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This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.62 micrometers and it is doped with Arsenic at a concentration of 778119281365722464256 cm^-3. The short gate region is of the material Germanium with a length of 0.54 micrometers and it is doped with Arsenic at a concentration of 262662278968364335104 cm^-3. The long gate region is of the material Germanium with a length of 0.53 micrometers and it is doped with Arsenic at a concentration of 39070319814086320128 cm^-3. The drain region is of the material Silicon with a length of 0.62 micrometers and it is doped with Boron at a concentration of 919506985600810352640 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.005) (define Lgs 0.54) (define Lgl 0.53) (define Ltotal (+ Lgs Lgl)) (define Ls 0.62) (define Ld 0.62) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 778119281365722464256 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 262662278968364335104 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 39070319814086320128 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 919506985600810352640 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
201
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.86 micrometers and it is doped with Arsenic at a concentration of 716382893394178211840 cm^-3. The short gate region is of the material Diamond with a length of 0.67 micrometers and it is doped with Boron at a concentration of 779148139524764336128 cm^-3. The long gate region is of the material Diamond with a length of 0.28 micrometers and it is doped with Phosphorus at a concentration of 866048687334163480576 cm^-3. The drain region is of the material SiGe with a length of 0.86 micrometers and it is doped with Arsenic at a concentration of 909345224604257878016 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.003) (define Lgs 0.67) (define Lgl 0.28) (define Ltotal (+ Lgs Lgl)) (define Ls 0.86) (define Ld 0.86) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 716382893394178211840 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 779148139524764336128 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 866048687334163480576 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 909345224604257878016 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
202
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.78 micrometers and it is doped with Phosphorus at a concentration of 660183154025072427008 cm^-3. The short gate region is of the material Germanium with a length of 0.05 micrometers and it is doped with Phosphorus at a concentration of 847961778009557041152 cm^-3. The long gate region is of the material Diamond with a length of 0.55 micrometers and it is doped with Boron at a concentration of 944132025088838991872 cm^-3. The drain region is of the material GaN with a length of 0.78 micrometers and it is doped with Phosphorus at a concentration of 663828827522956918784 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.005) (define Lgs 0.05) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.78) (define Ld 0.78) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 660183154025072427008 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 847961778009557041152 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 944132025088838991872 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 663828827522956918784 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
203
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.35 micrometers and it is doped with Phosphorus at a concentration of 511559311884722372608 cm^-3. The short gate region is of the material Germanium with a length of 0.19 micrometers and it is doped with Phosphorus at a concentration of 31829090608390569984 cm^-3. The long gate region is of the material SiGe with a length of 0.21 micrometers and it is doped with Boron at a concentration of 441656314414511685632 cm^-3. The drain region is of the material SiGe with a length of 0.35 micrometers and it is doped with Phosphorus at a concentration of 897962896517081464832 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.002) (define Lgs 0.19) (define Lgl 0.21) (define Ltotal (+ Lgs Lgl)) (define Ls 0.35) (define Ld 0.35) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 511559311884722372608 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 31829090608390569984 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 441656314414511685632 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 897962896517081464832 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
204
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.65 micrometers and it is doped with Boron at a concentration of 336938357104856399872 cm^-3. The short gate region is of the material Germanium with a length of 0.67 micrometers and it is doped with Arsenic at a concentration of 335164786090635558912 cm^-3. The long gate region is of the material Silicon with a length of 0.42 micrometers and it is doped with Arsenic at a concentration of 508302609464663080960 cm^-3. The drain region is of the material SiGe with a length of 0.65 micrometers and it is doped with Boron at a concentration of 146225273691380678656 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.001) (define Lgs 0.67) (define Lgl 0.42) (define Ltotal (+ Lgs Lgl)) (define Ls 0.65) (define Ld 0.65) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 336938357104856399872 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 335164786090635558912 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 508302609464663080960 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 146225273691380678656 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
205
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.25 micrometers and it is doped with Boron at a concentration of 917601920744723185664 cm^-3. The short gate region is of the material GaN with a length of 0.71 micrometers and it is doped with Arsenic at a concentration of 852903744205485506560 cm^-3. The long gate region is of the material SiGe with a length of 0.55 micrometers and it is doped with Boron at a concentration of 17858793133555638272 cm^-3. The drain region is of the material Silicon with a length of 0.25 micrometers and it is doped with Phosphorus at a concentration of 283216801874999246848 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.006) (define Lgs 0.71) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.25) (define Ld 0.25) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 917601920744723185664 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 852903744205485506560 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 17858793133555638272 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 283216801874999246848 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
206
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 207255440345713115136 cm^-3. The short gate region is of the material SiGe with a length of 0.25 micrometers and it is doped with Arsenic at a concentration of 284504175278476132352 cm^-3. The long gate region is of the material Diamond with a length of 0.87 micrometers and it is doped with Boron at a concentration of 414961171472169959424 cm^-3. The drain region is of the material SiGe with a length of 0.02 micrometers and it is doped with Phosphorus at a concentration of 293829835924918894592 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.009) (define Lgs 0.25) (define Lgl 0.87) (define Ltotal (+ Lgs Lgl)) (define Ls 0.02) (define Ld 0.02) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 207255440345713115136 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 284504175278476132352 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 414961171472169959424 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 293829835924918894592 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
207
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.23 micrometers and it is doped with Phosphorus at a concentration of 309741284892687335424 cm^-3. The short gate region is of the material SiGe with a length of 0.03 micrometers and it is doped with Arsenic at a concentration of 993906480867514646528 cm^-3. The long gate region is of the material GaN with a length of 0.92 micrometers and it is doped with Boron at a concentration of 36354799549559791616 cm^-3. The drain region is of the material Germanium with a length of 0.23 micrometers and it is doped with Arsenic at a concentration of 302413345436413460480 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.008) (define Lgs 0.03) (define Lgl 0.92) (define Ltotal (+ Lgs Lgl)) (define Ls 0.23) (define Ld 0.23) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 309741284892687335424 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 993906480867514646528 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 36354799549559791616 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 302413345436413460480 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
208
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.74 micrometers and it is doped with Phosphorus at a concentration of 953180540153221611520 cm^-3. The short gate region is of the material Silicon with a length of 0.41 micrometers and it is doped with Phosphorus at a concentration of 148494455152568401920 cm^-3. The long gate region is of the material SiGe with a length of 0.14 micrometers and it is doped with Phosphorus at a concentration of 114272057860990746624 cm^-3. The drain region is of the material Germanium with a length of 0.74 micrometers and it is doped with Arsenic at a concentration of 356851546690874507264 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.009) (define Lgs 0.41) (define Lgl 0.14) (define Ltotal (+ Lgs Lgl)) (define Ls 0.74) (define Ld 0.74) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 953180540153221611520 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 148494455152568401920 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 114272057860990746624 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 356851546690874507264 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
209
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.6 micrometers and it is doped with Arsenic at a concentration of 200927454851736764416 cm^-3. The short gate region is of the material Silicon with a length of 0.76 micrometers and it is doped with Boron at a concentration of 128683842342248398848 cm^-3. The long gate region is of the material Diamond with a length of 0.42 micrometers and it is doped with Boron at a concentration of 942829752896110985216 cm^-3. The drain region is of the material SiGe with a length of 0.6 micrometers and it is doped with Phosphorus at a concentration of 534069190915673030656 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.005) (define Lgs 0.76) (define Lgl 0.42) (define Ltotal (+ Lgs Lgl)) (define Ls 0.6) (define Ld 0.6) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 200927454851736764416 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 128683842342248398848 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 942829752896110985216 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 534069190915673030656 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
210
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.39 micrometers and it is doped with Arsenic at a concentration of 912986354132037926912 cm^-3. The short gate region is of the material Germanium with a length of 0.98 micrometers and it is doped with Phosphorus at a concentration of 918906225018980401152 cm^-3. The long gate region is of the material Silicon with a length of 0.42 micrometers and it is doped with Arsenic at a concentration of 578396057625408438272 cm^-3. The drain region is of the material SiGe with a length of 0.39 micrometers and it is doped with Phosphorus at a concentration of 157961004429583908864 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.004) (define Lgs 0.98) (define Lgl 0.42) (define Ltotal (+ Lgs Lgl)) (define Ls 0.39) (define Ld 0.39) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 912986354132037926912 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 918906225018980401152 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 578396057625408438272 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 157961004429583908864 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
211
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.54 micrometers and it is doped with Arsenic at a concentration of 661065956976427008000 cm^-3. The short gate region is of the material Diamond with a length of 0.81 micrometers and it is doped with Phosphorus at a concentration of 991149209963083464704 cm^-3. The long gate region is of the material Diamond with a length of 0.03 micrometers and it is doped with Phosphorus at a concentration of 367685415176728346624 cm^-3. The drain region is of the material GaN with a length of 0.54 micrometers and it is doped with Arsenic at a concentration of 134485655906790621184 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.001) (define Lgs 0.81) (define Lgl 0.03) (define Ltotal (+ Lgs Lgl)) (define Ls 0.54) (define Ld 0.54) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 661065956976427008000 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 991149209963083464704 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 367685415176728346624 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 134485655906790621184 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
212
