most recent call last):
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
                  parquet_operations = convert_to_parquet(builder)
                                       ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
                  builder.download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
                  self._download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
                  self._prepare_split(split_generator, **prepare_split_kwargs)
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
                  for job_id, done, content in self._prepare_split_single(
                                               ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
                  raise DatasetGenerationCastError.from_cast_error(
              datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
              
              All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
              
              This happened while the csv dataset builder was generating data using
              
              hf://datasets/ClarusC64/euv-stochastic-source-resist-coherence-baseline-mapping-v0.1/data/test.csv (at revision baeddc0a5c3ddf8a4047cabc1fcfc548f6dca795), [/tmp/hf-datasets-cache/medium/datasets/95904730762704-config-parquet-and-info-ClarusC64-euv-stochastic--d4ce4926/hub/datasets--ClarusC64--euv-stochastic-source-resist-coherence-baseline-mapping-v0.1/snapshots/baeddc0a5c3ddf8a4047cabc1fcfc548f6dca795/data/test.csv (origin=hf://datasets/ClarusC64/euv-stochastic-source-resist-coherence-baseline-mapping-v0.1@baeddc0a5c3ddf8a4047cabc1fcfc548f6dca795/data/test.csv)]
              
              Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)

Need help to make the dataset viewer work? Make sure to review how to configure the dataset viewer, and open a discussion for direct support.

id string	case_title string	photon_flux_mean_w int64	photon_flux_cv float64	source_pulse_energy_cv float64	resist_sensitivity_mj_cm2 int64	acid_diffusion_length_nm int64	blur_length_nm int64	ler_sigma_nm float64	stochastic_defect_rate_ppm int64	coherence_score float64	stochastic_risk_band string	notes string
SSR-001	Healthy baseline	250	0.012	0.01	22	12	8	1.8	2	0.95	low	Stable coupling
SSR-002	Healthy high power	280	0.013	0.011	22	12	8	1.9	3	0.94	low	Still coherent
SSR-003	Slight photon noise	250	0.02	0.016	22	12	8	2.1	6	0.9	low	Noise rising
SSR-004	Slight resist drift	250	0.012	0.01	24	13	9	2.3	8	0.88	low	Sensitivity drift
SSR-005	Coupling softening	250	0.022	0.018	24	13	10	2.6	14	0.82	medium	Tails growing
SSR-006	Resist blur increase	250	0.018	0.015	26	14	11	2.9	22	0.74	medium	Blur dominates
SSR-007	Source jitter increase	250	0.03	0.026	22	12	9	2.7	26	0.7	medium	Jitter dominates
SSR-008	Emergent stochasticity	250	0.034	0.03	26	14	12	3.4	45	0.58	high	Nonlinear defect rise
SSR-009	High defect regime	250	0.04	0.034	28	15	13	4	70	0.46	high	Yield risk
SSR-010	Collapse edge	250	0.048	0.04	30	16	14	4.8	110	0.3	high	Near failure

What this dataset tests

Stochastic defect emergence is not random.

It rises when coherence decays between:

photon noise
pulse stability
resist chemistry response
line edge roughness
defect rate

This dataset maps the healthy coupling first.

Task

Predict:

coherence_score 0..1
risk_band low or medium or high

Return JSON

{"coherence_score":0.74,"risk_band":"medium"}

Inputs

photon_flux_mean_w
photon_flux_cv
source_pulse_energy_cv

resist_sensitivity_mj_cm2
acid_diffusion_length_nm
blur_length_nm

ler_sigma_nm
stochastic_defect_rate_ppm

Why it matters

Stochastic failures kill yield quietly.

They appear as rare bridges and missing contacts.

By the time yield alarms trigger, the window is gone.

Version

v0.1

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