srobertsphd/mit-labnetwork · Datasets at Hugging Face

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From silva at ece.ucsb.edu Thu Sep 21 18:12:42 2023
From: silva at ece.ucsb.edu (Michael Silva)
Date: Thu, 21 Sep 2023 15:12:42 -0700
Subject: [labnetwork] Working Jeol SEM For Sale
Message-ID: <CAOq03aGdiTL3+GiMCbB4B0YMRt-2LLUMSkeb9Nzz6tfDQCOWRQ@mail.gmail.com>
All:
The UCSB Nanofab has a used Jeol 7600F SEM for sale. The gun has low hours
on it and has plenty of life left. We are looking to get $50K but will
entertain reasonable offers.
Detailed Specifications
Imaging
- Resolution:
- 5nm under optimal conditions at 15kV SEM mode
- Magnification:
- SEM: x100 (at WD 25mm) to x1,000,000 (at WD 8mm)
- Low-Mag LM mode: x25 to x19,000
- Imaging Modes/Detectors:
- SEI: secondary electron imaging
- LM: Low-magnification mode
- GB: Gentle-Beam mode
- Applies negative voltage to the sample stage to increase effective
acceleration without increasing beam acceleration (reducing charging).
- LABE: Low-Angle Backscatter Electron detector
- Inserts between the objective lens and the sample
- Strong contrast between materials
- LEI: Lower Electron Detector
- Detector is lower on chamber, creating strong topographical contrast.
- Accelerating Voltages:
- SEM: 0.5 to 30kV
- GB: 0.1 to 2.0kV
- Beam Currents: 10-13 to 2x10-7 A
Mechanical
- Max Sample Size: 4-inch wafer
- Stage movement:
- max: 70 x 50mm
- 4-inch wafer: limited to ~25x25mm movement area from wafer center.
- Tilt: -5? to +70?
- Rotation: 360?
- Specimen holders :
- Copper and XYZ Carbon tape available
- 4-inch wafer with topside clips
- 1-inch holder for 30?/90?, 45?/90? mounting with tape or clips.
Electron detection:
- SEI: in-lens secondary electron detector for high-resolution imaging.
- r-filter to select electron energies to pass through to the SEI
detector for image enhancement.
- LEI: lower, in-chamber secondary electron detector for enhanced
topographical contrast; very helpful with charging substrates.
- LABE: insertable, in-chamber low-angle backscattered electron
detector for atomic number imaging contrast
- Mixed: can combine inputs from the 3 detectors above to get a more
detailed overall image contrast.
Imaging Modes:
- Gentle Beam: substrate biasing up to -2kV for lower net beam
voltages at the substrate. This effect directly reduces insulator charging
issues when imaging.
- SEM: regular, hi-resolution imaging mode (up to 1,000,000X mag)
LM: low magnification (down to 25X mag) used for finding regions of
interest on the substrate.
Regards,
Mike Silva
Operations Manager
ESB Nanofab
The University of California Santa Barbara
Office: (805) 893-3096
Cell: (805) 245-9356
Fax: (805) 893-7210
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From r.khanna at ucl.ac.uk Fri Sep 22 09:34:13 2023
From: r.khanna at ucl.ac.uk (Khanna, Rohit)
Date: Fri, 22 Sep 2023 13:34:13 +0000
Subject: [labnetwork] TemEbeam beam coil issue
In-Reply-To: <40961868.681113.1695232754487.JavaMail.zimbra@magnet.fsu.edu>
References: <40961868.681113.1695232754487.JavaMail.zimbra@magnet.fsu.edu>
Message-ID: <VI1PR01MB6446864EEEB87C7259F75769C3FFA@VI1PR01MB6446.eurprd01.prod.exchangelabs.com>
Hi Alexey,
I came across your mail regarding the E-beam evaporator we have a Edwards Edwards A500 FL500 thermal evaporator. Few years back we had a similar problem with the controller. I had to trouble shoot the unit. I would describe the repair to you, First you need to measure the inductance of the deflection coil in the chamber. There should be two set of coils for beam deflection in say X & Y direction these coil should have some reasonable inductance say around 10 Ohms. Please note the DC resistance if a false indicator and don't use a DMM to measure the resistance.
Once you are certain the deflection coils are not shorted out then try investigating the coil deflection unit. In principle this unit is essentially a two channel audio amplifier which is being driven by a two channel. In our case the final stage of the coil deflection amplifier was made up of an audio amplifier which had shorted out, in this case there is going to a constant DC signal being applied to the coil. I had to replace this amplifier and the part number for our design is LM3886T, in addition we also had to replace some freewheeling diode and the part number for that was RS3M-13-F or something equivalent. In case you are in doubt open the unit and share few pictures of the PCB.
Warm Regards
Rohit Khanna
Electronic Test & Measurement Engineer
London Centre for NANO Technology, UCL
Ph:+44-020-76799984
Lab: +44 20 3108 1516

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From silva at ece.ucsb.edu Thu Sep 21 18:12:42 2023

From: silva at ece.ucsb.edu (Michael Silva)

Date: Thu, 21 Sep 2023 15:12:42 -0700

Subject: [labnetwork] Working Jeol SEM For Sale

Message-ID: <CAOq03aGdiTL3+GiMCbB4B0YMRt-2LLUMSkeb9Nzz6tfDQCOWRQ@mail.gmail.com>

All:

The UCSB Nanofab has a used Jeol 7600F SEM for sale. The gun has low hours

on it and has plenty of life left. We are looking to get $50K but will

entertain reasonable offers.

