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Tensor algebra tutorial, grouping calculator, new york state math testing program book 2 grade 6 march 6 -12 2008, free algebra worksheets on radical functions, what are the common factors of 14 and 26, nth term lessons with free printables. Equations involving fractions and variables, write a program to find the lcm of more than two numbera in c, learn how to write a mixed number in decimal form, percent proportion worksheet, prentice hall worksheets, simulate this system ode45, aptitude test questions. Multiplying rational numbers +worsheets, square root and exponents, the graphic program to show the temperature changes before and after reaction, multiply radical calculator, complex number root calculator, aptitude questions answers download In pdf, the effectiveness of management training programs and optimality rule. Matrix equation quadratic, what is a linear combination and how do you use it, maths formulas of meter square, addition on radical expressions, pre-algebra worksheets,combinations, quadratic formula game. Free geometry answers problem solver, Free Algebra Test, fundamentals of college algebra, everyday problem for polynomial, How is dividing a polynomial by a binomial similar to or different from the long division you learned in elementary school?, jacob's algebra review, help with algebraic formulas. Basic concept of algebra, WHY CLEAR decimals WHEN DOING AN EQUATION, certification answers for college algebra, how to work out equations, easy way to learn college algebra, algebra graphing linear equations. Learn how to do algebra problems, i need help on a math problem and need to do it online for free, math tutoring massachusetts, what is trinomial square?, algebra homework solver, pre algebra with pizzazz page 210. Algebra answer, factorising algebraic expressions, manual TI85, practice problems for clep college algebra, What would the algebraic answers look like? Can we tell which type of answer we have, even without putting the answers on the graph?. Compound inequalities, is there a zoom math program for the ti89, online synthetic division calculator, Algebra worksheet packets, prentice hall algebra 1 workbook, simplifying rational expressions when I will use this in real life. How do i use the distributive property to solve a 2 step equation, best way to learn algebra, algebra calculator, interval notation calculator, solving equations with exponents calculator, algerba 2 worksheets glencoe. Calucator for Least common multiple of two monomials, convert decimal into radical form, common multiple formula, how do convert decimal measurements to a mixed number, ti 83 karnaugh, equations with percent, how to do algebra problems. 11 year physics lessons and problems with problem set in ppts, how do you do fractions, asset exam sample papers for 7th(maths), alegebra problems, nonlinear system equation matlab, how to take cube root on a TI-83 calculator. How to solve polynomial function with rational coefficients in standard form with the given zeros, free worksheets, adding positives and negatives, deination of math trivia, kumon I 1-I 5 answer book, example of math trivia problem solving. how do you solve subtracting mixed numbers problems with diffrent denominator? Algebra Hungerford Solutions+homework non homogeneous second order ODE example online equation solver 3 simultaneous equations solver 4 unknowns "how to do an error analysis" using linear equations and graphs to solve real world problems find roots symbolic function maple properties of math worksheets algebra problems with answer key Solve the system of equations using the addition (elimination) method. If the answer is a unique solution, present it as an ordered pair: (x, y). If not, specify whether the answer is "no solution" or "infinitely many solutions." 4x – 3y = 1 -12x + 9y = 5
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PDF (Acrobat) Document File Be sure that you have an application to open this file type before downloading and/or purchasing. 0.23 MB | 4 pages PRODUCT DESCRIPTION I designed these lessons to teach my students about geometric figures (the 5th in a series of 9). This lesson can be purchased as a complete bundled unit at a discounted price under the listing Features of Functions Complete Bundled Unit. This lesson focuses on: given a graph of a function--finding where x and y equal specific numbers, given an arithmetic or geometric story problem--finding the rate of change, an explicit and recursive equation and telling what the input and output would mean, interpreting discrete and continuous functions from graphs
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Intro to Fourier series and how to calculate them Published on 06 Oct 2010 | over 6 years ago Download the free PDF from tinyurl.com/EngMathYT This is a basic introduction to Fourier series and how to calculate them. An example is presented that illustrates the computations involved. Such ideas are seen in university mathematics.
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Advanced Mathematics Suite, or AMS for short, is a program which makes up for where TI left off when they developed the TI-83 Plus graphing calculator. It includes various useful utilities for work with Algebra I, II, Geometry, and other subjectsThis project is an easy to use Java application framework, providing enough functionalities to be fully usable. It has been developed for a scientific articles library software, but I hope it's sufficiently generic to be usable on different contexts
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... Show More mathematical models with user-friendly interactive computer programs, written in the powerful and popular MATLAB. This unique merger of technical referencing and interactive computing allows instant solution of a variety of engineering problems, and in-depth exploration of the physics of deformation, stress and motion by analysis, simulation, graphics, and animation. This book is ideal for both professionals and students dealing with aerospace, mechanical, and civil engineering, as well as naval architecture, biomechanics, robotics, and mechtronics. For engineers and specialists, the book is a valuable resource and handy design tool in research and development. For engineering students at both undergraduate and graduate levels, the book serves as a useful study guide and powerful learning aid in many courses. And for instructors, the book offers an easy and efficient approach to curriculum development and teaching innovation. * Combines knowledge of solid mechanics--including both statics and dynamics, with relevant mathematical physics and offers a viable solution scheme. * Will help the reader better integrate and understand the physical principles of classical mechanics, the applied mathematics of solid mechanics, and computer methods. * The Matlab programs will allow professional engineers to develop a wider range of complex engineering analytical problems, using closed- solution methods to test against numerical and other open-ended methods. * Allows for solution of higher order problems at earlier engineering level than traditional textbook approaches
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They start with real numbers and their basic properties, then turn to equations and inequalities, graphing and solving systems of equations and inequalities, polynomials, factoring polynomials, proportions and rational expressions, writing equations of lines along with functions and variations, radicals and rational exponents, quadratic functions, inequalities, algebra of functions, exponential and logarithmic functions, conic sections and a set of miscellaneous topics such as geometric sequences
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Resource Added! Type: Interactive, Graphic Organizer/Worksheet Description:This lesson should take one day of class time. The purpose of this lesson is to develop an understanding of quadratic functions. We use the linear relation between distance, constant speed and time and the quadratic relation between the vertical distance of a falling object and time. From these, students will develop two new quadratic functions. The graph of one of these provides a picture of the physical phenomenon they have viewed. Hands-on activity. The purpose is to help students learn to use variables and to write equations to model a problem situation. Helps students learn how to work simple "word problems" by actually doing what is said. A hands-on activity to help students understand four basic binary operations in algebraic expressions, solving linear equations in 1 variable, and solving a formula for an indicated variable, using value of collections of coins. The second part of the Money Investigation activities. A hands-on activity to help students understand four basic binary operations in algebraic expressions, solving linear equations in 1 variable, and solving a formula for an indicated variable, using value of collections of coins. This investigation of the genetics of the Sickle Cell trait via a mathematical model uses probability and teaches properties of quadratic functions and the concept of optimization of a function. The properties of quadratic functions brought out by this investigation are The functions that model the process of the elimination of alcohol from the body serve as an introduction to a study of rational functions at an intermediate algebra level. The lesson focuses on graphs of the functions with an emphasis on interpretation of the horizontal and vertical asymptotes in the context of elimination of alcohol from the body. Other mathematics involved is algebraic manipulation of the rational functions, solution of equations with rational expressions, realistic domain of a function, inverse functions, and equilibrium state of a dynamic process. "Reading This Could Help You Sleep: Caffeine in Your Body" is an introduction to exponential functions of the form ab^t at the Intermediate Algebra level, with emphasis on the meaning of these functions and their graphs. The concept of half-life is introduced. A conditional function (a piecewise-defined function) is used. "Get the Lead Out" extends the study of exponential functions and can be used to introduce the use of logarithms to "un-do" exponential expressions in solving equations.2 days. Hands-on activity using the actual path of light through your container of water. Students compute the speed of light in water and develop an understanding of why light reflects back if below a critical angle. It provides an opportunity to build a fairly complicated function from simpler ones in a physical setting, and then investigate the function to learn something about the real world. It involves investigation of function with a parameter. This unit is appropriate for a precalculus course in a unit on functions or or in a unit on functions involving radicals. It has also been used in elementary calculus courses as a conceptual introduction to optimization. 2 days. Hands-on simulation activity. Used to introduce solving linear systems of 2 equations in two unknowns, with follow-up involving 3 equations and 3 unkowns. This unit studies interconversion of two drugs in the blood, that is, the case where the body metabolizes each of two drugs into the other, which is what happens for vitamin K and another chemical. This requires one day, with homework given. On the following day, you discuss solving systems of equations and can use a second set of homework that comes with this unit. The second set of homework studies drugs which are absorbed into different compartments of the body, such as vitamin A which is in the blood and in the liver. Intermediate algebra or precalculus.
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took Linear Algebra at M.I.T. The book was Gilbert Strang's "Linear Algebra and Its Applications." As a mathematician, once you learn linear algebra, you never stop using it. However, for the finer points, I have ready access to the book as a reference
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Fractions, Decimals, and Percents GMAT Strategy GuideMore... The practice implementing strategic shortcuts. Each chapter builds comprehensive content understanding by providing rules, strategies, and in-depth examples of how the GMAT tests a given topic and how you can respond accurately and quickly. The Guide contains #x1C;In-Action#x1D; problems of increasing difficulty with detailed answer explanations. The content of the book is aligned to the latest Official Guides from GMAC (12th edition). Purchase of this book includes one year of access to Manhattan GMAT#x19;s online practice exams and Fractions, Decimals, & Percents question bank
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PDF (Acrobat) Document File Be sure that you have an application to open this file type before downloading and/or purchasing. 7.97 MB PRODUCT DESCRIPTION This is two 8th Grade Common Core guided, color-coded notebook pages for the Interactive Math Notebook on Special Types of Solutions to Systems of Equations. Included is a graphic organizer with the special types of solutions, examples of each graphically and algebraically and hints for each type of solution. (One solution, No Solution and Infinite Many Solutions) And explicit notes on determining the type of solution using the elimination method. Blackline master and color-coded answer key included. ** My Interactive Note Pages include all or some of the following: step by step color-coded notes, diagrams, academic vocabulary, graphic organizers and example problems. My Interactive Note Pages were designed to use in my IMN. The students keep the color-coded notes in a 3-pronged folder, and the notes are set up to print back to back
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Powers, Roots and Absolutes! 40 Downloads PDF (Acrobat) Document File Be sure that you have an application to open this file type before downloading and/or purchasing. 0.58 MB | 4 pages PRODUCT DESCRIPTION This worksheet reviews powers, roots and absolute values. I like to combine these and discuss grouping symbols prior to order of operations. This challenging worksheet includes negatives inside and outside of grouping symbols. Also included are practice problems for comparing values, encouraging students to work on their estimation skills. I don't allow students to use a calculator. Appropriate for introduction in Pre-Algebra, Algebra, and review for Algebra 2
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Secondary Calculus Secondary calculus is the result of a natural evolution of the classical geometrical theory of partial differential equations (PDE) originated by Sophus Lie. In particular, it allows the construction of a general theory of PDE, in the same manner as algebraic geometry does with respect to algebraic equations. There are strong indications that secondary calculus may become a natural language for quantum field theory, just in the same way as standard calculus is for classical physics. From the mathematical point of view, secondary calculus is a complex mathematical construction putting into a natural interrelation many parts of modern mathematics such as commutative and homological algebra, algebraic and differential topology, differential geometry, etc. The strategic goal of the Diffiety Schools to involve interested participants into a series of large scale research programs the Levi-Civita Institute is launching. Initial ideas of the area can be got from the books. Advance topics can be found in the various papers.
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new edition of the precalculus text developed by the Consortium based at Harvard University and funded by a National Science Foundation Grant. The text is thought-provoking for well-prepared students while still accessible to students withMore... This is a new edition of the precalculus text developed by the Consortium based at Harvard University and funded by a National Science Foundation Grant. The text is thought-provoking for well-prepared students while still accessible to students with weaker backgrounds. It provides numerical and graphical approaches as well as algebraic approaches to give students another way of mastering the material. This approach encourages students to persist, thereby lowering failure rates. A large number of real-world examples and problems enable students to create mathematical models that will help them understand the world in which they live. The focus is on those topics that are essential to the study of calculus and these topics are treated in depth. Linear, exponential, power, and periodic functions are introduced before polynomial and rational functions to take advantage of their use to model physical phenomena. Building on the Consortium's Rule of Four: Each function is represented symbolically, numerically, graphically, and verbally where
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Business & Everyday Math Course Get comfortable with numbers in business and life. The business world is founded on numbers and math. Mathematical mindfulness can help eliminate costly errors, drive profit and generally lead to a greater confidence in business (and everyday) discussions. It's therefore vital for business people to be comfortable with the most important and frequently-occurring features of the discipline. We can help you with that. Whether you haven't touched a calculator since high school, or you just don't find simple interest simple, our refreshingly practical course will tailor itself closely to your knowledge and ambitions using our signature diagnosis test. Using guided examples, videos and constant application to realistic business scenarios, our course carefully teaches you all the skills required to transform math from a hazard to be feared into a weapon to be utilized. Allow Dr Clare Morris, professor at the University of Gloucestershire and published author, to make you feel more at home in numberland. Preview Course Content Course Content Alt Syllabus Explorer Video User Dashboard Course Certificate Syllabus Section 1: Introducing the basics directright Unit 1.1 - Getting Started Introduces you to the purpose and potential of the course, includes the diagnostic test that will tailor the course to your requirements, and advises you on how to approach both the course and math in general in order to get the most out of your learning. directright Unit 1.2 - Be Confident with Numbers Teaches you the fundamentals of the decimal number system, outlines the theory behind and the operation of the key arithmetic operations, and explains the essential terminology and anatomy of mathematical calculations. directright Unit 1.3 - Fractions, Decimals, Percentages and Ratios Moves the course firmly into the world of business application by explaining in depth the four critical mechanisms through which numbers interact with one another, giving constant and explicit examples of how each is central to the business world. Section 2: Quirks in Math directright Unit 2.1 - Notation Explains the operation of powers and roots, which are central to the decimal system, and teaches you how to handle all numbers - huge or minute - with ease and clarity. directright Unit 2.2 - Estimation and Accuracy Teaches you how to remain in control of math even without a calculator or a computer by outlining the ways in which degrees of accuracy, rounding, approximations and calculation checks can all be used to apply math to business in real time, such as in meetings or calls. directright Unit 2.3 - Working with Letters Guiding you gently through the often-daunting world of algebra, Clare explains the reasons for algebra, its applicability to the business world, and its operation – from the underlying theory to the solution of linear equations. directright Unit 2.4 - Debts and Debits Outlines how negative numbers operate, utilising a number of business examples to teach you how negative numbers are both critical to the business world, and easy to work with once you know a few simple rules. Section 3: Working with data and tools directright Unit 3.1 - Tools for Arithmetic Connects math firmly with the real world by demonstrating how to get maximum use from your calculator and Excel spreadsheets in dealing with business scenarios. directright Unit 3.2 - Graphs Teaches you how to plot, read, make sense of and utilize the vast potential of different types of graphs as visual representations of business data. directright Unit 3.3 - Business Applications and Handling Data Applies what you have learnt throughout the course to the very heart of business, demonstrating why math is so critical to interest, depreciation, value, data handling and statistics: concepts unavoidably critical to the everyday running of a successful business. Section 4: Advanced techniques directright Unit 4.1 - Handling Data Building on the utilisation of graphs and business applications of the previous two units, this unit also teaches you how to collect, display, interpret and benefit from data collections – a process at the heart of all world-leading businesses and organisations. directright Unit 4.2 - Dealing with Chance Demonstrates how math does not simply allow you to make sense of the present, but allows you to speculate into the future, by teaching you how to use the concept of probability to make real life business, projections, predictions and decisions. directright Unit 4.3 - Conclusion Summarizes what you have learnt, how to apply what you have learnt, and how to build upon what you have learnt to be more successful in business. Pricing *The AUD price shown above is an estimate. Actual charges are based on the current exchange rate from GBP Requirements Software: Required: none Completion Time: 10 hours (average) About the Author Clare Morris Professor Clare Morris has more than 30 years' experience of teaching mathematics and statistics to business students, in some of the UK's leading business schools including Warwick Business School and the Cardiff University Business School. She is the author of a number of successful texts including 'Quantitative Approaches in Business Studies', now in its 8th edition (Pearson, 2011) and 'Essential maths for business and management' (Palgrave, 2007), as well as many journal and conference papers. Clare holds an MA degree from the University of Oxford, and MSc and PhD from the University of Bristol. She is a Chartered Statistician and Fellow of the Royal Statistical Society, and has served as a member of the Council and chair of the Quality Improvement Committee. She has worked as a statistical consultant for major companies including Hewlett- Packard and Land Rover, as well as for a number of UK Government departments. She has a particular interest in distance and online learning, and is a tutor for the UK's Open University. Clare believes strongly that everyone can learn and enjoy mathematics, as long as it is presented in a de-mystified and accessible way.
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Main navigation Free 'Help With GCSE Maths' Udemy Course "A series of tips and tricks to make the basics of GCSE Maths easier, followed by a whole bunch of past paper questions, with step by step video solutions. This course is designed for anyone looking for GCSE Maths Help and to consolidate at the GCSE C grade, or perhaps looking to improve from a high E or solid D to a grade C within a few weeks with GCSE Maths Online." So, if you would like to take a step towards help or helping with some GCSE Maths then why not sigh up to this FREE course. To go grab it simply click the GRAB FREEBIE button below to be taken to the Udemy course. If you've not already signed up to Udemy then you need to do that; but that is also FREE..
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PRODUCT DESCRIPTION This unit activity on Radicals is designed for Algebra 1 or Algebra 2 students. It can also be used as a review in PreCalculus or for SAT and ACT skills. The resource includes: • 2 versions of a test/study guide/review, each with 40 questions. One version is free response and the other one is multiple choice. • 21 Task Cards • Student recording sheet • Blank Cards for you to customize Note: The task cards have different questions than the worksheet/tests. Be the first to know about my new discounts, freebies and product launches: • Look for the green star next to my store logo and click it to become a follower. You will now receive updates about new products and sales. Thanks for shopping at
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PDF (Acrobat) Document File Be sure that you have an application to open this file type before downloading and/or purchasing. 0.12 MB | 7 pages PRODUCT DESCRIPTION This worksheet allows students to work on their own or with a partner to investigate, using a graphing calculator, what all the different numbers in a sine or cosine equation do to the graph. It looks at it from a transformations approach, drawing from their prior knowledge of other function transformations. It asks them to look for patterns and explain their reasoning
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Browse by Level Ganit Mathematics Author(s) : C Sailaja, Lata Thergaonkar & Smita Ratish Ganit Mathematics series consists of seven textbooks; two textbooks for Primer A, B and five textbooks for classes 1–5. The textbooks meet the requirements of the latest ICSE syllabus classes 6-8 About the Author Lata Wishram is a renowned academician with more than two decades of experience in teaching mathematics. She has worked as Principal at Naval Public School, Visakhapatnam. She has also taught mathematics at various reputed institutions, like Army School, Jhansi; Army School, Kalimpong; St. Miras School, Pune and Sadhu Vaswani International School, Delhi. For Primer A, B and classes 1-5 C. Sailaja C. Sailaja is a reputed author having over 15 years of experience in teaching mathematics. She is presently working as Mathematics Teacher(Primary Section), at NASR Girls School, Hyderabad. Smita Ratish Smita Ratish is a well-known author having teaching experience of more than a decade. She is presently working as Primary Teacher at New Horizon School, Bengaluru. GANIT MATHEMATICS series consists of ten textbooks; two textbooks for Primer A and B, eight textbooks for classes 1-8. This series is strictly bases on the syllabus prescribed by the Council for the Indian School Certificate Primer A, B and classes 1-5 For Primer A, B and classes 1-5 Let us Recall given at the beginning of each chapter to brush up the prior knowledge of learner relevant to the forthcoming chapter Maths and our Environment exercises to associate and blend mathematics with art, language and environmental science Remember to emphasize on tips and tricks for better retention of concepts Hands-on Activities based on key concepts to make learning an enjoyable experience Exercises given at the end of each concept to assess the understanding of the concept
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Forum for Science, Industry and Business The Aftermath of Calculator Use in College Classrooms 13.11.2012 Students may rely on calculators to bypass a more holistic understanding of mathematics, says Pitt researcher Math instructors promoting calculator usage in college classrooms may want to rethink their teaching strategies, says Samuel King, postdoctoral student in the University of Pittsburgh's Learning Research & Development Center. King has proposed the need for further research regarding calculators' role in the classroom after conducting a limited study with undergraduate engineering students published in the British Journal of Educational Technology. "We really can't assume that calculators are helping students," said King. "The goal is to understand the core concepts during the lecture. What we found is that use of calculators isn't necessarily helping in that regard." Together with Carol Robinson, coauthor and director of the Mathematics Education Centre at Loughborough University in England, King examined whether the inherent characteristics of the mathematics questions presented to students facilitated a deep or surface approach to learning. Using a limited sample size, they interviewed 10 second-year undergraduate students enrolled in a competitive engineering program. The students were given a number of mathematical questions related to sine waves—a mathematical function that describes a smooth repetitive oscillation—and were allowed to use calculators to answer them. More than half of the students adopted the option of using the calculators to solve the problem. "Instead of being able to accurately represent or visualize a sine wave, these students adopted a trial-and-error method by entering values into a calculator to determine which of the four answers provided was correct," said King. "It was apparent that the students who adopted this approach had limited understanding of the concept, as none of them attempted to sketch the sine wave after they worked out one or two values." After completing the problems, the students were interviewed about their process. A student who had used a calculator noted that she struggled with the answer because she couldn't remember the "rules" regarding sine and it was "easier" to use a calculator. In contrast, a student who did not use a calculator was asked why someone might have a problem answering this question. The student said he didn't see a reason for a problem. However, he noted that one may have trouble visualizing a sine wave if he/she is told not to use a calculator. "The limited evidence we collected about the largely procedural use of calculators as a substitute for the mathematical thinking presented indicates that there might be a need to rethink how and when calculators may be used in classes—especially at the undergraduate level," said King. "Are these tools really helping to prepare students or are the students using the tools as a way to bypass information that is difficult to understand? Our evidence suggests the latter, and we encourage more research be done in this area." King also suggests that relevant research should be done investigating the correlation between how and why students use calculators to evaluate the types of learning approaches that students adopt toward problem solving in
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Tagged: math tools Microsoft Mathematics is an application that provides a set of mathematical tools which will help students get their school work done quickly and easily. With Microsoft Mathematics, students can easily learn to solve equations step-by-step while gaining a better understanding of fundamental concepts in pre-algebra, algebra, trigonometry, physics, chemistry, and...
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9780135000038 01350000183.40Save up to $93.41 eBook $220.08 More Prices eBook $220.08 Add to Cart DURATION PRICE Online: 180 Days Downloadable: 180 Days $89.99 Online: 365 Days Downloadable: 365 Days $89.99 Online: 365 Days Downloadable: Lifetime Access $220.08 Marketplace $26 thorough revision of Teaching Secondary Mathematics: Techniques and Enrichment Unitsincludes the most practical, step-by-step techniques for teaching mathematics in today#x19;s assessment and standards driven environment.#xA0; Part One on methods discusses all aspects of being a math teacher, from an overview of the discipline, to challenges of teaching today, the role of problem-solving, the importance of planning, assessment strategies, teaching more effective lessons, enriching mathematics instruction, and extracurricular activities for mathematics.#xA0; Part Two supplies 125 enrichment units that teachers can use right away in their own classrooms that are suitable for the entire secondary school curriculum spectrum.#xA0; From methods to hands on activities, this highly successful book takes students through the whole process of what teaching mathematics in the secondary schools will be like.#xA0; #xA0; New To This Edition: #xA0; NEW: Includes the latest information on changes to student assessment that have been made possible due to innovations in technology. #xA0; NEW!#xA0; Features new content on data driven planning. #xA0; NEW!#xA0; Completely revised technology chapter reflects the rapidly changing technology environment of today. #xA0; NEW!#xA0; No chapters remain untouched! Author Biography Alfred S. Posamentier is Professor of Mathematics Education and Dean of the School of Education of The City College of the City University of New York. He is the author and co-author of many mathematics books for teachers and secondary school students. After completing his A.B. degree in mathematics at Hunter College of the City University of New York, he took a position as a teacher of mathematics at Theodore Roosevelt High School in the Bronx (New York), where he focused his attention on the teaching process in general and the improvement of students' problem-solving skills in particular. He developed the school's first mathematics teams and established a special class whose primary focus was enrichment topics in mathematics and problem solving. After six years as a high school teacher, Dr. Posamentier joined the faculty of The City College where he also received his master's degree. He began to develop in-service courses for secondary school mathematics teachers, focusing on practical classroom applications of educational research. These courses addressed such topics as the uses of new technology in mathematics instruction, efficient ways to teach weaker students, problem-solving strategies, and the enrichment of mathematics through a variety of ways including, but not limited to, recreational mathematics. Dr. Posamentier received his Ph.D. from Fordham University (New York) in mathematics education. He is an Honorary Fellow at the South Bank University (London, England). He has been visiting professor at the Technical University of Vienna and the Humboldt University at Berlin, and a Fulbright Professor at the University of Vienna. Dr. Posamentier is often cited for his outstanding teaching. The City College Alumni Association named him Educator of the Year (1993) and he also on May 1, 1993 had a "Day" named in his honor by the City Council President of New York City. He was awarded the Grand Medal of Honor from the Federal Republic of Austria and the Medal of Distinction from the city of Vienna. In 1999 he was awarded the title of University Professor for Austrian Universities. Now, after more than 35 years on the faculty of CCNY, he still exudes an ever-increasing energy and enthusiasm for mathematics and mathematics education. With his penchant for mathematics instruction, he has been especially concerned that during the recent years of mathematics teacher shortages, those who enter the classroom are as well prepared as possible. He enthusiastically believes that providing mathematics teachers with an appropriate repertoire of teaching strategies enables them to fulfill an essential role in society: empowering our nation's youngsters to engage in the critical study of mathematics. Dr. Beverly Smith Beverly Smith holds a, MA and Ed.D. in mathematics education from Teachers College — Columbia University and an M.S. degree in computer science from Union College. Prior to becoming a mathematics-teacher-educator, Dr. Smith taught mathematics and computer science at the secondary school and college level in New York State and Massachusetts. She is currently an Associate Professor in the Secondary Education Department at The City College of New York. Dr. Smith's research interests are in the area of teacher professional development. As part of her responsibilities as a faculty member of MetroMath: The Center for Mathematics in America's Cities, she is studying the development of alternatively certified mathematics teachers who are participating in the New York City Teaching Fellows Program. In addition, Dr. Smith is working with mathematics teachers to better understand how technology can support formative assessment in urban mathematics classrooms. Table of Contents Methods of Teaching Secondary Mathematics The Challenge of Teaching Planning for Instruction Teaching More Effective Lessons The Role of Problem-Solving Using Technology to Enhance Mathematics Instruction Assessment Enriching Mathematics Instruction Extracurricular Activities in Mathematics Enrichment Units for the Secondary School Classroom Cross-Catalogue of Enrichment Units Constructing Odd-Order Magic Squares Constructing Even-Order Magic Squares Introduction to Alphametics A Checkerboard Calculator The Game of Nim The Tower of Hanoi What Day of the Week Was It? Palindromic Numbers The Fascinating Number Nine Unusual Number Properties Enrichment with a Handheld Calculator Symmetric Multiplication Variations on a Themendash;Multiplication Ancient Egyptian Arithmetic Napier's Rods Unit Pricing Successive Discounts and Increases Prime and Composite Factors of a Whole Number Prime Numeration System Repeating Decimal Expansions Peculiarities of Perfect Repeating Decimals Patterns in Mathematics Googol and Googolplex Mathematics of Life Insurance Geometric Dissections The Klein Bottle The Four-Color Map Problem Mathematics on a Bicycle Mathematics and Music Mathematics in Nature The Birthday Problem The Structure of the Number System Excursions in Number Bases Raising Interest Reflexive, Symmetric, and Transitive Relations Bypassing an Inaccessible Region The Inaccessible Angle Triangle Constructions The Criterion of Constructibility Constructing Radical Lengths Constructing a Pentagon Investigating the Isosceles Triangle Fallacy The Equiangular Point The Minimum-Distance Point of a Triangle The Isosceles Triangle Revisited Reflective Properties of the Plane Finding the Length of a Cevian of a Triangle A Surprising Challenge Making Discoveries in Mathematics Tessellations
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putational Science75.23Encompasses the full range of computational science and engineering from modelling to solution, both analytical and numerical. It develops a framework for the equations and numerical methods of applied mathematics. Gilbert Strang has taught this material to thousands of engineers and scientists (and many more on MIT's OpenCourseWare 18.085-6). His experience is seen in his clear explanations, wide range of examples, and teaching method. The book is solution-based and not formula-based: it integrates analysis and algorithms and MATLAB codes to explain each topic as effectively as possible. The topics include applied linear algebra and fast solvers, differential equations with finite differences and finite elements, Fourier analysis and optimization. This book also serves as a reference for the whole community of computational scientists and engineers. Supporting resources, including MATLAB codes, problem solutions and video lectures from Gilbert Strang's 18.085 courses at MIT, are provided at math.mit.edu/cse.
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Pre-Calculus B Course Registration Code: MA883B Credits: 1 Price: $299.00 Two-semester course with explores in great detail the relationship that exists between advanced algebra topics and trigonometry objectives. An exploration into the nature of graphs (including the twelve basic functions) is provided along with nonlinear systems, polynomial and rational functions. Logarithmic knowledge and application is developed. A large portion of the class focuses on trigonometric graphs and identities. Other topics include vectors, parametric equations and sequences and series. The students are introduced into the world of calculus, by exploring topics of limits, continuity, derivatives and the Fundamental Theorem of Calculus.
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Need to keep your rental past your due date? At any time before your due date you can extend or purchase your rental through your account. Sorry, this item is currently unavailable. Summary This text, intended for a graphing calculator required precalculus course, shows students when and how to use concepts, and promotes real understanding not just rote memorization. In addition, the graphing calculator is used as a tool to help explain ideas rather than merely to find answers. The book reflects AMATYC, MAA, and NCTM guidelines, and makes use of real world data in presenting a balanced algebraic and graphical approach to understanding precalculus concepts. The result is a thorough preparation for the calculus course.
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Elementary Teachers is an unbound, binder-ready edition. When students truly understand the mathematical concepts, it's magic. Students who use this text are motivated to learn mathematics. They become more confident and are better able to appreciate the beauty and excitement of the mathematical world. That's why the new Ninth Edition of Musser, Burger, and Peterson's best-selling textbook focuses on one primary goal: helping students develop a true understanding of central concepts using solid mathematical content in an accessible and appealing format. The components in this complete learning program--from the textbook, to the eManipulative activities, to the online problem-solving tools and the resource-rich website--work in harmony to help achieve this goal. This edition can also be accompanied with WileyPlus, an online teaching and learning environment that integrates the entire digital textbook with the most effective resources to fit every learning style. WileyPLUS sold separately from text.
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Essays on statistics mathematics Welcome. The Utah State Board of Education (USBE) has a core mission of ensuring students are well prepared for their future by providing high quality instruction in. Related Resources Essays. Each month James Tanton writes math essays for all to enjoy. Here are the latest: September Cool Math Essay (pdf) September Curriculum. On Mathematics, Mathematical Physics, Truth and Reality. NOTE: These pages deal with the Philosophy and Metaphysics of Mathematics and the Mathematical. Online homework and grading tools for instructors and students that reinforce student learning through practice and instant feedback. Free Career papers, essays, and research papers These results are sorted by most relevant first (ranked search). You may also sort these by color rating or essay. The CLEP College Mathematics exam covers material generally taught in a college course for non-mathematics majors. Mathematics is the study of numbers, quantity, space, structure, and change. Mathematics is used throughout the world as an essential tool in many fields. College study is the process of acquainting students with values and procedures central to scholarship. All students are expected to do their own work. College study is the process of acquainting students with values and procedures central to scholarship. All students are expected to do their own work. Essays on statistics mathematics On Mathematics, Mathematical Physics, Truth and Reality. NOTE: These pages deal with the Philosophy and Metaphysics of Mathematics and the Mathematical. Free Career papers, essays, and research papers These results are sorted by most relevant first (ranked search). You may also sort these by color rating or essay. Introduction to Use of statistics in daily life:- Statistics deal with frequency distribution. It is used to compare twoor more frequency distribution. Mathematics (from Greek μάθημα máthēma, "knowledge, study, learning") is the study of topics such as quantity , structure, space, and change. Mathematics Awareness Month is sponsored each year by the Joint Policy Board for Mathematics to recognize the importance of mathematics through written materials. Introduction to Use of statistics in daily life:- Statistics deal with frequency distribution. It is used to compare twoor more frequency distribution. The CLEP College Mathematics exam covers material generally taught in a college course for non-mathematics majors. Product information and search tools. Find information, locate, learn how to order, and browse the content of NCES publications or download data files. Online homework and grading tools for instructors and students that reinforce student learning through practice and instant feedback. Ivy League writers provided Admission Essay, Personal statement & Letter of Recommendation writing services for college, grad, mba, med & law school students. Welcome. The Utah State Board of Education (USBE) has a core mission of ensuring students are well prepared for their future by providing high quality instruction in. Product information and search tools. Find information, locate, learn how to order, and browse the content of NCES publications or download data files. Free descriptive Free descriptive papers, essays, and research papers These results are sorted by most relevant first (ranked search). You may also sort these by color rating or. Mathematics Standards Download the standards Print this page. For more than a decade, research studies of mathematics education in high-performing countries.
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This new approach to real analysis stresses the use of the subject in applications, by showing how the principles and theory of real analysis can be applied in a variety of settings in subjects ranging from Fourier series and polynomial approximation to discrete dynamical systems and nonlinear optimization. Users will be prepared for more intensive work in each topic through these applications and their accompanying exercises. Chapter topics under the abstract analysis heading include: the real numbers, series, the topology of R^n, functions, normed vector spaces, differentiation and integration, and limits of functions. Applications cover approximation by polynomials, discrete dynamical systems, differential equations, Fourier series and physics, Fourier series and approximation, wavelets, and convexity and optimization. This book is appropriate for math enthusiasts with a prior knowledge of both calculus and linear algebra. Review of the first edition, Real Analysis with Real Applications: "A well balanced book! The first solid analysis course, with proofs, is central in the offerings of any math.-dept.; — and yet, the new books that hit the market don't always hit the mark: The balance between theory and applications, — between technical proofs and intuitive ideas, — between classical and modern subjects, and between real life exercises vs. the ones that drill a new concept. The Davidson-Donsig book is outstanding, and it does hit the mark. The writing is both systematic and engaged.- Refreshing! Novel: includes wavelets, approximation theory, discrete dynamics, differential equations, Fourier analysis, and wave mechanics." (Palle E. T. Jorgenson, Review from Amazon.com)
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Geometry for College Students challenges many mathematics students face occurs after they complete their study of basic calculus and linear algebra, and they start taking courses where they are expected to write proofs. Historically, students have been learning toMore... One of the challenges many mathematics students face occurs after they complete their study of basic calculus and linear algebra, and they start taking courses where they are expected to write proofs. Historically, students have been learning to think mathematically and to write proofs by studying Euclidean geometry. In the author's opinion, geometry is still the best way to make the transition from elementary to advanced mathematics. The book begins with a thorough review of high school geometry, then goes on to discuss special points associated with triangles, circles and certain associated lines, Ceva's theorem, vector techniques of proof, and compass-and-straightedge constructions. There is also some emphasis on proving numerical formulas like the laws of sines, cosines, and tangents, Stewart's theorem, Ptolemy's theorem, and the area formula of Heron. An important difference of this book from the majority of modern college geometry texts is that it avoids axiomatics. The students using this book have had very little experience with formal mathematics. Instead, the focus of the course and the book is on interesting theorems and on the techniques that can be used to prove them. This makes the book suitable to second- or third-year mathematics majors and also to secondary mathematics education majors, allowing the students to learn how to write proofs of mathematical results and, at the end, showing them what mathematics is really all about
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Hall and Mercer's text is intended for schools that want a single book covering the standard topics from elementary algebra through intermediate algebra. The text is fully integrated, rather than being simply the joining of two, separate texts. Topics are organized not following the historical pattern, but by using as the guiding principles, the AMATYC standards as outlined in Crossroads in Mathematics. BEGINNING AND INTERMEDIATE ALGEBRA: THE LANGUAGE AND SYMBOLISM OF MATHEMATICS is oriented toward recent reforms in college level mathematics curricula. "synopsis" may belong to another edition of this title. From the Publisher: This book has been written from the ground up as an integrated, combined book. The authors have used the AMATYC Standards as a guiding document in writing the book. The use of the graphing calculator is assumed, and the authors use the graphing calculator to explain a large number of real-data applications. Concepts are presented using "Rule of Four" (multiple representations of mathematical solutions to problems, including graphical, algebraic, numerical, and verbal approaches). "Multiple Perspectives" text boxes feature two or more of the Rule of Four approaches (numerical, algebraic, graphical, verbal) to solving a given problem.
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Synopses & Reviews Publisher Comments "Recommended with confidence" by The Times Literary Supplement, this lively survey starts with simple arithmetic and algebra and proceeds by gradual steps through graphs, logarithms, and trigonometry to calculus and the world of numbers. Generations of readers have found it the ideal introduction to mathematics, offeringand#160;accessible explanations of how theory arises from real-life applications. "The main object of this book is to dispel the fear of mathematics," declares author W. W. Sawyer, adding that "Many people regard mathematicians as a race apart, possessed of almost supernatural powers. While this is very flattering for successful mathematicians, it is very bad for those who, for one reason or another, are attempting to learn the subject." Now retired, Sawyer won international renown for his innovative teaching methods, which heand#160;used at colleges in England and Scotland as well as Africa, New Zealand, and North America. His insights into the pleasures and practicalities of mathematics will appeal to readers of all backgrounds. Synopsis "Recommended with confidence" by The Times Literary Supplement, this lively survey starts with arithmetic and algebra and gradually proceeds to trigonometry and calculus. The author, who is internationally renowned for his innovative teaching methods, offers insights into the pleasures of mathematics that will appeal to readers of all backgrounds. 1943 edition. Synopsis "Recommended with confidence" by The Times Literary Supplement, this lively survey was written by a renowned teacher. It starts with arithmetic and algebra, gradually proceeding to trigonometry and calculus. 1943 edition. Table of Contents I. The Approach to Mathematics1. The Dread of Mathematics2. Geometryand#151;The Science of Furniture and Walls3. The Nature of Reasoning4. The Strategy and Tactics of StudyII. On Certain Parts of Mathematics5. Arithmetic6. How to Forget the Multiplication Table7. Algebraand#151;the Shorthand of Mathematics8. Ways of Growing9. Graphs, or Thinking in Pictures10. Differential Calculusand#151;the Study of Speed11. From Speed to Curves12. Other Problems of Calculus13. Trigonometry, or How to Make Tunnels and Maps14. On Backgrounds15. The Square Root of Minus One
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The brand new edition of this classic text--with more exercises and easier to use than ever Like the first edition, this new version of Lamperti's classic text succeeds in making this fascinating area of mathematics accessible to readers who have limited knowledge of measure theory and only some familiarity with elementary probability. Streamlined for even greater clarity and with more exercises to help develop and reinforce skills, Probability is ideal for graduate and advanced undergraduate students--both in and out of the classroom. Probability covers: * Probability spaces, random variables, and other fundamental concepts * Laws of large numbers and random series, including the Law of the Iterated Logarithm * Characteristic functions, limiting distributions for sums and maxima, and the "Central Limit Problem" * The Brownian Motion process Buy Premium From My Links To Get Resumable Support,Max Speed & Support Me
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Think Maths - Matt Parker This group of mathematics speakers visits schools to perform maths talks and workshops in the UK. Sessions present math in ways that "grab the attention of students and remind them that maths is something to be enjoyed." Free downloads include domino ...more>> ThinkNum - Gregory Ugwi A web-based financial data analysis engine. Use regression, curve trades, and other quantitative trading algorithms from scipy, numpy, and similar open source libraries to analyze economic information from hundreds of sources ranging from the ADO National ...more>> ThinkQuest An international contest designed to encourage students from different schools and different backgrounds to work together in teams toward creating valuable educational tools on the Internet while enhancing their ability to communicate and cooperate in ...more>> ThinkWave.com A free web community that provides secure internet-based communication for parents, students, and teachers: real-time information about attendance, assignments, grades, and school curriculum. ...more>> Third Apex to Fractovia - Juan Luis Martínez Several galleries, each with up to 18 fractal images, and discussions on fractals as art. Also an up-to-date list of freeware fractal generators, screen savers, and fractal music software, with links and reviews. ...more>> This Is Statistics - American Statistical Association Why study statistics? For students as well as their parents, teachers, and counselors, the American Statistical Association (ASA) provides a host of motives: to make a difference, have fun, satisfy curiosity, and make money, among other reasons. "WhichThree Skills For Algebra - Alan Selby This book describes three skills key to the algebraic way of writing and thinking, offering a first image of mathematics beyond arithmetic. It also describes the first elements of logic or rule-based reason, needed in all disciplines for writing or a ...more>> TI-83 / TI-84 Games and Programs - Bill Paetzke Bill Paetzke offers TI-83/TI-84 Plus programs to help students and teachers be more efficient in using their calculators. The programs are organized under these categories: Algebra, Finance, Geometry, Physics, Programs, Statistics, Trigonometry, and Tutorials. ...more>> Ti 84 Plus Calculator Instructional videos include using the parametric function to construct a pentagram, hypothesis testing, sketching polynomial functions, finding critical points of a function, and using the TVM (Time Value of Money) Solver method. The site also offers ...more>> TI89Prog - Mickaël Nicotera A French database of programs for the TI-89, TI-92+ and V200 graphing calculators, organized into categories such as math, games, ebooks, pictures, and cours prépa. With an online discussion forum, links to other resources, and more. Available ...more>> ticalc.org The unofficial TI-calculator home page. A non-profit, collaborative effort geared toward fans of Texas Instruments' graphing calculators, acting as a headquarters for all available information on the subject. It is also the home of ZShell and Fargo, assemblyiesforteachers A company in the UK selling neckties specifically with the school curriculum in mind. The growing collection includes ties for teachers of maths, science, English, music, ICT and other general-purpose school subjects. ...more>> Tiling with Polyominoes - Ivars Peterson (MathTrek) "Mathematicians have proved that the general question of whether it's possible to cover the plane with identical copies of a given finite set of tiles is, in principle, computationally undecidable. In other words, there's no cookbook recipe or handbook ...more>>
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6th Grade Math Volume 4 PDF (Acrobat) Document File Be sure that you have an application to open this file type before downloading and/or purchasing. 2 MB | 34 pages PRODUCT DESCRIPTION eWorkbooks are specifically designed to be used as printed workbooks or as on screen instruction. Each page offers focused, engaging exercises.Students master topics with proficiency allowing them to move on to the next level. Finding the Percent of a Number Proportion Algebraic Expressions Graphing Linear Functions
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This book would certainly be my choice for any future Maths Studies classes that I have to teach. The style is very student friendly. Explanations and examples are easy to follow, and GDC details are for the modern and versatile TI-Nspire. This book also offers a good number of investigations, there are plenty of exercises, with all answers provided, and there are many exam style questions too. At the back of the book are three chapters that students will find very useful: the internally accessed project, the use of the TI-Nspire, and prior learning. Also worth a mention is the CD which contains an enhanced version of the text and PDFs for those who still use a Casio or TI-84. ( David Getling, Mathematics Teacher) The committee thinks the books are well written, easy to follow, and they like the TI-NSpire technology throughout. ( Education Ministry, Canada) We have ordered the Mathematics SL and Mathematical Studies books, and we love them. ( Padmini Nadar-Japal, IB Coordinator, Windhoek International School, Namibia) The Oxford IB course books are the best ever resource for both teachers and students. They are practical, insightful and fully in line with the IB Course outcomes. ( Pat Hanson, IB Coordinator, Academy of the Holy Cross, USA) We have adopted most of the Oxford course books for our school. We find them well written, well linked to TOK issues and age appropriate. ( Sheta Saha, IB Coordinator, Chatsworth International School, Singapore) Vom Verlag: Part of a completely new offering for IB Mathematics, this text provides extensive practice, detailed examination support, the latest GDC support and a free eBook, in addition to offering the most thorough syllabus coverage, which is crucial for the IB student. Uniquely developed with the IB, you can trust it takes the best approach. With carefully stepped activities with extensive practice, students will gain confidence in their skills. Activities make cross-curricular and real-world connections, while emphasising the historical and cultural aspects of the theory, in line with the Learner Profile. An eBook gives students ultimate flexibility in their study, including animations to simplify challenging concepts, interactive worked solutions and full and up-to-date GDC instructions for the most commonly used calculators. *Full syllabus coverage - the truest match to the IB syllabus, developed with the IB to exactly match IB specifications *Free eBook - a complete interactive eBook is included on CD for free, for the most flexible learning *Complete worked solutions - a full set of worked solutions is included online, in addition to interactive worked solutions on CD, which take learners through problems step-by-step *The most practice - more practice than any other resource, with over 600 pages and an eBook *Up-to-date GDC support - take the confusion out of GDC use and help students focus on the theory *Definitive assessment preparation - exam-style papers and questions will build confidence *The Exploration - supported by a full chapter, to guide you through this new component *Real world approach - connect mathematics with human behaviour, language, morality and more About the series: The only DP resources developed directly with the IB, the Oxford IB Course Books are the most comprehensive core resources to support learners through their study. Fully incorporating the learner profile, resources are assessed by consulting experts in international-mindedness and TOK to ensure these crucial components are deeply embedded into learning.
