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This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.17 micrometers and it is doped with Boron at a concentration of 231798405396414464000 cm^-3. The short gate region is of the material Germanium with a length of 0.15 micrometers and it is doped with Boron at a concentration of 528040092126835769344 cm^-3. The long gate region is of the material GaN with a length of 0.17 micrometers and it is doped with Phosphorus at a concentration of 930331419884930727936 cm^-3. The drain region is of the material Diamond with a length of 0.17 micrometers and it is doped with Arsenic at a concentration of 802087871534756003840 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.002) (define Lgs 0.15) (define Lgl 0.17) (define Ltotal (+ Lgs Lgl)) (define Ls 0.17) (define Ld 0.17) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 231798405396414464000 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 528040092126835769344 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 930331419884930727936 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 802087871534756003840 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
701
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.53 micrometers and it is doped with Phosphorus at a concentration of 418511687971562586112 cm^-3. The short gate region is of the material GaN with a length of 0.58 micrometers and it is doped with Arsenic at a concentration of 484613997626114048000 cm^-3. The long gate region is of the material Diamond with a length of 0.06 micrometers and it is doped with Arsenic at a concentration of 580349442959811280896 cm^-3. The drain region is of the material Diamond with a length of 0.53 micrometers and it is doped with Boron at a concentration of 688368572165166071808 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.008) (define Lgs 0.58) (define Lgl 0.06) (define Ltotal (+ Lgs Lgl)) (define Ls 0.53) (define Ld 0.53) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 418511687971562586112 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 484613997626114048000 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 580349442959811280896 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 688368572165166071808 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
702
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.19 micrometers and it is doped with Boron at a concentration of 112601038928794894336 cm^-3. The short gate region is of the material Diamond with a length of 0.6 micrometers and it is doped with Phosphorus at a concentration of 529943847968301776896 cm^-3. The long gate region is of the material Silicon with a length of 0.58 micrometers and it is doped with Arsenic at a concentration of 656539572456616099840 cm^-3. The drain region is of the material Diamond with a length of 0.19 micrometers and it is doped with Boron at a concentration of 778150614590581768192 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.008) (define Lgs 0.6) (define Lgl 0.58) (define Ltotal (+ Lgs Lgl)) (define Ls 0.19) (define Ld 0.19) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 112601038928794894336 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 529943847968301776896 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 656539572456616099840 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 778150614590581768192 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
703
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.67 micrometers and it is doped with Boron at a concentration of 254534518866196692992 cm^-3. The short gate region is of the material Silicon with a length of 0.39 micrometers and it is doped with Phosphorus at a concentration of 210885843731567050752 cm^-3. The long gate region is of the material Diamond with a length of 0.26 micrometers and it is doped with Boron at a concentration of 485472735683755900928 cm^-3. The drain region is of the material Diamond with a length of 0.67 micrometers and it is doped with Phosphorus at a concentration of 598791646137980289024 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.006) (define Lgs 0.39) (define Lgl 0.26) (define Ltotal (+ Lgs Lgl)) (define Ls 0.67) (define Ld 0.67) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 254534518866196692992 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 210885843731567050752 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 485472735683755900928 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 598791646137980289024 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
704
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.42 micrometers and it is doped with Arsenic at a concentration of 341701124103804026880 cm^-3. The short gate region is of the material Silicon with a length of 0.06 micrometers and it is doped with Boron at a concentration of 22137292660128161792 cm^-3. The long gate region is of the material Silicon with a length of 0.88 micrometers and it is doped with Phosphorus at a concentration of 490884966544827482112 cm^-3. The drain region is of the material GaN with a length of 0.42 micrometers and it is doped with Phosphorus at a concentration of 269771376132539219968 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.004) (define Lgs 0.06) (define Lgl 0.88) (define Ltotal (+ Lgs Lgl)) (define Ls 0.42) (define Ld 0.42) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 341701124103804026880 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 22137292660128161792 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 490884966544827482112 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 269771376132539219968 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
705
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.89 micrometers and it is doped with Boron at a concentration of 286825865390486224896 cm^-3. The short gate region is of the material Diamond with a length of 0.39 micrometers and it is doped with Phosphorus at a concentration of 440354813426697240576 cm^-3. The long gate region is of the material Germanium with a length of 0.3 micrometers and it is doped with Phosphorus at a concentration of 862435150850389573632 cm^-3. The drain region is of the material GaN with a length of 0.89 micrometers and it is doped with Arsenic at a concentration of 105007219748590698496 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.002) (define Lgs 0.39) (define Lgl 0.3) (define Ltotal (+ Lgs Lgl)) (define Ls 0.89) (define Ld 0.89) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 286825865390486224896 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 440354813426697240576 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 862435150850389573632 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 105007219748590698496 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
706
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.02 micrometers and it is doped with Phosphorus at a concentration of 213553449117872979968 cm^-3. The short gate region is of the material GaN with a length of 0.37 micrometers and it is doped with Arsenic at a concentration of 299571438904934137856 cm^-3. The long gate region is of the material Diamond with a length of 0.19 micrometers and it is doped with Arsenic at a concentration of 75326483450796048384 cm^-3. The drain region is of the material GaN with a length of 0.02 micrometers and it is doped with Boron at a concentration of 904079602899936083968 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.005) (define Lgs 0.37) (define Lgl 0.19) (define Ltotal (+ Lgs Lgl)) (define Ls 0.02) (define Ld 0.02) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 213553449117872979968 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 299571438904934137856 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 75326483450796048384 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 904079602899936083968 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
707
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.58 micrometers and it is doped with Arsenic at a concentration of 853582787813804343296 cm^-3. The short gate region is of the material Germanium with a length of 0.24 micrometers and it is doped with Phosphorus at a concentration of 635079086228844445696 cm^-3. The long gate region is of the material GaN with a length of 0.65 micrometers and it is doped with Phosphorus at a concentration of 812548485033669689344 cm^-3. The drain region is of the material GaN with a length of 0.58 micrometers and it is doped with Phosphorus at a concentration of 395411486915112599552 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.008) (define Lgs 0.24) (define Lgl 0.65) (define Ltotal (+ Lgs Lgl)) (define Ls 0.58) (define Ld 0.58) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 853582787813804343296 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 635079086228844445696 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 812548485033669689344 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 395411486915112599552 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
708
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.79 micrometers and it is doped with Arsenic at a concentration of 14193486733630631936 cm^-3. The short gate region is of the material Diamond with a length of 0.67 micrometers and it is doped with Boron at a concentration of 295116705918441455616 cm^-3. The long gate region is of the material SiGe with a length of 0.39 micrometers and it is doped with Phosphorus at a concentration of 893619251357132652544 cm^-3. The drain region is of the material Diamond with a length of 0.79 micrometers and it is doped with Phosphorus at a concentration of 156808052701490806784 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.008) (define Lgs 0.67) (define Lgl 0.39) (define Ltotal (+ Lgs Lgl)) (define Ls 0.79) (define Ld 0.79) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 14193486733630631936 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 295116705918441455616 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 893619251357132652544 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 156808052701490806784 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
709
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.37 micrometers and it is doped with Boron at a concentration of 453528496765406019584 cm^-3. The short gate region is of the material Diamond with a length of 0.81 micrometers and it is doped with Boron at a concentration of 640807941685202255872 cm^-3. The long gate region is of the material GaN with a length of 0.08 micrometers and it is doped with Phosphorus at a concentration of 140453742053264785408 cm^-3. The drain region is of the material Diamond with a length of 0.37 micrometers and it is doped with Phosphorus at a concentration of 20904005448047198208 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.009) (define Lgs 0.81) (define Lgl 0.08) (define Ltotal (+ Lgs Lgl)) (define Ls 0.37) (define Ld 0.37) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 453528496765406019584 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 640807941685202255872 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 140453742053264785408 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 20904005448047198208 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
710
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.4 micrometers and it is doped with Phosphorus at a concentration of 651897216694484074496 cm^-3. The short gate region is of the material Silicon with a length of 0.74 micrometers and it is doped with Boron at a concentration of 672598263736518180864 cm^-3. The long gate region is of the material GaN with a length of 0.21 micrometers and it is doped with Arsenic at a concentration of 805593581935197683712 cm^-3. The drain region is of the material Germanium with a length of 0.4 micrometers and it is doped with Phosphorus at a concentration of 902550965303352623104 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.007) (define Lgs 0.74) (define Lgl 0.21) (define Ltotal (+ Lgs Lgl)) (define Ls 0.4) (define Ld 0.4) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 651897216694484074496 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 672598263736518180864 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 805593581935197683712 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 902550965303352623104 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
711
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.84 micrometers and it is doped with Boron at a concentration of 723937361042773377024 cm^-3. The short gate region is of the material Silicon with a length of 0.05 micrometers and it is doped with Phosphorus at a concentration of 541546474670369013760 cm^-3. The long gate region is of the material GaN with a length of 0.08 micrometers and it is doped with Phosphorus at a concentration of 430990104215765254144 cm^-3. The drain region is of the material Diamond with a length of 0.84 micrometers and it is doped with Boron at a concentration of 752027639690935664640 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.009) (define Lgs 0.05) (define Lgl 0.08) (define Ltotal (+ Lgs Lgl)) (define Ls 0.84) (define Ld 0.84) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 723937361042773377024 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 541546474670369013760 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 430990104215765254144 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 752027639690935664640 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
712
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.3 micrometers and it is doped with Boron at a concentration of 819441811070595235840 cm^-3. The short gate region is of the material Germanium with a length of 0.78 micrometers and it is doped with Arsenic at a concentration of 619761258958312046592 cm^-3. The long gate region is of the material Silicon with a length of 0.54 micrometers and it is doped with Boron at a concentration of 962096865056848347136 cm^-3. The drain region is of the material SiGe with a length of 0.3 micrometers and it is doped with Phosphorus at a concentration of 421037521083381317632 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.006) (define Lgs 0.78) (define Lgl 0.54) (define Ltotal (+ Lgs Lgl)) (define Ls 0.3) (define Ld 0.3) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 819441811070595235840 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 619761258958312046592 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 962096865056848347136 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 421037521083381317632 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
713
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.51 micrometers and it is doped with Boron at a concentration of 188133726100842545152 cm^-3. The short gate region is of the material Germanium with a length of 0.35 micrometers and it is doped with Boron at a concentration of 11211240048712095744 cm^-3. The long gate region is of the material Diamond with a length of 0.12 micrometers and it is doped with Phosphorus at a concentration of 200557080407876829184 cm^-3. The drain region is of the material Germanium with a length of 0.51 micrometers and it is doped with Boron at a concentration of 188202939315835437056 cm^-3. The gate oxide thickness is 0.01 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.01) (define Lgs 0.35) (define Lgl 0.12) (define Ltotal (+ Lgs Lgl)) (define Ls 0.51) (define Ld 0.51) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 188133726100842545152 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 11211240048712095744 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 200557080407876829184 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 188202939315835437056 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
