Search is not available for this dataset
int64
0
2k
instruction
stringlengths
945
985
output
stringlengths
5.12k
5.16k
300
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.09 micrometers and it is doped with Phosphorus at a concentration of 161634023235503620096 cm^-3. The short gate region is of the material Diamond with a length of 0.77 micrometers and it is doped with Arsenic at a concentration of 385282827513850232832 cm^-3. The long gate region is of the material Diamond with a length of 0.74 micrometers and it is doped with Arsenic at a concentration of 163932141718196224000 cm^-3. The drain region is of the material GaN with a length of 0.09 micrometers and it is doped with Arsenic at a concentration of 160718812245472739328 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.005) (define Lgs 0.77) (define Lgl 0.74) (define Ltotal (+ Lgs Lgl)) (define Ls 0.09) (define Ld 0.09) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 161634023235503620096 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 385282827513850232832 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 163932141718196224000 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 160718812245472739328 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
301
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.74 micrometers and it is doped with Arsenic at a concentration of 104193882992447062016 cm^-3. The short gate region is of the material GaN with a length of 0.38 micrometers and it is doped with Boron at a concentration of 543988997790337466368 cm^-3. The long gate region is of the material Germanium with a length of 0.94 micrometers and it is doped with Arsenic at a concentration of 292900241803930402816 cm^-3. The drain region is of the material GaN with a length of 0.74 micrometers and it is doped with Arsenic at a concentration of 713929308918390456320 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.006) (define Lgs 0.38) (define Lgl 0.94) (define Ltotal (+ Lgs Lgl)) (define Ls 0.74) (define Ld 0.74) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 104193882992447062016 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 543988997790337466368 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 292900241803930402816 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 713929308918390456320 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
302
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.5 micrometers and it is doped with Phosphorus at a concentration of 987211472643177971712 cm^-3. The short gate region is of the material Diamond with a length of 0.25 micrometers and it is doped with Boron at a concentration of 129955702252576456704 cm^-3. The long gate region is of the material Germanium with a length of 0.63 micrometers and it is doped with Phosphorus at a concentration of 602550538193933172736 cm^-3. The drain region is of the material SiGe with a length of 0.5 micrometers and it is doped with Boron at a concentration of 505601482193026940928 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.009) (define Lgs 0.25) (define Lgl 0.63) (define Ltotal (+ Lgs Lgl)) (define Ls 0.5) (define Ld 0.5) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 987211472643177971712 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 129955702252576456704 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 602550538193933172736 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 505601482193026940928 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
303
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.8 micrometers and it is doped with Phosphorus at a concentration of 359905125392800940032 cm^-3. The short gate region is of the material SiGe with a length of 0.99 micrometers and it is doped with Phosphorus at a concentration of 895277701309192077312 cm^-3. The long gate region is of the material GaN with a length of 0.62 micrometers and it is doped with Phosphorus at a concentration of 499496331139718316032 cm^-3. The drain region is of the material Germanium with a length of 0.8 micrometers and it is doped with Phosphorus at a concentration of 847669677980708372480 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.009) (define Lgs 0.99) (define Lgl 0.62) (define Ltotal (+ Lgs Lgl)) (define Ls 0.8) (define Ld 0.8) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 359905125392800940032 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 895277701309192077312 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 499496331139718316032 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 847669677980708372480 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
304
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.88 micrometers and it is doped with Phosphorus at a concentration of 966468596805582323712 cm^-3. The short gate region is of the material Germanium with a length of 0.88 micrometers and it is doped with Boron at a concentration of 398913307639215947776 cm^-3. The long gate region is of the material Germanium with a length of 0.36 micrometers and it is doped with Phosphorus at a concentration of 698154068724973568000 cm^-3. The drain region is of the material GaN with a length of 0.88 micrometers and it is doped with Boron at a concentration of 364940568007508099072 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.001) (define Lgs 0.88) (define Lgl 0.36) (define Ltotal (+ Lgs Lgl)) (define Ls 0.88) (define Ld 0.88) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 966468596805582323712 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 398913307639215947776 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 698154068724973568000 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 364940568007508099072 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
305
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.95 micrometers and it is doped with Phosphorus at a concentration of 622395814209477804032 cm^-3. The short gate region is of the material Silicon with a length of 0.48 micrometers and it is doped with Phosphorus at a concentration of 750789039266145107968 cm^-3. The long gate region is of the material SiGe with a length of 0.64 micrometers and it is doped with Boron at a concentration of 14549345375333042176 cm^-3. The drain region is of the material GaN with a length of 0.95 micrometers and it is doped with Arsenic at a concentration of 431883081800787427328 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.004) (define Lgs 0.48) (define Lgl 0.64) (define Ltotal (+ Lgs Lgl)) (define Ls 0.95) (define Ld 0.95) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 622395814209477804032 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 750789039266145107968 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 14549345375333042176 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 431883081800787427328 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
306
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.72 micrometers and it is doped with Phosphorus at a concentration of 922562416138392174592 cm^-3. The short gate region is of the material GaN with a length of 0.2 micrometers and it is doped with Phosphorus at a concentration of 408871576557005832192 cm^-3. The long gate region is of the material GaN with a length of 0.8 micrometers and it is doped with Arsenic at a concentration of 915867864754844860416 cm^-3. The drain region is of the material Silicon with a length of 0.72 micrometers and it is doped with Boron at a concentration of 670844797016932876288 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.008) (define Lgs 0.2) (define Lgl 0.8) (define Ltotal (+ Lgs Lgl)) (define Ls 0.72) (define Ld 0.72) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 922562416138392174592 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 408871576557005832192 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 915867864754844860416 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 670844797016932876288 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
307
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.32 micrometers and it is doped with Phosphorus at a concentration of 984634796151941234688 cm^-3. The short gate region is of the material SiGe with a length of 0.92 micrometers and it is doped with Boron at a concentration of 184071160209219420160 cm^-3. The long gate region is of the material Silicon with a length of 0.31 micrometers and it is doped with Arsenic at a concentration of 260847615844510040064 cm^-3. The drain region is of the material Diamond with a length of 0.32 micrometers and it is doped with Arsenic at a concentration of 740779466987599560704 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.007) (define Lgs 0.92) (define Lgl 0.31) (define Ltotal (+ Lgs Lgl)) (define Ls 0.32) (define Ld 0.32) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 984634796151941234688 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 184071160209219420160 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 260847615844510040064 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 740779466987599560704 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
308
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 308023379853207142400 cm^-3. The short gate region is of the material SiGe with a length of 0.05 micrometers and it is doped with Arsenic at a concentration of 176231381431993597952 cm^-3. The long gate region is of the material Diamond with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 259286840617948708864 cm^-3. The drain region is of the material SiGe with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 741253372274888802304 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.008) (define Lgs 0.05) (define Lgl 0.16) (define Ltotal (+ Lgs Lgl)) (define Ls 0.02) (define Ld 0.02) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 308023379853207142400 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 176231381431993597952 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 259286840617948708864 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 741253372274888802304 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
309
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.76 micrometers and it is doped with Phosphorus at a concentration of 100703736902513983488 cm^-3. The short gate region is of the material Germanium with a length of 0.1 micrometers and it is doped with Arsenic at a concentration of 918694754946067464192 cm^-3. The long gate region is of the material Diamond with a length of 0.24 micrometers and it is doped with Boron at a concentration of 379538569366001549312 cm^-3. The drain region is of the material Silicon with a length of 0.76 micrometers and it is doped with Arsenic at a concentration of 549725905956962435072 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.003) (define Lgs 0.1) (define Lgl 0.24) (define Ltotal (+ Lgs Lgl)) (define Ls 0.76) (define Ld 0.76) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 100703736902513983488 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 918694754946067464192 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 379538569366001549312 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 549725905956962435072 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
310
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.38 micrometers and it is doped with Boron at a concentration of 345370078342629556224 cm^-3. The short gate region is of the material Diamond with a length of 0.23 micrometers and it is doped with Arsenic at a concentration of 474294421561391185920 cm^-3. The long gate region is of the material Silicon with a length of 0.13 micrometers and it is doped with Phosphorus at a concentration of 47533323050221715456 cm^-3. The drain region is of the material Germanium with a length of 0.38 micrometers and it is doped with Boron at a concentration of 471931450178908979200 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.009) (define Lgs 0.23) (define Lgl 0.13) (define Ltotal (+ Lgs Lgl)) (define Ls 0.38) (define Ld 0.38) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 345370078342629556224 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 474294421561391185920 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 47533323050221715456 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 471931450178908979200 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
311
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 475142823985881808896 cm^-3. The short gate region is of the material Silicon with a length of 0.98 micrometers and it is doped with Phosphorus at a concentration of 875409172991218548736 cm^-3. The long gate region is of the material Silicon with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 248413398947431809024 cm^-3. The drain region is of the material Silicon with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 429386187653179506688 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.002) (define Lgs 0.98) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.59) (define Ld 0.59) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 475142823985881808896 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 875409172991218548736 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 248413398947431809024 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 429386187653179506688 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
312
