Hugging Face's logo

Datasets:
ClarusC64
/
euv-stochastic-defect-drift-detection-v0.1

Tasks:
Tabular to Text
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
stochastic
defects
drift
License:
Dataset card Data Studio Files
xet
Community
euv-stochastic-defect-drift-detection-v0.1
7.35 kB
  • 1 contributor
 History: 5 commits
ClarusC64's picture
ClarusC64
Update README.md
4b58020 verified