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.56 micrometers and it is doped with Boron at a concentration of 360526807523585032192 cm^-3. The short gate region is of the material Silicon with a length of 0.67 micrometers and it is doped with Boron at a concentration of 948652762826007642112 cm^-3. The long gate region is of the material Germanium with a length of 0.82 micrometers and it is doped with Boron at a concentration of 284392298109104128000 cm^-3. The drain region is of the material GaN with a length of 0.56 micrometers and it is doped with Arsenic at a concentration of 246546526499639099392 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.006) (define Lgs 0.67) (define Lgl 0.82) (define Ltotal (+ Lgs Lgl)) (define Ls 0.56) (define Ld 0.56) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 360526807523585032192 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 948652762826007642112 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 284392298109104128000 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 246546526499639099392 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
213
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.66 micrometers and it is doped with Arsenic at a concentration of 339631214305415921664 cm^-3. The short gate region is of the material SiGe with a length of 0.13 micrometers and it is doped with Phosphorus at a concentration of 984665800816564633600 cm^-3. The long gate region is of the material GaN with a length of 0.13 micrometers and it is doped with Arsenic at a concentration of 697321035891946815488 cm^-3. The drain region is of the material Germanium with a length of 0.66 micrometers and it is doped with Arsenic at a concentration of 806315520785555390464 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.005) (define Lgs 0.13) (define Lgl 0.13) (define Ltotal (+ Lgs Lgl)) (define Ls 0.66) (define Ld 0.66) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 339631214305415921664 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 984665800816564633600 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 697321035891946815488 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 806315520785555390464 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
214
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.34 micrometers and it is doped with Arsenic at a concentration of 468416411729708187648 cm^-3. The short gate region is of the material Silicon with a length of 0.54 micrometers and it is doped with Phosphorus at a concentration of 315331877152496025600 cm^-3. The long gate region is of the material SiGe with a length of 0.75 micrometers and it is doped with Boron at a concentration of 327736605027413786624 cm^-3. The drain region is of the material Germanium with a length of 0.34 micrometers and it is doped with Phosphorus at a concentration of 469159688403578257408 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.005) (define Lgs 0.54) (define Lgl 0.75) (define Ltotal (+ Lgs Lgl)) (define Ls 0.34) (define Ld 0.34) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 468416411729708187648 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 315331877152496025600 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 327736605027413786624 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 469159688403578257408 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
215
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.51 micrometers and it is doped with Arsenic at a concentration of 565048903074315501568 cm^-3. The short gate region is of the material Diamond with a length of 0.62 micrometers and it is doped with Phosphorus at a concentration of 472197763978067181568 cm^-3. The long gate region is of the material SiGe with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 411935901163957649408 cm^-3. The drain region is of the material Silicon with a length of 0.51 micrometers and it is doped with Boron at a concentration of 11579487716539107328 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.007) (define Lgs 0.62) (define Lgl 0.16) (define Ltotal (+ Lgs Lgl)) (define Ls 0.51) (define Ld 0.51) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 565048903074315501568 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 472197763978067181568 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 411935901163957649408 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 11579487716539107328 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
216
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.32 micrometers and it is doped with Phosphorus at a concentration of 411504006479870689280 cm^-3. The short gate region is of the material Diamond with a length of 0.31 micrometers and it is doped with Phosphorus at a concentration of 507850397480151547904 cm^-3. The long gate region is of the material Germanium with a length of 0.18 micrometers and it is doped with Phosphorus at a concentration of 364115225357394378752 cm^-3. The drain region is of the material GaN with a length of 0.32 micrometers and it is doped with Boron at a concentration of 477223440183424450560 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.003) (define Lgs 0.31) (define Lgl 0.18) (define Ltotal (+ Lgs Lgl)) (define Ls 0.32) (define Ld 0.32) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 411504006479870689280 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 507850397480151547904 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 364115225357394378752 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 477223440183424450560 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
217
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.26 micrometers and it is doped with Boron at a concentration of 54622541134605647872 cm^-3. The short gate region is of the material Silicon with a length of 0.03 micrometers and it is doped with Phosphorus at a concentration of 944332332505167953920 cm^-3. The long gate region is of the material SiGe with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 267720899010886074368 cm^-3. The drain region is of the material Germanium with a length of 0.26 micrometers and it is doped with Boron at a concentration of 744577061870815805440 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.004) (define Lgs 0.03) (define Lgl 0.16) (define Ltotal (+ Lgs Lgl)) (define Ls 0.26) (define Ld 0.26) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 54622541134605647872 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 944332332505167953920 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 267720899010886074368 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 744577061870815805440 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
218
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.31 micrometers and it is doped with Phosphorus at a concentration of 530994028451316891648 cm^-3. The short gate region is of the material SiGe with a length of 0.71 micrometers and it is doped with Arsenic at a concentration of 772199877925332451328 cm^-3. The long gate region is of the material GaN with a length of 0.68 micrometers and it is doped with Boron at a concentration of 521639967708649357312 cm^-3. The drain region is of the material SiGe with a length of 0.31 micrometers and it is doped with Arsenic at a concentration of 377572096081706090496 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.007) (define Lgs 0.71) (define Lgl 0.68) (define Ltotal (+ Lgs Lgl)) (define Ls 0.31) (define Ld 0.31) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 530994028451316891648 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 772199877925332451328 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 521639967708649357312 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 377572096081706090496 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
219
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.66 micrometers and it is doped with Phosphorus at a concentration of 869429929726204837888 cm^-3. The short gate region is of the material Silicon with a length of 0.89 micrometers and it is doped with Boron at a concentration of 922437281558470852608 cm^-3. The long gate region is of the material GaN with a length of 0.32 micrometers and it is doped with Boron at a concentration of 101317283814226903040 cm^-3. The drain region is of the material GaN with a length of 0.66 micrometers and it is doped with Boron at a concentration of 582675342167491084288 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.002) (define Lgs 0.89) (define Lgl 0.32) (define Ltotal (+ Lgs Lgl)) (define Ls 0.66) (define Ld 0.66) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 869429929726204837888 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 922437281558470852608 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 101317283814226903040 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 582675342167491084288 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
220
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.65 micrometers and it is doped with Phosphorus at a concentration of 602283159691554324480 cm^-3. The short gate region is of the material Diamond with a length of 0.18 micrometers and it is doped with Phosphorus at a concentration of 702340128276811743232 cm^-3. The long gate region is of the material Diamond with a length of 0.67 micrometers and it is doped with Boron at a concentration of 4561016040741281792 cm^-3. The drain region is of the material GaN with a length of 0.65 micrometers and it is doped with Arsenic at a concentration of 132368723671002660864 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.003) (define Lgs 0.18) (define Lgl 0.67) (define Ltotal (+ Lgs Lgl)) (define Ls 0.65) (define Ld 0.65) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 602283159691554324480 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 702340128276811743232 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 4561016040741281792 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 132368723671002660864 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
221
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.21 micrometers and it is doped with Arsenic at a concentration of 922974676000937213952 cm^-3. The short gate region is of the material Germanium with a length of 0.79 micrometers and it is doped with Phosphorus at a concentration of 491843543647953223680 cm^-3. The long gate region is of the material SiGe with a length of 0.8 micrometers and it is doped with Phosphorus at a concentration of 456502866455211671552 cm^-3. The drain region is of the material GaN with a length of 0.21 micrometers and it is doped with Arsenic at a concentration of 582137893015467851776 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.005) (define Lgs 0.79) (define Lgl 0.8) (define Ltotal (+ Lgs Lgl)) (define Ls 0.21) (define Ld 0.21) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 922974676000937213952 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 491843543647953223680 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 456502866455211671552 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 582137893015467851776 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
222
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.43 micrometers and it is doped with Boron at a concentration of 189630222447596371968 cm^-3. The short gate region is of the material SiGe with a length of 0.31 micrometers and it is doped with Boron at a concentration of 304644100710764249088 cm^-3. The long gate region is of the material Germanium with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 208979956562974277632 cm^-3. The drain region is of the material Germanium with a length of 0.43 micrometers and it is doped with Boron at a concentration of 650622507655932280832 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.002) (define Lgs 0.31) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.43) (define Ld 0.43) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 189630222447596371968 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 304644100710764249088 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 208979956562974277632 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 650622507655932280832 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
223
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.91 micrometers and it is doped with Arsenic at a concentration of 73496840861753647104 cm^-3. The short gate region is of the material SiGe with a length of 0.51 micrometers and it is doped with Arsenic at a concentration of 655625816747154079744 cm^-3. The long gate region is of the material GaN with a length of 0.57 micrometers and it is doped with Boron at a concentration of 900097431414494986240 cm^-3. The drain region is of the material Diamond with a length of 0.91 micrometers and it is doped with Phosphorus at a concentration of 147962968385728282624 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.007) (define Lgs 0.51) (define Lgl 0.57) (define Ltotal (+ Lgs Lgl)) (define Ls 0.91) (define Ld 0.91) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 73496840861753647104 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 655625816747154079744 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 900097431414494986240 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 147962968385728282624 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
224
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.57 micrometers and it is doped with Phosphorus at a concentration of 233831187342580613120 cm^-3. The short gate region is of the material Germanium with a length of 0.63 micrometers and it is doped with Arsenic at a concentration of 139343400947980009472 cm^-3. The long gate region is of the material Diamond with a length of 0.2 micrometers and it is doped with Arsenic at a concentration of 724708697970733613056 cm^-3. The drain region is of the material Diamond with a length of 0.57 micrometers and it is doped with Boron at a concentration of 464868314446557872128 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.005) (define Lgs 0.63) (define Lgl 0.2) (define Ltotal (+ Lgs Lgl)) (define Ls 0.57) (define Ld 0.57) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 233831187342580613120 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 139343400947980009472 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 724708697970733613056 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 464868314446557872128 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
