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This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.85 micrometers and it is doped with Arsenic at a concentration of 319499304873979150336 cm^-3. The short gate region is of the material Diamond with a length of 0.51 micrometers and it is doped with Boron at a concentration of 461181385126498664448 cm^-3. The long gate region is of the material SiGe with a length of 0.26 micrometers and it is doped with Arsenic at a concentration of 23071352588699889664 cm^-3. The drain region is of the material Silicon with a length of 0.85 micrometers and it is doped with Boron at a concentration of 189694948877134823424 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.007) (define Lgs 0.51) (define Lgl 0.26) (define Ltotal (+ Lgs Lgl)) (define Ls 0.85) (define Ld 0.85) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 319499304873979150336 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 461181385126498664448 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 23071352588699889664 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 189694948877134823424 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
101
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.77 micrometers and it is doped with Phosphorus at a concentration of 817956410462221238272 cm^-3. The short gate region is of the material SiGe with a length of 0.98 micrometers and it is doped with Arsenic at a concentration of 428345533932477612032 cm^-3. The long gate region is of the material GaN with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 974388539064950980608 cm^-3. The drain region is of the material SiGe with a length of 0.77 micrometers and it is doped with Boron at a concentration of 873138134816279625728 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.006) (define Lgs 0.98) (define Lgl 0.02) (define Ltotal (+ Lgs Lgl)) (define Ls 0.77) (define Ld 0.77) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 817956410462221238272 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 428345533932477612032 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 974388539064950980608 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 873138134816279625728 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
102
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.32 micrometers and it is doped with Arsenic at a concentration of 861403993425964826624 cm^-3. The short gate region is of the material Silicon with a length of 0.35 micrometers and it is doped with Boron at a concentration of 158070866174049320960 cm^-3. The long gate region is of the material Germanium with a length of 0.74 micrometers and it is doped with Arsenic at a concentration of 356920809716174290944 cm^-3. The drain region is of the material Germanium with a length of 0.32 micrometers and it is doped with Arsenic at a concentration of 373055557773322485760 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.003) (define Lgs 0.35) (define Lgl 0.74) (define Ltotal (+ Lgs Lgl)) (define Ls 0.32) (define Ld 0.32) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 861403993425964826624 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 158070866174049320960 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 356920809716174290944 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 373055557773322485760 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
103
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.62 micrometers and it is doped with Boron at a concentration of 274844966883942072320 cm^-3. The short gate region is of the material GaN with a length of 0.41 micrometers and it is doped with Arsenic at a concentration of 898857041776923901952 cm^-3. The long gate region is of the material Silicon with a length of 0.53 micrometers and it is doped with Boron at a concentration of 970836831016583692288 cm^-3. The drain region is of the material SiGe with a length of 0.62 micrometers and it is doped with Phosphorus at a concentration of 196479956812186845184 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.01) (define Lgs 0.41) (define Lgl 0.53) (define Ltotal (+ Lgs Lgl)) (define Ls 0.62) (define Ld 0.62) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 274844966883942072320 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 898857041776923901952 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 970836831016583692288 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 196479956812186845184 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
104
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.63 micrometers and it is doped with Arsenic at a concentration of 289120569615023374336 cm^-3. The short gate region is of the material Diamond with a length of 0.97 micrometers and it is doped with Phosphorus at a concentration of 185047974593590722560 cm^-3. The long gate region is of the material SiGe with a length of 0.73 micrometers and it is doped with Phosphorus at a concentration of 106206666927407792128 cm^-3. The drain region is of the material SiGe with a length of 0.63 micrometers and it is doped with Boron at a concentration of 708403278477614120960 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.007) (define Lgs 0.97) (define Lgl 0.73) (define Ltotal (+ Lgs Lgl)) (define Ls 0.63) (define Ld 0.63) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 289120569615023374336 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 185047974593590722560 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 106206666927407792128 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 708403278477614120960 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
105
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.26 micrometers and it is doped with Boron at a concentration of 431244055621000888320 cm^-3. The short gate region is of the material GaN with a length of 0.52 micrometers and it is doped with Phosphorus at a concentration of 867875466397670703104 cm^-3. The long gate region is of the material GaN with a length of 0.22 micrometers and it is doped with Phosphorus at a concentration of 546664269191759265792 cm^-3. The drain region is of the material Silicon with a length of 0.26 micrometers and it is doped with Boron at a concentration of 535727529430620307456 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.008) (define Lgs 0.52) (define Lgl 0.22) (define Ltotal (+ Lgs Lgl)) (define Ls 0.26) (define Ld 0.26) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 431244055621000888320 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 867875466397670703104 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 546664269191759265792 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 535727529430620307456 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
106
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.82 micrometers and it is doped with Boron at a concentration of 187396215441748459520 cm^-3. The short gate region is of the material SiGe with a length of 0.9 micrometers and it is doped with Boron at a concentration of 578332191871338545152 cm^-3. The long gate region is of the material GaN with a length of 0.3 micrometers and it is doped with Arsenic at a concentration of 981229338573601112064 cm^-3. The drain region is of the material SiGe with a length of 0.82 micrometers and it is doped with Arsenic at a concentration of 21449527472333737984 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.004) (define Lgs 0.9) (define Lgl 0.3) (define Ltotal (+ Lgs Lgl)) (define Ls 0.82) (define Ld 0.82) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 187396215441748459520 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 578332191871338545152 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 981229338573601112064 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 21449527472333737984 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
107
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 225856391605866725376 cm^-3. The short gate region is of the material Germanium with a length of 0.54 micrometers and it is doped with Boron at a concentration of 973915199961677168640 cm^-3. The long gate region is of the material Germanium with a length of 0.64 micrometers and it is doped with Phosphorus at a concentration of 343340930781020815360 cm^-3. The drain region is of the material GaN with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 121203666170366345216 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.005) (define Lgs 0.54) (define Lgl 0.64) (define Ltotal (+ Lgs Lgl)) (define Ls 0.73) (define Ld 0.73) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 225856391605866725376 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 973915199961677168640 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 343340930781020815360 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 121203666170366345216 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
108
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.32 micrometers and it is doped with Boron at a concentration of 975057176318291607552 cm^-3. The short gate region is of the material Silicon with a length of 0.83 micrometers and it is doped with Boron at a concentration of 526602734704284794880 cm^-3. The long gate region is of the material Diamond with a length of 0.28 micrometers and it is doped with Phosphorus at a concentration of 738942374924545425408 cm^-3. The drain region is of the material Silicon with a length of 0.32 micrometers and it is doped with Phosphorus at a concentration of 738430462006419914752 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.002) (define Lgs 0.83) (define Lgl 0.28) (define Ltotal (+ Lgs Lgl)) (define Ls 0.32) (define Ld 0.32) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 975057176318291607552 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 526602734704284794880 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 738942374924545425408 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 738430462006419914752 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
109
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.3 micrometers and it is doped with Arsenic at a concentration of 864415649562535002112 cm^-3. The short gate region is of the material GaN with a length of 0.52 micrometers and it is doped with Arsenic at a concentration of 277088952081607393280 cm^-3. The long gate region is of the material Germanium with a length of 0.94 micrometers and it is doped with Phosphorus at a concentration of 719188062942903271424 cm^-3. The drain region is of the material GaN with a length of 0.3 micrometers and it is doped with Boron at a concentration of 805103552199256440832 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.003) (define Lgs 0.52) (define Lgl 0.94) (define Ltotal (+ Lgs Lgl)) (define Ls 0.3) (define Ld 0.3) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 864415649562535002112 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 277088952081607393280 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 719188062942903271424 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 805103552199256440832 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
110
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.51 micrometers and it is doped with Boron at a concentration of 877214432767082364928 cm^-3. The short gate region is of the material GaN with a length of 0.81 micrometers and it is doped with Arsenic at a concentration of 977087467984982376448 cm^-3. The long gate region is of the material SiGe with a length of 0.41 micrometers and it is doped with Phosphorus at a concentration of 65460589944043847680 cm^-3. The drain region is of the material Silicon with a length of 0.51 micrometers and it is doped with Arsenic at a concentration of 335922020944970514432 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.009) (define Lgs 0.81) (define Lgl 0.41) (define Ltotal (+ Lgs Lgl)) (define Ls 0.51) (define Ld 0.51) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 877214432767082364928 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 977087467984982376448 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 65460589944043847680 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 335922020944970514432 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
111
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.54 micrometers and it is doped with Boron at a concentration of 813485211734208937984 cm^-3. The short gate region is of the material GaN with a length of 0.3 micrometers and it is doped with Phosphorus at a concentration of 255448349463000449024 cm^-3. The long gate region is of the material GaN with a length of 1.0 micrometers and it is doped with Arsenic at a concentration of 990228476925018505216 cm^-3. The drain region is of the material GaN with a length of 0.54 micrometers and it is doped with Arsenic at a concentration of 965950007793223991296 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.003) (define Lgs 0.3) (define Lgl 1.0) (define Ltotal (+ Lgs Lgl)) (define Ls 0.54) (define Ld 0.54) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 813485211734208937984 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 255448349463000449024 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 990228476925018505216 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 965950007793223991296 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
112