714
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.97 micrometers and it is doped with Phosphorus at a concentration of 498447891346954518528 cm^-3. The short gate region is of the material Germanium with a length of 0.28 micrometers and it is doped with Boron at a concentration of 484185719884628754432 cm^-3. The long gate region is of the material Diamond with a length of 0.52 micrometers and it is doped with Phosphorus at a concentration of 7773791979247391744 cm^-3. The drain region is of the material SiGe with a length of 0.97 micrometers and it is doped with Phosphorus at a concentration of 380154986106173652992 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.009) (define Lgs 0.28) (define Lgl 0.52) (define Ltotal (+ Lgs Lgl)) (define Ls 0.97) (define Ld 0.97) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 498447891346954518528 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 484185719884628754432 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 7773791979247391744 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 380154986106173652992 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
715
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.86 micrometers and it is doped with Boron at a concentration of 410325571081869983744 cm^-3. The short gate region is of the material SiGe with a length of 0.15 micrometers and it is doped with Arsenic at a concentration of 360519275460438917120 cm^-3. The long gate region is of the material Germanium with a length of 0.26 micrometers and it is doped with Phosphorus at a concentration of 167843227970790129664 cm^-3. The drain region is of the material GaN with a length of 0.86 micrometers and it is doped with Phosphorus at a concentration of 190542812734798004224 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.009) (define Lgs 0.15) (define Lgl 0.26) (define Ltotal (+ Lgs Lgl)) (define Ls 0.86) (define Ld 0.86) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 410325571081869983744 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 360519275460438917120 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 167843227970790129664 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 190542812734798004224 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
716
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.66 micrometers and it is doped with Arsenic at a concentration of 212165967448443977728 cm^-3. The short gate region is of the material Diamond with a length of 0.4 micrometers and it is doped with Arsenic at a concentration of 755548076061039394816 cm^-3. The long gate region is of the material Diamond with a length of 0.48 micrometers and it is doped with Phosphorus at a concentration of 157059729614083751936 cm^-3. The drain region is of the material Silicon with a length of 0.66 micrometers and it is doped with Arsenic at a concentration of 860064844811823480832 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.002) (define Lgs 0.4) (define Lgl 0.48) (define Ltotal (+ Lgs Lgl)) (define Ls 0.66) (define Ld 0.66) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 212165967448443977728 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 755548076061039394816 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 157059729614083751936 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 860064844811823480832 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
717
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.91 micrometers and it is doped with Boron at a concentration of 395409304530963922944 cm^-3. The short gate region is of the material Germanium with a length of 0.23 micrometers and it is doped with Phosphorus at a concentration of 214112373042572427264 cm^-3. The long gate region is of the material GaN with a length of 0.95 micrometers and it is doped with Boron at a concentration of 573849776217816956928 cm^-3. The drain region is of the material Silicon with a length of 0.91 micrometers and it is doped with Arsenic at a concentration of 547711801449842343936 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.005) (define Lgs 0.23) (define Lgl 0.95) (define Ltotal (+ Lgs Lgl)) (define Ls 0.91) (define Ld 0.91) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 395409304530963922944 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 214112373042572427264 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 573849776217816956928 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 547711801449842343936 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
718
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.93 micrometers and it is doped with Arsenic at a concentration of 873449175610623131648 cm^-3. The short gate region is of the material GaN with a length of 0.31 micrometers and it is doped with Arsenic at a concentration of 531118425214035034112 cm^-3. The long gate region is of the material Diamond with a length of 0.37 micrometers and it is doped with Arsenic at a concentration of 157720248966394970112 cm^-3. The drain region is of the material GaN with a length of 0.93 micrometers and it is doped with Phosphorus at a concentration of 353414004175755673600 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.008) (define Lgs 0.31) (define Lgl 0.37) (define Ltotal (+ Lgs Lgl)) (define Ls 0.93) (define Ld 0.93) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 873449175610623131648 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 531118425214035034112 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 157720248966394970112 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 353414004175755673600 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
719
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.97 micrometers and it is doped with Boron at a concentration of 124139282525199204352 cm^-3. The short gate region is of the material GaN with a length of 0.78 micrometers and it is doped with Arsenic at a concentration of 626238864820982906880 cm^-3. The long gate region is of the material Diamond with a length of 0.28 micrometers and it is doped with Arsenic at a concentration of 483713183441998970880 cm^-3. The drain region is of the material SiGe with a length of 0.97 micrometers and it is doped with Boron at a concentration of 573295303472623124480 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.008) (define Lgs 0.78) (define Lgl 0.28) (define Ltotal (+ Lgs Lgl)) (define Ls 0.97) (define Ld 0.97) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 124139282525199204352 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 626238864820982906880 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 483713183441998970880 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 573295303472623124480 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
720
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.28 micrometers and it is doped with Boron at a concentration of 548114295838018764800 cm^-3. The short gate region is of the material Germanium with a length of 0.23 micrometers and it is doped with Arsenic at a concentration of 765319586026395271168 cm^-3. The long gate region is of the material GaN with a length of 0.04 micrometers and it is doped with Phosphorus at a concentration of 880708361727657246720 cm^-3. The drain region is of the material Germanium with a length of 0.28 micrometers and it is doped with Arsenic at a concentration of 747241184619087527936 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.005) (define Lgs 0.23) (define Lgl 0.04) (define Ltotal (+ Lgs Lgl)) (define Ls 0.28) (define Ld 0.28) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 548114295838018764800 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 765319586026395271168 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 880708361727657246720 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 747241184619087527936 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
721
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.08 micrometers and it is doped with Phosphorus at a concentration of 350617756237641940992 cm^-3. The short gate region is of the material GaN with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 899805498125717209088 cm^-3. The long gate region is of the material GaN with a length of 0.43 micrometers and it is doped with Arsenic at a concentration of 697898933963087020032 cm^-3. The drain region is of the material Diamond with a length of 0.08 micrometers and it is doped with Arsenic at a concentration of 744744516092873539584 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.006) (define Lgs 0.55) (define Lgl 0.43) (define Ltotal (+ Lgs Lgl)) (define Ls 0.08) (define Ld 0.08) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 350617756237641940992 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 899805498125717209088 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 697898933963087020032 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 744744516092873539584 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
722
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.64 micrometers and it is doped with Arsenic at a concentration of 627622720793526403072 cm^-3. The short gate region is of the material SiGe with a length of 0.77 micrometers and it is doped with Phosphorus at a concentration of 536995320467594280960 cm^-3. The long gate region is of the material Diamond with a length of 0.22 micrometers and it is doped with Phosphorus at a concentration of 322018766245104844800 cm^-3. The drain region is of the material GaN with a length of 0.64 micrometers and it is doped with Boron at a concentration of 193628904872278392832 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.001) (define Lgs 0.77) (define Lgl 0.22) (define Ltotal (+ Lgs Lgl)) (define Ls 0.64) (define Ld 0.64) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 627622720793526403072 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 536995320467594280960 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 322018766245104844800 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 193628904872278392832 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
723
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.85 micrometers and it is doped with Arsenic at a concentration of 868110399838025154560 cm^-3. The short gate region is of the material Germanium with a length of 0.21 micrometers and it is doped with Arsenic at a concentration of 830893698682216382464 cm^-3. The long gate region is of the material GaN with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 984615132181513109504 cm^-3. The drain region is of the material Diamond with a length of 0.85 micrometers and it is doped with Boron at a concentration of 322682595251567067136 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.005) (define Lgs 0.21) (define Lgl 0.61) (define Ltotal (+ Lgs Lgl)) (define Ls 0.85) (define Ld 0.85) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 868110399838025154560 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 830893698682216382464 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 984615132181513109504 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 322682595251567067136 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
724
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.1 micrometers and it is doped with Phosphorus at a concentration of 553999133154631876608 cm^-3. The short gate region is of the material GaN with a length of 0.32 micrometers and it is doped with Arsenic at a concentration of 45092409381923897344 cm^-3. The long gate region is of the material GaN with a length of 0.99 micrometers and it is doped with Arsenic at a concentration of 61840979163147960320 cm^-3. The drain region is of the material Germanium with a length of 0.1 micrometers and it is doped with Phosphorus at a concentration of 380131691162054557696 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.004) (define Lgs 0.32) (define Lgl 0.99) (define Ltotal (+ Lgs Lgl)) (define Ls 0.1) (define Ld 0.1) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 553999133154631876608 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 45092409381923897344 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 61840979163147960320 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 380131691162054557696 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
725
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.77 micrometers and it is doped with Phosphorus at a concentration of 80777910925237256192 cm^-3. The short gate region is of the material Germanium with a length of 0.07 micrometers and it is doped with Phosphorus at a concentration of 377133927199501058048 cm^-3. The long gate region is of the material SiGe with a length of 0.8 micrometers and it is doped with Arsenic at a concentration of 13724104662169229312 cm^-3. The drain region is of the material Germanium with a length of 0.77 micrometers and it is doped with Arsenic at a concentration of 597695838110766727168 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.002) (define Lgs 0.07) (define Lgl 0.8) (define Ltotal (+ Lgs Lgl)) (define Ls 0.77) (define Ld 0.77) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 80777910925237256192 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 377133927199501058048 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 13724104662169229312 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 597695838110766727168 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
726
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.02 micrometers and it is doped with Phosphorus at a concentration of 684236685809502257152 cm^-3. The short gate region is of the material SiGe with a length of 0.63 micrometers and it is doped with Arsenic at a concentration of 589670639452098134016 cm^-3. The long gate region is of the material Diamond with a length of 0.19 micrometers and it is doped with Phosphorus at a concentration of 239256509211073839104 cm^-3. The drain region is of the material Germanium with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 638205971568701472768 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.006) (define Lgs 0.63) (define Lgl 0.19) (define Ltotal (+ Lgs Lgl)) (define Ls 0.02) (define Ld 0.02) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 684236685809502257152 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 589670639452098134016 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 239256509211073839104 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 638205971568701472768 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
727