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A 21st Century Math & Science Education with a Distinctly Biblical Perspective Expert Video Instruction Our courses feature video instruction by Dr. Shormann. This ensures understanding of complex concepts, leading to higher levels of achievement. Biblical Perspective Teaching from a Biblical perspective, Dr. Shormann teaches the purpose and pattern God puts in math and science. Academic Excellence Our courses are designed to help students achieve the highest levels of math and science. Students who choose to, can earn up to 34 college credits in math and science via CLEP and AP exams. However, our courses can also be used as standard high school courses. The Meet Teacher David Shormann, PhD With degrees in aerospace engineering and science, Dr. Shormann has spent the past 17 years teaching Saxon Math 5/4 through AP Calculus, as well as AP Biology, Chemistry, and Physics, to thousands of homeschoolers around the world. He teaches math as the language of science, a tool to better understand God and the world He created. I am majoring in Chemistry at the University of Nevada. I attribute my knowledge of Chemistry to the fact that I was able to understand the levels of math presented within the course. And that is all thanks to you. I appreciate all the time and effort you put in to helping me understand the concepts that were a little difficult for me. You are an amazing professor and such an outstanding person. I cannot wait to start this next chapter in my educational career and am so thankful that I understand the math needed to continue it. Your help really made the difference between having a basic understanding of a concept and comprehending the topic fully. You truly are the best professor ever :) ~Brittany 2 CD design-front.pdf 1 13/02/14 Journey to Novarupta 11:33 AM From the creators of Jonathan Park, this 3-part audio adventure is based on Dr. Shormann's research expeditions to Novarupta volcano, site of the largest eruption in over 100 years! Join the team as they face grizzly bears, raging rivers, and pumice storms in search of evidence of Creation, while building their faith in God and in each other.. C M Y CM MY CY CMY K Math Lesson 27 Lesson 32 x+3=9 - 3 -3 x=6 c2 - b2 = a2 + b 2 + b2 c2 = a2+ b2 Expert video instruction for every lesson in the corresponding Saxon textbook, taught from a Biblical foundation. Because the lesson in the book is not the complete lesson, John Saxon recommended an experienced Saxon instructor who could connect the incremental lessons, making complex concepts easy to understand. Earn up to 34 college credits using CLEP and AP exams. These courses include a diagnostic test, video lectures, practice problems, video solutions to practice problems, practice exams, and email support with Dr. Shormann. 936.372.9216 | sales@diveintomath.com 24 4 22 30 3 Saxon + DIVE = Success! Lesson 27 c2 - b2 = a2 + b 2 + b2 c2 = a2+ b2 Lesson 32 x+3=9 - 3 -3 x=6 Expert Video Instruction for every Saxon Math Lesson Math is the language of science. Like learning a language, the original Saxon curriculum begins with the fundamentals and provides students ample practice before gently introducing more advanced material. The only math program basesd on incremental development, continual review, and cummulative assesments, Saxon Math increases long-term retention and recall speed by continually reviewing previously learned concepts over a long period of time. Long-term retention increases recall speed, raising standardized test scores and making it easier to apply to other subjects, like science. The lesson in the Saxon textbook is not the complete lesson. John Saxon designed his program to be taught by a trained Saxon instructor. The DIVE course provides this instruction! Teaching 3-5 practice problems, Dr. Shormann connects the new concept to previous ones, making complex concepts easy to understand. The lesson in the book does not make these connections. Without DIVE, the concepts can appear disorganized and confusing. DIVE into Saxon Math and reach higher levels of achievement. Student Textbook • 120 lessons inlcude practice over new and previous concepts • Homework questions have a lesson reference number directing students to the lesson where the concept was originally taught • Step-by-step solutions to all lesson, investigation, and test questions Dr. Shormann teaches the new concept section of every lesson in the corresponding Saxon text. He provides important information, not included in the Saxon lesson, that makes it easier to learn. Lectures are 1015 minutes long. Students take notes and work problems with Dr. Shormann, pausing and rewinding as needed. The lecture has slightly different practice problems than the Saxon lesson. This provides additional practice and builds profieciency on the new concept. This section provides practice on previous concepts. While essential to building longterm retention, this continual practice often requires re-learning recent concepts until they are stored in long-term memory. DIVE makes re-learning quick and easy. Simply click on the DIVE lesson (in parentheses, next to each question) and watch the lesson. Then try to solve the problem again. If you can't, skip it and go to the next problem. You will correct it in the next step. Parents should grade work for younger students but in Algebra 1 and up should grade their own work using the Answer Key. Missed problems should be corrected by referring to the DIVE lecture for that problem (printed in parentheses next to the problem). If needed, the Saxon Solutions Manual has step by-stepsolutions to every homework and test question. If more help is needed students can email Dr. Shormann. Typically there is one test per week. The tests are cumulative, meaning they test over previous concepts. Tests should be graded by a parent then corrected by the student. A lesson reference number next to each question makes it easy to "plug any holes" by re-watching the corresponding DIVE lecture. If more help is needed students can email Dr. Shormann. Which Format is Right for Me? All formats have the same content. CD-ROM Format System Requirements: All Macs and Windows XP and higher Internet Access: Not Required This format can be used with members of your immediate family. EULA prohibits the CD being loaned, sold, or given away. Digital Download System Requirements: All Macs and Windows XP and higher Internet Access: Only required for initial download The files can be downloaded to all of your computers, stored in the cloud, and copied to a USB drive. There is no CD to lose or damage. It can be used with all the children in your immediate family. However, it cannot be sold, loaned, or given away. Lesson 32 x+3=9 - 3 -3 x=6 iTunes U Course System Requirements: iOS 6.0+ (iPad, iPod Touch, iPhone) and iTunes U app (free in App Store) Internet Access: Required for downloading and streaming Featuring updated graphics and the power of iTunes U, this is our latest and greatest format. The course can be used with all the children in your immediate family but cannot be shared, sold, or given away. 936.372.9216 | sales@diveintomath.com 5 DIVE for Saxon K-12 Math Math Course Sequence Advanced (AP) Honors Standard K Saxon 1 Saxon K Saxon K 1st Saxon 2 Saxon 1 Saxon 1 2nd Saxon 3 Saxon 2 Saxon 2 3rd Math 5/4 Saxon 3 Saxon 3 4th Math 6/5 Math 5/4 Math 5/4 5th Math 7/6 Math 6/5 Math 6/5 6th Math 8/7 Math 7/6 Math 7/6 7th Algebra 1 Math 8/7 Math 8/7 8th Algebra 2 Algebra 1 Algebra 1/2 9th Advanced Math 1 Algebra 2 Algebra 1 10th Advanced Math 2/ Calculus 1 Advanced Math 1 Algebra 2 11 th 12 AP Calculus th Advanced Math 2 Advanced Math 1 & Calculus 1* Calculus 2 Advanced Math 2 3 Semester Schedule While an advanced student can complete them in a year, Saxon Advanced Math and Calculus are recommended as three semester courses. This schedule shows you what to do each semester and how many credits are earned. The DIVE course includes a weekly assignment chart indicating which lessons are to be completed each week. FALL SPRING CREDITS First 1/2 of ALGEBRA 2 Second 1/2 of ALGEBRA 2 1 ALGEBRA 2 1/2 GEOMETRY First 1/3 of ADVANCED MATH (Includes Geometry) Second 1/3 of ADVANCED MATH (Includes Geometry) 1/2 PRECALCULUS 1/2 GEOMETRY Last 1/3 of ADVANCED MATH FirstT 1/3 of CALCULUS Second 1/3 of CALCULUS Last 1/3 CALCULUS TOTAL CREDITS 6 HIGH SCHOOL TRANSCRIPT Putting all these credits on a transcript can be a little confusing. It's important to remember to put the name of the requirement the course fulfilled, not the name of the textbook. A subject transcript lists credits by subject instead of year. This is a format admissions personnel can easily understand. Visit our website to learn more about making high school transcripts. SUBJECT Like the European and Asian countries that outperform the US on national math exams, Saxon integrates the teaching of algebra and geometry. This makes geometry easier to understand, increases long-term retention, and raises college entrance exam scores. One-half credit of geometry is earned in Algebra 2 and onehalf credit is earned in the first 40 lessons of Advanced Math. Therefore it is redundant and unneccessary to take a separate year of geometry. VS. Saxon Teacher In 2000, Dr. Shormann created the DIVE into Math series to provide daily instruction for the students in his weekly co-op classes. Shortly thereafter, Saxon Publishers offered Dr. Shormann a job to create a secular version of DIVE. The offer was declined due to the restrictions on selling our DIVE CDs with Christian content. In 2004, Saxon Publishers was purchased by Harcourt Achieve. A year later Harcourt Achieve released Saxon Teacher, a whiteboard lecture very similar to the DIVE into Math courses. Following is our opinion of the differences between the two products. DIVE Saxon Teacher Teaches from a Biblical Worldview, Scripture is used to inspire godly character. Reads the exact lessons in the book which do not include connections to previous concepts, lessons can appear disorganized or confusing Students work interactively, taking notes and working problems with Dr. Shormann. Dr. Shormann teaches different practice problems than the Saxon lesson, providing extra practice on new concepts. This is not confusing since the book should not be open during the lecture. No additional practice problems All the lectures are in 1 file, making it easy to re-learn previous concepts instead of seeing the answer. This builds retention and fluency, making math easier. A quick reminder is usually all that is needed. The Saxon solutions manual in the kit provides step-by-step solutions, if needed. Saxon Teacher is a multi-disk program, which makes it difficult to go back and review previous lessons. Students typically just watch the solution. Each time they do this, they lose the opportunity to build rentention and fluency, making math harder. A Q&A email service with Dr. Shormann, is included with each course. Questions are answered by Dr. Shormann within one business day. Dr. Shormann has taught Saxon Math and Saxon Physics courses since 1997. Earn up to 14 college math credits with the free CLEP and AP preparation program included with DIVE Algebra 2, Advanced Math, and Calculus. No CLEP or AP prep provided 936.372.9216 | sales@diveintomath.com 7 half Math Math 5/4 76 DIVE DIVEfor forSaxon SaxonMath Math Grade This course teaches numerical operations, functions, geometry, fractions, patterns, word problems, and data manipulation through charts and graphs. Critical thinking skills and long-term retention are built with daily continual review of previously learned concepts. Weekly tests are cumulative with lesson references for easy relearning of missed concepts. A solutions manual provides stepby-step solutions to all lesson, test, and investigation problems. The DIVE course includes Q&A email support with Dr. Shormann. Advanced: 3rd Honors: 4th Standard: 5th 6/5 Grade This course continues to build a firm foundation for upper math courses with word problems, division, integers, order of operations, functions all lesson, test, and investigation problems. The DIVE course includes a Q&A email support with Dr. Shormann. Read more on page 4 Advanced: 4th Honors: 5th Standard: 6This course continues building on the concepts required for upper level math courses like word problems, division, integers, order of operations, functions all lesson, test, and investigation problems. The DIVE course includes a Q&A email support with Dr. Shormann. Read more on page 4 Grade Advanced: 5th Honors: 6th Standard: 7 8/7 with Pre-Algebra Grade This course provides excellent preparation for Algebra 1 by building fluency in the skills students struggle with most, like fractions, decimals, percents, and ratios. This course teaches students to quickly simplify equations, convert between fractions, decimals, percents, and ratios, and much more. We recommend this pre-algebra course instead of Saxon Algebra 1/2. A grade of 80% or better indicates the student can skip Saxon Algebra 1/2 and go directly to Algebra 1.The DIVE course includes a Q&A email support with Dr. Shormann. Read more on page 4 Advanced: 6th Honors: 7th Standard: 8th Prerequisite 6th Grade Math Credit 1 Pre-Algebra11 Math Algebra 1/2 Grade We prefer students take Math 8/7 for pre-algebra instead of this course Optional because it builds fluency in skills that are essential for success in Algebra 1. Algebra 1/2 is for students who struggle in Math 8/7. Otherwise, Credit 1 Pre-Algebra students should skip this course and go directly to Algebra 1. Daily lessons include continual review over previous concepts Weekly tests are cumulative with lesson references for easy re-learning of missed concepts. A solutions manual provides step-by-step solutions to all lesson, test, and investigation problems. The DIVE course includes a Q&A email support with Dr. Shormann. Readd is e Math Algebra 1 Grade This course teaches all the concepts required in a first year algebra course like proofs, statistics, probablility and real world, algebra based word problems. Daily lessons include continual review over previous concepts Weekly tests are cumulative with lesson references for easy re-learning of missed concepts. A solutions manual provides stepby-step solutions to all lesson, test, and investigation problems. The DIVE course includes a Q&A email support with Dr. Shormann. Advanced: 7th Honors: 8th Standard: 9th Prerequisite Pre-algebra Credit 1 Algebra13 Math Geometry Grade This curriculum was published by Houghton Mifflin, not John Saxon. Saxon was a firm believer in the integration of geometry and algebra because it makes geometry easier to learn and raises college entrance exam scores. Saxon's original Algebra 2, 3rd edition and Advanced Math, 2nd edition have all the geometry required for a high school geometry course while providing excellent preparation for the PSAT, SAT, and ACT. This course is only recommened in rare circumstances. Read more about the new HMH editions of Saxon on the opposite page. Read more about Optional Prerequisite Algebra 1 & 2 Credit 1 Geometry Saxon MathL c o i a g i a s d s NEW SAXON 4TH EDITIONS ARE THEY WORTHY OF THE SAXON NAME? John Saxon died in 1996. In 200Saxon Publishers was sold to Harcourt Achieve Incorporated. In 2007 Houghton Mifflin Publishers purchased Harcourt, acquiring Saxon in the process. Recently, Houghton Mifflin Harcourt (HMH) released their newly revised 4th editions of Saxon Algebra 1 and 2 as well as a Geometry text. But are these new editions worthy of the Saxon name? Or do they go against the very principles on which John founded Saxon Publishers? John Saxon was an Air Force test pilot with three engineering degrees. After retiring, he began teaching algebra at the local junior college. Appalled at the skills his students possessed, Saxon began writing lessons to bring his students up to speed. His methodology produced great results so he wrote and published his first algebra book in 1981. When he died in 1996, Saxon Publishers annual sales were at $27 million. Math is the language of science. Just like learning a language, the original Saxon curriculum begins with the fundamentals and provides students ample time to practice these before gently introducing more advanced material. John Saxon created a unique system of incremental development (small bite-sized lessons), continual review and assessment, and the integration of geometry and algebra. Researchers have found these common-sense methods increase long-term retention and recall speed, thereby improving standardized test scores. More importantly, students are able to use these skills and apply them to new situations, like science. John Saxon's systematic integration of algebra and geometry is essentially gone. The European and Asian countries that consistently outperform the United States on international math exams integrate the teaching of algebra and geometry. A student who is learning algebra and geometry together will understand all math better , enabling them to apply math in science and engineering fields. These students will also generally outperform their peers on college admissions exams because algebra and geometry are tested on these exams. The new editions of published by HMH significantly reduce the amount of review over previously learned concepts. The lessons do no not make the proper connections between the incremental concepts, making the lessons appear disorganized and confusing. The most disappointing change found in the new editions is that Since Saxon Publishers was first sold in 2004, I've feared that any new editions might lose their original methodology that strives to teach mathematics like the language of science that it is. I have often prayed that if that happens, Lord willing, I would be able to stand on the shoulders of giants like John Saxon, Leonard Euler, Isaac Newton, Euclid, and others to build an even better math curriculum. These new editions confirm that time has come. Coming soon from DIVE: Shormann Math. Do I Need a Separate Geometry Course? Like the European and Asian countries that outperform the US on national math exams, Saxon integrates the teaching of algebra and geometry. This makes geometry easier to understand, increases long-term retention, and raises college entrance exam scores. One-half credit of geometry is earned in Algebra 2 and one-half credit is earned in the first 40 lessons of Advanced Math. Between these two texts, all the geometry required on the PSAT, SAT, and ACT are taught. Therefore it is redundant and unneccessary to take a separate year of geometry. 936.372.9216 | sales@diveintomath.com 15 Algebra 2 with Geometry Grade John Saxon believed in integrating algebra and geometry because it makes ithem asier to learn and apply on college entrance exams. This unique course, with 1 credit of Algebra 2 and 1/2 credit of geometry, teaches all the topics necessary to excel on the PSAT, SAT, and ACT, all in one year. With short, bite-sized lessons, daily review over previous concepts, lesson reference numbers to re-learn missed concepts, and a solutions manual with step-by-step solutions, this course will build fluency and long-term retention, thereby raising exam scores. Read more on page 4 Advanced: 8th Honors: 9th Standard: 10th Prerequisite Algebra 1 Credit 1 Algebra 2 1/2 GeometryWith numerous applications to physics, chemistry, engineering, and Prerequisite Precalculus business, this course meets the requirement for AP Calculus AB and (Advanced Math) BC exams. Most of the advances in math and science over the past 300 Credit years have been based on Calculus, making it an important goal for 1 Calculus 1 all students. With short, bite-sized lessons, daily review over previous 1 Calculus 2 concepts, lesson reference numbers to re-learn missed concepts, and a solutions manual with step-by-step solutions, this course will build fluency and long-term retention, thereby raising exam scores. and APMany students can finish calculus in high school. Setting a high standard for your homeschool will increase the risk of failure. But, shouldn't we be training our kids to try hard, and possibly fail, than to set a low standard? How will they know what they are capable of if we simply plan their K-12 curriculum based on government school standards, which never include calculus? In the following paragraphs, Dr. Shormann presents some thoughts on why Christian home schools around the world should plan to complete calculus in high school. What is calculus? Answer this question: If you drove 60 miles in one hour, how fast were you going? If you answered "60 miles per hour", then congratulations, you just did calculus! Calculus is nothing more than a tool for studying rates of change. And rate stems from the word ratio, or fraction, so calculus can even be thought of as a study of fractions. Rates of change in position, speed, temperature, volume, etc. can all be studied with calculus. Why is it important to know calculus? Understand History Calculus began with the ancient Greeks, but their cyclical view of time caused their progress to stagnate. Because their worldview was flawed, they were not able to grasp the reality of infinity. But Christians know from Scripture that God is infinite (eternal). It is no surprise then, that in the 1600's, Newton and Leibniz (both Christians) discovered calculus. For the next 300 years, practically every development in science and mathematics was connected with calculus. The discovery of calculus is a powerful lesson that worldview matters! Enjoy Life Understanding how things move and change, from motion pictures to engine pistons, has been one of the most intellectually satisfying experiences in my life. The fundamental idea of change is at the basis of our whole perception of phenomena. Life is full of change and predictable patterns of change. Jesus said that He came to give us an abundant life (John 10:10), and the study of calculus allows us to enjoy God and his works in a more abundant way. Know God It helps us understand the Trinity One of the biggest differences between Christianity and other religions is the theme of unity and diversity. Some religions have one god, and others have many gods, but the only true God is both one and many. He is our Father, Son and Holy Spirit, a triune God. God's invisible attributes have been clearly seen by humans from the beginning (Romans 1:20). The attribute of unity and diversity is quite visible. Tides would cease without the sun and moon, dolphins would starve without their sonar, and calculation of speed would be impossible without a measure of time elapsed. One cannot study calculus for long without noticing that unity and diversity abounds, and realizing this will help a student understand that a biblically-based math and science education makes the world so much easier to figure out! Why complete calculus in high school? Easier Than You Think What usually intimidates most students is the whole host of strange symbols like ∂y/∂x and ∫, and confusing words like function, limit and continuity. However, with a little patience and perseverance, coupled with skill in working with fractions and basic algebra, students will find that difficult things readily become easy things. A Liberal Education Not that kind of liberal, the "free to think," "free to pursue" kind! Up to 80% of undergraduate degrees offered at 4-year universities require at least one semester of calculus. Calculus knowledge frees a child up to pursue any college degree. But, calculus should not be considered just by the college crowd. The problem solving skills and understanding of God's creation that naturally flow from a study of calculus are invaluable to anyone who loves the Lord and loves to learn. A Liberal Education Many children are capable of completing calculus in high school, and it is up to parents to provide the love, encouragement and godly counsel that will motivate them to succeed. Parents must teach their children well, demand excellence, and set high standards, remembering also that knowledge puffs up, but love builds up(I Cor. 8:1), and that God considers as "nothing" those with lots of knowledge but little love (I Cor. 13:1-3). All parents want their children to have a better education, better job, and a better understanding of His Word and His works than they had, and planning for your children to finish calculus in high school will help them succeed. Humble application of this great knowledge will result in a child who is better prepared for restoring His kingdom on Earth, as it is in Heaven. 936.372.9216 | sales@diveintomath.com 19 DIVE Science L IVE ONLINE MATH CLASSES Classes meet online with Dr. Shormann once per week. During this time Dr. Shormann will review new concepts, answer questions, and administer a quiz. During the week students watch DIVE Math video lectures in our online eLearning Campus and complete daily homework from their Saxon textbook. Homework is uploaded to Dr. Shormann before each class. Classes are limited to 12 students. What's Included? • SYLLABUS WITH WEEKLY ASSIGNMENTS Tuition: $400 Per Course This price includes a $95 non-refundable deposit which is due with registration. Registration Opens April 1 Register online or by phone at 936.372.9216 Access your DIVE course anytime, anywhere, on any computer or device with high speed internet. DIVE courses are now available in iTunes U. After purchasing your course from our website you will be emailed an enrollment link. Instantly download DIVE courses from our website. Burn the course to a CD, save it to a USB or portable hard drive, and transfer them to any mobile device that supports Adobe FlashPlayer. Digital download versions contain all the same content as the corresponding CD-ROM but there is no CD to lose or damage. *High speed internet access is required to download the course. However, after downloading, internet access is not required. The eCourses include all the content found on the corresponding DIVE CD-ROM. Science eCourses include automated grading and grade tracking. eLearning subscriptions give you access to your course for 1 year. Subscriptions can be extended, renewed, and/or additional family members added at reduced rates. 936.372.9216 | sales@diveintomath.com After enrollment you will have access to all the DIVE lectures and material for that course, just like any song you purchase from iTunes. *HIgh speed internet is required to download the material to your device. After downloading you can view your course material anytime, anywhere! "I really appreciating your ministry. I have two sons taking your courses. I finally found what I was looking for in Science and Math. I especially like that Dr. Shormann teaches the students how to learn: define terms, lecture, take notes and practice." Esmy L. 12 Month Subscription eLearning subscriptions give you access to your course for 1 year. Subscriptions can be renewed for a sibling in later years for $20 and a sibling taking the same course at the same time is $10 Based on the true story of Dr. Shormann's research expeditions to a powerful volcano in the remote Alaskan wilderness! On June 6, 1912, the biggest eruption in over 100 years occurred in what is now Katmai National Park, and The Valley of Ten Thousand Smokes in Alaska. Ejecting over 30 times more material than Mount St. Helen's, Novarupta exploded for more than 60 hours. Catastrophic processes consistent with Biblical history are clearly revealed in the story of Novarupta. The volcano deposited ash and tephra at rates exceeding 10 feet per hour, dropped worldwide temperatures up to 2 °F, caused large parts of mountains to disappear in the blink of an eye, plus a host of other cataclysmic events. Novarupta provides many challenges to the uniformitarian assumption that normal everyday processes are responsible for Earth's surface features. It is a powerful testimony to the young and active planet we live on, a planet shaped by the hand of God as revealed in Scripture. JourneyToNovarupta.com 24 EARTH SCIENCE DIVE Earth Science will change the way you teach science. Giving your child a 21st Century education, this course will strengthen their faith in the absolute truth of Scripture as a God-inspired work that is a true account of the history of Earth and the Universe. Beautiful, engaging video lectures and labs do all the teaching for you. Students work interactively, taking notes and working along with Dr. Shormann. GRADES 7+ PREREQUISITE: Prealgebra (or Saxon 8/7) Completed or Concurrently Biblical Foundation Taught from a Biblical foundation, this course trains students to enjoy God's great Earth while equipping them to stand against evolutionism. It covers four major areas: Earth Science Basics, Flood Geology, Limnology (Freshwater Ecosytems) and Oceanography, and Astronomy and Meteorology. Video Lectures Do The Teaching for You Set up on a 32 week schedule, students complete two lectures, two worksheets, 20 definitions, and one lab each week. Every 8 weeks there is a quarterly review, which can be used as an exam for high school students. The video lectures and labs average 20 minutes each. While there are no required reading assignments, a list of supplemental resources is provided. Video Labs Spark Interest The weekly video labs teach students everything from how to use Google Earth to how to build and fly a model rocket. Many lab activities include experiments that teach the student to use the scientific method. A hands-on lab kit is available but is not required. Middle School or High School Course Typically recommended for 7th or 8th grade, this course can be modified for use as a high school course by administering the quarterly reviews as exams and adding quarterly research papers on a related topic. Optional: Lab Manual $24 A printable PDF of this lab is included with your DIVE course. We sell it spiral bound with heavy covers as a convenience for those who do not want to print the 118 pages at home. A complete college preparatory curriculum taught from a Biblical foundation 138 pages • Spiral bound with heavy covers An introductory chemistry and physics course designed to spark interest while building a firm foundation for advanced science courses. Topics include, electron configuration, chemical bonding, oxidation, balancing equations, nuclear chemistry, chemical bonds and reactions, fluid dynamics, Ohm's law, gases, and thermodynamics. Based on the scientific method, the video labs have many fun, engaging activities that draw students in and inspire them to learn more. An Advanced or Standard Course Designed as an honors course, it can also be used as a standard high school course by administering the quarterly exams as "open note". Internet Textbook The DIVE Internet Textbook contains links to complete weekly reading assignments online. If you prefer a traditional hard copy textbook, we recommend either Bob Jones Physical World, Bob Jones Physical Science, or Abeka Science and Matter, 3rd Edition. A reading syllabus that lists exactly what to read each week for these texts and many others are posted on our website under Support. Taught From A Biblical Foundation Upon completionExellent Preparation For Biology Due to the heavy emphasis on chemistry in today's biology courses, ICP is recommended before taking Biology. Physical Science Renamed Colleges have changed the name of the Physical Science requirement to Integrated Physics and Chemistry (also known as Integrated Chemistry and Physics depending on which is taught first). Instead of an earth and space course, they now require one semester of chemistry and one semester of physics. DIVE Biology is a complete, college preparatory biology course. Topics include Science and Christianity, biochemistry, cells, genetics, epigenetics, Creation/ evolution, bacteria, protozoans, fungi, plants, animals, ecology and human anatomy. The 28 video labs include all the required AP labs and emphasize important laboratory techniques used by biologists, including chromatography and gel electrophoresis. Advanced or Standard Course Designed to be an honors course, DIVE Biology can also be used as a standard high school course Textbook contains links to complete weekly reading assignments online. Easy to update, this text has the most recent scientific information. If you prefer a traditional textbook, we recommend either Apologia, Bob Jones, or Abeka. We have a reading syllabus for each text that lists exactly which pages to read each week. If we don't have one for your text, email us the table of contents and we will make one for you. Earn 8 College Credits After DIVE Biology, we recommend our CLEP Professor Biology, a three week course that prepares students for the CLEP and AP Biology exam.See page 18 for details. Apologia Users: Five weeks of human body concepts typically found in high school biology are not in this Biology text, they are in the Human Body. To complete these reading assignments , you can use the internet links provided in the course. Alternatively, you can purchase the Human Body text. We have a syllabus that lists exactly what to read from the Human Body text. 191 pages • Spiral bound with heavy covers A complete college preparatory curriculum taught from a Biblical foundation Complete One Year Course This course is available in three formats. All formats include the same components. See pages 21 & 23 for more information. CD-ROM eLearning Course Digital Download Optional Workbook: $29 A printable PDF of this workbook is included with your DIVE course. We sell it as a convenience for those who do not want to print the workbook at home. • 171 pages • Spiral bound with heavy covers Designed as an honors level course, DIVE Chemistry includes all the required AP Chemistry labs. These labs emphasize important lab techniques used by chemists, including chromotography, colorimetry, spectroscopy, electroplating, and titrations. However, this course can also be used as a standard high school course textbook contains links to complete weekly reading assignments online. Easy to update, this text has the most recent scientific information. If you prefer a traditional hard copy textbook, we recommend either Apologia, Bob Jones, or Abeka. We have a reading syllabus for each text that lists exactly which pages to read each week. If we don't have one for your text, email us the table of contents and we will make one for you. Earn 8 College Credits After DIVE Chemistry, we recommend our CLEP Professor Chemistry, a three week course that prepares students for the CLEP and AP Chemistry exam. See page 18 for details on how to earn up to 34 college credits. Apologia Users: Six weeks of concepts found in a high school chemistry course are not in the Chemistry text, they are in Advanced Chemistry. To complete these reading assignments , you can use the internet links provided in the course. Alternatively, you can purchase the Advanced Chemistry text. We have a syllabus that lists exactly what to read from textbook. DIVE Physics teaches every lesson in the Saxon Physics curriculum. It covers all the topics normally found in an AP Physics B level course including speed and velocity, torque, impulse/momentum, relativity theory, work, gases and thermodynamics, potential and kinetic energy, electricity and magnetism, circuit theory and Ohm's law, and reflection and refraction. It is also contains 23 video labs and a printable lab manual developed by Dr. Shormann to supplement the Saxon course. Advanced Placement or Standard Course This is an Advanced Placement course. However, it can be used as a standard high school course Taught From A Biblical Foundation This course also teaches science hitsotry, with a special emphasis on the distinctly Christian foundation of modern science. This foundation is lacking from secular courses and even many Christian courses, but is essential education for the informed Christian. Saxon Physics Bookset Required Because physics is math based, the Saxon method of incremental development and continual practice has worked best for our students. Therefore this course was designed to teach Saxon Physics and does not work well with other texts. The complete Saxon Physics bookset, including student text, homeschool packet with test forms, and solutions manual, are required. Earn 8 College Credits Upon completion of DIVE Physics, we recommend our CLEP Professor Physics, a three week course that prepares students for the AP Physics B exam.See page 30 for details on how students can earn up to 34 college credits for their high school courses. DIVE Physics Course This course is available in three formats. All formats include the same components. See pages 21 & 23 for more information. CD-ROM Digital Download Optional Lab Manual $27 A printable PDF of this workbook is included with your DIVE course. We sell it as a convenience for those who do not want to print the workbook at home. • 74 pages • Spiral bound with heavy covers 936.372.9216 | sales@diveintomath.com 29 CLEP Professor Earn up to 34 College Credits! Taught by Dr. Shormann from a Biblical foundation, each 3 week course prepares students to earn 3-8 college credit by exam. For questions or help, email sales@diveintomath.com 16 points to spare! Thank you Dr. Shormann for your great CDs. We have used them for all Nick's HS Maths, Biology, Chemistry and Physics with great success. We recommend these to all users out there. As always, Dr. S., you have done a great job!" Peter S. *This is the typical number of credits awarded. However, each college determines how much crediit is awarded and the course the credit is applied to. HOW DOES IT WORK? DIAGNOSTIC TEST Each CLEP Professor title has a diagnostic test that determines which of the 20 lessons to complete. VIDEO LECTURES Twenty video lectures teach every topic on the corresponding CLEP or AP Exam. Students work interactively, taking notes and working problems along with Dr. Shormann. What are CLEP and AP Exams? CLEP and AP exams, administered by the College Board and accepted by over 2900 colleges and universities nationwide, allow students to earn college credit by passing an exam instead of taking the college course. What is the difference between CLEP and AP exams? CLEP exams are amultiple choice and last 90 minutes. AP exams PRACTICE PROBLEMS WITH VIDEO SOLUTIONS To reinforce understanding, each lesson has 10-15 practice problems. have a 90-minute multiple choice section and a 90-minute free response section. Because AP exams are more rigorous, they are Video solutions are provided for each question. accepted by most colleges. COMPUTER BASED PRACTICE EXAMS After completing the prescribed lessons, take the first practice exam. Each question on the practice exam is referenced to the CLEP Professor lesson the topic was taught in, making it easy to re-learn missed concepts. Each title contains two or three practice exams. TAKE THE CLEP OR AP EXAM While AP exams are only offered in the spring each year, CLEP exams can be taken anytime at your local university or community college. You do not have to be enrolled in college nor are there any age requirements. However, a picture ID is required. EXAM SCORES HELD BY THE COLLEGE BOARD Exam scores are stored at The College Board. Upon request, exam scores are sent to prospective colleges. Colleges determine the number of credits awarded for each exam. FREE Q&A EMAIL SERVICE Dr. Shormann will personally answer any questions about your course via email.. When and where can I take CLEP and AP exams? AP exams are only administered once a year, usually in May. We recommend talking to your local Christian or public school in the fall to register. CLEP exams can be taken anytime at your local community college or university testing center. Which exams will my college accept? Visit and click on the CLEP or AP link. Since most students don't know which college they will attend until their senior year, we recommend taking each CLEP or AP exam after completing the corresponding high school course and CLEP Professor course. Even if your college doesn't award credit, good scores on these exams make your college admissions and scholarship application more competitive. 936.372.9216 | sales@diveintomath.com 31 Got Questions? We can help! Each of our sales team members have more than 20 years of experience homeschooling. Special Conference Hours Call 936-372-9216 Thursday Friday Satruday 9AM - 9PM 9AM - 7PM 9AM - 7PM Normal Business Hours Monday - Friday 9-6 Saturday 10-2 Shormann Math Algebra 1 TM 32 Coming Fall 2014TM Anchored to a Biblical, Christian foundtion, Shormann Math brings John Saxon's provenformula of incremental development with continual review, into the 21st Century!
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FAQ Algebra In A Flash is perfect for anyone who needs help with Algebra. On a typical American school day some six million high school students and over two million college freshmen who are placed in a Remedial Algebra course, can be found struggling with Algebra. Yes. The first time you run Algebra In A Flash, it asks for your name and a date and will use both entries for the name of your grade report file. For example, if you enter Uncle Sam, April 15 then the name of your grade file will be US0415. First check for an update. Math911 is a huge program and sometimes when a new topic is added it inadvertently introduces an error message. If the error persists email the Professor sending a screen shot if possible. Alternatively, call Tech Support at 347-528-7837 Feel Free to Get in Touch with Professor Weissman Tech Support Contact Info Disclaimer Professor Weissman's Mathematics Software contains NO gamelike graphics and NO animation. This Software is intended for students of all ages who want to learn mathematics, not play games. The real fun is learning.
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Synopsis So You Really Want to Learn Maths Book 2 A Textbook for Key Stage 3 and Common Entrance by Serena Alexander This book consolidates the material covered in So You Really Want To Learn Book 1 and completes the topics required for Level 2 of the Common Entrance Maths syllabus at 13+. Challenging and rigorous throughout, this book features detailed explanations and an impressive bank of practice exercises, to ensure that pupils have fully grasped all the topics covered. - Endorsed by ISEB - Clear explanations are followed by extensive practice material to ensure pupils have understood the material covered - Provides a strong emphasis on numerical work, including fractions, decimals, and algebra to give a strong grounding in mathematical knowledge An Answer Book containing answers and a mark scheme is also available to save you time marking work. Reviews Those who appreciate Book 1 will find in Book 2 an equally challenging and enjoyable experience. There is more than enough here to meet the needs of the most able pupils. David E. Hanson, Leader of the ISEB 11+ Mathematics setting team, member of the ISEB 13+ Mathematics setting team, Member of the ISEB Editorial Board These books provide a thorough grounding in maths. Detailed explanations are given through graded exercises, practical work, investigations and puzzles. The material is neatly laid-out, well organised with clear instructions and excellent diagrams, and very informative. The author even brings in fascinating snippets of history throughout the books: how the Egyptians wrote fractions, the history of the penny and of percentages, the origin of imperial units and much more. For instance, did you know that it was the Greeks who established the 'foot foot About the Author Serena Alexander has taught Mathematics since 1987, originally in both maintained and independent senior schools. From 1999 she taught at St Paul's School for Boys, where she was Head of Mathematics at their preparatory school, Colet Court, before moving to Newton Preparatory School in London. She has been a member of the ISEB setting team for mathematics, is an ISI inspector and helps to run regular mathematics conferences for prep school teachers. She has a passion for maths and expects her pupils to feel the same way. After a lesson or two, they normally do!
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Presenting an introduction to the mathematics of modern physics for advanced undergraduate and graduate students, this textbook introduces the reader to modern mathematical thinking within a physics context. Presenting an introduction to the mathematics of modern physics for advanced undergraduate and graduate students, this textbook introduces the reader to modern mathematical thinking within a physics context. Topics covered include tensor algebra, differential geometry, topology, Lie groups and Lie algebras, distribution theory, fundamental analysis and Hilbert spaces. The book also includes exercises and proofed examples to test the students' understanding of the various concepts, as well as to extend the text's themes. This is an excellent course on the pronunciation of English and very fun too. You can learn the exact sound for each letter and keep a smile throughout the entire work, something quite important dealing with a subject usually related to boring task…
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Students who do not meet the prerequisite may enrol with MAST10006 Calculus 2 taken as a corequisite. Recommended Background Knowledge: None Non Allowed Subjects: Students who have completed a level-2 actuarial studies subject will not normally be permitted to enrol in this subject Shuanming Li Contact This subject is an introduction to compound interest functions and operations; valuation of annuities, bonds and loans; demography, and factors affecting population growth and size; construction and use of the life table; applications of these in life insurance; types of insurance products; the role of the actuary; and the significance of financial institutions utilising actuarial management. Learning Outcomes: Apply relevant pre-requisite mathematical knowledge in the solution of a range of practical problems Calculate the accumulation or present value of money under compound interest Calculate the amount or present value of payments under fixed interest contracts such as loans,annuities and bonds; Solve equations of value for the effective rate of interest; Describe the factors that affect the growth and structure of populations and explain their impact on these populations;
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EGR 102Lecture 37Matrix Math Review±The horizontal lines in a matrix are called rows±The vertical lines are called columns. ±A matrix with mrows & ncolumns is called an -by-matrix ±and are called its dimensions. ±The dimensions of a matrix are always given with the number of rows first, then the number of columns. It is commonly said that an -by-matrix has an order(size) of ×. ⎪⎭⎪⎬⎫⎪⎩⎪⎨⎧=121110987654321AEGR 102Lecture 38Matrix Math Review±Almost always capital letters denote matrices with the corresponding lower-case letters with two indices representing the entries. ±For example, the entry of a matrix Athat lies in the i-th row and the j-thcolumn is written as ai,jand called the entry or (i,j)-th entry of A. ±Alternative notations for that entry are A[] or A. The row is always noted first, then the column. ⎪⎭⎪⎬⎫⎪⎩⎪⎨⎧=121110987654321Aa2,3= ? EGR 102Lecture 39Vectors±A matrix where one of the dimensions equals 1 is often called a vector±An m× 1 matrix (1 column & rows) is called a columnvector±A 1 ×nmatrix (1 row & columns) is called a rowvector { }4321=AEGR 102Lecture 310Special Matrices•Matrices where =are called square matrices. This preview has intentionally blurred sections. Sign up to view the full version.
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Math 417 Midterm 2 Study Guide Winter 2008 Content The material will be drawn from Sections 3.3 and 3.4, and from Sections 5.1, 5.2 and 5.3. You will want to review homework problems as well as the material below. You will find solutions to the odd problems (including True/False problems) on Otto Bretscher's website: Computational Problems Computing coordinates for a vector in a given basis. Exercises 1 - 18 of Section 3.4 Computing a matrix for a transformation relative to a given basis. Exercises 19-30 of Section 3.4 Computing the orthogonal projection, Exercises 26-28 of Section 5.1. You will need to know how to use Fact 5.3.10.
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This book is an ideal resource for extra classwork, homework and for use in catch-up or Summer classes. Each practice exercise delivers progression through questions which revisit and extend ideas covered in Year 8 Pupil Book 2. Maths Frameworking offers you the most comprehensive and engaging route to Framework success. "synopsis" may belong to another edition of this title. Review:58718 Damaged book. Please note this is a damaged book. It is actually new but has been damaged and therefore we are selling it considerably cheaper than the new price - so please grab a bargain. Thanks. Bookseller Inventory # CHL1630556 Book Description Collins Educational 207138821 Book Description Collins Educational 207138821 Book Description Collins Educational 207138821 Book Description Collins Educational, 2002. Paperback. Book Condition: Very Good. In VERY GOOD general condition, with some signs of previous use. Dispatched from the UK daily Another Croaking bargain from the Frog !!!. Bookseller Inventory # mon0001465169
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DUE in sections October 6 - start of class DUE as you walk in to or out of LECTURE October 10 or Larsons mailbox PAT C335 5 pm 2 participation October 12 - 10:30 am CLOSES 10:45 am Oct. 12! Start a few days ahead to get your 2 attempts at maximizing your Name _ Date _ Section_ ACTIVITY 1 Mathematical and Scientific Methods Learning Goals This activity reviews the mathematics that you may encounter in this course. This exercise will help you with tools such as working with logarithms, the small-angle formu Canvas Controls All ! Look for announcements ! Look for emails (you should be notified automatically through your MyUW email) ! Look for lectures ! Look for grades ! Look for assignments and when we do them Overview of Astronomy 101A Autumn Quarter 2016 1 BACKYARD ASTRONOMY ALERT: When the sun goes down on Monday, Oct. 3rd, step outside and look west. If you have a clear view of the horizon, you'll see Venus and the exquisitely slender crescent Moon side by side in the sunset sky. Visit Spaceweather.com fo Rotational Motion Whiteboarding Exercises (Honors) 1) A large sphere rolls without slipping across a horizontal surface. The sphere has a constant translational speed of 10 meters per second, a mass m of 25 kilograms, and a radius r of 0.2 meter. The mome Math 327 Midterm Solutions Summer 2011 1 By a homework problem, the fraction inside the cosine converges to 5/7, since the numerator and denominator are polynomials of the same degree. By the continuity lemma (since the cosine function is continuous), the Math 327A (Ward) Midterm Solutions DO NOT TURN THIS PAGE UNTIL INSTRUCTED TO BEGIN! Instructions. (1) Write your name on the line provided below these instructions. (2) Your solutions must be NEAT and LEGIBLE. (3) Show all work you want graded in this pac
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This is the end of the preview. Sign up to access the rest of the document. Unformatted text preview: Math 105: Problem Solving in Mathematics Course Description This course introduces students to the true nature mathematics, what mathematicians really do, how they think, and what they try to accomplish. The focus is on using quantitative reasoning and intuitive logical thought techniques to solve problems rather than formal rigid processes. Course Objectives The student will be able to: Be able to recognize and produce a precise and formal statement of a problem. Explore various parts of a problem, including any necessary background information, basic examples, what sort of solution is required, and what techniques might help to solve it. Demonstrate a logical reasoning process in solving problems. Be able to precisely present their ideas to others. Demonstrate an ability to understand and critique non-technical scientific writing. Course Objectives The student will be able to: Be able to recognize and produce a precise and formal statement of a problem. Explore various parts of a problem , including any necessary background information, basic examples, what sort of solution is required, and what techniques might help to solve it. Demonstrate a logical reasoning process in solving problems. Be able to precisely present their ideas to others . Demonstrate an ability to understand and critique non-technical scientific writing. First Assignment What is Mathematics? Describe what you think Mathematicians do. How do you feel about Math? Describe your experience thus far in previous Math classes. Why Solve Problems? What major world problems need solving? Why Solve Problems? What major world problems need solving? Are all of these problems going to be solved by scientists? Why Solve Problems? What major world problems need solving? Are all of these problems going to be solved by scientists? What major problems will you need to solve in your major field of study? Why Solve Problems? What major world problems need solving? Are all of these problems going to be solved by scientists? What major problems will you need to solve in your major field of study?... View Full Document This note was uploaded on 11/11/2011 for the course MATH 112 taught by Professor Jarvis during the Winter '08 term at BYU.
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In this chapter we hope to present a review of basic skills in the areas of mathematics, unit conversions, use of the metric system, an introduction to the physical nature of matter, measurement techniques, and techniques for the presentation of data. At the end of each section we will include a bibliography for those of you wishing to explore any of these areas more fully. REVIEW of MATHEMATICS Physical measurements you will perform will require accurate recording, calculation, and reporting of numbers. Numbers that we will use may be broken down into three categories: integers, real numbers, and rational numbers. We will use the symbols x, / or ÷, +, and - to denote the mathematical functions multiply, divide, add, and subtract. Equations: Just as the name suggests, equations are mathematical statements in which the equality of two statements is expressed: Example: π x 5 = 15.7 is a mathematical equation which reads Pi multiplied by five is equal to fifteen point seven (or fifteen and seven tenths). Variables: Often we do not know the values for all of the expressions in an equation, so we substitute letters or symbols in place of the numbers. Variables are also used in the writing of generic equations (formulas) into which numbers are substituted later. Example: the circumference of a circle C having diameter D is given by the equation: circumference = π x D or C D π = In this example, D is a variable and can have any positive value. When variable are not separated by an operator, it is assumed to be multiplication. Las Positas College Vacuum Technology 60A & 60B Page 7 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Formulas: Formulas are mathematical equations that have been worked out for you; all that is required to solve a formula is to substitute appropriate numerical values in place of the variables. Example: the mass flow rate of a vacuum system is given by the formula: Q = S x P Where Q= mass flow in Torr- liters per second, S= volumetric flow rate (or pumping speed) in liters per second, and P = pressure, expressed in Torr. Formulas used in simple vacuum calculations are given in appendix X, and formulas for areas and volumes of simple geometric shapes are given in the appendix Y. Exponential Notation: Often in the process of performing calculations, we are interested in multiplying a number by itself several times. Example: The area of a circle is equal to a constant (π) times the square of the radius (the radius multiplied by itself). In this example, one could write the square of the radius as: r x r, but it is more frequently written as r 2 . Here, r is the base and 2 is the called the exponent. base exponent Addition of Numbers Expressed in Exponential Notation: In order to add numbers such as 4 3 and 3 6 it will be necessary to find the value of each and then add in the usual manner. Examples: 4 3= 4x4x4 = 64 3 6 = 3x3x3x3x3x3 = 729 4 3 + 3 6 = 64 + 729 = 793 Subtraction of Numbers Expressed in Exponential Notation: Same as for addition; evaluate each exponent, then subtract. Multiplication of numbers expressed in exponential notation: Now things really get to be interesting! Numbers expressed in exponential notation that have the same base may be multiplied by simply adding the exponent. Example: 2 4 x 2 5 = 2 (4 + 5) = 2 9 Division of Numbers Expressed in Exponential Notation: In a manner similar to multiplication of values expressed in exponential notation, division of numbers having the same base may be accomplished by subtracting the exponents. 5 3 (5 3) 2 4 4 4 4 16 − ÷ = = = What about any number raised to the zero power (a zero exponent)? Examples: 3 0 = 1 76 0 = 1 Rule: Any number raised to the zero power is equal to 1. In all of the examples above both the base and the exponent are integers. It is possible that either or both could be real numbers (see the table below). Examples: 5.3 4 = 5.3 x 5.3 x 5.3 x 5.3 = 789 6 2.8 = 6 multiplied by itself 2.8 times = 151 Scientific Notation: Writing and calculating with very large or very small numbers can result in a great deal of tedium and often create opportunities for mathematical errors. One can express all real numbers in terms of a number between 1 and 10, multiplied by 10, and raised to some power. Converting from Scientific Notation: Occasionally you may wish to change a number expressed in scientific notation back to the normal form of expression. This is accomplished by moving the decimal point to the right the number of times expressed in the power of 10 for positive exponents and similarly moving the decimal point left for negative powers of 10. Examples: 5.67 x 10 3 = 5670 3.40 x 10 -4 = 0.00034 Addition of Numbers Expressed in Scientific Notation: In order to add numbers expressed in scientific notation, one must first make the power of 10 for each of the numbers to be added equal. Example: 2 x 10 3 + 5 x10 5 = 0.02 x10 5 + 5 x10 5 = 5.02 x10 5 Multiplication of Numbers Expressed in Scientific Notation: To multiply numbers expressed in scientific notation, the following rules are used: (Ax10 x ) x (B x10 y ) = (AxB) x 10 (x+y) Example: (4 x 10 4 ) x (7 x10 3 ) = (4 x 7) x 10 (4+3) = 28 x 10 7 = 2.8 x 10 8 Division of Numbers Expressed in Scientific Notation: The rules are similar to multiplication. Example: (8 x 10 4 ) ÷ (2 x 10 3 ) = (8 ÷ 2) x 10 (4-3) = 4 x 10 1 = 40 Rounding of Data and Significant Figures: A measurement was made of the length and diameter of a tube in order to calculate its volume. The diameter was measured to be 4.05 cm and its length was 83.7 cm. The geometric volume of the tube may be calculated using the formula 2 V r l π = where V is the volume of the tube, r is the radius, and L the length. Example:V = π ×(4.05cm / 2) 2 × 83.7cm = 343.222313cm 3 A comment on Significant Digits Las Positas College Vacuum Technology 60A & 60B Page 10 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Reporting the calculated volume as 343.222313cm 3 is not truthful, as it suggests that the volume is known to nine significant figures, when in fact the measurements are only known to three significant figures. The result should be rounded to 343. If the last figure to be dropped in a rounding operation is less than five, round down, otherwise, round up. A good practice to follow is to round the result of a calculation to the lowest number of significant figures used in the calculation of that result. Example: If we multiply 5.03 × 6. 7 the result is 33.701, but should be reported as 33, as there are only two significant digits in 6.7. Logarithms: Every positive number may be expressed as a power of 10. We can always find a number "p" such that the number N = 10 p . We call p the logarithm of N to the base 10 or the common log of N. Alternatively, we may write p = log 10 (N) Fairly complex mathematical expressions may be evaluated simply using logarithms. Log( A Z x B W ÷ C Y ) = Z x Log(A) + W x Log(B) - Y x Log(C) Sample Problems: 1.4 Log(2 5 × 3 2 ÷4 3 ) 1.5 Log(4 3 ) 1.6 Log(56 ×12 ) SYSTEM of UNITS While it is generally agreed that use of the International System of Units (SI units) is the best practice, you will soon find that the majority of people who work in vacuum technology use some non-SI units. Torr, for example, is much more frequently used in the USA than pascal (Pa) or millibar (mbar) as the unit for pressure. We have chosen to use SI units whenever possible, but to also follow the current conventions in the United States. Before moving on to the derived SI units, some explanation of the base units may be appropriate. Meter: The length of the path traveled by light in vacuum in the time interval 1/299,792,458 of a second. A meter is approximately 39.4". Kilogram: Equal to the mass of the international kilogram prototype. The mass of an object is related to its weight by the force of gravity given by the equation weight = mass x gravity. A kilogram is about 2.2 pounds. Second: The duration of 9,192,631,770 periods of radiation emitted by a specific electronic transition in the cesium-133 atom. Las Positas College Vacuum Technology 60A & 60B Page 12 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Ampere: The constant current which if maintained in two straight parallel conductors of infinite length and 1 meter apart in vacuum, would produce a force between these conductors of 2 x 10 -7 newtons per meter of conductor length. If one applies 10 volts across a 10Ω resistor, 1 ampere of current will flow through the circuit. Ω is the capital greek symbol usually denoting ohms, the standard measure of electrical resistance. Voltage E, Current I, and Resistance R are related by: E IR = Kelvin: The kelvin is the unit of thermodynamic temperature and is equal to 1/276.13 of the temperature of the triple point of water (temperature at which water can exist as a solid, liquid, or vapor depending upon the pressure). The melting point of ice is 273K, room temperature is 298K, and water boils at 373K. To convert from degrees Centigrade to Kelvin, add 273.15. Example: 100 °C + 273.15= 373.15K (the boiling point of water expressed in kelvin). Mole: A mole of material contains 6.023 x 10 23 particles. A mole of carbon atoms weighs 12.011g (the atomic weight of carbon). One can think of a mole as a number of objects. Just as one can have 5 pencils, one can have a mole (6.023 x 10 23 ) of pencils. Dimensional Analysis: Regardless of units nearly all physical measures in the universe have dimensions a b c M L T where M is mass, L is length, and T is time, and a, b, and c are integers. It is evident from Table 1.2 that for voltage, a=1, b=2, and c=-3. Equations can be checked for validity by ensuring these three numbers are the same on both sides of the equal sign. This is called dimensional analysis and is a useful tool The System International set of unites, abbreviated SI, has conveniently defined the internation unit of Mass to be the Kilogram, the international unit of Length to be the Meter, and the international unit of Time to be the Second. Force: That which changes the state of rest (or motion) of matter. The rate of change of momentum is a measure of force. Force = mass x acceleration In SI units, one newton is the force that will accelerate a one kilogram mass one meter per second, per second. Pressure (force per unit area). Popular units include pounds per square inch and (PSI), Torr, Bar,, atmospheres, and Pascals (Newtons per square meter). Pressure is a force distributed over an area. Absolute pressure is measured with respect to zero pressure (denoted PSIA), and gauge pressure is measured with respect to atmospheric pressure (denoted PSIG). If your car tire has about 30 PSIG, then it has about 45 PSIA (atmospheric pressure is about 15 PSI). Power: The rate at which work is done. Power in watts will be obtained if work in joules is divided by time in seconds. Power = work / time Electrical Potential: The work expended moving a charged body from point A to point B in an electric field. Electrical Resistance: For a conductor of electricity, resistance is the relationship of applied electric potential to voltage. Ohm's Law states that: 1.8 If the meter is the SI unit for length, what would be the SI unit for area and volume? 