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.37 micrometers and it is doped with Phosphorus at a concentration of 210913276613269454848 cm^-3. The short gate region is of the material Silicon with a length of 0.34 micrometers and it is doped with Boron at a concentration of 725425809591329488896 cm^-3. The long gate region is of the material Diamond with a length of 0.15 micrometers and it is doped with Phosphorus at a concentration of 588858157573278924800 cm^-3. The drain region is of the material Germanium with a length of 0.37 micrometers and it is doped with Boron at a concentration of 623922252380854550528 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.006) (define Lgs 0.34) (define Lgl 0.15) (define Ltotal (+ Lgs Lgl)) (define Ls 0.37) (define Ld 0.37) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 210913276613269454848 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 725425809591329488896 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 588858157573278924800 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 623922252380854550528 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
113
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.84 micrometers and it is doped with Phosphorus at a concentration of 798838124714382589952 cm^-3. The short gate region is of the material Germanium with a length of 0.18 micrometers and it is doped with Phosphorus at a concentration of 470915123045727469568 cm^-3. The long gate region is of the material Germanium with a length of 0.75 micrometers and it is doped with Arsenic at a concentration of 533659430458771898368 cm^-3. The drain region is of the material GaN with a length of 0.84 micrometers and it is doped with Arsenic at a concentration of 469164573865642950656 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.001) (define Lgs 0.18) (define Lgl 0.75) (define Ltotal (+ Lgs Lgl)) (define Ls 0.84) (define Ld 0.84) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 798838124714382589952 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 470915123045727469568 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 533659430458771898368 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 469164573865642950656 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
114
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.82 micrometers and it is doped with Boron at a concentration of 125552866182158270464 cm^-3. The short gate region is of the material GaN with a length of 0.76 micrometers and it is doped with Phosphorus at a concentration of 826265042215517159424 cm^-3. The long gate region is of the material GaN with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 749517382687887458304 cm^-3. The drain region is of the material GaN with a length of 0.82 micrometers and it is doped with Arsenic at a concentration of 104511238618531299328 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.006) (define Lgs 0.76) (define Lgl 0.59) (define Ltotal (+ Lgs Lgl)) (define Ls 0.82) (define Ld 0.82) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 125552866182158270464 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 826265042215517159424 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 749517382687887458304 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 104511238618531299328 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
115
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.61 micrometers and it is doped with Phosphorus at a concentration of 86135326384605036544 cm^-3. The short gate region is of the material SiGe with a length of 0.04 micrometers and it is doped with Arsenic at a concentration of 31316610773734895616 cm^-3. The long gate region is of the material SiGe with a length of 0.64 micrometers and it is doped with Boron at a concentration of 202327019949312933888 cm^-3. The drain region is of the material SiGe with a length of 0.61 micrometers and it is doped with Phosphorus at a concentration of 378281551951753379840 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.008) (define Lgs 0.04) (define Lgl 0.64) (define Ltotal (+ Lgs Lgl)) (define Ls 0.61) (define Ld 0.61) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 86135326384605036544 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 31316610773734895616 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 202327019949312933888 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 378281551951753379840 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
116
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.7 micrometers and it is doped with Arsenic at a concentration of 472046720764995436544 cm^-3. The short gate region is of the material Diamond with a length of 0.94 micrometers and it is doped with Boron at a concentration of 949416286500933861376 cm^-3. The long gate region is of the material Diamond with a length of 0.85 micrometers and it is doped with Boron at a concentration of 258990455302511099904 cm^-3. The drain region is of the material SiGe with a length of 0.7 micrometers and it is doped with Boron at a concentration of 722160097074871926784 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.01) (define Lgs 0.94) (define Lgl 0.85) (define Ltotal (+ Lgs Lgl)) (define Ls 0.7) (define Ld 0.7) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 472046720764995436544 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 949416286500933861376 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 258990455302511099904 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 722160097074871926784 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
117
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.57 micrometers and it is doped with Arsenic at a concentration of 13851412691279665152 cm^-3. The short gate region is of the material GaN with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 44124697712715898880 cm^-3. The long gate region is of the material Diamond with a length of 0.68 micrometers and it is doped with Boron at a concentration of 874877628653421461504 cm^-3. The drain region is of the material Germanium with a length of 0.57 micrometers and it is doped with Boron at a concentration of 834950087020239781888 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.006) (define Lgs 0.44) (define Lgl 0.68) (define Ltotal (+ Lgs Lgl)) (define Ls 0.57) (define Ld 0.57) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 13851412691279665152 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 44124697712715898880 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 874877628653421461504 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 834950087020239781888 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
118
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.57 micrometers and it is doped with Arsenic at a concentration of 13832037258955173888 cm^-3. The short gate region is of the material Germanium with a length of 0.97 micrometers and it is doped with Boron at a concentration of 465988307705179275264 cm^-3. The long gate region is of the material GaN with a length of 0.26 micrometers and it is doped with Boron at a concentration of 141776981942222651392 cm^-3. The drain region is of the material Germanium with a length of 0.57 micrometers and it is doped with Boron at a concentration of 767622730318759591936 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.009) (define Lgs 0.97) (define Lgl 0.26) (define Ltotal (+ Lgs Lgl)) (define Ls 0.57) (define Ld 0.57) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 13832037258955173888 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 465988307705179275264 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 141776981942222651392 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 767622730318759591936 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
119
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.76 micrometers and it is doped with Boron at a concentration of 926950912971522441216 cm^-3. The short gate region is of the material Diamond with a length of 0.86 micrometers and it is doped with Phosphorus at a concentration of 856682626490158415872 cm^-3. The long gate region is of the material SiGe with a length of 0.46 micrometers and it is doped with Arsenic at a concentration of 317346965787337162752 cm^-3. The drain region is of the material GaN with a length of 0.76 micrometers and it is doped with Phosphorus at a concentration of 763654211091180552192 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.001) (define Lgs 0.86) (define Lgl 0.46) (define Ltotal (+ Lgs Lgl)) (define Ls 0.76) (define Ld 0.76) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 926950912971522441216 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 856682626490158415872 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 317346965787337162752 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 763654211091180552192 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
120
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.45 micrometers and it is doped with Boron at a concentration of 338331726645193080832 cm^-3. The short gate region is of the material Diamond with a length of 0.52 micrometers and it is doped with Boron at a concentration of 815351492048894951424 cm^-3. The long gate region is of the material Germanium with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 747213371233947222016 cm^-3. The drain region is of the material Diamond with a length of 0.45 micrometers and it is doped with Boron at a concentration of 952251128137562587136 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.004) (define Lgs 0.52) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.45) (define Ld 0.45) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 338331726645193080832 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 815351492048894951424 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 747213371233947222016 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 952251128137562587136 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
121
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.8 micrometers and it is doped with Phosphorus at a concentration of 190901713548097748992 cm^-3. The short gate region is of the material Silicon with a length of 0.53 micrometers and it is doped with Phosphorus at a concentration of 794502601485077839872 cm^-3. The long gate region is of the material Silicon with a length of 0.11 micrometers and it is doped with Arsenic at a concentration of 84118973009238900736 cm^-3. The drain region is of the material Diamond with a length of 0.8 micrometers and it is doped with Phosphorus at a concentration of 883531415981004554240 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.007) (define Lgs 0.53) (define Lgl 0.11) (define Ltotal (+ Lgs Lgl)) (define Ls 0.8) (define Ld 0.8) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 190901713548097748992 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 794502601485077839872 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 84118973009238900736 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 883531415981004554240 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
122
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.36 micrometers and it is doped with Arsenic at a concentration of 745098460787931348992 cm^-3. The short gate region is of the material Diamond with a length of 0.44 micrometers and it is doped with Phosphorus at a concentration of 895237166514961645568 cm^-3. The long gate region is of the material SiGe with a length of 0.94 micrometers and it is doped with Phosphorus at a concentration of 246274308515387736064 cm^-3. The drain region is of the material GaN with a length of 0.36 micrometers and it is doped with Boron at a concentration of 806948833362947080192 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.003) (define Lgs 0.44) (define Lgl 0.94) (define Ltotal (+ Lgs Lgl)) (define Ls 0.36) (define Ld 0.36) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 745098460787931348992 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 895237166514961645568 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 246274308515387736064 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 806948833362947080192 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
123
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.02 micrometers and it is doped with Phosphorus at a concentration of 243743790691078832128 cm^-3. The short gate region is of the material Diamond with a length of 0.52 micrometers and it is doped with Boron at a concentration of 592165705978560774144 cm^-3. The long gate region is of the material Diamond with a length of 0.35 micrometers and it is doped with Boron at a concentration of 880623576079504506880 cm^-3. The drain region is of the material Germanium with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 650906701899753455616 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.007) (define Lgs 0.52) (define Lgl 0.35) (define Ltotal (+ Lgs Lgl)) (define Ls 0.02) (define Ld 0.02) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 243743790691078832128 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 592165705978560774144 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 880623576079504506880 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 650906701899753455616 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
124
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.99 micrometers and it is doped with Boron at a concentration of 278953349608555741184 cm^-3. The short gate region is of the material Silicon with a length of 0.6 micrometers and it is doped with Phosphorus at a concentration of 177931553902169587712 cm^-3. The long gate region is of the material Silicon with a length of 0.82 micrometers and it is doped with Arsenic at a concentration of 610484653716969095168 cm^-3. The drain region is of the material GaN with a length of 0.99 micrometers and it is doped with Phosphorus at a concentration of 803201961846182641664 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.002) (define Lgs 0.6) (define Lgl 0.82) (define Ltotal (+ Lgs Lgl)) (define Ls 0.99) (define Ld 0.99) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 278953349608555741184 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 177931553902169587712 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 610484653716969095168 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 803201961846182641664 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
125
