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Datasets:
code5312
/
etch-ai-automation-data
Like
0
Size:
n<1K
Tags:
physics-simulation
semiconductor
plasma-etching
viennaps
License:
apache-2.0
Dataset card
Files
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xet
Community
main
etch-ai-automation-data
42.1 MB
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1 contributor
History:
3 commits
code5312
add dataset card (README.md)
40fcc74
3 days ago
.gitattributes
Safe
2.5 kB
initial commit
3 days ago
README.md
Safe
2.71 kB
add dataset card (README.md)
3 days ago
etch-raw-n400.zip
Safe
42.1 MB
xet
add etch sim raw data (N=400, 2026-11-05)
3 days ago