1.9 Given that Ohm's Law states that Voltage = Current times resistance, what current would you expect in a circuit when a 10mV potential is applied across a 50MΩ resistor? UNIT CONVERSIONS Often it will be necessary to change from one system of units to another. A technique for performing unit conversions is given below and tables of conversion factors, grouped by function are given in Appendix B. Let's work a simple example first, then examine the technique. If you are driving at 30 miles per hour, how many feet per second are you traveling? This problem requires that we change two sets of units; miles to feet and hours to seconds. Lets do the miles to feet conversion first. We know that there are 5,280 feet in a mile, therefore we can write: Now, let's change feet per hour to feet per second. Since there are 60 minutes in an hour and 60 seconds in a minute, we can calculate that there are 3600 seconds in an hour. This conversion factor (3600 sec/hour) will allow us to write: 158, 400 feet hour × 1 hour 60 minutes × 1 minute 60 seconds = 44 feet second Las Positas College Vacuum Technology 60A & 60B Page 16 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Now, you notice that in the first conversion (miles to feet) we multiplied the conversion factor (5,280 feet/mile) by the original value of 30 MPH, but in the second step (converting feet per hour to feet per second) we divided. The trick here is to multiply always by 1, and organize the units to cancel algebraically. Sample Problems: 1.10 Express the values in the left column in terms of the units in the right column. BASIC PROPERTIES of MATTER For the purposes of our study of vacuum technology, matter may be divided into three physical categories or states: solid, liquid and gas. Solids: The most ordered state of matter. Atoms and molecules of solids tend to remain in fixed positions with respect to one another. Solids have a definite shape and volume. Solid material may be crystalline or amorphous. Examples of crystalline solids include natural crystals, such as gemstones, and metals. Metals are typically composed of many micro-crystallites (grains) that usually require a powerful microscope to observe. Glasses have solid-like behavior (they have definite shape and volume), but on an atomic scale, there is no long-range atomic or molecular order, as exists in crystals. Glasses have been described as "super cooled" liquids. Liquids: The state of matter in which atoms and molecules are relatively free to move about with respect to one another. Liquids have a definite volume, but the shape of a liquid is defined by the walls of its container. Gas: The state of matter in which atoms or molecules move about freely with respect to one another, and tend to distribute themselves to fill any container, regardless of size. About 400 BC, Greek philosophers argued that indivisible units of matter, called "atoms" existed, and they were the building blocks from which everything was made. Current understanding of the nature of matter includes a portion of this classical atomic theory. The indivisible building blocks that our physical world is made up of are called Elements. Familiar materials such as iron, carbon, oxygen and mercury are examples of elements. Compounds, on the other hand are materials that are formed from elements through a chemical reaction. Table salt, water and methane gas are all compounds. One very interesting feature of compounds is that they are composed of elements in definite ratios. For example, water molecules are always composed of two atoms of hydrogen and one atom of oxygen. Usually the physical properties of compounds are radically Las Positas College Vacuum Technology 60A & 60B Page 17 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 different than those of their constituent elements. Water, for example, is a liquid at room temperature, and yet both of its elements, oxygen and hydrogen are gases at room temperature. Not all material we are exposed to is in the form of compounds. Mixtures are simply physical combinations of materials (no chemical reaction involved). The air that we breathe is a mixture of approximately 79% nitrogen (a gaseous element at room temperature and atmospheric pressure) and 19% oxygen (another gas under the same conditions). INTRODUCTION to MEASUREMENT TECHNIQUES There is little point in setting up an experiment, and observing some physical (or chemical) phenomena unless one is prepared to record and later report meaningful information (data). In this section we hope to provide guidelines for use in this endeavor. First of all, one must think through the entire experiment before it is started to ensure that the procedure to be followed will result in a meaningful observation. Let me give you an example. I was working on a project, the goal of which was to use the characteristic emission lines of iron to determine when a sputter-etching process had gone to completion. I was using an existing vacuum chamber with a pyrex window view port for my spectrometer. Several days of data collection and analysis provided inconclusive results, so I began to wonder what I was doing wrong. As it turned out, the pyrex window was strongly absorbing the light I was hoping to observe in the vacuum chamber. After replacing the pyrex window with one made of sapphire, the results were in good agreement with what I had expected. Before beginning an experiment, you should at least have a guess (scientists call these theories) as to what will happen. In many of the vacuum pump experiments you will perform you will be measuring the pumping speed as a function of pressure. How do you expect the pump speed to change with pressure? Will the rate of change be constant? These are the kind of questions you would do well to consider before the experimental measurement. Another aspect of good data collection technique is to repeat the measurement enough times so that you are confident in the results. Statistics: The science of the meaningful interpretation of data. Let's assume you're performing a set of experiments to determine the length of time required to pump a vacuum vessel from atmospheric pressure to 50 microns. You make four runs and the values recorded are: 124, 136, 118 and 144 seconds respectively. Average: The sum divided by the number of measurements. Average = (124+136+118+144)/4 = 522/4 = 130.5, which rounded to the correct number of significant digits is 131 seconds. Range = 144 - 118 = 26 seconds. For this very limited data set one could say that the time required to achieve a pressure of 50 microns is the average value plus or minus half the range. An acceptable way to present this data would be: Las Positas College Vacuum Technology 60A & 60B Page 18 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Average time to achieve a pressure of 50 microns starting at atmospheric pressure in a series of four measurements was observed to be 131 seconds ± 13 seconds. Notice that the measurement conditions (beginning and ending pressure), number of measurements (four), and the units (seconds) are all clearly stated. Clarity of data presentation is very important. Your work, both in this laboratory course, and in your vocation, will be judged not only on its correctness, but on the manner in which it is presented. Prior to collection of a set of measurements, set up a table to enter your data in as the experiment progresses. Columns should be provided for the variables such as time, pressure, temperature, etc. It is good practice to record along with your table of data the time and date, your name, what experiment is being performed. Graphs: Pictorial representation of data that allows one to view the relationships between variables. In this laboratory you will be constructing graphs of time versus pressure and pumping speed versus pressure. Typically, the horizontal (X) axis is used to plot the independent variable (such as time), and the vertical (Y) axis is used to plot the dependent variable (whose value depends on or is a function of the independent variable). We have created below a data table using the integers from 1 to 50 as the independent variable (X) and have calculated the dependent variable values (Y) for several simple functions. Las Positas College Vacuum Technology 60A & 60B Page 19 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Chapter 2: Safety Our concern for the safety of everyone participating in this laboratory course is paramount. To achieve this goal, the Vacuum Technology Laboratory has been equipped with such safety features as smoke detectors, automatic sprinklers, fire extinguishers, and a first aid kit. Exposure to liquid chemicals has been minimized by the use of OSHA approved containers and exhaust gases are removed through a special ventilation system. Please use these physical safety measures that have been provided as they were intended; if you do not understand their function or proper use, please ask an instructor. The information presented in this chapter is only a summary of the material we felt was most important to provide for student safety awareness. In the final assessment, each individual is responsible for the safety of everyone in the laboratory. Physical Safety Eyes: Approved laboratory safety glasses (available at the bookstore) are required to be worn whenever any experimental work is being conducted in the laboratory. If you would like to use some of the laboratory time to perform calculations or plot data, we suggest moving to the campus library (it will be quieter there anyway). Clothing: Many of the experiments involve the use of motor driven mechanical pumps. It is strongly encouraged that no excessively loose fitting clothing (ie: neckties, scarves, very loose shirt sleeves) be worn while working on this equipment. Long hair that may be caught in the pulley of a mechanical pump is also a possible hazard; please tie back or otherwise prevent long hair from being entangled in any motorized device. Skin Rupture: Sharp objects, including tools and vacuum system components may, if used or handled incorrectly result in tearing the skin. Beyond the physical discomfort of such an occurrence, there exists a real danger of injection of chemicals and infection. If a skin rupture occurs, immediately flush the area with clean water and apply pressure using a clean cloth or towel, if bleeding is profuse, notify the instructor and if necessary, go to the school infirmary. An injured person should be accompanied to the infirmary either by another student or an instructor. Sample Problem: 2.1 List three possible ways in which equipment (vacuum vessels, pressure vessels, etc.) could fail causing projectiles to be scattered in the laboratory. Electrical Safety Electric shock is a major cause of fatalities at R&D and production facilities. Surprisingly, the most likely victim of an electrical accident is an experienced person with the equipment being used. Electricity is used to power some portion of every experiment that will be performed in this laboratory course. Generally, this electrical energy is well contained, so we are protected from its effects, and may become Las Positas College Vacuum Technology 60A & 60B Page 26 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 complacent with electrical safety measures. Almost everyone has experienced a mild electrical shock. The result is an unreasonable expectation that one will survive future electrical shocks. Electricity is uniquely dangerous because it is invisible. The danger that exists is that electrical hazards may surface in unexpected locations, and be undetected. Electric Shock: Passage of electrical current through some part of the body. The current may be alternating (AC) or direct (DC) and vary from being so low in magnitude to be detected to so high as to cause fatality. Our bodies may incur damage by two mechanisms: damage to the nervous system and joule heating. Nervous System Damage: External mA range current input into the body causes pain by stimulating nerves in our skin. As applied current increases, control of muscles is lost and cramping occurs, often preventing an individual from releasing the source of current. Further damage may result if the electrical signals that control our involuntary muscles such as the heart, lungs and other vital organs is scrambled so as to prevent the proper operation of these organs. This may cause the heart to stop beating. Joule Heating: In a resistive heating element, current passing through live tissue will meet with resistance, causing heat to be generated. This heat can cause severe third degree burns along the path of the current, which may include vital organs. Sample problem:Physiological effects of electrical current passing through the body. SAFE DEFINITIONS 1 mA no physical sensation 1 to 8 mA sensation of shock-no muscle spasms (5 mA max safe current) UNSAFE DEFINITIONS 8 to 15 mA Painful shock. Muscle control is not lost. 20 to 50 mA Painful shock. Local muscle control is lost. 100 to 200mA Normal Heart beat affected. Victim holds onto current source as long as current flows. Death may result. > 200 mA Severe burns. Muscular contraction is so severe that chest muscles clamp the heart and stop it for the duration of the shock. If current continues, for several minutes, the heart may be too weak to restart after the flow of electricity is stopped. Las Positas College Vacuum Technology 60A & 60B Page 27 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 What to do in the case of a severe electrical shock: 1) Call for help immediately. Call loudly to other people in the immediate area. Have a person telephone for emergency medical services, specifying the incident and location. 2) Rescue the victim. Locate and safely de-energize the source of electrical power. Take extreme caution not to expose yourself to the electrical hazard. If necessary, use an insulated implement (dry broom handle) to remove the victim from the current source. 3) Apply CPR. Apply CPR as soon as possible if the victim is not breathing. 4) Continue to give aid. Continue CPR Until a medical rescue team arrives. Electrical shock victims have been revived from up to an hour after the electrical shock occurred. 5) Get the victim medical attention. Even if the victim appears to have recovered, a professional medical examination is required to check for invisible internal injuries. Basics of Electricity Electrical energy: The flow of electrons in a conductor. Potential: The ability of an electric field to do work; the ability to cause motion of a charge. Electrical potential is expressed in volts (V). Current: The flow of electrons; expressed in amperes (A). Resistance: The degree to which a material allows the flow of electrons; units: ohms (Ω). Power: The time rate of energy transport or transformation; watts (W). Frequency: Number of periods of a wave form per unit time; hertz (Hz). DC: Direct Current. A constant (with time) electrical potential; may be positive or negative. Las Positas College Vacuum Technology 60A & 60B Page 28 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 0 Time DC V o l t a g e AC: Alternating current. The voltage of an ac current source varies sinusoidally with time. House current is 60 cycle (60Hz) AC. Time Alternating Current V o l t a g e RF: radio frequency alternating current; typically kilohertz to gigahertz frequency. The different current wave forms have different effects on the human body. For example; AC causes heart fibrillation and muscle spasms. DC causes muscle clamping, heart seizures and burns at a higher current level than AC. RF alternating current passes through the skin readily and causes burns at much lower voltages than AC or DC. Capacitors: Electrical devices that store electrical energy. Many of the power supplies and control units used with vacuum equipment have capacitors in their circuits. Severe injury can result from coming into contact with a charged capacitor. Always assume that a capacitor is fully charged Before beginning any work with a circuit that has a capacitor, de-energize the capacitor using a grounding strap designed for that purpose. Hazards Related With Electrical Equipment Las Positas College Vacuum Technology 60A & 60B Page 29 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Fire: Many fires are initiated by electrical causes. Be familiar with appropriate electrical fire extinguishing techniques. Fire extinguishers have information on their labels regarding their proper use, read the label before the emergency. Toxic gas evolution: Electrical energy may cause the chemical breakdown of insulating materials and the decomposition of gases (creating ozone for example). In addition, older capacitors may contain toxic PCB's. X-rays: High voltage applied under vacuum will almost always result in the generation of X-rays. Appropriate shielding is necessary to reduce radiation exposure to an acceptable level. Bright light: Sparks and arcs can cause severe eye damage. Radiation: Microwave and RF radiation from electronic devices can be a health hazard, especially over a long periods of exposure. Chemical Safety Some of the materials (solids, liquids, and gases) you may encounter are chemical health hazards. Examples are chlorinated and fluorinated solvents, and mercury. Care must be taken to store, use and dispose of chemicals in a safe and environmentally sound manner. Specific details for the proper handling of chemicals must be researched using materials safety data sheets (MSDS). All chemical producers are required by federal law to supply an MSDS for their products upon request. Organic solvents: In this laboratory organic solvents are stored in OSHA approved fire safe red metal cabinets. Transfer the minimum amount of the appropriate solvent to a suitable container (ie: glass beaker) for use near the experiment. Do not expose flammable solvents to sparks, hot surfaces or open flames. Use these solvents only in a well ventilated area. Prevent exposure or contact of solvents to the skin. After use, return the unused (clean) solvent to the red metal storage can. Allow any rags saturated with solvent to dry thoroughly then dispose of in a fire safe container. Mercury: The use of mercury in vacuum technology has greatly diminished, but one should still be aware of the hazards involved with the use of this element. Mercury has an appreciable equilibrium vapor pressure under laboratory room conditions (2x10 -3 Torr). The toxic effects of mercury are cumulative, and cause irreversible damage to the brain and kidneys. Mercury should be stored in a tightly sealed non- breakable Las Positas College Vacuum Technology 60A & 60B Page 31 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 container (polypropylene) and handled so as to minimize contact with skin, ingestion and inhalation of its odorless vapor. Mechanical Safety Pneumatic Lines: Compressed air often provides a robust and compact energy source for the actuation of vacuum valves and other pneumatic devices. This is often provided at a pressure between 70 and 120 PSIG. Always wear safety glasses when working around live pneumatic lines, as plastic tubes carrying this pressure can whip through the air wildly if they become disconnected. Never attempt to cover the end of a line with your finger tip, as air can be directly injected through the skin into the body with painful or even fatal results. Vacuum Gate valves: These often generate high actuation forces and one should never reach through a gate valve without first disconnecting the pneumatics. Gate valves are often actuated with a small electropneumatic pilot valve (frequently referred to as a solenoid) that frequently require continuous power to remain open. A PG&E power failure at eactly the wrong moment could crush bone or even cause dismemberment. Thermal Safety Some of the equipment involved in vacuum technology operates at extremely high or extremely low temperatures and requires some attention to safety. Equipment operating at high temperature: Diffusion pumps and evaporation processes. Second and third degree burns may occur if skin comes into contact with this equipment. Equipment operating at moderately high temperature: Mechanical pumps, power supplies and electronic components. Equipment operating at low temperature: Cold traps(LN2), cryosorption pumps, cryogenic pumps, liquid helium lines, and helium compressors. Las Positas College Vacuum Technology 60A & 60B Page 32 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Answers to Sample Problems: 2.1 A flawed, fractured or misused glass vacuum vessel could implode; a vessel could be over pressurized, causing it to explode; volatile gases in a vessel could ignite, causing an explosion; parts of a rotating mechanical device could fail. Las Positas College Vacuum Technology 60A & 60B Page 33 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Chapter 3: Review of Basic Vacuum Calculations Before we go any further, some time should be spent on some of the vocabulary specific to vacuum technology. Vacuum technology is based upon the creation of an environment in which a process (thin film deposition, electron beam welding, etc.) can be carried out. This normally implies that one remove air from a system to some acceptable sub atmospheric pressure by the use of some type of vacuum pumping equipment. Atmosphere: The blanket of gases that surrounds the surface of the earth and extends outward to a distance of about 25 miles is referred to as "air" or "the atmosphere". This mixture of gases exerts a pressure that presses uniformly on all objects on the surface of the earth. This pressure is about 15 pounds per square inch at sea level. If we remove some amount of atmospheric gas from a leak-free vessel we will have created an environment that is drastically different in many respects: mechanically, chemically and physically. Mechanical Effects of Vacuum: Have you ever placed a half full 2 liter plastic soft drink container that is at room temperature into a refrigerator, and noticed later after it has cooled that its sides are distorted and pulled inwards? What you have inadvertently done is create a condition in which the internal pressure of the plastic container was reduced, causing its surface to buckle. Vacuum engineers are acutely aware of this phenomenon, and design vacuum vessels to be sturdy enough to withstand the external atmospheric pressure of 14.7 pounds per square inch (at sea level) in the absence of compensating internal pressure. Structures and components that are particularly susceptible to distortion under vacuum conditions include flat, unsupported surfaces, thin sections, and flexible lines or bellows. Sample Problem: 3.1 Calculate the approximate total force that will be exerted on a 4" diameter glass view port used in a vessel under high vacuum conditions. Chemical Effects of Vacuum: The removal of gases from a container will reduce the number of gas atoms that are available to interact with materials in the container. For this reason many materials that are hydroscopic (have a tendency to absorb water from the atmosphere) are stored under vacuum. Materials that readily oxidize are also often stored either under high vacuum, or in an inert atmosphere (nitrogen or argon gas) after the air has been removed from the storage vessel. Sample Problem: 3.2 List as many reactive elements or compounds that you know of which you would consider storing under vacuum or inert gas conditions. Physical Effects of Vacuum: Many of the physical properties of gases are strongly affected by the pressure of the gas. Thermal conductivity, electrical conductivity, propagation of sound, optical transmission, optical absorption are just a few. In addition to the effect of reduced pressure on the physical properties of gases, under vacuum solids and liquids also show markedly different behavior. Liquids, such as water, can be made to boil in a vacuum vessel without the application of heat. This occurs as soon as the vapor pressure of the water exceeds that of the vacuum environment.. Similarly, atoms of solid material under vacuum conditions will spontaneously leave the surface of the solid. The rate at which materials vaporize under vacuum is a function of the pressure in the system and the vapor pressure of the material. A more in-depth discussion of vapor pressure will be presented later. Sample Problem: 3.3 We have suggested that physical changes in the thermal and electrical conduction of gases are brought about by a decrease in pressure. What are the trends Las Positas College Vacuum Technology 60A & 60B Page 35 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 you would expect in these two physical characteristics as pressure is decreased from atmospheric? (Increase or decrease?) Gas Laws Gases are composed of independent, randomly moving atoms or molecules that spontaneously expand to fill any container. The collective behavior of these atoms or molecules in a contained volume can be described when one knows any three of the four following quantities: 1. Pressure: The force per unit area a gas exerts on its surroundings. (in our calculations we will use primarily Torr or atmospheres). 2. Volume: The internal capacity of a container, or vessel. (Liters) 3. Temperature: The temperature of a gas is a function of its kinetic energy, that is, how vigorously the gas atoms are vibrating. Temperature must be specified in terms of an absolute temperature scale. We will use the kelvin scale (K=°C + 273). 4. Amount: The number of gas atoms in a volume (can be in terms of atoms or moles). {A mole of material is 6.02 x 10 23 particles}. Boyle's Law: Under conditions of constant temperature, Boyle's Law gives the relationship between volume and pressure for a fixed quantity of gas. P 1 × V 1 = P 2 × V 2 Let's do a thought experiment to demonstrate Boyle's Law. Imagine a system of two leak-free vessels as shown below. Vacuum Vessel 2 TC2 Vacuum Vessel 1 TC1 Figure 3.1 Assuming that the temperature is constant everywhere in our system, and that we can accurately measure the pressure in both vessels, we should be able to apply Boyle's law to calculate the volume of vacuum vessel 2. Las Positas College Vacuum Technology 60A & 60B Page 36 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 If we know that at the beginning of our experiment the volume of vessel 1 is 120 liters, and the pressure of gas inside vessel 1 is 760 Torr, and that vacuum vessel 2 has been rough pumped to about 10 mTorr we can write: P 1 = 760 Torr V 1 = 120 Liters Now, if we open the valve between vessels 1 and 2, and allow sufficient time for the system to equilibrate, we read pressures at TC1 and TC2 to be 500 Torr. (760 Torr)(120Liters)=(500 Torr)(V 2 +120 Liters) Solving for V 2 we find the second vessel has a volume of 62 liters (note that we include the tubulation to the right of the valve as part of the volume of vessel V 2 .). Sample Problem: 3.4 What would be the volume of vessel 2 in figure 3.1 if the final pressure read on TC1 and TC2 was 350 Torr rather than 500 Torr? Charles' Law: Under conditions of fixed volume and amount of gas, Charles' Law describes the relationship between the temperature and pressure of a gas. Sample Problem: Las Positas College Vacuum Technology 60A & 60B Page 37 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 3.5 If the initial pressure and temperature of the leak-free vessel in figure 3.2 were 50 mTorr and 25 °C respectively, and the vessel was heated uniformly to 100 °C what would be the new pressure reading? The Ideal Gas Law: The relationship between pressure, volume, amount of gas and temperature of gas for "ideal" gases is given by the Ideal gas law. Fortunately, most gases behave "ideally" under subatmospheric conditions. Sample Problem: 3.6 If a 100 liter vessel at room temperature is evacuated to a pressure of 50 mTorr, how many moles of gas are in the vessel? How many molecules is this? How many molecules per cubic centimeter is this? Kinetic Description of the Behavior of Gases As the name may suggest, the kinetic theory of gases has to do with describing how gases behave under the influence of external forces that induce motion. There are four basic assumptions that provide the foundation of the kinetic theory of gases: 1) Gases are comprised of a large number of extremely small particles (atoms or molecules). 2) These gas molecules are in constant, rapid motion in a chaotic manner. 3) The distances between individual gas molecules are large compared with the diameter of the molecules. 4) The molecules exert no force on one another, or on the walls of a container except during collisions. Velocity of Gas Molecules: The speed at which gas molecules travel is independent of pressure, but is a function of the temperature and molecular weight of the gas. For most clean vacuum systems the majority of the gas load may be assumed to be nitrogen, and at room temperature the following approximation may be used to calculate the mean free path for N 2 molecules: 3 5.0 10 x L P − = L= mean free path [cm] P= pressure [Torr] Collisions of Gaseous Species: Gas molecules travel in straight lines between collisions and tend to strike all exposed internal surfaces of the vessel in which they are contained. Pressures that we measure using various types of gauges (more on this in chapter 5) are the result of the collective impacts of these gas molecules on the inner surfaces of the containing vessel. The rate of impact (or impingement rate) of gas molecules per second per square centimeter of surface area is a function of the speed of the molecules and the gas density N= molecular density, [cm -3 ] v= molecular velocity [cm/sec] I = impingement rate [cm -2 -sec -1 ] Usually, the quantities that we can easily measure are pressure and temperature, so, the same equation expressed in terms of these units is: 22 2 1 3.5 10 sec m P I x cm W T = − Sample Problem: 3.9 What is the impingement rate for nitrogen molecules on the inner surface of a vacuum vessel having a pressure of 5 x 10 -6 Torr and a temperature of 25 °C? What is I for the same system at 5 x 10 -9 Torr? Motion of Gas Molecules: As collisions occur between gas molecules and the inner exposed surfaces of a vessel, the molecules are "diffusely" reflected, that is there is no relationship between the arrival angle and the departure angle following a collision. The angle of departure from a planar surface has been studied and was observed to follow a cosine distribution as shown in figure 3.4 Figure 3.4: Cumulative probability of departure angles of gas molecules departing a smooth surface. For example, 50% of particles will depart with an angle of 30° or less. Flow of Gas Through an Orifice: Let's do another thought experiment. Imagine a leak free vacuum system comprised of two vessels separated by a closed valve. One vessel contains nitrogen gas at a pressure of 5 x 10 -5 Torr and the other vessel is under extreme high vacuum (5 x 10 -10 Torr). Both vessels are at room temperature. If we suddenly open the valve what will happen during the pressure equilibration time? Only those molecules that randomly impinge {molecular flow, right?} upon the opening between the vessels will leave the vessel at higher pressure and move into the vessel at lower pressure. Let me make the point clear by stating the reverse: those molecules in the vessel at initially higher pressure that don't impinge upon the opening between the vessels can not leave the vessel they are in. What this suggests is that the flow rate for gas molecules leaving a vessel is a function of the collision rate of molecules per unit surface area. The number of gas molecules leaving is: 2 1 4 sec Nv I cm = − The volume of gas leaving may be calculated by dividing the number of gas molecules leaving by the number of molecules per unit volume (N) The volumetric flow rate of gas through a hole is independent of the gas pressure; but depends on the gas velocity, v, which is a function of temperature and molecular weight. For the situation in which the mean free path of gas molecules is greater than the diameter of the opening in the wall of the chamber, the volumetric flow rate (s) is given by: Modes of Gas Flow Under Various Vacuum Conditions The three modes of gas flow that we will be interested in describing are: turbulent (or viscous), laminar (or transition) and molecular flow. The flow regime created when air is induced to move through cylindrical tubes is a function of the tube diameter and the average pressure. For these equations, D is the inside diameter, in inches, and P bar is the average pressure in Torr Criteria for Viscous Flow Regime Criteria for Molecular Flow Regime Criteria for Transition Flow Regime Upon initiating a pump down, the flow of gas molecules is often turbulent, exhibiting eddies and currents much like a raging rapid. Volumetric: Flow rate (S) is the volume amount of gas that passes by a point per unit time. Examples of units are: liters/second or cubic feet/ minute. The volumetric flow rate may be considered to be the pumping speed of a system at a specified point in the conductance path. Quantitative: Flow rate (Q) is the amount of gas that passes by a point per unit time. Units are: Torr-liters/second. The quantitative flow rate is also referred to as the throughput, or mass flow, and is constant everywhere in the vacuum system, unless gas is leaking or is being captured or condensed along the path. Las Positas College Vacuum Technology 60A & 60B Page 43 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 foreline valve Q Q Vacuum Chamber TC1 TC2 IG1 vent valve chamber rough valve head gate valve chamber vent DP vent IG2 TC3 Figure 3.8 Gas flowing through a vacuum system beginning at the inlet to the vacuum vessel and exiting at the exhaust of the roughing pump. At all locations in the vacuum circuit the quantitative flow rate (Q) is the same. Conductance in a Vacuum System: Gases moving through conductance elements (pipes, tubes, vessels, and orifices) in a vacuum system encounter resistance to their motion. At higher pressures, this resistance is a function pressure differnce and geometry of the conductance element. 1 2 P P Z Q − = Z= resistance [sec/liter] P= pressure [Torr] Q=flow rate [Torr-L/s] Conductance is the inverse of resistance and therefore, 1 2 1 Q C Z P P = = − C= conductance [liter/sec] Even very simple vacuum systems are comprised of many conductance elements, some are connected in series, some in parallel. Let's examine how to calculate the effect of various components in simple systems. Las Positas College Vacuum Technology 60A & 60B Page 44 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Vacuum chamber valve trap pump 90° elbow C1 C2 C3 Molecular Flow: For the situation in which the mean free path of molecules is much larger than the diameter of the conductance element, the relationships for throughput, Q and conductance, C m are given by: 3 1 2 80 ( ) m D Q P P L = − 1 2 ( ) m m Q C P P = − 3 80 m D C L = Now let's apply this information to the calculation of pumping speeds in a simple vacuum system. At any location in the vacuum circuit the volumetric flow rate or pumping speed at that point can be found if we know the pressure at that point, the pressure at the pump, and the conductance of the path connecting these two. At the chamber side of the system P 1 = Q/S t , and similarly at the pump side, P 2 =Q/S p . We will make use of the relationship between mass flow (Q), pressure drop (P 1 -P 2 ), and conductance (C): Sample Problem: 3.12 For the simple vacuum system pictured in figure 3.11, calculate the pumping speed at the chamber if the pump has a speed of 200 L/s, the pressure at the vacuum pump is 5 x 10 -6 , and the conductance element is a tube 30" long by 2" in diameter. Conductance of apertures will become important when performing vacuum system calculations when tube diameters abruptly change diameter by a factor of two or more (see picture below). While accurate equations for aperture flow are complex in the viscous flow regime, this approximation is often reasonably valid: A = Area of circular or nearly square aperture. C v = Conductance in l/s in viscous regime In the molecular flow regime the following is valid for Nitrogen near room temperature: A = Area of circular or nearly square aperture. C v = Conductance in l/s in molecular regime Before purchasing components for and building an expensive vacuum system, calculations are generally performed that provide information as to the amount of time that will be needed to evacuate the vacuum system to a certain pressure. Typically the calculation is broken (partitioned) into five or more "pressure intervals" and at each interval the conductance of the tubulation between the vessel and pump is calculated. The pump speed delivered to the vessel is calculated, and finally, the time to pump from the upper pressure limit of the interval to the lower pressure limit of the interval is computed. The calculation is performed in segments because both conductance (in viscous flow) and pump speed change as pressure decreases. Plots on the following page give the general behavior of tube conductance and vacuum pump speed as a function of pressure. Pressure Interval 1: Time required to pump from 760 Torr to 100 Torr. A. Calculate the conductance of the tube between the pump and vessel (be sure to check for viscous or molecular flow conditions). B. Use a pump efficiency curve to determine the volumetric pumping speed of the pump for the pressure interval of interest. C. Calculate the delivered pump speed. D. Calculate the time to pump from P 1 to P 2 . Experimental set-up: Select a working rotary vane mechanical pump and the appropriate gages, tubulation, and fittings to assemble a vacuum system as shown in figure 3.13 First, assemble the system with a short conductance element between the chamber and pump. Calculate the conductance of the element using formulas discussed in this chapter. Evacuate the chamber, allowing the mechanical pump to achieve its base pressure. Record P 1 and P 2 , and using the calculated value of C, and the manufacturer's value of pump speed, solve for the pumping speed at the chamber. Repeat the experiment for a much longer conductance element of the same diameter. One area of vacuum technology that has evolved rapidly in the last 20 years is the development of system hardware. Those of us that had been exposed to 1960's vintage vacuum systems can remember how crude and clumsy they were! Today, vacuum hardware is generally streamlined, attractive, and functional. We usually attribute the pleasant appearance of modern vacuum systems to 1) manufacturers who compete for the business of the user, and 2) users who desire clean, attractive systems to keep their facilities modern and up-to-date. There are other contributors, of course. And one point that needs to be mentioned is that as vacuum systems progress, their price tags also soar! In this chapter we hope to present information that will allow you to become familiar with some of the hardware that is currently in use in the field of vacuum technology. We have included by way of introduction, a set of the symbols used by the American Vacuum Society (AVS) to schematically diagram vacuum systems. This set of symbols functions much like the symbols used in the electronics field to represent electric circuits. It should be noted here, that there exists a European set of symbols that is completely different from the AVS set. The European symbols are presented in the technical reference section of the Leybold Hereaus catalog. Also covered here is material that will introduce the subject of materials selection for vacuum applications. In particular, the section on valves provides some insight into the selection of materials based upon their outgassing behavior, permeability to various gases, and mechanical strength. Since no single component stands alone, some mention of techniques used to join various components is also given. There is one laboratory exercise included in this chapter, and there are several discussion questions provided to provoke your curiosity. As you explore vacuum technology we encourage you to pay close attention to the way in which hardware is assembled and maintained. We believe that as your experience in this field increases, so will your curiosity. Stopcocks Feed-throughs rotating sliding bellows sealed electrical 2 way 2 position 3 way 3 position 3 way 2 position Vacuum Chambers Vacuum chambers come in a variety of sizes and configurations, which are generally specified to accomplish a defined task. Bench top experiments can be carried out in vessels that have volumes as small as one liter. On the other end of the physical size spectrum are vessels that are built to contain large physics experiments, such as the tandem magnet magnetic fusion experiment at Lawrence Livermore National Laboratory into which several city buses could easily fit. Material selection is also of great importance in the design of a vacuum chamber or vessel. Early vacuum experiments (around 1640) were performed in tight wooden casks. As the vacuum technology became more sophisticated, materials such as lead, copper, brass, glass, steel and recently stainless steel have been used in the construction of vacuum hardware. Las Positas College Vacuum Technology 60A & 60B Page 57 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Size: In general, there is a strong advantage in designing a vacuum vessel as small as possible without hampering the process to be run in the vessel. There are several obvious reasons for this choice. Cost of vacuum hardware generally increases rapidly as size increases. For example, a simple flange that is to be welded onto a vessel costs $20 for the 2 3 / 4 " diameter size, and $250 for the 10" diameter size flange of the exact same design! In addition to the issue of initial cost, operating costs for unnecessarily large vacuum vessels will be high due to the longer time required to achieve working pressures (dead time for operators), and increased frequency of repairs on pumping equipment. Geometry: Commercial vendors of vacuum vessels offer a wide variety of vessel shapes which are typically cylindrical, spherical or rectangular. These vacuum vessels can be grouped into the following categories: bell jars, cylinders, box coaters, "tees" and "crosses" and custom made vessels. Bell Jars: May be made from pyrex glass which is selected to resist damage from thermal shock, mechanical stress, and chemical attack. Bell jars are quite inexpensive compared to their stainless steel counterparts., and are often selected for experimental or prototype work. Pyrex glass bell jars have one clear advantage: they can allow direct observation of the vacuum environment as long as the interior of the bell jar in kept clean. Glass bell jars range in price from $350 (10" diameter, 12" tall) to $1,000 (18" diameter, 30" tall). Rubber gaskets are fitted to the base of the bell jar to provide a vacuum seal with a metal flange. Synthetic rubber materials used for bell jar gaskets include: Neoprene, Viton, and Buna. The choice of gasket material should be made according to the expected operating conditions (temperature, pressure, chemical environment, mechanical wear, etc.). Viton gaskets are the most expensive and cost approximately $200 for a 24" diameter bell jar. Glass bell jars require a safety guard, made from expanded sheet metal. The function of the guard is two-fold: to protect the glass vessel from damage, and to contain the glass in the event the vessel ruptures. Stainless steel bell jars are also commercially available, and typically come with an exterior water cooling circuit, and at least one viewport flange. Metal bell jars typically cost from $2000 (18" diameter, 30 tall) to $4000 (24' diameter, 30" tall). Some 18" diameter and smaller metal bell jars can be obtained with a metal seal "Wheeler flange" which would allow attainment of lower base pressures than polymeric seals. The most common grade of stainless steel chosen for vacuum application is 304. This material has low gas permeability, can be outgassed by heating, and resists chemical attack. Cylinders: Most cylindrical vacuum vessels are larger in diameter than they are tall, are made of 304 stainless steel, and have all-metal Wheeler flanges on their top and bottom. Quite often many ports are built into cylinders for viewports and feed throughs. Las Positas College Vacuum Technology 60A & 60B Page 58 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Box Coaters: Increasingly popular in the optics and micro-electronics industries, box coaters are often chosen for the ease in which batches of parts can be loaded and unloaded. Another advantage of box coaters is that with many standard flanges welded to the chamber's walls, reconfiguration of deposition sources, substrate holders, and process diagnostics is a simple matter. Box coaters are often made from 304 stainless steel, and have trace cooling on their exterior surface. Typically, an o-ring sealed hinged door is provided for interior access. To avoid costly down time for cleaning, inexpensive sheet metal shields are installed inside the chamber, and are removed and replaced periodically. External reinforcements are often required to supply sufficient mechanical strength to the walls of the chamber while evacuated. "Tees" and "Crosses": Many of the vacuum components vendors carry a variety of "vacuum plumbing" hardware in the form of tubes, "tees" and "crosses" with standard flanges welded on that can be easily assembled with valves, pumps and gauges to build superb vacuum vessels. Most of this hardware is made of 304 stainless steel, and is available in sizes ranging from 3/4" diameter O.D. to 10" diameter O.D. Traps, Baffles and Filters Traps: Broadly defined, a trap is any device placed in a vacuum circuit that serves to reduce the partial pressure of gas in the circuit. Traps are auxiliary capture pumps that are generally used to prevent flow of gas in an undesirable direction (as in an oil diffusion pump, see chapter 7). Traps are often placed in vacuum conductance paths between vacuum pumps and the vacuum vessel to reduce to a minimum the chance of oil back streaming from the pump to the vessel. The various mechanisms for trapping gas vapors include: adsorption, cryo-sorption, and cryo-condensation. Traps that rely upon adsorption typically are filled with material having a very large surface area to volume ratio, such as fiberglass, copper wool and micro porous material such as zeolite. Cryo-sorption traps take advantage of the fact that vapors, upon striking cold surfaces (below the boiling point of the gas at the operating pressure) will condense and effectively be pumped from the system. Liquid nitrogen (LN) is generally chosen as the coolant for these type traps. The boiling point of liquid nitrogen is -195 °C; gases having boiling points above this temperature will generally condense upon striking a liquid nitrogen cooled surface. A point of caution should be made: if the LN cooled trap is inadvertently allowed to run dry and warm up, those vapors that have been condensed will evaporate and move about the system. Many modern vacuum systems have LN traps that are automatically filled through the use of a device having a thermally actuated solenoid valve to control LN level in the trap. Be aware that these automatic systems can fail! Cryo-condensation traps make use of both cryogenically cooled surfaces, as described above, and the gas trapping effects of micro porous surfaces. Zeolite is a molecular sieve material that contains pores that are approximately 7 +/- 3 Angstroms in diameter. This pore size is optimal for trapping gases through the use of Van der Waals' attraction. Las Positas College Vacuum Technology 60A & 60B Page 59 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Maintenance of Traps: Traps do require maintenance, and if this work is carried out improperly, the effect on the vacuum system is worse than having no trap at all. Regeneration of traps is necessary because traps have a finite capacity, and will after some time become saturated with condensed vapors (oil and water, usually). Adsorption traps that are saturated must have the active element regenerated or replaced. Many of the commercial traps have quick connect fittings and are designed for easy replacement. Other designs allow for baking of the trap (150 to 300 °C is typical) to evaporated condensed vapors, or replacement of the sieve material. Cryo-condensation (LN trap) maintenance is easy- simply keep a constant level of LN in the trap. To bake out an LN cold trap, isolate the trap from the system (close the gate valve), keep the high vacuum pump operating (as well as the fore line pump), and allow the LN trap to warm to room temperature. Hot air may be blown through the LN passages to warm the trap above room temperature to speed evaporation and pumping of gases condensed in the trap. Following this bake-out simply refill the trap with LN, and allow time for condensation surfaces to cool before opening the gate valve. Cryo-sorption traps are either entirely replaced, or are isolated from the clean side of the vacuum vessel, and are baked out while under vacuum, as described for cryo- condensation traps. Quick Connect Hardware Several manufacturers produce quick connect vacuum system hardware that allows for rapid construction and reconfiguration of vacuum systems. Most of this hardware makes use of elastomeric materials (o-rings) to provide the vacuum seal. The hardware, in the form of tubes, elbows, tees and crosses is available either in plastic (high impact strength polycarbonate), aluminum, brass or stainless steel. Practical base pressures for polycarbonate and stainless steel quick connect hardware are 10 -4 Torr and 10 -6 Torr respectively. weld rings O-ring centering ring Components of a typical vacuum system quick connect assembly are shown to the left. The stainless steel weld rings are often welded to stainless tubing of the appropriate di- ameter, or are welded directly to a vacuum vessel wall. Not shown here is the clamp that is used to hold the assembly together, and provide sufficient compressive force to the O- ring to achieve a vacuum seal. Las Positas College Vacuum Technology 60A & 60B Page 60 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 This quick connect hardware is available in sizes compatible with Stainless or Aluminum tubing from 1/2" to 2" outside diameter. This connection type is often designated "NW" or "KF" with a metric size designation. For example, 1.5" diameter quick connect tubing is often designated NW-40 or KF-40. A few of the available configurations for quick connect vacuum hardware. Another type of mechanical connection frequently used employs a groove or "gland" machined into the face of one of the flanges and an elastomeric gasket, or o- ring. Compressive forces exerted on the O-ring when the two flanges are tightened together squeezes the O-ring providing the seal. An extremely light coating of O-ring grease is applied to the O-ring, not to fill voids, but to allow the O-ring to move in the groove under the applied force to achieve the optimal position for a tight seal. A general rule of thumb with respect to O-ring grease is: if you can feel the grease on the O-ring, it is too much! Several companies supply special greases that have vapor pressure and lubricating properties that are engineered for vacuum system application. An O-ring sealed flange assembly. Note that the gland is a trapezoid, and its cross- sectional area is larger than that of an undeformed O-ring. Also note that provisions have been made to pump out the vacuum side of the gland. UHV Hardware Vacuum systems designed to operate at pressures below 10 -7 Torr require special "Ultra High Vacuum" or "UHV" hardware, in the form of flanges, gaskets, hoses, bellows, tubes, viewports and the body of the vessel itself. There is absolutely no point in putting money and effort into construction of a UHV vessel if any of the components used will be inadequate to achieve the desired performance. As with many things, a vacuum system's performance will be limited by the lowest quality component on the system. This is not to say that the foreline roughing connections cannot be of lower quality components; only those components that are part of the UHV circuit need be of the highest quality. Knife Edge Flanges: The leak tight seal that is required for UHV system operation is created by compressing and deforming a soft metal gasket (usually copper) between two stainless steel flanges having recessed knife edges. The illustration below shows a typical metal sealed assembly (exploded view on the left). Knife-edged flanges are welded to tubes with the weld being made on the inside surface only to minimize virtual leaks. In the assembly of a metal sealed flange it is important to uniformly squeeze the copper gasket to achieve an adequate seal. To do this, one must carefully seat the copper gasket in the counter bore where the knife edge resides, and tighten the bolts sequentially, first tightening (snug) one bolt, then its nearest neighbor, and proceeding to tighten bolts in the same direction around the flange. Several "laps" around the flange will be required to compress the copper gasket properly. This technique is perplexing for most people who have become familiar with mounting automobile wheels. In the case of a wheel, one tightens bolts in a "star" pattern to minimize warping the rim. The goal with metal sealed flanges is exactly the opposite- it is very desirable to deform the copper gasket! internal welds copper gasket tube flange internal welds copper gasket Mass production of these UHV flanges has made them cost effective readily available, and compatible with tubing in a variety of standard sizes: 1 1 / 2 ", 2 3 / 4 ", 4 1 / 2 ", 6" and 8". It Las Positas College Vacuum Technology 60A & 60B Page 62 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 should be noted here that UHV hardware is sold under a variety of proprietary names, such as: Conflat, Del-seal, F-style, CF, FC, Vac-U-Flat, and Aflat. Gaskets used for UHV seals are typically made from high purity oxygen free copper that has been annealed to make it more readily deformable. For high temperature applications (vacuum furnaces) copper gaskets are often coated with silver to minimize oxidation of the copper. The concern here is to prevent copper oxide flakes from being formed inside the vacuum vessel. Aluminum gaskets are used in vacuum vessels constructed from aluminum to insure material compatibility. Bellows: Flexible vacuum tubing, in the form of either welded or hydraulically formed stainless steel bellows allows for isolation of vibration in vacuum systems, and reduces the mechanical tolerances to which some portions of a vacuum system must be made, reducing design, fabrication and assembly costs. Bellows must be supported on both ends, as they become compressed when evacuated. Allow room for the middle section of a bellows to move during pump down, so that it will not come into contact with other components and become damaged. When possible, avoid forcing a bellows to bend at multiple points or in more than one plane. Use a bellows with an elbow welded to one or both ends to keep the flexible section of the bellows from suffering too many bends. Flange Stainless steel welded bellows Valves Virtually all of the vacuum processes that are conducted require some means of controlling the admittance of air or process gases into or out of the vacuum chamber. Valves designed for vacuum application provide the means to satisfy this important function. An ideal valve would have the following characteristics: it would allow for the maximum amount of conductance while open, have zero conductance when closed, and no leakage of atmospheric gases into the vacuum vessel would occur due to the presence of the valve in the vacuum circuit. It would have infinite cycle life, never shed particles, be bakeable to any temperature, be lightweight and cost nothing. An equipment designer often balances real-world requirements against cost. Valves must withstand a pressure differential of 1 atmosphere (14.7 PSI) when closed. Valve designs in use today include: angle, gate, butterfly, pendulum, leak, soft vent, ball and pressure control (dynamically varying conductance). In addition to the geometry and throughput, the materials from which a valve is manufactured should be considered when selecting a valve. Valve bodies are commonly constructed from aluminum (both cast to shape and machined from bar stock) and stainless steel. Las Positas College Vacuum Technology 60A & 60B Page 63 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Aluminum: Cast aluminum valve bodies may be used in high vacuum application, but for attainment of UHV, aluminum valve bodies must be machined from solid bar stock. Aluminum valves are common on modern semiconductor process tools. Aluminum valves are generally always elastomer sealed. Aluminum offers outstanding thermal conductivity. This is a benefit when operating heated valves in the presence of condensible by-products where cleaning is periodically required. Hard-Anodized Aluminum: A popular and economical alternative to Stainless "wetted surfaces", this coating offers elevated resistance to acids and aggressive by-products. Deployment will result in a higher leak rate across the seal surface in comparison to uncoated valves. Surfaces will also outgas more, and so these surfaces are not recommended for UHV systems. Stainless Steel: The most popular, though most expensive material, stainless steel valves provide the means to achieve UHV and also resist most corrosive gases. They offer higher temperature service (usually to 200°C with elastomer seals, 300°C with metal seals) and Valves typically contain the following seals: • Two flange seals, for the vacuum connections • A bonnet seal, for service, inspection, and assembly. • A seal at the actuator mechanism, to allow motion to be passed through to vacuum • The main gate seal All these seals see static service except the gate seal which see dynamic service. All of these seals can be from Viton, metal, or perfluorelastomers (a class of chemically resistant, high temperature specialty materials). Generally, modern commercial Gate and Angle valves can reliably maintain vacuum on either side of the gate (with atmosphere on the opposite side). It is wise to check with the manufacturer if it is an older gate valve. Angle Valves: Commonly used in foreline connections, these valves may have either O-ring or metal seals. Right angle valves have low conductance for the bore size due to the 90 degree turn. Below is shown a pneumatically actuated version with spring return (normally closed) Las Positas College Vacuum Technology 60A & 60B Page 64 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Common angle valve construction Gate Valves: Are usually used for pump isolation or media transfer (such as moving wafers or other material form one chamber to another). For pump isolation, they offer highest conductance between chamber and vacuum pump. Gate valves may be of cast or machined aluminum or stainless steel. They usually incorporate elastomeric seals, while those designed for UHV applications will have metal seals. Gate valves may be manually, electrically or pneumatically actuated. Great care must be taken with these valves when connected to a source of power for operation. Several people have lost hands working on vacuum systems when a gate valve was accidentally closed with the individual's hand in the valve. Feedthroughs Vacuum processes would be severely limited without the means to bring electrical power, motion, and cooling water into vacuum systems. Similarly, the ability to move objects inside an evacuated vessel greatly enhances the capabilities of a vacuum system (depositing thin films onto all surfaces of a complex shaped part for example). Feedthroughs provide the mechanism for accomplishing these goals without compromising the vacuum environment one works so hard to achieve. Electrical Power Feed Throughs: Electrical power is introduced into a vacuum vessel from some external source by means of a well designed feed through. These devices are used when some process, such as electron beam evaporation, sputtering or vacuum brazing is being conducted. Additionally, most vacuum instrumentation, including pressure gauges rely upon electrical vacuum Feed throughs. Ceramic insulators built into the feed through prevent the dissipation of electrical energy through the walls of the vacuum vessel, and the commensurate danger of electrical shock When selecting an electrical power feed through, care must be taken to choose a unit that will be able to safely conduct the voltage and current that will be applied. A conservative safety factor is recommended. Gauge applications require feed throughs that will conduct signals of low voltage and/or low current. As with power feed throughs, correct selection in light of the process requirements is essential for optimal performance. Fluid Feed Throughs: Water, liquid nitrogen or process gases are frequently required to be admitted into a vacuum system in a controlled manner without degrading the vacuum environment. Feedthroughs designed for this application come in a wide variety. Common designs include dual line water feed throughs (inlet and outlet for water used to cool thin film deposition sources, such as sputtering guns, in the vacuum chamber ), and single line gas inlet (for introduction of a process gas). Vacuum side Atmosphere side Vessel wall O-ring Motion Feed Throughs: In order to open and close valves, move substrates, and articulate specimens under vacuum a variety of motion feed throughs are required. These feed throughs may be categorized according to the type of motion they allow. Rotary feed throughs are used for actuating the flapper in butterfly valves, linear feed Las Positas College Vacuum Technology 60A & 60B Page 67 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 throughs provide the motion required by gate valves and "wobblers" or wobble stick manipulators allow for angular motion. Some complex feed throughs provide combinations of movements such as: rotary-linear, wobble-linear, etc. Pictured above is a cross-sectional view of a simple rotary feed through. A pump-out port is provided to allow for differential pumping between the two elastomeric seals. This design rotary feed through is suitable for rough and high vacuum, but not UHV. When choosing a rotary feed through be sure to consider the maximum shaft rotary speed, maximum torque the shaft will experience, the cantilever loading, and other pertinent mechanical factors. Also to be kept in mind are the temperature requirements. Will the feed through be exposed to liquid nitrogen? Will the feed through be subjected to a high temperature bake-out? for UHV applications Ferrofluidic and bellows sealed feed throughs are available; see specific vacuum components catalogs for details on these rotary feed throughs. Rotary feed throughs are commercially available with a variety of flanges including quick-connect and all-metal sealed designs. Another consideration for your selection of motion feed throughs is the motive force that will cause the feed through to rotate, extend or retract. Most of the available models can be purchased as manual (operator hand controlled) or motorized. Motor selection is important, and should be made in light of the process requirements. Wobble-stick manipulators may be used for changing the position of parts being coated in a vacuum vessel, positioning sensors, or even pointing deposition or radiation sources inside a vessel. "Ball and socket" design wobblers (see picture below) with a stainless steel welded bellows providing the vacuum seal are common. Other types include cam and wedge designs which also employ welded bellows for the vacuum seal. Linear motion manipulators come in several sizes, geometries, and load capacities, and may be manually controlled (push-pull, rack and pinion, lead-screw) or motor driven. With all of these manipulators, care should be taken to insure that during pump down the pressure differential across the sealing surfaces of the manipulator will not cause damage to it or any other equipment. Remember that bellows if unconstrained will collapse during evacuation. Pictured on this page is a simple linear motion feed through of the manual lead-screw design. A scale ruled on the lead-screw cylinder gives an indication of the extension of the shaft on the vacuum side of the vessel. Vacuum side Atmosphere side position scale welded bellows Valve Identification and Inspection. Identify the vacuum valve you have selected. A. Valve Identification: Who is the manufacturer? What is the valve model number? Locate the manufacturer's literature from the bookcase, and find the appropriate reference information. What is the advertised conductance in viscous flow? In molecular flow? What pressure range is the valve designed for? B. Physical Inspection of the vacuum valve: Inspect the valve for signs of wear or misuse. Check the sealing surfaces, are they worn? Is the flapper actuator in good condition? Record your observations. Discussion: What are the primary drivers for the cost of a vacuum valve besides price? Where would an Angle valve be preferred over a Gate valve? A Gate valve over an Angle valve? Las Positas College Vacuum Technology 60A & 60B Page 73 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Chapter 5: Subatmospheric Total Pressure Gauges The pressure gauges that will be described in this section are used to monitor the environment in a vacuum vessel so that processes conducted under subatmospheric conditions may be understood and made to repeat. As with other topics in vacuum technology, the subject of pressure gauges can be subdivided several ways. Gauges could be lumped together based upon the pressure range in which they operate, the physical principle behind their operation, or by size, cost or complexity. We have chosen to use the time honored method of grouping gauges to be discussed primarily by the physical basis of operation. In this scheme, gauges are grouped into the following four categories: gauges that measure the physical force exerted on a surface, gauges that measure momentum transfer by gas molecules, gauges that measure heat transfer, and gauges that measure gas density by ionization of gas molecules. Examples of each of these four categories are: Experiments and processes are performed every day in vacuum vessels that have total pressures ranging from 10 -13 Torr to almost atmospheric pressure (760 Torr). This pressure range extends almost 16 decades! No one pressure gauge available can accurately measure the pressure across this enormous range. The gauges that are sensitive enough to be accurate at extremely low gas densities would be swamped if not seriously damaged if operated at pressures above 10 -3 Torr. For each of the vacuum gauges that will be covered, we will make every effort to describe the application that is appropriate for the gauge and also give useful notes on materials compatibility, mechanical durability, and susceptibility of gauges to outside influences. Force Measurement Pressure Gauges: U-Tube Manometer: Historically, the liquid level gauge was the first to be used as a means of monitoring pressure changes. Water was the liquid used initially, but its low density required that a gauge capable of measuring atmospheric pressure would be over 30 feet tall. Mercury replaced water as the higher density of mercury ( 13.6 times more dense than water) allowed for much more compact gauges to be built. The basic principle of operation of simple liquid level gauges is as follows: a "U" shaped glass tube having a vertical section one meter tall is filled approximately half way with liquid mercury. A valve on the "reference" side of the tube is opened to an operating high vacuum pump, the air pressure above the mercury is reduced to 10 -5 Torr or less, then the reference valve is closed. At this point the gauge inlet side of the U-tube may be connected to a vacuum system. If the system is initially at atmospheric pressure, the mercury column height difference, H, between the reference and gauge legs of the U-tube should be approximately 760 mm. If the vacuum system connected to the gauge inlet is evacuated, the difference in height between the two legs of the U-tube will reduce. Sample Problems: 5.1 If the height difference between the reference and gauge legs of a mercury filled U-tube manometer connected to a vacuum vessel is 100 mm, what is the pressure measured in the vacuum vessel? Las Positas College Vacuum Technology 60A & 60B Page 75 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 5.2 What are the disadvantages of a mercury filled U-tube manometer? H Reference inlet gage inlet Figure 5.2 U-tube manometer. McLeod Gauge: The pressure range over which liquid level gauges read can be extended if a sample of the gas to be measured is isolated from the vacuum vessel and compressed in a well controlled manner to amplify the force per unit area thus making the pressure easier to measure accurately. A McLeod gauge accomplishes this through the use of a movable mercury reservoir, a bulb of known volume, a set of capillary tubes and a tube allowing for connection to the vacuum vessel (see figure 5.3). Lowering the mercury reservoir will allow gas from the vacuum vessel to fill the bulb of known volume situated directly below the closed capillary. This sample of gas is then isolated from the vacuum vessel by the rising mercury reservoir at the cutoff level. At this same time, the captured gas is compressed into the sealed capillary tube. It can be shown for a calibration constant k, 2 P kh = Las Positas College Vacuum Technology 60A & 60B Page 77 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 The Bourdon Tube Pressure Gauge is comprised of a leak tight case with a glass plate in front to allow a view of the pressure indicator dial and pressure scale. The curved metal tube elastically deforms and the end deflection is proportional to the differential pressure across its wall (think of a garden hose trying to straighten out when the water is turned on). This