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.56 micrometers and it is doped with Boron at a concentration of 300026043604343848960 cm^-3. The short gate region is of the material Silicon with a length of 0.32 micrometers and it is doped with Phosphorus at a concentration of 740963001596811542528 cm^-3. The long gate region is of the material Diamond with a length of 0.92 micrometers and it is doped with Phosphorus at a concentration of 114512188703281479680 cm^-3. The drain region is of the material Silicon with a length of 0.56 micrometers and it is doped with Boron at a concentration of 107459335017454944256 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.005) (define Lgs 0.32) (define Lgl 0.92) (define Ltotal (+ Lgs Lgl)) (define Ls 0.56) (define Ld 0.56) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 300026043604343848960 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 740963001596811542528 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 114512188703281479680 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 107459335017454944256 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
126
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.45 micrometers and it is doped with Arsenic at a concentration of 537653352189873356800 cm^-3. The short gate region is of the material SiGe with a length of 0.03 micrometers and it is doped with Boron at a concentration of 311292984800649805824 cm^-3. The long gate region is of the material Germanium with a length of 0.33 micrometers and it is doped with Arsenic at a concentration of 867224926041859162112 cm^-3. The drain region is of the material SiGe with a length of 0.45 micrometers and it is doped with Phosphorus at a concentration of 589164163255827562496 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.005) (define Lgs 0.03) (define Lgl 0.33) (define Ltotal (+ Lgs Lgl)) (define Ls 0.45) (define Ld 0.45) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 537653352189873356800 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 311292984800649805824 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 867224926041859162112 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 589164163255827562496 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
127
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 805926851692285919232 cm^-3. The short gate region is of the material Silicon with a length of 0.92 micrometers and it is doped with Arsenic at a concentration of 403476680077608091648 cm^-3. The long gate region is of the material SiGe with a length of 0.91 micrometers and it is doped with Boron at a concentration of 144834659493649088512 cm^-3. The drain region is of the material SiGe with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 33100621540896563200 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.002) (define Lgs 0.92) (define Lgl 0.91) (define Ltotal (+ Lgs Lgl)) (define Ls 0.82) (define Ld 0.82) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 805926851692285919232 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 403476680077608091648 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 144834659493649088512 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 33100621540896563200 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
128
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.03 micrometers and it is doped with Arsenic at a concentration of 195672869804549177344 cm^-3. The short gate region is of the material Germanium with a length of 0.43 micrometers and it is doped with Arsenic at a concentration of 90487280095019499520 cm^-3. The long gate region is of the material SiGe with a length of 0.16 micrometers and it is doped with Arsenic at a concentration of 515033189820419801088 cm^-3. The drain region is of the material SiGe with a length of 0.03 micrometers and it is doped with Boron at a concentration of 400648580969582821376 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.009) (define Lgs 0.43) (define Lgl 0.16) (define Ltotal (+ Lgs Lgl)) (define Ls 0.03) (define Ld 0.03) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 195672869804549177344 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 90487280095019499520 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 515033189820419801088 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 400648580969582821376 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
129
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.37 micrometers and it is doped with Boron at a concentration of 174818586916368056320 cm^-3. The short gate region is of the material GaN with a length of 0.25 micrometers and it is doped with Arsenic at a concentration of 767433542134869393408 cm^-3. The long gate region is of the material Silicon with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 418586411839053496320 cm^-3. The drain region is of the material Diamond with a length of 0.37 micrometers and it is doped with Boron at a concentration of 440528011394396979200 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.01) (define Lgs 0.25) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.37) (define Ld 0.37) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 174818586916368056320 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 767433542134869393408 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 418586411839053496320 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 440528011394396979200 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
130
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 1.0 micrometers and it is doped with Boron at a concentration of 637747952681522429952 cm^-3. The short gate region is of the material Silicon with a length of 0.94 micrometers and it is doped with Boron at a concentration of 593909434744044781568 cm^-3. The long gate region is of the material Silicon with a length of 0.17 micrometers and it is doped with Boron at a concentration of 399921084092366716928 cm^-3. The drain region is of the material GaN with a length of 1.0 micrometers and it is doped with Boron at a concentration of 682983846403084124160 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.003) (define Lgs 0.94) (define Lgl 0.17) (define Ltotal (+ Lgs Lgl)) (define Ls 1.0) (define Ld 1.0) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 637747952681522429952 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 593909434744044781568 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 399921084092366716928 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 682983846403084124160 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
131
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.58 micrometers and it is doped with Phosphorus at a concentration of 206658234394061242368 cm^-3. The short gate region is of the material Silicon with a length of 0.93 micrometers and it is doped with Boron at a concentration of 384699618626346549248 cm^-3. The long gate region is of the material Diamond with a length of 0.39 micrometers and it is doped with Phosphorus at a concentration of 383120073439878840320 cm^-3. The drain region is of the material Germanium with a length of 0.58 micrometers and it is doped with Boron at a concentration of 314797786506704191488 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.009) (define Lgs 0.93) (define Lgl 0.39) (define Ltotal (+ Lgs Lgl)) (define Ls 0.58) (define Ld 0.58) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 206658234394061242368 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 384699618626346549248 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 383120073439878840320 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 314797786506704191488 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
132
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.65 micrometers and it is doped with Phosphorus at a concentration of 949248685040440967168 cm^-3. The short gate region is of the material SiGe with a length of 0.84 micrometers and it is doped with Arsenic at a concentration of 947061252972308725760 cm^-3. The long gate region is of the material Silicon with a length of 0.62 micrometers and it is doped with Arsenic at a concentration of 153543299859889600 cm^-3. The drain region is of the material Diamond with a length of 0.65 micrometers and it is doped with Phosphorus at a concentration of 48438899907089104896 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.008) (define Lgs 0.84) (define Lgl 0.62) (define Ltotal (+ Lgs Lgl)) (define Ls 0.65) (define Ld 0.65) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 949248685040440967168 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 947061252972308725760 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 153543299859889600 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 48438899907089104896 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
133
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.02 micrometers and it is doped with Phosphorus at a concentration of 915717927534707867648 cm^-3. The short gate region is of the material Diamond with a length of 0.3 micrometers and it is doped with Arsenic at a concentration of 234045671353984057344 cm^-3. The long gate region is of the material Silicon with a length of 0.68 micrometers and it is doped with Phosphorus at a concentration of 935759912865260896256 cm^-3. The drain region is of the material SiGe with a length of 0.02 micrometers and it is doped with Boron at a concentration of 424287248688481042432 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.003) (define Lgs 0.3) (define Lgl 0.68) (define Ltotal (+ Lgs Lgl)) (define Ls 0.02) (define Ld 0.02) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 915717927534707867648 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 234045671353984057344 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 935759912865260896256 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 424287248688481042432 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
134
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 667657636131610951680 cm^-3. The short gate region is of the material Silicon with a length of 0.12 micrometers and it is doped with Arsenic at a concentration of 35891937941813776384 cm^-3. The long gate region is of the material GaN with a length of 0.29 micrometers and it is doped with Phosphorus at a concentration of 457533250973049290752 cm^-3. The drain region is of the material Diamond with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 891319044465828298752 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.009) (define Lgs 0.12) (define Lgl 0.29) (define Ltotal (+ Lgs Lgl)) (define Ls 0.59) (define Ld 0.59) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 667657636131610951680 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 35891937941813776384 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 457533250973049290752 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 891319044465828298752 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
135
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.36 micrometers and it is doped with Boron at a concentration of 957642162606698397696 cm^-3. The short gate region is of the material Silicon with a length of 0.34 micrometers and it is doped with Arsenic at a concentration of 766534862338058354688 cm^-3. The long gate region is of the material Diamond with a length of 0.93 micrometers and it is doped with Phosphorus at a concentration of 53889602716602048512 cm^-3. The drain region is of the material Silicon with a length of 0.36 micrometers and it is doped with Arsenic at a concentration of 318688352206580482048 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.004) (define Lgs 0.34) (define Lgl 0.93) (define Ltotal (+ Lgs Lgl)) (define Ls 0.36) (define Ld 0.36) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 957642162606698397696 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 766534862338058354688 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 53889602716602048512 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 318688352206580482048 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
136
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.51 micrometers and it is doped with Boron at a concentration of 790810529767689551872 cm^-3. The short gate region is of the material Germanium with a length of 0.9 micrometers and it is doped with Boron at a concentration of 821297073998988574720 cm^-3. The long gate region is of the material Silicon with a length of 0.75 micrometers and it is doped with Phosphorus at a concentration of 530676549089846362112 cm^-3. The drain region is of the material Diamond with a length of 0.51 micrometers and it is doped with Phosphorus at a concentration of 284878290997266219008 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.001) (define Lgs 0.9) (define Lgl 0.75) (define Ltotal (+ Lgs Lgl)) (define Ls 0.51) (define Ld 0.51) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 790810529767689551872 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 821297073998988574720 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 530676549089846362112 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 284878290997266219008 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
137
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.89 micrometers and it is doped with Boron at a concentration of 620206378650054557696 cm^-3. The short gate region is of the material Germanium with a length of 0.82 micrometers and it is doped with Boron at a concentration of 265769370380886474752 cm^-3. The long gate region is of the material Diamond with a length of 0.28 micrometers and it is doped with Arsenic at a concentration of 501825173387531517952 cm^-3. The drain region is of the material GaN with a length of 0.89 micrometers and it is doped with Arsenic at a concentration of 830057751382182854656 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.008) (define Lgs 0.82) (define Lgl 0.28) (define Ltotal (+ Lgs Lgl)) (define Ls 0.89) (define Ld 0.89) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 620206378650054557696 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 265769370380886474752 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 501825173387531517952 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 830057751382182854656 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
