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{"WorkTypes":[],"ToolName":"-","Size":"","ToolOther":"","WorkName":"D-PIN圧入確認","WorkItems":["1. 本体フレームにD-PINが56本圧入されていることを確認する"],"WorkPoints":["32本","24本","赤色のポイントがD-PINです"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["※2階部分","※1階部分","検査表①:本体フレームHIPIN圧入確認","WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"-","Size":"","ToolOther":"","WorkName":"D-PIN圧入確認","WorkItems":["1. 本体フレームにD-PINが56本圧入されていることを確認する"],"WorkPoints":["32本","24本","赤色のポイントがD-PINです"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["※2階部分","※1階部分","検査表①:本体フレームHIPIN圧入確認","WDWS-5400-004"],"QualityItem":"取付確認","ToolManageNo":"-","ToolCycle":"-","ToolRecord":"-","StdVal":"指示通り取付出来ている事","Method":"目視","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
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{"WorkTypes":[],"ToolName":"シックネスゲージ","Size":"0.01㎜","ToolOther":"","WorkName":"ダイエジェクタ組付け","WorkItems":["1. 下記手順に従いダイエジェクタを組付け確認する"],"WorkPoints":["隙間確認:0.01mm以下","ダイエジェクタ用D-PIN"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["検査表①:ダイエジェクタ組付け","【作業手順】Ⅰ、ダイエジェクタをD-PINに当付けて仮止めする。(本体ドッキング工程)Ⅱ、D-PINの隙間を確認し本締めする","WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"シックネスゲージ","Size":"0.01㎜","ToolOther":"","WorkName":"ダイエジェクタ組付け","WorkItems":["1. 下記手順に従いダイエジェクタを組付け確認する"],"WorkPoints":["隙間確認:0.01mm以下","ダイエジェクタ用D-PIN"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["検査表①:ダイエジェクタ組付け","【作業手順】Ⅰ、ダイエジェクタをD-PINに当付けて仮止めする。(本体ドッキング工程)Ⅱ、D-PINの隙間を確認し本締めする","WDWS-5400-004"],"QualityItem":"取付確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"隙間:0.01㎜以下","Method":"シックネスゲージ","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"シックネスゲージ","Size":"0.01㎜","ToolOther":"","WorkName":"ウエハカセットリフタ組付け","WorkItems":["1. 下記手順に従いウエハカセットリフターを組付け確認する"],"WorkPoints":["当付け確認:隙間0.01㎜以下","ウエハカセットリフタ用D-PIN"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["検査表①:ウエハカセットリフタ組付け","【作業手順】Ⅰ、ウエハカセットリフターをD-PINに当付けて仮止めする。(本体ドッキング工程)Ⅱ、D-PINの隙間を確認し本締めする","WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"シックネスゲージ","Size":"0.01㎜","ToolOther":"","WorkName":"ウエハカセットリフタ組付け","WorkItems":["1. 下記手順に従いウエハカセットリフターを組付け確認する"],"WorkPoints":["当付け確認:隙間0.01㎜以下","ウエハカセットリフタ用D-PIN"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["検査表①:ウエハカセットリフタ組付け","【作業手順】Ⅰ、ウエハカセットリフターをD-PINに当付けて仮止めする。(本体ドッキング工程)Ⅱ、D-PINの隙間を確認し本締めする","WDWS-5400-004"],"QualityItem":"隙間確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"隙間:0.01㎜以下","Method":"シックネスゲージ","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"てこ式ダイヤルゲージ","Size":"2/1000","ToolOther":"","WorkName":"ウエハフレームトランスファー組付け","WorkItems":["1. 下記手順に従いウエハフレームトランスファーをウエハX軸に平行に調整する"],"WorkPoints":["規格:30μ/200㎜以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、ウエハフレームトランスファーをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、ウエハテーブルにテコ式ダイヤルゲージをセットしウエハフレームトランスファーの リニア側面をX方向に測定する。Ⅲ、測定値が規格内なら増し締めして、再度ズレがないか測定する。Ⅳ、規格外もしくは増し締め後に規格外になった場合は、 X方向のどちらかのPIN当てを外して規格内に収める。","検査表①:ウエハフレームトランスファー組付け","WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"てこ式ダイヤルゲージ","Size":"2/1000","ToolOther":"","WorkName":"ウエハフレームトランスファー組付け","WorkItems":["1. 