225
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.82 micrometers and it is doped with Arsenic at a concentration of 461402416472589074432 cm^-3. The short gate region is of the material GaN with a length of 0.8 micrometers and it is doped with Arsenic at a concentration of 976108636683935809536 cm^-3. The long gate region is of the material Diamond with a length of 0.86 micrometers and it is doped with Phosphorus at a concentration of 982637892632884805632 cm^-3. The drain region is of the material GaN with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 118988758988168183808 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.008) (define Lgs 0.8) (define Lgl 0.86) (define Ltotal (+ Lgs Lgl)) (define Ls 0.82) (define Ld 0.82) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 461402416472589074432 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 976108636683935809536 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 982637892632884805632 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 118988758988168183808 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
226
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.32 micrometers and it is doped with Boron at a concentration of 855207891103249858560 cm^-3. The short gate region is of the material Diamond with a length of 0.88 micrometers and it is doped with Phosphorus at a concentration of 614845412180690206720 cm^-3. The long gate region is of the material Diamond with a length of 0.98 micrometers and it is doped with Arsenic at a concentration of 358697697037018202112 cm^-3. The drain region is of the material SiGe with a length of 0.32 micrometers and it is doped with Arsenic at a concentration of 552873666486173827072 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.008) (define Lgs 0.88) (define Lgl 0.98) (define Ltotal (+ Lgs Lgl)) (define Ls 0.32) (define Ld 0.32) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 855207891103249858560 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 614845412180690206720 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 358697697037018202112 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 552873666486173827072 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
227
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.9 micrometers and it is doped with Boron at a concentration of 524825951062748430336 cm^-3. The short gate region is of the material Diamond with a length of 0.56 micrometers and it is doped with Boron at a concentration of 854796826280329740288 cm^-3. The long gate region is of the material Silicon with a length of 0.07 micrometers and it is doped with Arsenic at a concentration of 725535976301416546304 cm^-3. The drain region is of the material GaN with a length of 0.9 micrometers and it is doped with Arsenic at a concentration of 204870010077054468096 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.003) (define Lgs 0.56) (define Lgl 0.07) (define Ltotal (+ Lgs Lgl)) (define Ls 0.9) (define Ld 0.9) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 524825951062748430336 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 854796826280329740288 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 725535976301416546304 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 204870010077054468096 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
228
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.96 micrometers and it is doped with Boron at a concentration of 626823162297390727168 cm^-3. The short gate region is of the material Diamond with a length of 0.28 micrometers and it is doped with Arsenic at a concentration of 907776234844924280832 cm^-3. The long gate region is of the material Diamond with a length of 0.47 micrometers and it is doped with Arsenic at a concentration of 158591397858772746240 cm^-3. The drain region is of the material GaN with a length of 0.96 micrometers and it is doped with Phosphorus at a concentration of 844857959267528998912 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.004) (define Lgs 0.28) (define Lgl 0.47) (define Ltotal (+ Lgs Lgl)) (define Ls 0.96) (define Ld 0.96) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 626823162297390727168 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 907776234844924280832 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 158591397858772746240 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 844857959267528998912 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
229
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.06 micrometers and it is doped with Arsenic at a concentration of 595920663853208698880 cm^-3. The short gate region is of the material Germanium with a length of 0.67 micrometers and it is doped with Arsenic at a concentration of 412042951066836402176 cm^-3. The long gate region is of the material SiGe with a length of 0.54 micrometers and it is doped with Arsenic at a concentration of 797151315468379881472 cm^-3. The drain region is of the material Silicon with a length of 0.06 micrometers and it is doped with Boron at a concentration of 385322441849486966784 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.004) (define Lgs 0.67) (define Lgl 0.54) (define Ltotal (+ Lgs Lgl)) (define Ls 0.06) (define Ld 0.06) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 595920663853208698880 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 412042951066836402176 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 797151315468379881472 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 385322441849486966784 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
230
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.35 micrometers and it is doped with Boron at a concentration of 120220194038305079296 cm^-3. The short gate region is of the material Germanium with a length of 0.66 micrometers and it is doped with Boron at a concentration of 268832494075042660352 cm^-3. The long gate region is of the material SiGe with a length of 0.64 micrometers and it is doped with Phosphorus at a concentration of 265005068151127539712 cm^-3. The drain region is of the material SiGe with a length of 0.35 micrometers and it is doped with Phosphorus at a concentration of 170330832882544902144 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.008) (define Lgs 0.66) (define Lgl 0.64) (define Ltotal (+ Lgs Lgl)) (define Ls 0.35) (define Ld 0.35) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 120220194038305079296 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 268832494075042660352 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 265005068151127539712 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 170330832882544902144 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
231
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.15 micrometers and it is doped with Phosphorus at a concentration of 332634625023374786560 cm^-3. The short gate region is of the material GaN with a length of 0.36 micrometers and it is doped with Boron at a concentration of 882234307259228356608 cm^-3. The long gate region is of the material Silicon with a length of 0.04 micrometers and it is doped with Arsenic at a concentration of 168756053044287832064 cm^-3. The drain region is of the material GaN with a length of 0.15 micrometers and it is doped with Boron at a concentration of 575418463306876715008 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.006) (define Lgs 0.36) (define Lgl 0.04) (define Ltotal (+ Lgs Lgl)) (define Ls 0.15) (define Ld 0.15) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 332634625023374786560 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 882234307259228356608 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 168756053044287832064 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 575418463306876715008 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
232
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.36 micrometers and it is doped with Boron at a concentration of 292923731810634432512 cm^-3. The short gate region is of the material Germanium with a length of 0.27 micrometers and it is doped with Arsenic at a concentration of 297295772743141425152 cm^-3. The long gate region is of the material Germanium with a length of 0.47 micrometers and it is doped with Phosphorus at a concentration of 447383428284236038144 cm^-3. The drain region is of the material Silicon with a length of 0.36 micrometers and it is doped with Arsenic at a concentration of 909586014354467061760 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.004) (define Lgs 0.27) (define Lgl 0.47) (define Ltotal (+ Lgs Lgl)) (define Ls 0.36) (define Ld 0.36) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 292923731810634432512 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 297295772743141425152 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 447383428284236038144 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 909586014354467061760 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
233
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.42 micrometers and it is doped with Phosphorus at a concentration of 590773917340558295040 cm^-3. The short gate region is of the material SiGe with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 652675473951660441600 cm^-3. The long gate region is of the material Diamond with a length of 0.87 micrometers and it is doped with Boron at a concentration of 93849406660134289408 cm^-3. The drain region is of the material SiGe with a length of 0.42 micrometers and it is doped with Boron at a concentration of 971034223030899048448 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.008) (define Lgs 0.73) (define Lgl 0.87) (define Ltotal (+ Lgs Lgl)) (define Ls 0.42) (define Ld 0.42) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 590773917340558295040 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 652675473951660441600 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 93849406660134289408 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 971034223030899048448 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
234
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.99 micrometers and it is doped with Boron at a concentration of 552478589342276255744 cm^-3. The short gate region is of the material Diamond with a length of 0.03 micrometers and it is doped with Phosphorus at a concentration of 904323400814134689792 cm^-3. The long gate region is of the material Silicon with a length of 0.08 micrometers and it is doped with Boron at a concentration of 927024809700964958208 cm^-3. The drain region is of the material GaN with a length of 0.99 micrometers and it is doped with Arsenic at a concentration of 307999120115039862784 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.001) (define Lgs 0.03) (define Lgl 0.08) (define Ltotal (+ Lgs Lgl)) (define Ls 0.99) (define Ld 0.99) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 552478589342276255744 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 904323400814134689792 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 927024809700964958208 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 307999120115039862784 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
235
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.11 micrometers and it is doped with Phosphorus at a concentration of 468758026198230106112 cm^-3. The short gate region is of the material Germanium with a length of 0.28 micrometers and it is doped with Arsenic at a concentration of 274085295962845675520 cm^-3. The long gate region is of the material GaN with a length of 0.21 micrometers and it is doped with Boron at a concentration of 800427411205851709440 cm^-3. The drain region is of the material SiGe with a length of 0.11 micrometers and it is doped with Phosphorus at a concentration of 810587219124315881472 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.001) (define Lgs 0.28) (define Lgl 0.21) (define Ltotal (+ Lgs Lgl)) (define Ls 0.11) (define Ld 0.11) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 468758026198230106112 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 274085295962845675520 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 800427411205851709440 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 810587219124315881472 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
236
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.42 micrometers and it is doped with Phosphorus at a concentration of 37675281450090094592 cm^-3. The short gate region is of the material Germanium with a length of 0.07 micrometers and it is doped with Boron at a concentration of 583873190878110285824 cm^-3. The long gate region is of the material SiGe with a length of 0.77 micrometers and it is doped with Phosphorus at a concentration of 839221289795852828672 cm^-3. The drain region is of the material Silicon with a length of 0.42 micrometers and it is doped with Arsenic at a concentration of 409386376547144695808 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.003) (define Lgs 0.07) (define Lgl 0.77) (define Ltotal (+ Lgs Lgl)) (define Ls 0.42) (define Ld 0.42) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 37675281450090094592 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 583873190878110285824 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 839221289795852828672 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 409386376547144695808 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
237