deflection is mechanically transformed into a rotation of the indicator dial by a rack and pinion mechanism. There are several variations of the basic design, some having evacuated cases and reference tubes that protect the mechanism inside the case from the environment of the vacuum system. Small, inexpensive Bourdon tube gauges (2" diameter faces) may be accurately read from atmospheric pressure down to 100 Torr. Larger, more sensitive gauges (8-9" diameter faces) can read down to 10 Torr. Bourdon tube gauges are simple, inexpensive and relatively rugged. As such, they are often found on high vacuum systems as a means of verifying the gross pressure conditions in a vacuum system. Mechanical Diaphragm Gauge gage inlet diaphragm mechanical linkage pointer gage dial Figure 5.5 Cross-section of a mechanical diaphragm gauge. The mechanically actuated diaphragm gauge makes use of a thin flexible metal diaphragm that deflects in proportion to the pressure differential across it. By means of levers and pulleys this deflection is amplified and transformed into rotational motion of a pointer in front of a calibrated dial face. Since the gauge side of the diaphragm is exposed to the environment of the vacuum system, care must be taken to control exposure of the gauge to oils, water, or reactive gases. Las Positas College Vacuum Technology 60A & 60B Page 78 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Capacitance Diaphragm Gauge gage inlet to vacuum system reference inlet electrode diaphragm Figure 5.6 Capacitance gauge head in cross-section. Capacitance diaphragm gauges, or capacitance manometers, are another variety of pressure gauge that rely upon the pressure differential across a flexible diaphragm as a means of pressure measurement. In this gauge, the flexible diaphragm is made the variable element in a three-terminal capacitance potentiometer; for a given input voltage, the change in capacitance as a function of diaphragm deflection is measured, and translated into pressure units. The absence of mechanisms with backlash and counter forces means superior accuracy, repeatability over a mechanical diaphram gauge. Capacitance manometer heads are available in a series of sensitivities; the less sensitive models being more rugged. Some of the most sensitive units can measure pressures as low as 10 -5 Torr. These gauges measure presure as an aggregate kinetic manifestation of the molecules and hence are not gas-species sensitive. Sample Problem: 5.3 A capacitance manometer is used to measure the pressure in a vacuum vessel during a sputter deposition operation. If the process gas is changed from argon to xenon what will be the effect on the pressure reading made using the capacitance manometer? Capacitance manometers can measure pressure very accurately in the pressure range for which the head was designed. Since the displacement of the diaphragm is very small in sensitive capacitance manometer heads, the pressure readings may be thrown off by temperature changes in the environment around the gauge head. Situations to avoid include placing the manometer head next to an operating hot cathode ion gauge or a liquid nitrogen cold trap. To decrease the effects of variable room temperature on the gauge readings, some manufacturers have included heating elements in the gauge that serve to maintain a constant operating temperature. Thermal Conductivity Gauges Thermocouple Gauge: The most basic of the pressure gauges that measure the change in thermal conductivity of a gas to infer pressure is the thermocouple gauge. A constant electrical current is supplied to the filament inside the gauge to which a thermocouple is spot welded. As pressure is reduced during evacuation, fewer gas molecules impinge upon the heated filament per unit time, and the filament therefore operates at higher temperatures. Filament temperature is monitored using the thermocouple, and is transformed into pressure units at the gauge read-out dial. Since some molecules are better at acquiring thermal energy than others, these gauges are gas species sensitive. Las Positas College Vacuum Technology 60A & 60B Page 80 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 gage inlet power supply milliammeter milli- voltmeter filament thermocouple element Figure 5.8 Cutaway view of a thermocouple gauge and a schematic of the gauge and control circuitry. The operating range of most thermocouple gauges is between atmospheric pressure and 10 -3 Torr. Thermocouple gauges are very widely used in the vacuum industry due to their low cost, ease of installation, use, ruggedness, and small size. Common applications for this type of pressure gauge include measurement of the foreline pressure of a high vacuum pump. The major disadvantage of the gauge is its inherent slow response to pressure change. The pressure range of operation of simple TC gauges is from about 1 Torr to 10 -3 Torr. As rugged and reliable as these gauges are, the quality of the pressure measurement will be seriously degraded if any foreign fluid, such as pump oil is allowed into the gauge body where it may become pyrolyzed on the hot filament. Gauges are often mounted vertically with the gauge inlet pointing downwards for this reason. Sample Problem: 5.5 A thermocouple gauge is used to measure the pressure in a vacuum vessel during a sputter deposition operation. If the process gas is changed from argon to xenon what will be the effect on the pressure reading made using the thermocouple gauge? Pirani Gauge: In the Pirani gauge, the reference filament (or compensator) is enclosed in a leak tight glass envelope evacuated to a pressure of less than 1 Torr. In a similar glass envelope which is open at the gauge inlet end is housed the gauge filament. As gas density exposed to the gauge filament changes, the gauge filament, which is heated using a constant electrical current flow, experiences a change in electrical resistivity and this is measured in the Wheatstone bridge circuit and displayed in pressure units on the read- out dial. As with other gauges that measure the thermal conductivity of gases, the Pirani Las Positas College Vacuum Technology 60A & 60B Page 81 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 gauge does not read pressure changes instantaneously. Some time is required for the heated filament to respond to changes in its environment. reference fila (inside sealed tube) gage filament (inside open tube) power supply reference filament gage filament meter Figure 5.9 Pirani gauge drawing (above) and control circuit (below). Convectron Gauge: A useful (and patented) modification of the thermal conductivity gauge allows for measurement of convection currents at higher pressures, increasing the range of this gauge to atmospheric pressure. Convectron gauges typically include a gold plated tungsten sensing wire surrounded by a cylinder wound with kovar wire. This cylindrical temperature compensator helps to reduce the effect changes in ambient temperature has on the gauge readings. The large volume inside the compensator provides space for convection currents to develop at higher gas densities (1 Torr to atmospheric pressure), improving the resolution of the gauge at the high pressure end of its range of operation. Because this gauge uses convection currents to infer gas pressure, Las Positas College Vacuum Technology 60A & 60B Page 82 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 orientation of the gauge is critical. The body of a convectron gauge should always be oriented horizontally (as shown below, in figure 5.8). Gas Ionization Gauges Gas density (and pressure) may be deduced from the ability of the gas to undergo ionization caused by electron impact with the gas molecules. The ionization gauges that will be discussed here are both designed for use in the medium to ultra-high vacuum range (10 -3 Torr to 10 -10 Torr). Hot Cathode Ionization gauge: Also called the Bayard-Alpert gauge, the hot cathode ion gauge is a simple and reliable gauge that is widely used in vacuum processing industries. The triode (three electrode) design is easily understood if we examine each component independently, become familiar with its function, then see how they work together. The filament is usually a thin ribbon of tungsten which is in the shape of a coil or inverted "vee". Low voltage electric current from the gauge power supply is passed through the filament which heats up much like the filament in an incandescent light bulb (operating temperature of a gauge filament is almost 1800°C). In addition to heat and light, the filament emits enormous quantities of electrons which can collide with gas atoms and in that collision, eject an electron from the gas atom making it an ion. Electrons from the filament are attracted to a helical "grid" or electron collector which is maintained at a positive voltage of approximately 150V with respect to the filament. The additional energy input into the electrons by the electron collector bias is to insure efficient ionization of gases in the gauge. Finally, the gas ions created are collected on an ion collector operated at zero volts with respect to the electron collector. Las Positas College Vacuum Technology 60A & 60B Page 83 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 nucleus orbiting electrons + incident electron from filament ejected electron The operating range of hot cathode ionization gauges is from 10 -3 Torr to 10 -9 Torr. These gauges are small in size, relatively easy to operate and accurate to +/- 10% of Las Positas College Vacuum Technology 60A & 60B Page 84 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 the reading in the pressure range in which they are designed to operate. Volatile contaminants (hydrocarbon oil, process gases, etc.) may impair proper operation of the ion gauge. If this occurs, one may restore the gauge by performing a "degassing" operation in which current is supplied to the gauge electrodes to drive off the unwanted contamination. Most commercial ion gauge control units provide for "degassing" operation and also prevent operation of the gauge at a pressure at which the gauge would be damaged. Response time of ion gauges is quite fast, and this attribute is used for process control and vacuum system Two common configurations of hot cathode ionization gauge are shown in figure 5.10. The nude gauge is less frequently used, as it protrudes into the vacuum system and may interfere with the process being conducted. Cold Cathode Ionization Gauge Operating in the medium to high vacuum range (10 -3 Torr to 10 -8 Torr), the cold cathode ionization gauge uses electrons emitted from electrodes maintained at electrical potentials of 10,000 volts to ionize gas in the gauge body. Ejected electrons are forced to orbit in a helical path by a strong magnetic field provided by the external permanent magnet. This increases the probability that gas molecules will be struck by orbiting electrons and become ionized and subsequently "counted". Power supply milliammeter cathode cathode anode to vacuum system N S Figure 5.13 Cold cathode ionization gauge. Las Positas College Vacuum Technology 60A & 60B Page 85 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 The accuracy of cold cathode gauges is severely impaired by a dirty environment, as the number of electrons emitted from the cathodes is strongly dependent upon the cathode surface condition. Some models of cold cathode gauge may be disassembled for cleaning, but great care must be used during reassembly, as misalignment of the electrodes or magnet can cause the gauge to give inaccurate pressure readings. Momentum Transfer Pressure Gauges Spinning Rotor Gauge (SRG): In the spinning rotor gauge, the drag caused by gas molecules hitting the surface of a magnetically levitated spinning steel sphere is used to infer gas pressure. The control unit for the SRG brings the levitated ball to a rotational velocity of approximately 400 RPM using a set of electromagnetic coils. Once the rotational speed is constant (as measured by a set of detector coils), the accelerating coils are turned off, and the steel sphere is allowed to "coast". The rate at which the rotation of the ball decreases is a function of the gas density and composition. levitating magnets spinning ball conflat flange to vacuum vessel Figure 5.14 Cutaway view of a spinning rotor gauge. The pressure range of the SRG is from 10 -2 Torr to 10 -7 Torr. As the gauge is delicate, expensive, and requires several minutes for each pressure reading, its primary use is found in calibration of other gauges, and in precise vacuum measurements. 5.2 There are some distinct disadvantages to the U-tube manometer that explains why they are not widely used. The pressure range of U-tubes is limited; carefully constructed models can only read pressure from atmospheric down to about 1 Torr. Mercury has the obvious health and safety concerns, but also may cause problems if the process being measured reacts chemically with mercury vapor. Other concerns include the substantial equilibrium vapor pressure of mercury at room temperature and the fragile nature of the glass tubulation. Laboratory Exercise 5.1: Pressure Gauge Identification and Inspection Identify the vacuum gauge you have selected for this exercise: A. Gauge Identification: What is the principle of operation? Who is the manufacturer? What is the gauge model number? Locate the manufacturer's literature from the bookcase and find the appropriate reference information. What is the advertised pressure range? Is the gauge gas specific? Are there any calibration curves available to aid in understanding the performance of the gauge as a function of pressure or gas specie? B. Physical Inspection of Pressure Gauge: Inspect the gauge for signs of wear or misuse. What type of vacuum connection is provided? Is this connection appropriate for the application the gauge was designed for? Locate the gauge control unit and/or power supply (if applicable). Check electrical cables of the power supply for cracks in insulation. Laboratory Exercise 5.2: Operation of Spinning Rotor Gauge Before beginning this procedure, read the operating manual carefully. Procedure: Assemble an operating vacuum system capable of attaining a pressure of 10 -5 Torr or lower using an ion pump as the high vacuum pump. Operate the SRG following the instructions in the manual. Discussion: • What assumptions did you make in the gauge calibration? • How did the gauge perform compared to the hot cathode ion gauge? • Can you explain any inconsistencies you observed? Las Positas College Vacuum Technology 60A & 60B Page 87 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Chapter 6: Mechanical Vacuum Pumps In this chapter we will review the principles of operation of several commonly used mechanical vacuum pumps, provide information on the performance and typical applications, and describe appropriate preventative maintenance techniques. This chapter also includes several laboratory procedures that are designed to aid in your understanding of mechanical vacuum pumps. Positive gas displacement pumps of one type or another have been used since 1640! Almost all of the very early pumps used liquid mercury within glass tubes and vessels to create a vacuum. For an excellent review of this early technology, read the History of Vacuum Science and Technology, edited by T.E. Madley and W.C Brown, published for the American Vacuum Society by the American Institute of Physics. Modern mechanical pumps may well be considered the workhorses of vacuum technology; they are simple in design, require little maintenance, are relatively inexpensive, and can operate for long periods of time without failure. Several mechanical vacuum pumps that we are aware of have operated continuously for fifteen years with only occasional oil changes! The range of pumping speeds for commercially available pumps runs from about 0.5 liters per second to over 300 liters per second. Mechanical vacuum pumps fall into two basic categories: reciprocating pumps, and rotary pumps. Further distinctions for mechanical pumps include: the number of stages (single stage or compound), the use of oil in a pump (pumps may be oil sealed or "dry"), and the means of driving the mechanics of a pump (direct drive or belt drive). Below is a brief outline of the types of modern mechanical vacuum pumps. For this laboratory, we will concentrate on two oil sealed mechanical pumps: the sliding vane rotary pump, and the rotary piston pump. Theory of Operation Mechanical vacuum pumps work by the process of positive gas displacement, that is, during operation the pump periodically creates increasing and decreasing volumes to remove gases from the system, and exhaust them to the atmosphere. In most designs a motor driven rotor spins inside a cylindrical stator of larger diameter. The ratio of the exhaust pressure (atmospheric) to the base pressure (lowest pressure obtained at the Las Positas College Vacuum Technology 60A & 60B Page 88 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 vacuum pump inlet) is referred to as the Compression Ratio of the pump. For example, if a mechanical vacuum pump obtains a base pressure of 15 mTorr, its compression ratio is: 7 60 Torr 0.0 15 Torr = 5 1,0 00 Another more common way to state this is to say that the pump has a compression ratio of 51,000:1. At pressures above 1 Torr, rotary mechanical pumps have a fairly constant pumping speed. The pumping speed decreases rapidly below this pressure, and approaches zero at the pump's base pressure. Most manufacturers of mechanical vacuum pumps will include in their product literature information on the pump's performance including a pump speed curve. 1000 100 10 1 .1 .01 .1 1 10 100 Pressure [Torr] P u m p S p e e d [ L i t e r s / s e c ] Rotary Vane Mechanical Vacuum Pumps Rotary vane pumps typically have an electric motor driven rotor (either belt or directly driven) which has one to three sliding vanes that maintain close contact with the inner wall of the cylindrical stator. The vanes are metal in oil sealed pumps, and carbon in dry pumps. Centripetal force acts upon the vanes in the spinning rotor so as to force them against the inner sealing surface of the stator. In some mechanical pumps springs are used to augment this action. Rotary vane pumps may be of the single or double stage design. Single stage pumps are simpler, having only one rotor and stator, and are less expensive. The base pressure one can expect from a good single stage mechanical pump is about 20 mTorr. In a two stage design, the exhaust port of the first stage is connected to the inlet port of the second stage which exhausts to atmospheric pressure. Two stage pumps may attain a base pressure of one to two millitorr, but are more expensive than single stage pumps. Las Positas College Vacuum Technology 60A & 60B Page 89 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 1 2 In the figure above are simplified drawings of a single stage oil sealed rotary vane mechanical pump (left) and a two stage, or compound pump of the same type. In the compound design the high vacuum side of the pump (stage labeled 1) operates at a lower pressure due to the lack of exposure to high partial pressures of oxygen in that stage. It should be noted that supply of very little or no oil to the first stage of a compound pump in order to achieve even lower pressures can, in practice, lead to severe difficulties in the reliable operation of a compound pump. The oil in an oil sealed pump serves three important functions: A) providing a vacuum seal at the pump exhaust, B) as a lubricant and C) provides cooling for the pump. 1 2 3 4 Las Positas College Vacuum Technology 60A & 60B Page 90 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 In this figure, and on the following page sequences in a single pump cycle of a rotary vane pump are shown. Note how the rotor vanes work with the stator to create increasing and decreasing volumes on each stroke. 7 5 6 8 Also note how the gas discharge valve opens and closes on each cycle. Belt driven rotary vane pumps typically operate at about 400 to 600 RPM, while the direct-drive models spin at 1500 to 1725 RPM. Most failures in rotary vane pumps can be attributed to poor oil maintenance. O'Hanlon states that 95% of all mechanical pump problems can be resolved by flushing the pump and changing the oil. Because of the close tolerances between the rotor vanes and the stator, solid particulate matter entering the pump is likely to cause scoring of the vacuum sealing surfaces, resulting in a decrease in pump performance. For this reason, precautions should be taken to minimize intake of particulates. Several manufacturers produce small screens and filters that fit on the inlet of a pump to accomplish this. Sample Problems: 6.1 What is the principle by which positive displacement pumps operate? 6.2 If a mechanical pump achieves a base pressure of 30 mTorr, what is the compression ratio of the pump? 6.3 What are the three functions of the oil in a mechanical vacuum pump? Las Positas College Vacuum Technology 60A & 60B Page 91 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Rotary Piston Mechanical Vacuum Pumps Rotary piston (or rotary plunger) mechanical pumps like that to the left also operate on the principle of positive displacement of gas. On each cycle the rotating eccentric piston and the sliding valve work together to suck gas into the stator, compress it, and expel the gas to atmosphere. As with rotary vane pumps, rotary piston type pumps may be single stage or compound. Rotational speed is typically 600 to 800 RPM. Dimensional tolerances between the stator and piston in pumps of this design are usually 0.003 to 0.004". Because of this, piston pumps are more tolerant of particulate contamination that rotary vane pumps. Higher viscosity oil is used in rotary piston pumps due to the larger dimensional tolerances. Large rotary piston pumps are often water cooled to increase pump life and performance. Mechanical Vacuum Pump Fluids Selecting the appropriate pump fluid is as important as choosing the right pump. In today's vacuum technology, many processes are not compatible with typical hydrocarbon pump oil. For example, if you're running a process in which a significant amount of oxygen is used, a synthetic pump oil that is much less reactive with oxygen is the preferred choice. In this example, if hydrocarbon oil is chosen, the potential for creating an explosive mixture of oxygen and hot pump oil vapor exists. Likewise, if a process involving the use of corrosive gases is being run, you should think about the chemical reactivity of the process gases being pumped that will be exposed to mechanical pump oil vapor. Fluorocarbon pump fluids may be chosen for an application such as this due to their low chemical reactivity. Under certain circumstances, you may wish to operate a mechanical pump with fluid of higher viscosity. For this purpose, the clearances between moving parts may need to be increased. Pumps that are modified for special service should be permanently labeled to let future users know of the modifications and application. Las Positas College Vacuum Technology 60A & 60B Page 92 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 One last word on mechanical vacuum pump fluids-research the characteristics of a fluid carefully before using it. Many of the current commercially available fluids will not operate well when mixed with one another! For a good review of mechanical pump fluids, see O'Hanlon's A User's Guide to Vacuum Technology, page 163. Dry Mechanical Vacuum Pumps In recent years, the concern over mechanical pump fluids (from both safety and vacuum system contamination standpoints) has become a great concern. Vacuum pump manufacturers have responded by developing and marketing oil-free mechanical roughing pumps. These pumps have, for some applications, very appealing characteristics, but there are a few drawbacks of which to be aware. The advantages of dry pumps (usually of the rotary vane design) are that they eliminate the possibility of backstreaming pump oil into your vacuum vessel. In addition, dry pumps may be used to safely pump large percentages of oxygen without fear of explosion. Dry pumps are also well suited for pumping of certain corrosive vapors and gases. Disadvantages of dry mechanical vacuum pumps include their initial high cost (as much as 5 times the cost of a oil-sealed pump of equal capacity), excessive noise, and higher ultimate pressure. Identify the mechanical vacuum pump you have selected for the next three exercises: Is the pump of single stage or compound design? What is the rotational speed? What is the suggested volume of pump fluid? B. Physical Inspection of Mechanical Pump: Inspect the pump for signs of wear or misuse. Check electrical cables for cracks in insulation. Are the prongs of the electrical Las Positas College Vacuum Technology 60A & 60B Page 93 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 plug bent or missing? Check the pump fluid. Is the fluid transparent or milky; is the fluid level correct? If the pump is a belt-driven model, is the belt tensioned correctly, and is the belt worn? Is the safety cover in good condition? Locate the gas ballast, inlet and exhaust ports. Is everything as expected? Once you have carefully inspected the pump and corrected any problems, cap off the pump inlet and operate the pump briefly. Record your observations. {Please prepare a written laboratory report on this and each of the following exercises using guidelines presented in the section called "How to Use This Manual"} Laboratory Exercise 6.2: Mechanical Pump Ultimate Base Pressure. The two operational characteristics that define the performance of a mechanical vacuum pump are: 1) the ultimate (or base) pressure, and 2) the pumping speed. In this exercise, you will determine the base pressure of your pump, and compare these results with the manufacturer's specifications. Procedure: A. Measurement of ultimate pressure. Place a valve on the inlet of the mechanical pump. Devise a manifold so that a thermocouple gauge (or pirani gauge) can be installed somewhere near the pump inlet. Close the valve, and turn the mechanical pump on. Observe the pump's behavior. Once you're certain the pump is operating properly, open the valve, and allow the pump to base out (achieve its ultimate pressure). This may take 15 to 20 minutes. Record the ultimate pressure. How does your reading compare with the manufacturer's specification? If there is a discrepancy, what do you attribute it to? TC1 A schematic of the experimental set-up for part A of Exercise II is shown to the left. Attach a suitable vacuum vessel having a volume of from 50 to 100 liters to the manifold assembly used in part A. Place a second thermocouple gauge on a port of the vacuum vessel; connect all required read-outs to the vacuum gauges. Before beginning this procedure the vacuum pump should be running, and base pressure should be read at gauge TC1, the valve to the vacuum vessel should be closed, and the vessel at atmospheric pressure. In the next step, the pressure as read at the vacuum vessel (TC2) will be recorded as a function of time. We suggest taking pressure readings every 30 seconds for the first five minutes, then recording pressure at one minute intervals until base pressure is achieved in the vacuum vessel. The table to plot your data is on the following page. This data will allow you to plot vessel pressure as a function of time on semi-logarithmic graph paper. Label your graph with all pertinent pump data. Now vent your system to atmosphere, and leave it open for one minute. Repeat procedure 6.2-B. Plot the data collected for this second pump down measurement as you did for the first measurement, and compare the results. Is there a noticeable difference between the two curves? Would you expect a difference? What would you attribute this behavior to? The table to plot your data is on the following page. Remember the first (and easiest) way to test the integrity of a vacuum system is to check its ultimate pressure, and the time required to reach this pressure. {Hint: after characterizing the pump down behavior of your clean, dry and empty vacuum system, plot the data as time vs. pressure and file that information away for future reference. Your curve becomes an excellent tool for gauging the performance of your vacuum system}. The manufacturer's listed pumping speed for any given pump is usually the free air displacement at STP (standard temperature and pressure). As pressure decreases from atmospheric, there will be a reduction in the amount of gas pumped per unit time (mass flow rate). The pumping speed (volumetric flow rate) will decrease only slightly until a pressure of about 1 Torr is attained. Below this pressure, the decrease in pumping speed becomes more rapid, depending upon the type of mechanical vacuum pump, and falls to zero at the ultimate pressure. We can determine the speed of a pump by measuring either pumping speed under constant volume or constant pressure conditions. The constant volume technique is generally used in the pressure range between atmospheric and one Torr. In this method, you will measure the time required to reduce the pressure in a vessel a specified amount. The pump speed in that pressure range is then calculated using the equation: S p =2.3 V t 2 −t 1 | \ | . | Log 10 P 1 P 2 | \ | . | | V = volume of vessel [liters] t 1 = time at pressure P 1 [seconds] t 2 = time to reach pressure P 2 from pressure P 1 [seconds] In contrast to the constant volume method, the measurement of pumping speed at constant pressure is typically performed in the pressure range between one Torr and the mechanical pump's ultimate pressure. To determine pumping speed by the constant pressure method, a measured amount of gas (Q) is admitted to the vacuum system being pumped to establish a constant pressure P. Pumping speed is then obtained from the equation: 6.3-A. Pumping Speed by constant volume method: For this exercise, you will need a functioning rotary mechanical pump, a vacuum chamber, a valve, and at least one vacuum gauge capable of reading from atmospheric pressure to about one Torr. Vacuum Vessel TC1 Install the valve between the chamber and the mechanical pump using the minimum amount of connecting line to reduce conductance losses. Begin this exercise with all valves closed and the vessel at atmospheric pressure. Start the mechanical pump, and after it has warmed up, open the valve to the vacuum vessel and Record the time required to achieve a pressure of 100 Torr as read with the pressure gauge mounted on the vessel. Repeat this measurement until you are confident in the consistency of your readings. Now record the time required to pump from 100 Torr to 10 Torr, exactly as was done before. And finally, record the time required to pump from 10 Torr to 1 Torr. Table to record your data is on the following page. Now plot the calculated pumping speed as a function of the average pressure for each of the four pressure regimes in Table 6.3-A.2. Following your splendid success in this measurement, replace the vacuum vessel in your system with another vessel of significantly different volume. Repeat the measurements performed and plot the data. How do the speed vs. average pressure curves compare? Is the behavior as you would expect? Why or why not? Discussion: Is it possible to make your plots more representative by using shorter time increments? What are the drawbacks (if any) for this idea? How do the speeds that you have calculated compare to those listed by the manufacturer for this pressure range? Is there any significant difference in speeds calculated for the two vacuum vessels of differing volumes? 6.3 B: Measurement of pumping speed by the constant pressure method. For this portion of the exercise, you will need a mechanical vacuum pump, a vacuum valve, a variable leak valve, an atmosphere valve, a vacuum vessel, a flow indicator and a pressure gauge capable of reading pressures from one Torr to about one millitorr. Vacuum Vessel TC1 TC2 atmosphere valve pipette Install the pump valve at the pump inlet. Place the pressure gauge on the vacuum vessel, and install the variable leak valve on the chamber also. The flow meter must be plumbed to the inlet of the leak valve and the atmosphere valve must be plumbed to the flow meter. Confused? Follow the diagram and have a lab instructor check your setup before you begin. Initial conditions should be something like this: mechanical vacuum pump is off, the valve between the vessel and pump is closed; the vessel is at atmospheric pressure; the leak valve is closed. Start the mechanical pump, and allow it a few minutes to warm up to operating temperature. Open the valve between the pump and vessel, and allow the pressure to be reduced to a stable base pressure (~20 mTorr). Las Positas College Vacuum Technology 60A & 60B Page 100 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Once a stable base pressure is achieved, with the atmosphere valve open, slowly open the calibrated leak valve until you notice a slight rise in vessel pressure. Observe this pressure (~100mTorr might be a good initial value) for a little time to insure that the system is stable at this pressure. Close the atmosphere valve, and observe air being drawn into the vessel through the flow meter. Fluid will rise in the volumetric burette to replace air being pumped out of the system by the mechanical pump. We now know that the air being leaked into the chamber is at atmospheric pressure, we know the volume being leaked in per unit time, and we know the pressure inside the vacuum chamber. We are now prepared to calculate the rate at which the vacuum pump is removing air from the chamber using the equation: Repeat the procedure for various pressure values between one millitorr and one Torr. Try to get at least five stable readings. Plot your calculated data as pump speed (S P ) vs. pressure. Be sure to include all pertinent data regarding the experiment. Discussion: How do the speeds you have calculated compare with those listed in the vacuum pump manufacturer's literature? What would be the effect of using a vessel having twice the volume on the pumping speed? It wasn't that long ago when you could walk into any vacuum laboratory and find a vapor diffusion pump on every system. Vapor diffusion pumps were first conceived about 1915-16, and used mercury as the pumping fluid. A decade later, experimenters found that some oils had high boiling points and low vapor pressures and were good pumping fluids. These oils were useful because they remained in the pump indefinitely and allowed lower pressures to be attained without the use of a cold trap. During W.W.II, and again during the 1960's for the space effort, diffusion pumps went through some significant design changes that increased their pumping speed, increased their ability to produce lower pressures, and oils gave way to synthetic pumping fluids. Due to it's simplicity, high performance, and low initial cost, the diffusion pump remains the primary industrial high vacuum pumping mechanism. Applications for this type of pump are found in R&D labs, coatings facilities, manufacturing, and space simulation. When diffusion pumps are used with the correct fluid, traps, and baffle, they can produce pressures to approximately 2*10 -10 Torr. Theory Of Operation Diffusion pumps are vapor jet pumps that work on the principle of momentum transfer. This occurs when a heavy, high speed vapor molecule collides with a gas molecule and moves it in a preferred direction through the pump. The bottom of the pump contains an electric heater which is used to heat the pumping fluid to it's boiling point, thus, producing the vapor. This must be done at a reduced pressure. This means that before the diffusion pump is started, it must be "rough pumped" down to an acceptable pressure, typically 100 millitorr. To do otherwise will result in no pumping action and possible damage to the pumping fluid. Once boiling of the fluid has begun, the vapor is forced up the central columns of the jet assembly. It then exits at each downward directed jet in the form of a molecular curtain that impacts the pump body. The pump body is externally cooled so that the fluid will condense on its inside surface and run back down into the boiler. Pump bodies are typically water-cooled, but some are air-cooled. As gas molecules from the system randomly enter the pump (molecular flow conditions), they encounter the top jet. Some of them are impacted and driven on to the next jet. Subsequently, they reach the foreline where they are exhausted to the atmosphere by the mechanical backing pump. Compression Ratio The diffusion pump is similar in character to other compression pumps in that it develops a relatively high exhaust pressure compared to the inlet pressure. For most gases this compression ratio may be one million to one (or greater). For example; for an inlet pressure of 2*10 -7 Torr and a foreline pressure of 2.0*10 -1 Torr, the compression ratio would be one million. As far as compression goes, in a mixture of gases, each species may be pumped with different effects. It is possible to have different maximum compression ratios and different flow rates for gases having different molecular weights. For example, the compression ratio for hydrogen will differ greatly from the compression ratio for argon simply because their molecular weights are very different. Also, when the pumped gas has a molecular weight different from air the maximum compression ratio Las Positas College Vacuum Technology 60A & 60B Page 102 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 will shift, but the tolerable foreline pressure (critical discharge pressure) remains the same. Critical Discharge Pressure The critical discharge pressure of a diffusion pump is the maximum permissible pressure at the foreline during normal pump operation. The expected pumping action of a diffusion pump ceases when the critical discharge pressure is exceeded. That is, the vapor of the discharge stage of the pump does not have sufficient energy and density to provide a barrier for the air in the foreline, thus, this air will flow through the pump in the wrong direction carrying with it the pumping fluid vapor. For most modern diffusion pumps, the maximum allowable foreline pressure is about 0.5 Torr. Diffusion pumps cannot function at all unless the foreline pressure is held below this limit by the backing pump. The most important rule of diffusion pump operation is: Do not exceed the critical discharge pressure! If this single most important rule is observed, then most difficulties associated with diffusion pump operation can be eliminated. Backstreaming Backstreaming can be defined as the passage of the pumping fluid through the inlet port of the pump and in the direction opposite to the direction of desired gas flow. However, backstreaming must not be limited to the pump, but must include the trap, baffle, and plumbing as well because all affect the transfer of pumping fluid vapors from the pump body to the chamber. There is a multitude of conditions that can cause backstreaming. The most common are; exceeding the critical discharge pressure in the foreline, exceeding maximum throughput capacity for long periods of time, and incorrect start-up or shutdown procedures. Backstreaming of pumping fluids into your work environment is always considered catastrophic. I know of very few vacuum related processes in which oil contamination is not a disaster! My suggestion to system operators is to know their equipment thoroughly and learn proper operating techniques. Ninety-nine percent of costly backstreaming problems are due to operator error. Finally, equip your system with the appropriate interlocks that will prohibit valve cycling above a specified pressure. This will protect your system whenever it is left unattended. Baffles And Traps Baffles have one particular purpose: to reduce the backstreaming of pump fluid into the vacuum chamber. Most baffles are "optically opaque" which implies that their internal geometry is such that light cannot pass directly through them. This insures that a molecule will collide at least once with a surface regardless of the incoming direction. Baffles do impede the flow of pumped gases, but well designed units can retain about 60% of the pumping speed. Baffles are installed directly above the pump inlet and are often used in conjunction with a trap. Water-cooled baffles can reduce the rate of reevaporation of condensed fluid thereby reducing the density of vapor in the space between the baffle and the trap. See illustration for several baffle designs. Cryogenic or refrigerated traps serve two purposes. They act as barriers against the flow of condensable vapors from pump to system; and they also serve as cryopumps for condensable vapors (primarily water vapor) emanating from the system. In typical unbaked systems, water vapor may constitute about 90% of the remaining gas after initial evacuation. Chilled traps increase the pumping speed for water vapor and therefore can in many cases lower the base pressure of your system. I know of two Las Positas College Vacuum Technology 60A & 60B Page 103 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 distinct varieties of liquid nitrogen traps. One is a trap that is placed anywhere within the vacuum chamber. This may be a cryopanel, a sphere or cylindrical bottle, or a tubular arrangement acting as a "cold-finger" on which condensable gases will be trapped. The other is of the optically opaque design and is placed between the chamber and the pump inlet. These traps insure that gas molecules collide at least once with a cold surface. Vacuum chamber Liquid nitrogen cold trap Chevron baffle Diffusion pump Figure 7.1 Configuration of traps and baffles used on diffusion pumped systems. Fluids Many of the pumping fluids used today have been developed within the last 30 years. Up to about 1960, most fluids had a vapor pressure of 10 -7 Torr or 10 -8 Torr and the base pressure of the system was limited to that range. The choices of pumping fluids became greater after Hickman publicized the used of polyphenyl ethers which offered exceptional thermal and chemical stability. Operational characteristics of another low vapor pressure silicone fluid (DC705) were also found to be excellent. The use of either of these fluids will permit base pressures of 10 -9 Torr or 10 -10 Torr to be achieved. More recently, fluorinated oils have been developed for use in diffusion pumps. These have the added advantage of compatibility with corrosive gases used in some processes. Ultimate Pressure Two distinct observations can be made regarding the ultimate pressure of a diffusion pump. Ultimate pressure may be considered to be a gas load or a pressure ratio limit. The pressure ratio limit is usually associated with light gases (hydrogen, helium, xenon). The pumping action of the vapor jets does not cease at any pressure, however low. The ultimate pressure of the pump depends on the ratio of pumped versus back-diffused molecules, plus the ratio of the gas load to pumping speed. Also, the pump itself can contribute a gas load either through backstreaming of pump fluid vapor Las Positas College Vacuum Technology 60A & 60B Page 104 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 and its cracked fractions or the outgassing from its parts. In practice, then, the ultimate pressure of a pump is a composite of several elements. The first limit of the ultimate pressure is usually due to the vapor pressure of the pumping fluid, although this limit may not be observed at pressures below 10 -8 Torr. Operating Procedures The operation of high vacuum, diffusion pumped systems requires certain care and attention to several items. General cleanliness is extremely important, especially in smaller systems. Remember, if a drop of oil were to be trapped somewhere in your vacuum system, it may take days or weeks to evaporate that drop from your system. Humidity and temperature can be important in view of the constant presence of water vapor in the atmosphere. When your system is opened to the environment, pump down time is significantly longer if the air is humid. The time of exposure is also significant. If possible, the backfilling should be done with nitrogen or argon. For short exposures, this appears to reduce the amount of water vapor adsorption in the vacuum system. It is extremely important to develop good habits in valve sequencing operations, especially in systems with manual valves. It is useful to have a "map" or schematic of your system on your control panel that shows valve locations and functions. A single wrong operation can result in very costly maintenance to the system. Automatic valve sequence controllers have been used widely for many years, and they all have built in interlocks to prevent accidental opening of the wrong valves. During the evacuation of a vessel, the question arises regarding the proper time to switch from the roughing pump to the diffusion pump. In other words, when should the high vacuum valve be opened? There is no general answer to this question because each system is different with different gas loads and different volumes. In practice, the transfer from roughing to the diffusion pump is made between 50 and 150 millitorr. Below this pressure region, the mechanical pump rapidly loses it's pumping effectiveness and the possibility of oil backstreaming increases. Although the throughput of a diffusion pump is nearly constant when inlet pressures are in the 1 to 100 millitorr range, the initial surge of air into the pump when the high vacuum valve is opened will overload the diffusion pump temporarily. We recommend that the period in which pump inlet pressure is above 150 millitorr be kept as short as possible; i.e., just a few seconds! Without a doubt, you'll have questions on proper diffusion pump operation. There is literature available to help you, and one document we suggest is a Varian Corp. publication written by M. H. Hablanian called "DIFFUSION PUMPS: PERFORMANCE AND OPERATION" which is part of the AVS Monograph Series. Sample Problems: 7.1 What is generally regarded as the single most important thing to remember about operating your diffusion pumped vacuum system? 7.2 Determine the compression ratio of a typical diffusion pump which has an inlet pressure of 5x10 -7 Torr and a discharge pressure of 1x10 -1 Torr. 7.3 Explain what may happen if an operating diffusion pump is accidentally vented through the foreline with air. Las Positas College Vacuum Technology 60A & 60B Page 105 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Start-Up of Diffusion Pump: Observation of diffusion pump operation. Identify the diffusion pump as you did in exercise 6.1 for the mechanical pump {manufacturer, model, size, capacity, etc.}. Assemble your pumping system so that your diffusion pump is backed by a small mechanical pump (see figure 7.2). Place a pyrex view port on the pump inlet and start the mechanical pump. When system pressure is below 100 millitorr, turn on the diffusion pump and observe the formation of oil condensation on the pump side of the pyrex view port. How long does it take for a slight haze to form? a heavy haze?, how long before droplets appear on the view port? Report your observations. What, in your mind, is the sequence of events that cause droplet formation on the view port? If you took a heat lamp and aimed it at the view port, what would you expect to see? Laboratory Exercise 7.2: Testing and recording your system's base pressure. Now add the components to make your system look like the one in figure 7.3. TC2 TC1 IG Figure 7.3 Experimental set-up for measurement of DP base pressure. You'll need a thermocouple gauge at the DP inlet, a pressure gauge on the mechanical pump, and an ionization gauge at the inlet to the diffusion pump. Start the mechanical pump and reduce the pressure in the system to below 100 millitorr. Now, turn on the diffusion pump and allow the pump to reach normal operating temperature. As you progress through this assignment, record the foreline pressure at frequent intervals so that it may be graphed later. Once your pump is working, turn on the ionization gauge Las Positas College Vacuum Technology 60A & 60B Page 107 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 and record the steady drop in pressure. You should give the pump a couple hours to reach it's base pressure. Now you have two data sets to record on semi-log graph paper. A table for data entry is provided for you on the following page. Laboratory Exercise7.3: Measurement of pump down behavior for DP system. Assemble your system so that a vacuum chamber is attached to the diffusion pump through an isolation valve. You'll need pressure gauges on the chamber and also at the DP inlet. Rough pump the system as you've done previously, and allow the DP to warm up to normal operating temperature. Open the isolation valve and record time versus pressure data until the base pressure is achieved. You can monitor foreline pressure as well, and plot both sets of data on semi-log paper. Las Positas College Vacuum Technology 60A & 60B Page 108 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Assemble your system similar to the way you did when testing the speed of a mechanical pump. That is, attach a variable leak valve and an atmosphere valve to the chamber and use your burette to find the volume displaced in a specific time period. Since you're using the constant pressure method, you must select several pressures at which to conduct the speed tests. Let's recall the vacuum formula used in the previous exercise: We suggest you start somewhere in the mid to high 10 -5 Torr range. Then pick higher pressures at intervals suitable to the apparatus you have assembled. You will be plotting pumping speed versus pressure. When you graph pumping speed for the diffusion pumped system, be sure to include all information that may be pertinent to the outcome of the test. A table for data entry is provided for you on the following page. Chapter 8: Cryo-sorption pumps Cryo-sorption pumps offer a clean, quiet, safe, vibration free and inexpensive way to rough pump a vacuum system. They are often used on vacuum systems that are sensitive to oil contamination from mechanical roughing pumps (surface science instruments, for example). Cryo-sorption pumps are a sub category of sorption pumps. All sorption pumps work by gas-capture. Pumped gases and vapors are bound at the active surfaces of these pumps by physical means (Van der Waal's Forces), chemical means ( Chemisorption) or are mechanically embedded in a continuous deposition of material, as in a sputter ion pump (more on this in Chapter 9). Gas capture pumps of these types share a few operational characteristics. With use, they will eventually become "saturated" and will cease to pump- gases effectively. When this occurs, a sorption pump will either need to be "regenerated" or replaced. Theory of operation- Cryo-sorption pumps work by providing a very large surface area of material that is cooled to below the boiling point of most gases. Gas molecules that strike this cooled micro-porous surface become attached and are removed from the gas phase, and are effectively "pumped" from the vacuum system. The active surface area of a cryo- sorption pump is typically made of zeolite 13X. This alkali alumino-silicate possesses a very high surface area to mass ratio (about 10 3 m 2 per gram). The diameter of pores in this material is about 13Å (1.3*10 -9 m) which is approximately the size of a molecule of water, oil vapor and larger gas molecules (nitrogen and oxygen, for example). The pore size is appropriate for capture of the gases most predominant in the atmosphere. Low atomic weight gases, such as hydrogen, helium and neon have molecular diameters smaller than the 13Å pore size of the zeolite, and are captured by this material less effectively. Absorption of gases by a given sorbent is a function of gas specie, sorbent temperature, and gas pressure. As nitrogen gas is cooled, the amount of gas that can be adsorbed by the zeolite per gram increases, as is shown in figure 8.1. Also note in this figure that helium, even when cooled to -195 °C is pumped much less efficiently than nitrogen. Another piece of information that may be gleaned from the data presented in figure 8.1 is that in general, as gas pressure decreases, the amount of gas that is adsorbed per gram of sorbent decreases. Las Positas College Vacuum Technology 60A & 60B Page 111 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Nitrogen (-195 °C) Nitrogen (20 °C) Helium (-195 °C) 10-7 10-6 10-5 10-4 10-3 10-2 10-1 10 0 10+1 10+2 10+3 10+3 10+2 10+1 10 0 10-1 10-2 10-3 10-4 10-5 Pressure [Torr] Q u a n t i t y o f A d s o r b e d G a s [ T o r r - L ] p e r g r a m o f s o r b e n t Figure 8.1 Pumping behavior of Zeolite X-13 as a function of pressure. Range of operation Due to the extremely large sorbent surface area, these pumps can begin to trap gases at atmospheric pressure (no roughing pump required), and can achieve pressures of 20 microns or less depending on the gas being pumped, and ratio of the volume of the chamber to the capacity of the pumps. Inspection and First Use Prior to Operation of cryo-sorption pumps it is probably best to inspect a cryo-sorption pump before initial use, especially on a critical vacuum system to insure that the pump contains the correct sorbent, and is filled to the recommended level. If internal hardware (screens,grids, etc,) are used, is it installed and in good condition? Is the pump body sound? How about the vacuum flanges and connections? Do they mate with the vacuum vessel's hardware? Are they in good mechanical condition (no scratches running across sealing surfaces)? Prior to the first use of a new cryo-sorption pump, it should be baked out at 250 °C for 24 hours to insure removal of water adsorbed on the zeolite. Las Positas College Vacuum Technology 60A & 60B Page 112 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Viton Stopper Viton cuff Zeolite Liquid nitrogen Dewar screen Pump inlet pressure relief valve Figure 8.2 Typical cryo-sorption vacuum pump. Typical configuration Sorption pumps are usually connected to vacuum chambers in a valved manifold, such as shown in figure 8.3. TC1 Figure 8.3 Cryo-sorption pumps connected to a vacuum vessel. Operation With the valve to the cryo-sorption pump closed, attach the liquid nitrogen dewar to the pump body, and fill the dewar to within 1/2" of the top with liquid nitrogen. Allow 30 Las Positas College Vacuum Technology 60A & 60B Page 113 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 minutes for the sorbent to reach operating temperature. Care should be taken to avoid splashing liquid nitrogen on the skin. See chapter 2 for more safety details in handling cryogenic materials. Regeneration of cryo-sorption pumps-following repeated use, the sorbent material will become saturated with gas molecules, and the pump's ability to remove gas from the vacuum system will rapidly deteriorate. When this occurs, regeneration may be performed by simply valving the pump off from the system, and allowing it to come to room temperature. Gases will be liberated from the zeolite, and will escape the pump body through the pressure relief valve. Make sure that the pressure relief valve is in good operating condition, and is free to operate (no obstructions or blockages. The cork style relief valve may pose a danger in that if the cork's tether is broken, the cork may shoot across the room. In industrial situations it is possible that toxic or explosive combinations of gases may be released on pump regeneration. Be aware! In situations where significant amounts of water vapor are pumped with a cryo-sorption pump, heating at 250 °C for several hours is recommended in the regeneration sequence. Performance characteristics-the important quantities for cryo-sorption pumps are the pump's capacity (expressed in Torr-liters), and its operating temperature (which will determine which gas species will be pumped and how efficiently). Pump capacity- each gram of zeolite cooled to liquid nitrogen temperature (77k, or -195 °C) approximately 30 Torr-liters of atmospheric gas can be pumped. Remember, at liquid nitrogen temperature, helium, neon and hydrogen gas are not pumped, as they have boiling points below that of liquid nitrogen. Sample problem: 8.1 What temperature would a sorbent material have to be cooled to in order to pump helium, neon and hydrogen? A User's Guide to Vacuum Technology, O'Hanlon, John F. John Wiley & Sons New York, New York. 1980. Answers to Chapter 8 sample problems 8.1 Below 10k or -263 °C Laboratory Exercise 8.1: Performance of a single cryo-sorption vacuum pump. Las Positas College Vacuum Technology 60A & 60B Page 114 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 A. Pump Identification: Who is the manufacturer? What is the pump model number? Locate the manufacturer's literature from the bookcase, and find the appropriate reference information. What is the sorbent? What is the advertised pump capacity? B. Physical Inspection of Cryo-sorption Pump: Inspect the pump for signs of wear or misuse. Are the screens in place? Is the correct amount of sorbent in place? Are the vacuum sealing surfaces in good condition? C. Bake-out of Cryo-sorption Pump: in a safe area, set up a fire-safe area to bake-out your cryo-sorption pump. Bake out the pump for 60 minutes. D. Pumping speed and capacity: once the pump has been regenerated, allow it to cool to room temperature with the pump isolation and relief valves closed. Attach the pump to a vacuum vessel of at least 10 liter volume as shown in figure 8.4. Connect a dewar to the pump body, and fill the dewar with liquid nitrogen. Allow 30 minutes for the sorbent to cool. With the vessel at atmospheric pressure, and the vent valve closed, open the cryo-sorption pump isolation valve, and record pressure versus time for 20 minutes. Close the cryo-sorption pump isolation valve and vent the chamber to atmosphere. Close the vent valve and repeat the experiment. Do this sequence of steps until a noticeable decrease in pumping speed is noted. Plot your data as pressure vs. time and pumping speed vs pressure. TC1 Discussion: How does the pump capacity that you have calculated compare to those listed by the manufacturer for this pressure range? Las Positas College Vacuum Technology 60A & 60B Page 117 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 What was the general trend in pumping speed for the series of pumpdowns for each of the gases pumped? Laboratory Exercise 8.2: Performance of multiple cryo-sorption vacuum pumps. A. Using the same vacuum vessel as in the previous experiment, connect two similar cryo-sorption pumps as shown in figure 8.5. TC1 Figure 8.5 Experimental set-up for experiment 8.2. As was done in the previous experiment, bake out the pumps if necessary and measure the pumping speed for two cryo-sorption pumps used simultaneously. Make two plots of your data: pressure vs time and pumping speed vs. pressure. Calculate the total amount of gas pumped in each experiment. If bottled nitrogen, helium or argon are available, repeat the experiment with these gases. A data table is provided on the next page. Las Positas College Vacuum Technology 60A & 60B Page 118 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 The invention of the ion pump did not occur until the 1950's when the Varian company exploited the pumping characteristics of the Penning cold cathode gauge. While it had been known that the sputtering effect caused by high voltage in the Penning gauge resulted in burial of ionized gas molecules, and that gettering of gases such as oxygen by reactive metals (titanium) were both occurring, the concept of using these mechanisms to remove gas molecules from a system was ignored. Soon after commercial sputter-ion pumps were made available, they were applied to the then new field of space environment simulation. Ion pumps were fitted to large carefully constructed vacuum vessels, and pressures as low as 10 -11 Torr were obtained. This enabled evaluation of satellite components, space suits and rocket components. Currently sputter ion pumps are used in a variety of UHV applications including surface science techniques (study of the first few atomic layers of a surface), and ultra-high purity thin film deposition processes (e.g. molecular beam epitaxy). Sputter-ion pumps are gas capture type vacuum pumps that function without pump fluids or any moving parts. They offer a clean, quiet, and safe way to achieve ultra-high vacuum (10 -11 Torr). Sputter-ion, or getter-ion pumps are often used on vacuum systems that are sensitive to oil contamination that is possible from oil diffusion pumps and turbo pumps. In general, sputter-ion pumps are used in systems in which pumping speed is less important than cleanliness and achieving an extremely low base pressure. Sputter-ion pump characteristics The operational characteristics of a sputter-ion pump may be simply described by the following three factors: 1. Pumping speed As with any high vacuum pump, the pumping speed will determine the ultimate base pressure for a given gas load. Ion pumps, however, exhibit pumping speeds that are a function of the gas specie being pumped. Hydrogen is pumped at a relatively high rate compared to argon. It is critical to match the ion pump to the application. 2. Starting pressure Ion pumps must be rough pumped to an acceptable pressure (2x10 -2 Torr or lower) before being turned on. Typically, this is done with a cryo-sorption pump or dry pump to eliminate the possiblity of oil backstreaming into the vacuum vessel or ion pump body. If well-trapped, oil sealed mechanical pumps may be used for roughing the ion pump and vacuum vessel. 