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.3 micrometers and it is doped with Phosphorus at a concentration of 733057388697552551936 cm^-3. The short gate region is of the material Silicon with a length of 0.93 micrometers and it is doped with Arsenic at a concentration of 281469801749301821440 cm^-3. The long gate region is of the material Diamond with a length of 0.23 micrometers and it is doped with Boron at a concentration of 883609709493448212480 cm^-3. The drain region is of the material Germanium with a length of 0.3 micrometers and it is doped with Arsenic at a concentration of 285718760875655888896 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.002) (define Lgs 0.93) (define Lgl 0.23) (define Ltotal (+ Lgs Lgl)) (define Ls 0.3) (define Ld 0.3) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 733057388697552551936 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 281469801749301821440 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 883609709493448212480 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 285718760875655888896 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
313
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.77 micrometers and it is doped with Arsenic at a concentration of 464039316136997945344 cm^-3. The short gate region is of the material SiGe with a length of 0.77 micrometers and it is doped with Boron at a concentration of 924952286069563850752 cm^-3. The long gate region is of the material Diamond with a length of 0.61 micrometers and it is doped with Boron at a concentration of 345579111704187371520 cm^-3. The drain region is of the material Germanium with a length of 0.77 micrometers and it is doped with Phosphorus at a concentration of 763935249817223168000 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.003) (define Lgs 0.77) (define Lgl 0.61) (define Ltotal (+ Lgs Lgl)) (define Ls 0.77) (define Ld 0.77) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 464039316136997945344 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 924952286069563850752 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 345579111704187371520 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 763935249817223168000 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
314
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.4 micrometers and it is doped with Phosphorus at a concentration of 464852116025987301376 cm^-3. The short gate region is of the material SiGe with a length of 0.78 micrometers and it is doped with Boron at a concentration of 462932224906313203712 cm^-3. The long gate region is of the material Germanium with a length of 0.23 micrometers and it is doped with Arsenic at a concentration of 435435641925528322048 cm^-3. The drain region is of the material SiGe with a length of 0.4 micrometers and it is doped with Phosphorus at a concentration of 186228330938992164864 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.004) (define Lgs 0.78) (define Lgl 0.23) (define Ltotal (+ Lgs Lgl)) (define Ls 0.4) (define Ld 0.4) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 464852116025987301376 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 462932224906313203712 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 435435641925528322048 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 186228330938992164864 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
315
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.1 micrometers and it is doped with Arsenic at a concentration of 838024011425700642816 cm^-3. The short gate region is of the material Diamond with a length of 0.93 micrometers and it is doped with Boron at a concentration of 993217347813535907840 cm^-3. The long gate region is of the material Germanium with a length of 0.52 micrometers and it is doped with Boron at a concentration of 355134148118135570432 cm^-3. The drain region is of the material GaN with a length of 0.1 micrometers and it is doped with Boron at a concentration of 242669795677343416320 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.009) (define Lgs 0.93) (define Lgl 0.52) (define Ltotal (+ Lgs Lgl)) (define Ls 0.1) (define Ld 0.1) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 838024011425700642816 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 993217347813535907840 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 355134148118135570432 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 242669795677343416320 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
316
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.51 micrometers and it is doped with Boron at a concentration of 265627522972616425472 cm^-3. The short gate region is of the material SiGe with a length of 0.42 micrometers and it is doped with Boron at a concentration of 7170544744435246080 cm^-3. The long gate region is of the material Diamond with a length of 0.96 micrometers and it is doped with Boron at a concentration of 675197048221170663424 cm^-3. The drain region is of the material Germanium with a length of 0.51 micrometers and it is doped with Arsenic at a concentration of 745910834709609971712 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.002) (define Lgs 0.42) (define Lgl 0.96) (define Ltotal (+ Lgs Lgl)) (define Ls 0.51) (define Ld 0.51) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 265627522972616425472 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 7170544744435246080 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 675197048221170663424 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 745910834709609971712 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
317
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.97 micrometers and it is doped with Arsenic at a concentration of 409924412429984202752 cm^-3. The short gate region is of the material Diamond with a length of 0.92 micrometers and it is doped with Phosphorus at a concentration of 741389229147252064256 cm^-3. The long gate region is of the material Silicon with a length of 0.86 micrometers and it is doped with Boron at a concentration of 986926440790683418624 cm^-3. The drain region is of the material Germanium with a length of 0.97 micrometers and it is doped with Boron at a concentration of 443533223118462124032 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.004) (define Lgs 0.92) (define Lgl 0.86) (define Ltotal (+ Lgs Lgl)) (define Ls 0.97) (define Ld 0.97) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 409924412429984202752 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 741389229147252064256 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 986926440790683418624 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 443533223118462124032 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
318
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.38 micrometers and it is doped with Arsenic at a concentration of 349256137844498628608 cm^-3. The short gate region is of the material GaN with a length of 0.09 micrometers and it is doped with Arsenic at a concentration of 940048190670940667904 cm^-3. The long gate region is of the material SiGe with a length of 0.3 micrometers and it is doped with Phosphorus at a concentration of 410459908988756426752 cm^-3. The drain region is of the material Diamond with a length of 0.38 micrometers and it is doped with Phosphorus at a concentration of 609915523281970921472 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.003) (define Lgs 0.09) (define Lgl 0.3) (define Ltotal (+ Lgs Lgl)) (define Ls 0.38) (define Ld 0.38) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 349256137844498628608 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 940048190670940667904 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 410459908988756426752 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 609915523281970921472 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
319
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.67 micrometers and it is doped with Phosphorus at a concentration of 484022165076501725184 cm^-3. The short gate region is of the material Silicon with a length of 0.42 micrometers and it is doped with Arsenic at a concentration of 432232903652989075456 cm^-3. The long gate region is of the material Germanium with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 524016756369011638272 cm^-3. The drain region is of the material Diamond with a length of 0.67 micrometers and it is doped with Phosphorus at a concentration of 31474843402607910912 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.009) (define Lgs 0.42) (define Lgl 0.02) (define Ltotal (+ Lgs Lgl)) (define Ls 0.67) (define Ld 0.67) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 484022165076501725184 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 432232903652989075456 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 524016756369011638272 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 31474843402607910912 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
320
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.2 micrometers and it is doped with Arsenic at a concentration of 138001202498572697600 cm^-3. The short gate region is of the material SiGe with a length of 0.66 micrometers and it is doped with Boron at a concentration of 370377293018496630784 cm^-3. The long gate region is of the material GaN with a length of 0.25 micrometers and it is doped with Phosphorus at a concentration of 517664784782735048704 cm^-3. The drain region is of the material GaN with a length of 0.2 micrometers and it is doped with Arsenic at a concentration of 735699634990903853056 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.009) (define Lgs 0.66) (define Lgl 0.25) (define Ltotal (+ Lgs Lgl)) (define Ls 0.2) (define Ld 0.2) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 138001202498572697600 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 370377293018496630784 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 517664784782735048704 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 735699634990903853056 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
321
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.73 micrometers and it is doped with Phosphorus at a concentration of 256511744165441732608 cm^-3. The short gate region is of the material Germanium with a length of 0.34 micrometers and it is doped with Arsenic at a concentration of 763328689882111410176 cm^-3. The long gate region is of the material Silicon with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 364590205185601830912 cm^-3. The drain region is of the material SiGe with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 628038347594208641024 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.004) (define Lgs 0.34) (define Lgl 0.82) (define Ltotal (+ Lgs Lgl)) (define Ls 0.73) (define Ld 0.73) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 256511744165441732608 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 763328689882111410176 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 364590205185601830912 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 628038347594208641024 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
322
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.02 micrometers and it is doped with Boron at a concentration of 993077474461741350912 cm^-3. The short gate region is of the material GaN with a length of 0.26 micrometers and it is doped with Phosphorus at a concentration of 593150828994427355136 cm^-3. The long gate region is of the material Germanium with a length of 0.72 micrometers and it is doped with Boron at a concentration of 685478797491502579712 cm^-3. The drain region is of the material Germanium with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 628529896106344841216 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.004) (define Lgs 0.26) (define Lgl 0.72) (define Ltotal (+ Lgs Lgl)) (define Ls 0.02) (define Ld 0.02) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 993077474461741350912 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 593150828994427355136 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 685478797491502579712 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 628529896106344841216 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
323
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.69 micrometers and it is doped with Phosphorus at a concentration of 66329825692047040512 cm^-3. The short gate region is of the material Germanium with a length of 0.42 micrometers and it is doped with Boron at a concentration of 772153647839019532288 cm^-3. The long gate region is of the material Diamond with a length of 0.74 micrometers and it is doped with Boron at a concentration of 441474729451253923840 cm^-3. The drain region is of the material Diamond with a length of 0.69 micrometers and it is doped with Arsenic at a concentration of 263040787369040445440 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.003) (define Lgs 0.42) (define Lgl 0.74) (define Ltotal (+ Lgs Lgl)) (define Ls 0.69) (define Ld 0.69) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 66329825692047040512 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 772153647839019532288 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 441474729451253923840 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 263040787369040445440 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
324
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.13 micrometers and it is doped with Phosphorus at a concentration of 74994142569050390528 cm^-3. The short gate region is of the material GaN with a length of 0.32 micrometers and it is doped with Arsenic at a concentration of 714727432977361534976 cm^-3. The long gate region is of the material Diamond with a length of 0.15 micrometers and it is doped with Arsenic at a concentration of 413243946783983665152 cm^-3. The drain region is of the material Germanium with a length of 0.13 micrometers and it is doped with Boron at a concentration of 455542111667365871616 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.01) (define Lgs 0.32) (define Lgl 0.15) (define Ltotal (+ Lgs Lgl)) (define Ls 0.13) (define Ld 0.13) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 74994142569050390528 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 714727432977361534976 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 413243946783983665152 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 455542111667365871616 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