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.08 micrometers and it is doped with Arsenic at a concentration of 261927360339864748032 cm^-3. The short gate region is of the material Diamond with a length of 0.43 micrometers and it is doped with Phosphorus at a concentration of 286176172318542692352 cm^-3. The long gate region is of the material Silicon with a length of 0.92 micrometers and it is doped with Phosphorus at a concentration of 408242292922008207360 cm^-3. The drain region is of the material Germanium with a length of 0.08 micrometers and it is doped with Boron at a concentration of 393496286169306628096 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.005) (define Lgs 0.43) (define Lgl 0.92) (define Ltotal (+ Lgs Lgl)) (define Ls 0.08) (define Ld 0.08) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 261927360339864748032 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 286176172318542692352 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 408242292922008207360 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 393496286169306628096 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
238
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.88 micrometers and it is doped with Phosphorus at a concentration of 940995290528814989312 cm^-3. The short gate region is of the material GaN with a length of 0.14 micrometers and it is doped with Boron at a concentration of 494541425575156252672 cm^-3. The long gate region is of the material GaN with a length of 0.27 micrometers and it is doped with Arsenic at a concentration of 824080489079435821056 cm^-3. The drain region is of the material GaN with a length of 0.88 micrometers and it is doped with Boron at a concentration of 822168468785649680384 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.007) (define Lgs 0.14) (define Lgl 0.27) (define Ltotal (+ Lgs Lgl)) (define Ls 0.88) (define Ld 0.88) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 940995290528814989312 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 494541425575156252672 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 824080489079435821056 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 822168468785649680384 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
239
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 738993526995742883840 cm^-3. The short gate region is of the material Diamond with a length of 0.88 micrometers and it is doped with Phosphorus at a concentration of 735578462260220657664 cm^-3. The long gate region is of the material GaN with a length of 0.1 micrometers and it is doped with Arsenic at a concentration of 111215196685834747904 cm^-3. The drain region is of the material Germanium with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 441745181353263497216 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.002) (define Lgs 0.88) (define Lgl 0.1) (define Ltotal (+ Lgs Lgl)) (define Ls 0.55) (define Ld 0.55) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 738993526995742883840 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 735578462260220657664 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 111215196685834747904 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 441745181353263497216 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
240
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 498153596573723131904 cm^-3. The short gate region is of the material Germanium with a length of 0.44 micrometers and it is doped with Boron at a concentration of 2894921632552883200 cm^-3. The long gate region is of the material Germanium with a length of 0.66 micrometers and it is doped with Phosphorus at a concentration of 662942689082848706560 cm^-3. The drain region is of the material Diamond with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 724260783429072060416 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.007) (define Lgs 0.44) (define Lgl 0.66) (define Ltotal (+ Lgs Lgl)) (define Ls 0.59) (define Ld 0.59) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 498153596573723131904 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 2894921632552883200 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 662942689082848706560 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 724260783429072060416 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
241
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.05 micrometers and it is doped with Boron at a concentration of 248211395810584494080 cm^-3. The short gate region is of the material GaN with a length of 0.24 micrometers and it is doped with Arsenic at a concentration of 750168958487311810560 cm^-3. The long gate region is of the material GaN with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 220801493153292419072 cm^-3. The drain region is of the material SiGe with a length of 0.05 micrometers and it is doped with Arsenic at a concentration of 274070737628380823552 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.007) (define Lgs 0.24) (define Lgl 0.02) (define Ltotal (+ Lgs Lgl)) (define Ls 0.05) (define Ld 0.05) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 248211395810584494080 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 750168958487311810560 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 220801493153292419072 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 274070737628380823552 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
242
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.16 micrometers and it is doped with Arsenic at a concentration of 438551339376929931264 cm^-3. The short gate region is of the material Diamond with a length of 0.01 micrometers and it is doped with Arsenic at a concentration of 237495297979210072064 cm^-3. The long gate region is of the material Diamond with a length of 0.42 micrometers and it is doped with Phosphorus at a concentration of 226294009425043357696 cm^-3. The drain region is of the material SiGe with a length of 0.16 micrometers and it is doped with Boron at a concentration of 94420689672171864064 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.007) (define Lgs 0.01) (define Lgl 0.42) (define Ltotal (+ Lgs Lgl)) (define Ls 0.16) (define Ld 0.16) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 438551339376929931264 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 237495297979210072064 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 226294009425043357696 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 94420689672171864064 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
243
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.84 micrometers and it is doped with Phosphorus at a concentration of 750373458391226122240 cm^-3. The short gate region is of the material Diamond with a length of 1.0 micrometers and it is doped with Phosphorus at a concentration of 585214209553043423232 cm^-3. The long gate region is of the material GaN with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 803399095957738094592 cm^-3. The drain region is of the material GaN with a length of 0.84 micrometers and it is doped with Arsenic at a concentration of 383540425878132621312 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.002) (define Lgs 1.0) (define Lgl 0.73) (define Ltotal (+ Lgs Lgl)) (define Ls 0.84) (define Ld 0.84) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 750373458391226122240 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 585214209553043423232 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 803399095957738094592 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 383540425878132621312 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
244
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.97 micrometers and it is doped with Phosphorus at a concentration of 874788495754695540736 cm^-3. The short gate region is of the material Diamond with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 598900287498185867264 cm^-3. The long gate region is of the material Germanium with a length of 0.39 micrometers and it is doped with Arsenic at a concentration of 494646071564470321152 cm^-3. The drain region is of the material Silicon with a length of 0.97 micrometers and it is doped with Phosphorus at a concentration of 413157180596451016704 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.009) (define Lgs 0.71) (define Lgl 0.39) (define Ltotal (+ Lgs Lgl)) (define Ls 0.97) (define Ld 0.97) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 874788495754695540736 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 598900287498185867264 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 494646071564470321152 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 413157180596451016704 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
245
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.23 micrometers and it is doped with Boron at a concentration of 593295175019608276992 cm^-3. The short gate region is of the material Diamond with a length of 0.33 micrometers and it is doped with Phosphorus at a concentration of 271797829261582434304 cm^-3. The long gate region is of the material Diamond with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 146274460299469193216 cm^-3. The drain region is of the material Diamond with a length of 0.23 micrometers and it is doped with Phosphorus at a concentration of 611455891376224206848 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.006) (define Lgs 0.33) (define Lgl 0.71) (define Ltotal (+ Lgs Lgl)) (define Ls 0.23) (define Ld 0.23) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 593295175019608276992 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 271797829261582434304 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 146274460299469193216 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 611455891376224206848 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
246
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.54 micrometers and it is doped with Arsenic at a concentration of 585666769320873295872 cm^-3. The short gate region is of the material GaN with a length of 0.89 micrometers and it is doped with Phosphorus at a concentration of 921046028954663780352 cm^-3. The long gate region is of the material SiGe with a length of 0.19 micrometers and it is doped with Arsenic at a concentration of 958321492524877873152 cm^-3. The drain region is of the material SiGe with a length of 0.54 micrometers and it is doped with Boron at a concentration of 979755728501784444928 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.008) (define Lgs 0.89) (define Lgl 0.19) (define Ltotal (+ Lgs Lgl)) (define Ls 0.54) (define Ld 0.54) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 585666769320873295872 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 921046028954663780352 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 958321492524877873152 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 979755728501784444928 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
247
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.35 micrometers and it is doped with Boron at a concentration of 971472579853045465088 cm^-3. The short gate region is of the material Germanium with a length of 0.49 micrometers and it is doped with Phosphorus at a concentration of 595239519766696951808 cm^-3. The long gate region is of the material GaN with a length of 0.48 micrometers and it is doped with Phosphorus at a concentration of 805916835667106201600 cm^-3. The drain region is of the material Germanium with a length of 0.35 micrometers and it is doped with Boron at a concentration of 863907951198457167872 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.009) (define Lgs 0.49) (define Lgl 0.48) (define Ltotal (+ Lgs Lgl)) (define Ls 0.35) (define Ld 0.35) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 971472579853045465088 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 595239519766696951808 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 805916835667106201600 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 863907951198457167872 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
248
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.3 micrometers and it is doped with Arsenic at a concentration of 464071135095187832832 cm^-3. The short gate region is of the material Germanium with a length of 0.08 micrometers and it is doped with Phosphorus at a concentration of 532084044901908742144 cm^-3. The long gate region is of the material Germanium with a length of 0.18 micrometers and it is doped with Boron at a concentration of 326252825650052595712 cm^-3. The drain region is of the material GaN with a length of 0.3 micrometers and it is doped with Phosphorus at a concentration of 737044353593393545216 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.008) (define Lgs 0.08) (define Lgl 0.18) (define Ltotal (+ Lgs Lgl)) (define Ls 0.3) (define Ld 0.3) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 464071135095187832832 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 532084044901908742144 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 326252825650052595712 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 737044353593393545216 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
249
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.63 micrometers and it is doped with Arsenic at a concentration of 968968429682845286400 cm^-3. The short gate region is of the material SiGe with a length of 0.64 micrometers and it is doped with Boron at a concentration of 111293540612659888128 cm^-3. The long gate region is of the material Diamond with a length of 0.72 micrometers and it is doped with Boron at a concentration of 819192350330203144192 cm^-3. The drain region is of the material Silicon with a length of 0.63 micrometers and it is doped with Boron at a concentration of 543198172570957643776 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.004) (define Lgs 0.64) (define Lgl 0.72) (define Ltotal (+ Lgs Lgl)) (define Ls 0.63) (define Ld 0.63) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 968968429682845286400 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 111293540612659888128 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 819192350330203144192 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 543198172570957643776 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
