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2202469 (1 of 7) © 2023 The Authors. Advanced Materials Interfaces published by Wiley-VCH Gmb H www. advmatinterfaces. de Improved Silicon Surface Passivation by ALD Al 2O3/Si O 2 Multilayers with In-Situ Plasma Treatments Armin Richter,* Hemangi Patel, Christian Reichel, Jan Benick, and Stefan W. Glunz DOI: 10. 1002/a... | 10.1002admi.202202469.pdf |
www. advancedsciencenews. com© 2023 The Authors. Advanced Materials Interfaces published by Wiley-VCH Gmb H 2202469 (2 of 7) www. advmatinterfaces. de In a previous study, we investigated the c-Si surface passi-vation quality of such Al 2O3/Si O 2 multilayers synthesized via atomic layer deposition (ALD)[21]-a depositi... | 10.1002admi.202202469.pdf |
www. advancedsciencenews. com© 2023 The Authors. Advanced Materials Interfaces published by Wiley-VCH Gmb H 2202469 (3 of 7) www. advmatinterfaces. de It can be also observed from Figure 2 that most plasma-treated samples show superior high-temperature stability. While τeff of the reference multilayers and the single A... | 10.1002admi.202202469.pdf |
www. advancedsciencenews. com© 2023 The Authors. Advanced Materials Interfaces published by Wiley-VCH Gmb H 2202469 (4 of 7) www. advmatinterfaces. dedensity Qtot of this experiment together with τ eff for single (left) and triple (right) Al 2O3/Si O 2 multilayers treated with the dif-ferent plasmas. Results of the Al ... | 10.1002admi.202202469.pdf |
www. advancedsciencenews. com© 2023 The Authors. Advanced Materials Interfaces published by Wiley-VCH Gmb H 2202469 (5 of 7) www. advmatinterfaces. de60 s exposure is actually lower than after 10 s exposure. In the case of the 60 s N 2 plasma treatment, τ eff is even significantly lower than that of the Al 2O3/Si O 2 r... | 10.1002admi.202202469.pdf |
www. advancedsciencenews. com© 2023 The Authors. Advanced Materials Interfaces published by Wiley-VCH Gmb H 2202469 (6 of 7) www. advmatinterfaces. dec-Si surface passivation properties. By varying, for instance, the plasma gas (H 2, O2, N2, or Ar), the interfaces where the plasma treatment took place, or the number of... | 10.1002admi.202202469.pdf |
www. advancedsciencenews. com© 2023 The Authors. Advanced Materials Interfaces published by Wiley-VCH Gmb H 2202469 (7 of 7) www. advmatinterfaces. de Data Availability Statement The data that support the findings of this study are available from the corresponding author upon reasonable request. Keywords aluminum oxide... | 10.1002admi.202202469.pdf |
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