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 632133464250962673664 cm^-3. The short gate region is of the material SiGe with a length of 0.58 micrometers and it is doped with Arsenic at a concentration of 920283457483691655168 cm^-3. The long gate region is of the material GaN with a length of 0.59 micrometers and it is doped with Phosphorus at a concentration of 142496357912116985856 cm^-3. The drain region is of the material Silicon with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 604482459227227160576 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.007) (define Lgs 0.58) (define Lgl 0.59) (define Ltotal (+ Lgs Lgl)) (define Ls 0.61) (define Ld 0.61) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 632133464250962673664 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 920283457483691655168 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 142496357912116985856 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 604482459227227160576 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
728
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 574159348390583074816 cm^-3. The short gate region is of the material Silicon with a length of 0.32 micrometers and it is doped with Arsenic at a concentration of 820705681354090741760 cm^-3. The long gate region is of the material Diamond with a length of 0.32 micrometers and it is doped with Boron at a concentration of 811216554472243068928 cm^-3. The drain region is of the material GaN with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 265325466253801291776 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.006) (define Lgs 0.32) (define Lgl 0.32) (define Ltotal (+ Lgs Lgl)) (define Ls 0.71) (define Ld 0.71) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 574159348390583074816 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 820705681354090741760 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 811216554472243068928 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 265325466253801291776 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
729
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.09 micrometers and it is doped with Arsenic at a concentration of 522742489499159494656 cm^-3. The short gate region is of the material GaN with a length of 0.63 micrometers and it is doped with Arsenic at a concentration of 266115197897126215680 cm^-3. The long gate region is of the material GaN with a length of 0.31 micrometers and it is doped with Phosphorus at a concentration of 54532820896600498176 cm^-3. The drain region is of the material SiGe with a length of 0.09 micrometers and it is doped with Boron at a concentration of 549408385053669588992 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.006) (define Lgs 0.63) (define Lgl 0.31) (define Ltotal (+ Lgs Lgl)) (define Ls 0.09) (define Ld 0.09) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 522742489499159494656 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 266115197897126215680 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 54532820896600498176 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 549408385053669588992 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
730
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.68 micrometers and it is doped with Phosphorus at a concentration of 662009993324836683776 cm^-3. The short gate region is of the material GaN with a length of 0.28 micrometers and it is doped with Boron at a concentration of 114293257955412197376 cm^-3. The long gate region is of the material Silicon with a length of 0.14 micrometers and it is doped with Boron at a concentration of 494946162381166215168 cm^-3. The drain region is of the material GaN with a length of 0.68 micrometers and it is doped with Boron at a concentration of 935996099082056892416 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.005) (define Lgs 0.28) (define Lgl 0.14) (define Ltotal (+ Lgs Lgl)) (define Ls 0.68) (define Ld 0.68) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 662009993324836683776 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 114293257955412197376 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 494946162381166215168 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 935996099082056892416 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
731
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.51 micrometers and it is doped with Phosphorus at a concentration of 267843391146675601408 cm^-3. The short gate region is of the material Silicon with a length of 0.49 micrometers and it is doped with Boron at a concentration of 704289536668259319808 cm^-3. The long gate region is of the material Germanium with a length of 0.64 micrometers and it is doped with Phosphorus at a concentration of 570619670088298790912 cm^-3. The drain region is of the material SiGe with a length of 0.51 micrometers and it is doped with Boron at a concentration of 911222117773745586176 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.008) (define Lgs 0.49) (define Lgl 0.64) (define Ltotal (+ Lgs Lgl)) (define Ls 0.51) (define Ld 0.51) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 267843391146675601408 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 704289536668259319808 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 570619670088298790912 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 911222117773745586176 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
732
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 397376013757417521152 cm^-3. The short gate region is of the material Germanium with a length of 0.72 micrometers and it is doped with Arsenic at a concentration of 757576792601862995968 cm^-3. The long gate region is of the material GaN with a length of 0.76 micrometers and it is doped with Phosphorus at a concentration of 490467331791549235200 cm^-3. The drain region is of the material Silicon with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 226017787419730771968 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.009) (define Lgs 0.72) (define Lgl 0.76) (define Ltotal (+ Lgs Lgl)) (define Ls 0.55) (define Ld 0.55) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 397376013757417521152 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 757576792601862995968 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 490467331791549235200 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 226017787419730771968 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
733
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.19 micrometers and it is doped with Boron at a concentration of 670149647896476385280 cm^-3. The short gate region is of the material Germanium with a length of 0.92 micrometers and it is doped with Arsenic at a concentration of 248661552166553059328 cm^-3. The long gate region is of the material Diamond with a length of 0.51 micrometers and it is doped with Phosphorus at a concentration of 978538909766054313984 cm^-3. The drain region is of the material GaN with a length of 0.19 micrometers and it is doped with Boron at a concentration of 803087310476681412608 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.004) (define Lgs 0.92) (define Lgl 0.51) (define Ltotal (+ Lgs Lgl)) (define Ls 0.19) (define Ld 0.19) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 670149647896476385280 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 248661552166553059328 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 978538909766054313984 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 803087310476681412608 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
734
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 784187914259363921920 cm^-3. The short gate region is of the material Silicon with a length of 0.46 micrometers and it is doped with Boron at a concentration of 251341506943364661248 cm^-3. The long gate region is of the material GaN with a length of 0.32 micrometers and it is doped with Boron at a concentration of 751934662622127456256 cm^-3. The drain region is of the material Germanium with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 536513677025388003328 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.007) (define Lgs 0.46) (define Lgl 0.32) (define Ltotal (+ Lgs Lgl)) (define Ls 0.61) (define Ld 0.61) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 784187914259363921920 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 251341506943364661248 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 751934662622127456256 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 536513677025388003328 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
735
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.35 micrometers and it is doped with Arsenic at a concentration of 553137976184791367680 cm^-3. The short gate region is of the material SiGe with a length of 0.63 micrometers and it is doped with Arsenic at a concentration of 177535961482661691392 cm^-3. The long gate region is of the material Silicon with a length of 0.36 micrometers and it is doped with Boron at a concentration of 255990325284792827904 cm^-3. The drain region is of the material Diamond with a length of 0.35 micrometers and it is doped with Boron at a concentration of 734777778836735262720 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.004) (define Lgs 0.63) (define Lgl 0.36) (define Ltotal (+ Lgs Lgl)) (define Ls 0.35) (define Ld 0.35) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 553137976184791367680 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 177535961482661691392 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 255990325284792827904 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 734777778836735262720 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
736
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.39 micrometers and it is doped with Phosphorus at a concentration of 709978889550171078656 cm^-3. The short gate region is of the material GaN with a length of 0.17 micrometers and it is doped with Arsenic at a concentration of 880791899929969295360 cm^-3. The long gate region is of the material Diamond with a length of 0.27 micrometers and it is doped with Phosphorus at a concentration of 271086915464028454912 cm^-3. The drain region is of the material SiGe with a length of 0.39 micrometers and it is doped with Phosphorus at a concentration of 743862949098783768576 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.006) (define Lgs 0.17) (define Lgl 0.27) (define Ltotal (+ Lgs Lgl)) (define Ls 0.39) (define Ld 0.39) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 709978889550171078656 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 880791899929969295360 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 271086915464028454912 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 743862949098783768576 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
737
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 526797543339529207808 cm^-3. The short gate region is of the material Silicon with a length of 0.79 micrometers and it is doped with Boron at a concentration of 855251204652358565888 cm^-3. The long gate region is of the material Germanium with a length of 0.45 micrometers and it is doped with Phosphorus at a concentration of 605211831251858358272 cm^-3. The drain region is of the material Diamond with a length of 0.02 micrometers and it is doped with Boron at a concentration of 827352040185599098880 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.007) (define Lgs 0.79) (define Lgl 0.45) (define Ltotal (+ Lgs Lgl)) (define Ls 0.02) (define Ld 0.02) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 526797543339529207808 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 855251204652358565888 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 605211831251858358272 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 827352040185599098880 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
738
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.78 micrometers and it is doped with Phosphorus at a concentration of 990304047091685916672 cm^-3. The short gate region is of the material Germanium with a length of 0.2 micrometers and it is doped with Boron at a concentration of 12929525011209857024 cm^-3. The long gate region is of the material GaN with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 806075043941672026112 cm^-3. The drain region is of the material SiGe with a length of 0.78 micrometers and it is doped with Arsenic at a concentration of 991211014850590146560 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.002) (define Lgs 0.2) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.78) (define Ld 0.78) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 990304047091685916672 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 12929525011209857024 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 806075043941672026112 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 991211014850590146560 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
739
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.21 micrometers and it is doped with Boron at a concentration of 513011172971450990592 cm^-3. The short gate region is of the material GaN with a length of 0.94 micrometers and it is doped with Phosphorus at a concentration of 242285383768449155072 cm^-3. The long gate region is of the material GaN with a length of 0.46 micrometers and it is doped with Phosphorus at a concentration of 142346693809515298816 cm^-3. The drain region is of the material Silicon with a length of 0.21 micrometers and it is doped with Phosphorus at a concentration of 794395476461142671360 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.009) (define Lgs 0.94) (define Lgl 0.46) (define Ltotal (+ Lgs Lgl)) (define Ls 0.21) (define Ld 0.21) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 513011172971450990592 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 242285383768449155072 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 142346693809515298816 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 794395476461142671360 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
740
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.05 micrometers and it is doped with Boron at a concentration of 352279751864964087808 cm^-3. The short gate region is of the material Diamond with a length of 0.52 micrometers and it is doped with Arsenic at a concentration of 617313368459566514176 cm^-3. The long gate region is of the material GaN with a length of 0.94 micrometers and it is doped with Boron at a concentration of 194143316792579555328 cm^-3. The drain region is of the material GaN with a length of 0.05 micrometers and it is doped with Phosphorus at a concentration of 921609075523305078784 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.003) (define Lgs 0.52) (define Lgl 0.94) (define Ltotal (+ Lgs Lgl)) (define Ls 0.05) (define Ld 0.05) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 352279751864964087808 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 617313368459566514176 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 194143316792579555328 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 921609075523305078784 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
741