138
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.17 micrometers and it is doped with Phosphorus at a concentration of 667904939241264906240 cm^-3. The short gate region is of the material SiGe with a length of 0.53 micrometers and it is doped with Arsenic at a concentration of 174191473248409780224 cm^-3. The long gate region is of the material Germanium with a length of 0.67 micrometers and it is doped with Arsenic at a concentration of 839368532349699751936 cm^-3. The drain region is of the material SiGe with a length of 0.17 micrometers and it is doped with Arsenic at a concentration of 466870922255889727488 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.001) (define Lgs 0.53) (define Lgl 0.67) (define Ltotal (+ Lgs Lgl)) (define Ls 0.17) (define Ld 0.17) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 667904939241264906240 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 174191473248409780224 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 839368532349699751936 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 466870922255889727488 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
139
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.55 micrometers and it is doped with Boron at a concentration of 458967344056762892288 cm^-3. The short gate region is of the material SiGe with a length of 0.96 micrometers and it is doped with Arsenic at a concentration of 471144409740327780352 cm^-3. The long gate region is of the material Diamond with a length of 0.24 micrometers and it is doped with Boron at a concentration of 610882108285173891072 cm^-3. The drain region is of the material SiGe with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 43879006832843300864 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.009) (define Lgs 0.96) (define Lgl 0.24) (define Ltotal (+ Lgs Lgl)) (define Ls 0.55) (define Ld 0.55) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 458967344056762892288 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 471144409740327780352 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 610882108285173891072 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 43879006832843300864 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
140
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.05 micrometers and it is doped with Boron at a concentration of 313416745188488642560 cm^-3. The short gate region is of the material Diamond with a length of 0.03 micrometers and it is doped with Phosphorus at a concentration of 100654913722925285376 cm^-3. The long gate region is of the material Diamond with a length of 0.22 micrometers and it is doped with Phosphorus at a concentration of 181006528622625554432 cm^-3. The drain region is of the material SiGe with a length of 0.05 micrometers and it is doped with Boron at a concentration of 252625999941998870528 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.008) (define Lgs 0.03) (define Lgl 0.22) (define Ltotal (+ Lgs Lgl)) (define Ls 0.05) (define Ld 0.05) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 313416745188488642560 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 100654913722925285376 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 181006528622625554432 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 252625999941998870528 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
141
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.7 micrometers and it is doped with Boron at a concentration of 569916434850618933248 cm^-3. The short gate region is of the material Germanium with a length of 0.16 micrometers and it is doped with Boron at a concentration of 206586035863373086720 cm^-3. The long gate region is of the material SiGe with a length of 0.2 micrometers and it is doped with Boron at a concentration of 429620698147273572352 cm^-3. The drain region is of the material Diamond with a length of 0.7 micrometers and it is doped with Boron at a concentration of 837202403458825453568 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.006) (define Lgs 0.16) (define Lgl 0.2) (define Ltotal (+ Lgs Lgl)) (define Ls 0.7) (define Ld 0.7) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 569916434850618933248 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 206586035863373086720 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 429620698147273572352 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 837202403458825453568 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
142
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.44 micrometers and it is doped with Phosphorus at a concentration of 797388149285380816896 cm^-3. The short gate region is of the material Diamond with a length of 0.43 micrometers and it is doped with Phosphorus at a concentration of 944196917157391368192 cm^-3. The long gate region is of the material Diamond with a length of 0.26 micrometers and it is doped with Arsenic at a concentration of 127409737619356778496 cm^-3. The drain region is of the material Diamond with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 342132456334059634688 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.005) (define Lgs 0.43) (define Lgl 0.26) (define Ltotal (+ Lgs Lgl)) (define Ls 0.44) (define Ld 0.44) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 797388149285380816896 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 944196917157391368192 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 127409737619356778496 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 342132456334059634688 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
143
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.08 micrometers and it is doped with Phosphorus at a concentration of 712139191424574029824 cm^-3. The short gate region is of the material Germanium with a length of 0.48 micrometers and it is doped with Phosphorus at a concentration of 417202767259449688064 cm^-3. The long gate region is of the material SiGe with a length of 0.37 micrometers and it is doped with Phosphorus at a concentration of 142349000177149739008 cm^-3. The drain region is of the material Diamond with a length of 0.08 micrometers and it is doped with Phosphorus at a concentration of 676933620235688607744 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.002) (define Lgs 0.48) (define Lgl 0.37) (define Ltotal (+ Lgs Lgl)) (define Ls 0.08) (define Ld 0.08) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 712139191424574029824 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 417202767259449688064 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 142349000177149739008 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 676933620235688607744 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
144
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.39 micrometers and it is doped with Arsenic at a concentration of 514062198475595317248 cm^-3. The short gate region is of the material SiGe with a length of 0.9 micrometers and it is doped with Boron at a concentration of 869920038406223953920 cm^-3. The long gate region is of the material GaN with a length of 0.39 micrometers and it is doped with Boron at a concentration of 621049470317440532480 cm^-3. The drain region is of the material SiGe with a length of 0.39 micrometers and it is doped with Boron at a concentration of 440859496769959755776 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.007) (define Lgs 0.9) (define Lgl 0.39) (define Ltotal (+ Lgs Lgl)) (define Ls 0.39) (define Ld 0.39) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 514062198475595317248 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 869920038406223953920 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 621049470317440532480 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 440859496769959755776 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
145
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.71 micrometers and it is doped with Arsenic at a concentration of 474863206207224152064 cm^-3. The short gate region is of the material GaN with a length of 0.54 micrometers and it is doped with Phosphorus at a concentration of 539537900920461066240 cm^-3. The long gate region is of the material SiGe with a length of 0.17 micrometers and it is doped with Arsenic at a concentration of 445024301124744380416 cm^-3. The drain region is of the material GaN with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 333272726361673695232 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.006) (define Lgs 0.54) (define Lgl 0.17) (define Ltotal (+ Lgs Lgl)) (define Ls 0.71) (define Ld 0.71) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 474863206207224152064 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 539537900920461066240 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 445024301124744380416 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 333272726361673695232 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
146
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.05 micrometers and it is doped with Arsenic at a concentration of 657966017597761650688 cm^-3. The short gate region is of the material GaN with a length of 0.16 micrometers and it is doped with Arsenic at a concentration of 773011078843815428096 cm^-3. The long gate region is of the material Germanium with a length of 0.83 micrometers and it is doped with Phosphorus at a concentration of 316531488798833901568 cm^-3. The drain region is of the material Diamond with a length of 0.05 micrometers and it is doped with Boron at a concentration of 254746003780544692224 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.008) (define Lgs 0.16) (define Lgl 0.83) (define Ltotal (+ Lgs Lgl)) (define Ls 0.05) (define Ld 0.05) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 657966017597761650688 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 773011078843815428096 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 316531488798833901568 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 254746003780544692224 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
147
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.93 micrometers and it is doped with Arsenic at a concentration of 318645242554102317056 cm^-3. The short gate region is of the material Diamond with a length of 0.64 micrometers and it is doped with Boron at a concentration of 819179348142732345344 cm^-3. The long gate region is of the material Diamond with a length of 0.62 micrometers and it is doped with Phosphorus at a concentration of 294107675075755769856 cm^-3. The drain region is of the material GaN with a length of 0.93 micrometers and it is doped with Arsenic at a concentration of 592410928103601995776 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.005) (define Lgs 0.64) (define Lgl 0.62) (define Ltotal (+ Lgs Lgl)) (define Ls 0.93) (define Ld 0.93) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 318645242554102317056 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 819179348142732345344 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 294107675075755769856 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 592410928103601995776 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
148
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.5 micrometers and it is doped with Arsenic at a concentration of 109909688644027990016 cm^-3. The short gate region is of the material Diamond with a length of 0.23 micrometers and it is doped with Boron at a concentration of 125682844336190373888 cm^-3. The long gate region is of the material Germanium with a length of 0.1 micrometers and it is doped with Phosphorus at a concentration of 249957795668206059520 cm^-3. The drain region is of the material Diamond with a length of 0.5 micrometers and it is doped with Phosphorus at a concentration of 149618305751498293248 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.003) (define Lgs 0.23) (define Lgl 0.1) (define Ltotal (+ Lgs Lgl)) (define Ls 0.5) (define Ld 0.5) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 109909688644027990016 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 125682844336190373888 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 249957795668206059520 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 149618305751498293248 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
149
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.72 micrometers and it is doped with Phosphorus at a concentration of 373259333660447342592 cm^-3. The short gate region is of the material Germanium with a length of 0.78 micrometers and it is doped with Boron at a concentration of 486571858314175184896 cm^-3. The long gate region is of the material Diamond with a length of 0.96 micrometers and it is doped with Phosphorus at a concentration of 816312365639433584640 cm^-3. The drain region is of the material Diamond with a length of 0.72 micrometers and it is doped with Phosphorus at a concentration of 38507061599515951104 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.005) (define Lgs 0.78) (define Lgl 0.96) (define Ltotal (+ Lgs Lgl)) (define Ls 0.72) (define Ld 0.72) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 373259333660447342592 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 486571858314175184896 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 816312365639433584640 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 38507061599515951104 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
150
