| configs: | |
| - config_name: metal | |
| data_files: | |
| - split: train | |
| path: lithosim_path/metal_train_val.csv | |
| - split: test | |
| path: lithosim_path/metal_test.csv | |
| - config_name: opc_metal | |
| data_files: | |
| - split: train | |
| path: lithosim_path/opc_metal_train_val.csv | |
| - split: test | |
| path: lithosim_path/opc_metal_test.csv | |
| - config_name: via | |
| data_files: | |
| - split: train | |
| path: lithosim_path/via_train_val.csv | |
| - split: test | |
| path: lithosim_path/via_test.csv | |
| - config_name: opc_via | |
| data_files: | |
| - split: train | |
| path: lithosim_path/opc_via_train_val.csv | |
| - split: test | |
| path: lithosim_path/opc_via_test.csv | |
| - config_name: ood | |
| data_files: | |
| - split: test | |
| path: lithosim_path/ood.csv | |
| license: afl-3.0 | |
| language: | |
| - en | |
| tags: | |
| - code | |
| pretty_name: litho | |
| size_categories: | |
| - 1B<n<10B | |
| task_categories: | |
| - feature-extraction | |
| The benchmark of "LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing" | |
| The corresponding GitHub repo can be found at https://dw-hongquan.github.io/LithoSim/ | |
| ## Data Construction | |
| - 4 in-distributed dataset (OPC_Metal/Metal/OPC_Via/Via). | |
| - 1 out-of-distribution (OOD) dataset. | |
| - Each main dataset has a train_val and a test folder with compressed data file. | |
| - Each set of data contains a source_simple.src description of the source, a layout.png, a mask.png, and a number of RI under different process variations. |