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.69 micrometers and it is doped with Boron at a concentration of 742372187920566583296 cm^-3. The short gate region is of the material Germanium with a length of 0.86 micrometers and it is doped with Boron at a concentration of 434272345798033932288 cm^-3. The long gate region is of the material Diamond with a length of 0.66 micrometers and it is doped with Phosphorus at a concentration of 417599382506851139584 cm^-3. The drain region is of the material Silicon with a length of 0.69 micrometers and it is doped with Phosphorus at a concentration of 580578931205159780352 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.006) (define Lgs 0.86) (define Lgl 0.66) (define Ltotal (+ Lgs Lgl)) (define Ls 0.69) (define Ld 0.69) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 742372187920566583296 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 434272345798033932288 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 417599382506851139584 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 580578931205159780352 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
742
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.4 micrometers and it is doped with Boron at a concentration of 124517927950794260480 cm^-3. The short gate region is of the material Silicon with a length of 0.37 micrometers and it is doped with Arsenic at a concentration of 100946247631167471616 cm^-3. The long gate region is of the material Diamond with a length of 0.67 micrometers and it is doped with Phosphorus at a concentration of 428054884081481809920 cm^-3. The drain region is of the material Silicon with a length of 0.4 micrometers and it is doped with Arsenic at a concentration of 651063629627236286464 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.003) (define Lgs 0.37) (define Lgl 0.67) (define Ltotal (+ Lgs Lgl)) (define Ls 0.4) (define Ld 0.4) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 124517927950794260480 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 100946247631167471616 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 428054884081481809920 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 651063629627236286464 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
743
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.73 micrometers and it is doped with Phosphorus at a concentration of 735387787932287238144 cm^-3. The short gate region is of the material Diamond with a length of 0.59 micrometers and it is doped with Arsenic at a concentration of 172198722875701100544 cm^-3. The long gate region is of the material SiGe with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 395151026076425781248 cm^-3. The drain region is of the material Germanium with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 584261559055819079680 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.001) (define Lgs 0.59) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.73) (define Ld 0.73) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 735387787932287238144 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 172198722875701100544 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 395151026076425781248 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 584261559055819079680 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
744
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.16 micrometers and it is doped with Arsenic at a concentration of 144933290144499580928 cm^-3. The short gate region is of the material Germanium with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 880360344300721274880 cm^-3. The long gate region is of the material SiGe with a length of 0.23 micrometers and it is doped with Boron at a concentration of 435248211396692541440 cm^-3. The drain region is of the material Silicon with a length of 0.16 micrometers and it is doped with Phosphorus at a concentration of 928793556367819145216 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.002) (define Lgs 0.61) (define Lgl 0.23) (define Ltotal (+ Lgs Lgl)) (define Ls 0.16) (define Ld 0.16) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 144933290144499580928 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 880360344300721274880 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 435248211396692541440 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 928793556367819145216 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
745
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.93 micrometers and it is doped with Phosphorus at a concentration of 331551717342418436096 cm^-3. The short gate region is of the material Diamond with a length of 0.37 micrometers and it is doped with Phosphorus at a concentration of 128816788839116996608 cm^-3. The long gate region is of the material Diamond with a length of 0.14 micrometers and it is doped with Boron at a concentration of 581912506984704638976 cm^-3. The drain region is of the material Germanium with a length of 0.93 micrometers and it is doped with Boron at a concentration of 943366942119122829312 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.007) (define Lgs 0.37) (define Lgl 0.14) (define Ltotal (+ Lgs Lgl)) (define Ls 0.93) (define Ld 0.93) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 331551717342418436096 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 128816788839116996608 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 581912506984704638976 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 943366942119122829312 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
746
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.65 micrometers and it is doped with Boron at a concentration of 359941501927382319104 cm^-3. The short gate region is of the material Silicon with a length of 0.06 micrometers and it is doped with Arsenic at a concentration of 617680734501343330304 cm^-3. The long gate region is of the material Germanium with a length of 0.8 micrometers and it is doped with Boron at a concentration of 204989893475060023296 cm^-3. The drain region is of the material Diamond with a length of 0.65 micrometers and it is doped with Phosphorus at a concentration of 882838953329086562304 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.008) (define Lgs 0.06) (define Lgl 0.8) (define Ltotal (+ Lgs Lgl)) (define Ls 0.65) (define Ld 0.65) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 359941501927382319104 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 617680734501343330304 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 204989893475060023296 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 882838953329086562304 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
747
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.5 micrometers and it is doped with Phosphorus at a concentration of 318440218014745886720 cm^-3. The short gate region is of the material GaN with a length of 0.39 micrometers and it is doped with Arsenic at a concentration of 884991023131546484736 cm^-3. The long gate region is of the material GaN with a length of 0.57 micrometers and it is doped with Boron at a concentration of 347015902171329331200 cm^-3. The drain region is of the material Silicon with a length of 0.5 micrometers and it is doped with Phosphorus at a concentration of 458800130493029154816 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.006) (define Lgs 0.39) (define Lgl 0.57) (define Ltotal (+ Lgs Lgl)) (define Ls 0.5) (define Ld 0.5) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 318440218014745886720 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 884991023131546484736 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 347015902171329331200 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 458800130493029154816 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
748
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.24 micrometers and it is doped with Boron at a concentration of 691692969916675784704 cm^-3. The short gate region is of the material Diamond with a length of 0.79 micrometers and it is doped with Arsenic at a concentration of 862605471479026548736 cm^-3. The long gate region is of the material Diamond with a length of 0.02 micrometers and it is doped with Boron at a concentration of 538397535912213348352 cm^-3. The drain region is of the material Diamond with a length of 0.24 micrometers and it is doped with Arsenic at a concentration of 911601171011267854336 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.001) (define Lgs 0.79) (define Lgl 0.02) (define Ltotal (+ Lgs Lgl)) (define Ls 0.24) (define Ld 0.24) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 691692969916675784704 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 862605471479026548736 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 538397535912213348352 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 911601171011267854336 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
749
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.66 micrometers and it is doped with Boron at a concentration of 417784814855209353216 cm^-3. The short gate region is of the material GaN with a length of 0.89 micrometers and it is doped with Boron at a concentration of 200506796381631840256 cm^-3. The long gate region is of the material SiGe with a length of 0.21 micrometers and it is doped with Phosphorus at a concentration of 67341878898641403904 cm^-3. The drain region is of the material Diamond with a length of 0.66 micrometers and it is doped with Boron at a concentration of 282129612694364389376 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.004) (define Lgs 0.89) (define Lgl 0.21) (define Ltotal (+ Lgs Lgl)) (define Ls 0.66) (define Ld 0.66) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 417784814855209353216 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 200506796381631840256 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 67341878898641403904 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 282129612694364389376 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
750
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.9 micrometers and it is doped with Phosphorus at a concentration of 151798656842017079296 cm^-3. The short gate region is of the material SiGe with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 299949428529019355136 cm^-3. The long gate region is of the material Silicon with a length of 0.81 micrometers and it is doped with Phosphorus at a concentration of 425529444845192871936 cm^-3. The drain region is of the material GaN with a length of 0.9 micrometers and it is doped with Arsenic at a concentration of 98969267191248076800 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.005) (define Lgs 0.44) (define Lgl 0.81) (define Ltotal (+ Lgs Lgl)) (define Ls 0.9) (define Ld 0.9) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 151798656842017079296 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 299949428529019355136 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 425529444845192871936 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 98969267191248076800 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
751
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.73 micrometers and it is doped with Phosphorus at a concentration of 503996217353103081472 cm^-3. The short gate region is of the material Silicon with a length of 0.13 micrometers and it is doped with Phosphorus at a concentration of 699060581438516232192 cm^-3. The long gate region is of the material SiGe with a length of 0.53 micrometers and it is doped with Boron at a concentration of 458473680115207634944 cm^-3. The drain region is of the material Germanium with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 848175197409254965248 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.008) (define Lgs 0.13) (define Lgl 0.53) (define Ltotal (+ Lgs Lgl)) (define Ls 0.73) (define Ld 0.73) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 503996217353103081472 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 699060581438516232192 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 458473680115207634944 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 848175197409254965248 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
752
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.18 micrometers and it is doped with Phosphorus at a concentration of 662528646446670151680 cm^-3. The short gate region is of the material Diamond with a length of 0.47 micrometers and it is doped with Boron at a concentration of 867058817193443983360 cm^-3. The long gate region is of the material Diamond with a length of 0.63 micrometers and it is doped with Arsenic at a concentration of 421796050101453062144 cm^-3. The drain region is of the material SiGe with a length of 0.18 micrometers and it is doped with Phosphorus at a concentration of 254413526059854135296 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.002) (define Lgs 0.47) (define Lgl 0.63) (define Ltotal (+ Lgs Lgl)) (define Ls 0.18) (define Ld 0.18) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 662528646446670151680 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 867058817193443983360 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 421796050101453062144 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 254413526059854135296 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
753
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 271258926943766773760 cm^-3. The short gate region is of the material GaN with a length of 0.94 micrometers and it is doped with Boron at a concentration of 109424809103049670656 cm^-3. The long gate region is of the material GaN with a length of 0.47 micrometers and it is doped with Phosphorus at a concentration of 357887301232889692160 cm^-3. The drain region is of the material Germanium with a length of 0.44 micrometers and it is doped with Arsenic at a concentration of 271041042589949526016 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.009) (define Lgs 0.94) (define Lgl 0.47) (define Ltotal (+ Lgs Lgl)) (define Ls 0.44) (define Ld 0.44) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 271258926943766773760 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 109424809103049670656 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 357887301232889692160 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 271041042589949526016 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
754
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.62 micrometers and it is doped with Phosphorus at a concentration of 51552145890631458816 cm^-3. The short gate region is of the material Diamond with a length of 0.81 micrometers and it is doped with Arsenic at a concentration of 875463642070159458304 cm^-3. The long gate region is of the material SiGe with a length of 0.21 micrometers and it is doped with Arsenic at a concentration of 659197175165121724416 cm^-3. The drain region is of the material SiGe with a length of 0.62 micrometers and it is doped with Boron at a concentration of 630826157748828372992 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.003) (define Lgs 0.81) (define Lgl 0.21) (define Ltotal (+ Lgs Lgl)) (define Ls 0.62) (define Ld 0.62) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 51552145890631458816 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 875463642070159458304 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 659197175165121724416 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 630826157748828372992 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
755