325
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.71 micrometers and it is doped with Boron at a concentration of 815510035200993525760 cm^-3. The short gate region is of the material Germanium with a length of 0.59 micrometers and it is doped with Arsenic at a concentration of 656294812856666030080 cm^-3. The long gate region is of the material Diamond with a length of 0.16 micrometers and it is doped with Arsenic at a concentration of 151517717932404211712 cm^-3. The drain region is of the material Silicon with a length of 0.71 micrometers and it is doped with Arsenic at a concentration of 399994603949596082176 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.004) (define Lgs 0.59) (define Lgl 0.16) (define Ltotal (+ Lgs Lgl)) (define Ls 0.71) (define Ld 0.71) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 815510035200993525760 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 656294812856666030080 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 151517717932404211712 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 399994603949596082176 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
326
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.49 micrometers and it is doped with Boron at a concentration of 508395295845275926528 cm^-3. The short gate region is of the material Diamond with a length of 0.48 micrometers and it is doped with Arsenic at a concentration of 523646426852244193280 cm^-3. The long gate region is of the material Germanium with a length of 0.81 micrometers and it is doped with Arsenic at a concentration of 382077672161176584192 cm^-3. The drain region is of the material SiGe with a length of 0.49 micrometers and it is doped with Phosphorus at a concentration of 645813094113757888512 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.005) (define Lgs 0.48) (define Lgl 0.81) (define Ltotal (+ Lgs Lgl)) (define Ls 0.49) (define Ld 0.49) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 508395295845275926528 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 523646426852244193280 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 382077672161176584192 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 645813094113757888512 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
327
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.64 micrometers and it is doped with Phosphorus at a concentration of 827236095855481847808 cm^-3. The short gate region is of the material SiGe with a length of 0.97 micrometers and it is doped with Boron at a concentration of 369324416335632531456 cm^-3. The long gate region is of the material SiGe with a length of 0.1 micrometers and it is doped with Boron at a concentration of 539347963572893253632 cm^-3. The drain region is of the material Silicon with a length of 0.64 micrometers and it is doped with Phosphorus at a concentration of 49670607263555411968 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.009) (define Lgs 0.97) (define Lgl 0.1) (define Ltotal (+ Lgs Lgl)) (define Ls 0.64) (define Ld 0.64) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 827236095855481847808 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 369324416335632531456 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 539347963572893253632 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 49670607263555411968 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
328
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.13 micrometers and it is doped with Phosphorus at a concentration of 666906639372522225664 cm^-3. The short gate region is of the material Diamond with a length of 0.34 micrometers and it is doped with Boron at a concentration of 440143114938509033472 cm^-3. The long gate region is of the material Silicon with a length of 0.57 micrometers and it is doped with Phosphorus at a concentration of 261637364321403535360 cm^-3. The drain region is of the material SiGe with a length of 0.13 micrometers and it is doped with Arsenic at a concentration of 98049532288838582272 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.004) (define Lgs 0.34) (define Lgl 0.57) (define Ltotal (+ Lgs Lgl)) (define Ls 0.13) (define Ld 0.13) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 666906639372522225664 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 440143114938509033472 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 261637364321403535360 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 98049532288838582272 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
329
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 525562820610466512896 cm^-3. The short gate region is of the material Germanium with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 304392238397803593728 cm^-3. The long gate region is of the material Silicon with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 758026635101976526848 cm^-3. The drain region is of the material Silicon with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 294780179924308164608 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.003) (define Lgs 0.61) (define Lgl 0.71) (define Ltotal (+ Lgs Lgl)) (define Ls 0.55) (define Ld 0.55) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 525562820610466512896 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 304392238397803593728 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 758026635101976526848 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 294780179924308164608 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
330
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.8 micrometers and it is doped with Arsenic at a concentration of 662112065155426156544 cm^-3. The short gate region is of the material Germanium with a length of 0.61 micrometers and it is doped with Phosphorus at a concentration of 846901354374152454144 cm^-3. The long gate region is of the material Germanium with a length of 0.95 micrometers and it is doped with Phosphorus at a concentration of 677297220285529194496 cm^-3. The drain region is of the material Diamond with a length of 0.8 micrometers and it is doped with Phosphorus at a concentration of 845680532436844806144 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.003) (define Lgs 0.61) (define Lgl 0.95) (define Ltotal (+ Lgs Lgl)) (define Ls 0.8) (define Ld 0.8) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 662112065155426156544 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 846901354374152454144 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 677297220285529194496 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 845680532436844806144 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
331
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.26 micrometers and it is doped with Boron at a concentration of 840960973427988365312 cm^-3. The short gate region is of the material Diamond with a length of 0.52 micrometers and it is doped with Phosphorus at a concentration of 743507061366110420992 cm^-3. The long gate region is of the material GaN with a length of 0.26 micrometers and it is doped with Arsenic at a concentration of 682682340199283687424 cm^-3. The drain region is of the material SiGe with a length of 0.26 micrometers and it is doped with Boron at a concentration of 961630005357262798848 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.003) (define Lgs 0.52) (define Lgl 0.26) (define Ltotal (+ Lgs Lgl)) (define Ls 0.26) (define Ld 0.26) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 840960973427988365312 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 743507061366110420992 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 682682340199283687424 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 961630005357262798848 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
332
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 589016171100549283840 cm^-3. The short gate region is of the material SiGe with a length of 0.39 micrometers and it is doped with Boron at a concentration of 690934999154789580800 cm^-3. The long gate region is of the material Silicon with a length of 0.24 micrometers and it is doped with Phosphorus at a concentration of 428132651835791245312 cm^-3. The drain region is of the material GaN with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 870062948679233568768 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.001) (define Lgs 0.39) (define Lgl 0.24) (define Ltotal (+ Lgs Lgl)) (define Ls 0.82) (define Ld 0.82) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 589016171100549283840 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 690934999154789580800 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 428132651835791245312 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 870062948679233568768 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
333
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.86 micrometers and it is doped with Phosphorus at a concentration of 571510792062108827648 cm^-3. The short gate region is of the material Silicon with a length of 0.74 micrometers and it is doped with Boron at a concentration of 359386729167258648576 cm^-3. The long gate region is of the material SiGe with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 55528750772598915072 cm^-3. The drain region is of the material Diamond with a length of 0.86 micrometers and it is doped with Boron at a concentration of 642894867943248887808 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.004) (define Lgs 0.74) (define Lgl 0.73) (define Ltotal (+ Lgs Lgl)) (define Ls 0.86) (define Ld 0.86) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 571510792062108827648 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 359386729167258648576 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 55528750772598915072 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 642894867943248887808 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
334
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.26 micrometers and it is doped with Phosphorus at a concentration of 486292250105051348992 cm^-3. The short gate region is of the material SiGe with a length of 0.89 micrometers and it is doped with Phosphorus at a concentration of 966769031894351478784 cm^-3. The long gate region is of the material Silicon with a length of 0.29 micrometers and it is doped with Boron at a concentration of 702055603681552367616 cm^-3. The drain region is of the material Silicon with a length of 0.26 micrometers and it is doped with Phosphorus at a concentration of 729432251002769899520 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.004) (define Lgs 0.89) (define Lgl 0.29) (define Ltotal (+ Lgs Lgl)) (define Ls 0.26) (define Ld 0.26) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 486292250105051348992 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 966769031894351478784 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 702055603681552367616 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 729432251002769899520 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
335
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.78 micrometers and it is doped with Boron at a concentration of 828199349132133269504 cm^-3. The short gate region is of the material Germanium with a length of 0.85 micrometers and it is doped with Boron at a concentration of 477836275563988123648 cm^-3. The long gate region is of the material Germanium with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 248448789226072932352 cm^-3. The drain region is of the material Silicon with a length of 0.78 micrometers and it is doped with Boron at a concentration of 787237875724282494976 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.01) (define Lgs 0.85) (define Lgl 0.71) (define Ltotal (+ Lgs Lgl)) (define Ls 0.78) (define Ld 0.78) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 828199349132133269504 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 477836275563988123648 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 248448789226072932352 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 787237875724282494976 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
336
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.13 micrometers and it is doped with Boron at a concentration of 972223585303046914048 cm^-3. The short gate region is of the material SiGe with a length of 0.03 micrometers and it is doped with Boron at a concentration of 355755773328341336064 cm^-3. The long gate region is of the material SiGe with a length of 0.06 micrometers and it is doped with Boron at a concentration of 890207921056639221760 cm^-3. The drain region is of the material SiGe with a length of 0.13 micrometers and it is doped with Arsenic at a concentration of 239317128139546984448 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.005) (define Lgs 0.03) (define Lgl 0.06) (define Ltotal (+ Lgs Lgl)) (define Ls 0.13) (define Ld 0.13) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 972223585303046914048 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 355755773328341336064 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 890207921056639221760 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 239317128139546984448 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
337
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.38 micrometers and it is doped with Arsenic at a concentration of 180850542169403588608 cm^-3. The short gate region is of the material GaN with a length of 0.72 micrometers and it is doped with Boron at a concentration of 609060632127551963136 cm^-3. The long gate region is of the material Germanium with a length of 0.7 micrometers and it is doped with Phosphorus at a concentration of 554535259423479431168 cm^-3. The drain region is of the material Diamond with a length of 0.38 micrometers and it is doped with Phosphorus at a concentration of 415709078486465511424 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.007) (define Lgs 0.72) (define Lgl 0.7) (define Ltotal (+ Lgs Lgl)) (define Ls 0.38) (define Ld 0.38) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 180850542169403588608 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 609060632127551963136 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 554535259423479431168 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 415709078486465511424 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
