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-- How do all of you solve this problem? What product do you use to filter your lights (e.g., tube covers, panel covers, applied films, solid dyed plastics, laser safety products...) |
-- Have you found that your filters have a finite lifespan? For example, I've heard in previous discussions that window films are only good for 5 years or so before the wavelength-absorbent pigment decomposes and is ineffective. |
-- To what extent have you found computer monitors' light emissions to be a point of concern? |
-- Other thoughts/suggestions that we should explore or consider? |
Thanks, |
Travis Massey |
Center for Micro and Nanotechnology (CMNT) |
Lawrence Livermore National Laboratory |
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From jtmitch5 at ncsu.edu Tue Feb 14 01:05:41 2023 |
From: jtmitch5 at ncsu.edu (James Mitchell) |
Date: Tue, 14 Feb 2023 01:05:41 -0500 |
Subject: [labnetwork] O2 8%/CF4 gas cylinder |
In-Reply-To: <6443ece4-9b28-096b-4a78-473408048db3@eng.ucsd.edu> |
References: <6443ece4-9b28-096b-4a78-473408048db3@eng.ucsd.edu> |
Message-ID: <CAEXS_M-F20gpAri=DhbfG2BTd7sOWs-60x+fHq9tAx6pJ+YWwA@mail.gmail.com> |
Have you tried Airgas? |
Jim |
On Mon, Feb 13, 2023, 5:37 PM John Tamelier <jtamelier at eng.ucsd.edu> wrote: |
> Hello all, |
> |
> We have been having difficulty getting a cylinder of O2 8%/CF4. We |
> placed an order in early November 2022 with Linde and have yet to |
> receive a ship date for the material. We have three orders out, but need |
> the material urgently. The shortest lead time we have found is 9 weeks. |
> |
> Does anyone have any contacts for purchasing this gas or other options |
> for obtaining a cylinder of this gas? Is anyone else experiencing this |
> type of lead time for gas cylinders? |
> |
> Thank you, |
> |
> John |
> |
> ----------------------------------- |
> John Tamelier, Ph.D. |
> Interim Director - Nano3 |
> |
> University of California, San Diego |
> Atkinson Hall, 5th Floor Front Desk, M/C 0436 |
> 9500 Gilman Drive |
> La Jolla, California 92093-0436 |
> Phone: (858) 246-2735 |
> Fax: (858) 534-9092 |
> E-mail: jtamelier at ucsd.edu |
> http://nano3.calit2.net |
> ---------------------------------- |
> |
> |
> _______________________________________________ |
> labnetwork mailing list |
> labnetwork at mtl.mit.edu |
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork |
> |
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From christian.pies at heidelberg-instruments.com Tue Feb 14 03:48:48 2023 |
From: christian.pies at heidelberg-instruments.com (Christian Pies) |
Date: Tue, 14 Feb 2023 08:48:48 +0000 |
Subject: [labnetwork] Light filtering in photolithography bays |
In-Reply-To: <BY5PR09MB5442585854E48D959D031137BBDD9@BY5PR09MB5442.namprd09.prod.outlook.com> |
References: <BY5PR09MB5442585854E48D959D031137BBDD9@BY5PR09MB5442.namprd09.prod.outlook.com> |
Message-ID: <DB8P189MB09988995F91F9D7708C7762AB5A29@DB8P189MB0998.EURP189.PROD.OUTLOOK.COM> |
Hi Travis, |
when we planned our new cleanroom facilities, we wanted to switch to LED lighting, but were also quite concerned about accidentally exposing the photoresists. After some discussions with one of our resist suppliers, we learned that wavelengths below 500 nm must be avoided. Unfortunately, most yellow LEDs show a sidepeak around 420 - 450 nm, which is often not visible in the datasheets unless the emission spectrum is shown in a logarithmic representation. The LEDs we originally looked at had a side peak of 0.4% intensity, which was still too much. |
Pure yellow light LEDs have a lower efficiency, but covering the lamps with a filter film probably reduces the output in a similar way or even more. |
We finally decided for the following LEDs: |
https://dammedia.osram.info/media/resource/hires/osram-dam-6665600/LY%20CKBP_EN.pdf |
They are in use for almost two years now and we haven't experienced any problems with our resists so far. They are a bit more orange than the typical lighting, which feels a bit unfamiliar at the beginning. |
Computer monitors can be an issue. If we leave our coated substrates on the desk in front of the monitor, the resist is typically exposed within a few hours. A short time next to the monitor while setting up the machine is usually uncritical (depending on the sensitivity of the resist). "Light contamination" of the entire room from the monitors has not been a problem in our case. But of course this depends on the local conditions. Turning down the brightness and switching off the monitors when not in use is for sure not a mistake. |
Best regards, |
Christian |
Dr. Christian Pies | Head of the Process & Application Lab |
T | +49 6221 728899-0 |
E | christian.pies at heidelberg-instruments.com |
Heidelberg Instruments Mikrotechnik GmbH |
Mittelgewannweg 27 |
69123 Heidelberg |
[Heidelberg Instruments]<http://www.heidelberg-instruments.com/> |
Handelsregister: Mannheim HRB 333834 |
Gesch?ftsf?hrer: Konrad Roessler, Steffen Diez |
Diese E-Mail enth?lt vertrauliche und/oder rechtlich gesch?tzte Informationen. Wenn Sie nicht der richtige Adressat sind oder diese E-Mail irrt?mlich erhalten haben, informieren Sie bitte sofort den Absender und vernichten Sie diese Mail. Das unerlaubte Kopieren sowie die unbefugte Weitergabe dieser Mail sind nicht gestattet. |
This e-mail may contain confidential and/or privileged information. If you are not the intended recipient (or have received this e-mail in error) please notify the sender immediately and destroy this e-mail. Any unauthorized copying, disclosure, or distribution of the material in this e-mail is strictly forbidden. |
www.heidelberg-instruments.com |
Von: labnetwork <labnetwork-bounces at mtl.mit.edu> Im Auftrag von Massey, Travis |
Gesendet: Montag, 13. Februar 2023 23:40 |
An: labnetwork at mtl.mit.edu |
Betreff: [labnetwork] Light filtering in photolithography bays |
Hi all, |
LLNL recently changed out its cleanroom lighting to LEDs from fluorescent tubes. A few months later, we found we were having lithography issues - our resist is getting exposed under ambient light within the litho bays within 5-15 minutes. The lights in our litho bays all have ~30 year old plastic diffusers that snap on over the tubes, and these diffusers have a filter film inside. We speculate that the new LEDs may have photobleached the aging photosensitive pigments. Measurements of the light intensity in the cleanroom at 365, 405, and 435 nm indicate that our litho bays have just as much light at these wavelengths than our non-litho bays! |
-- As an alternative to filtering the light, has anyone found LED cleanroom lighting that does not emit in the >450 nm range? For example, form-compatible LED 'tubes' that only emit at ~580 nm (yellow)? |
-- How do all of you solve this problem? What product do you use to filter your lights (e.g., tube covers, panel covers, applied films, solid dyed plastics, laser safety products...) |
-- Have you found that your filters have a finite lifespan? For example, I've heard in previous discussions that window films are only good for 5 years or so before the wavelength-absorbent pigment decomposes and is ineffective. |
-- To what extent have you found computer monitors' light emissions to be a point of concern? |
-- Other thoughts/suggestions that we should explore or consider? |
Thanks, |
Travis Massey |
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