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Supporting Information

Tuning Electrical and Thermal Transport in AlGaN/GaN Heterostructures via Buffer Layer Engineering

Ananth Saran Yalamarthy¹, Hongyun So²*, Miguel Muñoz Rojo³, Ateeq J. Suria¹, Xiaoqing Xu⁴, Eric Pop³,⁵,⁶, and Debbie G. Senesky³,⁶,⁷*

¹Department of Mechanical Engineering, Stanford University, Stanford, CA 94305, USA.

²Department of Mechanical Engineering, Hanyang University, Seoul 04763, South Korea.

³Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA.

⁴Stanford Nanofabrication Facility, Stanford University, Stanford, CA 94305, USA.

⁵Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305, USA.

⁶Precourt Institute for Energy, Stanford University, Stanford, CA 94305, USA.

⁷Department of Aeronautics and Astronautics, Stanford University, Stanford, CA 94305, USA.

*E-mail: Hongyun So (hyso@hanyang.ac.kr), Debbie G. Senesky (dsenesky@stanford.edu)

Table of Contents:

Supplementary Note 1: Fabrication Process

Supplementary Note 2: Test Setup and Calibration

Supplementary Note 3: Finite-Element Model, Measurement Process and Error Correction

Supplementary Note 4: Schrödinger-Poisson Model Notes and Validation

Supplementary Note 5: Circular Transfer Length Method (CTLM)