250
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.41 micrometers and it is doped with Boron at a concentration of 510312052316589129728 cm^-3. The short gate region is of the material SiGe with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 905663094440495939584 cm^-3. The long gate region is of the material Diamond with a length of 0.65 micrometers and it is doped with Phosphorus at a concentration of 334418884378763722752 cm^-3. The drain region is of the material GaN with a length of 0.41 micrometers and it is doped with Arsenic at a concentration of 204523559969336229888 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.003) (define Lgs 0.44) (define Lgl 0.65) (define Ltotal (+ Lgs Lgl)) (define Ls 0.41) (define Ld 0.41) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 510312052316589129728 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 905663094440495939584 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 334418884378763722752 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 204523559969336229888 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
251
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.45 micrometers and it is doped with Phosphorus at a concentration of 467356823861900869632 cm^-3. The short gate region is of the material Silicon with a length of 0.36 micrometers and it is doped with Boron at a concentration of 535258272336883351552 cm^-3. The long gate region is of the material Diamond with a length of 0.99 micrometers and it is doped with Arsenic at a concentration of 366405124259740254208 cm^-3. The drain region is of the material SiGe with a length of 0.45 micrometers and it is doped with Arsenic at a concentration of 154503265850241679360 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.008) (define Lgs 0.36) (define Lgl 0.99) (define Ltotal (+ Lgs Lgl)) (define Ls 0.45) (define Ld 0.45) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 467356823861900869632 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 535258272336883351552 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 366405124259740254208 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 154503265850241679360 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
252
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.28 micrometers and it is doped with Arsenic at a concentration of 505473337925149655040 cm^-3. The short gate region is of the material SiGe with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 450859043563226005504 cm^-3. The long gate region is of the material Silicon with a length of 0.63 micrometers and it is doped with Arsenic at a concentration of 385764591196768829440 cm^-3. The drain region is of the material GaN with a length of 0.28 micrometers and it is doped with Arsenic at a concentration of 603685757739570036736 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.006) (define Lgs 0.44) (define Lgl 0.63) (define Ltotal (+ Lgs Lgl)) (define Ls 0.28) (define Ld 0.28) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 505473337925149655040 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 450859043563226005504 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 385764591196768829440 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 603685757739570036736 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
253
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.57 micrometers and it is doped with Arsenic at a concentration of 913857870046198104064 cm^-3. The short gate region is of the material Silicon with a length of 0.21 micrometers and it is doped with Boron at a concentration of 132357854524332032000 cm^-3. The long gate region is of the material SiGe with a length of 0.39 micrometers and it is doped with Boron at a concentration of 720706414544130277376 cm^-3. The drain region is of the material SiGe with a length of 0.57 micrometers and it is doped with Phosphorus at a concentration of 414461336722687000576 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.006) (define Lgs 0.21) (define Lgl 0.39) (define Ltotal (+ Lgs Lgl)) (define Ls 0.57) (define Ld 0.57) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 913857870046198104064 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 132357854524332032000 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 720706414544130277376 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 414461336722687000576 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
254
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.6 micrometers and it is doped with Boron at a concentration of 854123861950656413696 cm^-3. The short gate region is of the material Diamond with a length of 0.86 micrometers and it is doped with Arsenic at a concentration of 601421352369329799168 cm^-3. The long gate region is of the material SiGe with a length of 0.52 micrometers and it is doped with Arsenic at a concentration of 281508394225885675520 cm^-3. The drain region is of the material Silicon with a length of 0.6 micrometers and it is doped with Arsenic at a concentration of 668857668626155700224 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.007) (define Lgs 0.86) (define Lgl 0.52) (define Ltotal (+ Lgs Lgl)) (define Ls 0.6) (define Ld 0.6) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 854123861950656413696 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 601421352369329799168 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 281508394225885675520 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 668857668626155700224 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
255
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.37 micrometers and it is doped with Phosphorus at a concentration of 274614105017193693184 cm^-3. The short gate region is of the material SiGe with a length of 0.76 micrometers and it is doped with Phosphorus at a concentration of 768668277321662464000 cm^-3. The long gate region is of the material Germanium with a length of 0.84 micrometers and it is doped with Boron at a concentration of 749502557001239625728 cm^-3. The drain region is of the material Germanium with a length of 0.37 micrometers and it is doped with Phosphorus at a concentration of 563635519519589007360 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.003) (define Lgs 0.76) (define Lgl 0.84) (define Ltotal (+ Lgs Lgl)) (define Ls 0.37) (define Ld 0.37) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 274614105017193693184 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 768668277321662464000 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 749502557001239625728 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 563635519519589007360 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
256
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.98 micrometers and it is doped with Arsenic at a concentration of 433674202737619501056 cm^-3. The short gate region is of the material SiGe with a length of 0.52 micrometers and it is doped with Arsenic at a concentration of 56700379861420957696 cm^-3. The long gate region is of the material Silicon with a length of 0.3 micrometers and it is doped with Phosphorus at a concentration of 301638012054272081920 cm^-3. The drain region is of the material Silicon with a length of 0.98 micrometers and it is doped with Boron at a concentration of 56210458735108956160 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.01) (define Lgs 0.52) (define Lgl 0.3) (define Ltotal (+ Lgs Lgl)) (define Ls 0.98) (define Ld 0.98) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 433674202737619501056 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 56700379861420957696 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 301638012054272081920 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 56210458735108956160 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
257
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.48 micrometers and it is doped with Boron at a concentration of 805661588012031279104 cm^-3. The short gate region is of the material GaN with a length of 0.24 micrometers and it is doped with Phosphorus at a concentration of 428075321862205997056 cm^-3. The long gate region is of the material SiGe with a length of 0.38 micrometers and it is doped with Boron at a concentration of 770425075777865515008 cm^-3. The drain region is of the material Diamond with a length of 0.48 micrometers and it is doped with Boron at a concentration of 540499045769014804480 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.006) (define Lgs 0.24) (define Lgl 0.38) (define Ltotal (+ Lgs Lgl)) (define Ls 0.48) (define Ld 0.48) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 805661588012031279104 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 428075321862205997056 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 770425075777865515008 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 540499045769014804480 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
258
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.24 micrometers and it is doped with Boron at a concentration of 9742910504745623552 cm^-3. The short gate region is of the material SiGe with a length of 0.8 micrometers and it is doped with Arsenic at a concentration of 562186218251466702848 cm^-3. The long gate region is of the material SiGe with a length of 0.91 micrometers and it is doped with Phosphorus at a concentration of 148255658625161953280 cm^-3. The drain region is of the material GaN with a length of 0.24 micrometers and it is doped with Arsenic at a concentration of 297624076588856639488 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.006) (define Lgs 0.8) (define Lgl 0.91) (define Ltotal (+ Lgs Lgl)) (define Ls 0.24) (define Ld 0.24) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 9742910504745623552 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 562186218251466702848 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 148255658625161953280 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 297624076588856639488 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
259
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.82 micrometers and it is doped with Arsenic at a concentration of 855490251736194613248 cm^-3. The short gate region is of the material GaN with a length of 0.94 micrometers and it is doped with Arsenic at a concentration of 286381211426299281408 cm^-3. The long gate region is of the material Diamond with a length of 0.1 micrometers and it is doped with Arsenic at a concentration of 703456724892804448256 cm^-3. The drain region is of the material Silicon with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 548453639855250735104 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.002) (define Lgs 0.94) (define Lgl 0.1) (define Ltotal (+ Lgs Lgl)) (define Ls 0.82) (define Ld 0.82) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 855490251736194613248 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 286381211426299281408 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 703456724892804448256 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 548453639855250735104 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
260
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.48 micrometers and it is doped with Phosphorus at a concentration of 607495993525910765568 cm^-3. The short gate region is of the material Diamond with a length of 0.56 micrometers and it is doped with Phosphorus at a concentration of 76888639961677594624 cm^-3. The long gate region is of the material GaN with a length of 0.4 micrometers and it is doped with Phosphorus at a concentration of 750441374950480281600 cm^-3. The drain region is of the material Diamond with a length of 0.48 micrometers and it is doped with Phosphorus at a concentration of 133397589625160531968 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.004) (define Lgs 0.56) (define Lgl 0.4) (define Ltotal (+ Lgs Lgl)) (define Ls 0.48) (define Ld 0.48) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 607495993525910765568 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 76888639961677594624 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 750441374950480281600 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 133397589625160531968 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
261
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.51 micrometers and it is doped with Phosphorus at a concentration of 904900188298159194112 cm^-3. The short gate region is of the material Diamond with a length of 0.96 micrometers and it is doped with Phosphorus at a concentration of 26205326771662888960 cm^-3. The long gate region is of the material GaN with a length of 0.24 micrometers and it is doped with Phosphorus at a concentration of 978345908048433774592 cm^-3. The drain region is of the material Diamond with a length of 0.51 micrometers and it is doped with Arsenic at a concentration of 649155235612414181376 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.009) (define Lgs 0.96) (define Lgl 0.24) (define Ltotal (+ Lgs Lgl)) (define Ls 0.51) (define Ld 0.51) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 904900188298159194112 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 26205326771662888960 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 978345908048433774592 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 649155235612414181376 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
262
