doc_id stringlengths 7 11 | appl_id stringlengths 8 8 | flag_patent int64 0 1 | claim_one stringlengths 12 21.5k |
|---|---|---|---|
6143604 | 09325956 | 1 | 1. A method for fabricating electrical contacts for dynamic random access memory (DRAM) devices on a semiconductor substrate comprising the steps of: providing said semiconductor substrate having device areas for memory cells surrounded and electrically isolated from each other by field oxide areas; depositing a first ... |
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