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.66 micrometers and it is doped with Phosphorus at a concentration of 157146441887692488704 cm^-3. The short gate region is of the material Germanium with a length of 0.81 micrometers and it is doped with Arsenic at a concentration of 287587215174262718464 cm^-3. The long gate region is of the material Germanium with a length of 0.34 micrometers and it is doped with Arsenic at a concentration of 309078423296770703360 cm^-3. The drain region is of the material Silicon with a length of 0.66 micrometers and it is doped with Boron at a concentration of 694544490662019203072 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.007) (define Lgs 0.81) (define Lgl 0.34) (define Ltotal (+ Lgs Lgl)) (define Ls 0.66) (define Ld 0.66) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 157146441887692488704 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 287587215174262718464 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 309078423296770703360 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 694544490662019203072 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
756
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.81 micrometers and it is doped with Phosphorus at a concentration of 826323636107568218112 cm^-3. The short gate region is of the material Diamond with a length of 0.82 micrometers and it is doped with Arsenic at a concentration of 74820130345775595520 cm^-3. The long gate region is of the material SiGe with a length of 0.78 micrometers and it is doped with Arsenic at a concentration of 685942969216780468224 cm^-3. The drain region is of the material Diamond with a length of 0.81 micrometers and it is doped with Arsenic at a concentration of 31275328743198552064 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.002) (define Lgs 0.82) (define Lgl 0.78) (define Ltotal (+ Lgs Lgl)) (define Ls 0.81) (define Ld 0.81) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 826323636107568218112 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 74820130345775595520 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 685942969216780468224 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 31275328743198552064 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
757
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.17 micrometers and it is doped with Phosphorus at a concentration of 87076820601002409984 cm^-3. The short gate region is of the material Germanium with a length of 0.83 micrometers and it is doped with Phosphorus at a concentration of 792636820208821993472 cm^-3. The long gate region is of the material SiGe with a length of 0.9 micrometers and it is doped with Boron at a concentration of 853235265479448592384 cm^-3. The drain region is of the material Germanium with a length of 0.17 micrometers and it is doped with Phosphorus at a concentration of 156156736947158908928 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.004) (define Lgs 0.83) (define Lgl 0.9) (define Ltotal (+ Lgs Lgl)) (define Ls 0.17) (define Ld 0.17) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 87076820601002409984 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 792636820208821993472 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 853235265479448592384 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 156156736947158908928 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
758
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.52 micrometers and it is doped with Phosphorus at a concentration of 396719725716197343232 cm^-3. The short gate region is of the material Silicon with a length of 0.75 micrometers and it is doped with Boron at a concentration of 732884858611380256768 cm^-3. The long gate region is of the material GaN with a length of 0.24 micrometers and it is doped with Phosphorus at a concentration of 982715898467100786688 cm^-3. The drain region is of the material Silicon with a length of 0.52 micrometers and it is doped with Boron at a concentration of 788249588491099439104 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.003) (define Lgs 0.75) (define Lgl 0.24) (define Ltotal (+ Lgs Lgl)) (define Ls 0.52) (define Ld 0.52) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 396719725716197343232 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 732884858611380256768 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 982715898467100786688 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 788249588491099439104 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
759
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 257499438962673123328 cm^-3. The short gate region is of the material GaN with a length of 0.69 micrometers and it is doped with Arsenic at a concentration of 45878232673606860800 cm^-3. The long gate region is of the material Silicon with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 401564556126130536448 cm^-3. The drain region is of the material SiGe with a length of 0.55 micrometers and it is doped with Phosphorus at a concentration of 611337162473517613056 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.007) (define Lgs 0.69) (define Lgl 0.82) (define Ltotal (+ Lgs Lgl)) (define Ls 0.55) (define Ld 0.55) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 257499438962673123328 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 45878232673606860800 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 401564556126130536448 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 611337162473517613056 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
760
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.43 micrometers and it is doped with Arsenic at a concentration of 166045603343248097280 cm^-3. The short gate region is of the material Diamond with a length of 0.88 micrometers and it is doped with Phosphorus at a concentration of 540651814455963549696 cm^-3. The long gate region is of the material GaN with a length of 0.1 micrometers and it is doped with Boron at a concentration of 921784448390188498944 cm^-3. The drain region is of the material Diamond with a length of 0.43 micrometers and it is doped with Arsenic at a concentration of 581565536956186624000 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.005) (define Lgs 0.88) (define Lgl 0.1) (define Ltotal (+ Lgs Lgl)) (define Ls 0.43) (define Ld 0.43) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 166045603343248097280 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 540651814455963549696 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 921784448390188498944 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 581565536956186624000 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
761
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.92 micrometers and it is doped with Arsenic at a concentration of 928684823505655431168 cm^-3. The short gate region is of the material Silicon with a length of 0.7 micrometers and it is doped with Arsenic at a concentration of 799755634100145487872 cm^-3. The long gate region is of the material Silicon with a length of 0.57 micrometers and it is doped with Phosphorus at a concentration of 105705509159862042624 cm^-3. The drain region is of the material Silicon with a length of 0.92 micrometers and it is doped with Arsenic at a concentration of 14466771530733379584 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.007 micrometers.
(define tox 0.002) (define Lgs 0.7) (define Lgl 0.57) (define Ltotal (+ Lgs Lgl)) (define Ls 0.92) (define Ld 0.92) (define Rl 0.007) (define Rs 0.007) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 928684823505655431168 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 799755634100145487872 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 105705509159862042624 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 14466771530733379584 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
762
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.35 micrometers and it is doped with Arsenic at a concentration of 998145711130617053184 cm^-3. The short gate region is of the material Germanium with a length of 0.49 micrometers and it is doped with Phosphorus at a concentration of 349361795869490937856 cm^-3. The long gate region is of the material Silicon with a length of 0.34 micrometers and it is doped with Boron at a concentration of 791578238648329961472 cm^-3. The drain region is of the material Germanium with a length of 0.35 micrometers and it is doped with Phosphorus at a concentration of 764389057962241425408 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.001) (define Lgs 0.49) (define Lgl 0.34) (define Ltotal (+ Lgs Lgl)) (define Ls 0.35) (define Ld 0.35) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 998145711130617053184 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 349361795869490937856 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 791578238648329961472 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 764389057962241425408 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
763
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.58 micrometers and it is doped with Arsenic at a concentration of 699870850903536828416 cm^-3. The short gate region is of the material GaN with a length of 0.22 micrometers and it is doped with Phosphorus at a concentration of 765060716875440586752 cm^-3. The long gate region is of the material Silicon with a length of 0.33 micrometers and it is doped with Phosphorus at a concentration of 638746844422138363904 cm^-3. The drain region is of the material Germanium with a length of 0.58 micrometers and it is doped with Arsenic at a concentration of 909264970703081832448 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.005) (define Lgs 0.22) (define Lgl 0.33) (define Ltotal (+ Lgs Lgl)) (define Ls 0.58) (define Ld 0.58) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 699870850903536828416 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 765060716875440586752 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 638746844422138363904 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 909264970703081832448 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
764
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.17 micrometers and it is doped with Phosphorus at a concentration of 979469414156392988672 cm^-3. The short gate region is of the material GaN with a length of 0.92 micrometers and it is doped with Boron at a concentration of 413449603677626695680 cm^-3. The long gate region is of the material SiGe with a length of 0.08 micrometers and it is doped with Boron at a concentration of 974203163257128353792 cm^-3. The drain region is of the material Silicon with a length of 0.17 micrometers and it is doped with Boron at a concentration of 349701423440021553152 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.009) (define Lgs 0.92) (define Lgl 0.08) (define Ltotal (+ Lgs Lgl)) (define Ls 0.17) (define Ld 0.17) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 979469414156392988672 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 413449603677626695680 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 974203163257128353792 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 349701423440021553152 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
765
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.74 micrometers and it is doped with Arsenic at a concentration of 430709755250098700288 cm^-3. The short gate region is of the material SiGe with a length of 0.84 micrometers and it is doped with Phosphorus at a concentration of 708769419338926260224 cm^-3. The long gate region is of the material GaN with a length of 0.47 micrometers and it is doped with Arsenic at a concentration of 765022386271944835072 cm^-3. The drain region is of the material Diamond with a length of 0.74 micrometers and it is doped with Boron at a concentration of 200763913371193016320 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.008) (define Lgs 0.84) (define Lgl 0.47) (define Ltotal (+ Lgs Lgl)) (define Ls 0.74) (define Ld 0.74) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 430709755250098700288 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 708769419338926260224 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 765022386271944835072 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 200763913371193016320 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
766
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.24 micrometers and it is doped with Boron at a concentration of 901363252475663482880 cm^-3. The short gate region is of the material Silicon with a length of 0.17 micrometers and it is doped with Phosphorus at a concentration of 411741599814630506496 cm^-3. The long gate region is of the material GaN with a length of 0.75 micrometers and it is doped with Arsenic at a concentration of 170804139227020197888 cm^-3. The drain region is of the material SiGe with a length of 0.24 micrometers and it is doped with Boron at a concentration of 331657027359681675264 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.002) (define Lgs 0.17) (define Lgl 0.75) (define Ltotal (+ Lgs Lgl)) (define Ls 0.24) (define Ld 0.24) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 901363252475663482880 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 411741599814630506496 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 170804139227020197888 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 331657027359681675264 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
767
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.4 micrometers and it is doped with Boron at a concentration of 552321344736125517824 cm^-3. The short gate region is of the material Germanium with a length of 0.56 micrometers and it is doped with Boron at a concentration of 329519515832325636096 cm^-3. The long gate region is of the material Silicon with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 386986374112175980544 cm^-3. The drain region is of the material SiGe with a length of 0.4 micrometers and it is doped with Boron at a concentration of 794800469889970077696 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.007) (define Lgs 0.56) (define Lgl 0.73) (define Ltotal (+ Lgs Lgl)) (define Ls 0.4) (define Ld 0.4) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 552321344736125517824 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 329519515832325636096 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 386986374112175980544 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 794800469889970077696 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
768
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.6 micrometers and it is doped with Arsenic at a concentration of 196822846649648939008 cm^-3. The short gate region is of the material GaN with a length of 0.47 micrometers and it is doped with Phosphorus at a concentration of 526880205181981949952 cm^-3. The long gate region is of the material Germanium with a length of 0.28 micrometers and it is doped with Arsenic at a concentration of 773676514430856986624 cm^-3. The drain region is of the material Silicon with a length of 0.6 micrometers and it is doped with Boron at a concentration of 811556821214315413504 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.003) (define Lgs 0.47) (define Lgl 0.28) (define Ltotal (+ Lgs Lgl)) (define Ls 0.6) (define Ld 0.6) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 196822846649648939008 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 526880205181981949952 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 773676514430856986624 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 811556821214315413504 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