下記手順に従いウエハフレームトランスファーをウエハX軸に平行に調整する"],"WorkPoints":["規格:30μ/200㎜以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、ウエハフレームトランスファーをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、ウエハテーブルにテコ式ダイヤルゲージをセットしウエハフレームトランスファーの リニア側面をX方向に測定する。Ⅲ、測定値が規格内なら増し締めして、再度ズレがないか測定する。Ⅳ、規格外もしくは増し締め後に規格外になった場合は、 X方向のどちらかのPIN当てを外して規格内に収める。","検査表①:ウエハフレームトランスファー組付け","WDWS-5400-004"],"QualityItem":"平行度","ToolManageNo":"-","ToolCycle":"1回/半年","ToolRecord":"校正成績書","StdVal":"平行度:30μ/200㎜以下","Method":"てこ式ダイヤルゲージ","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"-","Size":"","ToolOther":"","WorkName":"ウエハシートブローヒータ組付け","WorkItems":[],"WorkPoints":[],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"-","Size":"","ToolOther":"","WorkName":"ウエハシートブローヒータ組付け","WorkItems":[],"WorkPoints":[],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["WDWS-5400-004"],"QualityItem":"取付確認","ToolManageNo":"-","ToolCycle":"-","ToolRecord":"-","StdVal":"指示通り取付出来ている事","Method":"目視","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"シックネスゲージ","Size":"0.01㎜","ToolOther":"","WorkName":"基板搬入レール組付け","WorkItems":["1. 下記手順に従い基板搬入レールを組付け調整する"],"WorkPoints":["このボルトで再調整する","スケールでY方向の段差確認","隙間確認:0.01mm以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、基板搬入レールをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、シックネスゲージで当付けを確認し本締めする。Ⅲ、プリステージの基準側レールを上昇させ、搬入レールの基準側とY方向に 段差が無いことをスケールを使用し確認する。Ⅳ、段差がある場合は搬入側のレールを緩めて再調整する。","検査表①:基板搬入レール組付け","WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"シックネスゲージ","Size":"0.01㎜","ToolOther":"","WorkName":"基板搬入レール組付け","WorkItems":["1. 下記手順に従い基板搬入レールを組付け調整する"],"WorkPoints":["このボルトで再調整する","スケールでY方向の段差確認","隙間確認:0.01mm以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、基板搬入レールをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、シックネスゲージで当付けを確認し本締めする。Ⅲ、プリステージの基準側レールを上昇させ、搬入レールの基準側とY方向に 段差が無いことをスケールを使用し確認する。Ⅳ、段差がある場合は搬入側のレールを緩めて再調整する。","検査表①:基板搬入レール組付け","WDWS-5400-004"],"QualityItem":"隙間確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"隙間:0.01㎜以下","Method":"シックネスゲージ","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"スケール","Size":"150㎜","ToolOther":"","WorkName":"基板搬入レール組付け","WorkItems":["1. 下記手順に従い基板搬入レールを組付け調整する"],"WorkPoints":["このボルトで再調整する","スケールでY方向の段差確認","隙間確認:0.01mm以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、基板搬入レールをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、シックネスゲージで当付けを確認し本締めする。Ⅲ、プリステージの基準側レールを上昇させ、搬入レールの基準側とY方向に 段差が無いことをスケールを使用し確認する。Ⅳ、段差がある場合は搬入側のレールを緩めて再調整する。","検査表①:基板搬入レール組付け"]} | {"WorkTypes":[],"ToolName":"スケール","Size":"150㎜","ToolOther":"","WorkName":"基板搬入レール組付け","WorkItems":["1. 下記手順に従い基板搬入レールを組付け調整する"],"WorkPoints":["このボルトで再調整する","スケールでY方向の段差確認","隙間確認:0.01mm以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、基板搬入レールをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、シックネスゲージで当付けを確認し本締めする。Ⅲ、プリステージの基準側レールを上昇させ、搬入レールの基準側とY方向に 段差が無いことをスケールを使用し確認する。