3. Operating principle Sputter-ion pumps may be single or multiple cell types, and can be of diode or triode design. For the purposes of this laboratory, we will describe the operation of a single cell diode type sputter-ion vacuum pump. As with all gas capture pumps, the sputter-ion pump requires no backing pump, and does have a limited lifetime, based on its Las Positas College Vacuum Technology 60A & 60B Page 121 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 capacity. The pump reduces pressure in a vacuum vessel by three distinct mechanisms: chemisorption, ion burial, and physical burial. During operation, titanium metal is sputtered (energetically liberated by ion bombardment) from the cathode surfaces. Titanium, being a very reactive metal, will chemically combine with active gas molecules present (oxygen and hydrogen) to form stable compounds, thus removing the gases from the vacuum vessel. Additionally, gas molecules and atoms are ionized by electrons that are constrained to orbit in the anode tube by a strong external magnet. These ionized gases are accelerated to the cathode by high voltage from the pump power supply. On impact, gas ions become buried in the titanium cathode, and also sputter (or knock free by momentum transfer) titanium atoms that act as getters as explained earlier. On start-up the amount of sputtering that occurs is very high, resulting in an initially high electrical current in the pump. Sputter-ion pumps will be warm or even hot to the touch during this phase of operation. After the gas pressure reduces, the pump will draw much less current from the power supply, and the operating voltage will increase. The amount of current that a sputter-ion pump draws during operation may be used, along with conversion charts supplied by the vendor, to determine pressure in the pump. Figure 9.1 Cutaway view of a single cell sputter-ion vacuum pump. High voltage applied between the anode and cathodes generates primary electrons that are constrained to spiral orbits within the anode. Collisions of these primary electrons with neutral gas atoms causes the atoms to become ionized. The positive gas ions are accelerated into the cathodes, resulting in burial of the gas ion and/or sputtering of the cathode material (titanium). Titanium atoms gas molecules or atoms positive gas ions electrons magnetic field A B C + HV Anode tube cathode cathode Figure 9.2 Detail of the processes in a sputter-ion pump. Las Positas College Vacuum Technology 60A & 60B Page 123 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 At location C a primary electron ionizes a gas atom; at B an ion impacts the cathode ejecting a titanium atom, and at A a gas ion is buried in the cathode. What is the cathode material? Is it a single or multiple cell pump? Is it a diode or triode design? B. Physical Inspection of Sputter-Ion Pump: Inspect the pump for signs of damage or misuse. Check power supply electrical cables for cracks in insulation. Is the power supply appropriate for the pump? What is the input power requirement of the power supply? What is the power supply output voltage and current at start-up? What are theses values during operation at 10 -6 Torr (approximately)? C. Measurement of ultimate pressure: assemble a system similar to that shown in figure 9.3. It would be preferable to use cryo-sorption pumps to rough the vacuum vessel and the sputter-ion pump to a pressure of less than 20 microns. A trapped mechanical pump will suffice if cryo-sorption pumps are unavailable. C. Measurement of ultimate pressure (cont.) Evacuate the sputter-ion pump and the vacuum vessel to a pressure of less than 20 microns (2 x 10 -2 Torr). Valve off the roughing pump, and start the sputter-ion pump. Record vessel pressure, and sputter-ion pump power supply voltage and current as a function of time. Time Pressure Current Voltage Power [seconds] [Torr] [amps] [volts] [Watts] Calculate power for each of your readings (power = current*voltage). Plot the data you have collected as sputter-ion pump current, voltage and power as a function of time. Also plot vessel pressure vs. time. If the equipment and materials are available, isolate the sputter-ion pump from the evacuated chamber, and back fill the process chamber with an inert gas such as helium or argon and repeat the experiment. Las Positas College Vacuum Technology 60A & 60B Page 126 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 In the previous chapter we covered the operation of diffusion pumps that pump gases by the mechanism of momentum transfer. Molecular pumps, of which turbo pumps are a subset, are also momentum transfer pumps. In turbo pumps gases are caused to move in a preferred direction due to the interaction with high speed surfaces. Gaede recognized the possibility of pumping gases by this technique as early as 1912, and he constructed a simple molecular pump that demonstrated his theory. This early molecular pump was similar in construction to a modern rotary vane mechanical pump, with the exception that the rotor of Gaede's molecular pump had no moving vanes and was concentric with the stator (see figure 10.1). inlet exhaust rotor stator Figure 10.1 Gaede's molecular drag pump of 1912. In the operation of Gaede's design, gas molecules entering the molecular drag pump's inlet strike the surface of the moving rotor, and remain on this moving surface for a period called the "Residence time" (see equation 4.8). Molecules leave the surface of the rotor, obeying the "Cosine Law" distribution presented in figure 4.1. The molecule then strikes the inner surface of the stator, remains there for the "Residence time", desorbs and may again strike the surface of the rotor to again be moved in the preferred direction. Chapter 10: Turbomolecular Pumps Figure 10.2 Cross-section of a molecular drag pump using a spiral channel machined into the stator and a flared disc as a rotor. Molecular drag pumps designed in the early 1900's had low pumping speeds, due in part to the practical limits encountered in machining techniques and bearing designs which limited rotational velocity of the rotor. Many of the current molecular drag vacuum pumps are similar in design to that presented in figure 10.3. The rotor is often fabricated out of a high strength aluminum alloy and is shaped like an inverted cup. Both inside and outside surfaces of the rotor are machined to create spiral grooves which work with the surfaces of the stator to provide the pumping action. Using both the internal and external surfaces of the rotor creates an elongated pumping path. The size, shape and tolerances of the grooves change from the inlet side to the exhaust side of the pump to allow for multiple compression stages. Flush gas is intentionally admitted to the pump to provide cooling and as an aid to exhausting the compressed gas. High quality molecular drag pumps can attain compression ratios for nitrogen of approximately 10 9 :1. Since the pumping action is dependent upon the residence time of a gas on the stator and rotor, and the average velocity of gases, it should be obvious that the pumping efficiency for molecular drag pumps decreases with the molecular weight of the gas being pumped. Sample Problem: 10.1 For the atmospheric gases listed in table 4.1 arrange the gases in order according to the pumping speed you would expect for a molecular drag pump. Molecular drag pumps in general cannot compress gases to atmospheric pressure, and must, therefore have a backing pump attached to the exhaust of the drag pump to accomplish this final stage of compression. The critical foreline pressure range for many molecular drag pumps is 10 to 40 Torr, which allows these pumps to be backed by diaphragm or dry pumps, greatly reducing the possibility of oil backstreaming into the vacuum vessel. Crossover pressures for molecular drag pumps is often as high as 1 Torr, and systems pumped by this means may achieve base pressures as low as 10 -6 Torr. Modern Turbomolecular Pumps Some insight into the operational characteristics of turbomolecular pumps may be gained by comparing and contrasting them to diffusion pumps. Both turbomolecular and diffusion pumps are high vacuum pumps which cannot compress gases to atmospheric pressure, and therefore both require backing pumps (typically rotary vane mechanical pumps). Both turbo pumps and diffusion pumps provide pumping action by momentum transfer, that is, they induce molecules to flow in a preferred direction through the use of high speed surfaces or particles. The pumping efficiency of both types of pumps is a function of the gas specie being pumped, and in general, the pumping efficiency decreases with decreasing molecular weight of the gas. Unlike diffusion pumps, turbomolecular vacuum pumps do not require traps and baffles, as the possibility for backstreaming into the vacuum vessel is very limited in a turbo pump. Advances in fabrication techniques, high strength/low weight alloys and bearing design have allowed the development of high performance turbo-molecular vacuum pumps. Two designs for turbomolecular pumps have been produced commercially: the horizontal twin rotor design (Sargent-Welch) and the axial flow design (Balzers, Leybold, Inc., and others). The operating principles are the same for both designs, so we will use the more currently popular axial flow design to illustrate the operation of turbo pumps. In Las Positas College Vacuum Technology 60A & 60B Page 129 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 practice, the horizontal twin rotor design has a much more massive rotor assembly which is more difficult to dynamically balance than the lighter weight rotor of an axial flow turbo pump. The result is that the rotational velocity (Rpm's) that a horizontal turbo pump may attain is much lower than for a comparably sized axial flow turbo, and therefore pumping speed for the horizontal pump is less than for an axial design pump. In the axial flow design, the compressor is comprised of matched sets of rotors and stators, which are typically fabricated from aircraft quality aluminum alloys. Typical rotational velocities for the rotor of turbo pumps of this design are from 20,000 to 60,000 RPM. Sample Problems: 10.2 Calculate the speed of the tip of a 5 cm radius rotor operating at 60,000 RPM and compare that value to the average velocity of nitrogen and hydrogen at room temperature. What conclusions can you draw from this data? Look again at figure 10.4. Note that the size and aspect ratio (length divided by width) of the rotor blades at the inlet are different that for the rotor blades at the exhaust. Most modern axial flow turbo pumps have rotors and stators which are designed in stages to optimize pumping performance for the pressures at locations throughout the pump. The inlet stage typically is designed with the goal of achieving high volumetric Las Positas College Vacuum Technology 60A & 60B Page 130 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 speed with minimal compression. Stages at the exhaust line are designed with the opposite goal in mind: maximizing compression of the gas at the expense of volumetric speed. It should be noted that the function of the stators and rotors is slightly different. The high speed rotors provide a surface on which gas molecules "reside" for some short time, then desorb, leaving in a preferred direction. The stators serve to improve the effectiveness of the rotors by providing a baffle effect, directing the gas flow to the next rotor. For this reason, the stator is often omitted from the final stage of the turbo pump, as it would serve no purpose, and would impede the flow of gas to the backing pump. Since the low molecular weight gases are the most difficult to pump using a turbo, the ultimate pressure one may attain using a turbomolecular pump is often due to the inefficiency of the pumping of these gases. Operational Aspects of Turbomolecular Pumps The maximum crossover pressure for turbomolecular pumps is approximately 1 Torr, this is a factor of ten times higher pressure than the maximum suggested crossover pressure for most oil vapor diffusion pumps (100 mTorr). At pressures above 1 Torr the turbo pump blades will be slowed by collisions with gas molecules such that the motor will overload and the rotational velocity of the rotor will decrease to a speed that is ineffective for pumping gas. Unlike diffusion pumps, turbo pumps do have moving parts that can cause vibration which may adversely affect some precision instruments including scanning electron microscopes and surface science probes. A 60 or 120 Hz vibration typically is caused by a mechanical backing pump, while high frequency vibration is due to imbalances in the turbo pump rotor. Most vacuum applications are insensitive to this minute amount of vibration, but if vibration must be held to a minimum, and the pumping characteristics of a turbo pump are desired, a magnetically levitated rotor design may provide the solution. In this type of turbo pump conventional (but oil free) bearings are only used on start-up and shut-down of the turbo. During normal operation the rotor is suspended above the bearings by well matched sets of strong magnets, virtually eliminating all mechanical vibration. Magnetically levitated turbo pumps are designed to operate for long periods of time with very few interruptions. Each time a magnetically levitated turbo pump is started or stopped, the oil-free mechanical bearings suffer wear and eventually will require replacement. Beyond reduction of vibration, the magnetically levitated rotor design turbos offer the option of mounting in any orientation, as there is no oil sump as in most conventional turbo pumps. Standard sequence of operation of turbomolecular pumped vacuum systems (see figure 10.5) is as follows: Las Positas College Vacuum Technology 60A & 60B Page 131 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Start-up: 1. Close all valves in the vacuum system. 2. Start the mechanical pump. 3. Open the foreline valve and rough pump the turbomolecular pump to a pressure of less than 1 Torr. 4. Start turbo pump; wait for rotor to attain normal operational velocity (20 minutes for most small to medium size pumps). 5. Close the foreline valve. 6. Open the vessel roughing valve; evacuate the vacuum vessel to a pressure of less than 500 mTorr*. 7. Close the vessel roughing valve; open the foreline valve. 8. Open the head gate valve; turn on the ion gauge. Venting the vessel without stopping the turbo pump: 1. Turn off the ion gauge. 2. Close the head gate valve. 3. Open the vessel vent valve. 4. Open the vessel as soon as it reaches an internal pressure equal to atmospheric. 5. Close the vacuum vessel and the vessel vent valve. 6. Close the foreline valve. 7. Open the vessel roughing valve; evacuate the vacuum vessel to a pressure of less than 500 mTorr*. 8. Close the vessel roughing valve; open the foreline valve. 9. Open the head gate valve; turn on the ion gauge. Shut-down: 1. Turn off the ion gauge. 2. Close the head gate valve. 3. Turn off power to the turbo pump, wait for rotation to stop. 4. Close the foreline valve and turn off the mechanical pump. 5. Vent the roughing line. 6. Open the air admittance valve on the turbo pump to gradually bring the pump to atmospheric pressure. 7. Open the vacuum vessel vent valve. *Check manufacturer's suggested crossover pressure for the particular pump you are using. Sample Problem: 10.3 Why are turbomolecular pump compressors designed in several "stages"? What are the characteristics of the inlet and exhaust stages? Maintenance of Turbomolecular Pumps Normally, turbomolecular pumps operate for years and require little maintenance. Those pumps which have an oil sump and circulation system should have the oil changed approximately every six months or when the oil turns from clear to brown. Turbo pumps that use thick grease should have the lubricant replaced every six months. Bearing life in turbo pumps is approximately two to three years. Replacement of bearings is usually performed by trained technicians at the manufacturer's facility due to the precision balancing required for the high speed rotor. If a turbomolecular pump inlet becomes contaminated, due to backstreaming of lubrication oil, occasionally a user may be able to clean the pump inlet and the first few stages by inverting the pump (oil having previously drained from the sump) in a container of solvent. Care must be taken to prevent immersion of any electrical components of the pump. It is wise to check with the pump manufacturer prior to cleaning a turbo pump by this method. Applications for Turbomolecular Pumps Three areas of vacuum technology that take advantage of the pumping characteristics of turbomolecular pumps are semiconductor equipment manufacturing, thin film deposition industry and the leak detector manufacturing industry. Vacuum processes such as sputter deposition, which rely upon the flow of a process gas, usually at pressures of 3 to 50 milliTorr are often conducted using throttled turbomolecular pumps. Argon, a common process gas is pumped effectively by turbo pumps; variable orifice valves are used to control the pressure or throughput of gas in the vacuum vessel. Modern vacuum leak detectors also often use turbo pumps as the high vacuum pump. Portable units typically have turbo pumps with greased bearings or magnetically levitated rotors so as to eliminate the possibility of oil contamination from the sump were the unit to be oriented horizontally during shipment. Another desirable characteristic of Las Positas College Vacuum Technology 60A & 60B Page 133 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 turbo pumps for leak detector application is the relatively high pumping speed for atmospheric gases (oxygen, nitrogen, carbon dioxide) compared with that for the light gas, helium. In most instances helium is used for leak detection due to its small molecular size, rarity in the atmosphere, and low toxicity. Some of the newer "counter- flow" leak detectors rely upon the low pumping efficiency of turbo pumps for light gases, such as helium, to permit backwards flow of helium through the operating turbo pump. This design allows for a much more compact and portable leak detector unit (more on this in Unit 13, Leak detection). Sample Problems: 10.4 What are advantages of a turbomolecular pump over a diffusion pump? 10.5 Turbomolecular pump suffer severe mechanical damage when solid objects fall into the inlet during operation of the pump. Can you suggest two ways to prevent this occurrence? 10.6 What limits the base pressure one may attain using a turbomolecular pump? 10.7 Accessories available for turbomolecular pumps include the following: Flange Heaters: To aid in the removal of residual gases and any contamination that may be present at the inlet area of the pump. Care must be taken not to exceed the manufacturer's suggested maximum temperature, as severe bearing wear may result. Venting Devices: Upon interruption of electrical power these valves admit air into the inlet area of the pump to achieve pressure equilibrium within the turbo pump. This action serves to reduce the possibility of mechanical damage to the rotors and to minimize backstreaming of oil from the foreline. Vibration Isolation Bellows: Reduce the transmission of high frequency vibration from the turbo pump to the vacuum vessel. Water Flow Interlock: Prevents the operation of the turbo pump without proper flow of cooling water. Compound Molecular Pumps Compound molecular pumps are typically of the axial flow design and are essentially a combination of a turbomolecular and a molecular drag pump built into one unit. The advantage of a compound pump is that the molecular drag pump at the exhaust stage is able to compress the gas to a higher pressure than a conventional turbo pump. Most compound pumps are made to be backed by a diaphragm pump, thereby eliminating the possibility of backstreaming oil from an oil sealed rotary vane pump. Some of the newer compound pump can exhaust to atmospheric pressure; these pumps are often small (less than 150 liters per second pumping speed). Goals of this experiment: to operate a turbo pumped vacuum system, to observe the pump down rate for a vessel, to observe the base pressure of the system and to calculate the total gas load in the vessel. Equipment required: An axial flow turbomolecular pump. Procedure: Locate the manufacturer's literature for the model pump you will be working with. What is the rated speed for air? What is the ultimate pressure the pump can attain? What is the crossover pressure? What is the critical foreline pressure? What type bearings does the pump have? How is the pump cooled? What are the utilities requirements (water and electrical)? What is the recommended routine maintenance procedure? Inspect the pump. Is there an air admittance valve on the unit? How is this valve actuated? Will this valve safely vent the pump during a power failure? If the pump has an oil sump, inspect the oil through the viewport. Note the appearance, clarity and level of the oil. Create a written report of your findings for submission to the Laboratory Instructor. Laboratory Exercise 10.2: Operation of a vacuum system with a turbomolecular pump. Equipment required: small vacuum vessel or bell jar vacuum system to which a suitably sized turbomolecular pump can be attached, a vent valve for the vessel, two ionization gauges two thermocouple gauges and controllers, a gate valve to match the turbo pump inlet, roughing lines, a mechanical pump, a roughing valve, a foreline valve and a roughing line vent valve. Procedure: Prior to any experimental work, make certain that the roughing pump selected will deliver adequate pumping speed to the foreline of the turbo pump. Assemble the equipment as shown in figure 10.5. Make certain the cooling water flow is adequate if the pump is a water cooled model. After the Laboratory Instructor has checked the vacuum system, follow the system start-up procedures provided in this unit. Measure the vacuum vessel pressure as a function of time during pump down. Graph the data clearly showing which portion of the curve is due to evacuation by the mechanical pump, the point of crossover, and the pumping action due to the turbo pump. Following completion of the measurements safely shut down the turbo pumped vacuum system as outlined in this unit. Procedure: Using the vacuum system assembled for experiment 10.1, attach a needle valve/atmosphere valve assembly to the vacuum vessel as was done for the speed measurement at constant pressure for diffusion pumps. Bring the system into high vacuum operation using the set of procedures used in this unit. Open the needle valve slightly; wait for the pressure in the vessel to stabilize. Close the atmosphere valve by placing a thumb over the hole, and record the time required to pull 1 ml of water up into the graduated pipette. Record this time along with the pressure during the measurement. Open the needle valve another small increment and repeat the measurement of time required to draw 1 ml of water into the graduated pipette at the new pressure. Make at least ten measurements in this manner. Using equations 8.1 and 8.2 calculate the speed at each pressure, then plot the data as speed versus pressure. Following completion of the measurements safely shut down the turbo pumped vacuum system as outlined in this unit. Submit a written report for this experiment to the Laboratory Instructor. Discussion: Was the pumping speed data you collected over a range of pressures comparable to the data published by the turbo pump manufacturer? Las Positas College Vacuum Technology 60A & 60B Page 137 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Chapter 11: Cryogenic Vacuum Pumps In the preceding units we have described vacuum pumps that operate by isolating volumes of gas, compressing the gas and exhausting to atmosphere (mechanical pumps) and vacuum pumps that move gas through the interaction of high velocity particles or surfaces (diffusion pumps and molecular pumps). Gases may be removed from a vacuum vessel by a third pumping mechanism: gas capture. In this scheme, gas molecules are removed from the gas phase by one of several techniques. Gas capture may be accomplished by solidifying the gas on extremely cold surfaces. This form of gas capture is called cryo-condensation. Some gases, such as helium, neon and hydrogen have such low boiling points that they are not readily condensed. Pumping of these gases may be accomplished by adsorption. If, through a series of collisions with cooled surfaces, a helium atom loses kinetic energy, it may become "adsorbed" onto a surface. In this state, the helium gas molecule is weakly attached to the cold surface and is, for all purposes, removed from the gas phase. Other mechanisms for gas capture will be detailed in the following unit on sputter-ion pumps. One other difference between gas capture pumps and positive displacement or momentum transfer pumps is that gas capture pumps have a finite capacity; once they are full, pumping action will cease until the pumping media can be renewed or regenerated. For this reason gas capture pumps are seldom used on vacuum systems which are designed for continuous high gas throughput. This fact has an associated safety issue: gas capture pumps collect and concentrate all the gas species they have pumped during their service time. If the pumping media is to be regenerated for further pumping, considerable care should be taken to carefully exhaust the gases which will be released from the pump during regeneration. The Effect of Temperature on the Vapor Pressure of Gases Gas molecules, upon collision with cooled surfaces, lose a significant amount of their thermal energy to the cooled surface. In general it may be said that the thermal energy of a gas molecule is determined almost entirely by the temperature of the last surface the gas molecule desorbed from. If a surface is intentionally cooled to the temperature of liquid nitrogen (-196°C or 77K), all gas molecules which have a boiling point higher than -196 °C can be cryo-condensed on this surface. These gas molecules will literally freeze, transforming from a gas to a solid. As solid material, these condensed gases are captured and eliminated from the gas load inside the vacuum vessel. cryo-surface -196 °C molecules in the gas phase cryo condensed molecules desorbed molecule Figure 11.1 Molecules in the gas phase,upon contact with a cryo-cooled surface, condense on that surface. The residence time for molecules is dependent upon the specie of gas, the temperature of the cryo-surface and the heat of adsorption (see equation 4.8). Sample Problems: 11.1 The boiling point of liquid nitrogen is -196 °C. Which of the following gases can be condensed on a surface cooled by liquid nitrogen? 11.2 For gas molecules which are not cryo-condensed onto a surface cooled by liquid nitrogen, what would the temperature of the desorbed gas molecules be after they leave the cold surface? How would the velocity of these gas molecules be affected? 11.3 Calculate the residence time for common atmospheric gases which have been condensed onto a surface cooled to liquid nitrogen temperature. Cryo-sorption Pumps Cryo-sorption pumps provide a safe, quiet, clean and reasonably inexpensive method for evacuation of a vacuum vessel to a pressure of 10 -3 Torr. Most commercial cryo sorption pumps resemble the diagram in figure 11.2. Liquid nitrogen is used to cool the exterior of the welded aluminum pump body to -196 °C. The interior of the pump body has radially arrayed heat transfer fins that aid in extracting the heat from the sorbent, which is usually activated carbon or alumina. A metal screen, often made of stainless steel creates an open channel that runs vertically through the pump body. This channel aids in exposing the pumping media, or sorbent to gases entering the pump inlet. Linde 5A is a popular sorbent material, which has micro pores of approximately 5Å diameter, which are optimal for trapping most atmospheric gases. Other advantages of this sorbent are that it is chemically inert and will not thermally decompose during a bake- out at 250 °C. Las Positas College Vacuum Technology 60A & 60B Page 139 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Viton Stopper Viton cuff sorbent Liquid nitrogen Dewar screen Pump inlet pressure relief valve Figure 11.2 Cutaway drawing of a cryo-sorption vacuum pump. TC 1 vacuum vessel Figure 11.3 Schematic of a vacuum vessel rough pumped by a bank of three cryo-sorption pumps. Several cryo-sorption pumps may be arranged in a bank as shown in figure 11.3. This configuration has several advantages over the use of a single cry-sorption pump. A multiple pump system provides the capability of regenerating one pump while using others, increasing the capability of the vacuum system for repetitive pump down cycles. Other advantages include the flexibility of pumping with cryo-sorption pumps in parallel connection (all roughing valves opened at once) or in series (opening one valve, utilizing Las Positas College Vacuum Technology 60A & 60B Page 140 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 the first pump until it is saturated, then closing its valve and opening the valve of the second pump). In general, if one wishes to achieve maximum pumping speed at the expense of base pressure, the parallel mode of operation is used. Conversely, if a low base pressure is of utmost importance, the cryo-sorption pumps are operated in series (sequentially). Sample Problem: 11.4 Parallel and series operation of cryo-sorption roughing pumps will produce very different pump down curves. For the vacuum system pictured in figure 11.3 draw the pump down curves (pressure versus time) that you would expect for series and parallel arrangement of the cryo-sorption pumps. Liquefied Gas Cryogenic Pumps liquid nitrogen inlet nitrogen gas outlet TC IG vacuum vessel vessel vent valve cryo panels Cryo-panels, placed inside a vacuum vessel, and cooled with liquefied gas (most commonly liquid nitrogen) are often employed to reduce the base pressure that may be Las Positas College Vacuum Technology 60A & 60B Page 141 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 attained using a high vacuum pump such as a diffusion pump or a turbomolecular pump. Cryo-panels should be designed to allow easy filling and purging of the liquefied gas, and also must allow for boil-off of the gas during operation. Typically, cryo-panels are filled after a pressure of less than 10 -5 Torr has been attained. This reduces the loading of the cryo-panels with atmospheric water vapor, which the diffusion or turbo pump can normally handle. Prior to venting the vessel to atmosphere, the cryo-panels should be warmed to room temperature. Cold cryo-panels exposed to air would ice up, and the ice, upon melting would drip water into the vacuum vessel. Theory of Operation of Compressed Helium Cryogenic Pumps Everyone who has pumped up a bicycle tire using a hand pump has experienced the effect of gas heating upon compression. As the piston in the air pump is forced down, air is compressed and forced through the inner tube valve stem. At this point the compression of gas is high and the heat generated is conducted through the valve stem to the fingers. In just the opposite way, gases may be allowed to expand rapidly to pull heat from their surroundings. This is why the tip of aerosol cans become cold when the compressed gas is released. This effect is particularly noticeable for the cans of compressed freon (microdusters) used to blow dust off of microelectronics parts. Compressed helium refrigerators take advantage of the cooling effect of expanding gases to produce extremely cold surface onto which gas molecules may be captured. It should be noted here that at no point in the operation of the helium compressor is the helium condensed to a liquid. All helium refrigerators used to produce cold surfaces for cryo pumping have three basic components: the helium gas compressor, the connecting lines and the cold head. These components are carefully matched to work together properly. With very few exceptions, components from different manufacturers cannot be intermixed and be made to operate properly. The unit referred to as the "Compressor" actually serves several functions in addition to compressing the helium gas. Following compression, the gas is forced through a heat exchanger which is cooled using flowing water. The cooled helium may contain some residual oil vapor from the compressor. This oil vapor would condense in the cryo-pump regenerator and severely hamper its ability to produce the cold temperatures required for cryo-pumping. To remove oil vapor, an oil separator and an oil adsorber are used in series as shown in figure 11.5. The oil adsorber has a finite service life, and must be replaced with a new unit periodically. Typically, adsorbers are renewed every 6 months. The lines which transport the high purity compressed helium between the compressor and the cryo-pump are specially designed to contain the high pressure helium gas. These lines have special fittings on each end which allow connection and disconnection without losing the helium in the lines. Maximum line length varies from manufacturer to manufacturer, but most models allow the cryo-pump to be at least 20 feet from the compressor. This permits one to place the compressor outside a clean room to reduce contamination, or to isolate the vacuum vessel from heat or vibration generated by the compressor. The operation of a compressed helium refrigerator is based upon the cooling cycle as described by Gifford and McMahon in several articles published in 1960. The following series of diagrams and footnotes are presented to demonstrate the principles of operation of this type of refrigerator. Figure 11.7 Cross-section of a compressed helium refrigerator. In the first part of the refrigeration cycle, the displacer, which is made of a thermally insulating material (usually micarta) is at the lower end of its stroke. The compressed helium supply valve is opened, and high pressure (300 PSI) helium gas at room temperature is flowed into the cylinder in which the displacer oscillates. supply valve helium compressor return valve Figure 11.8 As the high pressure gas is admitted into the cylinder, the displacer moves upwards, forcing the gas to pass into and through the regenerator. The regenerator is made up of tightly packed material of high thermal inertia or heat capacity. {Heat Las Positas College Vacuum Technology 60A & 60B Page 144 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 capacity may be defined as the amount of thermal energy required to raise a specified amount of material from one temperature to another temperature. A material having a high heat capacity required more thermal energy input to change its temperature than a material of low heat capacity}. The materials most often used in the regenerator are lead or copper spheres. Even though the regenerator is tightly packed with these spheres, gas flow is not seriously impeded. supply valve helium compressor return valve Figure 11.9 The supply valve admitting compressed gaseous helium into the cylinder is closed as the displacer moves upwards nearing the top of its stroke. At this point the helium gas has traveled through the regenerator, and assuming several cycles have already occurred, the helium gas will lose some of its thermal energy to the cooler regenerator. Las Positas College Vacuum Technology 60A & 60B Page 145 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 helium compressor return valve heat heat Figure 11.10 In the next stage of the cycle, the return valve is opened. The gas in the cylinder is at 300 PSI while the pressure in the return line is at approximately 80 PSI. The gas responds to the pressure differential by expanding into the return line. This expansion is what causes cooling in this type of heat pump. Heat flows from the external heat load (dark rectangle at the bottom of the drawing through the cylinder walls to the cold interior of the cylinder. As the helium passes through the regenerator it also cools the metal spheres. helium compressor return valve heat heat Las Positas College Vacuum Technology 60A & 60B Page 146 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Figure 11.11 In the final stage of the cycle, the displacer is forced downwards to push any remaining helium gas through the regenerator and into the return line to the helium compressor. The return valve is closed and the helium is again compressed in the compressor for the next cycle. motor valve disc low pressure line high pressure line seal first stage second stage first stage heat load second stage heat load Las Positas College Vacuum Technology 60A & 60B Page 147 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Figure 11.12 Cross-section of a two-stage compressed helium refrigerator. The motor serves to rotate the valve disc which is ported to control flow of high pressure gas into the regenerator and flow of low pressure gas back to the helium compressor. The majority of commercially available cryogenic pumps are similar to that represented in figure 11.13. At the pump inlet is the 80 K array, which is thermally connected to the first stage of the refrigerator by the radiation shield. Indium foil is used at the mechanical junctions to improve thermal conductivity. Water vapor is the primary gas that is condensed on the inlet array. Without the optically opaque inlet array, water vapor would condense on the 15 K array severely limiting its ability to pump oxygen, nitrogen and the non-condensable gases, helium, hydrogen and neon. The diagonally positioned plates of the 15 K array serve two functions: the top surfaces are used to pump oxygen, nitrogen and argon, while the sorbent attached to the underside of each array is used to cryo-adsorb the three non-condensable gases. Figure 11.14 Schematic of a vacuum system using a compressed helium refrigerator cryogenic pump and a mechanical roughing pump As with all high vacuum pumps, the compressed helium cryogenic pump is unable to evacuate vessels which are at atmospheric pressure. Unlike diffusion and turbo pumps, the appropriate conditions for crossover for a cryo pump are a function of the amount of gas in the vessel rather than simply the pressure in the vessel. This is best illustrated by example. If a manufacturer's specification for the cross-over of a cryo- pump is 150 Torr-liters, and the vessel to be pumped has a volume of 100 liters, then the cross-over pressure is given by: It has been mentioned that cryogenic pumps, being of the gas capture type, have a finite capacity. Once these pumps have reached their capacity (become saturated) pumping action will cease. At this point the pump needs to be warmed up in a controlled manner to allow the release of the condensed gases in the pump's cryo arrays. This process is referred to as regeneration. During regeneration, all of the gases which have been captured by the pump will be released in concentrations much greater than normal in the atmosphere. It is possible, during regeneration, to release explosive or toxic gases in dangerous concentrations. For this reason the process of regeneration must be performed safely, following the pump manufacturer's directions. In general, one regenerates a compressed helium cryogenic pump following this procedure: Regeneration Procedure for a Compressed Helium Cryo-pump: 1. Close the head gate valve between the pump inlet and the vacuum vessel. Turn off any pressure gauges that are exposed to the cryo-pump body. 2. Stop the cold head motor. 3. Check the poppet valve on the cryo-pump body to insure that it is in good condition and is not physically obstructed. Dangerous over pressurization of the pump body will occur if the pressure release valve fails to operate properly. 4. Begin purging the pump body with dry, inert gas such as nitrogen or argon. (In some cases it is possible to speed regeneration if the purge gas is heated by flowing it through an electrically heated tube on its way to the cryo pump body). 5. If the cryo-pump is equipped with a blanket heater, turn this heater on. 6. Allow the pump to be purged with gas for a sufficient amount of time to allow removal of all trapped gases inside the cryo-pump. This time is a function of pump size and design; check manufacturer's specifications for the time duration for this operation. Following proper regeneration of the cryo-pump, the pump will be ready to resume service. Operation of a Cryo-pumped Vacuum System: Assuming all of the compressed helium lines are connected and properly purged, the sequence of operations is as follows: 1. Check the compressor to verify cooling water flow to the heat exchanger. 2. Start the compressor, allow it to operate for 30 minutes (the auto bypass circuit in the compressor will cycle compressed helium from the high pressure side of the compressor to the low pressure side). 3. Close all valves on the vacuum system. 4. Start the roughing pump; allow time for the roughing pump to warm up. 5. Open the roughing valve to the cryo-pump; pump the cryo-pump body down to a pressure of less than 50 milliTorr. Las Positas College Vacuum Technology 60A & 60B Page 150 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 6. Close the roughing valve. 7. Record the rate of pressure rise inside the cryo-pump body. If the rate of rise is less than 10 millitorr per minute, begin operation of the cold head. If the rate of rise is greater than 10 milliTorr per minute, the gas load in the pump is unacceptably high, and the cause must be identified and eliminated. 8. Observe the temperature of the cooled surfaces inside the pump using the pump's temperature monitor. Assuming the temp. probe is reading the second stage, when the temperature is below 10K, the pump is in a stable operational mode. 9. Refer to the manufacturer's literature for the crossover pressure specification for the pump model you are using. Calculate the crossover pressure. 10. Evacuate the vacuum vessel to a pressure below that calculated in step 10. 11. Close the vessel roughing valve and open the head gate valve. 12. Turn on vessel ionization gauge. Sample Problems: 11.5 Why is the regenerator filled with lead spheres? 11.6 Is the helium in the refrigeration cycle of a compressed helium cryogenic pump ever in the form of a liquid? 2. What type of sorbent is recommended? What amount of sorbent is recommended? 3. What are the time and temperatures recommended for regeneration of the cryo-sorption pump? 4. Identify the pressure relief valve on the cryo-sorption pump. How does it work? Is the pressure relief valve in good operating condition? What are the potential dangers associated with regeneration of this type of vacuum pump? Procedure: Assemble the equipment as shown in figure 11.3. Make certain the vacuum connections are secure. If necessary, regenerate the cryo-sorption pumps following the manufacturer's directions. Be careful to avoid contacting the hot surfaces with the skin and keep flammable materials at a safe distance from the sorption pumps during regeneration. Close isolation valves on each pump at the end of the regeneration cycle. When the pumps have cooled to room temperature, and are ready for use, attach a dewar to one pump at a time, fill the dewar with liquid nitrogen, and perform the following experimental measurements: 1. Using only one cryo-sorption pump, measure the time to evacuate the vessel from atmospheric pressure to 50 milliTorr. Close the isolation valve, vent the vacuum vessel to room air and repeat the evacuation, again recording the time to pump to 50 milliTorr. Repeat this process until the time to achieve the specified pressure is unacceptably long, or the pump fails to reach 50 milliTorr. Plot the data as pressure versus time for all the runs performed on a single piece of graph paper, clearly identifying each plot. Calculate the number of Torr-liters pumped during each measurement. Calculate the amount of gas (expressed in Torr-liters) required to saturate the pump. Compare this value to the manufacturer's specifications. 2. Repeat the steps in the first series of measurements, using a fresh cryo- sorption pump, this time initially flooding the vessel with helium. Following Las Positas College Vacuum Technology 60A & 60B Page 152 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 each evacuation, back-fill the vacuum vessel with helium. Plot the data as before and compare the results with the data for pumping air. What conclusions can you draw from this comparison? 3. Repeat the procedure in (2) using argon gas instead of helium. Again plot the data and draw conclusions on the performance of cryo-sorption pumps used to pump these three gas loads. Procedure: Assemble the equipment as was done for experiment 11.1. Regenerate the cryo-sorption pumps if necessary. Evacuate the vessel by opening all isolation valves simultaneously (parallel pumping). Record pressure as a function of time. Regenerate the cryo-sorption pumps and repeat the experiment, only this time open the cryo- sorption pump isolation valves sequentially (series pumping). Allow each pump to achieve its base pressure before closing its isolation valve and opening the isolation valve to the next pump. Plot the data for both measurements as pressure versus time, carefully labeling each set of data. Mark the plot of series pumping to show the point at which switching from one pump to the next occurred. How do the two sets of data (parallel versus series) compare? Which configuration produced the fastest initial pumping speed? Which achieved the lowest base pressure? Is your data consistent with your understanding of cryo-sorption pump operation? Laboratory Exercise 11.4: Inspection of a compressed helium cryogenic pump. Equipment required: a cryogenic pump, manufacturer's literature. Procedure: Using manufacturer's literature for the model cryo-sorption pump to be used in this activity. Answer the following questions: 1. What is the capacity of the pump for atmospheric gases? 2. Which gases are pumped on the inlet (80 K) array? 3. Which gases are pumped on the inlet (15 K) array? Las Positas College Vacuum Technology 60A & 60B Page 153 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 4. What is the sorbent material used on the underside of the 15 K array? 5. Locate the temperature gauge and probe. Where is the temperature measured? What is the operating temperature of this component? 6. Locate the radiation shield. Note the color of the shields interior and exterior. Why would the manufacturer intentionally choose these finishes? 7. How is the radiation shield attached to the inlet array? 8. Identify the pressure relief valve on the cryogenic pump body. How does the valve work? Is the pressure relief valve in good operating condition? What are the potential dangers associated with regeneration of this type of vacuum pump? 9. Find the purge gas inlet. How is flow of purge gas controlled? 10. Is the pump fitted with a blanket heater? How is the temperature controlled during regeneration? What is the maximum recommended temperature? What limits the maximum suggested temperature? Laboratory Exercise 11.5: Operation of a compressed helium cryogenic vacuum pump. Equipment required: a compressed helium cryogenic pump with cold head, compressor and charged helium lines, for cryo-pumps with an O-ring seal at the inlet flange: a 1" thick pyrex glass plate having a diameter at least 1" larger than the O-ring diameter; for other flange styles: a pyrex glass viewport to match the inlet flange. An oil sealed mechanical pump, connecting lines and an in-line pressure gauge capable of reading from atmospheric pressure to 1 milliTorr. Procedure: The instructor will assemble the cryogenic pump system. Place the glass plate or viewport on the inlet flange of the cryo-pump (see figure 11.3). Begin flowing cooling water into the compressor, and start the compressor. Rough pump the cryogenic pump body to approximately 10 milliTorr. Isolate the mechanical pump and record the rate of pressure rise for five minutes. Does the pressure rise indicate the pump is ready for operation? If the rate of rise test indicates the need for regeneration, follow the manufacturers recommendations and the procedure given in this unit to regenerate the pump. If the pump is ready for pumping, begin operation of the cold-head. Observe through the viewport the operation of the cryo-surfaces. Upon completion of the experiment, stop the cold head, turn off the compressor and vent the system (with dry inert gas, if possible). Discussion: When in the procedure for this experiment is it acceptable to turn off the mechanical roughing pump? Do you see any advantages to this? What temperature did you read on the cryogenic pump's temperature gauge? What does this suggest about the operation of the pump? Las Positas College Vacuum Technology 60A & 60B Page 151 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Chapter 12: Leak Detection Not available at present Previously several types of sub-atmospheric pressure gauge were described. All of these gauges share one common feature: they report the total gas pressure. Partial pressure analyzers, in contrast, provide more detailed information about the gases that exist in vacuum systems following evacuation (the so-called "Residual gases"). The data provided by partial pressure analyzers can be qualitative (specifying the identity of the gases present), or quantitative (giving the partial pressure of each gas). As one might expect, instruments that can identify and measure the partial pressures of individual gases that exist in a working vacuum system are somewhat more complicated than simple total pressure gauges. Partial pressure analyzers, or residual gas analyzers (RGA's) as they are commonly known, function by ionizing samples of gas from the vacuum system, separating the ions into discrete groups based upon their masses, and then counting the amount of ions in each group. The details of each of these steps will be discussed in the unit. Partial pressure analysis is a comparatively recent addition to vacuum technology. While the principles of mass spectroscopy (analysis of ionized gases on the basis of mass differences) have been known since 1918, practical application in the field of vacuum technology was not demonstrated until 1960. In his ground-breaking work, H.L. Caswell used a mass spectrometer to show the beneficial effect of viton gaskets over other elastomer seals, and also the effectiveness of Meissner coils and getter pumps. Today we can select from a wide variety of partial pressure analysis instruments which conveniently attach to standard vacuum hardware. These instruments can range from small, simple to operate and reasonably inexpensive units used to monitor specific gases in a vacuum process chamber, to large, extremely sensitive and very expensive instruments used to detect minute traces of gases. Although there exist quite a few methods by which ions may be separated, only two of these methods are used in current commercial partial pressure analyzers: magnetic field and electric field separation. Magnetic fields Magnetic & Electric fields Electric fields Quadrupole Monopole Cycloidial Cyclotron Resonance Magnetic sector SPATIAL SEPARATION TEMPORAL SEPARATION Time of flight Las Positas College Vacuum Technology 60A & 60B Page 153 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Specifically, we will discuss the principles of operation of quadrupole and magnetic sector mass spectrometers. Both of these mass spectrometers fall in the category of "spatial separators" that is, they physically separate beams of ions on the basis of mass-to-charge ratio. Time of flight mass spectrometers, in contrast, rely upon the differing velocities of ions having different masses as a means of separation. The concept of mass separation was introduced in the previous unit on leak detection. Helium mass spectrometer leak detectors are, in fact, partial pressure analyzers (usually of the magnetic sector type) which are permanently tuned to detect a test gas such as helium. Ionization of Gas While other methods for ionization of sub-atmospheric pressure gases exist (such as field emission and chemical ionization), the most widely used technique for partial pressure analyzers is electron-impact ionization. Electrons emitted from a heated metal filament are electrostatically attracted to an anode, or electron collector plate, by an imposed electric field of from 50 to 150 V DC. On route to the anode, some of the electrons strike neutral gas molecules, stripping off one or more outer-shell electrons, creating positive ions. Some molecules may be split into fragments during this process, each fragment being a positive ion which will be mass separated and detected in the spectrometer. Filaments used in partial pressure analyzers may be made from a variety of refractory metals and alloys, each having unique characteristics that become important when performing critical work. Pure tungsten filaments when heated emit significant amounts of carbon monoxide and carbon dioxide. Iridium filaments which have been treated with thorium ("thoriated") are selected for use when high partial pressures of oxygen will be present. It should be noted that thoriated iridium filaments are susceptible to contamination from hydrocarbons. When this occurs, the electron emission from this type of filament will be degraded. Other special purpose filaments may be made of rhenium or lanthanum hexaboride. Figure 13.1 The components in the ionizer of a partial pressure analyzer. Las Positas College Vacuum Technology 60A & 60B Page 154 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Not all of the molecules which enter the ionizer exit the other side as ions. For a fixed electron accelerating potential (70 V, for example), the probability of ionization is gas specie dependent. In addition to having different ionization probabilities for a given electron energy, the response of each gas to electrons of differing energies is unique. Fortunately, the ion production by electron impact for each gas specie is directly proportional to the partial pressure of that gas specie. Acceleration of Ions Once positive ions are created in the ionizer, they are accelerated towards the mass separator by an electric field applied to a set of apertures called the accelerating aperture or entrance aperture. The degree to which ions are accelerated is a function of the mass of the ion, the charge on the ion, and the accelerating voltage (V a ) on the entrance aperture. For singly charged ions, accelerated by a fixed voltage, V a, the velocity to which the ions are accelerated is greatest for ions of low mass and lowest for ions of high mass. In some mass spectrometers the accelerating voltage is ramped from an initial low value to a higher value in order to aid in mass separation. Typical values for the bias on the acceleration apertures are from 1 to 5 kV DC. Mass Separation Of the two mass separation techniques that will be covered in this unit, (quadrupole electric field separation and magnetic sector separation), the magnetic sector is the easiest to understand. In this method, ions emerging from the ionizer and accelerated by the entrance slit enter a strong magnetic field (usually generated by a permanent magnet). Under the influence of this magnetic field the trajectory of the ions is bent according to the formula given in 13.1 below. Sample Problems: 13.1 Calculate the radii of curvature for common atmospheric gases and water vapor using the following criteria: magnetic field strength = 0.1 Tesla, accelerating potential = 2000 V, all species are singly ionized. 13.2 Explain why it is the mass-to-charge ratio that determines the trajectory of an ion in a magnetic sector mass separator rather than simply the mass of the ion. magnet M-1 z M z M+1 z ion source slits 1-5 kV detector r Figure 13.2 Simplified drawing of the components in a magnetic sector mass spectrometer. As is suggested pictorially in figure 13.2, for a given set of conditions (accelerating potential and magnetic field strength) only ions of a specific mass-to-charge ratio will have the correct trajectory to pass through the slits just before the detector. Ions that have a larger mass-to-charge ratio are less strongly deflected by the magnet, and swing wide of the exit aperture. Similarly, ions with a lower mass-to-charge ratio have their trajectories more severely curved by the magnetic field, and also are prevented from reaching the detector by the exit aperture. Las Positas College Vacuum Technology 60A & 60B Page 156 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 In practice, to achieve mass selection by varying acceleration potential alone would require a power supply capable of generating stable sweep voltages across a large voltage range. The practical solution to this problem is to divide the mass-to-charge range into two or three segments, and to use multiple permanent magnets to augment the magnetic field strength. In this method the atomic mass unit (AMU) range of from 2 to 50 is scanned using a 0.1 Tesla permanent magnet, while the 50 to 300 AMU range is scanned using a 0.25 Tesla magnet. In some expensive mass spectrometers electromagnets are used instead of permanent magnets. The electromagnets in these units have variable field strength, based upon the amount of electric current passed through the coils of the electromagnet. Quadrupole mass spectrometers use AC and DC electric fields to perform separation of ions based upon the mass-to-charge ratio. Figure 13.3 Simplified representation of the electrical circuits supplying AC and DC voltages to the two pair of rod-shaped electrodes in a quadrupole mass separator. As the name suggests, there are four "poles" or rod-shaped electrodes in a quadrupole mass spectrometer that function to separate ions based upon the mass-to-charge ratio of the ions. The poles of the spectrometer are paired electrically as shown in figure 13.3. One set of opposing electrodes are biased positively using a DC power supply, while the other two are biased negatively by another DC power supply. A radio frequency (RF) alternating current is superimposed on the DC voltage applied to both sets of electrodes. The rods are held in precise position with respect to one another and the other components of the spectrometer by precision machined ceramic discs. Each disc has four holes in it to support, align and electrically insulate the four rods. These ceramic supports allow the rods to be accurately repositioned in the spectrometer following cleaning. Las Positas College Vacuum Technology 60A & 60B Page 157 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 The set of rods biased positively by a DC power supply acts as a "high-pass" filter collecting ions having a mass-to-charge ratio greater than a specified value. The Other set of rods, biased negatively, by the other DC power supply acts as a "low-pass" filter, and collects ions having mass-to-charge ratios less than a certain value. Together the two sets of rods provide an effective means for allowing only the ions having the desired mass-to-charge ratio to be counted at the detector. + + - - U + V(cos t) ω U - V(cos t) ω −U +U +/- V +/- V Figure 13.4 A positive ion of low mass-to-charge ratio oscillating under the influence of applied AC and DC electric fields. As shown in figure 13.4 ions having a low value of mass-to-charge are strongly affected by the radio frequency AC current superimposed upon the positively biased rods. The amplitude of oscillation for these ions grows rapidly as the ion moves through the mass separator until the ion strikes one of the rods. Ions which impact a rod lose their charge and cannot be detected. Ions of high mass-to-charge ratio are "filtered' by the effect of the rods which have a negative DC bias as shown in figure 13.5. These more massive ions are much more sluggish in their response to the RF AC electric field than the lighter ions. The net effect of the negative bias on the more massive ions is to gradually drag them towards one of the negatively biased rods as the ion passes through the mass separator. Again, once an ion collides with an electrode, it loses its charge and cannot be detected. By choosing appropriate values for the acceleration potential, and the DC and AC bias potentials, a very effective mass filter can be created. In practice, one parameter (accelerating voltage, RF or DC potentials) is varied in time, and ion current is recorded for each mass-to-charge ratio. Figure 13.5 A positive ion of high mass-to-charge ratio oscillating under the influence of applied AC and DC electric fields is strongly attracted to the rods having a negativeDC bias. Detection of Ions For either type of mass separator (magnetic sector or quadrupole) the ions which are not "selected out" impact the ion detector, where they generate an electrical signal. This signal is amplified electronically and sent on to pulse counting circuitry, and finally emerges as intensity (ion current) versus mass-to-charge ratio. Several types of ion detectors are used in commercial mass spectrometers. Simple, inexpensive units often employ a Faraday cup, while the more sensitive, higher-end units use either a Faraday cup/secondary electron multiplier combination or a channel electron multiplier. The sensitivity of ion detectors is typically specified in terms of electrical current per pressure, such as amps/Torr. Values for the sensitivity of detectors can range from 4 x 10 -6 to 1.0 x 10 -5 Amp/Torr, assuming nitrogen ions. For an operational pressure range of from 10 -2 to 10 -12 Torr, the current range that a typical detector must be able to register is from 10 -6 to 10 -17 amps. Las Positas College Vacuum Technology 60A & 60B Page 159 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 anode first dynode -V Faraday cup ions from mass-selector Figure 13.6 .Ion detector for a mass spectrometer. This is a diagram of a combined Faraday Cup and secondary electron multiplier type detector. In a compound detector, as pictured in figure 13.6, the broad range of possible ion currents is handled by operating either the Faraday cup alone or in conjunction with the secondary electron multiplier (SEM). Ion currents from 10 -6 to 10 -12 amps may be measured using the Faraday cup alone. Ion currents of from 10 -12 to 10 -17 are measured by grounding the Faraday cup and applying a negative bias (-1 to -3 kV) to the resistor chain attached to the dynodes of the secondary electron multiplier. During operation of the SEM the initial low ion current (10 - 12 to 10 -17 amps) is amplified by electron multiplication. Ions striking the grounded Faraday cup create secondary electrons upon impact. These secondary electrons are electrostatically attracted to the first dynode of the SEM. These dynodes are often fabricated from material which readily emits many electrons during bombardment with electrons. Copper-beryllium alloys (Cu 2-4 %, Be) which have been heat-treated to create a beryllium oxide surface film exhibit this favorable electron emission characteristic. Electrons created at the first dynode are attracted to the second dynode by the applied electric field, and upon striking the surface of the second dynode, again generates a cascade of secondary electrons for every arriving electron. In this manner, signal gains of from 10 5 to 10 6 may be achieved. Sample Problems: 13.2 Describe the differences in the principle of operation between magnetic sector and quadrupole mass spectrometers. 13.5 What characteristic of Cu-Be alloys make them a good choice for the dynodes of a secondary electron multiplier? Another type of ion detector is the channel electron detector. These detectors achieve gain by the same mechanism as the SEM previously described: electron multiplication. electrometer -HV positive ions Figure 13.7 Channel electron multiplier and associated electronics. In the channel electron multiplier, an ion incident upon the funnel shaped cathode creates a cascade of secondary electrons that are electrostatically attracted down the curved electron multiplier tube. The tube is made of a special glass containing lead oxide and bismuth oxides. The inherent high resistivity of the glass provides an electrical resistivity similar to that made by the chain of resistors in an SEM. The channel multiplier tube is curved for two reasons: it prevents positive ions from traveling backwards through the tube, and to maximize the effective number of "dynodes" for electron multiplication. An advantage of this type of electron multiplier over an SEM is that the channel electron multiplier can withstand repeated exposure to air. Both types of electron multipliers have a finite useful lifetime, which is generally on the order of one to two years. Be aware that stray magnetic fields (from ion pumps, for example) can affect the trajectory of electrons within either type of electron multiplier. The culmination of this complex series of steps (ionization, acceleration, mass selection and ion detection) is the representation of the data as signal intensity as a function of mass-to-charge ratio. Almost universally this data is output to a CRT screen as a graph which may look something like that presented in figure 13.8. Operation of Partial Pressure Analyzers Care should be taken in the use of partial pressure analyzers. Instruments of this type, even the "low-end" units are quite expensive and easily damaged by misuse. Installation of an analyzer on a vessel should be made with the following questions in mind: 1) What characteristic of the vacuum environment am I attempting to measure? (qualitative versus quantitative data). 2) What will the maximum pressure be in the spectrometer? 3) What mass range of gas (AMU) is expected? 4) Will the vessel and the spectrometer need to be baked-out? If so, at what temperature? 5) Is contamination of the partial pressure analyzer possible? How can the possibility of contamination be minimized? 6) Will the resolution of the partial pressure analyzer be sufficient for the application. Definition of the Peak Resolving Ability of a Mass Spectrometer Resolution in a mass spectrometer may be broadly defined as the ability of the instrument to clearly identify signals from ions of two similar mass-to-charge ratios. There are several accepted means for analytically defining the resolution of a mass spectrometer. For adjacent peaks M 1 and M 2 in a spectra, if the intensity in the valley (h) between the peaks is less than 10% of the value of the intensity at peak maxima (H) the resolution is defined as M 1 / (M 1 and M 2 ) (see figure 13.9). Las Positas College Vacuum Technology 60A & 60B Page 162 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 H h R = M 1 M 2 − M 1 for H > 10 h M 1 M 2 Figure 13.9 Definition of resolution for two adjacent peaks observed in a mass spectra. For a single peak in a mass spectra, the resolution may be defined as the quotient of the mass-to-charge ratio at maximum peak intensity divided by of peak width at half maximum intensity, as shown in figure 13.10. H M ∆M H/2 R = M ∆M Figure 13.10 Definition of resolution for a single peak observed in a mass spectra. Differentially Pumped Partial Pressure Analyzers Some vacuum processes are conducted at pressures above the recommended value for operation of partial pressure analyzers. Examples of such processes include: sputter deposition and plasma etching. It may be very useful to diagnose processes such as these using partial pressure analysis. This is typically done by limiting the flow of process gases into the spectrometer and by adding a dedicated high vacuum pump to evacuate the spectrometer. Such a system is referred to as a "differentially pumped" partial pressure analyzer. A drawing of such an instrument is presented in figure 13.11 The purpose of the aperture between the analyzer and the vessel is to limit flow of gas through the spectrometer. The second (often variable opening) aperture's function is to allow control of the pumping speed of the high vacuum pump dedicated to the Las Positas College Vacuum Technology 60A & 60B Page 163 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 spectrometer. Fixed apertures may conveniently be made by drilling a small hole in a copper disc which is then substituted for the copper gasket in the flange joint. Small turbomolecular pumps are often selected for this application, as they generally produce very little contamination due to backstreaming, do not create a strong magnetic field (as do ion pumps). Differentially pumped partial pressure analyzers find much use in the semiconductor industry. It is of much economic importance to that industry to have the capability to accurately determine the "endpoint" of a plasma etching process. This is accomplished by monitoring the partial pressures of the gaseous by-products of the etching process. Similarly, in the process of thin film deposition by sputtering, it is occasionally very useful to monitor the purity of the process gas and any contaminants due to outgassing, permeation or leaks. Sample Problem: 13.6 Calculate the resolution of a mass spectrometer if the width of a peak at half maximum is 0.1 AMU for a peak centered at 50 AMU. auxilliary pump RGA Vacuum vessel aperture 1 aperture 2 Figure 13.11 Cross-section of a differentially pumped partial pressure analyzer with two flow limiting apertures and an isolation valve. Residual Gases in Vacuum Vessels - Their Characteristics and Probable Sources Quite often the technique of partial pressure analysis is applied to a vacuum system which is exhibiting out of normal performance (high base pressure, frequent filament burnout for systems with heated filaments, poor film adhesion in deposition systems, etc.). Interpretation of data from a partial pressure analyzer can be made significantly more straight-forward if some information about the recent history of the vacuum system under study is known. As with most fault-finding techniques is it often useful to start with the most recent occurrences (vessel modifications, significant deviations from normal operating procedures, etc.) and work backwards. Below are some questions which may provide insight into the sources of residual gases in a vacuum vessel. 1) Has any fixturing internal to the vacuum vessel been modified or replaced. Reference Information for Partial Pressure Analysis Assuming a partial pressure analysis is performed on a system, the first step in turning the data into meaningful information is to gain a qualitative understanding of the nature of the gases in the system. As an aid in this process table 13.2 provides some information relevant to specific mass-to-charge ratios which may show peaks of varying intensity in a partial pressure analysis. Mass-to- charge ratio Suspected gas specie Comments 2 hydrogen hydrogen is often the major gas load in UHV systems due to permeation through stainless steel vessel walls. Dissociation of water and hydrocarbons may also give a peak at 2. 4 helium May be present following leak checking. Helium also permeates elastomeric seals. 16 oxygen Singly ionized monatomic oxygen may be present due to dissociation of water, or from an air leak. 18 water In the high vacuum range water vapor is the largest contributor to the gas load. If water is present peaks should also be seen at 16 and 17. 19 fluorine May indicate the decomposition of fluorinated hydrocarbons in the vessel. 20 neon May be observed in UHV systems with ion pumps. 28 nitrogen Diatomic nitrogen, single ionized. If nitrogen is present, an air leak may be the cause. A peak at 14 for monatomic nitrogen, singly ionized should also be present. 32 oxygen Diatomic oxygen, singly ionized. The presence of this specie may indicate an air leak, especially if a stronger peak at 28 (nitrogen) is observed. 40 Argon Argon may be present due to an air leak. Check for oxygen and nitrogen. 44 carbon dioxide May be generated from heated tungsten filaments, as with CO. 45 isopropyl alcohol May be a residue from a cleaning process used on a component in the vessel, especially in tapped holes. 58 acetone See comments for isopropyl alcohol. 95 trichloro-ethylene See comments for isopropyl alcohol. Another aid in gaining useful information from partial pressure data are the reference library and spectra search functions that are available on many modern computer-based instruments. With these features one may compare spectra obtained by the instrument to known reference spectra that exist in the library. Some of the correlation functions also provide the means to analytically describe the quality of the match between the data and the reference spectra. Some of the computer controlled instruments will also permit automated periodic sampling and will generate a history of the partial pressures of selected gases as a function of time. Understanding how to interpret scans from a mass spectrometer is a valuable skill. Use of the process of elimination will quickly provide a very short list of possible gas identities. The following simple rules will help in establishing which gases are likely present in the vacuum system under analysis: 1) Start with the most intense peak in the spectra. Assume that this peak is due to a singly ionized atom or molecule. Refer to figure 13.12 for this example. 