338
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.72 micrometers and it is doped with Boron at a concentration of 642548802021863587840 cm^-3. The short gate region is of the material SiGe with a length of 0.18 micrometers and it is doped with Arsenic at a concentration of 447297693028941824000 cm^-3. The long gate region is of the material Germanium with a length of 0.72 micrometers and it is doped with Phosphorus at a concentration of 466443972492639338496 cm^-3. The drain region is of the material Germanium with a length of 0.72 micrometers and it is doped with Boron at a concentration of 897300400017164206080 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.005) (define Lgs 0.18) (define Lgl 0.72) (define Ltotal (+ Lgs Lgl)) (define Ls 0.72) (define Ld 0.72) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 642548802021863587840 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 447297693028941824000 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 466443972492639338496 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 897300400017164206080 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
339
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.17 micrometers and it is doped with Phosphorus at a concentration of 734684099151735029760 cm^-3. The short gate region is of the material Germanium with a length of 0.76 micrometers and it is doped with Arsenic at a concentration of 212237288908746358784 cm^-3. The long gate region is of the material Silicon with a length of 0.96 micrometers and it is doped with Phosphorus at a concentration of 824633928854995599360 cm^-3. The drain region is of the material GaN with a length of 0.17 micrometers and it is doped with Phosphorus at a concentration of 881486785862658162688 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.001) (define Lgs 0.76) (define Lgl 0.96) (define Ltotal (+ Lgs Lgl)) (define Ls 0.17) (define Ld 0.17) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 734684099151735029760 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 212237288908746358784 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 824633928854995599360 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 881486785862658162688 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
340
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.57 micrometers and it is doped with Boron at a concentration of 570544540646487228416 cm^-3. The short gate region is of the material Germanium with a length of 0.81 micrometers and it is doped with Boron at a concentration of 764624328845403095040 cm^-3. The long gate region is of the material SiGe with a length of 0.05 micrometers and it is doped with Boron at a concentration of 271125301347168681984 cm^-3. The drain region is of the material Silicon with a length of 0.57 micrometers and it is doped with Phosphorus at a concentration of 780945110001692573696 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.005) (define Lgs 0.81) (define Lgl 0.05) (define Ltotal (+ Lgs Lgl)) (define Ls 0.57) (define Ld 0.57) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 570544540646487228416 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 764624328845403095040 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 271125301347168681984 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 780945110001692573696 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
341
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.19 micrometers and it is doped with Boron at a concentration of 53599821571191504896 cm^-3. The short gate region is of the material Germanium with a length of 0.86 micrometers and it is doped with Phosphorus at a concentration of 947537123328066715648 cm^-3. The long gate region is of the material GaN with a length of 0.57 micrometers and it is doped with Phosphorus at a concentration of 885412955578921254912 cm^-3. The drain region is of the material Silicon with a length of 0.19 micrometers and it is doped with Boron at a concentration of 30912577119796215808 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.007) (define Lgs 0.86) (define Lgl 0.57) (define Ltotal (+ Lgs Lgl)) (define Ls 0.19) (define Ld 0.19) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 53599821571191504896 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 947537123328066715648 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 885412955578921254912 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 30912577119796215808 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
342
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.08 micrometers and it is doped with Arsenic at a concentration of 112130921946704756736 cm^-3. The short gate region is of the material Diamond with a length of 0.33 micrometers and it is doped with Phosphorus at a concentration of 27839295396063272960 cm^-3. The long gate region is of the material Silicon with a length of 0.86 micrometers and it is doped with Boron at a concentration of 840566287152741744640 cm^-3. The drain region is of the material GaN with a length of 0.08 micrometers and it is doped with Phosphorus at a concentration of 455816040255145902080 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.001) (define Lgs 0.33) (define Lgl 0.86) (define Ltotal (+ Lgs Lgl)) (define Ls 0.08) (define Ld 0.08) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 112130921946704756736 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 27839295396063272960 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 840566287152741744640 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 455816040255145902080 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
343
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.95 micrometers and it is doped with Phosphorus at a concentration of 479782892547275096064 cm^-3. The short gate region is of the material SiGe with a length of 0.39 micrometers and it is doped with Phosphorus at a concentration of 664365281946179338240 cm^-3. The long gate region is of the material Silicon with a length of 0.62 micrometers and it is doped with Arsenic at a concentration of 89303047313657937920 cm^-3. The drain region is of the material Germanium with a length of 0.95 micrometers and it is doped with Arsenic at a concentration of 764343609430525476864 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.008) (define Lgs 0.39) (define Lgl 0.62) (define Ltotal (+ Lgs Lgl)) (define Ls 0.95) (define Ld 0.95) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 479782892547275096064 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 664365281946179338240 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 89303047313657937920 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 764343609430525476864 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
344
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.73 micrometers and it is doped with Boron at a concentration of 836054879399359414272 cm^-3. The short gate region is of the material Diamond with a length of 0.78 micrometers and it is doped with Boron at a concentration of 760970315029562654720 cm^-3. The long gate region is of the material GaN with a length of 0.12 micrometers and it is doped with Boron at a concentration of 952900986291930267648 cm^-3. The drain region is of the material SiGe with a length of 0.73 micrometers and it is doped with Boron at a concentration of 150454665742689927168 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.004) (define Lgs 0.78) (define Lgl 0.12) (define Ltotal (+ Lgs Lgl)) (define Ls 0.73) (define Ld 0.73) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 836054879399359414272 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 760970315029562654720 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 952900986291930267648 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 150454665742689927168 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
345
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.06 micrometers and it is doped with Boron at a concentration of 239924379490716844032 cm^-3. The short gate region is of the material Diamond with a length of 0.52 micrometers and it is doped with Phosphorus at a concentration of 398822058265259933696 cm^-3. The long gate region is of the material Diamond with a length of 0.83 micrometers and it is doped with Arsenic at a concentration of 859806889431590502400 cm^-3. The drain region is of the material Diamond with a length of 0.06 micrometers and it is doped with Boron at a concentration of 747672251861545254912 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.007) (define Lgs 0.52) (define Lgl 0.83) (define Ltotal (+ Lgs Lgl)) (define Ls 0.06) (define Ld 0.06) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 239924379490716844032 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 398822058265259933696 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 859806889431590502400 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 747672251861545254912 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
346
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.59 micrometers and it is doped with Arsenic at a concentration of 79675973019642855424 cm^-3. The short gate region is of the material GaN with a length of 0.94 micrometers and it is doped with Arsenic at a concentration of 263597697014455762944 cm^-3. The long gate region is of the material Diamond with a length of 0.62 micrometers and it is doped with Boron at a concentration of 672204354146161262592 cm^-3. The drain region is of the material SiGe with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 615214045103866380288 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.004) (define Lgs 0.94) (define Lgl 0.62) (define Ltotal (+ Lgs Lgl)) (define Ls 0.59) (define Ld 0.59) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 79675973019642855424 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 263597697014455762944 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 672204354146161262592 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 615214045103866380288 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
347
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.74 micrometers and it is doped with Boron at a concentration of 96929326042180370432 cm^-3. The short gate region is of the material GaN with a length of 0.52 micrometers and it is doped with Arsenic at a concentration of 982008277704235155456 cm^-3. The long gate region is of the material SiGe with a length of 0.74 micrometers and it is doped with Arsenic at a concentration of 971119598868022820864 cm^-3. The drain region is of the material Diamond with a length of 0.74 micrometers and it is doped with Arsenic at a concentration of 905155840229654790144 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.007) (define Lgs 0.52) (define Lgl 0.74) (define Ltotal (+ Lgs Lgl)) (define Ls 0.74) (define Ld 0.74) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 96929326042180370432 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 982008277704235155456 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 971119598868022820864 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 905155840229654790144 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
348
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.46 micrometers and it is doped with Boron at a concentration of 781632273114593099776 cm^-3. The short gate region is of the material Diamond with a length of 0.51 micrometers and it is doped with Arsenic at a concentration of 782695296126279614464 cm^-3. The long gate region is of the material Silicon with a length of 0.17 micrometers and it is doped with Boron at a concentration of 194313765236909932544 cm^-3. The drain region is of the material SiGe with a length of 0.46 micrometers and it is doped with Arsenic at a concentration of 352476628053191163904 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.004) (define Lgs 0.51) (define Lgl 0.17) (define Ltotal (+ Lgs Lgl)) (define Ls 0.46) (define Ld 0.46) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 781632273114593099776 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 782695296126279614464 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 194313765236909932544 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 352476628053191163904 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
349
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.4 micrometers and it is doped with Boron at a concentration of 100659300366328201216 cm^-3. The short gate region is of the material SiGe with a length of 0.27 micrometers and it is doped with Phosphorus at a concentration of 621798941037763231744 cm^-3. The long gate region is of the material GaN with a length of 0.05 micrometers and it is doped with Phosphorus at a concentration of 68022252828924968960 cm^-3. The drain region is of the material SiGe with a length of 0.4 micrometers and it is doped with Arsenic at a concentration of 725837756578890121216 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.01) (define Lgs 0.27) (define Lgl 0.05) (define Ltotal (+ Lgs Lgl)) (define Ls 0.4) (define Ld 0.4) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 100659300366328201216 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 621798941037763231744 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 68022252828924968960 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 725837756578890121216 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
350