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.93 micrometers and it is doped with Phosphorus at a concentration of 716240763088768729088 cm^-3. The short gate region is of the material Germanium with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 509819304373512830976 cm^-3. The long gate region is of the material GaN with a length of 0.02 micrometers and it is doped with Boron at a concentration of 934525767024347709440 cm^-3. The drain region is of the material GaN with a length of 0.93 micrometers and it is doped with Phosphorus at a concentration of 913470592032792248320 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.001) (define Lgs 0.55) (define Lgl 0.02) (define Ltotal (+ Lgs Lgl)) (define Ls 0.93) (define Ld 0.93) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 716240763088768729088 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 509819304373512830976 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 934525767024347709440 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 913470592032792248320 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
263
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.26 micrometers and it is doped with Boron at a concentration of 941941874953765126144 cm^-3. The short gate region is of the material GaN with a length of 0.93 micrometers and it is doped with Arsenic at a concentration of 585217268494063501312 cm^-3. The long gate region is of the material Silicon with a length of 0.04 micrometers and it is doped with Arsenic at a concentration of 60836080484824498176 cm^-3. The drain region is of the material SiGe with a length of 0.26 micrometers and it is doped with Arsenic at a concentration of 441675102864088498176 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.005) (define Lgs 0.93) (define Lgl 0.04) (define Ltotal (+ Lgs Lgl)) (define Ls 0.26) (define Ld 0.26) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 941941874953765126144 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 585217268494063501312 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 60836080484824498176 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 441675102864088498176 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
264
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.7 micrometers and it is doped with Phosphorus at a concentration of 141512753832467251200 cm^-3. The short gate region is of the material Silicon with a length of 0.74 micrometers and it is doped with Boron at a concentration of 347600700735224020992 cm^-3. The long gate region is of the material Silicon with a length of 0.91 micrometers and it is doped with Boron at a concentration of 84916392495244181504 cm^-3. The drain region is of the material SiGe with a length of 0.7 micrometers and it is doped with Phosphorus at a concentration of 399662908483230367744 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.007) (define Lgs 0.74) (define Lgl 0.91) (define Ltotal (+ Lgs Lgl)) (define Ls 0.7) (define Ld 0.7) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 141512753832467251200 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 347600700735224020992 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 84916392495244181504 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 399662908483230367744 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
265
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.36 micrometers and it is doped with Boron at a concentration of 602922757152573358080 cm^-3. The short gate region is of the material Diamond with a length of 0.51 micrometers and it is doped with Phosphorus at a concentration of 663062351674405158912 cm^-3. The long gate region is of the material Germanium with a length of 0.65 micrometers and it is doped with Boron at a concentration of 780930849593681772544 cm^-3. The drain region is of the material Diamond with a length of 0.36 micrometers and it is doped with Arsenic at a concentration of 838816998587532574720 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.006) (define Lgs 0.51) (define Lgl 0.65) (define Ltotal (+ Lgs Lgl)) (define Ls 0.36) (define Ld 0.36) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 602922757152573358080 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 663062351674405158912 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 780930849593681772544 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 838816998587532574720 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
266
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 736732543620837933056 cm^-3. The short gate region is of the material Germanium with a length of 0.21 micrometers and it is doped with Arsenic at a concentration of 676126673082717044736 cm^-3. The long gate region is of the material Diamond with a length of 0.03 micrometers and it is doped with Boron at a concentration of 961649791486086086656 cm^-3. The drain region is of the material Silicon with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 554839377215039733760 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.009) (define Lgs 0.21) (define Lgl 0.03) (define Ltotal (+ Lgs Lgl)) (define Ls 0.16) (define Ld 0.16) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 736732543620837933056 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 676126673082717044736 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 961649791486086086656 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 554839377215039733760 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
267
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.16 micrometers and it is doped with Boron at a concentration of 496951640643340992512 cm^-3. The short gate region is of the material Germanium with a length of 0.97 micrometers and it is doped with Arsenic at a concentration of 157490663660569985024 cm^-3. The long gate region is of the material GaN with a length of 0.15 micrometers and it is doped with Phosphorus at a concentration of 725538780558924709888 cm^-3. The drain region is of the material SiGe with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 407713605075291471872 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.005) (define Lgs 0.97) (define Lgl 0.15) (define Ltotal (+ Lgs Lgl)) (define Ls 0.16) (define Ld 0.16) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 496951640643340992512 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 157490663660569985024 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 725538780558924709888 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 407713605075291471872 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
268
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.25 micrometers and it is doped with Boron at a concentration of 80754273049729662976 cm^-3. The short gate region is of the material SiGe with a length of 0.12 micrometers and it is doped with Arsenic at a concentration of 67523826643057090560 cm^-3. The long gate region is of the material Germanium with a length of 0.34 micrometers and it is doped with Phosphorus at a concentration of 566714651717185699840 cm^-3. The drain region is of the material GaN with a length of 0.25 micrometers and it is doped with Arsenic at a concentration of 802544952809939927040 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.006) (define Lgs 0.12) (define Lgl 0.34) (define Ltotal (+ Lgs Lgl)) (define Ls 0.25) (define Ld 0.25) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 80754273049729662976 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 67523826643057090560 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 566714651717185699840 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 802544952809939927040 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
269
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.8 micrometers and it is doped with Boron at a concentration of 853449625294598701056 cm^-3. The short gate region is of the material Silicon with a length of 0.78 micrometers and it is doped with Phosphorus at a concentration of 447006408311949230080 cm^-3. The long gate region is of the material Diamond with a length of 0.93 micrometers and it is doped with Phosphorus at a concentration of 619904928449134723072 cm^-3. The drain region is of the material Germanium with a length of 0.8 micrometers and it is doped with Boron at a concentration of 34107912801591197696 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.009) (define Lgs 0.78) (define Lgl 0.93) (define Ltotal (+ Lgs Lgl)) (define Ls 0.8) (define Ld 0.8) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 853449625294598701056 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 447006408311949230080 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 619904928449134723072 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 34107912801591197696 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
270
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.27 micrometers and it is doped with Phosphorus at a concentration of 870721971394213576704 cm^-3. The short gate region is of the material Silicon with a length of 0.75 micrometers and it is doped with Boron at a concentration of 23987168072407474176 cm^-3. The long gate region is of the material GaN with a length of 0.53 micrometers and it is doped with Boron at a concentration of 393377053411183296512 cm^-3. The drain region is of the material Diamond with a length of 0.27 micrometers and it is doped with Phosphorus at a concentration of 319831037345648607232 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.004) (define Lgs 0.75) (define Lgl 0.53) (define Ltotal (+ Lgs Lgl)) (define Ls 0.27) (define Ld 0.27) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 870721971394213576704 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 23987168072407474176 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 393377053411183296512 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 319831037345648607232 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
271
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.58 micrometers and it is doped with Phosphorus at a concentration of 75870821667215622144 cm^-3. The short gate region is of the material Germanium with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 541214879936505839616 cm^-3. The long gate region is of the material Diamond with a length of 0.51 micrometers and it is doped with Phosphorus at a concentration of 558882619664848388096 cm^-3. The drain region is of the material Silicon with a length of 0.58 micrometers and it is doped with Arsenic at a concentration of 595393913672548220928 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.008) (define Lgs 0.55) (define Lgl 0.51) (define Ltotal (+ Lgs Lgl)) (define Ls 0.58) (define Ld 0.58) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 75870821667215622144 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 541214879936505839616 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 558882619664848388096 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 595393913672548220928 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
272
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.73 micrometers and it is doped with Phosphorus at a concentration of 672908055893802745856 cm^-3. The short gate region is of the material Silicon with a length of 0.13 micrometers and it is doped with Phosphorus at a concentration of 267085156037366579200 cm^-3. The long gate region is of the material Diamond with a length of 0.83 micrometers and it is doped with Phosphorus at a concentration of 398243809592528863232 cm^-3. The drain region is of the material Germanium with a length of 0.73 micrometers and it is doped with Phosphorus at a concentration of 520366991894215393280 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.009) (define Lgs 0.13) (define Lgl 0.83) (define Ltotal (+ Lgs Lgl)) (define Ls 0.73) (define Ld 0.73) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 672908055893802745856 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 267085156037366579200 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 398243809592528863232 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 520366991894215393280 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
273
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.84 micrometers and it is doped with Boron at a concentration of 842940256886697754624 cm^-3. The short gate region is of the material Silicon with a length of 0.52 micrometers and it is doped with Boron at a concentration of 487768985647592505344 cm^-3. The long gate region is of the material Germanium with a length of 0.67 micrometers and it is doped with Boron at a concentration of 914079376564014809088 cm^-3. The drain region is of the material Germanium with a length of 0.84 micrometers and it is doped with Boron at a concentration of 710733833406908858368 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.002) (define Lgs 0.52) (define Lgl 0.67) (define Ltotal (+ Lgs Lgl)) (define Ls 0.84) (define Ld 0.84) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 842940256886697754624 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 487768985647592505344 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 914079376564014809088 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 710733833406908858368 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
274
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.47 micrometers and it is doped with Phosphorus at a concentration of 820330203969246593024 cm^-3. The short gate region is of the material GaN with a length of 0.83 micrometers and it is doped with Arsenic at a concentration of 866330234787940139008 cm^-3. The long gate region is of the material Diamond with a length of 0.36 micrometers and it is doped with Arsenic at a concentration of 260596457095475593216 cm^-3. The drain region is of the material Silicon with a length of 0.47 micrometers and it is doped with Boron at a concentration of 500566791011978051584 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.007) (define Lgs 0.83) (define Lgl 0.36) (define Ltotal (+ Lgs Lgl)) (define Ls 0.47) (define Ld 0.47) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 820330203969246593024 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 866330234787940139008 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 260596457095475593216 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 500566791011978051584 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