2) Note the mass-to-charge ratio of this most intense peak. The molecular weight (if the single ionization assumption is correct) cannot be more than the value of the mass-to-charge ratio for this peak. 3) Refer to the periodic table, using the listed atomic weights, write down the possible combinations of elements that have atomic weights that sum to equal the mass-to-charge ratio of the most intense peak in the scan. In our example, the mass-to-charge ratio is 18. the possible combinations of elements whose atomic weights sum to 18 are: 2H + O; N + He; 2Be, B + 2He; and C + He +2H. Of these, the only likely possibility is 2H + O, otherwise known as H 2 O. 4) Look at the peaks associated with the major peak which have lower mass-to- charge ratios. Determine if it is possible that these peaks may be molecular fragments of the major peak. In this example, some of the H 2 O has been dissociated in the ionizer of the partial pressure analyzer to create the fragments OH and O, which have mass-to-charge ratios of 17 and 16 respectively. 5) Mark those peaks that have tentatively been identified, and repeat steps 1 through 5 for the remaining peaks in the spectra. As was mentioned in the section describing the ionizer, molecular gases, such as water, carbon dioxide, and oil vapors will almost certainly become dissociated (fragmented) during the ionization process. Each of the fragments will become positive ions which will be accelerated, mass analyzed and detected. The peaks on a mass spectra that are due to the fragments of a disassociated molecule are often referred to as a "cracking pattern". Understanding this concept will aid greatly in both qualitative and quantitative interpretation of mass spectra In the following table are listed the fragments and mass- to-charge ratios for several common gases. Las Positas College Vacuum Technology 60A & 60B Page 167 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Sample Problem: 13.7 The mass spectra for each of the cracking patters listed in equation set 13.2 is provided in figures 13.12 through 13.14. For each of these mass spectra, identify the peaks by writing the ion next to the peak it corresponds to. High resolution mass spectrometers can also discriminate between the isotopes of gas species. An isotope of an element has a different number of neutrons in its nucleus than other isotopes of the same element. This difference in nuclear structure creates a slightly different atomic weight. This effect can be seen in the mass spectra of the noble gas, Argon(see equation 13.3, and figure 13.15) Quantitative Analysis of Mass Spectra As was suggested earlier in this unit, two types of information about the residual gases in an evacuated vessel may be gained through partial pressure analysis: identification of species present (qualitative information) and the amount of each species (quantitative information). Inexpensive mass spectrometers typically do not have the resolving power required to clearly identify overlapping peaks (carbon monoxide and nitrogen, for example) and are typically not used for quantitative analysis of mixtures of gases. For spectra of mixtures of gases which do not have overlapping peaks, one may use the following steps to perform a rough quantitative measurement: 1) Identify all of the peaks in the mass spectra. 2) For each peak obtain from the instrument's manual the sensitivity of the instrument for each gas specie (S), as well as the detector gain for each specie (G). 3) Calculate the partial pressure of each gas using the formula provided in equation 13.5. Analysis of mass spectra of gas mixtures in which peaks overlap, such as carbon monoxide and nitrogen are somewhat more complicated. The measured intensity of a peak will be the algebraic sum of the intensities of the two peaks which are overlapping. Las Positas College Vacuum Technology 60A & 60B Page 170 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 One must use reference data to establish the ratios of peak intensities for the peaks from each of the gases in the mixture. Using the subsidiary peaks which do not overlap, estimate the partial pressures of the gases in the mixture, using the technique just described. Once this initial estimate of the partial pressures of each gas is in hand, use the gain and sensitivity to solve for the total ion current for each component that contributes to the intensity of an overlapped peak. Laboratory Exercise 13.1: Qualitative identification of species in mass spectra. Equipment required: none. Procedure: Using the table of cracking patterns for materials commonly used in vacuum technology (Appendix X), identify the constituents in each of the following mass spectra Procedure: Review the installation and operating guidelines for the partial pressure analyzer you have selected for this experiment. After reading and understanding the procedures in these instructions, inform the laboratory instructor of your procedure for installation and operation of the instrument. With his approval, begin the installation of the spectrometer head onto the vacuum vessel. Attach the mass spectrometer head to the vacuum vessel with an isolation valve between the two. Attach the reference leaks to the vessel. Connect the spectrometer to the control unit as suggested by the manufacturer. Evacuate the vacuum vessel to a pressure of 10 -5 Torr or less. Following the manufacturer's operating procedures, obtain the partial pressure analysis of the residual gases in the vessel. Repeat the measurement at five minute intervals for an hour to see how the partial pressures of gases in the vessel change during operation of the high vacuum pump. Following this series of measurements, open one reference leak briefly (1-2 seconds), and observe the mass spectra. Note any changes in the mass spectra. Wait until the mass spectra returns to a "baseline" reading similar to that prior to the injection of gas from the reference leak. Repeat the controlled injection of known gas with the remaining reference leaks that are attached to the vessel. Following completion of all experimental work, turn off the partial pressure analyzer following the manufacturer's suggested procedures. Shut down the vacuum system safely, and vent the pumps and vessel. Write a laboratory report of your procedures and findings, including the data collected. Las Positas College Vacuum Technology 60A & 60B Page 171 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Chapter 14: Thin Film Deposition Processes Up to this point in the course almost all of the emphasis has been placed on the techniques involved with certain activities related to achieving and characterizing a vacuum environment. Now we will turn our attention to the reasons for working so hard to achieve a vacuum: the processes that are conducted in this environment. The deposition of thin films has made a tremendous impact on the level of technology we utilize in our daily lives. Thin film coatings provide enhanced optical performance on items ranging from camera lenses to sunglasses. Architectural glass is often coated to reduce the heat load in large office buildings, and provide significant cost savings by reducing air conditioning requirements. Microelectronics as we know them today would not be possible without vacuum technology. Microcircuits fabricated in multi-step vacuum processes are used in devices ranging from wrist watches to microwave ovens to automobile ignition and monitoring systems. The computer industry would not exist if it were not for vacuum technology. In 1990 the world market for integrated circuits was $50 billion; and for the electronic devices which rely on these microcircuits, $0.9 trillion. Decorative coatings applied to jewelry and plumbing fixtures is another large industry based upon vacuum technology. Many of the components of plumbing fixtures are manufactured by depositing thin films of chromium onto injection molded plastic parts. The useful life of tool bits has also been increased by the application of thin films that are chemical compounds. Tool steel cutting tools used in lathes and mills are often coated with the chemical compound titanium nitride to reduce wear of the cutting edges. The deposition of thin films composed of chemical compounds may be performed in several ways. Co-deposition is a technique in which vapors of two different materials are generated simultaneously. These two vapors condense together, forming an alloy or compound. Other techniques for deposition of compounds include thermal evaporation of the compound (as is performed for salt coatings), sputtering of the compound, and reactive sputtering or evaporation. In the reactive processes, atoms of the evaporant (typically a metal) chemically react with gas species which are intentionally injected into the process chamber. Each of these processes will be described in detail. Thin Film Deposition in a Vacuum Environment Early references to the science of thin film deposition include the research conducted by Michael Faraday in 1857. In this series of experiments, Faraday created thin metallic films by exploding metal wires in a vacuum vessel. Historically, the techniques for thin film deposition have evolved in approximately this order: thermally induced evaporation (by electrical resistance heating, induction heating, and electron beam heating), sputtering (diode, triode, magnetron, ion beam), arc processes, and most recently, laser ablation. In general, there are three steps in any physical vacuum deposition (PVD) process: creation of an evaporant from the source material, transport of the evaporant from the source to the substrate (item to be coated), and condensation of the evaporant onto the substrate to form the thin film deposit. There are two reasons why this process is best conducted under vacuum: 1. the process of evaporation involves significant amounts of heat, if oxygen were present, any reactive metal would form oxides; 2. collisions with Las Positas College Vacuum Technology 60A & 60B Page 172 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 gas molecules during the transport of evaporant from source to substrate would reduce the net deposition rate significantly, and would also prevent growth of dense films. source evaporant substrate vacuum vessel Figure 14.1 The three basic steps in any physical vapor deposition process: evaporation from the source, transport of evaporant, and condensation of the evaporant. Upon arrival at the substrate, evaporated material condenses on the substrate in a complex sequence of events that determine many of the physical properties of the deposited film. The steps in the growth of thin films are generally referred to as nucleation and growth. In nucleation, the atoms and molecules which are arriving (called ad atoms) at the surface lose thermal energy to the surface, and the surface absorbs that energy. Depending on the amount of thermal energy the ad atoms and the surface have, the ad atoms move about on the surface until they lose the thermal energy required to move about the surface (referred to as Adam mobility). As nuclei continue to form, the film grows into a continuous sheet covering the substrate. Chemical interactions between the ad atoms and the surface determine the strength of the bond between the film and substrate. Gold, for example, does not form a chemical bond with silicon dioxide, and therefore, the adherence of gold films on glass are very weak. Improvement of this adhesion may be made by first depositing a thin (500Å thick) "Binder" layer of chromium or niobium, then depositing the gold over the binder layer. Chromium and niobium do form chemical bonds with the silicon dioxide in glass, and also form metallic bonds with the following gold layer. Once a few monolayers of evaporant have condensed on the substrate, the film continues to grow in thickness as if the entire substrate were made of the material being deposited. During film growth the Las Positas College Vacuum Technology 60A & 60B Page 173 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 microstructure of the deposited film will be developed. This microstructure may be described in terms of grain size, orientation, porosity, impurity content, and entrained gases. Normally, vacuum deposition processes are selected over other processes (electrochemical deposition, flame spraying, etc.) to achieve the following desirable properties: 1) High chemical purity. 2) Good adhesion between the thin film and substrate. 3) Control over mechanical stress in the film. 4) Deposition of very thin layers, and multiple layers of different materials. 5) Low gas entrapment. For each of the vacuum deposition process described in this unit, keep in mind the ultimate goal is to provide a means for depositing a thin film having the required physical and chemical properties. The parameters one can control to achieve the specified goals are: 1) Kinetic energy of the ad atoms. 2) Substrate temperature. 3) Deposition rate of the thin film. 4) Augmented energy applied to the film during growth. 5) Gas scattering during transport of the evaporant. By varying these parameters one can generate thin films of a given material that have different mechanical strength, adhesion, optical reflectivity, electrical resistivity, magnetic properties and density. Thermally Induced Evaporation In this process, heat is input into the source material (often called the charge) to create a plume of vapor which travels in straight-line paths to the substrate. Upon arrival at the substrate, the atoms, molecules, and clusters of molecules condense from the vapor phase to form a solid film. The heat of condensation is absorbed by the substrate. On a microscopic scale the localized heating from this process can be enormous. It is common, in the development of metal coating techniques for thin cross-section plastic parts, to melt substrates during the initial deposition runs. With experience, one can select source-to-substrate distances and deposition rates which will allow coating of temperature sensitive substrates without melting. There are several methods by which heat can be delivered to the charge to cause vaporization: electric resistance heating, induction heating, and electron beam heating. Deposition of thin films by laser ablation and cathodic arc could be grouped in this section with thermal processes, but there are some unique characteristics of these techniques which are beyond the simple model of thermally induced evaporation. For this reason we will cover these two deposition techniques separately. Resistance Evaporation Las Positas College Vacuum Technology 60A & 60B Page 174 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Evaporation of material by electrical resistance evaporation is very likely the easiest of the thermal evaporation techniques. Quite simply, in a vacuum environment the charge (which may be an elemental metal, an alloy, a mixture or a compound) is heated to become a vapor. Low voltage, high current (typically 10 to 40 VDC, 1 to 10 amps) power is brought into the vacuum vessel using electrical power feed throughs. The electrical power is passed through a filament which is in intimate contact with the charge (see figure 13.1). Filaments are often heated to 1000 to 2000° C. A materials requirement for efficient thermal evaporation is that the charge have an appreciable vapor pressure at the operating temperature of the filament. All materials evaporate, even at room temperature. The addition of heat simply accelerates the process. At a specified temperature the pressure of the vapor emitted by a material is called the equilibrium vapor pressure. Las Positas College Vacuum Technology 60A & 60B Page 175 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Figure 14.2 Equilibrium vapor pressure as a function of temperature for five metallic elements. The relationship between the equilibrium vapor pressure of a material and the temperature generally follows the pattern shown in figure 14.2. Cadmium, for example has a significantly higher vapor pressure at all temperatures than any of the other metals shown in this figure. Similarly, Rhenium has the lowest vapor pressures of these five metals at all temperatures. Vapor pressure curves for many of the metals that are used as charge material are provided in Appendix Y. Numerical values for the vapor pressure of a given metal at a specified temperature may be read directly from vapor pressure curves like that shown in figure 14.2. Cadmium, for example, has a vapor pressure of approximately 5 x 10 -3 Torr at 500 K (227 °C). By comparison, rhenium does not achieve a vapor pressure of 5 x 10 -3 Torr until it is heated to almost 3000 K (2730 °C)! Las Positas College Vacuum Technology 60A & 60B Page 176 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 Sample Problem: 14.1 Use figure 14.2 to determine the vapor pressure of aluminum and silver at 1300 °C. 14.2 Equilibrium vapor pressure curves, such as that presented in figure 14.2 are useful for thin film evaporation. What other uses for this information can you imagine for vacuum technology? Thermal evaporation is typically conducted under high to ultra-high vacuum conditions. Bell jar type vacuum vessels are often selected to perform this process on a laboratory scale, as they offer a great deal of design flexibility as well as the advantage of direct observation of the process at a very reasonable cost. Filaments are usually made of refractory metals such as Tungsten, Tantalum, or their alloys. Some of the requirements for a good filament material are: There exists a great variety of filament configurations ranging from straight and coiled wires to "boats" and boxes (see figure 14.4). Each type of filament is designed for a unique application. Coil filaments made of refractory metal strands are loaded with the charge by hanging small sections of wire made of the charge material on the coil. Upon heating, the charge melts, and wets the coil. Further heating causes the evaporation of Las Positas College Vacuum Technology 60A & 60B Page 177 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 the charge from the coil filament. Very rapid heating of a filament with hanging charge material may cause the charge to melt locally and fall off the filament. Some skill is required to attain thin film deposits from run to run which have consistent thicknesses. One technique that helps is to carefully weigh the charge for each run, keeping the weight the same, and operating the filament so as to completely evaporate the charge each run. There are some inherent disadvantages of resistance heated thermal evaporation that should be kept in mind when selecting a deposition technique: 1) The source may generate impurities which may co-deposit in the condensing thin film. 2) Accurate control of the deposition rate is difficult. 3) The composition of alloy thin films deposited may differ from that of the charge material (especially if the elements in the alloy have markedly different vapor pressures). 4) The amount of material which may be evaporated per run is limited. 5) The substrate will experience heating due to radiant energy from the source. helical filament conical basket flat boat with dimple trough style boat Molecular beam epitaxy (MBE) is a modern application of electric resistance heated thermal evaporation. This technique is used to accurately deposit ultra-high purity semiconductor materials with specified crystallographic orientations between the layers of different materials. The vacuum environment for MBE is typically in the extreme ultra- Las Positas College Vacuum Technology 60A & 60B Page 178 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 high vacuum range (10 -9 to 10 -11 Torr). Evaporation of materials in an MBE vacuum system is conducted using a special thermal evaporation source called a Knudsen cell. Sample Problem: 14.3 Define "Epitaxy". How is an epitaxial thin film different than other films that are deposited on a crystalline substrate?. {Hint: see the dictionary}. Induction Heated Thermal Evaporation In this technique an electric current is induced to flow through an electrically conductive charge material by the application of radio-frequency (RF) alternating current. The RF current is generated by a power supply which may range in output from 1 to 50 kilowatts, depending on the size of the charge. The AC current is flowed through the copper coil which surrounds a refractory ceramic crucible. induction coil crucible Figure 14.6 A crucible and coil used for induction heating for thermal evaporation. For all forms of thermal evaporation which employ ceramic crucibles, selection of the appropriate material for the crucible is vitally important. If the incorrect selection is made, the charge may chemically react with the crucible, ruining both and possibly harming other components of the vacuum deposition system. Las Positas College Vacuum Technology 60A & 60B Page 179 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 1) The charge must be electrically conductive. 2) RF power supplies and matching networks can be expensive and quite large. 3) Chemical interaction between the charge and crucible can occur. Sample Problem: 14.4 What property of materials makes thermal evaporation possible? How can one manipulate this property to deposit thin films of materials? Electron Beam Evaporation In this thermal evaporation process, a beam of energetic electrons generated from a heated filament supplies the thermal energy to evaporate of the charge. There are several variants of the electron beam evaporation process. All electron beam thermal evaporation systems have an anode (biased positively) and a cathode (either grounded, or biased negatively with respect to the anode). The two divisions we will cover are self- accelerated and work-accelerated electron beam evaporators. In the work-accelerated scheme, electrons emitted from a heated tungsten filament are attracted to the charge Las Positas College Vacuum Technology 60A & 60B Page 180 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 material by an applied high voltage bias (10- 40 kV DC). A focusing aperture aids in minimizing spurious heating of the vessel interior by off-axis electrons. filament focussing apreture Crucible charge electrons filament heating power supply accelerating voltage vacuum vessel Figure 14.7 A work-accelerated electron beam evaporator. Several configurations of the work-accelerated electron beam evaporator have been designed and used. In figure 14.8 electrons emitted from the heated cathode are caused to travel in an oval shaped path by the electrostatic negative field applied to the cylindrical focusing electrode. Water cooling is provided via concentric tubes connected thermally to the bottom of the charge. This design has a distinct advantage over that shown in figure 14.7: the evaporant may be directed at a substrate placed above the source without interference by a focusing aperture or filament. Additionally, the focusing aperture and filament do not become heavily overcoated with evaporant. Some work-accelerated electron beam evaporators use electromagnetic coils to steer and focus the electron beam as shown in figure 14.9. This system provides several Las Positas College Vacuum Technology 60A & 60B Page 181 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 advantages: source utilization can be controlled and maximized by rastering the electron beam; and the effective source size can be made large by rastering the beam, improving the thickness uniformity and coverage of the substrate. Note that in this design the electrons emitted from the filament impact the backside of the cathode, heating it so that it will in turn emit electrons. The cathode area which emits electrons is hemispherical, which improves the three-dimensional uniformity of the electron beam emitted from it. Self-accelerated electron beam evaporators use an auxiliary anode to impart kinetic energy to the electrons emitted by the filament (cathode). This allows the evaporation of charge materials which are not electrically conductive, such as calcium fluoride, which is used to coat camera lenses for improved optical performance. A self-accelerated electron beam gun configuration is presented in figure 14.10. As was the case with the work accelerated electron beam evaporator in figure 14.9, the self-accelerated gun has a set of electromagnets which may be used to scan the electron beam during evaporation. Automated scan controls for both types of guns are commercially available. These scan controls vary the current in the electromagnets so as to sweep the beam in a "Lissajous" pattern, which is sinusoidal in two dimensions. The majority of commercial electron beam evaporators are of the transverse design, as shown in figure 14.11. These guns use a permanent magnet to steer the electrons emitted from the cathode around 270°, and a set of electromagnets to raster the beam on the charge material. Modern electron beam guns of the transverse design are available with a rotating multiple pocket hearth, which allows deposition of up to five different materials without venting the vacuum vessel. Some of these units also have integral shutters which allow the gun to achieve a stable operating temperature before deposition of the substrate is begun. Since the process of electron beam evaporation is normally performed under UHV conditions, the evaporant generally travels in straight-line paths from the source to the substrate. To aid in attaining uniform thickness coatings by this technique, substrates are often mounted on "carousels" which rotate, and may wobble or spin individual substrates each revolution (see figure 14.12). Deposition shielding is often placed inside the vacuum vessel to facilitate cleaning. Multiple sets of shields allows for continuous operation of the system: one set may be cleaned while the other set is in operation. Instead of using a heated filament to generate the electrons for evaporation of a material, plasma guns utilize the electrons which exist in high temperature gases called plasmas. Two types of plasma sources exist: cold cathode and hot cathode. Las Positas College Vacuum Technology 60A & 60B Page 184 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 In the cold cathode design (figure 14.13), the cathode is biased negatively from -5 to -20 kV, the rest of the source is at ground potential. Following evacuation of the vacuum system to its base pressure, process gas, such as helium is injected into the system. A partial pressure of from 1 to 100 mTorr is dynamically maintained using flow controllers at the process gas inlet, and adjustable apertures at the high vacuum stack inlet. Electrons emitted by the cathode can ionize process gas atoms, creating positive ions. These ions are accelerated to the cathode, and upon impact, generate a cascade of secondary electrons. Many of these secondary electrons escape the source and are accelerated and focused on the work piece as described in the section on work accelerated electron beam guns. 14.5 A process gas is used in the operation of the cold cathode electron gun. What effect may this have on the uniformity of the deposited coating? 14.6 List and describe the methods by which electrons can be generated to provide the heat input to conduct a thermal evaporation under vacuum. 14.7 Describe the difference between work accelerated and self-accelerated electron beam evaporation systems. 14.8 What would be the consequences of the presence of a partial pressure of oxygen in an electron beam evaporation deposition system? Las Positas College Vacuum Technology 60A & 60B Page 185 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 14.9 Calculate the mean-free-path in a vacuum vessel at a pressure of 5 x 10 -7 Torr at room temperature. From this data what could you predict about the path vapor atoms and molecules would take between the evaporation source and the substrate? Can you think of situations in which this would be advantageous or disadvantageous? The Hot Hollow Cathode Electron Beam Gun Following evacuation to the vessel's base pressure, a process gas, such as Argon is flowed in a controlled manner through the cylindrical hollow cathode. Radio frequency AC electric current is supplied to the cathode of the electron beam source from a low voltage, high current power supply. Ionization of the process gas occurs as a result of the applied electrical power. The cathode operating temperature is very high. For this reason, the cathode is made of a refractory metal, such as tungsten, and must be actively water cooled. Electrons emitted from the hot cathode and from the plasma may be steered and accelerated as described for other electron sources. Very high deposition rates may be achieved using the hot hollow cathode electron beam source to perform thermal evaporation of materials. The electrons emitted from this source may be work or self-accelerated, and may be magnetically steered. Sample Problems: 14.10 The operating pressure in a thermal evaporation deposition chamber using a hot hollow cathode electron source is approximately 50 mTorr, with Argon as the process gas. Calculate the mean-free-path at this pressure, and describe the effect this will have on the deposited thin film. 14.11 If you were interested in depositing a thin film of Zirconium Oxide, which of the thermal evaporation deposition processes described would you select? Why? Figure 14.14 Hot hollow cathode electron beam source. Safety notes for electron beam evaporation systems. There are several potential dangers associated with the use of high energy electron beams that operators should be aware of: 1) Radiation: A significant amount of X-rays are generated whenever high energy electrons impact materials. The maximum energy of the X-rays is limited by the electrical potential applied to accelerate the electrons. A radiation survey of the exterior of the vacuum vessel, especially viewports, should be conducted to insure a safe working environment. 2) If the beam control systems fail, high energy electrons may be directed to the vacuum vessel walls or to internal fixturing, including water lines. The electron beam sweep pattern should be monitored carefully at the beginning of a deposition run, and periodically during the run. Leaving an electron beam system to run unattended is not recommended. Las Positas College Vacuum Technology 60A & 60B Page 187 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 3) High voltage and high current are used in the process. The vacuum vessel and power supplies should be electrically grounded. Sputter Deposition of Thin Films Unlike thermal evaporation, in which a material is heated to increase its equilibrium vapor pressure, in sputter deposition, material is made to go into the vapor phase by the physical interaction of particles impacting the source material (often referred to as the "target"). There is a wide variety of sputtering techniques that are currently used to deposit thin films for use in magnetic storage media (cassette tapes, computer discs), optical thin films and microcircuits. The forms of sputtering which will be described in this section are: diode sputtering, magnetron sputtering, RF sputtering, and ion beam sputtering. Diode Sputtering A simple diode sputtering process system is presented in figure 14.15. Following evacuation of the vessel to its base pressure to reduce contamination of the film by atmospheric gases or water vapor, a process gas (most often Argon) is admitted into the vessel. The pressure of this process gas is maintained at a user-selectable pressure between 1-100 mTorr using a set of upstream mass flow controllers to regulate the process gas mix, as well as a downstream throttling gate valve. Such a valve, situated right at the turbpuump, is equipped with a controller that can perform fast, realtime pressure control using a capacitance manometer as a sensor element. An electric bias of from 500 to 5000 V DC is applied to the target. Electrons emitted by the target strike process gas molecules in the vicinity of the target, and may cause the gas to become ionized. The positive ions thus created are accelerated towards the cathode by the applied negative bias. When the positive ions collide with the cathode, the kinetic energy transferred is sufficient to eject atoms of the cathode material. Secondary electrons, ions, and light (IR, visible, UV and X-rays) are also emitted during this collision. Power supply plasma target substrate film to vacuum pumps process gas -V The ejected (sputtered) material travels towards surfaces in the vacuum vessel where it condenses to form films. Since the process gas pressure is in the range of from 1 to 100 mTorr, a significant amount of scattering of the sputtered material by the process gas occurs. In this scattering, sputtered material loses its directional identity, may become neutral, if it was ionized, and also loses kinetic energy. The visible glow that surrounds the cathode during sputtering is called the "glow discharge" or plasma. Visible light of the plasma has a color which is characteristic of the process gas and the material being sputtered. This visible light may be used to monitor the chemical composition of the plasma using a visible light spectrometer (details of this and other deposition monitoring techniques will be covered later in this unit). One requirement of the diode sputtering technique is that the cathode be electrically conductive. Elements and compounds which are insulators can be sputtered by other techniques. Depending on the composition of the cathode, this set of parameters should yield a deposition rate of from 60 to 400 Å/minute. It should be noted that the rate of erosion of Las Positas College Vacuum Technology 60A & 60B Page 189 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 the cathode is expected to be greater than the rate of deposition at the substrate. Some of the sputtered material condenses on the inner surfaces of the vacuum vessel (a good reason for removable deposition shields), and some may react chemically with residual gases to form volatile by-products which are pumped away. Now that the concept of diode sputtering has been introduced, a few of the relevant concepts that apply to all sputtering processes will be covered. Sputtering Yield The number of target atoms which are ejected from the cathode for every incident ion is called the "Sputtering yield". The magnitude of the sputtering yield is a function of the composition of the process gas and target material, the energy of the incident ions, and the angle of incidence of the ions on the target. In general, the sputter yield is greatest for the following set of conditions: The noble gas Argon is the most commonly employed process gas for sputter deposition processes, as it has a high sputter yield for most metals, is chemically inert and non-toxic, and is relatively inexpensive (compared with the other noble gases (Krypton and Xenon). Figure 14.17 Sputter yields for metals sputtered with Argon as a function of ion energy. It was shown, in the section on thermal evaporation of materials, that there exists a wide range of vapor pressures for materials, the vapor pressure at a given temperature being proportional to the evaporation rate. The magnitude of the variation in sputtering rate is much smaller. Most metals exhibit sputter yields that are between 1 and 5 atoms per ion when sputtered with Argon as the process gas. Prediction of the sputtering behavior of metals is made relatively easy by this fact. The deposition of thin films of metallic alloys and some chemical compounds may be accomplished by sputtering. In general, the composition of thin films deposited by sputtering will have the same overall chemical composition as the source (target) after an initial equilibration period. In figure 14.18 is presented a simplified representation of a two component alloy target, made of "A" and "B". Assume that the sputtering yields for material "A" is higher than for material "B". Initially, as material is sputtered from this compound cathode the vapor stream will be higher in concentration of "A" due to its larger sputter yield. After some time, the surface of the cathode will become depleted in "A" and more concentrated in "B". When this occurs, the thin films being deposited will have approximately the same composition as the target. A B A B initial erosion of target equilibrium erosion of target Figure 14.18 Sputtering alloy target made of "A" and "B". Characteristics of Sputtered Material in the Vapor Phase The vapor emanating from a sputter deposition source cathode contains neutral atoms, ions (both positive and negative), electrons, neutral clusters of atoms and charged clusters of atoms. Of these, the vast majority are neutral atoms. These atoms have kinetic energies approximately 50 to 100 times that of neutral atoms generated from thermal evaporation sources. This additional energy is thought to be the reason for the Las Positas College Vacuum Technology 60A & 60B Page 192 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 greater adhesion often observed for sputter deposited films over thermally evaporated films of the same material. Due to the relatively high pressure in an operating sputter deposition chamber, the mean-free path of sputtered species is short. The numerous gas-phase collisions which the sputtered material suffers between the target and substrate tend to reduce the amount of kinetic energy the depositing species have upon arrival. This affects the ad atom mobility and therefore, the density and crystal structure of the thin film. When sputtered atoms lose energy by gas collisions, they are said to be "thermalized", that is, their kinetic energy is reduced to equal that expected for similar atoms at the ambient temperature. A plot of the average distance sputtered tantalum and aluminum atoms can travel before becoming thermalized as a function of process gas pressure is presented in figure 14.19. 100 10 1 .1 .1 1 10 100 Argon Pressure [mTorr] D i s t a n c e t o R e a c h T h e r m a l E n e r g y [ c m ] Ta Al Figure 14.19 Distance tantalum and aluminum sputtered atoms travel before becoming "thermalized" as a function of process gas pressure.. Gas scattering has been used to some advantage in the coating of substrates having complex geometries. By operating at the high end of the pressure range (70-100 mTorr) Las Positas College Vacuum Technology 60A & 60B Page 193 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 the maximum number of gas phase collisions may be induced, effectively reducing the "directionality" of the deposition flux from source. Using this technique the insides of tubes having aspect ratios (length: diameter) of 10:1 have been coated. Now that some of the features common to all sputtering processes have been described, we will return our attention to the methods of sputtering. Triode Sputtering In this process, an auxiliary set of electrodes are employed to enhance the electron emission and increase the ionization of the process gas to generate a higher flux of material sputtered from the cathode. cathode anode vacuum vessel wall mounting flange electrical power feedthrough insulator cathode power supply - V Filament power supply e- e- e- e- anode power supply substrate Figure 14.20 Detail of the components of a triode sputter deposition system. The configuration of electrodes in a triode sputter deposition system is presented in figure 14.20. Three separate power supplies are used: one to resistively heat a filament to emit electrons, one to accelerate the electrons into the anode, and a high voltage power supply to accelerate positive ions towards the cathode. High deposition rates (>1000 Å/ minute) may be achieved using this configuration. Typical ranges for the operating parameters are: Due to the high currents and the intense plasma generated, active water cooling of the sputter target and electron accelerating anode is required. The power supplies should Las Positas College Vacuum Technology 60A & 60B Page 194 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 be interlocked with cooling water flow monitors to interrupt power in the event of cooling water loss. Triode sputtering systems have successfully been operated for deposition of a wide range of materials, but the complexity of the process, and the difficulty in scaling the process hardware up in physical size has limited its commercial application. Magnetron Sputter Deposition Another technique by which the deposition rate achieved over that of the simple diode sputtering process may be increased is through the use of magnetic fields to constrain the plasma close to the sputter target. Magnets situated beside or underneath the target of a diode sputtering source can be used to constrain the electrons emitted from the cathode to orbit in close proximity of the cathode. The probability that such an orbiting electron will strike a process gas molecule, causing an ionization, is greatly increased without the need to increase process gas pressure. The strength of the magnetic field and placement of the magnets with respect to the cathode is crucial to the proper operation of a magnetron sputter deposition source. In figure 14.21 the plasma ring generated on a planar magnetron as well as a cross section of a magnetron showing the magnetic structure under the cathode. Since the plasma is very localized, the current density can be quite high at the cathode surface, generating a significant heat load, which is very ineffectively dissipated by thermal radiation. Active water cooling of the cathode provides the means to control temperatures, and to prevent demagnetization of the permanent magnets under the cathode. A diagram showing more detail of the design of a magnetron sputter source is presented in figure 14. 22. Las Positas College Vacuum Technology 60A & 60B Page 195 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 The DC magnetron sputter deposition source has found wide application in industry. Deposition systems using this source range from desktop units for deposition of thin films for prototype electronic devices to 150' long architectural glass coating chambers which use arrays of magnetron sputter guns to coat 4 x 8 foot sheets of glass with several layers in a single pass. Sputtering of all areas of the gun except the cathode is prevented by the use of a ground plane shield (see figure 14.22). This shield, along with the water cooling lines are electrically insulated from the high voltage applied to the cathode through the use of ceramic insulating spacers. It should be noted that in some magnetron sputter guns the water lines (often made from formed stainless steel bellows) are used to conduct high voltage power to the cathode, and are electrically isolated at the vacuum feed through. Under some circumstances, sputtering of these biased lines may occur, which has been known to lead to rupture of the water cooling lines within the vacuum vessel. N S N S S N S S water cooling circuit magnetic field lines sputtered material ground plane shield In addition to the planar magnetron configuration, there has been developed a cylindrical or "Post" magnetron source which may be used to deposit thin films onto the inner surfaces of tubes (see figures 14.22 and 14.23). Electromagnets may be used instead of permanent magnets to generate the magnetic field which constrains the electrons to orbit near the cathode. Using electromagnets it is possible to vary the position of the plasma with respect to the cathode by changing the field strength in sets of magnets. If the magnets are mounted outside the vacuum environment, as shown in figure 14. 14.13 What factors influence the sputtering yield? How can the sputtering yield be maximized? 14.14 What is the function of the process gas in diode sputter deposition? magnets water in anode cathode water out substrate Figure 14.22. Detail of cylindrical post magnetron with electromagnets arrayed outside the tube to be coated. Sample Problem: Las Positas College Vacuum Technology 60A & 60B Page 197 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 14.15 What would be the consequences of an interruption in cooling water flow to a magnetron sputter source? Power Supplies for DC Sputtering Electric arcs and the resulting high voltage spikes which may occur during warm-up of DC sputter deposition sources can cause damage to power supplies not specifically designed for this application. These arcs are caused by electrical charge buildup on the thin naturally occurring oxide surface layer on the sputter cathode. As the target is bombarded with ionized process gas, the thin oxide layer will sputter away, and arcs should no longer occur. It is strongly recommended that only power supplies designed for sputtering applications be used. These power supplies have internal arc suppression circuitry which is intended to protect the power supply from damage. logic circuit saturable reactor circuit breakers -V +V Figure 14.24 Schematic of a power supply designed for DC sputtering applications. One limitation to the deposition of thin films by any of the DC sputtering techniques just covered is the requirement that the material to be sputtered be electrically conductive. This restriction is not true for radio frequency AC sputtering. In this process an AC power supply is used to apply a voltage that varies sinusoidally with time to a set of electrodes in a vacuum vessel. Attached to one of the electrodes is a target made of the material which is to be sputter deposited. If the material to be RF sputtered is an electrical conductor, an electrical insulator is placed between it and the electrode. When the electrodes are energized, a net negative bias occurs on the sputter target, which is electrically insulated from the electrode. Substrates to be coated may be placed on the other electrode, or mounted elsewhere in the vessel. Materials which can be deposited by RF sputtering include metal oxides (SiO 2, Al 2 O 3 , ZnO, TiO 2 , etc.), mixed oxides (Indium-tin oxide, which forms a transparent, electrically conductive film used to defrost wind shields), plastics, and glass, such as pyrex. In general, the composition of the deposited thin film is very close to that of the cathode, after an initial warm-up period. As with DC sputtering, special power supplies are required for RF sputtering (see figure 14.26). The radio frequency AC power supply operates at a frequency of 13.56 kHz; many of these supplies output power in the 0.5 to 10 kW range. Sample Problem: 14.16 Why are special power supplies needed for DC and RF sputtering applications? Ion-Beam Sputtering In this sputter deposition process, special ion sources, such as that presented in figure 14.27 are used to generate ions and accelerate these ions towards a sputtering target. The material sputtered from the target by impact of the energetic ions forms the coating on the substrate. process gas inlet magnets anode cathode accelerator grid screen grid Figure 14.27 Kaufman ion source used in ion-beam sputtering. In the Kaufman ion source, electrons emitted from the heated filament (cathode) are attracted to the anode, but the strong magnetic field prevents this. Gas molecules impacted by the oscillating electrons become ionized, and, being positively charged, are attracted to the negatively biased accelerator grid. By controlling the bias applied to the screen and accelerator grids, a certain amount of ion beam focusing may be accomplished. Through control of the operating parameters, the ion current density and the ion energy of the beam may be independently varied. Ions generated from a Kaufman source may be used to clean surfaces or to deposit thin films as shown in figure 14.28. Figure 14.28. Use of ion an ion source to remove material from a surface (left) or to deposit a thin film (right). Note that since the target used in the ion-beam sputter deposition technique is not a functional electrode, that it need not be electrically conductive. For most commercial applications the deposition rate one can achieve using ion-beam deposition is too low to be practical. Ion-beam sources are used in laboratories to produce high purity thin film coatings for research and development. Sample Problem: 14.17 What are some of the advantages of RF sputter deposition versus DC sputter deposition? Arc Deposition Las Positas College Vacuum Technology 60A & 60B Page 201 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 High current, low voltage electric arcs, if constrained, may be used to create evaporant for thin film coatings. There are several techniques used to control the arc, including use of electrically insulating hearths, electrostatic, and magnetic constraints. Arc deposition has been demonstrated to produce thin films having high densities and excellent adherence to the substrate. Normally the arc process is conducted in a UHV environment, but partial pressures of reactive process gases, such as oxygen and nitrogen have been used to deposit metal oxide and nitride thin films. High deposition rates, in the range of from 50 to 500 Å/ second have been reported for the arc deposition process. One current drawback to this technique is the creation of macro- particles along with the atomic and ionic evaporant. These macro-particles have diameters ranging from 0.5 to 50 µm, and are co-deposited in the film, degrading the film's appearance and physical properties. Significant effort has been expended to eliminate the macro-particles without reducing the deposition rate. Once this is accomplished, arc deposition may provide a viable alternative to electroplating. Laser Ablation High energy density pulsed laser beams have been used to deposit thin films of a variety of elements, alloys and compounds. In this process, a laser source, external to the vacuum vessel generates a beam which is focused, passed through a viewport and impinges on a target within the vacuum vessel. Sufficient energy is generated to blast (ablate) material from the surface of the target. This ablated material consists of neutral atoms, ions, clusters of atoms and macro particles. The amount of material deposited per laser pulse is very consistent, allowing one to accurately deposit films of a specified thickness. The deposition rate is low compared to other techniques (electron beam evaporation and sputtering, for example). The range of commonly used operating parameters is given below: Laser ablation, as a deposition technique is currently limited to research and development laboratories due to the low deposition rate, the additional safety issues involved with the use of UV lasers and the expense of the equipment. Some of the thin films that have been deposited using laser ablation include super conducting thin films, ceramic coatings, and amorphous metallic layers. Characterization of Thin Film Deposition Processes There are a variety of means by which one can get information about the thin films created by physical vapor deposition processes. Of these techniques, some provide information while the film is being deposited (so-called "in-situ" techniques) while others give information after the deposition process is completed, and the coated part is removed from the vacuum vessel ("ex-situ" techniques). The in-situ techniques provide the means for control of a process during deposition. This real-time information may simply be collected, and used as quality control data, or can be used as input to the process parameters to optimize the process (closed loop operation). In-Situ Characterization Techniques - Quartz Crystal Microbalance In this technique a small quartz crystal is caused to oscillate by the application of an electric field. This crystal is placed inside a vacuum vessel, and during deposition of a film, the crystal gains mass due to the material condensing on it. The frequency of this oscillation is reduced as the mass of the film on the crystal increases. Through cross- calibration using a technique such profilometry, the quartz microbalance can be used to accurately monitor film thickness as the film is deposited, and to provide feedback information to control the process (close shutters, increase or decrease power to the deposition source). Optical monitoring. Lenses and mirrors, which are to be coated with a thin film material to enhance their optical performance, are often monitored in the vacuum deposition chamber during the coating process. In-situ optical monitoring typically falls into two broad categories: transmission and reflection. If an optic has a performance specification (% transmission or reflection) at a specific wavelength, it is best to monitor the deposition process with that same wavelength light. Las Positas College Vacuum Technology 60A & 60B Page 204 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 light source viewport substrate deposition sources detector viewport light source viewport substrate deposition sources detector Interpretation of in-situ reflectivity and transmission data can become complex. The effect of absorption and reflection of light by the glass viewport can affect the results. It is important to choose viewports having good transmission for the wavelength of light being used for the in-situ monitoring. Both reflection and transmission measurements can be used to monitor film thickness during the deposition. In the reflection method, the intensity of the reflected light will resemble a sine curve as the film grows. This is due to constructive interference between the light reflected from the surface of the film (I f ) and light reflected from the film/substrate interface (I s ). Figure 14.32 Reflection of light from a substrate coated with a thin film. Optical transmission data may also be used to monitor the thickness of a film during deposition, and can yield quantitative data if an independent thickness calibration is performed. . I I o substrate thin film coating Figure 14.33 Transmission of light through a thin film on a substrate. I I 0 = e −ax where: I 0 = intensity of the incident beam I = intensity of the transmitted beam a = absorption coefficient of the material at the wavelength of interest x = thickness of the material The effect of absorption from the substrate must be taken into account in the thickness measurement by optical transmission. This can be accomplished by measuring the Las Positas College Vacuum Technology 60A & 60B Page 206 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 transmission of the uncoated substrate, and subtracting that value from the transmission measured during deposition. Film Stress Measurement Thin films condensing onto a substrate may induce mechanical stress in the film/substrate assembly due to the heat of condensation and the dissimilar coefficients of thermal expansion between the two materials. In-situ thin film stress measurement devices are commercially available, and generally are of the cantilever beam geometry shown in figure 14.34. deposition source laser photo-detector film stress monitor unstressed net tensile stress in thin film Figure 14.34 In-situ film stress monitor. If a thin film is in a state of tension, the cantilever film stress monitor will be deflected as shown in the detail of figure 14.34. Alternatively, if the net mechanical stress in the film is compressive, the cantilever beam will bend in the opposite direction (upwards in the detail of figure 14.34). Many of the thin film deposition techniques described in this unit create a visible plasma which may be analyzed using spectroscopic techniques to determine the chemical composition and state of excitation of species in the plasma. Las Positas College Vacuum Technology 60A & 60B Page 207 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 deposition source optical spectrometer plasma substrate Figure 14.35 Optical spectrometer used to monitor light emissions from the plasma during the deposition of a thin film. In sputtering processes, for example, the optical emission can be monitored to establish the purity of the sputtering gas, or to determine when the native oxide layer has been sputtered off a target. The intensity of peaks in the spectra observed using this technique are proportional to the concentration of species in the plasma. One can select a spectral line of interest (the line at 4189 Å for oxygen) to monitor intensity as a function of sputtering time. In-situ monitors of this type are commercially available, and can provide feedback to control the deposition process, based on the intensity of a particular spectral feature. Ex-situ Thin Film Characterization Techniques Care must be taken to prevent altering the thin film coating in the performance of ex-situ characterization techniques. In general, it is good practice to allow a coated substrate to cool to room temperature before venting the vacuum vessel. This minimizes the possibility of oxidation of the part. Thermal shock, due to rapid cooling caused by premature venting may cause films to tear or delaminate from the substrate, making them virtually useless for physical characterization purposes. Contamination of the coated substrate due to handling and storage should be kept to a minimum for best characterization results. Contact Profilometry In this ex-situ characterization technique, the sample is prepared by masking off a portion of a smooth substrate, such as floatglass, then depositing a thin film onto the sample. This creates coated and uncoated areas ( a so-called "step slide") on the smooth substrate which can be used to determine film thickness. After the part is removed from the deposition system, a ruby or diamond tipped miniature stylus is scrolled across the sample. Figure 14.36 Stylus of contact profilometer on a "step slide" sample, and the resulting data. Contact profilometry is frequently used to establish deposition rates, and as a means of calibration for in-situ rate monitoring techniques, such as the quartz crystal microbalance. Films having thicknesses of from 50 to 100,000Å have been accurately measured using contact profilometry. Sheet Resistivity Some thin films are deposited with the goal of attaining a specified electrical characteristic, such as resistivity. These films may be characterized using a commercial instrument called a four-point resistivity probe. Current is passed between each of the points of the probe through the thin film, and is measured. The data is output as sheet resistivity expressed in ohms per square centimeter (Ω/cm 2 ). Other electrical properties of interest in thin film coatings are the dielectric strength (the ability of a film to prevent high voltage from dissipating to ground through the film), and the critical current density (current density below which a material is super conducting at a given temperature). Optical Transmission Ex-situ optical transmission measurements often are more detailed and extensive than the optical monitoring described earlier for in-situ measurements. A single wavelength, or narrow band of wavelengths are often used, along with low resolution spectrometers for the in-situ optical measurements. Optics are often carefully inspected following deposition of a thin film coating to establish the transmission over a broad range of wavelengths. Compositional analysis There are a variety of techniques used to determine the chemical composition of thin film coatings following a deposition run. These techniques may be grouped into two broad categories: destructive and non-destructive. Wet chemical analyses, in which the film is dissolved, the solution being analyzed using techniques such as atomic emission spectroscopy are obviously harmful to the coating. If destructive analytical techniques are to be used, it is possible to perform them on "dummy parts" that were coated along with the part of interest. Non-destructive analytical techniques include x-ray techniques (x-ray florescence, x-ray diffraction), electron spectroscopy for chemical analysis (ESCA) and other surface science techniques. Most of these non-destructive analytical Las Positas College Vacuum Technology 60A & 60B Page 209 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 methods are conducted under vacuum in relatively small chambers, which places size limitations on the parts to be analyzed. Mechanical Testing Frequently the mechanical property of a thin film coating which is of most interest is its adhesion to a substrate. Simple tests of adhesion include the "scotch tape test" in which a piece of scotch tape is pressed firmly to the coated side of a part, then peeled away. Other more sophisticated tests of adhesion include the Sebastian pull test and the ring shear test. In the Sebastian test, a metal stump is glued to the thin film deposited onto a substrate. The force required to pull the stump away from the substrate is recorded, and plotted as a graph of stress (force per unit area) versus strain (deformation). thin film substrate test stump Figure 14.36 Sebastian pull test for adhesion of thin films. In the ring shear test the circumference of a test cylinder is coated with a thin film. The area coated is subsequently built up by depositing additional material by electroplating. The "ring" is machined to prescribed dimensions, then tested, as shown in figure 14.37. thin film substrate shaft test block Figure 14.37 Ring shear test for thin film adhesion. Las Positas College Vacuum Technology 60A & 60B Page 210 Rights Reserved, Biltoft, Benapfl, and Swain Fall 2002 The amount of force required to push the specimen through a hole in the test block is recorded. The location of failure is also observed. In some cases the thin film is so tenaciously adhered to the substrate that failure occurs in the bulk material. Procedure: for each of the following components to be coated with the specified thin film, describe in detail the deposition technique that would be appropriate. In the description include drawings of the hardware required, showing locations and relative sizes of components. Also include in your description the in-situ or ex-situ characterization techniques you would use to monitor the quality of the thin film deposits. 1) Deposit magnetic thin film coatings (iron and chromium oxides onto strips of plastic tape (12" wide by 100' long) for use in the manufacture of cassette recording media. Equipment required: small vacuum vessel or bell jar vacuum system with Feed throughs and internal hardware for deposition of thin films by resistance heated thermal evaporation (see figure 14.3). A low voltage power supply (5 to 40 VDC, 10 to 50 A) with power leads compatible with power Feed throughs on the vacuum vessel. Procedure: Assemble the equipment as shown in figure 14.3. Make certain the electrical connections are secure, and that the vessel and power supply are both safely grounded. Prior to any experimental work, have the laboratory instructor inspect the vacuum vessel and power supply. Before pump down mount at least one substrate (glass microscope slides work well for this) on the opposite side of the shutter from the deposition source. Load the source with an appropriate amount of charge material (aluminum). Evacuate the vessel and conduct the thermal evaporation. Allow the filament to cool for 30 minutes after the power is turned off prior to venting the vessel. Upon completion of experimental work shut down the vacuum system safely and write a lab report describing your experiment. Include any characterization of the thin film you perform. Experiment 14.2: Deposition of a thin film by DC diode sputtering. Equipment required: small vacuum vessel or bell jar vacuum system with electrical power feed throughs; a diode sputtering power supply with appropriate power leads; a copper cathode and an aluminum cathode; a bottle of compressed Argon with regulator; a leak valve. Procedure: Assemble the equipment as shown in figure 14.38. Make certain the electrical connections are secure, and that the vessel and power supply are both safely grounded. Prior to any experimental work, have the laboratory instructor inspect the vessel for safety. Evacuate the vessel to a pressure of less than 5 x 10 -5 Torr. Before proceeding, turn off the ion gauge. The next task is to throttle the high vacuum pump to control the flow of process gas through the system. If an iris valve is installed between the inlet of the high vacuum pump and the vessel, close it approximately 95%. In the absence of an iris valve, close the gate valve almost completely. Use the leak valve to inject process gas into the vessel. The goal here is to achieve a steady pressure of between 5 to 50 mTorr of Argon. Once a stable process gas pressure is established, turn on the sputter source power supply and slowly increase the negative bias applied to the cathode. A glow discharge should appear at an applied bias of from 500 to 800 V. Note the color and distribution of the plasma. Allow the cathode to sputter for ten minutes. Turn the sputter source power supply down to zero volts and shut it off. Allow the system to cool for 30 minutes. Vent the vessel and inspect the cathode and substrate. Exchange the copper cathode for the aluminum cathode and repeat the sputtering experiment. Upon completion of all experimental work, shut the vacuum system down safely, venting all pumps. Write a report of your observations. Discussion questions: 1. What causes the plasma to be a different color when different cathodes are sputtered?
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Description Mastering Mathematics is a complete Year 7 (ages 11-12) Mathematics course based on the CIMT MEP materials developed by Plymouth University. It consists of 60 chapters, each containing: - full text book explanations, examples and exercises - interactive exercises - mental exercises - extra exercises and activities - revision tests - answers There is no advertising of any kind, and the app will always be
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Product Description: In this sequel to his book, "The Optics of Rays, Wavefronts, and Caustics," Stavroudis not only covers his own research results, but also includes more recent developments. The book is divided into three parts, starting with basic mathematical concepts that are further applied in the book. Surface geometry is treated with classical mathematics, while the second part covers the k-function, discussing and solving the eikonal equation as well as Maxwell equations in this context. A final part on applications consists of conclusions drawn or developed in the first two parts of the book, discussing such topics as the Cartesian oval, the modern Schiefspiegler, Huygen's principle, and Maxwell's model of Gauss' perfect lens. REVIEWS for The Mathematics of Geometrical and Physical
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42.47 FREE About the Book MATHEMATICAL METHODS FOR INTRODUCTORY PHYSICS WITH CALCULUS offers a short summary of the various mathematical methods students will encounter in introductory calculus-based physics courses, and can be used in conjunction with any textbook. Topics are presented from the physicist's viewpoint. The book provides operational mathematical techniques for physics with abundant worked examples. Additionally, questions at the end of each section are answered in the back of the book so students are not left guessing as to whether they've grasped specific topics.