Ⅳ、段差がある場合は搬入側のレールを緩めて再調整する。","検査表①:基板搬入レール組付け"],"QualityItem":"段差確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"段差無い事","Method":"スケール","RecordMethod":"-","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"シックネスゲージ","Size":"0.01㎜","ToolOther":"","WorkName":"基板搬出レール組付け","WorkItems":["1. 下記手順に従い基板搬出レールを組付け調整する"],"WorkPoints":["スケールでY方向の段差確認","D-PINに当付けて組付ける","このボルトで再調整する","隙間確認:隙間0.01mm以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、基板搬出レールをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、シックネスゲージで当付けを確認し本締めする。Ⅲ、ボンディングステージの基準側レールのY方向の位置をプリステージの 基準レールと合う位置に移動させる。Ⅳ、ボンディングステージのレールを上昇させ搬出レールを下降させるⅤ、ボンディングステージの基準側レールに搬出レールの基準側のY方向に 段差が無いことをスケールを使用し確認する。Ⅵ、段差がある場合は搬出側のレールを緩めて再調整する。","検査表①:基板搬出レール組付け","WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"シックネスゲージ","Size":"0.01㎜","ToolOther":"","WorkName":"基板搬出レール組付け","WorkItems":["1. 下記手順に従い基板搬出レールを組付け調整する"],"WorkPoints":["スケールでY方向の段差確認","D-PINに当付けて組付ける","このボルトで再調整する","隙間確認:隙間0.01mm以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、基板搬出レールをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、シックネスゲージで当付けを確認し本締めする。Ⅲ、ボンディングステージの基準側レールのY方向の位置をプリステージの 基準レールと合う位置に移動させる。Ⅳ、ボンディングステージのレールを上昇させ搬出レールを下降させるⅤ、ボンディングステージの基準側レールに搬出レールの基準側のY方向に 段差が無いことをスケールを使用し確認する。Ⅵ、段差がある場合は搬出側のレールを緩めて再調整する。","検査表①:基板搬出レール組付け","WDWS-5400-004"],"QualityItem":"隙間確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"隙間:0.01㎜以下","Method":"シックネスゲージ","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"スケール","Size":"300㎜","ToolOther":"","WorkName":"基板搬出レール組付け","WorkItems":["1. 下記手順に従い基板搬出レールを組付け調整する"],"WorkPoints":["スケールでY方向の段差確認","D-PINに当付けて組付ける","このボルトで再調整する","隙間確認:隙間0.01mm以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、基板搬出レールをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、シックネスゲージで当付けを確認し本締めする。Ⅲ、ボンディングステージの基準側レールのY方向の位置をプリステージの 基準レールと合う位置に移動させる。Ⅳ、ボンディングステージのレールを上昇させ搬出レールを下降させるⅤ、ボンディングステージの基準側レールに搬出レールの基準側のY方向に 段差が無いことをスケールを使用し確認する。Ⅵ、段差がある場合は搬出側のレールを緩めて再調整する。","検査表①:基板搬出レール組付け"]} | {"WorkTypes":[],"ToolName":"スケール","Size":"300㎜","ToolOther":"","WorkName":"基板搬出レール組付け","WorkItems":["1. 下記手順に従い基板搬出レールを組付け調整する"],"WorkPoints":["スケールでY方向の段差確認","D-PINに当付けて組付ける","このボルトで再調整する","隙間確認:隙間0.01mm以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、基板搬出レールをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、シックネスゲージで当付けを確認し本締めする。Ⅲ、ボンディングステージの基準側レールのY方向の位置をプリステージの 基準レールと合う位置に移動させる。Ⅳ、ボンディングステージのレールを上昇させ搬出レールを下降させるⅤ、ボンディングステージの基準側レールに搬出レールの基準側のY方向に 段差が無いことをスケールを使用し確認する。Ⅵ、段差がある場合は搬出側のレールを緩めて再調整する。","検査表①:基板搬出レール組付け"],"QualityItem":"段差確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"段差無い事","Method":"スケール","RecordMethod":"-","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"シックネスゲージ","Size":"0.01㎜","ToolOther":"","WorkName":"基板搬送ユニット組付け","WorkItems":["1. 下記手順に従い基板送ユニットを組付ける"],"WorkPoints":["リニア側面を測定","隙間確認:隙間0.01mm以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、基板搬送ユニットをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、基板搬送ユニットとD-PINに隙間が無い事をシックネスゲージで確認し本締めする【参考確認】ボンディングステージにテコ式ダイヤルゲージをセットし基板搬送ユニットの リニア側面をX方向に確認する。(平行度:0.1㎜以下)","検査表①:基板搬送ユニット組付け","WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"シックネスゲージ","Size":"0.01㎜","ToolOther":"","WorkName":"基板搬送ユニット組付け","WorkItems":["1. 