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"In formula (el), R",
"1$_{a }$",
"is as defined above; ",
"Ra ",
"is a straight ",
"C$_{1}$-C$_{20 }$or branched or cyclic C$_{3}$ -C$_{20 }$monovalent hydrocar›",
"bon group which may be substituted with or separated by a ",
"heteroa... | [
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] | 8c46bde5fcdaf724ccf1634a55745b55e439e05bac40ef29804a888e76f8727e | 9989847_AdobeOCR.pdf | 37 | 60 | 612 | 792 | 1,025 | 1,025 | patents_euv_sensitivity | patents |
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