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From rmorrison at draper.com Wed Apr 5 16:12:54 2023 |
From: rmorrison at draper.com (Morrison, Richard H., Jr) |
Date: Wed, 5 Apr 2023 20:12:54 +0000 |
Subject: [labnetwork] [EXTERNAL] N2 consumption by SRDs |
In-Reply-To: <YTBPR01MB30073DCFF773B97D5E17C68FB6909@YTBPR01MB3007.CANPRD01.PROD.OUTLOOK.COM> |
References: <YTBPR01MB30073DCFF773B97D5E17C68FB6909@YTBPR01MB3007.CANPRD01.PROD.OUTLOOK.COM> |
Message-ID: <BN1P110MB06900D7B42D9A0A0469626A7CE909@BN1P110MB0690.NAMP110.PROD.OUTLOOK.COM> |
HI, |
Here at Draper we shut off the N2 when not in use and we have every user run the SRD before they use it to ensure that there is not extra particles generated. If you do not run it for a cycle the SRD tend to deposit a lot of particles on your wafer. |
Rick |
Richard Morrison |
DMTS |
Draper Laboratory |
555 Technology Square |
Cambridge Ma 02139 |
Office: 617-258-3420 |
Cell: 508-930-3461 |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Nathan Nelson - Fitzpatrick |
Sent: Wednesday, April 5, 2023 2:47 PM |
To: labnetwork at mtl.mit.edu |
Subject: [EXTERNAL] [labnetwork] N2 consumption by SRDs |
CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe. |
Hi labnetwork, |
My lab is going through a process of auditing our Nitrogen use, and an early target for saving on N2 are our spin rinse dryers. |
We have four Sitek SRDs which are configured to continuously purge with N2 and to run occasionally (on a timer) to exercise the SRDs and run some DI water through them. The constant N2 purge obviously consumes a ton of N2. |
We're considering either: |
* Purchasing an (expensive) valve from Sitek that would cut off N2 flow when the SRD controllers are off. We would then leave the SRD controllers off when they are not enabled by our lab users. |
* Or we might consider setting up an interlock to drive a solenoid valve that would cut off N2 flow to the SRDs when they are not enabled in our lab management software. |
I'm wondering what other interesting solutions people have fashioned to reduce N2 consumption by SRDs? |
I'm also curious if there are any pitfalls we should look out for when pursuing something like this? |
Many thanks in advance, |
-Nathan |
-- |
Nathan Nelson-Fitzpatrick PhD, PEng (He/Him) |
Director, Quantum-Nano Fabrication and Characterization Facility (QNFCF) |
Office of Research |
University of Waterloo |
200 University Avenue West, Waterloo, ON N2L 3G1 |
P: 519-888-4567 ext. 31796 |
C: 226-218-3206 |
https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/<https://urldefense.com/v2/url?u=https-3A__uwaterloo.ca_quantum-2Dnano-2Dfabrication-2Dand-2Dcharacterization-2Dfacility_&d=DwMF-g&c=m5mye7XjY-PNBUdjUS9G7n0DDGwujM2TWPAftzw2VTE&r=2-QuDy5hiP3fahwOU6_94U59sZ8WR0Hpk4KUuW7EuGA&m=N5vyfaZn_YYs7EuXOEeBFvt2fMOw6n91JrLBDuFRj8A&s=VnNUui05s3ETv7MUlps56QilbO8BPnVgxKmLzmzFXaE&e=> |
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From kckeenan at seas.upenn.edu Wed Apr 5 16:46:44 2023 |
From: kckeenan at seas.upenn.edu (Kyle Keenan) |
Date: Wed, 5 Apr 2023 16:46:44 -0400 |
Subject: [labnetwork] N2 consumption by SRDs |
In-Reply-To: <YTBPR01MB30073DCFF773B97D5E17C68FB6909@YTBPR01MB3007.CANPRD01.PROD.OUTLOOK.COM> |
References: <YTBPR01MB30073DCFF773B97D5E17C68FB6909@YTBPR01MB3007.CANPRD01.PROD.OUTLOOK.COM> |
Message-ID: <CAGTqYdESeOrTdWsaZKQwP25g22bLn4Cfcsuw_RE_5qaj1gNOvw@mail.gmail.com> |
Hi Nathan, |
I'm surprised to hear that they have a constant N2 purge. This seems very |
odd to me. Stating the obvious, here, but can't Sitek reconfigure them? |
We've had (very old) Verteq Superclean SRD's and now RENA Compass SRD's, |
and neither type had a constant N2 purge. |
Kyle |
On Wed, Apr 5, 2023 at 4:15?PM Nathan Nelson - Fitzpatrick < |
nnelsonfitzpatrick at uwaterloo.ca> wrote: |
> Hi labnetwork, |
> |
> |
> |
> My lab is going through a process of auditing our Nitrogen use, and an |
> early target for saving on N2 are our spin rinse dryers. |
> |
> |
> |
> We have four Sitek SRDs which are configured to continuously purge with N2 |
> and to run occasionally (on a timer) to exercise the SRDs and run some DI |
> water through them. The constant N2 purge obviously consumes a ton of N2. |
> |
> |
> |
> We?re considering either: |
> |
> |
> |
> - Purchasing an (expensive) valve from Sitek that would cut off N2 |
> flow when the SRD controllers are off. We would then leave the SRD |
> controllers off when they are not enabled by our lab users. |
> - Or we might consider setting up an interlock to drive a solenoid |
> valve that would cut off N2 flow to the SRDs when they are not enabled |
> in our lab management software. |
> |
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