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.84 micrometers and it is doped with Phosphorus at a concentration of 55142191560920768512 cm^-3. The short gate region is of the material SiGe with a length of 0.81 micrometers and it is doped with Phosphorus at a concentration of 613840232684236308480 cm^-3. The long gate region is of the material SiGe with a length of 0.64 micrometers and it is doped with Arsenic at a concentration of 103382622708088471552 cm^-3. The drain region is of the material Silicon with a length of 0.84 micrometers and it is doped with Arsenic at a concentration of 800673729261836697600 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.004) (define Lgs 0.81) (define Lgl 0.64) (define Ltotal (+ Lgs Lgl)) (define Ls 0.84) (define Ld 0.84) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 55142191560920768512 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 613840232684236308480 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 103382622708088471552 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 800673729261836697600 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
351
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.41 micrometers and it is doped with Phosphorus at a concentration of 940417805438218797056 cm^-3. The short gate region is of the material GaN with a length of 0.44 micrometers and it is doped with Boron at a concentration of 896005235759176351744 cm^-3. The long gate region is of the material Germanium with a length of 0.67 micrometers and it is doped with Boron at a concentration of 199065758121256353792 cm^-3. The drain region is of the material Silicon with a length of 0.41 micrometers and it is doped with Phosphorus at a concentration of 685265727204485890048 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.001) (define Lgs 0.44) (define Lgl 0.67) (define Ltotal (+ Lgs Lgl)) (define Ls 0.41) (define Ld 0.41) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 940417805438218797056 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 896005235759176351744 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 199065758121256353792 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 685265727204485890048 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
352
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.22 micrometers and it is doped with Arsenic at a concentration of 546749720606276059136 cm^-3. The short gate region is of the material GaN with a length of 0.3 micrometers and it is doped with Phosphorus at a concentration of 128637864734334353408 cm^-3. The long gate region is of the material Germanium with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 485941385836188794880 cm^-3. The drain region is of the material SiGe with a length of 0.22 micrometers and it is doped with Arsenic at a concentration of 501295594438613008384 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.004) (define Lgs 0.3) (define Lgl 0.71) (define Ltotal (+ Lgs Lgl)) (define Ls 0.22) (define Ld 0.22) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 546749720606276059136 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 128637864734334353408 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 485941385836188794880 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 501295594438613008384 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
353
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.85 micrometers and it is doped with Arsenic at a concentration of 607648155519397265408 cm^-3. The short gate region is of the material Silicon with a length of 0.18 micrometers and it is doped with Phosphorus at a concentration of 136373055354922287104 cm^-3. The long gate region is of the material Diamond with a length of 0.34 micrometers and it is doped with Phosphorus at a concentration of 903733625189404377088 cm^-3. The drain region is of the material Diamond with a length of 0.85 micrometers and it is doped with Phosphorus at a concentration of 697062428199323172864 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.009) (define Lgs 0.18) (define Lgl 0.34) (define Ltotal (+ Lgs Lgl)) (define Ls 0.85) (define Ld 0.85) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 607648155519397265408 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 136373055354922287104 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 903733625189404377088 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 697062428199323172864 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
354
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.12 micrometers and it is doped with Phosphorus at a concentration of 52671990773832613888 cm^-3. The short gate region is of the material Diamond with a length of 0.35 micrometers and it is doped with Phosphorus at a concentration of 694457403407925903360 cm^-3. The long gate region is of the material Silicon with a length of 0.65 micrometers and it is doped with Arsenic at a concentration of 262863837381221023744 cm^-3. The drain region is of the material SiGe with a length of 0.12 micrometers and it is doped with Phosphorus at a concentration of 908334354534919307264 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.006) (define Lgs 0.35) (define Lgl 0.65) (define Ltotal (+ Lgs Lgl)) (define Ls 0.12) (define Ld 0.12) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 52671990773832613888 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 694457403407925903360 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 262863837381221023744 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 908334354534919307264 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
355
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.6 micrometers and it is doped with Arsenic at a concentration of 172799136572659826688 cm^-3. The short gate region is of the material GaN with a length of 0.88 micrometers and it is doped with Boron at a concentration of 944620536889793576960 cm^-3. The long gate region is of the material GaN with a length of 0.31 micrometers and it is doped with Arsenic at a concentration of 404588793480188395520 cm^-3. The drain region is of the material SiGe with a length of 0.6 micrometers and it is doped with Boron at a concentration of 386214941009870585856 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.006) (define Lgs 0.88) (define Lgl 0.31) (define Ltotal (+ Lgs Lgl)) (define Ls 0.6) (define Ld 0.6) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 172799136572659826688 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 944620536889793576960 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 404588793480188395520 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 386214941009870585856 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
356
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.45 micrometers and it is doped with Arsenic at a concentration of 135814568347061731328 cm^-3. The short gate region is of the material Germanium with a length of 0.4 micrometers and it is doped with Phosphorus at a concentration of 153663455692101189632 cm^-3. The long gate region is of the material Germanium with a length of 0.31 micrometers and it is doped with Phosphorus at a concentration of 131806254198976757760 cm^-3. The drain region is of the material SiGe with a length of 0.45 micrometers and it is doped with Boron at a concentration of 112366913262100414464 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.002) (define Lgs 0.4) (define Lgl 0.31) (define Ltotal (+ Lgs Lgl)) (define Ls 0.45) (define Ld 0.45) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 135814568347061731328 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 153663455692101189632 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 131806254198976757760 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 112366913262100414464 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
357
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.09 micrometers and it is doped with Arsenic at a concentration of 561433808152522522624 cm^-3. The short gate region is of the material Silicon with a length of 0.92 micrometers and it is doped with Boron at a concentration of 524058053187425140736 cm^-3. The long gate region is of the material Germanium with a length of 0.75 micrometers and it is doped with Phosphorus at a concentration of 950428618102740090880 cm^-3. The drain region is of the material Germanium with a length of 0.09 micrometers and it is doped with Phosphorus at a concentration of 163568687689777053696 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.002) (define Lgs 0.92) (define Lgl 0.75) (define Ltotal (+ Lgs Lgl)) (define Ls 0.09) (define Ld 0.09) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 561433808152522522624 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 524058053187425140736 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 950428618102740090880 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 163568687689777053696 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
358
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.9 micrometers and it is doped with Phosphorus at a concentration of 216494717874696814592 cm^-3. The short gate region is of the material Germanium with a length of 0.57 micrometers and it is doped with Boron at a concentration of 988801999194625015808 cm^-3. The long gate region is of the material SiGe with a length of 0.08 micrometers and it is doped with Arsenic at a concentration of 784031388182505455616 cm^-3. The drain region is of the material Germanium with a length of 0.9 micrometers and it is doped with Boron at a concentration of 866827925924226138112 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.008) (define Lgs 0.57) (define Lgl 0.08) (define Ltotal (+ Lgs Lgl)) (define Ls 0.9) (define Ld 0.9) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 216494717874696814592 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 988801999194625015808 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 784031388182505455616 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 866827925924226138112 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
359
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.18 micrometers and it is doped with Arsenic at a concentration of 447505392917098266624 cm^-3. The short gate region is of the material GaN with a length of 0.68 micrometers and it is doped with Phosphorus at a concentration of 652787581145526173696 cm^-3. The long gate region is of the material SiGe with a length of 0.41 micrometers and it is doped with Boron at a concentration of 24940348816408723456 cm^-3. The drain region is of the material Diamond with a length of 0.18 micrometers and it is doped with Arsenic at a concentration of 758824329796296638464 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.007) (define Lgs 0.68) (define Lgl 0.41) (define Ltotal (+ Lgs Lgl)) (define Ls 0.18) (define Ld 0.18) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 447505392917098266624 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 652787581145526173696 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 24940348816408723456 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 758824329796296638464 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
360
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.15 micrometers and it is doped with Phosphorus at a concentration of 540377926788065787904 cm^-3. The short gate region is of the material Germanium with a length of 0.74 micrometers and it is doped with Phosphorus at a concentration of 83546010757807620096 cm^-3. The long gate region is of the material GaN with a length of 0.5 micrometers and it is doped with Boron at a concentration of 641496843471425241088 cm^-3. The drain region is of the material Diamond with a length of 0.15 micrometers and it is doped with Arsenic at a concentration of 420205018968539922432 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.005) (define Lgs 0.74) (define Lgl 0.5) (define Ltotal (+ Lgs Lgl)) (define Ls 0.15) (define Ld 0.15) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 540377926788065787904 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 83546010757807620096 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 641496843471425241088 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 420205018968539922432 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
361
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.92 micrometers and it is doped with Boron at a concentration of 151057290839657906176 cm^-3. The short gate region is of the material GaN with a length of 0.98 micrometers and it is doped with Boron at a concentration of 609741566454319415296 cm^-3. The long gate region is of the material Germanium with a length of 0.04 micrometers and it is doped with Arsenic at a concentration of 645874966490727055360 cm^-3. The drain region is of the material SiGe with a length of 0.92 micrometers and it is doped with Boron at a concentration of 220963809895019511808 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.009) (define Lgs 0.98) (define Lgl 0.04) (define Ltotal (+ Lgs Lgl)) (define Ls 0.92) (define Ld 0.92) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 151057290839657906176 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 609741566454319415296 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 645874966490727055360 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 220963809895019511808 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
362