下記手順に従い基板送ユニットを組付ける"],"WorkPoints":["リニア側面を測定","隙間確認:隙間0.01mm以下"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、基板搬送ユニットをD-PINに当付けて仮止めする(本体ドッキング工程)Ⅱ、基板搬送ユニットとD-PINに隙間が無い事をシックネスゲージで確認し本締めする【参考確認】ボンディングステージにテコ式ダイヤルゲージをセットし基板搬送ユニットの リニア側面をX方向に確認する。(平行度:0.1㎜以下)","検査表①:基板搬送ユニット組付け","WDWS-5400-004"],"QualityItem":"隙間確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"隙間:0.01㎜以下","Method":"シックネスゲージ","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"スケール","Size":"150㎜","ToolOther":"","WorkName":"マガジンリフタ_LD組付け","WorkItems":["1. 下記手順に従いマガジンリフタを組付ける"],"WorkPoints":["段差確認:段差無い事"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 Ⅰのボルトもしくはマガジンホルダーのボルトを緩めて再調整する。","検査表①:マガジンリフタ_LD組付け","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 ショックアブソーバー(ストッパー兼用)で再調整する。 ※前後ストッカー調整","2連マガジン切替仕様","切替無し仕様"]} | {"WorkTypes":[],"ToolName":"スケール","Size":"150㎜","ToolOther":"","WorkName":"マガジンリフタ_LD組付け","WorkItems":["1. 下記手順に従いマガジンリフタを組付ける"],"WorkPoints":["段差確認:段差無い事"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 Ⅰのボルトもしくはマガジンホルダーのボルトを緩めて再調整する。","検査表①:マガジンリフタ_LD組付け","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 ショックアブソーバー(ストッパー兼用)で再調整する。 ※前後ストッカー調整","2連マガジン切替仕様","切替無し仕様"],"QualityItem":"取付確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"指示通り取付出来ている事","Method":"スケール","RecordMethod":"-","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"ブロックゲージ","Size":"9㎜","ToolOther":"","WorkName":"マガジンリフタ_LD組付け","WorkItems":["1. 下記手順に従いマガジンリフタを組付ける"],"WorkPoints":["段差確認:段差無い事"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 Ⅰのボルトもしくはマガジンホルダーのボルトを緩めて再調整する。","検査表①:マガジンリフタ_LD組付け","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 ショックアブソーバー(ストッパー兼用)で再調整する。 ※前後ストッカー調整","2連マガジン切替仕様","切替無し仕様","WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"ブロックゲージ","Size":"9㎜","ToolOther":"","WorkName":"マガジンリフタ_LD組付け","WorkItems":["1. 下記手順に従いマガジンリフタを組付ける"],"WorkPoints":["段差確認:段差無い事"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 Ⅰのボルトもしくはマガジンホルダーのボルトを緩めて再調整する。","検査表①:マガジンリフタ_LD組付け","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 ショックアブソーバー(ストッパー兼用)で再調整する。 ※前後ストッカー調整","2連マガジン切替仕様","切替無し仕様","WDWS-5400-004"],"QualityItem":"取付確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"指示通り取付出来ている事","Method":"ブロックゲージ","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"スケール","Size":"150㎜","ToolOther":"","WorkName":"マガジンリフタ_ULD組付け","WorkItems":["1. 下記手順に従いマガジンリフタを組付ける"],"WorkPoints":["段差確認:段差無い事"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["検査表①:マガジンリフタ_ULD組付け","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 Ⅰのボルトもしくはマガジンホルダーのボルトを緩めて再調整する。","切替無し仕様","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 ショックアブソーバー(ストッパー兼用)で再調整する。 ※前後ストッカー調整","2連マガジン切替仕様"]} | {"WorkTypes":[],"ToolName":"スケール","Size":"150㎜","ToolOther":"","WorkName":"マガジンリフタ_ULD組付け","WorkItems":["1. 