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.73 micrometers and it is doped with Phosphorus at a concentration of 846096597739483168768 cm^-3. The short gate region is of the material Silicon with a length of 0.21 micrometers and it is doped with Phosphorus at a concentration of 605027122416586194944 cm^-3. The long gate region is of the material SiGe with a length of 0.79 micrometers and it is doped with Boron at a concentration of 80647082023779729408 cm^-3. The drain region is of the material SiGe with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 763515725345293991936 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.006) (define Lgs 0.21) (define Lgl 0.79) (define Ltotal (+ Lgs Lgl)) (define Ls 0.73) (define Ld 0.73) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 846096597739483168768 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 605027122416586194944 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 80647082023779729408 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 763515725345293991936 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
151
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.74 micrometers and it is doped with Boron at a concentration of 280428173895418216448 cm^-3. The short gate region is of the material GaN with a length of 0.7 micrometers and it is doped with Arsenic at a concentration of 139474848421338284032 cm^-3. The long gate region is of the material Germanium with a length of 0.26 micrometers and it is doped with Phosphorus at a concentration of 830200126400327581696 cm^-3. The drain region is of the material Germanium with a length of 0.74 micrometers and it is doped with Phosphorus at a concentration of 848897905765982797824 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.004) (define Lgs 0.7) (define Lgl 0.26) (define Ltotal (+ Lgs Lgl)) (define Ls 0.74) (define Ld 0.74) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 280428173895418216448 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 139474848421338284032 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 830200126400327581696 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 848897905765982797824 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
152
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.36 micrometers and it is doped with Boron at a concentration of 883354630531040542720 cm^-3. The short gate region is of the material Germanium with a length of 0.43 micrometers and it is doped with Boron at a concentration of 814226836405503393792 cm^-3. The long gate region is of the material Germanium with a length of 0.46 micrometers and it is doped with Arsenic at a concentration of 29533894222387159040 cm^-3. The drain region is of the material Germanium with a length of 0.36 micrometers and it is doped with Boron at a concentration of 93596442815475400704 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.009) (define Lgs 0.43) (define Lgl 0.46) (define Ltotal (+ Lgs Lgl)) (define Ls 0.36) (define Ld 0.36) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 883354630531040542720 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 814226836405503393792 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 29533894222387159040 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 93596442815475400704 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
153
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.58 micrometers and it is doped with Boron at a concentration of 958744744820761821184 cm^-3. The short gate region is of the material Germanium with a length of 0.27 micrometers and it is doped with Phosphorus at a concentration of 29797608373375709184 cm^-3. The long gate region is of the material Silicon with a length of 0.71 micrometers and it is doped with Boron at a concentration of 427797373046541647872 cm^-3. The drain region is of the material GaN with a length of 0.58 micrometers and it is doped with Arsenic at a concentration of 325747802959028420608 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.01) (define Lgs 0.27) (define Lgl 0.71) (define Ltotal (+ Lgs Lgl)) (define Ls 0.58) (define Ld 0.58) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 958744744820761821184 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 29797608373375709184 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 427797373046541647872 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 325747802959028420608 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
154
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.13 micrometers and it is doped with Phosphorus at a concentration of 946167956199018987520 cm^-3. The short gate region is of the material SiGe with a length of 0.79 micrometers and it is doped with Boron at a concentration of 216622778660371202048 cm^-3. The long gate region is of the material Diamond with a length of 0.85 micrometers and it is doped with Boron at a concentration of 511541877625176719360 cm^-3. The drain region is of the material SiGe with a length of 0.13 micrometers and it is doped with Boron at a concentration of 974856264288630210560 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.007) (define Lgs 0.79) (define Lgl 0.85) (define Ltotal (+ Lgs Lgl)) (define Ls 0.13) (define Ld 0.13) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 946167956199018987520 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 216622778660371202048 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 511541877625176719360 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 974856264288630210560 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
155
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 488154232897054834688 cm^-3. The short gate region is of the material SiGe with a length of 0.43 micrometers and it is doped with Phosphorus at a concentration of 122944881006722072576 cm^-3. The long gate region is of the material SiGe with a length of 0.3 micrometers and it is doped with Boron at a concentration of 432718819945463283712 cm^-3. The drain region is of the material Germanium with a length of 0.71 micrometers and it is doped with Boron at a concentration of 829014511565869023232 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.008) (define Lgs 0.43) (define Lgl 0.3) (define Ltotal (+ Lgs Lgl)) (define Ls 0.71) (define Ld 0.71) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 488154232897054834688 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 122944881006722072576 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 432718819945463283712 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 829014511565869023232 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
156
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.16 micrometers and it is doped with Boron at a concentration of 422271509944118149120 cm^-3. The short gate region is of the material SiGe with a length of 0.97 micrometers and it is doped with Phosphorus at a concentration of 967353000663485906944 cm^-3. The long gate region is of the material SiGe with a length of 0.15 micrometers and it is doped with Boron at a concentration of 300511657478466043904 cm^-3. The drain region is of the material GaN with a length of 0.16 micrometers and it is doped with Boron at a concentration of 564443860659127058432 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.009) (define Lgs 0.97) (define Lgl 0.15) (define Ltotal (+ Lgs Lgl)) (define Ls 0.16) (define Ld 0.16) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 422271509944118149120 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 967353000663485906944 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 300511657478466043904 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 564443860659127058432 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
157
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.14 micrometers and it is doped with Boron at a concentration of 444185824819747356672 cm^-3. The short gate region is of the material Diamond with a length of 0.98 micrometers and it is doped with Boron at a concentration of 976557045520411525120 cm^-3. The long gate region is of the material SiGe with a length of 0.21 micrometers and it is doped with Boron at a concentration of 241625004543484985344 cm^-3. The drain region is of the material Germanium with a length of 0.14 micrometers and it is doped with Phosphorus at a concentration of 429055744230986743808 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.004) (define Lgs 0.98) (define Lgl 0.21) (define Ltotal (+ Lgs Lgl)) (define Ls 0.14) (define Ld 0.14) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 444185824819747356672 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 976557045520411525120 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 241625004543484985344 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 429055744230986743808 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
158
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.17 micrometers and it is doped with Phosphorus at a concentration of 867304694110127390720 cm^-3. The short gate region is of the material GaN with a length of 0.36 micrometers and it is doped with Arsenic at a concentration of 966302915846698434560 cm^-3. The long gate region is of the material GaN with a length of 0.78 micrometers and it is doped with Arsenic at a concentration of 340042974961498718208 cm^-3. The drain region is of the material GaN with a length of 0.17 micrometers and it is doped with Boron at a concentration of 724212287413238759424 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.01) (define Lgs 0.36) (define Lgl 0.78) (define Ltotal (+ Lgs Lgl)) (define Ls 0.17) (define Ld 0.17) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 867304694110127390720 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 966302915846698434560 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 340042974961498718208 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 724212287413238759424 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
159
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.15 micrometers and it is doped with Boron at a concentration of 466192839886735671296 cm^-3. The short gate region is of the material Germanium with a length of 0.56 micrometers and it is doped with Phosphorus at a concentration of 419929432702097817600 cm^-3. The long gate region is of the material SiGe with a length of 0.61 micrometers and it is doped with Phosphorus at a concentration of 109815160440412897280 cm^-3. The drain region is of the material Germanium with a length of 0.15 micrometers and it is doped with Phosphorus at a concentration of 127768222816452935680 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.002) (define Lgs 0.56) (define Lgl 0.61) (define Ltotal (+ Lgs Lgl)) (define Ls 0.15) (define Ld 0.15) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 466192839886735671296 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 419929432702097817600 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 109815160440412897280 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 127768222816452935680 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
160
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.24 micrometers and it is doped with Phosphorus at a concentration of 9054695966939599872 cm^-3. The short gate region is of the material Silicon with a length of 0.07 micrometers and it is doped with Boron at a concentration of 787664363953363615744 cm^-3. The long gate region is of the material Silicon with a length of 0.14 micrometers and it is doped with Phosphorus at a concentration of 443789826913516519424 cm^-3. The drain region is of the material Silicon with a length of 0.24 micrometers and it is doped with Phosphorus at a concentration of 152590790757045043200 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.008) (define Lgs 0.07) (define Lgl 0.14) (define Ltotal (+ Lgs Lgl)) (define Ls 0.24) (define Ld 0.24) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 9054695966939599872 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 787664363953363615744 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 443789826913516519424 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 152590790757045043200 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
161
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.35 micrometers and it is doped with Phosphorus at a concentration of 286857162994777194496 cm^-3. The short gate region is of the material Diamond with a length of 0.15 micrometers and it is doped with Arsenic at a concentration of 538617757655308566528 cm^-3. The long gate region is of the material SiGe with a length of 0.66 micrometers and it is doped with Phosphorus at a concentration of 622496442964930592768 cm^-3. The drain region is of the material Silicon with a length of 0.35 micrometers and it is doped with Boron at a concentration of 120633666936909070336 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.004) (define Lgs 0.15) (define Lgl 0.66) (define Ltotal (+ Lgs Lgl)) (define Ls 0.35) (define Ld 0.35) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 286857162994777194496 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 538617757655308566528 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 622496442964930592768 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 120633666936909070336 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
162
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.51 micrometers and it is doped with Arsenic at a concentration of 360994565407523602432 cm^-3. The short gate region is of the material SiGe with a length of 0.6 micrometers and it is doped with Boron at a concentration of 210815714170917224448 cm^-3. The long gate region is of the material Diamond with a length of 0.64 micrometers and it is doped with Phosphorus at a concentration of 611378381150289133568 cm^-3. The drain region is of the material Germanium with a length of 0.51 micrometers and it is doped with Boron at a concentration of 968969252744003059712 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.003) (define Lgs 0.6) (define Lgl 0.64) (define Ltotal (+ Lgs Lgl)) (define Ls 0.51) (define Ld 0.51) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 360994565407523602432 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 210815714170917224448 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 611378381150289133568 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 968969252744003059712 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
