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Datasets:
code5312
/
etch-ai-automation-data
Like
0
Size:
n<1K
Tags:
physics-simulation
semiconductor
plasma-etching
viennaps
License:
apache-2.0
Dataset card
Files
Files and versions
xet
Community
main
etch-ai-automation-data
Commit History
Nov 5
3 days ago
08:41
add dataset card (README.md)
code5312
40fcc74
08:30
add etch sim raw data (N=400, 2026-11-05)
code5312
4d80ed3
08:17
initial commit
code5312
Verified signature
748796c