275
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.16 micrometers and it is doped with Arsenic at a concentration of 138924293910120628224 cm^-3. The short gate region is of the material Diamond with a length of 0.96 micrometers and it is doped with Arsenic at a concentration of 90823855134591418368 cm^-3. The long gate region is of the material Silicon with a length of 0.95 micrometers and it is doped with Phosphorus at a concentration of 63179780871584456704 cm^-3. The drain region is of the material SiGe with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 430475729771639996416 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.004) (define Lgs 0.96) (define Lgl 0.95) (define Ltotal (+ Lgs Lgl)) (define Ls 0.16) (define Ld 0.16) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 138924293910120628224 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 90823855134591418368 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 63179780871584456704 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 430475729771639996416 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
276
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.4 micrometers and it is doped with Phosphorus at a concentration of 847742455966790713344 cm^-3. The short gate region is of the material GaN with a length of 0.32 micrometers and it is doped with Arsenic at a concentration of 440375038090579935232 cm^-3. The long gate region is of the material Diamond with a length of 0.47 micrometers and it is doped with Arsenic at a concentration of 727124505904308027392 cm^-3. The drain region is of the material GaN with a length of 0.4 micrometers and it is doped with Boron at a concentration of 929378947980140347392 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.002) (define Lgs 0.32) (define Lgl 0.47) (define Ltotal (+ Lgs Lgl)) (define Ls 0.4) (define Ld 0.4) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 847742455966790713344 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 440375038090579935232 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 727124505904308027392 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 929378947980140347392 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
277
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.48 micrometers and it is doped with Phosphorus at a concentration of 303279942353394860032 cm^-3. The short gate region is of the material SiGe with a length of 0.76 micrometers and it is doped with Arsenic at a concentration of 208249725412885626880 cm^-3. The long gate region is of the material Silicon with a length of 0.15 micrometers and it is doped with Boron at a concentration of 678238842914826616832 cm^-3. The drain region is of the material Silicon with a length of 0.48 micrometers and it is doped with Boron at a concentration of 805477839904968015872 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.007) (define Lgs 0.76) (define Lgl 0.15) (define Ltotal (+ Lgs Lgl)) (define Ls 0.48) (define Ld 0.48) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 303279942353394860032 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 208249725412885626880 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 678238842914826616832 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 805477839904968015872 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
278
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.59 micrometers and it is doped with Arsenic at a concentration of 704391747023744139264 cm^-3. The short gate region is of the material Silicon with a length of 0.68 micrometers and it is doped with Boron at a concentration of 862019326463705612288 cm^-3. The long gate region is of the material Silicon with a length of 0.73 micrometers and it is doped with Boron at a concentration of 520288893791185010688 cm^-3. The drain region is of the material Germanium with a length of 0.59 micrometers and it is doped with Arsenic at a concentration of 474524479676965060608 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.007) (define Lgs 0.68) (define Lgl 0.73) (define Ltotal (+ Lgs Lgl)) (define Ls 0.59) (define Ld 0.59) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 704391747023744139264 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 862019326463705612288 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 520288893791185010688 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 474524479676965060608 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
279
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.97 micrometers and it is doped with Arsenic at a concentration of 222453518655562481664 cm^-3. The short gate region is of the material SiGe with a length of 0.24 micrometers and it is doped with Arsenic at a concentration of 672156739605494497280 cm^-3. The long gate region is of the material Diamond with a length of 0.33 micrometers and it is doped with Arsenic at a concentration of 142807553179643789312 cm^-3. The drain region is of the material Germanium with a length of 0.97 micrometers and it is doped with Boron at a concentration of 983376584463361507328 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.009) (define Lgs 0.24) (define Lgl 0.33) (define Ltotal (+ Lgs Lgl)) (define Ls 0.97) (define Ld 0.97) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 222453518655562481664 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 672156739605494497280 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 142807553179643789312 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 983376584463361507328 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
280
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.51 micrometers and it is doped with Boron at a concentration of 826192959746339110912 cm^-3. The short gate region is of the material Silicon with a length of 0.9 micrometers and it is doped with Boron at a concentration of 339960099276396036096 cm^-3. The long gate region is of the material GaN with a length of 0.15 micrometers and it is doped with Boron at a concentration of 244151896014091255808 cm^-3. The drain region is of the material Silicon with a length of 0.51 micrometers and it is doped with Arsenic at a concentration of 932974129414848774144 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.004) (define Lgs 0.9) (define Lgl 0.15) (define Ltotal (+ Lgs Lgl)) (define Ls 0.51) (define Ld 0.51) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 826192959746339110912 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 339960099276396036096 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 244151896014091255808 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 932974129414848774144 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
281
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.04 micrometers and it is doped with Boron at a concentration of 169548491642142162944 cm^-3. The short gate region is of the material GaN with a length of 0.71 micrometers and it is doped with Arsenic at a concentration of 221726443981920403456 cm^-3. The long gate region is of the material Germanium with a length of 0.51 micrometers and it is doped with Phosphorus at a concentration of 936695747561562832896 cm^-3. The drain region is of the material GaN with a length of 0.04 micrometers and it is doped with Boron at a concentration of 188841378850080686080 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.005) (define Lgs 0.71) (define Lgl 0.51) (define Ltotal (+ Lgs Lgl)) (define Ls 0.04) (define Ld 0.04) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 169548491642142162944 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 221726443981920403456 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 936695747561562832896 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 188841378850080686080 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
282
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.05 micrometers and it is doped with Boron at a concentration of 66951040535570825216 cm^-3. The short gate region is of the material GaN with a length of 0.36 micrometers and it is doped with Phosphorus at a concentration of 679014773745177591808 cm^-3. The long gate region is of the material SiGe with a length of 0.5 micrometers and it is doped with Phosphorus at a concentration of 450307131194713440256 cm^-3. The drain region is of the material Silicon with a length of 0.05 micrometers and it is doped with Arsenic at a concentration of 831590370073309872128 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.005) (define Lgs 0.36) (define Lgl 0.5) (define Ltotal (+ Lgs Lgl)) (define Ls 0.05) (define Ld 0.05) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 66951040535570825216 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 679014773745177591808 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 450307131194713440256 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 831590370073309872128 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
283
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.64 micrometers and it is doped with Arsenic at a concentration of 565418885330209079296 cm^-3. The short gate region is of the material Germanium with a length of 0.11 micrometers and it is doped with Phosphorus at a concentration of 718716087898407829504 cm^-3. The long gate region is of the material GaN with a length of 0.22 micrometers and it is doped with Arsenic at a concentration of 535369509410554511360 cm^-3. The drain region is of the material SiGe with a length of 0.64 micrometers and it is doped with Phosphorus at a concentration of 536579118515238600704 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.007) (define Lgs 0.11) (define Lgl 0.22) (define Ltotal (+ Lgs Lgl)) (define Ls 0.64) (define Ld 0.64) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 565418885330209079296 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 718716087898407829504 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 535369509410554511360 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 536579118515238600704 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
284
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.14 micrometers and it is doped with Arsenic at a concentration of 286802266882993618944 cm^-3. The short gate region is of the material Diamond with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 139327731024295526400 cm^-3. The long gate region is of the material Germanium with a length of 0.08 micrometers and it is doped with Boron at a concentration of 354058230436442800128 cm^-3. The drain region is of the material Silicon with a length of 0.14 micrometers and it is doped with Boron at a concentration of 171318974130953289728 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.003) (define Lgs 0.59) (define Lgl 0.08) (define Ltotal (+ Lgs Lgl)) (define Ls 0.14) (define Ld 0.14) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 286802266882993618944 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 139327731024295526400 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 354058230436442800128 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 171318974130953289728 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
285
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.93 micrometers and it is doped with Phosphorus at a concentration of 500009420438714712064 cm^-3. The short gate region is of the material Diamond with a length of 0.21 micrometers and it is doped with Boron at a concentration of 650293325200533225472 cm^-3. The long gate region is of the material Diamond with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 740088152382327881728 cm^-3. The drain region is of the material GaN with a length of 0.93 micrometers and it is doped with Boron at a concentration of 784837039312716038144 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.003) (define Lgs 0.21) (define Lgl 0.16) (define Ltotal (+ Lgs Lgl)) (define Ls 0.93) (define Ld 0.93) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 500009420438714712064 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 650293325200533225472 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 740088152382327881728 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 784837039312716038144 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
286
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.4 micrometers and it is doped with Phosphorus at a concentration of 44609420198728572928 cm^-3. The short gate region is of the material Germanium with a length of 0.53 micrometers and it is doped with Boron at a concentration of 62884774483846070272 cm^-3. The long gate region is of the material GaN with a length of 0.06 micrometers and it is doped with Boron at a concentration of 909835103155361677312 cm^-3. The drain region is of the material Silicon with a length of 0.4 micrometers and it is doped with Phosphorus at a concentration of 153764302792587083776 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.005) (define Lgs 0.53) (define Lgl 0.06) (define Ltotal (+ Lgs Lgl)) (define Ls 0.4) (define Ld 0.4) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 44609420198728572928 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 62884774483846070272 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 909835103155361677312 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 153764302792587083776 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
287