163
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.31 micrometers and it is doped with Arsenic at a concentration of 94692321163968462848 cm^-3. The short gate region is of the material Germanium with a length of 0.22 micrometers and it is doped with Arsenic at a concentration of 121083126956886769664 cm^-3. The long gate region is of the material Germanium with a length of 0.49 micrometers and it is doped with Boron at a concentration of 109354072174681473024 cm^-3. The drain region is of the material Germanium with a length of 0.31 micrometers and it is doped with Boron at a concentration of 961736858965219213312 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.004) (define Lgs 0.22) (define Lgl 0.49) (define Ltotal (+ Lgs Lgl)) (define Ls 0.31) (define Ld 0.31) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 94692321163968462848 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 121083126956886769664 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 109354072174681473024 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 961736858965219213312 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
164
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.79 micrometers and it is doped with Boron at a concentration of 672964375500376899584 cm^-3. The short gate region is of the material Silicon with a length of 0.93 micrometers and it is doped with Boron at a concentration of 44834216693551915008 cm^-3. The long gate region is of the material Germanium with a length of 0.98 micrometers and it is doped with Phosphorus at a concentration of 286374069804931252224 cm^-3. The drain region is of the material GaN with a length of 0.79 micrometers and it is doped with Arsenic at a concentration of 546532593495668686848 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.01) (define Lgs 0.93) (define Lgl 0.98) (define Ltotal (+ Lgs Lgl)) (define Ls 0.79) (define Ld 0.79) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 672964375500376899584 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 44834216693551915008 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 286374069804931252224 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 546532593495668686848 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
165
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.43 micrometers and it is doped with Arsenic at a concentration of 631249100033440874496 cm^-3. The short gate region is of the material Germanium with a length of 0.56 micrometers and it is doped with Arsenic at a concentration of 186390858689589575680 cm^-3. The long gate region is of the material Diamond with a length of 0.68 micrometers and it is doped with Phosphorus at a concentration of 3831718347622502912 cm^-3. The drain region is of the material Silicon with a length of 0.43 micrometers and it is doped with Arsenic at a concentration of 317603506559764398080 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.009) (define Lgs 0.56) (define Lgl 0.68) (define Ltotal (+ Lgs Lgl)) (define Ls 0.43) (define Ld 0.43) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 631249100033440874496 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 186390858689589575680 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 3831718347622502912 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 317603506559764398080 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
166
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 495487504826127089664 cm^-3. The short gate region is of the material Silicon with a length of 0.09 micrometers and it is doped with Boron at a concentration of 332252699787707023360 cm^-3. The long gate region is of the material Diamond with a length of 0.11 micrometers and it is doped with Arsenic at a concentration of 213084554112062685184 cm^-3. The drain region is of the material GaN with a length of 0.44 micrometers and it is doped with Phosphorus at a concentration of 762404966340389240832 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.01) (define Lgs 0.09) (define Lgl 0.11) (define Ltotal (+ Lgs Lgl)) (define Ls 0.44) (define Ld 0.44) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 495487504826127089664 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 332252699787707023360 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 213084554112062685184 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 762404966340389240832 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
167
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.15 micrometers and it is doped with Phosphorus at a concentration of 401961789932834652160 cm^-3. The short gate region is of the material GaN with a length of 0.28 micrometers and it is doped with Arsenic at a concentration of 815020087269688082432 cm^-3. The long gate region is of the material Silicon with a length of 0.05 micrometers and it is doped with Boron at a concentration of 118960875939185295360 cm^-3. The drain region is of the material Diamond with a length of 0.15 micrometers and it is doped with Boron at a concentration of 706742037765672140800 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.006) (define Lgs 0.28) (define Lgl 0.05) (define Ltotal (+ Lgs Lgl)) (define Ls 0.15) (define Ld 0.15) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 401961789932834652160 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 815020087269688082432 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 118960875939185295360 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 706742037765672140800 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
168
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.78 micrometers and it is doped with Arsenic at a concentration of 482818389166889893888 cm^-3. The short gate region is of the material GaN with a length of 0.45 micrometers and it is doped with Arsenic at a concentration of 475982370046159880192 cm^-3. The long gate region is of the material Germanium with a length of 0.07 micrometers and it is doped with Boron at a concentration of 619069625385863872512 cm^-3. The drain region is of the material SiGe with a length of 0.78 micrometers and it is doped with Phosphorus at a concentration of 114390334590203445248 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.007) (define Lgs 0.45) (define Lgl 0.07) (define Ltotal (+ Lgs Lgl)) (define Ls 0.78) (define Ld 0.78) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 482818389166889893888 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 475982370046159880192 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 619069625385863872512 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 114390334590203445248 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
169
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.57 micrometers and it is doped with Phosphorus at a concentration of 232686260182453747712 cm^-3. The short gate region is of the material SiGe with a length of 0.09 micrometers and it is doped with Phosphorus at a concentration of 324047091427228909568 cm^-3. The long gate region is of the material SiGe with a length of 0.92 micrometers and it is doped with Arsenic at a concentration of 873745409985285455872 cm^-3. The drain region is of the material Silicon with a length of 0.57 micrometers and it is doped with Arsenic at a concentration of 719678167477935407104 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.003) (define Lgs 0.09) (define Lgl 0.92) (define Ltotal (+ Lgs Lgl)) (define Ls 0.57) (define Ld 0.57) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 232686260182453747712 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 324047091427228909568 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 873745409985285455872 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 719678167477935407104 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
170
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.46 micrometers and it is doped with Arsenic at a concentration of 195649415363186753536 cm^-3. The short gate region is of the material Germanium with a length of 0.47 micrometers and it is doped with Arsenic at a concentration of 794754302973167271936 cm^-3. The long gate region is of the material SiGe with a length of 0.76 micrometers and it is doped with Arsenic at a concentration of 278490792197221253120 cm^-3. The drain region is of the material SiGe with a length of 0.46 micrometers and it is doped with Phosphorus at a concentration of 439453013595781595136 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.003) (define Lgs 0.47) (define Lgl 0.76) (define Ltotal (+ Lgs Lgl)) (define Ls 0.46) (define Ld 0.46) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 195649415363186753536 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 794754302973167271936 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 278490792197221253120 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 439453013595781595136 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
171
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.79 micrometers and it is doped with Phosphorus at a concentration of 423166003026403786752 cm^-3. The short gate region is of the material Diamond with a length of 0.83 micrometers and it is doped with Boron at a concentration of 280040826379788451840 cm^-3. The long gate region is of the material Silicon with a length of 0.09 micrometers and it is doped with Boron at a concentration of 811671869510455918592 cm^-3. The drain region is of the material SiGe with a length of 0.79 micrometers and it is doped with Boron at a concentration of 435032531361222754304 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.003) (define Lgs 0.83) (define Lgl 0.09) (define Ltotal (+ Lgs Lgl)) (define Ls 0.79) (define Ld 0.79) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 423166003026403786752 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 280040826379788451840 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 811671869510455918592 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 435032531361222754304 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
172
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.72 micrometers and it is doped with Arsenic at a concentration of 813711824297447784448 cm^-3. The short gate region is of the material Germanium with a length of 0.77 micrometers and it is doped with Boron at a concentration of 223752942893521108992 cm^-3. The long gate region is of the material SiGe with a length of 0.82 micrometers and it is doped with Boron at a concentration of 656379067710841552896 cm^-3. The drain region is of the material SiGe with a length of 0.72 micrometers and it is doped with Phosphorus at a concentration of 592458879696442621952 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.003) (define Lgs 0.77) (define Lgl 0.82) (define Ltotal (+ Lgs Lgl)) (define Ls 0.72) (define Ld 0.72) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 813711824297447784448 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 223752942893521108992 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 656379067710841552896 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 592458879696442621952 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
173
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.78 micrometers and it is doped with Arsenic at a concentration of 546785614500546609152 cm^-3. The short gate region is of the material GaN with a length of 0.45 micrometers and it is doped with Phosphorus at a concentration of 299021757676270256128 cm^-3. The long gate region is of the material Germanium with a length of 0.1 micrometers and it is doped with Phosphorus at a concentration of 762251205121248329728 cm^-3. The drain region is of the material SiGe with a length of 0.78 micrometers and it is doped with Boron at a concentration of 266539134087076904960 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.003) (define Lgs 0.45) (define Lgl 0.1) (define Ltotal (+ Lgs Lgl)) (define Ls 0.78) (define Ld 0.78) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 546785614500546609152 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 299021757676270256128 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 762251205121248329728 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 266539134087076904960 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
174
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.32 micrometers and it is doped with Boron at a concentration of 521142074023821967360 cm^-3. The short gate region is of the material Silicon with a length of 0.38 micrometers and it is doped with Arsenic at a concentration of 930887620564296269824 cm^-3. The long gate region is of the material GaN with a length of 0.15 micrometers and it is doped with Boron at a concentration of 212377666222145961984 cm^-3. The drain region is of the material Silicon with a length of 0.32 micrometers and it is doped with Arsenic at a concentration of 944145487375462432768 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.002) (define Lgs 0.38) (define Lgl 0.15) (define Ltotal (+ Lgs Lgl)) (define Ls 0.32) (define Ld 0.32) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 521142074023821967360 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 930887620564296269824 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 212377666222145961984 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 944145487375462432768 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
175
