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for a P5000 etch chamber. Officially, this is known as AMAT part number
0020-03673. In addition to Applied at one point we could get them from
M.E.C Tech .... but that appears to no longer be the case.
If anyone has alternative sources, I'd be anxious to hear of them. Or
if you've upgraded from 4" to 6" wafers and have spares sitting on your
shelf, I'd be happy to hear from you.
Thanks for your help,
John
From spb1699 at rit.edu Thu Jul 10 19:32:12 2008
From: spb1699 at rit.edu (Scott Blondell)
Date: Thu, 10 Jul 2008 19:32:12 -0400
Subject: [labnetwork] PDF MFCs available
Message-ID: <734CF9840B67444BB02D9C11DCA9CDF405225572@svits11.main.ad.rit.edu>
If anyone is currently using Precision Flow Devices mass flow
controllers and is interested in obtaining more, please contact me for
information.
We have over a dozen of model PFD-101, in various ranges and gases. They
are complete, out of calibration and the operational condition is
unknown. Coastal Instruments has supported these MFCs for us in the
past.
Regards,
Scott P. Blondell
Facilities Manager
Rochester Institute of Technology
Semiconductor and Microsystems Fabrication Laboratory
82 Lomb Memorial Dr.
Rochester, New York 14623
585-738-4073 C
585-475-2171 O
585-475-5041 F
http://smfl.microe.rit.edu
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From gcure at ece.arizona.edu Thu Jul 24 14:54:17 2008
From: gcure at ece.arizona.edu (Gregg D. Cure`)
Date: Thu, 24 Jul 2008 11:54:17 -0700 (MST)
Subject: [labnetwork] Request for repair info, 4 point probe
Message-ID: <1818.150.135.217.55.1216925657.squirrel@ece.arizona.edu>
Hello all:
We have a 10 year old Superior Electronics model AFPP300upg 4 point probe,
vintage 1998. It has performed reliably for us for these ten years but has
recently failed. Our in-house efforts to diagnose and repair are limited
and the company itself has long vanished into the ether.
Does anyone know of a 3rd party entity who can diagnose and repair these
types of instruments?
Any inputs would be greatly appreciated.
Thanks you and regards,
--
Gregg D. Cure`
The University of Arizona
Micro/Nano Fabrication Center
Electrical and Computer Engineering
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987
Cell: 520.307.2760
Fax: 520.626.7877
Website: http://mfc.engr.arizona.edu
---
From voros at silicon.EECS.Berkeley.EDU Mon Jun 2 13:22:27 2008
From: voros at silicon.EECS.Berkeley.EDU (Katalin Voros)
Date: Mon, 2 Jun 2008 10:22:27 -0700 (PDT)
Subject: [labnetwork] invitation to UGIM
Message-ID: <200806021722.m52HMRVO001276@silicon2.EECS.Berkeley.EDU>
Dear Colleagues,
I would like to invite you to this year's UGIM Conference
in July, at the University of Louisville, KY.
This is a small, 100-200 attendees, meeting, which makes
it very friendly and pleasant for all. Those of us who
have been participants for years, have developed personal
and professional relationships that are important aspects
for our daily work.
Besides the formal presentations we discuss common issues
facing university micro- and nanofabrication facilities,
share information regarding instructional activities such
as courses and lab classes, and have informal discussions
that lead to fruitful collaborations.
Besides all of the above, this confernec is fun!
It is not too late to register and receive early discounts,
both for the conference and the Brown hotel.
http://louisville.edu/conference/ugim2008
I hope you will join us.
Sincerely
Katali
--------------------------------------------
KATALIN VOROS
Principal Development Engineer
Microlab Operations Manager
Electrical Engineering and Computer Sciences
University of California at Berkeley
406 Cory Hall #1770
Berkeley, CA 94720-1770
phone: (510) 642-2716
fax: (510) 642-2916
voros at eecs.berkeley.edu
http://microlab.berkeley.edu
--------------------------------------------
From mberman at ece.arizona.edu Fri Jun 6 16:09:57 2008