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Have you ever wondered what humans did before numbers existed? How they organized their lives, traded goods, or kept track of their treasures? What would your life be like without them?Numbers began as simple representations of everyday things, but mathematics rapidly took on a life of its own,...From the New York Times-bestselling author of Seven Brief Lessons on Physics, a closer look at the mind-bending nature of the universe. What are time and space made of? Where does matter come from? And what exactly is reality? Theoretical physicist Carlo Rovelli has spent his whole life... A compelling portrait of a unique moment in American history when the ideas of Charles Darwin reshaped American notions about nature, religion, science and race"A lively and informative history." - The New York Times Book ReviewThroughout its history America has been torn in two by debates... Calculus For Dummies, 2nd Edition (9781119293491) was previously published as Calculus For Dummies, 2nd Edition (9781118791295) . While this version features a new Dummies cover and design, the content is the same as the prior release and should not be considered a new or updated product.... Subscribe Subscribe via email if you would like to subscribe to a free newsletter from your library for this category
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"I am very excited to receive these items and I must say this is the best educational product company I've ever had the pleasure of doing business with. Thank you for the great service." -- Geraldine K. Common Core State Standards Descriptive Statistics for Algebra I/Mathematics I Overview Description Aligned to the content and practices of the Common Core State Standards (CCSS), this book may be used when teaching either Algebra 1 or the Math 1 Integrated Pathway. Each lesson includes activities that offer opportunities for exploration and investigation. These activities incorporate concept and skill development and guided practice, then move on to the application of new skills and concepts in problem-solving situations. 306 pages with CD. Included are: • Three lessons that address the CCSS for Statistics and Probability: Interpreting Categorical and Quantitative Data • Essential Questions for each instructional topic • Vocabulary • Instruction and Guided Practice • Problem-Based Tasks and Coaching questions • Step-by-step graphing calculator instructions for the TI-Nspire and the TI-83/84 • Station Activities to promote collaborative learning and problem-solving skills
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Number"Number Theory" is more than a comprehensive treatment of the subject. It is an introduction to topics in higher level mathematics, and unique in its scope; topics from analysis, modern algebra, and discrete mathematics are all included. The book is divided into two parts. Part A covers key concepts of number theory and could serve as a first course on the subject. Part B delves into more advanced topics and an exploration of related mathematics. Part B contains, for example, complete proofs of the Hasse–Minkowski theorem and the prime number theorem, as well as self-contained accounts of the character theory of finite groups and the theory of elliptic functions. TheFrom the reviews: "This is a book which many mathematicians could enjoy browsing, and one which a good undergraduate could be encouraged to read to learn something of the interconnections, which exist between apparently disparate parts of mathematics." —Canadian Mathematical Society "As a source for information on the 'reach' of number theory into other areas of mathematics, it is an excellent work." —Mathematical Association of America Contenuti: The Expanding Universe of Numbers.- Divisibility.- More on Divisibility.- Continued Fractions and Their Uses.- Hadamard's Determinant Problem.- Hensel's -adic Numbers.- The Arithmetic of Quadratic Forms.- The Geometry of Numbers.- The Number of Prime Numbers.- A Character Study.- Uniform Distribution and Ergodic Theory.- Elliptic Functions.- Connections with Number Theory.7894850 Descrizione libro Springer-Verlag New York Inc.,7894850 Descrizione libro Springer, 2009. Paperback. Condizione libro: NEW. 9780387894850 This listing is a new book, a title currently in-print which we order directly and immediately from the publisher. Codice libro della libreria HTANDREE0275039 Descrizione libro Springer-Verlag Gmbh Aug 2009, 2009. Taschenbuch. Condizione libro: Neu. 236x178x38 mm. Neuware - Number Theory is more than a comprehensive treatment of the subject. It is an introduction to topics in higher level mathematics, and unique in its scope; topics from analysis, modern algebra, and discrete mathematics are all included. 610 pp. Englisch. Codice libro della libreria 9780387894850
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Latest Download Introduction to Graph Theory by Richard J. Trudeau ebook free using the link below. This is the best sellling book on Graph Theory in Amazon. A stimulating excursion into pure mathematics aimed at "the mathematically traumatized," but great fun for mathematical hobbyists and serious mathematicians as well. Requiring only high school algebra as mathematical background, the book leads the reader from simple graphs through planar graphs, Euler's formula, Platonic graphs, coloring, the genus of a graph, Euler walks, Hamilton walks, and a discussion of The Seven Bridges of Konigsberg. Exercises are included at the end of each chapter.
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9780321358356 032135835158.00 Marketplace $1.64 More Prices Summary While using Intermediate Algebra, Second Edition, you will find that the text focuses on building competence and confidence. The authors present the concepts, show how to do the math, and explain the reasoning behind it in a language you can understand. The text ties concepts together using the Algebra Pyramid, which will help you see the big picture of algebra. The skills Carson presents through both the Learning Strategy boxes and the Study System, introduced in the Preface and incorporated throughout the text, will not only enhance your algebra experience but will also help you succeed in future college courses. Book jacket.
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Topics in Mathematical Modeling is an introductory textbook on mathematical modeling. The book teaches how simple mathematics can help formulate and solve real problems of current research interest in a wide range of fields, including biology, ecology, computer science, geophysics, engineering, and the social sciences. Yet the prerequisites are minimal: calculus and elementary differential equations. Among the many topics addressed are HIV; plant phyllotaxis; global warming; the World Wide Web; plant and animal vascular networks; social networks; chaos and fractals; marriage and divorce; and El Ni#65533;o. Traditional modeling topics such as predator-prey interaction, harvesting, and wars of attrition are also included. Most chapters begin with the history of a problem, follow with a demonstration of how it can be modeled using various mathematical tools, and close with a discussion of its remaining unsolved aspects. Designed for a one-semester course, the book progresses from problems that can be solved with relatively simple mathematics to ones that require more sophisticated methods. The math techniques are taught as needed to solve the problem being addressed, and each chapter is designed to be largely independent to give teachers flexibility. The book, which can be used as an overview and introduction to applied mathematics, is particularly suitable for sophomore, junior, and senior students in math, science, and engineering. REVIEWS for Topics in
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Mathematics This text will be an excellent resource for undergraduate students in physics and a quick reference guide for more advanced students, as well as being appropriate for students in other physical sciences, such as astronomy, chemistry and earth sciences. 20159889
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This is a work in progress so please be patient. As I work on it you will find more information available to you. If bad links should occur please e-mail me and let me know. Home: This is the home page. It offers a directory of available resources relevant to this class. Newsletter:I may occassionaly write a newsletter as need occurs and this is where you'lll find it. Syllabus:This is where you will find a copy of the class syllabus. The syllabus outlines the course, goals and objectives, citizenship standards, consequences, homework policy, and grading policy. Standards:This page provides links to the California State Standards in Algebra which have been adopted by the San Diego City Schools. Resources:This page provides links to resources which may be helpful for the successful completion of this class. It also provides links to sites which may be of general math interest or just plain fun. Homework:This page gives a listing of the weeks homework. Please note homework is subject to change in class. You can also find the homework assignments on the class calendar. Grades:On this page you can access your grades. To do so you will need your student number and an identification number. Other Stuff:Miscellaneous stuff that didn't seem to fit anywhere else. Some files on this web site may use Adobe Acrobat PDF files and you will need to install this software program to use with your browser. Click on the "Get Acrobat Reader" icon to get your free copy of the software.
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PDF (Acrobat) Document File Be sure that you have an application to open this file type before downloading and/or purchasing. 0.97 MB | 16 pages PRODUCT DESCRIPTION Algebra that Functions Graphing Systems of Equations Math and Art Project Your students will apply their skills of graphing systems of linear equations with art! Students will graph specified types of systems of linear equations and choose how they create an original piece of art. My students love this project because it provides an opportunity for them to be creative in math class! This project is a great formative assessment because it assesses students' skills and is highly engaging! My students are so proud of the art they create! I created two forms of this project. The second form is more challenging than the first form. This allows you to differentiate based on your students' needs. I included a rubric and a peer evaluation, which requires students to further apply their skills of systems of equations as they verify that the equations do model the graphs of the lines. This product is a paid digital download from my TpT store Algebra that Functions and it is for use in one classroom only. This productGo to your My Purchases page (you need to login). Beside each purchase you'll see a Provide Feedback button. Simply Be the first to know about my sales, freebies and product launches! CLICK ON THE GREEN STAR next to my store logo to become a follower. You will receive
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The book constitutes a basic, concise, yet rigorous course in complex analysis, for students who have studied calculus in one and several variables, but have not previously been exposed to complex analysis. Database Systems: A Pragmatic Approach is a classroom textbook providing a comprehensive yet concise introduction to the theory and practice of database systems as they are used in corporate software development
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Concord, CA Algebra 2 learn how to solve and graph quadratic equations by factoring, completing the square, or using the quadratic formula, including in the complex numbers. Student knows how to apply these techniques in solving word problems. Knowledge and skills in Geometry are essential and useful for students, especially those who are ready to go on to Algebra or Precalculus
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Algebra and Expressions PowerPoint Presentation (Powerpoint) File Be sure that you have an application to open this file type before downloading and/or purchasing. 0.09 MB | 4 pages PRODUCT DESCRIPTION This PowerPoint in an introduction to algebra and expressions. It helps the students understand what they are, and what the vocabulary means. It discusses how to set up expression from word phrases. It also has built in
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Mathematics Our team of Maths teachers is dedicated to ensuring our students fulfil their potential in one of the curriculum's most rewarding subjects. Mathematics is not just about 'doing sums'; it is about challenging the mind to solve problems, and it is these problem solving skills that are so useful as our students move on to the world of work. A qualification in Mathematics can lead to a number of careers. These include careers in engineering, finance, ICT and computer design, scientific research, medicine and architecture, to name but a few key examples. Most importantly, a good qualification in Mathematics tells a potential employer that you are a good problem solver! Curriculum Content Exam Boards: Level 2 Further Maths – AQA KS4 – Edexcel GCSE Maths, Algebra and Statistical Methods awards Key Stage 3 Year 7 Basic skills are the focus for Year 7, ensuring students from different schools are equipped with the skills needed to move forward in their Mathematics learning. These focus on the early parts of the Foundation level GCSE. Many of these topics will be revisited and developed in each of the subsequent years. Key Stage 4 The main GCSE syllabus will be covered as a three-year plan, with students sitting their GCSE at the end of Year 11. The examination board is Edexcel. As previously, topics are revisited on a regular basis, with reinforcement and developmental activities to be delivered within this framework. It is intended that all students will take their GCSE at the higher level. Syllabus coverage is heaviest in Years 9 and 10 to give ample time to revise thoroughly for the examination in Year 11. In 2015-16 all students will also sit the Edexcel Algebra award at level 2, with some EAA students sitting at level 3. Following this course will strengthen their algebraic skills in preparation for their GCSE next year. Current Year 11 students are following a mixture of courses designed for those who passed their GCSE last year. These are the AQA Further Maths Award and the Edexcel Algebra and Statistical methods Awards Key Stage 5 Exam Board – AQA We currently use the AQA examination board for AS/A2 studies. We follow courses for both Mathematics and Further Mathematics in the sixth form. Calculus in kinematics, velocity at an instant, motion in two and three dimensions, moments, equilibriums, centres of mass, centres of gravity, work, energy and power, elasticity – springs and strings, circular motion, and differential equations.
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Algebra Task Cards MEGA Bundle Compressed Zip File Be sure that you have an application to open this file type before downloading and/or purchasing. How to unzip files. 3.61 MB | 52 pages PRODUCT DESCRIPTION This MEGA bundle of 6 sets of Algebra task cards includes task cards for Slope, Functions (identifying and evaluating) Quadratics (word problems with and without C) and Systems of Inequalities. Below is a description of each set you will receive in this download. Slope Task Cards: Identifying Slope in Different Forms (station activities) Slope comes in many forms. Students work either independently or together to find slopes given: graphs, right triangles, tables of data, equations, and coordinate pairs (8.F.A.2). On each of the 10 task cards is an additional question, which asks students to find the equations of the lines represented in the data (8.F.B.4). You may choose to have your students work only to find slope or also to find these equations. A student answer sheet is included as well as an answer key. Functions Task Cards: Identifying Functions in Different Forms (stations) What makes a function? Students work either independently or together to identify functions represented in: tables, graphs, coordinate pairs, equations, scatter plots, and in verbal word problems (8.F.A.1), to identify which of two functions has a greater rate of change (8.F.A.2), and if a function is linear or nonlinear (8.F.A.3). You may choose to have your students simply identify the functions on the 16 task cards or also explain answers. The answer sheet provides space for both. An answer key is also included. Systems of Inequalities Task Cards (with answer key) Students work either independently or together to work through 10 task cards that ask them to: 1: Write systems of inequalities from graphs 2: Determine which points on a graph are solutions 3: Graph systems of inequalities 4: Complete a system and determine if points are solutions 5: Figure out what is wrong ("Find the error") in a system. A student answer sheet is included as well as an answer key. Quadratic Word Problem Task Cards: Ax^2+Bx (with optional QR codes) Students can choose to factor, use the Quadratic Formula or their graphing calculators to solve projectile motion word problems where objects start from the ground (no C). projectile motion task cards [each with 3 questions covering zeros (roots), vertex x and vertex y], a consecutive integer bonus card, a student response sheet, an answer key and a separate (optional) QR code sheet that students can scan to check answers. Quadratic Word Problem Task Cards: Ax^2+Bx + C (with optional QR codes) Students can choose to factor, use the Quadratic Formula or their graphing calculators to solve quadratic word problems covering zeros (roots), vertex x, vertex y and y-intercept. task cards [each with 3 questions covering zeros (roots), vertex x, vertex y and y-intercept], an unknown area bonus card, a student response sheet, an answer key and a separate (optional) QR code sheet that students can scan to check answers. Functions Task Cards: Evaluating Functions in Different Forms (stations) Students use the given tables, graphs, equations and word problems to evaluate functions written in function notation. There are 10 task cards with an average of 7 questions per card as well as a bonus card. Students find the values of functions given tables, graphs, equations and word problems and solve for x given f(x) values. Cards also include function composition and adding and subtracting questions. A student answer sheet and complete answer key
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ISBN 13: 9780071222112 Calculus Students who have used Smith/Minton's Calculus say it was easier to read than any other math book they've used. Smith/Minton wrote the book for the students who will use it, in a language that they understand, and with the expectation that their backgrounds may have some gaps. Smith/Minton provide exceptional, reality-based applications that appeal to students' interests and demonstrate the elegance of math in the world around us
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Every year, thousands of students in the USA declare mathematics as their major. Many are extremely intelligent and hardworking. However, even the best will encounter challenges, because upper-level mathematics involves not only independent study and learning from lectures, but also a fundamental shift from calculation to proof. This shift is demanding but it need not be mysterious -- research has revealed many insights into the mathematical thinking required, and this book translates these into practical advice for a student audience. It covers every aspect of studying as a mathematics major, from tackling abstract intellectual challenges to interacting with professors and making good use of study time. Part 1 discusses the nature of upper-level mathematics, and explains how students can adapt and extend theirexisting skills in order to develop good understanding. Part 2 covers study skills as these relate to mathematics, and suggests practical approaches to learning effectively while enjoying undergraduate life.As the first mathematics-specific study guide, this friendly, practical text is essential reading for any mathematics major
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..., measurement, and the systematic study of the shapes and motions of physical objects. Practical mathematics has been a human activity for as far back as written records exist. The research required to solve mathematical problems can take years or even centuries of sustained inquiry... Learn about: Mathematics Engineering, Mathematics Teacher, Mathematics Algebra Algebra, Mathematics Series...
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Here's why students need algebra Experts are split on the necessity of requiring algebra in high school In his recent book, "The Math Myth: And Other STEM Delusions," political scientist Andrew Hacker argues, among other things, that we should not require high school students to take algebra. Part of his argument, based on data some have questioned, is that algebra courses are a major contributor to students dropping out of high school. He also argues that algebra is nothing more than an "enigmatic orbit of abstractions" that most people will never use in their jobs. There is no doubt that this kind of argument resonates with people who had bad experiences in a math class in their past, and for this reason Hacker's book is getting lots of attention. On the other hand, there are many reasons why I and many others in the mathematical community disagree with Hacker's opinions. Fundamentally, Hacker has a misunderstanding of what algebra is. The word "algebra" comes from the Arab word "al-jabr," which means "to balance." Using it in a mathematical context dates back to a Persian manuscript in the ninth century, which introduced the beginnings of what grew into what we now study in high school. The big idea that distinguishes algebra from the mathematics that had come before is to think of operations taking place simultaneously on whole collections of numbers rather than on a single number.
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About this product Description Description Deciphering the Proof is for students, parents, and new teachers who need practice solving proofs in Geometry. Specifically, where Geometry is part of the 4e curriculum in a French program, or for American students taking Geometry between Grades 8 and 10. The book shows, step-by-step, how to reason and solve Geometry problems, by writing solutions in a clear, logical, and deductive sequence. This strategy is called, modeling. Students learn, by imitating the method, and eliminating all the n-value adding verbiage that distract graders. By showing the core steps required to solve a problem, students avoid extraneous text, and steps, which make the solution difficult to follow, and difficult for the grader to evaluate with precision. Teachers can use the material, in class, by showing partial solutions (of the reasoning or the proof), and asking the students to complete the other part. The book should be used as a complement to a Geometry textbook. It is especially beneficial for average students with difficulties writing the solution to a problem in a logical deductive process. It is recommended to the user of the book to, first, try to solve the problems entirely, before comparing with the step-by-step solutions following each chapter.
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2 ME 176 2 Mathematical Modeling 2. Mathematical Modeling: Introduction Mathematical Models are representation of a system's schematics, which in turn is a representation of a system simplified using assumptions in order to keep the model manageable and still an approximation of reality. 1. Transfer Functions (Frequency Domain) 2. State Equations (Time Domain) First step in creating a mathematical model is applying the fundamental laws of physics and engineering: Electrical Networks - Ohm's law and Kirchhoff's laws Mechanical Systems - Newton's laws. Department of Mechanical Engineering 6. Mathematical Modeling: Laplace Transform Partial Fraction Expansion, where roots of the Denominator of F(s) are: Note: N(s) must be less order that D(s) . 1. Real and Distinct where, Department of Mechanical Engineering
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The packet contains 100 questions for the students to solve, as well as worked-out examples and descriptions of how to solve the various types of problems. An answer key is also included. This math packet would make an excellent summer math packet for pre-algebra students, but it would also be a great August/September back to school review for Algebra I students, as well. It also would be great to leave for emergency sub plans in Algebra or Pre-Algebra classes, or to use as a study guide for a Pre-Algebra final exam or end of course test40.
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Academic Algebra II Academic Algebra II follows either Academic Algebra I or Academic Geometry and precedes either Academic Geometry or Pre-Calculus in the academic, college-bound student's mathematical career. Academic Algebra II is a full year course in which we will explore many facets of advanced algebraic topics. This course is designed to provide highly motivated students with a deep and thorough understanding of functions and the algebraic concepts that are associated with them. Students will use a graphing calculator (TI-83 / TI-84) on almost a daily basis--- if you are pursuing further math/science courses, I strongly encourage you to purchase your own for you to use at home!! Be sure to check out all of the useful info below such as the Google Calendar containing all assignments/due dates as well as any of the documents I post below such as notes, study guides, etc. Pre-Requisite: Academic Algebra I ATTENTION STUDENTS! The textbook for algebra 2 can be found at The login information is as follows:Username: Acad_Alg2 Password: algebra2
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Menu Advanced Algebra Problems Assignment Help Posted on December 31, 2016 by admin Best Advanced Algebra Problems Assignment Help Service Advanced Algebra Problems Assignment Help Algebra is one of the important section of mathematics along with geometry and analysis. Algebra is also called as mathematical study of symbols and rules for manipulating these symbols. The most basic part of algebra is called elementary algebra. The word algebra is also used in specialized ways. Today algebra has taken its new features and name known as advanced algebra. And our experts of advanced algebra problems assignment help discuss about the problems and solutions of algebra. A mathematician who studies about research of algebra is known as algebraist. In mathematics algebra has its broad part and it began with computation. There are number of names which falls under mathematics with abstract algebra they are: There are two parts of algebra that is algebra1 and algebra2. In this algebra1 notes for basic arithmetic operations that is addition, subtraction, division and multiplication. Teaching and learning both are important for a professor. A professor never stops learning. This makes him a good and professional expert. Our Besthomeworkhelpers provide best advanced algebra problems assignment help to our students of mathematics departments. The root of mathematics goes back to 5000 years ago and today also it is as important and useful as in ancient times. Students of mathematics department take help of advanced algebra problems homework help service, so that they can better improve their algebra. Our experts provide help on advanced algebra. It includes linear and complex equations. Our team of expert holds the degree of Masters and Doctor. They are specialised in the field of mathematics. We all know that how mathematics is important in our daily life. It had covered a vast area of our life. Today mathematics is applied in variety of subjects like Economics, Physics, Chemistry and Computer science. It had played a dynamic role in the field of Engineering and Information Technology. Along with providing advanced algebra problems homework help, our experts also take quiz and provide practices papers to better understand the concepts and sums of algebra. Mainly, there are two types of mathematics they are applied mathematics and pure mathematics. Applied mathematics has its implication in different field they are theoretical computer science, computational biology and many more. Pure mathematics has its existence in the field of Geometry, Physical Mathematics and many more. Our experts of algebra problems homework help students to take algebra as an interesting subject. They put their effort best to make mathematics a pure and interesting subject. In today's world mathematics has its leading role. Hence, it is very important to have basic and calculative knowledge of maths. Our experts will help such students who are poor and finds maths a boring subject. Students need more Advanced Algebra Problems Assignment Help, please click over here. You can read more about our Math Homework Help services here.
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A Level – Mathematics This course is for you if you achieved well at GCSE maths, particularly enjoying the algebra work. An essential part of maths is the challenge of analysing and solving a problem and the satisfaction and confidence gained from achieving a 'correct' answer. However, a big difference between GCSE and A Level is the depth of knowledge and understanding needed. If you like understanding why, rather than just being able to "do" maths then A Level is for you; there are a much smaller number of topics than at GCSE so your depth of knowledge and understanding is tested. The exams are also marked differently at A Level; if you just put down the correct answer you often only get one of the marks for the question. There are many marks for showing how you got the answer; if you choose maths you will not have to write essays, but you will need to be able to communicate well in written work to explain your solutions. Entry Criteria Course Details The A level course lasts for 2 years with all exams taken at the end of the second year. Students receive 4 lessons each week and additional work is done out of lesson, some of this using "MyMaths", some producing worked solutions to exam-type questions. The course develops understanding of: The fundamental theories and concepts of Mathematics The practical applications of Mathematics to other areas Logical problem solving The new A Level Mathematics syllabus is completely prescribed and the content is the same for each examination board. All external examinations are taken at the end of the 2 year course. The course is made up of a combination of pure and applied Mathematics. The pure Maths content build on the algebra, graphs and trigonometry from GCSE, and introduce new topics such as calculus and exponentials. While many of the ideas you will meet in pure maths are interesting in their own right, they also serve as an important foundation for other branches of maths, especially mechanics and statistics. The applied content covers; Mechanics including work on forces and Newton's laws of motion and applies Mathematical modelling to simple problems. Statistics builds on work on averages and probabilities from GCSE and introduces topics such as probability distributions and correlation. How the course is delivered You will have one teacher for the course each year. Lessons include a variety of group, paired and individual work, resources you will draw on include text books, exam questions and jigsaw/domino/card matching activities as well as web-sites. Support outside lessons is available, both informally and formally. Regular "maths clinic" sessions are run during the college week and all of the department are available for support at lunchtime and at the end of the day. Departmental Enrichment The Maths Department offers a number of enrichment activities: The Individual Senior Maths Challenge takes place in the autumn term. The Team Challenge involves our students competing against other maths students both at a regional and national level. The Advanced Extension Award is designed to challenge the top 10% of students and is offered to all students excelling in their A level Maths course. We also run an engineering enrichment aimed at students who want to go on to careers using maths and physics, but are not certain what choice to make. It is a series of external speakers talking about a variety of careers. This includes a wide variety of talks, examples include; civil engineering; financial mathematical modelling; operating a production plant; designing and testing artificial body tissues. We also take a group of students to the Maths Enrichment talks in Leeds each year. These are always very popular and include topics such as "the maths of juggling", "musical maths", and "the maths behind the dam busters". New for 2016 was the international residential visit to Florence. Highlights will include The Garden of Archimedes, The Galileo Museum and the Tower of Pisa. Our Department We're based in five dedicated rooms in the Wilson building. Between us we have over 75 years of teaching experience. We have degrees from Imperial College, York, East Anglia, Sheffield and Durham. We all enjoy teaching maths, some have always been teachers, and others have taken a less direct route. One of us used to be a Chartered Civil Engineer; one of us used to run a pub! We're not just mathematicians though: Between us we enjoy climbing trees, rambling, photography, baking, travelling. See if you can find out which of us; Plays the piano. Had their photo in the New Zealand Fishing News. Had an audition to be a presenter on "That's Life". Has a wardrobe full of Panini Football Stickers. Only read Harry Potter to spoil it for other people. Has been on a stunt driving course. Has spent time wading in sewers. Our other Courses Our other Maths courses are; Further Maths A Level – In combination with A-Level Maths and gives you a broader and deeper understanding of advanced mathematics. Core Maths level 3 (Mathematical Studies) – Equivalent to half an A level and looks at the applications of mathematics. Foundation GCSE – For those who need to retake GCSE. Numeracy level 1 – For those building up to GCSE level. What can I do now that would help prepare me for this course? Students who have taken GCSE Maths early may find they need to review what they have learnt at GCSE through the summer, maths skills need to be kept in use. Many Maths students enjoy extending their knowledge of maths and there are many ways of doing this including; "Maths is always challenging but with the fantastic teachers and support available, every aspect is easier" Brandon Bone "Intriguing challenging, fun" Natalie Wilson "Its great how everything you learn fits together" Andrew Houghton "One does not walk out of maths unhappy" James Carr "Further maths expands your mathematical knowledge and introduces you to a different way of thinking" Elliot Tennison "I've enjoyed the course immensely, Further Maths is the most interesting course I have done and the teachers are amazing" Hash Rehman "It's challenging but very satisfying" Rebecca Brown This course is vital if you are considering a degree or career in engineering, any of the sciences or maths. Higher Education courses or careers that either require Advanced GCE Mathematics or are strongly related include: Economics Medicine Architecture Engineering Accountancy Teaching Psychology Physics Computing Information and communication technology A Level Maths is highly regarded by employers and universities and is therefore a very sought after qualification. Having this qualification identifies you as someone with developed mathematical skills such as logical thinking, problem solving and statistical analysis, all of which are wanted by many employers and Universities. What does this course lead to? In recent years students have gone on to a wide variety of careers from their maths A-Level. These include; Students have gone on to a wide variety of careers from their maths A-Level. These include; Aerospace Materials at Sheffield University. Maths and Music at Birmingham University. Civil and Structural Engineering at Leeds. Geology at Leicester. Computer Science at University College London. Mathematics at Bath University.
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Appropriate for one- or two-semester Advanced Engineering Mathematics courses in departments of Mathematics and Engineering. This clear, pedagogically rich book develops a strong understanding of the mathematical principles and practices that today's engineers and scientists need to know. Equally effective as either a textbook or reference manual, it approaches mathematical concepts from a practical-use perspective making physical applications more vivid and substantial. Its comprehensive instructional framework supports a conversational, down-to-earth narrative style offering easy accessibility and frequent opportunities for application and reinforcement.
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PRODUCT DESCRIPTION Three real life situations are presented, each involving a constant (an upfront fee for example) and a variable ($30 per month). The presentation walks students through how to create a function table from a word problem, write a function rule to describe the data, and determine the nth term (find the total cost spent over 12 months) by using the function rule. Thinking questions are asked before answers are given to prompt students to consider what they may encounter when doing similar problems on their own. This PowerPoint is an excellent way to introduce the concept, allowing for teacher modeling, guided practice, and work
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Category Archives for "Resources"Well, it's finally public: I'm working on an eCourse to go alongside Principles of Mathematics: Book 1. The eCourse will feature a short video to go with every lesson in the textbook. The videos will walk through the material covered in the curriculum, making it a perfect supplement for auditory or visual learners, or any […] Do you have a child who's frustrated in math? Unsure where to go next? I'm excited to announce that, in addition to the math resources in the store, I'm now offering online math tutoring for elementary through Algebra 2. My goal is to quickly get students unstuck, to help them see the concepts as a […] The second book in Principles of Mathematics series is now complete! I'm super excited, not only because it is done, but also because it's my hope that this material will help students see God's handiwork in mathematics and realize to a deeper level what an amazing, faithful God we serve. Many students (myself included years
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Description This book shows students of science and engineering the potential computers have for solving numerical problems and gives them ample opportunities to hone their skills in programming and problem solving. The text also helps students learn about errors that inevitably accompany scientific computations and arms them with methods for detecting, predicting, and controlling these errors. Additional ResourcesCompanion websiteRelated TopicsApplied Mathematics
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Alg 1 -- Polynomials Review (Survivor) Compressed Zip File Be sure that you have an application to open this file type before downloading and/or purchasing. How to unzip files. 43.24 MB | 59 pages PRODUCT DESCRIPTION This is a review of operations with polynomials -- adding, subtracting, multiplication and division. It would be for the first half of Chapter 8 in the Prentice Hall CA Algebra 1 textbook. I teach Chapter 8 in two sections: 1. Polynomials, including long division and 2. Factoring. I think each topic is important enough to be separate from the other. A review for factoring can be found at: Factoring Feud This powerpoint has a Survivor theme, and contains 20 questions. Additional slides are provided so you can add more questions, and all slides can be edited to fit your classes. Video and sound waves are also included. Common Core Standard A-APR Perform arithmetic operations on polynomials. 1.Understand that polynomials form a system analogous to the integers, namely, they are closed under the operations of addition, subtraction, and multiplication; add, subtract, and multiply polynomials. Previous CA Standard 10.0 Students add, subtract, multiply, and divide monomials and polynomials. Students solve multi-step problems, including word problems, by using these
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MATH 164 Final December 17, 2011 NAME (please print legibly): Your University ID Number: Circle your Instructors Name along with the Lecture Time: Mueller (9:00am) Bailesteanu (10:00am) Part A of the nal can replace a bad midterm. However, Part A will st MATH 164 Midterm 1 ANSWERS October 18, 2011 1. (12 points) (a) Find the angle between vectors a = (1, 2, 3) and b = ( 1, 2, 2) in terms of an inverse trig function. Simplify as much as you can without using a calculator. (b) Find a vector which is perpend MATH 164 Midterm 1 ANSWERS October 18, 2011 1. (12 points) (a) Find the angle between vectors a = (1, 2, 3) and b = (1, 2, 2) in terms of an inverse trig function. Simplify as much as you can without using a calculator. (b) Find a vector which is perpendiULTIDIMENSIONAL CALCULUS Advice Showing 1 to 1 of 1 This professor is great. She makes everything clear and fun. She is beautiful and humous. It is such a pity that she is a visiting professor, so she will not be here in Spring. However, if you can be her student, try all your best to register her course. She will give you a theoretical proof which let you have deep knowledge about the material, she will also give you the approach of how to do the problem which will let you get an easy A. Great lecture and Great teacher. Course highlights: MTH 164 is mostly for physical student and math student. DO NOT TAKE IT if you are just interested in math (no one will be interested in math). I am a math student so I have to take it, and due to my physical background, I think this course is pretty helpful and will make you know what exactly happens in the physical field with mathematical approach. Hours per week: 3-5 hours Advice for students: Do the text book questions to get fully familiar with the materials covered. Do the practice midterm and final. Go to class. Go to office hour. Things will get confusing after midterm 2.
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Introduction to Complex Analysis Complex analysis is a classic and central area of mathematics, which is studied and exploited in a range of important fields, from number theory to engineering. Introduction to Complex Analysis was first published in 1985, and for this much awaited second edition the text has been considerably expanded, while retaining the style of the original. More detailed presentation is given of elementary topics, to reflect the knowledge base of current students. Exercise setshave been substantially revised and enlarged, with carefully graded exercises at the end of each chapter.This is the latest addition to the growing list of Oxford undergraduate textbooks in mathematics, which includes: Biggs: Discrete Mathematics 2nd Edition, Cameron: Introduction to Algebra, Needham: Visual Complex Analysis, Kaye and Wilson: Linear Algebra, Acheson: Elementary Fluid Dynamics, Jordan and Smith: Nonlinear Ordinary Differential Equations, Smith: Numerical Solution of Partial Differential Equations, Wilson: Graphs, Colourings and the Four-Colour Theorem, Bishop: Neural Networks forPattern Recognition, Gelman and Nolan: Teaching Statistics
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Course Description The primary focus of this course is to learn some portion of the history of mathematics, paying particular attention to the strands that let to developments that are important to today's mathematics.While we will be learning the history of mathematics, our primary focus will be on the mathematics itself. Course Student Learning Outcomes: 1.Demonstrate knowledge of the historical development of number systems, algebra, 2.Understand the contributions of diverse cultures to these developments. Text: The History of Mathematics - An Introduction (sixth edition), David M. Burton, McGraw-Hill, New York 2007. Grades will be determined on the following basis: 3 mini exams (average counts as 70% of final grade) Final presentation (counts as 20% of final grade) Portfolio (counts as 10% of final grade) 90% guarantees A 80% guarantees B 70% guarantees C 60% guarantees D Regarding the presentations, there is a written component (handouts consisting of notes to accompany your talk are expected) as well as a verbal one. The presentation should be in Power Point and should take approximately 40 minutes. You will receive a grade on a scale of 1-5 in each of the following categories: Preparation (were you well-prepared?), clarity to audience (how well did you explain the material?), knowledge (how well did you understand your topic?) and mathematical content (both breadth and depth will be considered here). So the total number of points possible will be 20. The portfolio will consist of your class notes and your notes on assigned readings. Attendance: Students are responsible for all material presented in class, so it is in your best interest to attend. Help during office hours is available only to those who either attended the class in which the material was presented or whose absence is excused by the Associate Dean of Students Office at 67 George Street. Students with disabilities: The College will make reasonable accommodations for persons with documented disabilities. Students should apply at the Center for Disability Services/SNAP, located on the first floor of the Lightsey Center, Suite 104. Students approved for accommodations are responsible for notifying the instructor as soon as possible and for contacting the instructor at least one week before any accommodation is needed. Academic Integrity Statement:The Honor Code at the College of Charleston specifically forbids cheating, attempted cheating, and plagiarism. Cases of suspected academic dishonesty will be reported directly to the Dean of Students. A student found responsible for academic dishonesty will receive a XF in the course, indicating failure of the course due to academic dishonesty. This grade will appear on the student's transcript for two years after which the student may petition for the X to be expunged. The student may also be placed on disciplinary probation, suspended (temporary removal) or expelled (permanent removal) from the College by the Honor Board. It is important for students to remember that unauthorized collaborations—working together without permission—is a form of cheating. Unless a professor specifies that students can work together on an assignment and/or test, no collaboration is permitted. Other forms of cheating include possessing or using an unauthorized study aid (such as a PDA), copying from another's exam, fabricating data, and giving unauthorized assistance.
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Critical thinking mathematical reasoning and proof Read this article to learn how brilliant minds like Elon Musk and Bill Thurston use first principles thinking to simplify and solve difficult problems. The Critical Thinking Company publishes PreK-12+ books and software to develop critical thinking in core subject areas. The Standards for Mathematical Practice describe varieties of expertise that mathematics educators at all levels should seek to develop in their students. Critical thinking mathematical reasoning and proof What are the Importance and Benefits of "Critical Thinking Skills"? S. M. Rayhanul Islam Apr 01, 2003 · 1. Introduction: The Question and the Strategy 1.1 The Nature of the Question. In Book One, the Republic's question first emerges in the figure of Cephalus. 1000_critical_reasoning_questions (1) - GMAT &... This preview shows document page 1. Sign up to view the full document. 3. Dimension 1 SCIENTIFIC AND ENGINEERING PRACTICES. F rom its inception, one of the principal goals of science education has been to cultivate students' scientific. A practical text for building thinking skills. In today's competitive business world, businesses must have an edge to remain competitive and be successful. Please confirm that you want to add Critical Thinker Academy: Learn to Think Like a Philosopher to your Wishlist. Dr. Steven Novella of the Yale School of Medicine equips you with the knowledge and skills you need to become a savvier, sharper critical thinker in your professional. Here Be Dragons is a video introduction to critical thinking. Most people fully accept paranormal and pseudoscientific … Deductive reasoning, also deductive logic, logical deduction is the process of reasoning from one or more statements (premises) to reach a logically certain. A comprehensive and coherent set of mathematics standards for each and every student from prekindergarten through grade 12, Principles and Standards is the first …
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In class we will use the TI-84 plus. Students are not required to purchase their own calculator, as we will provide one that can be used in class. If they prefer to purchase their own, I recommend keeping it at home so it doesn't get lost, stolen, or damaged. In addition, there are a lot of free online calculators that can be used for the same functions we will be using in class.
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CAPS GRADE 12 TEACHER GUIDE. 1. INTRODUCTION. Assessment is a ... tasks, particularly the investigation and assignment; hence these exemplars were The sum of the first n terms of a sequence is given by: Sn = n(23 3n). 2.1 Write . ebook.dexcargas.com is a PDF Ebook search engine and unrelated to Adobe System Inc. No pdf files hosted in Our server. All trademarks and copyrights on this website are property of their respective owners.
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Product Description: The Handbook of Categorical Algebra is designed to give, in three volumes, a detailed account of what should be known by everybody working in, or using, category theory. As such it will be a unique reference. The volumes are written in sequence. The second, which assumes familiarity with the material in the first, introduces important classes of categories that have played a fundamental role in the subject's development and applications. In addition, after several chapters discussing specific categories, the book develops all the major concepts concerning Benabou's ideas of fibred categories. There is ample material here for a graduate course in category theory, and the book should also serve as a reference for users. REVIEWS for Handbook of Categorical
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Thank You ! Polynomial Assignment Help Then, you have opened the correct window. EssayCorp is a pioneer in various mathematical assignments including polynomials. An introduction of Polynomials: A mathematical expression which comprises of coefficients and variables is referred to as polynomial. The only operations associated with polynomials include addition, multiplication, non-negative integer exponents and subtraction. Application of Polynomials: Polynomials are generally utilized for encoding information of some other object. Some applications of polynomials in different fields include: A trajectory of projectiles can be depicted using polynomials. Designers of big rides like roller coasters utilize polynomials for the design. Marketing models can be described through polynomials. The behavior of stock market over a period of time can be studied through polynomials. Various physics related phenomenon like inertia, energy and voltage difference etc can be represented using polynomials. Due to various applications of polynomials in multiple sectors, it is being taught at school and college level. Also, the project writing on polynomial becomes an integral part of student's curriculum. This is where students can take the support of our assignment writing service for a polynomial. Different forms of Polynomials: Other than the basic form, some other types of polynomials which are studied in mathematics are discussed below: Trigonometric polynomial - In these form of polynomials, functions cos(nx) and sin(nx) have finite linear combinations. The 'n' in these functions can have a value of one or further natural numbers. Matrix polynomials - Matrices are variables in the case of a matrix polynomial. Laurent polynomials - In these forms of polynomials, negative powers of variables are allowed to take place. Rational functions - Functions through which rational expressions can be deduced are called rational functions. Rational expressions are quotients related to polynomials. Power Series - In these form of polynomials, several non-zero terms are allowed to occur infinitely. Exponential polynomial - It is a bivariate polynomial in which an exponential function which is applied to the first variable substitutes the second variable. Our experts have knowledge of basic and all complex forms of polynomials which are studied in mathematics. Why Choose EssayCorp? The assignment professionals of our company have qualification up to Ph.D. level with polynomials as their major subject. Also, we make sure that assignments, homework or projects are re-checked at every to produce the best quality results. The company charges minimal fees for polynomial assignment help, homework and project writing which does not affect the budget of student's life
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You may also like About this product Description Description This book is a unique work which provides an in-depth exploration into the mathematical expertise, philosophy, and kwledge of H W Gould. It is written in a style that is accessible to the reader with basic mathematical kwledge, and yet contains material that will be of interest to the specialist in enumerative combinatorics. This book begins with exposition on the combinatorial and algebraic techniques that Professor Gould uses for proving bimial identities. These techniques are then applied to develop formulas which relate Stirling numbers of the second kind to Stirling numbers of the first kind. Professor Gould's techniques also provide connections between both types of Stirling numbers and Berulli numbers. Professor Gould believes his research success comes from his intuition on how to discover combinatorial identities.This book will appeal to a wide audience and may be used either as lecture tes for a beginning graduate level combinatorics class, or as a research supplement for the specialist in enumerative combinatorics.
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Interests Browse by The development of mathematics curriculum in Malaysia The development of Mathematics Curriculum in Malaysia had started before the Second World War (WW II: 1941). Before that, our mathematics syllabus in Peninsula Malaysia was not standardised, which means that all type of school were freely to choose any text books and topics which considered suitable for the students. The mathematics curriculum become standardised and officially only after the year of 1956 when the Razak Report suggested that there should be a formal curriculum for all government schools. In the respect, an official common syllabus for mathematics curriculum was planed and later was implemented after 1956. However, this common syllabus was only a slightly change in some arithmetic topics and certain topics. It was not until 1970¶s when the Sp ecial Project was implemented. This Special Project was set up by the previous Ministry of Education of Malaysia and headed by En. Abu Hassan bin Ali in the year of 1968. The objective was to improve the standard of mathematics and science in primary level following the trend and development of Modern Mathematics in advanced countries. This project was funded by the Asian Foundation (Yayasan Asia) and some of the American Peace Corps members were invited as advisers of this project. Materials for the teachi ng and learning of mathematics were designed by lecturers and mathematics teachers who had their training overseas. There were only minor changes in the contents of the mathematics syllabus in the Malaysian primary school in this Special Project. However, new approach, strategy and method of presentation were introduced which is the pupil-centered strategy and the inquiry-discovery method. This Special Project was being launched as a pilot project in the year 1970. About 30 schools in Kuala Lumpur were chosen as a trial centers. Eventually, this programme was modified and improved from time being and was adopted in primary schools until it was replaced by KBSR Mathematics syllabus which was fully implemented in 1983. In 1983, the Modern Mathematics Curricul um was modified become the KBSR Mathematics. The difference was the arrangement with reduction of some mathematics contents to suit the pupils¶ ability to master the skill. The mathematics syllabus was divided into two levels. Level 1 (Year 1 ± 3) emphasized the mastering of the basic concepts of numbers and their four basic operations. Level 2 (Year 4 ± 6) emphasized application of the basic skill in solving mathematics problems. This programme was aimed at providing equal opportunity for every pupil to ac quire knowledge, skills, attitudes, rules and desired common social practice in society. The main aim of KBSR was to enable pupils to develop their counting skills. To achieve the aim, pupils must first attempt to master the basic mathematics skills. The Primary School New Curriculum (KBSR) was changed to Primary School Integrated Curriculum in the respect to achieve the noble ambition envisaged in the National Education Philosophy. The aim of KBSR Mathematics could be expressed as follow: In addition. Decimal and their operations 4. which was listed according to their sequence as follow: 1. The mathematical knowledge gained would also help pupil to manage their daily activities systematically.tutorvista. allowing all pupils to acquire basic mathematics skills and to us the acquired skills in daily situations at all levels. The Syllab us Committee responsible for KBSR Mathematics has grouped all the required learning skills into 9 main topics. pupils would learn to appreciate mathematics. These would help pupils to solve daily problems effectively. thus fulfilling the requirements for our society and nation to progress as well as to help our pupils to further their studies in time to come´ (The Primary School Mathematics Syllabus: April 1993) The Primary School Mathematics Syllabus which was revised again in 1998. Money 5.com/answers/what -is-the-development-of-mathematicscurriculum-in-malaysia/485674 . Whole numbers and their operations 2.³The main aim of Primary School Mathematics Education was to improve and develop the understanding of number concept and acquiring basic calculation skills. Fractions and their operations 3. Measurement of Lengths and Weights Reference:
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Solving Exponential and Logarithmic Equations This book is a study guide for solving exponential and logarithmic equations. As a prelude to this topic, the exponential and logarithmic functions are graphed and discussed. The properties of exponential and logarithmic expressions are also covered and later used to solve different types of equations. The final section has several types of applications for these types of equations. Each topic includes solved examples and practice exercises. A practice test and answers to exercises are included. This book is ideal for upper level high school students and college students that are enrolled in college level algebra courses or need to review these topics. In order to understand the content of this book, it is assumed that students have basic knowledge of the laws of exponents including negative and rational exponents. An Introduction to Solving Exponential and Logarithmic Equations This book explains how the exponential and logarithmic functions are related to each other as inverse functions. The properties of the exponential and logarithmic expressions are consistent with the laws of exponents and these properties can be used to solve a variety of different types of exponential and logarithmic equations. There are many applications for these types of equations including, compound interest, population growth, and depreciation models. This book is divided into two main sections. Section one introduces the exponential and logarithmic functions and how they are represented graphically. The inverse relationship and other properties of these functions and expressions are also covered in section one. Section two illustrates the strategies used to solve different types of exponential and logarithmic equations. Properties in the first section are put to use in the solving process. Application problems are then used to show how these types of equations solve real life problems. After completing this text, the reader should be proficient with exponential and logarithmic functions, expressions, and equations. About the Author My name is John M. Gillis, Ph.D. I have been teaching mathematics since 1994 in Columbus, Georgia. I teach in both high school and college venues and have been an adjunct professor at Columbus State University since 1996. My degrees include a BS in Mathematics from the University of Florida, Med and EdS degrees in Mathematics Education from Columbus State University, a MS in Applied Mathematics from Auburn University, and a Ph.D in Mathematics Education also from Auburn University. </br> Before teaching, I spent four years in the U.S. Army. My hobbies include fitness and guitar. To further my career, I have turned to the Internet. I am interested in using my knowledge of mathematics to consult and write. BrainMass has given me the opportunity as an Academic Expert to do both in an online environment. BrainMass Need to Know Academic Help eBooks BrainMass Need to Know eBooks are printable PDF documents that offer detailed explanations of specific topics of interest. Each book is authored by an expert on the subject and offers summary information, step-by-step explanations, answers to common questions, and additional resources for further study. Our authors hail from the best graduate schools in the world. All BrainMass eBooks are focused on a particular topic, ensuring that the content will be useful as well as applicable and practical. They are a fantastic resource for all students looking to improve their grades, or for anyone looking to improve their know-how.
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Problem-solving strategies algorithms and heuristics Webmath is designed to help you solve your math problems. Webmath also shows the student how to arrive at the answer. . Webmath is designed to help you solve your math problems. Webmath also shows the student how to arrive at the answer. . Simple steps to solve math word problems. His emphasis has always been about teaching math skills that will help students outside of school. . Free math problem solver answers your algebra homework questions with step. Help sin. Arcsin. You must allow mathway to access your email. . Solve calculus and algebra problems online with cymath math problem solver with steps to show your work. Get the cymath math solving app on your. Solve equation. . Wolframalpha shows steps to solve math problems, allowing you to learn the basics on your own, check your work, or give you insight on different ways to solve problems. . In case you think you havent received a comprehensive explanation using our math solver online, you can consider working directly with one of our qualified tutors. Not hard but different lol lol to obtain the logarithm with a fraction as base you have to write the base without the 0 before the decimal point if you try to solve a limit, but the left-handed limit and the right-handed limit are not the same, wolfram alpha gives both one-sided limits, but the show steps button doesnt appear. Youll find hundreds of instant-answer, self-help, math solvers, ready to provide you with instant help on your math problem. I have to re-type my question because ive moved on and then decided to take another look at it. For example with (ddx ax) it doesnt show useful steps. That would be really sweet, but that would require going through all the textbooks in all the high schools of the country and it recognizing where you are to base your school district and analyzing the textbook that that district uses. Easily one of the most exciting things i have seen recently. I even tried using the identical limit example pictured above and the steps dont show for me. I also did it by hand and i got a different answer (the one given from wolfram is correct). It would be amazing to figure out where i made my mistake no matter what function i put in, it seems as though the show steps part of the derivative doesnt work. An example ive tried is y (x-3)(4x2) i havent been able to get any of the show steps to work for derivatives. Is there a way to make it come up? Or to request only one of the one-sided limits and have the button appear? How could i input this equation to get a step by step process to solve this difference quotient? Tried it. Now that you understand the word problems purpose, determine the answers unit. Just want to ask are those values fed in database or calculated in real time and then cached. There are many such links on the answers which are easily overlooked. I have also purchased the wolfram alpha mobile application (android os) and this same show steps functionality is as it is on the rest of the site, not working. If you want to be really good at all types of math, you need to practice please enter the email address and well send you an email containing instructions for changing your password. Enjoy other services with math word problem solver at studygeek. Please fix this website, to me this is the alpha and the omega (pun intended), and i cant wait to have full functionality back! Hi all, thank you for bringing this to our attention! Our team is working to get this back up and running. The wolframalpha blog is now part of the wolfram blog. Five-Step Strategy to Solving Word Problems Feb 23, 2016 learn to solve algebra problems step by step. Math help and tutorials by subject and or topic. .
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You may also like About this product Description Description Advances in materials science have given rise to vel materials with unique properties, through the manipulation of structure at the atomic level. Elucidating the shape and form of matter at this scale requires the application of mathematical concepts. This 2006 book presents the geometrical ideas that are being developed and integrated into materials science to provide descriptors and enable visualisation of the atomic arrangements in three-dimensional space. Emphasis is placed on the intuitive understanding of geometrical principles, presented through numerous illustrations. Mathematical complexity is kept to a minimum and only a superficial kwledge of vectors and matrices is required, making this an accessible introduction to the area. With a comprehensive reference list, this book will appeal to those working in crystallography, solid state and materials science.