769
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.77 micrometers and it is doped with Phosphorus at a concentration of 16147391456107243520 cm^-3. The short gate region is of the material GaN with a length of 0.17 micrometers and it is doped with Boron at a concentration of 277205615430978600960 cm^-3. The long gate region is of the material GaN with a length of 0.55 micrometers and it is doped with Arsenic at a concentration of 3648775446203301376 cm^-3. The drain region is of the material Silicon with a length of 0.77 micrometers and it is doped with Phosphorus at a concentration of 369775061969440473088 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.004) (define Lgs 0.17) (define Lgl 0.55) (define Ltotal (+ Lgs Lgl)) (define Ls 0.77) (define Ld 0.77) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 16147391456107243520 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 277205615430978600960 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 3648775446203301376 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 369775061969440473088 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
770
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.95 micrometers and it is doped with Arsenic at a concentration of 343255193599252627456 cm^-3. The short gate region is of the material Germanium with a length of 0.17 micrometers and it is doped with Boron at a concentration of 688414700055695196160 cm^-3. The long gate region is of the material Silicon with a length of 0.52 micrometers and it is doped with Phosphorus at a concentration of 279663982069849686016 cm^-3. The drain region is of the material Germanium with a length of 0.95 micrometers and it is doped with Phosphorus at a concentration of 531843471449498058752 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.007) (define Lgs 0.17) (define Lgl 0.52) (define Ltotal (+ Lgs Lgl)) (define Ls 0.95) (define Ld 0.95) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 343255193599252627456 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 688414700055695196160 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 279663982069849686016 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 531843471449498058752 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
771
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.37 micrometers and it is doped with Phosphorus at a concentration of 204314644843676893184 cm^-3. The short gate region is of the material Silicon with a length of 0.36 micrometers and it is doped with Boron at a concentration of 731246867860033110016 cm^-3. The long gate region is of the material Germanium with a length of 0.64 micrometers and it is doped with Arsenic at a concentration of 860882950304982499328 cm^-3. The drain region is of the material Germanium with a length of 0.37 micrometers and it is doped with Boron at a concentration of 33254961821806215168 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.009) (define Lgs 0.36) (define Lgl 0.64) (define Ltotal (+ Lgs Lgl)) (define Ls 0.37) (define Ld 0.37) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 204314644843676893184 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 731246867860033110016 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 860882950304982499328 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 33254961821806215168 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
772
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.01 micrometers and it is doped with Boron at a concentration of 520286523060701495296 cm^-3. The short gate region is of the material Germanium with a length of 0.68 micrometers and it is doped with Boron at a concentration of 720658588854591684608 cm^-3. The long gate region is of the material Germanium with a length of 0.47 micrometers and it is doped with Boron at a concentration of 80521872031454101504 cm^-3. The drain region is of the material GaN with a length of 0.01 micrometers and it is doped with Arsenic at a concentration of 734253943420962471936 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.007) (define Lgs 0.68) (define Lgl 0.47) (define Ltotal (+ Lgs Lgl)) (define Ls 0.01) (define Ld 0.01) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 520286523060701495296 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 720658588854591684608 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 80521872031454101504 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 734253943420962471936 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
773
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.7 micrometers and it is doped with Arsenic at a concentration of 356009472666913341440 cm^-3. The short gate region is of the material SiGe with a length of 0.04 micrometers and it is doped with Arsenic at a concentration of 763542318838277079040 cm^-3. The long gate region is of the material Silicon with a length of 0.79 micrometers and it is doped with Boron at a concentration of 188300008191251087360 cm^-3. The drain region is of the material Silicon with a length of 0.7 micrometers and it is doped with Boron at a concentration of 600282771673319342080 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.009) (define Lgs 0.04) (define Lgl 0.79) (define Ltotal (+ Lgs Lgl)) (define Ls 0.7) (define Ld 0.7) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 356009472666913341440 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 763542318838277079040 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 188300008191251087360 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 600282771673319342080 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
774
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.66 micrometers and it is doped with Arsenic at a concentration of 739673395561621225472 cm^-3. The short gate region is of the material Germanium with a length of 0.69 micrometers and it is doped with Arsenic at a concentration of 272063826574354415616 cm^-3. The long gate region is of the material Silicon with a length of 0.57 micrometers and it is doped with Boron at a concentration of 739046433911401086976 cm^-3. The drain region is of the material Diamond with a length of 0.66 micrometers and it is doped with Arsenic at a concentration of 389353156863353290752 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.006) (define Lgs 0.69) (define Lgl 0.57) (define Ltotal (+ Lgs Lgl)) (define Ls 0.66) (define Ld 0.66) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 739673395561621225472 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 272063826574354415616 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 739046433911401086976 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 389353156863353290752 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
775
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.94 micrometers and it is doped with Boron at a concentration of 460610001468223258624 cm^-3. The short gate region is of the material GaN with a length of 0.63 micrometers and it is doped with Phosphorus at a concentration of 46840302536356397056 cm^-3. The long gate region is of the material Diamond with a length of 0.89 micrometers and it is doped with Boron at a concentration of 287615212314677739520 cm^-3. The drain region is of the material Diamond with a length of 0.94 micrometers and it is doped with Boron at a concentration of 758782995564837470208 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.007) (define Lgs 0.63) (define Lgl 0.89) (define Ltotal (+ Lgs Lgl)) (define Ls 0.94) (define Ld 0.94) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 460610001468223258624 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 46840302536356397056 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 287615212314677739520 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 758782995564837470208 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
776
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.92 micrometers and it is doped with Arsenic at a concentration of 305242192858831519744 cm^-3. The short gate region is of the material SiGe with a length of 0.48 micrometers and it is doped with Boron at a concentration of 229195000301479854080 cm^-3. The long gate region is of the material GaN with a length of 0.05 micrometers and it is doped with Phosphorus at a concentration of 300344048207915384832 cm^-3. The drain region is of the material SiGe with a length of 0.92 micrometers and it is doped with Boron at a concentration of 282975009759190679552 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.009) (define Lgs 0.48) (define Lgl 0.05) (define Ltotal (+ Lgs Lgl)) (define Ls 0.92) (define Ld 0.92) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 305242192858831519744 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 229195000301479854080 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 300344048207915384832 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 282975009759190679552 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
777
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.11 micrometers and it is doped with Phosphorus at a concentration of 764195829325129056256 cm^-3. The short gate region is of the material Germanium with a length of 0.27 micrometers and it is doped with Phosphorus at a concentration of 756851449895252525056 cm^-3. The long gate region is of the material SiGe with a length of 0.35 micrometers and it is doped with Boron at a concentration of 358090058634685054976 cm^-3. The drain region is of the material GaN with a length of 0.11 micrometers and it is doped with Boron at a concentration of 189826882756623204352 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.002) (define Lgs 0.27) (define Lgl 0.35) (define Ltotal (+ Lgs Lgl)) (define Ls 0.11) (define Ld 0.11) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 764195829325129056256 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 756851449895252525056 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 358090058634685054976 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 189826882756623204352 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
778
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.2 micrometers and it is doped with Boron at a concentration of 275295019755938906112 cm^-3. The short gate region is of the material Diamond with a length of 0.92 micrometers and it is doped with Phosphorus at a concentration of 305624789987852156928 cm^-3. The long gate region is of the material GaN with a length of 0.17 micrometers and it is doped with Arsenic at a concentration of 538129267136651722752 cm^-3. The drain region is of the material GaN with a length of 0.2 micrometers and it is doped with Arsenic at a concentration of 345502040466009096192 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.002) (define Lgs 0.92) (define Lgl 0.17) (define Ltotal (+ Lgs Lgl)) (define Ls 0.2) (define Ld 0.2) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 275295019755938906112 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 305624789987852156928 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 538129267136651722752 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 345502040466009096192 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
779
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.61 micrometers and it is doped with Arsenic at a concentration of 563130050980327849984 cm^-3. The short gate region is of the material Diamond with a length of 0.11 micrometers and it is doped with Arsenic at a concentration of 381854920553732505600 cm^-3. The long gate region is of the material Diamond with a length of 0.13 micrometers and it is doped with Arsenic at a concentration of 124459771800446779392 cm^-3. The drain region is of the material Silicon with a length of 0.61 micrometers and it is doped with Boron at a concentration of 221796864467836731392 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.003) (define Lgs 0.11) (define Lgl 0.13) (define Ltotal (+ Lgs Lgl)) (define Ls 0.61) (define Ld 0.61) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 563130050980327849984 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 381854920553732505600 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 124459771800446779392 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 221796864467836731392 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
780
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.96 micrometers and it is doped with Arsenic at a concentration of 425621894241661222912 cm^-3. The short gate region is of the material Diamond with a length of 0.58 micrometers and it is doped with Boron at a concentration of 846374516907989794816 cm^-3. The long gate region is of the material Silicon with a length of 0.51 micrometers and it is doped with Arsenic at a concentration of 827061999721055125504 cm^-3. The drain region is of the material Diamond with a length of 0.96 micrometers and it is doped with Arsenic at a concentration of 833361588827423899648 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.006) (define Lgs 0.58) (define Lgl 0.51) (define Ltotal (+ Lgs Lgl)) (define Ls 0.96) (define Ld 0.96) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 425621894241661222912 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 846374516907989794816 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 827061999721055125504 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 833361588827423899648 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
781
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.74 micrometers and it is doped with Phosphorus at a concentration of 47974153867383119872 cm^-3. The short gate region is of the material Germanium with a length of 0.53 micrometers and it is doped with Arsenic at a concentration of 975841004721945575424 cm^-3. The long gate region is of the material GaN with a length of 0.79 micrometers and it is doped with Phosphorus at a concentration of 156438531144239742976 cm^-3. The drain region is of the material SiGe with a length of 0.74 micrometers and it is doped with Boron at a concentration of 604334978533169168384 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.005) (define Lgs 0.53) (define Lgl 0.79) (define Ltotal (+ Lgs Lgl)) (define Ls 0.74) (define Ld 0.74) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 47974153867383119872 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 975841004721945575424 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 156438531144239742976 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 604334978533169168384 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
782
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.38 micrometers and it is doped with Phosphorus at a concentration of 624150211319979966464 cm^-3. The short gate region is of the material Silicon with a length of 0.46 micrometers and it is doped with Boron at a concentration of 512357571185478598656 cm^-3. The long gate region is of the material Germanium with a length of 0.91 micrometers and it is doped with Arsenic at a concentration of 554576528767151374336 cm^-3. The drain region is of the material Diamond with a length of 0.38 micrometers and it is doped with Arsenic at a concentration of 222425053771968184320 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.01 micrometers.