*Detailed Specifications*

*Imaging*

- Resolution:

- 5nm under optimal conditions at 15kV SEM mode

- Magnification:

- SEM: x100 (at WD 25mm) to x1,000,000 (at WD 8mm)

- Low-Mag LM mode: x25 to x19,000

- Imaging Modes/Detectors:

- SEI: secondary electron imaging

- LM: Low-magnification mode

- GB: Gentle-Beam mode

- Applies negative voltage to the sample stage to increase effective

acceleration without increasing beam acceleration (reducing charging).

- LABE: Low-Angle Backscatter Electron detector

- Inserts between the objective lens and the sample

- Strong contrast between materials

- LEI: Lower Electron Detector

- Detector is lower on chamber, creating strong topographical contrast.

- Accelerating Voltages:

- SEM: 0.5 to 30kV

- GB: 0.1 to 2.0kV

- Beam Currents: 10-13 to 2x10-7 A

*Mechanical*

- Max Sample Size: 4-inch wafer

- Stage movement:

- max: 70 x 50mm

- 4-inch wafer: limited to ~25x25mm movement area from wafer center.

- Tilt: -5? to +70?

- Rotation: 360?

- Specimen holders :

- Copper and XYZ Carbon tape available

- 4-inch wafer with topside clips

- 1-inch holder for 30?/90?, 45?/90? mounting with tape or clips.

Electron detection:

- *SEI*: in-lens secondary electron detector for high-resolution imaging.

- r-filter to select electron energies to pass through to the SEI

detector for image enhancement.

- *LEI*: lower, in-chamber secondary electron detector for enhanced

topographical contrast; very helpful with charging substrates.

- *LABE*: insertable, in-chamber *l*ow-*a*ngle *b*ackscattered *e*lectron

detector for atomic number imaging contrast

- *Mixed*: can combine inputs from the 3 detectors above to get a more

detailed overall image contrast.

Imaging Modes:

- *Gentle Beam*: substrate biasing up to -2kV for lower net beam

voltages at the substrate. This effect directly reduces insulator charging

issues when imaging.

- *SEM*: regular, hi-resolution imaging mode (up to 1,000,000X mag)

*LM*: low magnification (down to 25X mag) used for finding regions of

interest on the substrate.

Regards,

Mike Silva

Operations Manager

ESB Nanofab

The University of California Santa Barbara

Office: (805) 893-3096

Cell: (805) 245-9356

Fax: (805) 893-7210

-------------- next part --------------

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From r.khanna at ucl.ac.uk Fri Sep 22 09:34:13 2023

From: r.khanna at ucl.ac.uk (Khanna, Rohit)

Date: Fri, 22 Sep 2023 13:34:13 +0000

Subject: [labnetwork] TemEbeam beam coil issue

In-Reply-To: <40961868.681113.1695232754487.JavaMail.zimbra@magnet.fsu.edu>

References: <40961868.681113.1695232754487.JavaMail.zimbra@magnet.fsu.edu>

Message-ID: <VI1PR01MB6446864EEEB87C7259F75769C3FFA@VI1PR01MB6446.eurprd01.prod.exchangelabs.com>

Hi Alexey,

I came across your mail regarding the E-beam evaporator we have a Edwards Edwards A500 FL500 thermal evaporator. Few years back we had a similar problem with the controller. I had to trouble shoot the unit. I would describe the repair to you, First you need to measure the inductance of the deflection coil in the chamber. There should be two set of coils for beam deflection in say X & Y direction these coil should have some reasonable inductance say around 10 Ohms. Please note the DC resistance if a false indicator and don't use a DMM to measure the resistance.

Once you are certain the deflection coils are not shorted out then try investigating the coil deflection unit. In principle this unit is essentially a two channel audio amplifier which is being driven by a two channel. In our case the final stage of the coil deflection amplifier was made up of an audio amplifier which had shorted out, in this case there is going to a constant DC signal being applied to the coil. I had to replace this amplifier and the part number for our design is LM3886T, in addition we also had to replace some freewheeling diode and the part number for that was RS3M-13-F or something equivalent. In case you are in doubt open the unit and share few pictures of the PCB.

Warm Regards

Rohit Khanna

Electronic Test & Measurement Engineer

London Centre for NANO Technology, UCL

Ph:+44-020-76799984

Lab: +44 20 3108 1516