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Datasets:
ClarusC64
/
euv-stochastic-defect-drift-detection-v0.1

Tasks:
Tabular to Text
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
stochastic
defects
drift
License:
Dataset card Data Studio Files
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euv-stochastic-defect-drift-detection-v0.1 / data
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 History: 2 commits
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ClarusC64
Create data/test.csv
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