下記手順に従いマガジンリフタを組付ける"],"WorkPoints":["段差確認:段差無い事"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["検査表①:マガジンリフタ_ULD組付け","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 Ⅰのボルトもしくはマガジンホルダーのボルトを緩めて再調整する。","切替無し仕様","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 ショックアブソーバー(ストッパー兼用)で再調整する。 ※前後ストッカー調整","2連マガジン切替仕様"],"QualityItem":"取付確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"指示通り取付出来ている事","Method":"スケール","RecordMethod":"-","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"ブロックゲージ","Size":"9㎜","ToolOther":"","WorkName":"マガジンリフタ_ULD組付け","WorkItems":["1. 下記手順に従いマガジンリフタを組付ける"],"WorkPoints":["段差確認:段差無い事"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["検査表①:マガジンリフタ_ULD組付け","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 Ⅰのボルトもしくはマガジンホルダーのボルトを緩めて再調整する。","切替無し仕様","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 ショックアブソーバー(ストッパー兼用)で再調整する。 ※前後ストッカー調整","2連マガジン切替仕様","WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"ブロックゲージ","Size":"9㎜","ToolOther":"","WorkName":"マガジンリフタ_ULD組付け","WorkItems":["1. 下記手順に従いマガジンリフタを組付ける"],"WorkPoints":["段差確認:段差無い事"],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["検査表①:マガジンリフタ_ULD組付け","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 Ⅰのボルトもしくはマガジンホルダーのボルトを緩めて再調整する。","切替無し仕様","【作業手順】Ⅰ、マガジンリフタ_LDをD-PINに当付け仮止めする(本体ドッキング工程)Ⅱ、マガジンホルダーの基準側に9mmのブロックゲージをセットする。Ⅲ、ブロックゲージと搬入レールの基準レールの段差を確認し段差が なければ増し締めして、再度ズレがないか測定する。Ⅳ、段差がある場合もしくは増し締め後に段差が生じた場合は、 ショックアブソーバー(ストッパー兼用)で再調整する。 ※前後ストッカー調整","2連マガジン切替仕様","WDWS-5400-004"],"QualityItem":"取付確認","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"指示通り取付出来ている事","Method":"ブロックゲージ","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
{"WorkTypes":[],"ToolName":"-","Size":"","ToolOther":"","WorkName":"基板プッシャー組付け","WorkItems":["1. 下記手順に従い基板プッシャーを組付け確認する"],"WorkPoints":[],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["検査表①:基板プッシャー組付け","【作業手順】Ⅰ、基板プッシャーをスペーサー上に取付ける(本体ドッキング工程)Ⅱ、配線、配管の可動範囲の確認を行う","WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"-","Size":"","ToolOther":"","WorkName":"基板プッシャー組付け","WorkItems":["1. 下記手順に従い基板プッシャーを組付け確認する"],"WorkPoints":[],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["検査表①:基板プッシャー組付け","【作業手順】Ⅰ、基板プッシャーをスペーサー上に取付ける(本体ドッキング工程)Ⅱ、配線、配管の可動範囲の確認を行う","WDWS-5400-004"],"QualityItem":"取付確認","ToolManageNo":"-","ToolCycle":"-","ToolRecord":"-","StdVal":"指示通り取付出来ている事","Method":"目視","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null | |
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{"WorkTypes":[],"ToolName":"ブロックゲージ","Size":"","ToolOther":"","WorkName":"B/S平面調整","WorkItems":[],"WorkPoints":[],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["WDWS-5400-004"]} | {"WorkTypes":[],"ToolName":"ブロックゲージ","Size":"","ToolOther":"","WorkName":"B/S平面調整","WorkItems":[],"WorkPoints":[],"Tolks":[],"InspectionNo":"","InspectionItems":[],"_workType":[],"Words":["WDWS-5400-004"],"QualityItem":"平面度","ToolManageNo":"-","ToolCycle":"校正対象外","ToolRecord":"-","StdVal":"平面度:10μm以下高さ各箇所:±15μ以下","Method":"てこ式ダイヤルゲージ","RecordMethod":"WDWS-5400-004","Other":"-","ProcessNames":[]} | information_extraction | 0 | null |
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