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 49279572953293365248 cm^-3. The short gate region is of the material Silicon with a length of 0.57 micrometers and it is doped with Phosphorus at a concentration of 835932459562581360640 cm^-3. The long gate region is of the material SiGe with a length of 0.98 micrometers and it is doped with Boron at a concentration of 708444896166778109952 cm^-3. The drain region is of the material Silicon with a length of 0.16 micrometers and it is doped with Arsenic at a concentration of 385264952978102681600 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.004) (define Lgs 0.57) (define Lgl 0.98) (define Ltotal (+ Lgs Lgl)) (define Ls 0.16) (define Ld 0.16) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 49279572953293365248 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 835932459562581360640 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 708444896166778109952 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 385264952978102681600 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
288
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.84 micrometers and it is doped with Boron at a concentration of 622177922406602768384 cm^-3. The short gate region is of the material Diamond with a length of 0.85 micrometers and it is doped with Phosphorus at a concentration of 239059840495928049664 cm^-3. The long gate region is of the material Germanium with a length of 0.1 micrometers and it is doped with Boron at a concentration of 293421380914204278784 cm^-3. The drain region is of the material GaN with a length of 0.84 micrometers and it is doped with Arsenic at a concentration of 557521343791178973184 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.003) (define Lgs 0.85) (define Lgl 0.1) (define Ltotal (+ Lgs Lgl)) (define Ls 0.84) (define Ld 0.84) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 622177922406602768384 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 239059840495928049664 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 293421380914204278784 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 557521343791178973184 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
289
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.1 micrometers and it is doped with Boron at a concentration of 518583401274965491712 cm^-3. The short gate region is of the material Diamond with a length of 0.99 micrometers and it is doped with Boron at a concentration of 148291220657212784640 cm^-3. The long gate region is of the material GaN with a length of 0.75 micrometers and it is doped with Phosphorus at a concentration of 963206721169591238656 cm^-3. The drain region is of the material GaN with a length of 0.1 micrometers and it is doped with Phosphorus at a concentration of 173083839122388713472 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.009) (define Lgs 0.99) (define Lgl 0.75) (define Ltotal (+ Lgs Lgl)) (define Ls 0.1) (define Ld 0.1) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 518583401274965491712 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 148291220657212784640 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 963206721169591238656 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 173083839122388713472 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
290
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.88 micrometers and it is doped with Boron at a concentration of 655073720385845985280 cm^-3. The short gate region is of the material GaN with a length of 0.43 micrometers and it is doped with Phosphorus at a concentration of 500678571483927412736 cm^-3. The long gate region is of the material SiGe with a length of 0.26 micrometers and it is doped with Phosphorus at a concentration of 153697077333201518592 cm^-3. The drain region is of the material Diamond with a length of 0.88 micrometers and it is doped with Phosphorus at a concentration of 984923656742987104256 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.004) (define Lgs 0.43) (define Lgl 0.26) (define Ltotal (+ Lgs Lgl)) (define Ls 0.88) (define Ld 0.88) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 655073720385845985280 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 500678571483927412736 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 153697077333201518592 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 984923656742987104256 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
291
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.28 micrometers and it is doped with Arsenic at a concentration of 626821993534925570048 cm^-3. The short gate region is of the material Silicon with a length of 0.94 micrometers and it is doped with Phosphorus at a concentration of 354898469562407845888 cm^-3. The long gate region is of the material Germanium with a length of 0.89 micrometers and it is doped with Arsenic at a concentration of 736207110293737832448 cm^-3. The drain region is of the material Germanium with a length of 0.28 micrometers and it is doped with Phosphorus at a concentration of 459972521738795614208 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.007) (define Lgs 0.94) (define Lgl 0.89) (define Ltotal (+ Lgs Lgl)) (define Ls 0.28) (define Ld 0.28) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 626821993534925570048 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 354898469562407845888 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 736207110293737832448 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 459972521738795614208 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
292
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.96 micrometers and it is doped with Phosphorus at a concentration of 628952275053151518720 cm^-3. The short gate region is of the material Silicon with a length of 0.57 micrometers and it is doped with Arsenic at a concentration of 7571652420392561664 cm^-3. The long gate region is of the material SiGe with a length of 0.74 micrometers and it is doped with Boron at a concentration of 823066320414266097664 cm^-3. The drain region is of the material SiGe with a length of 0.96 micrometers and it is doped with Phosphorus at a concentration of 570042365331707002880 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.008) (define Lgs 0.57) (define Lgl 0.74) (define Ltotal (+ Lgs Lgl)) (define Ls 0.96) (define Ld 0.96) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 628952275053151518720 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 7571652420392561664 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 823066320414266097664 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 570042365331707002880 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
293
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.34 micrometers and it is doped with Phosphorus at a concentration of 204519721008639934464 cm^-3. The short gate region is of the material GaN with a length of 0.92 micrometers and it is doped with Boron at a concentration of 130522783546100318208 cm^-3. The long gate region is of the material Diamond with a length of 0.39 micrometers and it is doped with Arsenic at a concentration of 637968379027920257024 cm^-3. The drain region is of the material Diamond with a length of 0.34 micrometers and it is doped with Phosphorus at a concentration of 343380900240224681984 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.001) (define Lgs 0.92) (define Lgl 0.39) (define Ltotal (+ Lgs Lgl)) (define Ls 0.34) (define Ld 0.34) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 204519721008639934464 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 130522783546100318208 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 637968379027920257024 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 343380900240224681984 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
294
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.7 micrometers and it is doped with Arsenic at a concentration of 324831958089910452224 cm^-3. The short gate region is of the material Silicon with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 900908044645489311744 cm^-3. The long gate region is of the material Germanium with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 37831154730559258624 cm^-3. The drain region is of the material Diamond with a length of 0.7 micrometers and it is doped with Arsenic at a concentration of 349288154218802446336 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.005) (define Lgs 0.59) (define Lgl 0.82) (define Ltotal (+ Lgs Lgl)) (define Ls 0.7) (define Ld 0.7) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 324831958089910452224 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 900908044645489311744 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 37831154730559258624 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 349288154218802446336 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
295
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.85 micrometers and it is doped with Phosphorus at a concentration of 204792299107041280000 cm^-3. The short gate region is of the material Diamond with a length of 0.75 micrometers and it is doped with Arsenic at a concentration of 572936863284537982976 cm^-3. The long gate region is of the material SiGe with a length of 0.73 micrometers and it is doped with Boron at a concentration of 514576335535430303744 cm^-3. The drain region is of the material SiGe with a length of 0.85 micrometers and it is doped with Phosphorus at a concentration of 295996382982368133120 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.005) (define Lgs 0.75) (define Lgl 0.73) (define Ltotal (+ Lgs Lgl)) (define Ls 0.85) (define Ld 0.85) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 204792299107041280000 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 572936863284537982976 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 514576335535430303744 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 295996382982368133120 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
296
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.79 micrometers and it is doped with Arsenic at a concentration of 750854364374964633600 cm^-3. The short gate region is of the material Diamond with a length of 0.1 micrometers and it is doped with Arsenic at a concentration of 73367194273340325888 cm^-3. The long gate region is of the material Diamond with a length of 0.34 micrometers and it is doped with Arsenic at a concentration of 412897588994999844864 cm^-3. The drain region is of the material Diamond with a length of 0.79 micrometers and it is doped with Arsenic at a concentration of 539292396383651495936 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.01) (define Lgs 0.1) (define Lgl 0.34) (define Ltotal (+ Lgs Lgl)) (define Ls 0.79) (define Ld 0.79) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 750854364374964633600 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 73367194273340325888 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 412897588994999844864 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 539292396383651495936 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
297
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.32 micrometers and it is doped with Phosphorus at a concentration of 103334106363685601280 cm^-3. The short gate region is of the material Silicon with a length of 0.33 micrometers and it is doped with Boron at a concentration of 800292187423421497344 cm^-3. The long gate region is of the material Diamond with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 336440489529647300608 cm^-3. The drain region is of the material Diamond with a length of 0.32 micrometers and it is doped with Arsenic at a concentration of 413874594768309583872 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.008) (define Lgs 0.33) (define Lgl 0.59) (define Ltotal (+ Lgs Lgl)) (define Ls 0.32) (define Ld 0.32) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 103334106363685601280 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 800292187423421497344 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 336440489529647300608 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 413874594768309583872 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
298
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.46 micrometers and it is doped with Boron at a concentration of 862166768040360673280 cm^-3. The short gate region is of the material SiGe with a length of 0.65 micrometers and it is doped with Boron at a concentration of 510328080746207379456 cm^-3. The long gate region is of the material Silicon with a length of 0.81 micrometers and it is doped with Boron at a concentration of 862672733210217414656 cm^-3. The drain region is of the material Germanium with a length of 0.46 micrometers and it is doped with Phosphorus at a concentration of 734028167071817400320 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.007) (define Lgs 0.65) (define Lgl 0.81) (define Ltotal (+ Lgs Lgl)) (define Ls 0.46) (define Ld 0.46) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 862166768040360673280 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 510328080746207379456 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 862672733210217414656 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 734028167071817400320 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
299
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.77 micrometers and it is doped with Arsenic at a concentration of 33577393082380787712 cm^-3. The short gate region is of the material Germanium with a length of 0.6 micrometers and it is doped with Boron at a concentration of 382279114960820109312 cm^-3. The long gate region is of the material Germanium with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 560336354541305200640 cm^-3. The drain region is of the material SiGe with a length of 0.77 micrometers and it is doped with Boron at a concentration of 151609190150161498112 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.003) (define Lgs 0.6) (define Lgl 0.16) (define Ltotal (+ Lgs Lgl)) (define Ls 0.77) (define Ld 0.77) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 33577393082380787712 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 382279114960820109312 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 560336354541305200640 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 151609190150161498112 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")