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.62 micrometers and it is doped with Phosphorus at a concentration of 705406330681970176 cm^-3. The short gate region is of the material GaN with a length of 0.67 micrometers and it is doped with Phosphorus at a concentration of 488847396595169492992 cm^-3. The long gate region is of the material Germanium with a length of 0.38 micrometers and it is doped with Boron at a concentration of 895515083530916462592 cm^-3. The drain region is of the material SiGe with a length of 0.62 micrometers and it is doped with Boron at a concentration of 590010773266770034688 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.005) (define Lgs 0.67) (define Lgl 0.38) (define Ltotal (+ Lgs Lgl)) (define Ls 0.62) (define Ld 0.62) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 705406330681970176 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 488847396595169492992 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 895515083530916462592 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 590010773266770034688 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
363
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.4 micrometers and it is doped with Boron at a concentration of 589082213628770779136 cm^-3. The short gate region is of the material Silicon with a length of 0.21 micrometers and it is doped with Phosphorus at a concentration of 468662236673560543232 cm^-3. The long gate region is of the material SiGe with a length of 0.12 micrometers and it is doped with Phosphorus at a concentration of 678260535097984155648 cm^-3. The drain region is of the material Diamond with a length of 0.4 micrometers and it is doped with Boron at a concentration of 848047693656384864256 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.006) (define Lgs 0.21) (define Lgl 0.12) (define Ltotal (+ Lgs Lgl)) (define Ls 0.4) (define Ld 0.4) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 589082213628770779136 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 468662236673560543232 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 678260535097984155648 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 848047693656384864256 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
364
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.1 micrometers and it is doped with Phosphorus at a concentration of 610627916545024065536 cm^-3. The short gate region is of the material Germanium with a length of 0.3 micrometers and it is doped with Phosphorus at a concentration of 998112721923002073088 cm^-3. The long gate region is of the material Silicon with a length of 0.11 micrometers and it is doped with Boron at a concentration of 164803917523208830976 cm^-3. The drain region is of the material Silicon with a length of 0.1 micrometers and it is doped with Boron at a concentration of 231997447454737760256 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.009) (define Lgs 0.3) (define Lgl 0.11) (define Ltotal (+ Lgs Lgl)) (define Ls 0.1) (define Ld 0.1) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 610627916545024065536 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 998112721923002073088 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 164803917523208830976 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 231997447454737760256 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
365
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.19 micrometers and it is doped with Boron at a concentration of 123056199603546324992 cm^-3. The short gate region is of the material Germanium with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 842457994433804369920 cm^-3. The long gate region is of the material GaN with a length of 0.36 micrometers and it is doped with Boron at a concentration of 40388165236653604864 cm^-3. The drain region is of the material Silicon with a length of 0.19 micrometers and it is doped with Arsenic at a concentration of 691735920272202399744 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.008) (define Lgs 0.61) (define Lgl 0.36) (define Ltotal (+ Lgs Lgl)) (define Ls 0.19) (define Ld 0.19) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 123056199603546324992 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 842457994433804369920 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 40388165236653604864 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 691735920272202399744 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
366
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.06 micrometers and it is doped with Arsenic at a concentration of 334796641186182332416 cm^-3. The short gate region is of the material SiGe with a length of 0.68 micrometers and it is doped with Arsenic at a concentration of 829318520880791683072 cm^-3. The long gate region is of the material Germanium with a length of 0.87 micrometers and it is doped with Phosphorus at a concentration of 102773238818444148736 cm^-3. The drain region is of the material Germanium with a length of 0.06 micrometers and it is doped with Arsenic at a concentration of 924575408092253650944 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.007) (define Lgs 0.68) (define Lgl 0.87) (define Ltotal (+ Lgs Lgl)) (define Ls 0.06) (define Ld 0.06) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 334796641186182332416 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 829318520880791683072 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 102773238818444148736 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 924575408092253650944 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
367
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.42 micrometers and it is doped with Boron at a concentration of 204273328210192564224 cm^-3. The short gate region is of the material Germanium with a length of 0.94 micrometers and it is doped with Boron at a concentration of 911786254051191291904 cm^-3. The long gate region is of the material Diamond with a length of 0.38 micrometers and it is doped with Boron at a concentration of 244245822581296660480 cm^-3. The drain region is of the material SiGe with a length of 0.42 micrometers and it is doped with Phosphorus at a concentration of 910118838596759584768 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.008) (define Lgs 0.94) (define Lgl 0.38) (define Ltotal (+ Lgs Lgl)) (define Ls 0.42) (define Ld 0.42) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 204273328210192564224 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 911786254051191291904 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 244245822581296660480 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 910118838596759584768 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
368
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.6 micrometers and it is doped with Boron at a concentration of 923571029307648638976 cm^-3. The short gate region is of the material SiGe with a length of 0.14 micrometers and it is doped with Phosphorus at a concentration of 93707974698875486208 cm^-3. The long gate region is of the material Silicon with a length of 0.23 micrometers and it is doped with Phosphorus at a concentration of 716287681903265447936 cm^-3. The drain region is of the material SiGe with a length of 0.6 micrometers and it is doped with Arsenic at a concentration of 325047106897410392064 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.005) (define Lgs 0.14) (define Lgl 0.23) (define Ltotal (+ Lgs Lgl)) (define Ls 0.6) (define Ld 0.6) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 923571029307648638976 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 93707974698875486208 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 716287681903265447936 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 325047106897410392064 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
369
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.15 micrometers and it is doped with Boron at a concentration of 534070585953473134592 cm^-3. The short gate region is of the material SiGe with a length of 0.26 micrometers and it is doped with Arsenic at a concentration of 657809751177336717312 cm^-3. The long gate region is of the material GaN with a length of 0.19 micrometers and it is doped with Boron at a concentration of 719205233844872544256 cm^-3. The drain region is of the material Silicon with a length of 0.15 micrometers and it is doped with Phosphorus at a concentration of 474835762316555976704 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.005) (define Lgs 0.26) (define Lgl 0.19) (define Ltotal (+ Lgs Lgl)) (define Ls 0.15) (define Ld 0.15) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 534070585953473134592 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 657809751177336717312 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 719205233844872544256 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 474835762316555976704 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
370
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.74 micrometers and it is doped with Arsenic at a concentration of 626925942175418810368 cm^-3. The short gate region is of the material Germanium with a length of 0.53 micrometers and it is doped with Arsenic at a concentration of 768403294676453949440 cm^-3. The long gate region is of the material Germanium with a length of 0.27 micrometers and it is doped with Arsenic at a concentration of 160028604396852314112 cm^-3. The drain region is of the material Silicon with a length of 0.74 micrometers and it is doped with Boron at a concentration of 326115215463694336000 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.003) (define Lgs 0.53) (define Lgl 0.27) (define Ltotal (+ Lgs Lgl)) (define Ls 0.74) (define Ld 0.74) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 626925942175418810368 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 768403294676453949440 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 160028604396852314112 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 326115215463694336000 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
371
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.04 micrometers and it is doped with Boron at a concentration of 912106516960522141696 cm^-3. The short gate region is of the material Germanium with a length of 0.06 micrometers and it is doped with Phosphorus at a concentration of 665075767957466644480 cm^-3. The long gate region is of the material SiGe with a length of 0.36 micrometers and it is doped with Boron at a concentration of 227328762728225144832 cm^-3. The drain region is of the material Silicon with a length of 0.04 micrometers and it is doped with Phosphorus at a concentration of 14551202962054744064 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.01) (define Lgs 0.06) (define Lgl 0.36) (define Ltotal (+ Lgs Lgl)) (define Ls 0.04) (define Ld 0.04) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 912106516960522141696 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 665075767957466644480 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 227328762728225144832 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 14551202962054744064 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
372
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.56 micrometers and it is doped with Phosphorus at a concentration of 512391935634718588928 cm^-3. The short gate region is of the material SiGe with a length of 0.13 micrometers and it is doped with Arsenic at a concentration of 844996581342028234752 cm^-3. The long gate region is of the material GaN with a length of 0.87 micrometers and it is doped with Arsenic at a concentration of 200301818269628956672 cm^-3. The drain region is of the material SiGe with a length of 0.56 micrometers and it is doped with Arsenic at a concentration of 593954826862529085440 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.006) (define Lgs 0.13) (define Lgl 0.87) (define Ltotal (+ Lgs Lgl)) (define Ls 0.56) (define Ld 0.56) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 512391935634718588928 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 844996581342028234752 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 200301818269628956672 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 593954826862529085440 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
373
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.3 micrometers and it is doped with Arsenic at a concentration of 744478605527945183232 cm^-3. The short gate region is of the material Silicon with a length of 0.03 micrometers and it is doped with Phosphorus at a concentration of 581366261319851180032 cm^-3. The long gate region is of the material Germanium with a length of 0.75 micrometers and it is doped with Phosphorus at a concentration of 549466761854297309184 cm^-3. The drain region is of the material SiGe with a length of 0.3 micrometers and it is doped with Arsenic at a concentration of 889848375477641936896 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.009) (define Lgs 0.03) (define Lgl 0.75) (define Ltotal (+ Lgs Lgl)) (define Ls 0.3) (define Ld 0.3) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 744478605527945183232 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 581366261319851180032 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 549466761854297309184 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 889848375477641936896 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
374
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.24 micrometers and it is doped with Arsenic at a concentration of 701957432116748353536 cm^-3. The short gate region is of the material Diamond with a length of 0.85 micrometers and it is doped with Boron at a concentration of 79725478217827926016 cm^-3. The long gate region is of the material Germanium with a length of 0.45 micrometers and it is doped with Arsenic at a concentration of 397101104668994306048 cm^-3. The drain region is of the material GaN with a length of 0.24 micrometers and it is doped with Boron at a concentration of 317933038894584430592 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.008) (define Lgs 0.85) (define Lgl 0.45) (define Ltotal (+ Lgs Lgl)) (define Ls 0.24) (define Ld 0.24) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 701957432116748353536 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 79725478217827926016 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 397101104668994306048 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 317933038894584430592 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
