Datasets:
Dataset Preview
The full dataset viewer is not available (click to read why). Only showing a preview of the rows.
The dataset generation failed because of a cast error
Error code: DatasetGenerationCastError
Exception: DatasetGenerationCastError
Message: An error occurred while generating the dataset
All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
This happened while the csv dataset builder was generating data using
hf://datasets/ClarusC64/euv-stochastic-defect-drift-detection-v0.1/data/test.csv (at revision 4b5802053ededdbd3bd2fedd8983c6b0d4a96240), [/tmp/hf-datasets-cache/medium/datasets/91436954631156-config-parquet-and-info-ClarusC64-euv-stochastic--cd2c3b3a/hub/datasets--ClarusC64--euv-stochastic-defect-drift-detection-v0.1/snapshots/4b5802053ededdbd3bd2fedd8983c6b0d4a96240/data/test.csv (origin=hf://datasets/ClarusC64/euv-stochastic-defect-drift-detection-v0.1@4b5802053ededdbd3bd2fedd8983c6b0d4a96240/data/test.csv)]
Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback: Traceback (most recent call last):
File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
writer.write_table(table)
File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
pa_table = table_cast(pa_table, self._schema)
^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
return cast_table_to_schema(table, schema)
^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
raise CastError(
datasets.table.CastError: Couldn't cast
id: string
case_title: string
photon_flux_cv_delta: double
source_pulse_energy_cv_delta: double
resist_sensitivity_delta_pct: double
acid_diffusion_length_delta_nm: int64
blur_length_delta_nm: int64
ler_sigma_delta_nm: double
defect_rate_ppm_delta: int64
coherence_score_delta: double
drift_score: double
precursor_flag: string
dominant_axis: string
notes: string
constraints: string
-- schema metadata --
pandas: '{"index_columns": [{"kind": "range", "name": null, "start": 0, "' + 2260
to
{'id': Value('string'), 'case_title': Value('string'), 'photon_flux_cv_delta': Value('float64'), 'source_pulse_energy_cv_delta': Value('float64'), 'resist_sensitivity_delta_pct': Value('float64'), 'acid_diffusion_length_delta_nm': Value('int64'), 'blur_length_delta_nm': Value('int64'), 'ler_sigma_delta_nm': Value('float64'), 'defect_rate_ppm_delta': Value('int64'), 'coherence_score_delta': Value('float64'), 'drift_score': Value('float64'), 'precursor_flag': Value('int64'), 'dominant_axis': Value('string'), 'notes': Value('string')}
because column names don't match
During handling of the above exception, another exception occurred:
Traceback (most recent call last):
File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
parquet_operations = convert_to_parquet(builder)
^^^^^^^^^^^^^^^^^^^^^^^^^^^
File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
builder.download_and_prepare(
File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
self._download_and_prepare(
File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
self._prepare_split(split_generator, **prepare_split_kwargs)
File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
for job_id, done, content in self._prepare_split_single(
^^^^^^^^^^^^^^^^^^^^^^^^^^^
File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
raise DatasetGenerationCastError.from_cast_error(
datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
This happened while the csv dataset builder was generating data using
hf://datasets/ClarusC64/euv-stochastic-defect-drift-detection-v0.1/data/test.csv (at revision 4b5802053ededdbd3bd2fedd8983c6b0d4a96240), [/tmp/hf-datasets-cache/medium/datasets/91436954631156-config-parquet-and-info-ClarusC64-euv-stochastic--cd2c3b3a/hub/datasets--ClarusC64--euv-stochastic-defect-drift-detection-v0.1/snapshots/4b5802053ededdbd3bd2fedd8983c6b0d4a96240/data/test.csv (origin=hf://datasets/ClarusC64/euv-stochastic-defect-drift-detection-v0.1@4b5802053ededdbd3bd2fedd8983c6b0d4a96240/data/test.csv)]
Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)Need help to make the dataset viewer work? Make sure to review how to configure the dataset viewer, and open a discussion for direct support.
id
string | case_title
string | photon_flux_cv_delta
float64 | source_pulse_energy_cv_delta
float64 | resist_sensitivity_delta_pct
float64 | acid_diffusion_length_delta_nm
int64 | blur_length_delta_nm
int64 | ler_sigma_delta_nm
float64 | defect_rate_ppm_delta
int64 | coherence_score_delta
float64 | drift_score
float64 | precursor_flag
int64 | dominant_axis
string | notes
string |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
SDD-001
|
No drift
| 0
| 0
| 0
| 0
| 0
| 0
| 0
| 0
| 0.05
| 0
|
none
|
Stable
|
SDD-002
|
Minor noise drift
| 0.004
| 0.003
| 0
| 0
| 0
| 0.2
| 2
| -0.03
| 0.14
| 0
|
source
|
Small rise
|
SDD-003
|
Resist sensitivity drift
| 0
| 0
| 4
| 1
| 1
| 0.3
| 3
| -0.05
| 0.18
| 0
|
resist
|
Slow resist change
|
SDD-004
|
Coupled drift onset
| 0.006
| 0.005
| 4
| 1
| 1
| 0.5
| 6
| -0.08
| 0.28
| 0
|
coupled
|
Coupled
|
SDD-005
|
Precursor pattern
| 0.008
| 0.007
| 6
| 2
| 2
| 0.7
| 10
| -0.12
| 0.4
| 1
|
coupled
|
Nonlinear start
|
SDD-006
|
Source-dominant precursor
| 0.012
| 0.01
| 1
| 0
| 1
| 0.8
| 14
| -0.15
| 0.48
| 1
|
source
|
Jitter rises
|
SDD-007
|
Resist-dominant precursor
| 0.003
| 0.002
| 9
| 3
| 2
| 0.9
| 16
| -0.18
| 0.52
| 1
|
resist
|
Blur grows
|
SDD-008
|
High drift
| 0.016
| 0.014
| 10
| 3
| 3
| 1.3
| 26
| -0.26
| 0.66
| 1
|
coupled
|
Defects accelerating
|
SDD-009
|
Severe drift
| 0.02
| 0.018
| 12
| 4
| 4
| 1.8
| 40
| -0.34
| 0.8
| 1
|
coupled
|
Near failure
|
SDD-010
|
Extreme drift
| 0.026
| 0.022
| 14
| 5
| 5
| 2.2
| 60
| -0.46
| 0.92
| 1
|
coupled
|
Collapse edge
|
What this dataset tests
Early stochastic failure is a drift event.
Not a single spike.
The signal is coherence decay across:
source noise
pulse stability
resist response
LER spread
defect rate rise
Task
Predict JSON:
drift_score 0..1
precursor_flag 0 or 1
dominant_axis one of
none
source
resist
coupled
Example
{"drift_score":0.52,"precursor_flag":1,"dominant_axis":"coupled"}
Inputs
All fields are deltas vs a known baseline window.
photon_flux_cv_delta
source_pulse_energy_cv_delta
resist_sensitivity_delta_pct
acid_diffusion_length_delta_nm
blur_length_delta_nm
ler_sigma_delta_nm
defect_rate_ppm_delta
coherence_score_delta
Output meaning
drift_score
How far the system moved from a coherent regime
precursor_flag
Whether defect emergence is imminent
dominant_axis
Where the drift originates first
Version
v0.1
- Downloads last month
- 17