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.1 micrometers and it is doped with Phosphorus at a concentration of 331108735836354772992 cm^-3. The short gate region is of the material Silicon with a length of 0.24 micrometers and it is doped with Phosphorus at a concentration of 874968050104596037632 cm^-3. The long gate region is of the material GaN with a length of 0.92 micrometers and it is doped with Phosphorus at a concentration of 6150819395372061696 cm^-3. The drain region is of the material SiGe with a length of 0.1 micrometers and it is doped with Boron at a concentration of 673047095265105018880 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.002) (define Lgs 0.24) (define Lgl 0.92) (define Ltotal (+ Lgs Lgl)) (define Ls 0.1) (define Ld 0.1) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 331108735836354772992 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 874968050104596037632 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 6150819395372061696 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 673047095265105018880 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
176
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 692925776507204141056 cm^-3. The short gate region is of the material Germanium with a length of 0.97 micrometers and it is doped with Boron at a concentration of 869950039331014836224 cm^-3. The long gate region is of the material Germanium with a length of 0.42 micrometers and it is doped with Boron at a concentration of 93215477831067303936 cm^-3. The drain region is of the material SiGe with a length of 0.82 micrometers and it is doped with Arsenic at a concentration of 699488178356745797632 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.005) (define Lgs 0.97) (define Lgl 0.42) (define Ltotal (+ Lgs Lgl)) (define Ls 0.82) (define Ld 0.82) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 692925776507204141056 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 869950039331014836224 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 93215477831067303936 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 699488178356745797632 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
177
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.76 micrometers and it is doped with Boron at a concentration of 57028223835557396480 cm^-3. The short gate region is of the material Silicon with a length of 0.48 micrometers and it is doped with Arsenic at a concentration of 923712834056891793408 cm^-3. The long gate region is of the material GaN with a length of 0.69 micrometers and it is doped with Phosphorus at a concentration of 660058762201747816448 cm^-3. The drain region is of the material GaN with a length of 0.76 micrometers and it is doped with Boron at a concentration of 701313050157318930432 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.006) (define Lgs 0.48) (define Lgl 0.69) (define Ltotal (+ Lgs Lgl)) (define Ls 0.76) (define Ld 0.76) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 57028223835557396480 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 923712834056891793408 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 660058762201747816448 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 701313050157318930432 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
178
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.34 micrometers and it is doped with Phosphorus at a concentration of 967352757382876626944 cm^-3. The short gate region is of the material Silicon with a length of 0.49 micrometers and it is doped with Arsenic at a concentration of 179499449918523375616 cm^-3. The long gate region is of the material Diamond with a length of 0.82 micrometers and it is doped with Arsenic at a concentration of 484208292965173297152 cm^-3. The drain region is of the material GaN with a length of 0.34 micrometers and it is doped with Phosphorus at a concentration of 150264680996224892928 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.01) (define Lgs 0.49) (define Lgl 0.82) (define Ltotal (+ Lgs Lgl)) (define Ls 0.34) (define Ld 0.34) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 967352757382876626944 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 179499449918523375616 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 484208292965173297152 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 150264680996224892928 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
179
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.78 micrometers and it is doped with Arsenic at a concentration of 211424409735375781888 cm^-3. The short gate region is of the material Silicon with a length of 0.97 micrometers and it is doped with Boron at a concentration of 339193102664752168960 cm^-3. The long gate region is of the material GaN with a length of 0.84 micrometers and it is doped with Arsenic at a concentration of 406467561197660667904 cm^-3. The drain region is of the material GaN with a length of 0.78 micrometers and it is doped with Arsenic at a concentration of 392252674114546696192 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.01) (define Lgs 0.97) (define Lgl 0.84) (define Ltotal (+ Lgs Lgl)) (define Ls 0.78) (define Ld 0.78) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 211424409735375781888 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 339193102664752168960 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 406467561197660667904 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 392252674114546696192 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
180
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.11 micrometers and it is doped with Phosphorus at a concentration of 907889277806478884864 cm^-3. The short gate region is of the material Germanium with a length of 0.93 micrometers and it is doped with Phosphorus at a concentration of 385316964047257862144 cm^-3. The long gate region is of the material Silicon with a length of 0.32 micrometers and it is doped with Phosphorus at a concentration of 404915091234882715648 cm^-3. The drain region is of the material Diamond with a length of 0.11 micrometers and it is doped with Arsenic at a concentration of 667877781912409997312 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.002) (define Lgs 0.93) (define Lgl 0.32) (define Ltotal (+ Lgs Lgl)) (define Ls 0.11) (define Ld 0.11) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 907889277806478884864 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 385316964047257862144 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 404915091234882715648 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 667877781912409997312 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
181
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.09 micrometers and it is doped with Boron at a concentration of 140264875984195371008 cm^-3. The short gate region is of the material Silicon with a length of 0.41 micrometers and it is doped with Boron at a concentration of 82361516712867758080 cm^-3. The long gate region is of the material Diamond with a length of 0.16 micrometers and it is doped with Boron at a concentration of 642676295500516163584 cm^-3. The drain region is of the material Diamond with a length of 0.09 micrometers and it is doped with Boron at a concentration of 671897787688269381632 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.006) (define Lgs 0.41) (define Lgl 0.16) (define Ltotal (+ Lgs Lgl)) (define Ls 0.09) (define Ld 0.09) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 140264875984195371008 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 82361516712867758080 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 642676295500516163584 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 671897787688269381632 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
182
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.57 micrometers and it is doped with Arsenic at a concentration of 397373065281891860480 cm^-3. The short gate region is of the material Silicon with a length of 0.09 micrometers and it is doped with Phosphorus at a concentration of 428218715455684476928 cm^-3. The long gate region is of the material Silicon with a length of 0.11 micrometers and it is doped with Phosphorus at a concentration of 896815314657360609280 cm^-3. The drain region is of the material SiGe with a length of 0.57 micrometers and it is doped with Arsenic at a concentration of 949334651803030913024 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.008) (define Lgs 0.09) (define Lgl 0.11) (define Ltotal (+ Lgs Lgl)) (define Ls 0.57) (define Ld 0.57) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 397373065281891860480 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 428218715455684476928 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 896815314657360609280 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 949334651803030913024 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
183
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.31 micrometers and it is doped with Boron at a concentration of 661789982380634669056 cm^-3. The short gate region is of the material Germanium with a length of 0.79 micrometers and it is doped with Arsenic at a concentration of 800883402232740446208 cm^-3. The long gate region is of the material Diamond with a length of 0.68 micrometers and it is doped with Phosphorus at a concentration of 894149783623464779776 cm^-3. The drain region is of the material Germanium with a length of 0.31 micrometers and it is doped with Boron at a concentration of 191086940680223490048 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.008) (define Lgs 0.79) (define Lgl 0.68) (define Ltotal (+ Lgs Lgl)) (define Ls 0.31) (define Ld 0.31) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 661789982380634669056 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 800883402232740446208 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 894149783623464779776 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 191086940680223490048 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
184
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.91 micrometers and it is doped with Boron at a concentration of 947182961796559273984 cm^-3. The short gate region is of the material Diamond with a length of 1.0 micrometers and it is doped with Phosphorus at a concentration of 611308697837229965312 cm^-3. The long gate region is of the material Germanium with a length of 0.32 micrometers and it is doped with Phosphorus at a concentration of 934657181077958950912 cm^-3. The drain region is of the material Germanium with a length of 0.91 micrometers and it is doped with Boron at a concentration of 45751640264485502976 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.002) (define Lgs 1.0) (define Lgl 0.32) (define Ltotal (+ Lgs Lgl)) (define Ls 0.91) (define Ld 0.91) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 947182961796559273984 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 611308697837229965312 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 934657181077958950912 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 45751640264485502976 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
185
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.74 micrometers and it is doped with Boron at a concentration of 915429025211896430592 cm^-3. The short gate region is of the material Germanium with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 694423736611712139264 cm^-3. The long gate region is of the material Silicon with a length of 0.14 micrometers and it is doped with Phosphorus at a concentration of 480555738377249751040 cm^-3. The drain region is of the material Diamond with a length of 0.74 micrometers and it is doped with Phosphorus at a concentration of 118282310175416745984 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.008) (define Lgs 0.55) (define Lgl 0.14) (define Ltotal (+ Lgs Lgl)) (define Ls 0.74) (define Ld 0.74) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 915429025211896430592 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 694423736611712139264 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 480555738377249751040 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 118282310175416745984 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
186
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.26 micrometers and it is doped with Phosphorus at a concentration of 438515908610188640256 cm^-3. The short gate region is of the material Germanium with a length of 0.22 micrometers and it is doped with Boron at a concentration of 877035522675728711680 cm^-3. The long gate region is of the material SiGe with a length of 0.92 micrometers and it is doped with Arsenic at a concentration of 448516008380309831680 cm^-3. The drain region is of the material Silicon with a length of 0.26 micrometers and it is doped with Phosphorus at a concentration of 663687842317911719936 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.006) (define Lgs 0.22) (define Lgl 0.92) (define Ltotal (+ Lgs Lgl)) (define Ls 0.26) (define Ld 0.26) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 438515908610188640256 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 877035522675728711680 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 448516008380309831680 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 663687842317911719936 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
187
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.84 micrometers and it is doped with Phosphorus at a concentration of 842268822488295145472 cm^-3. The short gate region is of the material SiGe with a length of 0.41 micrometers and it is doped with Phosphorus at a concentration of 533343944759678599168 cm^-3. The long gate region is of the material SiGe with a length of 0.77 micrometers and it is doped with Boron at a concentration of 562903268412104376320 cm^-3. The drain region is of the material Silicon with a length of 0.84 micrometers and it is doped with Arsenic at a concentration of 198209256259217653760 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.005) (define Lgs 0.41) (define Lgl 0.77) (define Ltotal (+ Lgs Lgl)) (define Ls 0.84) (define Ld 0.84) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 842268822488295145472 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 533343944759678599168 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 562903268412104376320 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 198209256259217653760 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