375
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.88 micrometers and it is doped with Arsenic at a concentration of 555737061194467770368 cm^-3. The short gate region is of the material Germanium with a length of 0.36 micrometers and it is doped with Boron at a concentration of 158768461883807694848 cm^-3. The long gate region is of the material Germanium with a length of 0.71 micrometers and it is doped with Arsenic at a concentration of 334358514466713632768 cm^-3. The drain region is of the material Silicon with a length of 0.88 micrometers and it is doped with Phosphorus at a concentration of 284445380963445899264 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.003) (define Lgs 0.36) (define Lgl 0.71) (define Ltotal (+ Lgs Lgl)) (define Ls 0.88) (define Ld 0.88) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 555737061194467770368 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 158768461883807694848 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 334358514466713632768 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 284445380963445899264 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
376
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.62 micrometers and it is doped with Boron at a concentration of 166745246615753293824 cm^-3. The short gate region is of the material Germanium with a length of 0.51 micrometers and it is doped with Arsenic at a concentration of 25401210229050433536 cm^-3. The long gate region is of the material SiGe with a length of 0.63 micrometers and it is doped with Phosphorus at a concentration of 240902088838763741184 cm^-3. The drain region is of the material SiGe with a length of 0.62 micrometers and it is doped with Boron at a concentration of 116393200274432770048 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.007) (define Lgs 0.51) (define Lgl 0.63) (define Ltotal (+ Lgs Lgl)) (define Ls 0.62) (define Ld 0.62) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 166745246615753293824 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 25401210229050433536 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 240902088838763741184 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 116393200274432770048 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
377
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.71 micrometers and it is doped with Arsenic at a concentration of 97366906535534592000 cm^-3. The short gate region is of the material Diamond with a length of 0.75 micrometers and it is doped with Phosphorus at a concentration of 223957517438983143424 cm^-3. The long gate region is of the material SiGe with a length of 0.99 micrometers and it is doped with Arsenic at a concentration of 822592987453705420800 cm^-3. The drain region is of the material Diamond with a length of 0.71 micrometers and it is doped with Boron at a concentration of 497350225061977128960 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.006) (define Lgs 0.75) (define Lgl 0.99) (define Ltotal (+ Lgs Lgl)) (define Ls 0.71) (define Ld 0.71) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 97366906535534592000 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 223957517438983143424 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 822592987453705420800 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 497350225061977128960 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
378
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 89932800989126475776 cm^-3. The short gate region is of the material Germanium with a length of 0.6 micrometers and it is doped with Boron at a concentration of 910514901436020162560 cm^-3. The long gate region is of the material Germanium with a length of 0.48 micrometers and it is doped with Boron at a concentration of 303393689752727977984 cm^-3. The drain region is of the material SiGe with a length of 0.44 micrometers and it is doped with Boron at a concentration of 389336670138738671616 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.005) (define Lgs 0.6) (define Lgl 0.48) (define Ltotal (+ Lgs Lgl)) (define Ls 0.44) (define Ld 0.44) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 89932800989126475776 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 910514901436020162560 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 303393689752727977984 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 389336670138738671616 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
379
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.04 micrometers and it is doped with Phosphorus at a concentration of 900579952573827907584 cm^-3. The short gate region is of the material Germanium with a length of 0.08 micrometers and it is doped with Boron at a concentration of 520836243819921276928 cm^-3. The long gate region is of the material Diamond with a length of 0.29 micrometers and it is doped with Arsenic at a concentration of 663430390130608439296 cm^-3. The drain region is of the material GaN with a length of 0.04 micrometers and it is doped with Arsenic at a concentration of 602896227227298299904 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.002) (define Lgs 0.08) (define Lgl 0.29) (define Ltotal (+ Lgs Lgl)) (define Ls 0.04) (define Ld 0.04) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 900579952573827907584 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 520836243819921276928 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 663430390130608439296 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 602896227227298299904 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
380
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.11 micrometers and it is doped with Phosphorus at a concentration of 720007201146956152832 cm^-3. The short gate region is of the material GaN with a length of 0.65 micrometers and it is doped with Arsenic at a concentration of 50349434190504894464 cm^-3. The long gate region is of the material GaN with a length of 0.86 micrometers and it is doped with Phosphorus at a concentration of 62166291722005225472 cm^-3. The drain region is of the material SiGe with a length of 0.11 micrometers and it is doped with Boron at a concentration of 103967461040632807424 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.004) (define Lgs 0.65) (define Lgl 0.86) (define Ltotal (+ Lgs Lgl)) (define Ls 0.11) (define Ld 0.11) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 720007201146956152832 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 50349434190504894464 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 62166291722005225472 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 103967461040632807424 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
381
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.59 micrometers and it is doped with Arsenic at a concentration of 69130457549106470912 cm^-3. The short gate region is of the material Germanium with a length of 0.73 micrometers and it is doped with Boron at a concentration of 775362905471916048384 cm^-3. The long gate region is of the material GaN with a length of 0.78 micrometers and it is doped with Boron at a concentration of 575398836065697398784 cm^-3. The drain region is of the material Germanium with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 950631859074192113664 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.009) (define Lgs 0.73) (define Lgl 0.78) (define Ltotal (+ Lgs Lgl)) (define Ls 0.59) (define Ld 0.59) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 69130457549106470912 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 775362905471916048384 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 575398836065697398784 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 950631859074192113664 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
382
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.89 micrometers and it is doped with Arsenic at a concentration of 871875515654880624640 cm^-3. The short gate region is of the material Silicon with a length of 0.94 micrometers and it is doped with Boron at a concentration of 836733009196978143232 cm^-3. The long gate region is of the material SiGe with a length of 0.96 micrometers and it is doped with Boron at a concentration of 939127502774194012160 cm^-3. The drain region is of the material SiGe with a length of 0.89 micrometers and it is doped with Boron at a concentration of 435541306494080516096 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.005) (define Lgs 0.94) (define Lgl 0.96) (define Ltotal (+ Lgs Lgl)) (define Ls 0.89) (define Ld 0.89) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 871875515654880624640 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 836733009196978143232 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 939127502774194012160 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 435541306494080516096 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
383
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.57 micrometers and it is doped with Boron at a concentration of 789261885450627317760 cm^-3. The short gate region is of the material Germanium with a length of 0.85 micrometers and it is doped with Phosphorus at a concentration of 70944921995346788352 cm^-3. The long gate region is of the material SiGe with a length of 0.4 micrometers and it is doped with Boron at a concentration of 345210573789323591680 cm^-3. The drain region is of the material Diamond with a length of 0.57 micrometers and it is doped with Boron at a concentration of 206761504806296584192 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.002) (define Lgs 0.85) (define Lgl 0.4) (define Ltotal (+ Lgs Lgl)) (define Ls 0.57) (define Ld 0.57) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 789261885450627317760 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 70944921995346788352 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 345210573789323591680 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 206761504806296584192 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
384
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.25 micrometers and it is doped with Boron at a concentration of 958981200805635686400 cm^-3. The short gate region is of the material Silicon with a length of 0.81 micrometers and it is doped with Boron at a concentration of 320220899705262047232 cm^-3. The long gate region is of the material Diamond with a length of 0.25 micrometers and it is doped with Boron at a concentration of 883544003091384107008 cm^-3. The drain region is of the material Germanium with a length of 0.25 micrometers and it is doped with Boron at a concentration of 917756396486045073408 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.009) (define Lgs 0.81) (define Lgl 0.25) (define Ltotal (+ Lgs Lgl)) (define Ls 0.25) (define Ld 0.25) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 958981200805635686400 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 320220899705262047232 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 883544003091384107008 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 917756396486045073408 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
385
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.42 micrometers and it is doped with Phosphorus at a concentration of 295532115148198510592 cm^-3. The short gate region is of the material GaN with a length of 0.97 micrometers and it is doped with Phosphorus at a concentration of 402751556726359982080 cm^-3. The long gate region is of the material SiGe with a length of 0.89 micrometers and it is doped with Phosphorus at a concentration of 333732912103557562368 cm^-3. The drain region is of the material Silicon with a length of 0.42 micrometers and it is doped with Boron at a concentration of 805865322119373258752 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.009) (define Lgs 0.97) (define Lgl 0.89) (define Ltotal (+ Lgs Lgl)) (define Ls 0.42) (define Ld 0.42) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 295532115148198510592 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 402751556726359982080 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 333732912103557562368 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 805865322119373258752 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
386
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.61 micrometers and it is doped with Phosphorus at a concentration of 857135932681401794560 cm^-3. The short gate region is of the material GaN with a length of 0.7 micrometers and it is doped with Boron at a concentration of 24987130920102617088 cm^-3. The long gate region is of the material Germanium with a length of 0.74 micrometers and it is doped with Phosphorus at a concentration of 704831631694560755712 cm^-3. The drain region is of the material GaN with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 718147575211648090112 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.008) (define Lgs 0.7) (define Lgl 0.74) (define Ltotal (+ Lgs Lgl)) (define Ls 0.61) (define Ld 0.61) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 857135932681401794560 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 24987130920102617088 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 704831631694560755712 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 718147575211648090112 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
387
