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grandiflorum
/

LithoSim

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Feature Extraction

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Dataset card Data Studio Files Files and versions

grandiflorum commited on May 11, 2025

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d910331

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1 Parent(s): 85d6445

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README.md +4 -2

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@@ -6,7 +6,9 @@ tags:
 - code
 pretty_name: litho
 size_categories:
-- 100B<n<1T
 ---
 The benchmark of "LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing"
@@ -18,4 +20,4 @@ The corresponding GitHub repo can be found at https://github.com/dw-hongquan/Lit
 - 4 in-distributed dataset (OPC_Metal/Metal/OPC_Via/Via).
 - 1 out-of-distribution (OOD) dataset.
 - Each main dataset has a train_val and a test folder with compressed data file.
-- Each set of data contains a source_simple.src description of the source, a layout.png, a mask.png, and a number of RI under different process variations.

 - code
 pretty_name: litho
 size_categories:
+- 1B<n<10B
+task_categories:
+- feature-extraction
 ---
 The benchmark of "LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing"
 - 4 in-distributed dataset (OPC_Metal/Metal/OPC_Via/Via).
 - 1 out-of-distribution (OOD) dataset.
 - Each main dataset has a train_val and a test folder with compressed data file.
+- Each set of data contains a source_simple.src description of the source, a layout.png, a mask.png, and a number of RI under different process variations.