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In the mathematics course of secondary schools students get acquainted with the properties of inequalities and methods of their solution in elementary cases (inequalities of the first and the second degree). In this booklet the author did not pursue the aim of presenting the basic properties of inequalities and made an attempt only to familiarize students of senior classes with some particularly remarkable inequalities playing an important role in various sections of higher mathematics and with their use for finding the greatest and the least values of quantities and for calculating some limits. The book contains 63 problems, 35 of which are provided with detailed solutions, composing thus its main subject, and 28 others are given in Sections 1.1 and 2.1, 2.3, 2.4 as exercises for individual training. At the end of the book the reader will find the solutions to the' given exercises. The solution of some difficult problems carried out individually will undoubtedly do the reader more good than the solution of a large number of simple ones. For this reason we strongly recommend the readers to perform their own solutions before referring to the solutions given by the author at the end of the book. However, one should not be disappointed if the obtained results differ from those of the patterns. The author considers it as a positive factor. When proving the inequalities and solving the given problems, the author has used only the properties of inequalities and limits actually covered by the curriculum on mathematics in the secondary school. P. K orookin, 6 CHAPTER 1 Inequalities The important role of inequalities is determined by their application in different fields of natural science and engineering. The point is that the values of quantities defined from various practical problems (e.g. the distance to the Moon, its speed of rotation, etc.) may be found not exactly, but only approximately. If x is the found value of a quantity, and I'1x is an error of its measurement, then the real value y satisfies the inequalities x-I I'1x 1 ~ y ~ x + 1 I'1x I. When solving practical problems, it is necessary to take into account all the errors of the measurements. Moreover, in accordance with the technical progress and the degree of complexity of the problem, it becomes necessary to improve the technique of measurement of quantities. Considerable errors of measurement become inadmissible in solving complicated engineering problems (i.e., landing the mooncar in a specified region of the Moon, landing spaceships on the Venus and so on). 1.1. The Whole Part of a Number The whole (or integral) part of the number x (denoted by [ x]) is understood to be the greatest integer not exceeding x. It follows from this definition that [z] ~ x, since the integral part does not exceed x. On the other hand, since [xl is the greatest integer, satisfying the latter inequality, then [xl + 1 > x. Thus, [x] is the integer (whole number) defined by the inequalities [xl~x <~Jx] +' 1. 7 For example, from the inequalities 3<31<4, 5< ~ <6, -2<-V"2<-1, 5=5<6 it follows that [31]=3, [1;J=5, [-V2]=-2, [5]=5. The ability to find the integral part of a quantity is an important factor in approximate calculations. If we have the skill to find an integral part of a quantity x, then taking [xl or [xl + 1 for an approximate value of the quantity x, we shall make an error whose quantity is not greater than 1, since o:s;; x - [xl < [xl + 1 - [z ] = 1, o < [xl + 1 - x:S;; [xl + 1 - [x 1 = 1. Furthermore, the knowledge of the integral part of a quantity permits to find its value with an accuracy up to -} The quantity [xl + -} may be taken for this value. Yet, it is important to note, that the ability to find the whole part of a number will permit to define this number and, with any degree of accuracy. Indeed, since [Nxl<Nx<[Nxl + 1, then [Nx]./ ./ [Nx] +_1 N ~x~ N N • Thus, the number [Nx] + 1 ----r 2N differs from the number x not more than by 2~. With large N the error will be small. The integral part of a number is found in the following problems. Problem 1. Find the integral part of the number 111 1 ,1:= 1 + V2 + -Va + V4 + V5 . 8 Solution. Let us use the following inequalitres 1-~ 1<1, 0.7 <V~ <0.8, 0.5<vi <0.6, 0.5<V! <0.5, 0.4<V! <0.5 (which are obtained by extracting roots (evolution) with an' accuracy to 0.1 in excess or deficiency). Combining them we get 1 + 0.7 + 0.5 + 0.5 + 0.4 < x < < 1 + 0.8 + 0.6 + 0.5 + 0.5, that is, 3.1 < x < 3.4, hence, [xl = 3. In this relation, it is necessary to note that the number 3.25 differs from x not more than by 0.15. Problem 2. Find the integral part of the number 1 1 1 1 y=1+ V2 + -vs + V4 + ... + V1000000 Solution. This problem differs from the previous one only by the number of addends (in the first, there were only 5 addends, while in the second, 1000, 000 addends). This circumstance makes it practically impossible to get the solution by the former method. To solve this problem, let us investigate the sum 1 1 1 1 1+ ,10 + ,r + ,r + ... +--::;-t.=- v2 v3 v4 vn and prove that 2Vn+1-2Vn< ~n <2Vn -2Vn-1. (1) Indeed, since 2V n+ 1-2Vn = 2 eVii+1- Vii) (Vn:tI+ lfri) = Vn+1+ lfri . 2 ::::::::;:: Vn+t+ lfri e and yn+1> Vii, it follows that 2 Yn+1-2 Vn <_2_=_1_. 2Vn Vn Thereby proof has been made for the first part of the inequality (1); its second part is proved in a similar way. Assuming in the inequalities (1) n = 2, ~, 4, ... , n, we get 2y3-2Y2< -0 <2Y2-2, 2Y4-2Y3< 0 <2y3-2Y2, 2 V5-2 Y4 < ,~_ <2 Y4-2y3, . v 4 2 V n+ 1-2 Vn < -Vn <2 Vn-2Y n-1. Adding these inequalities, we get 2yn+1-2Y2< 1 1 1 1 «r: < 112 + lis + 114 +"'+1/n <2 V n-2. Adding 1 to all parts of the obtained inequalities, we find 2 Yn+1-2 Y2+1 < 1 1 1 I 1 ~/- 2 <1+ ,'" +-/- + ,r + ... T ,r <2 V n-1. () v2 1 3 v4 vn Since 2 Y2 < 3, and V n + 1 > yri, it follows from the inequalities (2) that ~/- 1 1 1 2 V n-2< 1 + V2 + V3 -+- 114 + ... 1 2,r- + Vii < V n-:1. (3) Using the inequalities (3) we can easily find the integral part of the number From the inequalities (2) it follows that the number 1998.6 differs from y not more than by 0.4. Thus, we have calculated the number y with an accuracy up to 19~~.4 % = = 0.02%. The numbers 1998 and 1999 differ from the number y not more than by unity, and the number 1998.5 differs not more than by 0.5. Now let us examine the next problem of somewhat different pattern. Problem 3, Prove the inequality 1 3 5 99 1 x='2'"4''6'" 100 < 10' Solution, Suppose Since 1 2 3 4 5 6 99 100 '2 < '3' "4 < 5"' '6 < '"1' "" 100 < 101 ' it follows that x<y and, consequently, 2 1 2 3 4 5 6 99 100 1 x < xy='2''3'"4'5"'!f''"1'" 100' 101 = 101 • Finding the square root of both members of the inequalities yields 1 x< VTIIT <0,1. if Exercises 1. Prove the inequalities V-V-11 2 n+1-2 m «; ,r + Vm+1 + ... V m m+1 1 V- V... + VB <2 n-2 m-1. 2. Prove the inequalities 1800< 1 1 + 1 , 1110,000 + 1110,001 +... 111,000,000 < < 1,800.02. 3. Find [50z] , where 1 Z= 1110,000 + 1 1 1110,001 + ... + 111,000,000 Answer. [50z] = 90,000. 4. Prove the following inequality using the method of mathematical induction 1 3 5 2n-1 «; 1 2'4' 6'" 2n ---:::: V3n+1 5. Prove the inequality 1 3 5 99 1 2'4'6'" 100 <1"2' 1.2. The Arithmetic Mean and the Geometric Mean If Xl' X2, ••• , Xn are positive numbers, then the numbers formed with them x1+x2+" .+xn a = --=--'--=---:....----'--::.... n g=;Y XtX2'" Xn are called, respectively, the arithmetic mean and the geometric mean of the numbers Xl, X2, ••• , Xn. At the beginning of the last century, the French mathematician O. Cauchy has established for these numbers the inequality s «; a, often used in solving problems. Before proving the inequality we have to establish the validity of an auxiliary assertion 12 Theorem 1. 1/ the product n 0/ the positive numbers .tl, X2, ••• , Xn is equal to 1, then the sum of these numbers is not less than n: XlX2, ••• , Xn = 1 =} Xl + x2 + ... + xn ~ n. Proof. Use the method of mathematical induction'. First of all check up the validity of the theorem for n = 2, i.e. show that XIX2 = 1 =} Xl + x2 ~ 2. Solving the question, examine the two given cases separately: (1) Xl = X2 = 1. In this case Xl + X2 = 2, and the theorem is proved. (2) 0 < Xl < X2• Here Xl < 1, and X2 > 1, since their product is equal to 1. From the equation (1 - Xl) (X2 - 1) = X2 + Xl - XlX2 - 1 it follows that Xl + X2 = XlX2 + 1 + (1 - Xl) (X2 - 1). (4) The equation (4) has been established without limitations to the numbers Xl and X2• Yet, taking into account, that XIX2 = 1, we get Xl + X2 = 2 + (1 - Xl) (X2 - 1). At length, since Xl < 1 < X2, then the last number is positive and Xl + X2 > 2. Thus, for n = 2 the theorem is already proved. Notice, that the equation Xl + X2 = 2 is realized only when Xl = X2• But if Xl =1= X2, then Xl + X2 > 2. Now, making use of the method of mathematical induction, assume that the theorem is true for n = k, that is, sup- 1 More detailed information concerning mathematical induction is published in the book by 1. S. Sominsky "The Method of Mathemati cal Induction", Nauka, Moscow, 1974. First of all, it is necessary to notice that if XIX2X3 ••• Xh,Xl<+1 = 1, then there may be two cases: (1) when all the multipliers XII X2, Xa, ••• , xl<, Xh+l are equal, that is (2) when not all multipliers are equal. In the first case every multiplier is equal to unity, and their sum equals k + 1, that is Xl + X2 + Xa + ... + Xl< + Xh+l = k + 1. In the second case, among the multipliers of the product XIX2 ••• Xh,Xh+lI there may be both numbers greater than unity and numbers less than unity (if all the multipliers were less than unity, then their product as well would be less than unity). For example, suppose Xl < 1, and Xh+l> 1. We have (,XIXh+l) X2Xa ••• Xl< = 1. Assuming YI = xlxh,+ 11 we get YlX2Xa ••• Xl< = 1. Since here the product k of positive numbers is equal to uni ty, then (according to the assumption) their sum is not less than k, that is Raising both parts of the inequality to the (n + 1)th power, we shall obtain (1 + ~ r < (1 +-n~1 r+1, that is xn< Xn+1' The second inequality is proved in a similar way. Problem 3. Prove that _ (1 _1 )"+1 Yn -_ + n decreases with the increase of the number n, ( 1) n+2 Yn>Yn+l=1+n+1 • Solution. We have _ (1 _1) n+ 1 _ ( n + 1 ) n+ 1 _ 1 Y n - + n - n - ---:(-=---=---n~~"--) n-+-:-:-l n+1 1 that is ( 1 __ 1_)n+l zn+l n+1 (see designations of Problem 2). Since Zn increases with the increase of the number n, then Yn decreases. In Problems 2 and 3 we have proved that Xi = ( 1 + + ) 1 = 2 < X2 = ( 1 + ~ ) 2 = =2.25<X3<"· <xn< ... , 1 u. = ( 1 + ~ ) 2 =, 4 > Yz = = (1 + ~ ) 3 = 3.375 > v« > ... > Yn > .... 20 On the other hand, 2=XI<Xn= (1 ++)n < (1 ++ )n+l =Yn<YI=4. Thus, the variable Xn satisfies two conditions: (1) Xn monotonically increases together with the increase of the number n; (2) Xn is a limited quantity, 2 < Xn < 4. It is known, that monotonically increasing and restricted variable has a limit. Hence, there exists a limit of the variable quantity Xn. This limit is marked by the letter e, that is, e = lim Xn = lim ( 1 + -1-f . n-e- eo 'n-s oc n As the quantity xn increases reaching its limit, then Xn is smaller than its limit, that is Xn = ( 1 + + r < e. (8) It is not difficult to check that e < 3. Indeed, if the number n is high, then Xn<Yn<Y5,=(1-t- ~)6=2.985984. Hence, e ~ lim Xn ~ 2.985984 < 3. rt-s-co In mathematics, the number e together with the number Jt is of great significance. It is used, for instance, as the base of logarithms, known as natural logarithms. The logarithm of the number N at the base e is symbolically denoted by In N (reads: logarithm natural N). It is common knowledge that the numbers e and Jt are irrational. Each of them is calculated with an accuracy of up to 808 signs after the decimal point, and e = 2.7182818285490 .... Now, let us show that the limit of the variable Yn also equals e. Indeed, lim Yn = lim ( 1 + ! ) n+ 1 =-c lim ( 1 + ! ) n ( 1 + ! ) = =,e·1=e. 21 Since Yn diminishes coming close to the number e (Problem 2), then ( 1 1 ) n+ 1 +- »:». , 'n (9) Problem 4. Prove the inequality (10) Solution. We shall prove the inequality (10) using the method of mathematical induction. The inequality is easily checked for n = 1. Actually, Assume, that the inequality (10) is true for n = k, that is Multiplying both members of the last inequality by k + 1, we get (k+1)k!=(k+1)!>(:r(k+1)=( k~1 )k+1 (1+*r Since, according to the inequality (8) (1 + + r < e, then (k+1)!> (k~1 r+1 : = (k~1 r+1, that is the inequality (9) is proved for n = k + 1. Thus the inequality (9) is proved to be true for all values of n. Since e < 3, it follows from the inequality (9) that I (n)n n.> ""3 . By means of the last inequality, it is easy to prove that 300! > 100300• Indeed, setting in it n = 300, we get 300! > ( 3~O ) 300 = 100300• 22 The inequality I ( n+ 1 )n+l n.<e - e is proved completely the same way as it is done with the inequality of Problem 4. 1.4. The Bernoulli Inequality In this section, making use of Theorem 2 we shall prove the Bernoulli inequality which is of individual interest and is often used in solving problems. Theorem 3. It x ;;:: -1 and 0< a < 1, then (1 +x)ct :::;; 1 + ax. (11) However if a < ° or a> 1, then (1 + x)ct ;;:: 1 + ax. (12) The sign of equaliiu in (11) and (12) holds only when x = 0. Proof. Suppose that a is a rational number, bearing in mind that ° < a < 1. Let a = !:!:., where m and n are n positive integers, 1 :::;; m < n. Since according to the condi- tion, 1 + x ;;:: 0, then m (1+x)ct=(1+xfn =;Y(1+x)m.1n m = =;Y(1+x)(1+x).- .. (1+x).1.1 ... 1:::;; -----' ~ m n-m «1+x)+(1+x)+ ... +(1+x)+1+1+ ... +1 = n The sign of equality occurs only when all multipliers standing under the root sign are identical, i.e., when 1 + x = 1, x ,= O. But if x =1= 0, then (1 +: x)ct < 1 +- ax. Thus, we have proved the first part of the theorem considering the case, when a is a rational number. 23 Assume now, that a is an irrational number, 0 < a < 1. Let r1, r2, ••• , r n ... be the sequence of rational numbers, having for a limit the number a. Bear in mind that ° < < r; < 1. From the inequalities (1 + xrn<1 + rnx, x ~ -1, n = 1, 2, 3, ... , already proved by us for the case when the exponent is a rational number, it follows that (1 + x)a = lim (1 + x(n< lim (1 -/- rnx) = 1 + ax. rn-CX r ... a n Thus the inequality (11) is proved for irrational values of a as well. What we still have to prove is that for irrational values of a when x =1= ° and 0 < a < 1 (1 + x)a < 1 + ax, i.e., that when x =1= 0 in (11), the sign of equality does not hold. For this reason, take a rational number r such t hat a < r < 1. Obviously, we have a (1 + x)a = [(1 + xfry. Since ° < __::_ < 1, then as it has already been proved r Hence, (t + x)a< (1 + ~ x r. 1£ x =1= 0, then (1+~x)r<1+r.!!_x~c1+ax, that is r r (1 +x)a <1 + ax. Thus the first part of the theorem is proved completely. Now, move on to proving the second part of the theorem. If 1 + ax < 0, then the inequality (12) is obvious, since its left part is not negative, and its right part is negative. If 1 + ax ~ 0, ax ~ -1, then let us consider both cases separately. Su ppose a > 1; then by virtue of the first part of the theorem proved above we have ~ 1 (1 + ax)a <1 +- ax= 1 +x. ex 24 Here the sign of equality holds only when x = O. Raising both parts of the last inequality to the power a we get 1 +- ax ~ (1 + .1')a. Now let us suppose a < O. If 1 + ax < 0, then the inequality' (12) is obvious. But if 1 + ax ;? 0, then select the positive integer n, so that the inequality - ..::..< 1 would n be valid. By virtue of the first part of the theorem we get a (1+x)n::p 1a ::pi + ~ X 1--;r n ( the latter 'inequality is true, since 1 ;? 1- ~: X2) . Raising both parts of the latter inequality to the nth power we get (1 + xt::P(1 +..::.. x)n::p1 + n"::" X= 1 + ax. n' n Notice, that the equality is possible only when x = O. Thus, the theorem is proved completely. Problem 1. Prove, that if 0> a> -1, then (n+ 1)a+l_na+l na+1_(n_1)a+l a+1 < w «: a+1 (13) Solution. Since 0 < a + 1 < 1, then accord ing to the inequality (11) we have Proof. For the case, when the numbers ex and ~ have different signs the theorem has been proved above (refer to Problem 7, Sec. 1.2 and the definition prior to it). Thus, we have to prove the theorem only for the case when ex and ~ have the same signs. Assume, that 0 < ex < ~, and let Dividing C(3 by k, we get Now, supposing we obtain (15) 27 Since 1 ( dt + d2 ~ .•• + dn ) a = ((~)a (~)a. (.!:!!:...)a)a k + k + ... + k , n 1 a+ a+ -t a - _ 1 (a1 a2 ••. - an ) a _ 1 _ 1 . __ _ - _-ca--ca;.-1, k n k Ca then d1+d2+ .. · +dn n Suppose dl = 1 +XI, d2 = 1 +X2, ••• , dn = 1 +xn. From the equality dl + d2 + + dn = n it follows that Xl +X2 + -I-xn = o. On the basis of Theorem 3 (notice, that ! > 1) we have 1 ! ! ~ a; = (1 +xn) ::;:>1 +-aXn. J Adding these inequalities, we get !! ! ~ d1 +d2 + ... +dn ::;:>n+-(X1+X2+ ... +Xn)=n. (16) a (*) From the inequalities (15) and (16) it follows that 1 C: ::;:> ( : ) ~ = 1, C(3::;:>k = Ca. 28 I t is necessary to note that C fl = k = Ca. only when the signs of equality occur everywhere in (*), that is when Xl = x2 = = xn = 0 (Theorem 3). In this case d, = ,= d2 = = dn = 1 and, hence, a1 = a2 = ... = an = = k, But if the numbers aI' a2, ... , an are not identical, then Thus Theorem 4 is proved regarding the case when ° < <a< ~. If a < ~ < 0, then ° <1.< 1. Reasoning the same way a as before, we get in (*) and (16) the opposite signs of inequalities. But. since ~ < 0, then from the inequality 1. 1. _i df +d~ + ... +d;t --------<;:1 n it follows that that is Thus, Theorem 4 is proved completely. Further on we shall name the geometric mean by mean power of the order zero, that is, we shall assume g = co. i.e. the harmonic mean does not exceed the geometric mean, the geometric mean in its turn does not exceed the arithmetic mean, while the arithmetic mean does not exceed the root-mean-square of positive numbers. For example, if The use of inequalities in finding the greatest and the least function values and in calculating limits of some sequences will be examined in this chapter. Besides that, some important inequalities will be demonstrated here as well. 2.1. The Greatest and the Least Function Values A great deal of practical problems come to various functions. For example, if x, y, z are the lengths of the edges of a box with a cover (a parallelepiped), then the area of the box surface is S = 2xy + 2yz + 2zx, and its volume is v =, xyz. If the material from which the box is made is expensive, then, certainly, it is desirable, with the given volume of the box, to manufacture it with the least consumption of the material, i.e., so that the area of the box surface should be the least. We gave a simple example of a problem considering the maximum and the minimum functions of a great number of variables. One may encounter similar problems very often and the most celebrated mathematicians always pay considerable attention to working out methods of their solution. Here, we shall solve a number of such problems, making use of the inequalities, studied in the first chapter". First of all, we shall prove one theorem. 1 Concerning the application of inequalities of the second degree to solving problems for finding the greatest and the least values see the book by I.P. Natanson "Simplest Problems for Calculating the Maximum and Minimum Values", 2nd edition, Gostekhizdat, Moscow, 1952. 32 Theorem 5. If a>O, a>1, x:>-O, then the junction 1 xu. _ ax takes the least value in the point x = ( : ) 1 -a , a (a )a=-T"" equal to (1- a) a . Proof. The theorem is proved very simply for the case when a = 2. Indeed, since x2 _ ax = ( x _ ~ ) 2 _ a: ' a the function has the least value when x ="2 > 0, this a2 value being equal to - T' In case of arbitrary value of a > 1 the theorem is proved by using the inequality (12), demonstrated in Theorem 3. Since a > 1, then (1 + z)a ~ 1 + az, z ~ -1, the equality holding only when z = 0. Assuming hsre, that 1 + Z = y, we get ya ~ 1 + a (y - 1), ya - ay ~ 1 - a, y ~ 0, the sign of equality holds only when y = 1. Multiplying both members of the latter inequality by cu., we get the conclusion, obtained earlier by a different method. The function x3 - 27 x takes the least value in the point 1 3 _ ( 27 )"'3"='1 _ 3 ( 27 )3-"1 x- 3"" -, equal to (1-3) 3 = -54. Note. Let us mark for the following, that the function ax _XIX = -(xa. - ax), where a > 1, a> 0, x ~ 0, takes the greatest value in the point 1 (a .)a=-t X= a f Fig. 1 equal to a. (a )a=-t (a-i) a . Problem 1. It is required to saw out a beam of the greatest durability from a round log (the durability of the beam is directly proportional to the product of the width of the beam by the square of its height). Solution. Suppose AB = x is the width of the beam, BC = y is its height and AC -- d is the diameter of the log (Fig. 1). Denoting the durability of the beam by P, we get P = kxy2 = kx (d2 - x2) = k (d2x - x3). The function d2x - x3 takes the greatest value when 1 ( d2)3=1 d 2 X= 3 = va ' y2=d2-X2=3d2, d V- VY= Va 2=x 2. 34 Thus, the beam may have the highest (greatest) durability if the ratio of its height to its width will be equal to y:r ~ 7 the sign of equality occurring only when y = 1. From the last inequality it follows, that ya _ ay ~ 1 - a, (cy)a - aca-1 (cy) ~ (1 - a) ca. Assuming a = -aca-\ x = cy, we get t (a )a=T the equality holding only when x = c""'" --=ex . 36 Thus, the function xrx +- ax takes the least value in the point 1 _ (_a )a=T" x- , -(Z o: equal to (1- a) ( ~(Z ) rx-1 • For example, the function 1 sr-+-27x, x>O, 11 x takes the least value in the point 1 -1- x~ C{ f--' ~ 2~' This value equals 1 -3 _ 1 -1 (1 +{ ) ( y) 3 = 4. Problem 5. Find the optimum dimensions of a cylindrical tin having a bottom and a cover (dimensions of a vessel are considered to be the most profitable, if for a given volume the least amount of material is required for its manufacture, that is, the vessel has the least surface area). Solu tion. Let V = nr2h be the volume of the vessel, where r is the radius, h is the height of the cylinder. Tho total surface area of the cylinder is S = 2nr2 + Zscrh, V Since h = --2 , then nr V 2V S=2:rtr2+2nr--2 =2nr2+-. nr r Assuming 1 X=-, we get r S=2nx-2+2V;r=~n (X-2+ : x). 37 The function x-2 + ~ x, according to the solution of the 31 previous problem, takes the least value when 1 X- (~) -2-1 - V· 231 - 231 - V' Returning back to our previous designations, we find _!_ = J31 231 r3 = ~ = 31r2h r __ .!!_ r V ' 231 231' 2 ' h = 2r = d. Thus, the vessel has the most profitable dimensions, if the height and diameter of the vessel are equal. Exercises 6. Find the greatest value of the function x (6 - X)2 when 0 < x < 6. Indication. Suppose y = 6 - x. 7. From a square sheet whose side is equal to 2a it is required to make a box without a cover by cutting out a square at each vertex and then bending the obtained edges, 20 Fig. 4 Ie--- 2a-2x so that the box would be produced with the greatest volume (Fig. 4). What should the length of the side of the cut-out squares be? 8. Find the least value of the function ~6, + S,x2 t 5, 9. Find the least value of the function x6 _ 8x2 + 5. 10. Find the greatest value of the function xcx, - ax when 0< ex < 1, a > 0, x;;? 0. 11. Prove that, when x ;;? 0, the following inequality is true Vx-<:; +2x. 12. Prove that, when n ;;? 3, the following inequality is true yn>n+Yn+1. Indication. Make use of the inequality (8). 13. Find the greatest of the numbers ~ f') V- V· - 5 /'"i'; n r: 1, V "" 3, 4, V 5, ... , V n, 14. Prove the inequality n/- 2 V n<1+ lin . 15. Prove the inequality (1 + al) (1 + a2) ••• (1 + an) ;;? ? 1 + al + a2 + ... + an, if the numbers ai are of the same sign and are not less than -1. The series is said to be convergent, if the sequence of its partial sums has a finite limit. In this case the number S = lim Xn is called the sum of the series. n ... oo From Problem 3, it follows that the series 11111 1 1 1-2:+"3-"4+"5-6"+'" + 2n---,-1 --2n+'" converges and its sum equals In 2. Problem 4. The series ,1 1 1 1 112+"3+4+'" +-n+'" is called harmonic series. Prove that the harmonic series diverges. Solution. According to the inequality (23) .!.>In n+1 • n n Assuming n = 1, 2, 3, ... , n, write n inequalities 2 1 >lnT' 1 3 2>ln2:' 1 4 "3>ln"3' .!.>In n+1 • n n Adding them, we get 1 1 1 1 I 2·3·4 ... (n+1) 1 ( 1) Xn= +2:+"3+'" +-n> n 1.2.3 ... n =;: n n+ . It follows from this. inequality that lim xn >-lim In (n + 1) = 00; hence, the harmonic series diverges. 46 Problem 5. Prove that the series 1+_1 +_1 + ... +~+ ... 20. 30. n converges at any a> 1. Solution. The sequence of partial sums of this series (2()) Xl= 1, 1 X2= 1 +""""'(i""' 2 1 1 x3=1+-+- 2a. 3a. ' 1 1 1 x.-1+-+-+- ~- 2a. 3a. 40.' 111 Xn= 1 +-+-+ ... +- 2a. 3a. na. is monotonically increasing, that is Xl < x2 < X3 < X4 < ... < Xn < ... On the other hand, it is known that monotonically increasing limited sequence of numbers has a finite limit. Therefore, if we prove that the sequence of numbers Xn is. limited, then the convergence of the series (26) will be proved as well. Suppose Y2n=1 __ 1_+_1 1_+_1 1_+ ... 2a. 3a. 4a. 5a. 6a. 1 1 ... + (2n-1)a. (2n)a. Since Y2n = 1- ( 2~ - 3~ ) - ( 4~ - 5~ ) - .•• '" -C2n~2)o. - (2n~1)a.) - (2:)a.' then (the numbers in each bracket are positive) Y2n < 1. On the other hand, 11111 1 1 Y2n=1-~+ -sa-Ta+ 5a.- 6a.+· •. + (2n-1)a. (2n)a. = = (1+_1_+_1_+_1_+_1_+_1_+ + 1 +_1_)_ 2a. 3a. 4a. 5a. 60. . . . (2n-1)a. (2n)a. 47 1 1 1 1 -2 (za-+ 4a +6U"+ ... + (2n)a ) = = (1+~+~+_1_+_1_+_1_+ .. + 1 +_1_)_ 2a 3a 4a 5a 6a . (2n-1)a (2n)a 2 ( 1 1 1 ) -za- 1 + 2a +?+ ... + na • Since Xn=1+~+~+ ... +_1 , then 2 3~ na 2 Y2n = x2n -za- Xn· Now, since X2n > Xn, Y2n < 1, then 2 2a_2 1 >Y'l.n >Xn--Xn=-- Xn. Za Za Hence, it follows that za Xn< 2a_2 ' that is, the numbers Xn are limited when a> 1. Thus, it is proved that the series (26) converges and its sum is 2a not greater than --. 2a_Z For example, if a = 2, then 1 1 1 22 xn=1+22"+"32+'" +-;i2< 22_2 =2, S = lim Xn = 1 + Z12 + 3\ + ... +-; + ... <2. n-s-cc n In the course of higher mathematics it is proved that 1 1 1 n2 S= 1 +'22+3"2+" . +"/i2+'" ="""6' (27) Exercises 22. Find the sum of the series S = 1- ;2 + 12 -12 -I- ... + (_1)n-l ;2 + ... Indication. Use the equality (27). n2 Answer. S = 12' 48 1 23. Prove the inequalities na+1 a a rx (n-;--1f+1 ex. -1-1 < 1 + 2 + 3 + ... + n < ex. + 1 ,a> O. 24. Assuming xn=1+2a+3eG+ ... _I_neG, prove that . xn 1 hm--=-- a>O. rr-s-co neG + 1 ex.+·1' 25. Prove the inequality (ajbjcj + a2b2c2 + ... + anbncn)3--< --«a~+a~+ ... +a~) (b~ +b~+ ... +b~)(c~+c~+ ... +c~), if ak, bk, Ck are positive numbers. Indication. Use the inequality (7) and the method given in (22). . 1 1 1 1 26. Assuming Xn =-n+ n+1 + n+f + ... + kn " whe- re k is a positive integral number, prove that lim Xn = Ink. n .... oo Indication. Use the method of solving Problem 2 of the present section. I I I I 2.4. The Use of Inequalities for Approximate Calculation of Quantities At the very beginning of Chapter 1, we have paid attention to the fact that practical problems require, as a rule, an approximate calculation of quantities and, as well, an ability to treat such approximately calculated quantities. A more accurate estimation of such quantities will certainly permit to decrease errors in solving problems. In the present section, we are going to return to an approximate calculation of numbers of the form 1/2 4-0866 49 In Sec. 1.1 we have succeeded in finding the number S n, k with an accuracy of up to 0.4 for k = 1, n = 1,000,000 • 1 and ex. = 2" (refer to Problem 2). In the same section (see Exercises 2 and 3), for n = 106 and k = 10,000, we were able to find the number Sn. k already with an accuracy of up to 0.01. The comparison of these two examples shows, that the indicated method of their solution yields much better results of calculation for greater values of k. In Sec. 1.4 (Problem 3) we found the integral part of the number Sn. k for k = 4, n = 106 and ex. = f. Thus, this number was also calculated with an accuracy of up to 0.5. However, we could not find the integral part of the number 1 Sn.I for ex. = 3 and n = 106 because the method of calcu- lation of such quantities, indicated in Chapter 1, did not permit doing it. In this section, we shall improve the method of calculation of the quantity Sn. l' This improvement will make it possible to find similar quantities with a higher degree of accuracy quite easily. Lemma 1. If =. > X2 > Xa > > Xn, then 0< A = Xl - X2 + Xa - x4+ + (_1t-l Xn < Xl' Proof. The number of positive terms in the written algebraic sum is not less than the number of negative terms. Besides this, the preceding positive terms are greater than the following negative term. This proves that their algebraic sum is positive, A > O. On the other hand, since A = Xl - (X2 - Xa + xCG - ... + (_1)n-2 xn) and the quantity in brackets is positive too, then A < xl" Thus, the lemma is proved. - V 2.106+ 1- 0.0003 +,12 = 0.1710 + ,12, Now let us return to the quantity C. We have 1 1 111 1 . 1 C = 1- yz + Y3 - Yl; + V5 - YB + y"7 - ys +D = 1 1 111 = 1 - yz + Y3 - y4: + y5 - y6 + 1 1 + y"7- VS+0.1710+,12= 1 1 ( 1) 1 1 1 1 = 1 -- 2" - yz 1 +"2 + Y3 + y5 - YB + Y7 + +0.1710+,12= ~ _ 3yZ + ~3 + 1~5 _ ~ + \"7 + +0.1710 ± ,12' Thus, for the calculation of the number C with an accuracy of up to 3.10-4 it will be required to find only 5 roots and to produce a number of arithmetic operations. Using the tables and carrying out necessary calculations, we find C = 0.6035 + ,12' Taking into consideration the found quantities Band C, and returning to the quantity A, we get A = (V2 + 1) (B - C) = (V2 + 1) (827.8226+,13) = = (V2 + 1) ·827.8226 + 2.5,13' where 1 2.5,13 1 ~ 2.5 (I ,11 1 + 1 ,12 I) < 2.5.5.10-4 < 2.10-3. Thus, the calculation with an accuracy of up to 2.10-3 will be A = (V2 + 1) 827.8226 = 1998.539. 55 Problem 2. Calculate the number 1 1 1 A = 1 + y- + 4 r- + ... + 4 ,- y 2 V 3 y' 1012 with an accuracy of up to unity. Solution. By virtue of Theorem 8 V2 A = 2-V2 (V 10~2+1 + 11 10~2_f-2 + '" + t 2\012 ) - V2( 1 1 1) - 2-V2 1 - V2 + V3 - ... -. V2.1012 . The first term can be easily found and with a high degree of accuracy by means of the inequalities (28). By virtue of these inequalities the first term can he substituted by the number 3 3 t~_ (2.1012/~_(1012)4 = ~ .109 (y/S-1) V} _ "-"""~-109. 2-12 1-~ 3 2-1/2 3 4 By virtue of Lemma 1 the sum V2 1 1 1 2-V2 (1 - V2 + V3 - ... - V2.1012 ) is positive and is not greater than the first term. Since the term is less than two, then 4 4 3.109-2 <A < 3.109. The extreme numbers differ from each other by 2, and from the number A by less than 2. The middle number ; .109 - 1 differs from A by less than unity. Substituting this number, we get A = 1333333332.3 +~, I ~ I < 1. Notice that the accuracy of calculating the number A, containing a trillion of addends, is extremely high. The relative error is less than Notice, that the sign of equality holds only when the polynomial under consideration has a true root, i.e. when at a2 an bt=b;"='" =1i;;' 17. U sing the inequality (19), we get 2 _ ( at + a2 + ... + an ) 2 _ C! - n - (at 1 an 1) 2 = lIii Vii + ... + lin vn -< :::;;;; ( ai + a~ + . , , + a~ ) (_!_ + _!_ + ' .. + _!_) = n n n n n n n 64 Hence, it follows that C1 ~ C2 (the arithmetic mean does not exceed the root-mean-square). 18. From the inequality (vn+I + V n-1)2=n+1 + 2Vn2--1 +n-1 = = 2n + 2 V n2 - 1 < 2n + 2 V n2 = 4n it follows that V n + 1 + V n -1 < 2 Vn, _1_< 1 = 2Vn yn+1+yn-1 _ Y~-~ _Y~-Y~ - (Yn +1+ -vn=-T) (Yn +1- Vn -1) - 2 Multiplying by 2, we get 1 11- ll- yn < v n+1-v n-1. 19. Setting in the inequality of Exercise 18n = 2, 3, ... , Vn 1- -<V3-1 V2 ' 1 1/- 1/- Y3 < V 4- V 2, 1 1/- 1/-3 y;;;<v5-v, ~<Y6-V4, ;1i <Yn+1-Vn-1. Combining the written inequalities, we get 1 1, 1 11-' 11- 11- Vz+ V3""+YIi < V n-r1+v n-v 2-1. Adding 1 to both parts of the inequality, we finally get , 1 1 1 1 1 1+ Y2+ Y3+ y7;+ 115+ ... + yli < < y n+1 + Vn - V2. 6!) Note. It was proved in Sec. 2.1 that 1 1 1 V- ,(- 1+l/2+Vg+ .. ·+-vn>2 n+1-2v2+1. The numbers V n + 1 + Vn - V2 and 2 V n + 1 - - 2 V2 + 1 differ from each other less than by 0.42. Each of these numbers could be taken for an approximate value of the sum 1 1 1 1 + V2 -+- 113 + ... + -vn = Zn- Let us notice without proving, that the number V n + 1 + + lin - V2 differs less from the number Zn, than the number 2 V n + 1 - 2 li2 + 1. 3 20. The function x'~5 takes a negative value when x < O. Therefore, the greatest value of the function is obtained for positive values of x. Since x3 1 x4 + 5 = 5 ( ; x + X-3) , then the greatest value of the function is reached in the same point in which the function ; x + X _3 takes the least value. It follows from Problem 4 Sec. 2.1 that the least value of this function is equal to -3 ( 1 )-=3="1 3 (1 + 3)~ = 4 ( 115 f;-. The greatest value of s the function x4x+ 5 is equal to 3 154" 3 =20 5.4.( 115)4 To find the greatest value of the function x6 - O. 6x10, we get y = x6• It is clear that y>O. The function 10 (10 10 y-0.6Ji6 = 0.6 TY- ys) 15 3 66 takes the greatest value (see the note on p. 34) equal to 10 -6- -1-0- 0.6 ( '~ -1) ( ~ r -, ~ 04. 21 A '~1l ming in this exercise that y = ;2 , we get 1 v J + -..;- = y - 4 -/- ay. r 1 The least value of the lunct ion y-4+ay, as it follows from Problem 4 See. 2.1, i.'< oq u»l to
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Mathematical Conversations to Transform Algebra Class Three topics worthy of classroom discussions help beginning algebra students create meaning and build understanding as a community. We don't see things as they are. We see things as we are. —Anaïs Nin Imagine your beginning algebra class. Together you and your students engage in making sense of notation, representations, and terms. Your students watch you—and one another—covertly to see what makes an acceptable question, what strategies are valued, what pictures and symbols mean and how they are used, how mathematics is written and discussed, and how to justify a solution. These "hidden regularities . . . become the taken-for-granted ways of interacting" that constitute the culture of doing mathematics in your class (Wood 1998, p. 170). Classroom culture is established through both conversations and practices. Traditionally in mathematics class, we focus primarily on the latter; that is, we show our students what "doing mathematics" looks like and then ask that they try it themselves. In this article, I suggest three mathematical conversations that help bring covert—and often ineffectual—meanings into the light. The process I describe, sometimes called interrogating meaning, allows students to make explicit their assumptions about how, when, and for what purpose a mathematical notation, representation, or term is used (Rosebery et al. 2005). In other words, these conversations can help students recognize the strengths and weaknesses of their own interpretations and give them agency in changing them. Further, they allow us as teachers a window into our students' thinking. Each mathematical conversation begins with a question for your class to ponder and discuss. I will describe some typical student thinking about each question and suggest some ways to build on students' ideas. Each topic has been addressed in the classroom with students at a variety of levels and makes a powerful point about mathematical culture. The equals sign, =, signifies that two quantities are the same. It does not mean "write the answer." During the first week of my algebra classes, I write the problem shown in figure 1 on the board and ask that everyone decide, without talking to one another, what numbers go in the blanks. Then we discuss their ideas. More than ninety percent of upper elementary school students will interpret = as "write the answer to the preceding computation" and will fill in the blanks with 19 and 25 (Falkner, Levi, and Carpenter 1999). At the university level, a majority of students in introductory mathematics courses, such as college algebra, mathematics for elementary school teachers, and liberal arts mathematics, will also respond with 19 and 25 (Szydlik, Kuennen, and Seaman 2009), so it is a good bet that your beginning algebra students harbor this alternative conception about the meaning of the equals sign. This interpretation is not consistent with that of the mathematical community, but it is not objectively incorrect. We could have decided as a mathematical culture that = means "write the answer." However, we did not, and we had important reasons for defining equality the way that we did. Equality is a fundamental mathematical relationship between quantities signifying that these quantities are exactly the same. Students need to be told all this explicitly and helped to understand that meaning. Carpenter, Franke, and Levi (2003) recommend that elementary school teachers pose number sentences in ways that better reveal limitations of the "write the answer" interpretation. For example, a teacher might write equations in a variety of forms— ___ = 4 + 7 3 + ___ = 12 8 + 4 = 5 + ___ —and ask students what values make the equations true. Those of us who teach algebra might take a similar tact before formally solving an equation. For example, after making the point that equality is a relationship between two numbers, I will write something like 2x = x2 – 3 and ask, "What values of x make this equation true? Can you find any without writing anything down?" Then, when we discuss algebraic moves that will help find solutions, I can reinforce for my students that the point of algebraic manipulation is to give us exactly those moves that allow us to preserve equality. I find a conversation about equality particularly valuable when my students use the equals symbol to mean something like "and then I did this . . ." during the course of performing a series of algebraic steps. For example, a student solving for a semicircular area in which she needs to first square the circle's radius, then multiply by π and then divide by 2 might write something like this: A = 42 = 16 = 16 = 16/2= 8. In a class in which we have had an equality conversation, the student and I might have this exchange: Teacher: What did you mean here when you wrote 16 = 16? Audrey: I was showing all my steps. First, I squared the 4, and then I multiplied by . Teacher: So in this calculation, = means "and then I did this. . . ." Audrey: [laughs] And then I did that and that. Teacher: I get it. But looking at this, remember that I would think you meant that 16 is exactly the same quantity as 16. And that might even lead me to solve for and think that = 1. Audrey: How would you think that? Oh, I see. You'd divide both sides of 16 = 16 by 16. Teacher: [nods] Algebra is about all the things you can do that keep two sides of an equation balanced, and mathematicians have decided to use the equals sign to show that balance. It is important to write mathematics in a way that is consistent with that meaning. It gives you power in organizing your work, and it allows you to communicate with others who are learning the language of algebra. How could you change what you wrote so that it made sense to me? The focus here is not on the student being wrong. Rather, I acknowledge that the student did have a meaning for the symbol, that her meaning made some sense, but that she will not be able to effectively communicate her thinking in the language of algebra unless she adopts the mathematical culture. I ask each student to take a minute to make up a mathematical meaning for the representation shown in figure 2. Then I solicit a variety of ideas. What follows is a typical start of a discussion. Teacher: What do you see in this picture? [Fifteen seconds or more of wait time] Sara: I see a side view of a three-dimensional house. Teacher: Do you mean the white part? Sara: Uh-huh. You might get the view from the different sides and have to imagine the whole house. Richard: I've seen those types of problems before. Iiona: I see that. But I was picturing it [as] just the fraction 5/12. Teacher: Okay. How did you see that? Iiona: Five white squares out of the total of twelve squares. Teacher: Who else saw that fraction? [Several hands are raised; many students see fraction representations by what is not shaded rather than by what is shaded.] Did anyone see the fraction 7/12? [Hands are raised.] Either one is reasonable, right? So I guess when we make pictures of fractions, we should say whether we are looking at the shaded part or the unshaded part. Other ideas? Charlotte: Could it be the fraction 5/7? Iiona: No. That would mean 5 out of 7, and it is 5 out of 12. Charlotte: I mean 5 white and 7 shaded. Teacher: So you are thinking of the ratio 5 white to 7 shaded [writing on board: 5 : 7]. Maybe we could write it like this? Does this seem okay to you, Iiona? [Iiona nods.] Teacher: The big point here might be that this picture has lots of reasonable mathematical interpretations. There is not just one correct way to see it. When we make a representation, we need to talk about what it means for that particular problem or situation. Can anybody think of another possible meaning for this picture? Diego: It could be an area model for a probability problem. Teacher: Ah. Can anyone come up with a problem for which that picture would be a model? I have heard all these responses (depending in part on the current content of the class in which the question was posed) and lots of others too. For example, students have said that the picture shows 12 – 5 = 3 + 4. That it is the number 17 (on a digital clock). That it suggests the expression (3 • 4) – 5. That it is showing that 3/12 + 4/12 = 7/12. That it shows an impossible net for an open box. The idea that representations do not carry meaning is not new. In the 1980s, researchers published empirical studies showing that even "standard" mathematical representations have many viable interpretations (Schipper 1982; Feller 1983; Radatz 1986). For example, when Schipper asked 109 first-grade children to interpret pictorial representations (like that shown in fig. 2) from standard first-grade mathematics textbooks, he found that about a third of the children gave alternative meanings to pictures that had (or were similar to those that had) been used in their classes; another third declined to attempt a representation. Thompson (1994) suggested that without awareness of alternative meanings, teachers may assume that students see what we intend for them to see, and he warns that communication can break down when students see something other than what we intend. Conversation 2 gives me the opportunity to see and validate many student conceptions and to acknowledgethat representations require clarification. It also lets me explicitly tell students that if they do not understand what a picture or symbol represents in a particular context, or if they are seeing something different in a representation, they need to bring this to the attention of the class. We talk about the fact that pictures, diagrams, and symbols can have many reasonable meanings and that it is our job as a class to make sure that we discuss and agree on what representations mean. Having an alternative conception does not imply that the student is wrong or bad at mathematics. Pictures do not carry one correct meaning. Bauersfeld (1995) argued that these types of conversations about alternative conceptions can help students build groundwork for future mathematics. "As soon as we narrow the students' interpretations of pictures and situations toward an unequivocal ascription of mathematical meaning," he warns, "we throw away the opportunity for an early and powerful preparation for later problem solving" (p. 146). So not only does this conversation give students opportunities to describe their thinking, but it also allows them to argue why a certain interpretation may be valuable in one context, whereas another interpretation may be valuable in another, and to create scenarios (such as the probability model problem) that may be useful in future mathematical contexts. Mathematicians have agreed on precise meanings for words. Pay careful attention to their language. Many students do not appreciate the subtleties of mathematical talk. As part of a research study (Szydlik, Kuennen, and Seaman 2009), we posed the item shown in figure 3 to a large sample of college students in their beginning mathematics class (such as college algebra, mathematics for elementary teachers, or liberal arts mathematics). Try it with your students as a way to begin a conversation about how mathematicians use language. Only approximately half the students in our study responded in a way that is consistent with the interpretation of the mathematical community—that neither (a) nor (b) need be true. Students who chose (b), the most common alternative response, argued that if you are talking about people in a pool, there must be someone in the pool. This led us to question the precision with which students attend to language and, specifically, the meanings that students may be giving to statements containing quantifiers (e.g., for all, there exists), quantifying language (e.g., at least, at most, exactly), and words such as unique, distinct, and, and or. Precise statements are a hallmark of algebra. Algebraic identities are those statements that are true in all cases (e.g., for all x and for all y, (x + y)2 = x2 + 2xy + y2 ). When we solve an equation, we are implicitly thinking, "If there exists a solution, x, then I could do all these moves to find it." We might tell students that two distinct lines in the plane can intersect at most once or that a cubic equation has at least one real root. When talking about solving an inequality, we may explain that x > 7 or x < –7. But what do students make of this language? First, we need to ask them. Second, we need to share explicitly the mathematical culture regarding the precision of our language. Some researchers have found that revoicing (repeating or rephrasing) student talk can help students clarify ideas, learn mathematical vocabulary, or attend to specific words and their meanings (O'Connor and Michaels 1993). In my algebra classes, I look for opportunities to amplify words by emphasizing their importance when revoicing student talk and by emphasizing them in my own speaking. Revoicing might sound something like this: Aidos: I got x is bigger than 7 and x is less than negative 7. Teacher: [to the class] Aidos says x is bigger than 7 and x is less than negative 7. [short pause] Hmm. Give me a number that x could be. Violet: 10. Teacher: Okay, then 10 has to satisfy Aidos's statement. Let's read it with 10 in there. Ten is bigger than 7 and 10 is less than negative 7. [Five seconds of silence] Aidos: I meant that it just has to be one or the other. Violet: So it should be x is bigger than 7 or less than negative 7? Teacher: Yes. Then you are saying that all values of x that are bigger than, greater than, 7 along with all values of x that are less than negative seven make the inequality true. I also share with students, through stories, mathematical culture regarding language. For example, I explain that if a mathematician has six children and you ask whether she has three children (in the context of mathematics—and probably outside it too), she will answer in the affirmative, because if she has six children, then she also has three children. I tell them that my father (a mathematician too) will respond to and-or questions with either yes or no. I learned quite young that if I asked him if he wanted peas or beans at dinner, he would simply say yes. (I am delighted when students adopt this language and start to answer my questions in that manner. Teacher: "True or false? (x + y)2 = x2 + y2?" Class: "Yes.") Stories like these give us opportunities to share meanings that mathematicians give to language. The types of conversations described here pay high mathematical dividends for the class time invested. They allow us to hear student thinking about mathematical symbols, representations, and language and share meanings given to these objects by the mathematical community. They provide teachers and students opportunities to lay groundwork for future problem solving and to discuss larger mathematical values and practices. In addition, they specifically address the Common Core Standards for Mathematical Practice regarding attention to precision: "Mathematically proficient students try to communicate precisely to others. They try to use clear definitions in discussion with others and in their own reasoning. They state the meaning of the symbols they choose, including using the equals sign consistently and appropriately" (CCSSI 2010, pp. 7). Further, the conversations encourage contributions from students who may have been reticent to engage because they allow us to validate their different ways of seeing mathematical objects. In other words, these types of discussion can enhance the culture of participation in our classrooms because they allow us to shift the notion that mathematical rules are based on the teacher's authority to a more inclusive and empowering view in which mathematical understanding is developed by a community of learners. This is not to say that three conversations are sufficient; changing classroom norms is an ongoing project. The practice of interrogating meaning of symbols, representations, and terms must be ongoing if this type of participation is to become the norm. These conversations are meant to serve as openings to begin that transformation. Bauersfeld, Heinrich. 1995. "The Structuring of Structures: Development and Function of Mathematizing as a Social Practice." In Constructivism in Education, edited by Leslie Steffe and Jerry Gale, pp. 137–58. Hillsdale, NJ: Lawrence Erlbaum Associates. Schipper, Wilhelm. 1982. "Selection and Order of Mathematical Content in the Early Grades." Journal fur Mathematik-Didaktik 2: 91–120. Szydlik, Jennifer E., Eric Kuennen, and Carol E. Seaman. 2009. "Development of an Instrument to Measure Mathematical Sophistication." In Proceedings for the Twelfth Conference of the MAA's Special Interest Group on Research in Undergraduate Mathematics Education (SIGMAA on RUME).
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Why choose OCR GCSE (9–1) Maths? 100 marks per paper, giving us a large scope for awarding more method marks within questions. This means candidates can be better rewarded for each correct step on the way towards an answer. A column of required content suitable for 'initial learning' is set out in the specification, ensuring that the basics can be established with learners before moving on to more difficult areas. Mathematical formulae will be provided directly in each question when relevant, rather than on a formulae sheet at the front of the paper where candidates would then have to identify and choose the correct formula from. GCSE Maths is designed to be straightforward and accessible so you can tailor how you deliver the course to suit your students' needs and is backed up by high-quality resources to support you. Do you have any questions and want to talk to us? If you need specialist advice, guidance or support about GCSE Maths, get in touch by: External resources OCR has endorsed or recommended the following resources for use with this specification. For more information about endorsed or recommended resources, visit our endorsement page. Note: OCR is not responsible for the contents of third party sites. GCSE Mathematics for OCR Foundation Homework Book Textbook Description This Resource Partner Homework Book is an ideal companion to the OCR Foundation tier Student Book and can be used as a standalone resource. With exercises that correspond to each section of the Student Book, it offers a wealth of additional questions for practice and consolidation. GCSE Mathematics for OCR FoundationGCSE Mathematics for OCR Higher Homework Book Textbook Description This Resource Partner Homework Book is an ideal companion to the OCR Higher tier Student Book and can be used as a standalone resource. With exercises that correspond to each section of the Student Book, it offers a wealth of additional questions for practice and consolidation. GCSE Mathematics for OCR HigherMastering Mathematics for OCR GCSE: Foundation Foundation 2/Higher Higher 2
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in its eighth edition, this text masterfully integrates skills, concepts, and activities to motivate learning. It emphasises the relevance of mathematics to help students learn the importance of the information being covered. This approach ensures that they develop a sold mathematics foundation and discover how to apply the content in the real world.
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The Numbers Guide, now in its fifth edition, is aimed at managers who have budgetary, planning or forecasting responsibilities and is invaluable for everyone who wants to be competent, and able to communicate effectively, with numbers. There are chapters on Key Concepts * Finance and investment * Measures for interpretation and analysisForecasting techniques * Sampling and hypothesis testingIncorporating judgments into decisions * Decision-making Linear programming and networking * How spreadsheet programmes can make it easy The Number Properties Guide delves into all the characteristics of numbers tested on the GMAT, covering both simple and complicated concepts. Using the fundamental techniques and nuanced strategies developed in this guide, students will be able to tackle even the toughest GMAT problems involving prime numbers, consecutive integers, and many other topics.
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Trigonometry: An analytic approach This fifth edition reflects twenty years of classroom experience with the earlier editions. As in the previous editions, the circular functions, which are pairings of real numbers with real numbers, and their properties are introduced in Chapter 1 and are the basis for a mathematical characterization of periodic phenomena. This approach gives early importance to those aspects of trigonometry that students who plan to continue their study of mathematics will need in calculus. This edition is designed for use in a one-semester or one-quarter courses in trigonometry.
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This course provides an introduction to complex analysis which is the theory of complex functions of a complex variable. We will start by introducing the complex plane, along with the algebra and... more This course covers mathematical topics in trigonometry. Trigonometry is the study of triangle angles and lengths, but trigonometric functions have far reaching applications beyond simple studies of... more This course covers mathematical topics in college algebra, with an emphasis on functions. The course is designed to help prepare students to enroll for a first semester course in single variable... more
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Course Summary Use this textbook help course as a companion to your Amsco geometry textbook to study for exams or clarify information you don't quite understand. Each one of our video lessons aligns with the chapters in your textbook, so you can easily work through challenging topics at your own pace with these extra resources
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This straightforward guide describes the main methods used to prove mathematical theorems. Shows how and when to use each technique such as the contrapositive, induction and proof by contradiction. Each method is illustrated by step-by-step examples. Given the explosion of information and knowledge in the field of Life Sciences, adapting primary literature as materials in course work as part of active learning seems to be more effective in improving scientific literacy among science undergraduates than the pure transmission of content knowledge using traditional textbooks.
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Showing 1 to 2 of 2 Idea I: Limit Definition of a Derivative History: A long, long time ago, in two places half a world away, two philosophers (Isaac Newton and Gottfried Leibniz) created a system of mathematics at practically the same time in almost the same way. Through th Geography | Webquest | NASA Webquest NASA Directions: Go to and answer the questions. 1. What is the NASA image of the day for today (the day you are completing this exercise)? Answer: Tectonically Active Planet Mercury. 2. Who is the Adminis AP Calculus AB Advice Showing 1 to 2 of 2 Even if math isn't your strong suit, I would highly recommend this class. Mr. Wood's incredible teaching makes all his students feel empowered, and capable. He treats his students like adults, and works with them to find the best path to help them succeed. Course highlights: I learned more than just math, I learned how to be a thinker, and a problem solver. Instead of memorizing information, I actually learned it, and used my combined knowledge to solve problems I never knew I could. I was able to grow into a well rounded person, who can think out side of the box, and find solutions to more than just math equations. Hours per week: 3-5 hours Advice for students: Do the work! Ever problem is preparing you for the end of the class, and beyond. If you don't put in the effort to learn, then you won't. Course Term:Winter 2016 Professor:Brian Wood Course Tags:Math-heavyBackground Knowledge ExpectedGreat Discussions Nov 15, 2016 | Would highly recommend. This class was tough. Course Overview: This is a very challenging but very useful course. It's important to begin creating good study habits in High School to prepare you for college. If you like math I would STRONGLY recommend this course. It may be difficult, but it so satisfying when you succeed and begin to understand. Course highlights: I took the majority of Calc A last semester and I a currently in the course now. It's a very hard curriculum and you start out with learning things like Limits, and Optimization. It's very tough to wrap your brain around but with a really good teacher and determination to do good you will succeed! Just a reminder that you have resources all around you, take advantage of them!! Hours per week: 3-5 hours Advice for students: I would recommend to take time out of your daily life if you are struggling to go see your teacher. The stronger the relationship is with your teacher the better you will preform. Teachers are here to help you succeed so why not take advantage? One on one help is so valuable in general and it can turn such confusion into something so clear. I would also advise to find someone who can explain hard concepts in everyday ideas, sometimes X's and Y's are just too complicated to wrap your mind around but once you see how to do a similar problem with easy numbers, or something like dog houses in place of X's it seems to make much more sense!
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