(define tox 0.004) (define Lgs 0.46) (define Lgl 0.91) (define Ltotal (+ Lgs Lgl)) (define Ls 0.38) (define Ld 0.38) (define Rl 0.01) (define Rs 0.01) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 624150211319979966464 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 512357571185478598656 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 554576528767151374336 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 222425053771968184320 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
783
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.94 micrometers and it is doped with Phosphorus at a concentration of 391690115099103985664 cm^-3. The short gate region is of the material SiGe with a length of 0.18 micrometers and it is doped with Phosphorus at a concentration of 975193435367117160448 cm^-3. The long gate region is of the material Silicon with a length of 0.24 micrometers and it is doped with Phosphorus at a concentration of 84189511705926320128 cm^-3. The drain region is of the material SiGe with a length of 0.94 micrometers and it is doped with Boron at a concentration of 295296178501559648256 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.003) (define Lgs 0.18) (define Lgl 0.24) (define Ltotal (+ Lgs Lgl)) (define Ls 0.94) (define Ld 0.94) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Silicon" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 391690115099103985664 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 975193435367117160448 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 84189511705926320128 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 295296178501559648256 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
784
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.82 micrometers and it is doped with Phosphorus at a concentration of 915691867915563958272 cm^-3. The short gate region is of the material Silicon with a length of 0.51 micrometers and it is doped with Phosphorus at a concentration of 562137069893753110528 cm^-3. The long gate region is of the material Germanium with a length of 0.48 micrometers and it is doped with Arsenic at a concentration of 964023640013129908224 cm^-3. The drain region is of the material GaN with a length of 0.82 micrometers and it is doped with Arsenic at a concentration of 7826862724883792896 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.003) (define Lgs 0.51) (define Lgl 0.48) (define Ltotal (+ Lgs Lgl)) (define Ls 0.82) (define Ld 0.82) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 915691867915563958272 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 562137069893753110528 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 964023640013129908224 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 7826862724883792896 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
785
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.07 micrometers and it is doped with Arsenic at a concentration of 733105848872439644160 cm^-3. The short gate region is of the material SiGe with a length of 0.14 micrometers and it is doped with Arsenic at a concentration of 714642893097294757888 cm^-3. The long gate region is of the material GaN with a length of 0.23 micrometers and it is doped with Boron at a concentration of 526273395566392901632 cm^-3. The drain region is of the material Germanium with a length of 0.07 micrometers and it is doped with Boron at a concentration of 468972271721355935744 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.002) (define Lgs 0.14) (define Lgl 0.23) (define Ltotal (+ Lgs Lgl)) (define Ls 0.07) (define Ld 0.07) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 733105848872439644160 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 714642893097294757888 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 526273395566392901632 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 468972271721355935744 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
786
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.46 micrometers and it is doped with Phosphorus at a concentration of 545268886459576877056 cm^-3. The short gate region is of the material SiGe with a length of 0.81 micrometers and it is doped with Boron at a concentration of 619726161917966811136 cm^-3. The long gate region is of the material Diamond with a length of 0.36 micrometers and it is doped with Boron at a concentration of 401508486227242516480 cm^-3. The drain region is of the material GaN with a length of 0.46 micrometers and it is doped with Boron at a concentration of 400793705655877632000 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.008) (define Lgs 0.81) (define Lgl 0.36) (define Ltotal (+ Lgs Lgl)) (define Ls 0.46) (define Ld 0.46) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 545268886459576877056 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 619726161917966811136 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 401508486227242516480 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 400793705655877632000 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
787
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.42 micrometers and it is doped with Arsenic at a concentration of 881173674547885506560 cm^-3. The short gate region is of the material SiGe with a length of 0.29 micrometers and it is doped with Arsenic at a concentration of 364851183854450900992 cm^-3. The long gate region is of the material GaN with a length of 0.52 micrometers and it is doped with Phosphorus at a concentration of 485837271259086585856 cm^-3. The drain region is of the material Diamond with a length of 0.42 micrometers and it is doped with Boron at a concentration of 849132946764284166144 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.006) (define Lgs 0.29) (define Lgl 0.52) (define Ltotal (+ Lgs Lgl)) (define Ls 0.42) (define Ld 0.42) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Arsenic 881173674547885506560 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 364851183854450900992 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 485837271259086585856 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 849132946764284166144 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
788
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.14 micrometers and it is doped with Phosphorus at a concentration of 168668911799778607104 cm^-3. The short gate region is of the material Germanium with a length of 0.7 micrometers and it is doped with Arsenic at a concentration of 786827955083275927552 cm^-3. The long gate region is of the material GaN with a length of 0.48 micrometers and it is doped with Phosphorus at a concentration of 538405257221924061184 cm^-3. The drain region is of the material Silicon with a length of 0.14 micrometers and it is doped with Arsenic at a concentration of 336300544624839622656 cm^-3. The gate oxide thickness is 0.007 micrometers. The nanowire thickness is 0.004 micrometers.
(define tox 0.007) (define Lgs 0.7) (define Lgl 0.48) (define Ltotal (+ Lgs Lgl)) (define Ls 0.14) (define Ld 0.14) (define Rl 0.004) (define Rs 0.004) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 168668911799778607104 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 786827955083275927552 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 538405257221924061184 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 336300544624839622656 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
789
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.89 micrometers and it is doped with Phosphorus at a concentration of 19391970326178189312 cm^-3. The short gate region is of the material Germanium with a length of 0.3 micrometers and it is doped with Boron at a concentration of 304753175060080754688 cm^-3. The long gate region is of the material Germanium with a length of 0.57 micrometers and it is doped with Phosphorus at a concentration of 965972483666297094144 cm^-3. The drain region is of the material SiGe with a length of 0.89 micrometers and it is doped with Phosphorus at a concentration of 887015732574386651136 cm^-3. The gate oxide thickness is 0.004 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.004) (define Lgs 0.3) (define Lgl 0.57) (define Ltotal (+ Lgs Lgl)) (define Ls 0.89) (define Ld 0.89) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 19391970326178189312 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Boron 304753175060080754688 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 965972483666297094144 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 887015732574386651136 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
790
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.58 micrometers and it is doped with Phosphorus at a concentration of 400231912273688395776 cm^-3. The short gate region is of the material Silicon with a length of 0.57 micrometers and it is doped with Phosphorus at a concentration of 441938054993343676416 cm^-3. The long gate region is of the material GaN with a length of 0.73 micrometers and it is doped with Arsenic at a concentration of 111764144869194055680 cm^-3. The drain region is of the material Diamond with a length of 0.58 micrometers and it is doped with Boron at a concentration of 361901022082933850112 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.008 micrometers.
(define tox 0.003) (define Lgs 0.57) (define Lgl 0.73) (define Ltotal (+ Lgs Lgl)) (define Ls 0.58) (define Ld 0.58) (define Rl 0.008) (define Rs 0.008) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 400231912273688395776 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 441938054993343676416 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 111764144869194055680 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 361901022082933850112 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
791
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.87 micrometers and it is doped with Phosphorus at a concentration of 219920990243720757248 cm^-3. The short gate region is of the material GaN with a length of 0.52 micrometers and it is doped with Arsenic at a concentration of 995725516232269234176 cm^-3. The long gate region is of the material Germanium with a length of 0.81 micrometers and it is doped with Boron at a concentration of 687521174373555503104 cm^-3. The drain region is of the material Silicon with a length of 0.87 micrometers and it is doped with Boron at a concentration of 510202585248854966272 cm^-3. The gate oxide thickness is 0.003 micrometers. The nanowire thickness is 0.003 micrometers.
(define tox 0.003) (define Lgs 0.52) (define Lgl 0.81) (define Ltotal (+ Lgs Lgl)) (define Ls 0.87) (define Ld 0.87) (define Rl 0.003) (define Rs 0.003) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 219920990243720757248 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 995725516232269234176 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 687521174373555503104 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 510202585248854966272 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
792
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.71 micrometers and it is doped with Boron at a concentration of 732747241393281695744 cm^-3. The short gate region is of the material SiGe with a length of 0.29 micrometers and it is doped with Phosphorus at a concentration of 34765515303891189760 cm^-3. The long gate region is of the material Diamond with a length of 0.71 micrometers and it is doped with Arsenic at a concentration of 225896849644236668928 cm^-3. The drain region is of the material Diamond with a length of 0.71 micrometers and it is doped with Phosphorus at a concentration of 242523210934747791360 cm^-3. The gate oxide thickness is 0.006 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.006) (define Lgs 0.29) (define Lgl 0.71) (define Ltotal (+ Lgs Lgl)) (define Ls 0.71) (define Ld 0.71) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 732747241393281695744 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 34765515303891189760 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 225896849644236668928 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 242523210934747791360 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
793
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.34 micrometers and it is doped with Phosphorus at a concentration of 535346271445491515392 cm^-3. The short gate region is of the material SiGe with a length of 0.3 micrometers and it is doped with Phosphorus at a concentration of 973091932612184768512 cm^-3. The long gate region is of the material Diamond with a length of 0.52 micrometers and it is doped with Phosphorus at a concentration of 805594921692502687744 cm^-3. The drain region is of the material Germanium with a length of 0.34 micrometers and it is doped with Phosphorus at a concentration of 932594074851847700480 cm^-3. The gate oxide thickness is 0.001 micrometers. The nanowire thickness is 0.002 micrometers.
