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--- |
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configs: |
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- config_name: metal |
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data_files: |
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- split: train |
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path: lithosim_path/metal_train_val.csv |
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- split: test |
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path: lithosim_path/metal_test.csv |
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- config_name: opc_metal |
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data_files: |
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- split: train |
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path: lithosim_path/opc_metal_train_val.csv |
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- split: test |
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path: lithosim_path/opc_metal_test.csv |
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- config_name: via |
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data_files: |
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- split: train |
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path: lithosim_path/via_train_val.csv |
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- split: test |
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|
path: lithosim_path/via_test.csv |
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- config_name: opc_via |
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data_files: |
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|
- split: train |
|
|
path: lithosim_path/opc_via_train_val.csv |
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|
- split: test |
|
|
path: lithosim_path/opc_via_test.csv |
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- config_name: ood |
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data_files: |
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|
- split: test |
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path: lithosim_path/ood.csv |
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license: afl-3.0 |
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language: |
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- en |
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tags: |
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- code |
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pretty_name: litho |
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size_categories: |
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- 1B<n<10B |
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task_categories: |
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- feature-extraction |
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--- |
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The benchmark of "LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing" |
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The corresponding GitHub repo can be found at https://dw-hongquan.github.io/LithoSim/ |
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## Data Construction |
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- 4 in-distributed dataset (OPC_Metal/Metal/OPC_Via/Via). |
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- 1 out-of-distribution (OOD) dataset. |
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- Each main dataset has a train_val and a test folder with compressed data file. |
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- Each set of data contains a source_simple.src description of the source, a layout.png, a mask.png, and a number of RI under different process variations. |