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.35 micrometers and it is doped with Boron at a concentration of 220061930547824754688 cm^-3. The short gate region is of the material Germanium with a length of 0.85 micrometers and it is doped with Arsenic at a concentration of 986539300938864001024 cm^-3. The long gate region is of the material GaN with a length of 0.33 micrometers and it is doped with Boron at a concentration of 908338011879529512960 cm^-3. The drain region is of the material Diamond with a length of 0.35 micrometers and it is doped with Phosphorus at a concentration of 643121049219758686208 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.009) (define Lgs 0.85) (define Lgl 0.33) (define Ltotal (+ Lgs Lgl)) (define Ls 0.35) (define Ld 0.35) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 220061930547824754688 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 986539300938864001024 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 908338011879529512960 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 643121049219758686208 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
388
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.39 micrometers and it is doped with Arsenic at a concentration of 414492136377234620416 cm^-3. The short gate region is of the material Silicon with a length of 0.32 micrometers and it is doped with Boron at a concentration of 991963840306156929024 cm^-3. The long gate region is of the material SiGe with a length of 0.35 micrometers and it is doped with Arsenic at a concentration of 359963479457004257280 cm^-3. The drain region is of the material Silicon with a length of 0.39 micrometers and it is doped with Phosphorus at a concentration of 890477273031619379200 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.004) (define Lgs 0.32) (define Lgl 0.35) (define Ltotal (+ Lgs Lgl)) (define Ls 0.39) (define Ld 0.39) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 414492136377234620416 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 991963840306156929024 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 359963479457004257280 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 890477273031619379200 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
389
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.32 micrometers and it is doped with Boron at a concentration of 643913192954789756928 cm^-3. The short gate region is of the material Diamond with a length of 0.63 micrometers and it is doped with Boron at a concentration of 638491578338334343168 cm^-3. The long gate region is of the material Silicon with a length of 0.12 micrometers and it is doped with Arsenic at a concentration of 120858399647620808704 cm^-3. The drain region is of the material Silicon with a length of 0.32 micrometers and it is doped with Boron at a concentration of 761324787647746015232 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.006) (define Lgs 0.63) (define Lgl 0.12) (define Ltotal (+ Lgs Lgl)) (define Ls 0.32) (define Ld 0.32) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 643913192954789756928 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 638491578338334343168 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 120858399647620808704 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 761324787647746015232 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
390
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.9 micrometers and it is doped with Phosphorus at a concentration of 54700565848347959296 cm^-3. The short gate region is of the material Germanium with a length of 0.05 micrometers and it is doped with Boron at a concentration of 345870629830975160320 cm^-3. The long gate region is of the material Diamond with a length of 0.17 micrometers and it is doped with Boron at a concentration of 715632798807093936128 cm^-3. The drain region is of the material GaN with a length of 0.9 micrometers and it is doped with Arsenic at a concentration of 691409802386933940224 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.007) (define Lgs 0.05) (define Lgl 0.17) (define Ltotal (+ Lgs Lgl)) (define Ls 0.9) (define Ld 0.9) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 54700565848347959296 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 345870629830975160320 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 715632798807093936128 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 691409802386933940224 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
391
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.26 micrometers and it is doped with Boron at a concentration of 551755486948868882432 cm^-3. The short gate region is of the material Germanium with a length of 0.13 micrometers and it is doped with Phosphorus at a concentration of 693212186673843798016 cm^-3. The long gate region is of the material Diamond with a length of 0.91 micrometers and it is doped with Arsenic at a concentration of 316583069168863936512 cm^-3. The drain region is of the material SiGe with a length of 0.26 micrometers and it is doped with Boron at a concentration of 835286281712883859456 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.009) (define Lgs 0.13) (define Lgl 0.91) (define Ltotal (+ Lgs Lgl)) (define Ls 0.26) (define Ld 0.26) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 551755486948868882432 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 693212186673843798016 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 316583069168863936512 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 835286281712883859456 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
392
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.78 micrometers and it is doped with Phosphorus at a concentration of 474475140107607736320 cm^-3. The short gate region is of the material Diamond with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 297838011972661936128 cm^-3. The long gate region is of the material Germanium with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 229094971458639265792 cm^-3. The drain region is of the material Diamond with a length of 0.78 micrometers and it is doped with Arsenic at a concentration of 565769798881343438848 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.003) (define Lgs 0.16) (define Lgl 0.44) (define Ltotal (+ Lgs Lgl)) (define Ls 0.78) (define Ld 0.78) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 474475140107607736320 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 297838011972661936128 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 229094971458639265792 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 565769798881343438848 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
393
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.7 micrometers and it is doped with Boron at a concentration of 938188724707625926656 cm^-3. The short gate region is of the material GaN with a length of 0.94 micrometers and it is doped with Boron at a concentration of 90907917511753678848 cm^-3. The long gate region is of the material GaN with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 17860130463699417088 cm^-3. The drain region is of the material GaN with a length of 0.7 micrometers and it is doped with Boron at a concentration of 788460392155407712256 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.009) (define Lgs 0.94) (define Lgl 0.44) (define Ltotal (+ Lgs Lgl)) (define Ls 0.7) (define Ld 0.7) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 938188724707625926656 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 90907917511753678848 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 17860130463699417088 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 788460392155407712256 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
394
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.28 micrometers and it is doped with Phosphorus at a concentration of 943885210442972528640 cm^-3. The short gate region is of the material Germanium with a length of 0.43 micrometers and it is doped with Phosphorus at a concentration of 630450734911250235392 cm^-3. The long gate region is of the material Silicon with a length of 0.56 micrometers and it is doped with Arsenic at a concentration of 439403408171684593664 cm^-3. The drain region is of the material GaN with a length of 0.28 micrometers and it is doped with Phosphorus at a concentration of 813000838299460042752 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.005) (define Lgs 0.43) (define Lgl 0.56) (define Ltotal (+ Lgs Lgl)) (define Ls 0.28) (define Ld 0.28) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 943885210442972528640 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 630450734911250235392 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 439403408171684593664 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 813000838299460042752 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
395
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.65 micrometers and it is doped with Phosphorus at a concentration of 23991540192096583680 cm^-3. The short gate region is of the material Diamond with a length of 0.69 micrometers and it is doped with Arsenic at a concentration of 92918926929814470656 cm^-3. The long gate region is of the material SiGe with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 582963270794111877120 cm^-3. The drain region is of the material GaN with a length of 0.65 micrometers and it is doped with Arsenic at a concentration of 168194308844550422528 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.005) (define Lgs 0.69) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.65) (define Ld 0.65) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 23991540192096583680 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 92918926929814470656 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 582963270794111877120 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 168194308844550422528 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
396
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.23 micrometers and it is doped with Phosphorus at a concentration of 585223886592868614144 cm^-3. The short gate region is of the material Silicon with a length of 0.6 micrometers and it is doped with Phosphorus at a concentration of 278086260252601319424 cm^-3. The long gate region is of the material Germanium with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 882268340764361097216 cm^-3. The drain region is of the material Silicon with a length of 0.23 micrometers and it is doped with Boron at a concentration of 300949951188075544576 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.008) (define Lgs 0.6) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.23) (define Ld 0.23) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 585223886592868614144 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 278086260252601319424 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 882268340764361097216 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 300949951188075544576 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
397
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.94 micrometers and it is doped with Phosphorus at a concentration of 227200283926519742464 cm^-3. The short gate region is of the material SiGe with a length of 0.68 micrometers and it is doped with Phosphorus at a concentration of 579140160056506843136 cm^-3. The long gate region is of the material Diamond with a length of 0.17 micrometers and it is doped with Boron at a concentration of 723127503689825124352 cm^-3. The drain region is of the material Diamond with a length of 0.94 micrometers and it is doped with Arsenic at a concentration of 28686511105421209600 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.005) (define Lgs 0.68) (define Lgl 0.17) (define Ltotal (+ Lgs Lgl)) (define Ls 0.94) (define Ld 0.94) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 227200283926519742464 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 579140160056506843136 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 723127503689825124352 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 28686511105421209600 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
398
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.93 micrometers and it is doped with Arsenic at a concentration of 600150139813763612672 cm^-3. The short gate region is of the material GaN with a length of 0.26 micrometers and it is doped with Phosphorus at a concentration of 313418623597636747264 cm^-3. The long gate region is of the material GaN with a length of 0.91 micrometers and it is doped with Arsenic at a concentration of 134859325507957096448 cm^-3. The drain region is of the material GaN with a length of 0.93 micrometers and it is doped with Arsenic at a concentration of 682470943027962314752 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.006) (define Lgs 0.26) (define Lgl 0.91) (define Ltotal (+ Lgs Lgl)) (define Ls 0.93) (define Ld 0.93) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 600150139813763612672 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 313418623597636747264 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 134859325507957096448 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 682470943027962314752 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
399
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.03 micrometers and it is doped with Boron at a concentration of 364263776752715300864 cm^-3. The short gate region is of the material Diamond with a length of 0.3 micrometers and it is doped with Boron at a concentration of 384598448185823985664 cm^-3. The long gate region is of the material GaN with a length of 0.67 micrometers and it is doped with Arsenic at a concentration of 309239081744534077440 cm^-3. The drain region is of the material Germanium with a length of 0.03 micrometers and it is doped with Boron at a concentration of 350575112574508466176 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.007) (define Lgs 0.3) (define Lgl 0.67) (define Ltotal (+ Lgs Lgl)) (define Ls 0.03) (define Ld 0.03) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 364263776752715300864 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 384598448185823985664 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 309239081744534077440 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 350575112574508466176 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")