(define tox 0.001) (define Lgs 0.3) (define Lgl 0.52) (define Ltotal (+ Lgs Lgl)) (define Ls 0.34) (define Ld 0.34) (define Rl 0.002) (define Rs 0.002) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "SiGe" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Phosphorus 535346271445491515392 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 973091932612184768512 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 805594921692502687744 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 932594074851847700480 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
794
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Silicon with a length of 0.4 micrometers and it is doped with Boron at a concentration of 517986646942713380864 cm^-3. The short gate region is of the material GaN with a length of 0.06 micrometers and it is doped with Arsenic at a concentration of 266824260458160390144 cm^-3. The long gate region is of the material Diamond with a length of 0.56 micrometers and it is doped with Boron at a concentration of 69222499148118261760 cm^-3. The drain region is of the material Germanium with a length of 0.4 micrometers and it is doped with Phosphorus at a concentration of 113943053610895196160 cm^-3. The gate oxide thickness is 0.008 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.008) (define Lgs 0.06) (define Lgl 0.56) (define Ltotal (+ Lgs Lgl)) (define Ls 0.4) (define Ld 0.4) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Silicon" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Diamond" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Germanium" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 517986646942713380864 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 266824260458160390144 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 69222499148118261760 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 113943053610895196160 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
795
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material GaN with a length of 0.96 micrometers and it is doped with Boron at a concentration of 833206599176816164864 cm^-3. The short gate region is of the material GaN with a length of 0.02 micrometers and it is doped with Arsenic at a concentration of 789972717718920232960 cm^-3. The long gate region is of the material SiGe with a length of 0.35 micrometers and it is doped with Boron at a concentration of 314324678475799986176 cm^-3. The drain region is of the material Silicon with a length of 0.96 micrometers and it is doped with Boron at a concentration of 25783958740864782336 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.009) (define Lgs 0.02) (define Lgl 0.35) (define Ltotal (+ Lgs Lgl)) (define Ls 0.96) (define Ld 0.96) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "GaN" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "GaN" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Silicon" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 833206599176816164864 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 789972717718920232960 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Boron 314324678475799986176 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Boron 25783958740864782336 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Boron 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
796
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.2 micrometers and it is doped with Boron at a concentration of 57524206493528514560 cm^-3. The short gate region is of the material Diamond with a length of 0.13 micrometers and it is doped with Arsenic at a concentration of 297080459296937738240 cm^-3. The long gate region is of the material SiGe with a length of 0.24 micrometers and it is doped with Arsenic at a concentration of 959254339641717030912 cm^-3. The drain region is of the material GaN with a length of 0.2 micrometers and it is doped with Phosphorus at a concentration of 740872963438691614720 cm^-3. The gate oxide thickness is 0.005 micrometers. The nanowire thickness is 0.001 micrometers.
(define tox 0.005) (define Lgs 0.13) (define Lgl 0.24) (define Ltotal (+ Lgs Lgl)) (define Ls 0.2) (define Ld 0.2) (define Rl 0.001) (define Rs 0.001) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Diamond" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 57524206493528514560 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 297080459296937738240 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 959254339641717030912 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Phosphorus 740872963438691614720 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
797
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Diamond with a length of 0.74 micrometers and it is doped with Boron at a concentration of 134584169356934168576 cm^-3. The short gate region is of the material Silicon with a length of 0.23 micrometers and it is doped with Phosphorus at a concentration of 461364960855811948544 cm^-3. The long gate region is of the material GaN with a length of 0.39 micrometers and it is doped with Arsenic at a concentration of 697850246124089376768 cm^-3. The drain region is of the material GaN with a length of 0.74 micrometers and it is doped with Arsenic at a concentration of 760509426521541574656 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.005 micrometers.
(define tox 0.002) (define Lgs 0.23) (define Lgl 0.39) (define Ltotal (+ Lgs Lgl)) (define Ls 0.74) (define Ld 0.74) (define Rl 0.005) (define Rs 0.005) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Diamond" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Silicon" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "GaN" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "GaN" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 134584169356934168576 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 461364960855811948544 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Arsenic 697850246124089376768 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 760509426521541574656 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Arsenic 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
798
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material SiGe with a length of 0.29 micrometers and it is doped with Boron at a concentration of 430299910241075855360 cm^-3. The short gate region is of the material Germanium with a length of 0.92 micrometers and it is doped with Arsenic at a concentration of 874453986413970063360 cm^-3. The long gate region is of the material Germanium with a length of 0.77 micrometers and it is doped with Phosphorus at a concentration of 529324876550266683392 cm^-3. The drain region is of the material SiGe with a length of 0.29 micrometers and it is doped with Arsenic at a concentration of 563226664128183664640 cm^-3. The gate oxide thickness is 0.002 micrometers. The nanowire thickness is 0.006 micrometers.
(define tox 0.002) (define Lgs 0.92) (define Lgl 0.77) (define Ltotal (+ Lgs Lgl)) (define Ls 0.29) (define Ld 0.29) (define Rl 0.006) (define Rs 0.006) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "SiGe" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "Germanium" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "SiGe" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 430299910241075855360 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Arsenic 874453986413970063360 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 529324876550266683392 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 563226664128183664640 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")
799
This structure is a nanowire transistor. There are 5 main regions: the source, short gate, long gate, drain, and oxide. There are also 3 contacts: source, drain, and gate. The gate contact covers the short gate and long gate length. The source region is of the material Germanium with a length of 0.47 micrometers and it is doped with Boron at a concentration of 301657285983729614848 cm^-3. The short gate region is of the material Germanium with a length of 0.41 micrometers and it is doped with Phosphorus at a concentration of 778548966455204249600 cm^-3. The long gate region is of the material SiGe with a length of 0.75 micrometers and it is doped with Phosphorus at a concentration of 361256595236120297472 cm^-3. The drain region is of the material Diamond with a length of 0.47 micrometers and it is doped with Arsenic at a concentration of 953220965419544739840 cm^-3. The gate oxide thickness is 0.009 micrometers. The nanowire thickness is 0.009 micrometers.
(define tox 0.009) (define Lgs 0.41) (define Lgl 0.75) (define Ltotal (+ Lgs Lgl)) (define Ls 0.47) (define Ld 0.47) (define Rl 0.009) (define Rs 0.009) (define Xmin 0) (define Xmax (+ Ls Ltotal Ld)) (define tg 0.01) (define Ymin 0) (define Ymax Rl) (define XSource (+ Xmin Ls)) (define XGates (+ XSource Lgs)) (define XGatel (+ XGates Lgl)) (sdegeo:create-rectangle (position Xmin Ymin 0) (position XSource Ymax 0) "Germanium" "R.Source") (sdegeo:create-rectangle (position XSource Ymin 0) (position XGates Rs 0) "Germanium" "R.Short_Gate") (sdegeo:create-rectangle (position XGates Ymin 0) (position XGatel Ymax 0) "SiGe" "R.Long_Gate") (sdegeo:create-rectangle (position XGatel Ymin 0) (position Xmax Ymax 0) "Diamond" "R.Drain") ; Old replaces New (sdegeo:set-default-boolean "BAB") (sdegeo:create-rectangle (position Xmin Ymin 0) (position Xmax (+ Ymax tox) 0) "Oxide" "R.Oxide") (define gatedummy (sdegeo:create-rectangle (position XSource Ymin 0) (position XGatel (+ Ymax tox tg) 0) "PolySilicon" "R.Gate")) ; Old replaces New (sdegeo:set-default-boolean "BAB") ;(define dummy (sdegeo:create-rectangle (position XSource (+ Rs tox tg) 0) (position XGatel (+ Ymax tox tox tg) 0) "Metal" "R.Dummy")) (sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "gate") (sdegeo:set-contact-boundary-edges gatedummy "gate") (sdegeo:delete-region gatedummy) (sdegeo:define-contact-set "source" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "source") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmin (/ Ymax 2) 0)))) "source") (sdegeo:define-contact-set "drain" 4 (color:rgb 1 0 0 ) "##") (sdegeo:set-current-contact-set "drain") (sdegeo:set-contact-edges (list (car (find-edge-id (position Xmax (/ Ymax 2) 0)))) "drain") ; Constant doping profile in a given material (define NAME "Body") ; - Common dopants: ; "PhosphorusActiveConcentration" | "ArsenicActiveConcentration" ; | "BoronActiveConcentration" (define Boron "BoronActiveConcentration") (define Phosphorus "PhosphorusActiveConcentration") (define Arsenic "ArsenicActiveConcentration") ;------------------------------------------------------------------------------- ; Doping in Source (sdedr:define-constant-profile "Const.Source" Boron 301657285983729614848 ) (sdedr:define-constant-profile-region "Place.Source" "Const.Source" "R.Source" 0 "Replace" ) ; Doping in Short_Gate (sdedr:define-constant-profile "Const.Short_Gate" Phosphorus 778548966455204249600 ) (sdedr:define-constant-profile-region "Place.Short_Gate" "Const.Short_Gate" "R.Short_Gate" 0 "Replace" ) ; Doping in R.Long_Gate (sdedr:define-constant-profile "Const.Long_Gate" Phosphorus 361256595236120297472 ) (sdedr:define-constant-profile-region "Place.Long_Gate" "Const.Long_Gate" "R.Long_Gate" 0 "Replace" ) ; Doping in Drain (sdedr:define-constant-profile "Const.Drain" Arsenic 953220965419544739840 ) (sdedr:define-constant-profile-region "Place.Drain" "Const.Drain" "R.Drain" 0 "Replace" ) ; Doping in Gate (sdedr:define-constant-profile "Const.Gate" Phosphorus 1e20 ) (sdedr:define-constant-profile-region "Place.Gate" "Const.Gate" "R.Gate" 0 "Replace" ) ;------------------------------------------------------------------------------- ;(sdedr:define-constant-profile (string-append "DC." NAME) ; "PhosphorusActiveConcentration" 1e20 ;) ;(sdedr:define-constant-profile-material (string-append "CPM." NAME) ; (string-append "DC." NAME) "Silicon" ;) ; Creating a box-shaped refinement specification (define RNAME "Overall") (sdedr:define-refinement-window (string-append "RW." RNAME) "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) (define RNAME2 "Gate") (sdedr:define-refinement-window (string-append "RW." RNAME2) "Rectangle" (position Xmin (+ Ymax tox) 0) (position Xmax (+ Ymax tox tg) 0) ) (sdedr:define-refinement-size (string-append "RS." RNAME2) (/ Ltotal 12) (/ Ymax 7) 0.0004 0.0004 ) ; (sdedr:define-refinement-function(string-append "RS." RNAME) ; "DopingConcentration" "MaxTransDiff" 1.0 ; ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "Silicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-function (string-append "RS." RNAME2) "MaxLenInt" "PolySilicon" "Oxide" 0.0004 1.1 ) (sdedr:define-refinement-placement (string-append "RP." RNAME) (string-append "RS." RNAME) (string-append "RW." RNAME) ) (sdedr:define-refinement-placement (string-append "RP." RNAME2) (string-append "RS." RNAME2) (string-append "RW." RNAME2) ) (sdesnmesh:tensor "Mesh { maxBndCellSize direction \"x\" 0.0000001 maxBndCellSize direction \"y\" 0.0000001 maxCellSize region \"Region_0\" 0.1 window \"testbox\" 0.8 1.2 0.8 1.2 0.8 1.2 minNumberOfCells window \"testbox\" 20 grading = { 1.1 1.1 1.1 } }") (sde:build-mesh "-gtdr -rect" "${path}n${tid}_msh")