| # PHM 2016 CMP Dataset |
|
|
| CMP(Chemical Mechanical Planarization, νν κΈ°κ³μ μ°λ§) 곡μ μ€μΈ‘ λ°μ΄ν°μ
μ
λλ€. |
| A3 μλ(CMP Step μ΄μ)μ Tier 1 μ΄μ νμ§μμ μ¬μ©ν©λλ€. |
|
|
| ## κ°μ |
|
|
| - μΆμ²: PHM Society Data Challenge 2016 |
| - 1,981 wafer Γ 2 stage(A/B), 25κ° μΌμ μ€μΈ‘κ° + νκ· μ¬λ£ μ κ±°μ¨(MRR) λΌλ²¨ |
| - μΌμ μ΄λ¦μ΄ λͺ¨λ 곡κ°λμ΄ μμ΄ λλ©μΈ ν΄μμ΄ κ°λ₯ν©λλ€ (SECOMμ μ΅λͺ
μ±κ³Ό λμ‘°) |
|
|
| ## μ£Όμ μΌμ |
|
|
| - μλ ₯: `PRESSURIZED_CHAMBER_PRESSURE`, `RETAINER_RING_PRESSURE`, `MAIN_OUTER_AIR_BAG_PRESSURE` λ± |
| - νμ : `WAFER_ROTATION`, `STAGE_ROTATION`, `HEAD_ROTATION` |
| - μ¬λ¬λ¦¬ μ λ: `SLURRY_FLOW_LINE_A/B/C` |
| - μ¬μ©λ: `USAGE_OF_BACKING_FILM`, `USAGE_OF_DRESSER`, `USAGE_OF_POLISHING_TABLE` λ± |
|
|
| ## μ€λΉ λ°©λ² |
|
|
| μλ³Έ ZIPμ `data/phm2016/raw/`μ νμ΄λμΈμ. μμΆ ν΄μ ν λ€μ κ΅¬μ‘°κ° λμ΄μΌ ν©λλ€. |
|
|
| ``` |
| data/phm2016/raw/ |
| βββ CMP-training-removalrate.csv # νμ΅μ© μ λ΅ λΌλ²¨ |
| βββ CMP-test-removalrate.csv |
| βββ CMP-data/ |
| βββ training/CMP-training-NNN.csv # trajectory μκ³μ΄ (185κ°) |
| βββ test/CMP-test-NNN.csv |
| ``` |
|
|
| raw λ°μ΄ν°λ μ½ 160MBλ‘ gitμ ν¬ν¨λμ§ μμ΅λλ€(`.gitignore`). |
|
|
| ## λ‘λ μ¬μ© |
|
|
| ```python |
| from data.phm2016.loader import load_phm_cmp |
| |
| features, labels = load_phm_cmp() |
| # features: (N, 19) β wafer-stage λ¨μ μΌμ νκ· |
| # labels: (N,) β AVG_REMOVAL_RATE |
| # index: MultiIndex (WAFER_ID, STAGE) |
| ``` |
|
|
| trajectory μ 체λ₯Ό (WAFER_ID, STAGE)λ³λ‘ νκ· μ§κ³νμ¬ wafer-stage λ¨μ feature |
| vectorλ₯Ό λ§λλλ€. 첫 νΈμΆ μ μ½ 10~30μ΄κ° μμλλ©° μ΄νλ `lru_cache`λ‘ μ¦μ |
| μλ΅ν©λλ€. |
|
|
| ## μλ λ§€ν |
|
|
| A3(CMP Step μ΄μ) μλμ΄ μ΄ λ°μ΄ν°μ νΉμ waferμ λ§€νλ©λλ€ (`agents/detection.py`μ |
| `ALARM_WAFER`). MRRμ΄ νκ· μμ ν¬κ² λ²μ΄λ waferλ₯Ό μ ννμ¬ μ΄μ μλ리μ€λ‘ |
| μ¬μ©ν©λλ€. |
|
|