188
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.81 micrometers and it is doped with Phosphorus at a concentration of 254122553123088302080 cm^-3. The short gate region is of the material Germanium with a length of 0.04 micrometers and it is doped with Phosphorus at a concentration of 860932762761927983104 cm^-3. The long gate region is of the material Germanium with a length of 0.25 micrometers and it is doped with Arsenic at a concentration of 634652540141312671744 cm^-3. The drain region is of the material GaN with a length of 0.81 micrometers and it is doped with Boron at a concentration of 850599141237103263744 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.01) (define Lgs 0.04) (define Lgl 0.25) (define Ltotal (+ Lgs Lgl)) (define Ls 0.81) (define Ld 0.81) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 254122553123088302080 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 860932762761927983104 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 634652540141312671744 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 850599141237103263744 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
189
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.46 micrometers and it is doped with Phosphorus at a concentration of 525619069659447689216 cm^-3. The short gate region is of the material Silicon with a length of 0.92 micrometers and it is doped with Phosphorus at a concentration of 879829381932836585472 cm^-3. The long gate region is of the material Diamond with a length of 0.94 micrometers and it is doped with Boron at a concentration of 774343144490363650048 cm^-3. The drain region is of the material Germanium with a length of 0.46 micrometers and it is doped with Boron at a concentration of 527517919913523937280 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.008) (define Lgs 0.92) (define Lgl 0.94) (define Ltotal (+ Lgs Lgl)) (define Ls 0.46) (define Ld 0.46) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 525619069659447689216 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 879829381932836585472 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 774343144490363650048 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 527517919913523937280 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
190
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.04 micrometers and it is doped with Arsenic at a concentration of 173049535661405863936 cm^-3. The short gate region is of the material Silicon with a length of 0.89 micrometers and it is doped with Phosphorus at a concentration of 485943718776036917248 cm^-3. The long gate region is of the material Silicon with a length of 0.51 micrometers and it is doped with Boron at a concentration of 683192599228146909184 cm^-3. The drain region is of the material Silicon with a length of 0.04 micrometers and it is doped with Boron at a concentration of 419348113097027354624 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.009) (define Lgs 0.89) (define Lgl 0.51) (define Ltotal (+ Lgs Lgl)) (define Ls 0.04) (define Ld 0.04) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 173049535661405863936 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 485943718776036917248 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 683192599228146909184 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 419348113097027354624 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
191
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.38 micrometers and it is doped with Arsenic at a concentration of 321953597061936971776 cm^-3. The short gate region is of the material GaN with a length of 0.21 micrometers and it is doped with Phosphorus at a concentration of 436637219293254647808 cm^-3. The long gate region is of the material SiGe with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 618309533583349645312 cm^-3. The drain region is of the material Diamond with a length of 0.38 micrometers and it is doped with Boron at a concentration of 586337367173661065216 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.005) (define Lgs 0.21) (define Lgl 0.61) (define Ltotal (+ Lgs Lgl)) (define Ls 0.38) (define Ld 0.38) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 321953597061936971776 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 436637219293254647808 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 618309533583349645312 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 586337367173661065216 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
192
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.44 micrometers and it is doped with Phosphorus at a concentration of 326489432404216119296 cm^-3. The short gate region is of the material Diamond with a length of 0.73 micrometers and it is doped with Phosphorus at a concentration of 902164232831191613440 cm^-3. The long gate region is of the material Silicon with a length of 0.54 micrometers and it is doped with Arsenic at a concentration of 323422942842840285184 cm^-3. The drain region is of the material SiGe with a length of 0.44 micrometers and it is doped with Phosphorus at a concentration of 928421895586014822400 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.001) (define Lgs 0.73) (define Lgl 0.54) (define Ltotal (+ Lgs Lgl)) (define Ls 0.44) (define Ld 0.44) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 326489432404216119296 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 902164232831191613440 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 323422942842840285184 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 928421895586014822400 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
193
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.95 micrometers and it is doped with Phosphorus at a concentration of 931680949189723291648 cm^-3. The short gate region is of the material Silicon with a length of 0.5 micrometers and it is doped with Boron at a concentration of 114949928966513016832 cm^-3. The long gate region is of the material GaN with a length of 0.72 micrometers and it is doped with Phosphorus at a concentration of 330068992050161516544 cm^-3. The drain region is of the material Diamond with a length of 0.95 micrometers and it is doped with Arsenic at a concentration of 330973284889669926912 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.002) (define Lgs 0.5) (define Lgl 0.72) (define Ltotal (+ Lgs Lgl)) (define Ls 0.95) (define Ld 0.95) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 931680949189723291648 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 114949928966513016832 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 330068992050161516544 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 330973284889669926912 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
194
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.71 micrometers and it is doped with Arsenic at a concentration of 816668897111046225920 cm^-3. The short gate region is of the material SiGe with a length of 0.79 micrometers and it is doped with Phosphorus at a concentration of 175953148322309865472 cm^-3. The long gate region is of the material GaN with a length of 0.93 micrometers and it is doped with Arsenic at a concentration of 466652108891032911872 cm^-3. The drain region is of the material SiGe with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 624675005541378162688 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.003) (define Lgs 0.79) (define Lgl 0.93) (define Ltotal (+ Lgs Lgl)) (define Ls 0.71) (define Ld 0.71) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 816668897111046225920 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 175953148322309865472 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 466652108891032911872 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 624675005541378162688 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
195
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.88 micrometers and it is doped with Phosphorus at a concentration of 966907099106286239744 cm^-3. The short gate region is of the material Germanium with a length of 0.89 micrometers and it is doped with Arsenic at a concentration of 879795825439149391872 cm^-3. The long gate region is of the material Diamond with a length of 0.46 micrometers and it is doped with Arsenic at a concentration of 501572125232564404224 cm^-3. The drain region is of the material Diamond with a length of 0.88 micrometers and it is doped with Boron at a concentration of 121759580125916020736 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.002) (define Lgs 0.89) (define Lgl 0.46) (define Ltotal (+ Lgs Lgl)) (define Ls 0.88) (define Ld 0.88) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 966907099106286239744 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 879795825439149391872 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 501572125232564404224 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 121759580125916020736 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
196
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.97 micrometers and it is doped with Phosphorus at a concentration of 641826999625980182528 cm^-3. The short gate region is of the material Silicon with a length of 0.22 micrometers and it is doped with Boron at a concentration of 915415975188830486528 cm^-3. The long gate region is of the material Germanium with a length of 0.38 micrometers and it is doped with Arsenic at a concentration of 670296157553569824768 cm^-3. The drain region is of the material SiGe with a length of 0.97 micrometers and it is doped with Boron at a concentration of 512783589310793646080 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.008) (define Lgs 0.22) (define Lgl 0.38) (define Ltotal (+ Lgs Lgl)) (define Ls 0.97) (define Ld 0.97) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 641826999625980182528 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 915415975188830486528 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 670296157553569824768 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 512783589310793646080 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
197
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.55 micrometers and it is doped with Boron at a concentration of 406878165138736414720 cm^-3. The short gate region is of the material SiGe with a length of 0.96 micrometers and it is doped with Boron at a concentration of 424216782314833182720 cm^-3. The long gate region is of the material Silicon with a length of 0.26 micrometers and it is doped with Arsenic at a concentration of 979358200039718256640 cm^-3. The drain region is of the material Diamond with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 11576017441481181184 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.001) (define Lgs 0.96) (define Lgl 0.26) (define Ltotal (+ Lgs Lgl)) (define Ls 0.55) (define Ld 0.55) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 406878165138736414720 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 424216782314833182720 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 979358200039718256640 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 11576017441481181184 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
198
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.66 micrometers and it is doped with Boron at a concentration of 321004555681614659584 cm^-3. The short gate region is of the material GaN with a length of 0.64 micrometers and it is doped with Boron at a concentration of 976801162190870413312 cm^-3. The long gate region is of the material Diamond with a length of 0.18 micrometers and it is doped with Phosphorus at a concentration of 210733948080645701632 cm^-3. The drain region is of the material Diamond with a length of 0.66 micrometers and it is doped with Phosphorus at a concentration of 90919245898046472192 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.005) (define Lgs 0.64) (define Lgl 0.18) (define Ltotal (+ Lgs Lgl)) (define Ls 0.66) (define Ld 0.66) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 321004555681614659584 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 976801162190870413312 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 210733948080645701632 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 90919245898046472192 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
199
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.82 micrometers and it is doped with Boron at a concentration of 62038593368250703872 cm^-3. The short gate region is of the material Germanium with a length of 0.34 micrometers and it is doped with Arsenic at a concentration of 950627587783517274112 cm^-3. The long gate region is of the material Diamond with a length of 0.86 micrometers and it is doped with Arsenic at a concentration of 880222044041663479808 cm^-3. The drain region is of the material GaN with a length of 0.82 micrometers and it is doped with Boron at a concentration of 555452366255843049472 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.006) (define Lgs 0.34) (define Lgl 0.86) (define Ltotal (+ Lgs Lgl)) (define Ls 0.82) (define Ld 0.82) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 62038593368250703872 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 950627587783517274112 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 880222044041663479808 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 555452366255843049472 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")