srobertsphd/mit-labnetwork · Datasets at Hugging Face

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From gau.tam at live.in Wed Sep 27 12:03:23 2023
From: gau.tam at live.in (Goutam Prakash)
Date: Wed, 27 Sep 2023 16:03:23 +0000
Subject: [labnetwork] PZT Etch- RIE selectivity between PZT and Pt
Message-ID: <SG2PR04MB55446FCAF67313287AFB7935E0C2A@SG2PR04MB5544.apcprd04.prod.outlook.com>
Lab Network,
I have a Sputtered PZT film on a seed layer/ bottom electrode of ~200nm Sputtered Pt (on thermal SiO2/ SOI- substrate). Any idea if I can use the Pt surface as an etch stop while using Ar (physical etch) in RIE?
In previous such devices involving this process, I have had difficulty wire bonding this Pt surface. Is it possible the Pt has eroded too much for wire bonding?
Does anyone have the etch selectivity data between sputtered PZT vs. Pt for Ar-RIE?
I have a PR mask of AZ4562 (~6um thickness).
Thank you!
--
Goutam P (Process Integration Engineer),
National Nano-fabrication Centre (NNfC),
Centre for Nano Science and Engineering (CeNSE),
Indian Institute of Science (IISc.), Bengaluru-560012
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From jmaduzi2 at illinois.edu Fri Sep 29 14:35:24 2023
From: jmaduzi2 at illinois.edu (Maduzia, Joe)
Date: Fri, 29 Sep 2023 18:35:24 +0000
Subject: [labnetwork] Metal protection in KOH
Message-ID: <DM6PR11MB410594270CBFD58BB69A01AAEDC0A@DM6PR11MB4105.namprd11.prod.outlook.com>
Hello,
Does anyone sell 4oz aliquots (or similar) of protek or allresist or other KOH masks? If so, i'd like to connect and purchase one.
Thank You,
JOE MADUZIA
Interim Lab Coordinator, Grainger College of Engineering, MechSE, Univ of IL
Senior Research Engineer, Grainger College of Engineering, MechSE, Univ of IL
Lab Manager, Research Park & EnterpriseWorks, Univ of IL
2239 LuMEB \| (P) 217.244.6302
https://cleanroom.mechse.illinois.edu/ \| researchpark.illinois.edu<http://researchpark.illinois.edu/>
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From david.gottfried at ien.gatech.edu Tue Aug 1 17:04:08 2023
From: david.gottfried at ien.gatech.edu (Gottfried, David)
Date: Tue, 1 Aug 2023 21:04:08 +0000
Subject: [labnetwork] 2023 Workshop on Nanotechnology Infrastructure of the
Future
In-Reply-To: <BN8PR07MB5860F43250AFB0FF60D964BED40AA@BN8PR07MB5860.namprd07.prod.outlook.com>
References: <BN8PR07MB5860F43250AFB0FF60D964BED40AA@BN8PR07MB5860.namprd07.prod.outlook.com>
Message-ID: <BN8PR07MB58605D07D0316FB10069C749D40AA@BN8PR07MB5860.namprd07.prod.outlook.com>
Please see information below regarding an open workshop to discuss ideas about the next iteration of national nanotechnology infrastructure, after the end of the NNCI in 2025. Join us in person in DC or online.
David S. Gottfried, Ph.D.
Director, NNCI Coordinating Office
Director, SENIC
Regents Researcher, Institute for Electronics and Nanotechnology
Georgia Institute of Technology
(404) 894-0479
dsgottfried at gatech.edu<mailto:dsgottfried at gatech.edu>
http://www.linkedin.com/in/davidgottfried/<https://urldefense.us/v3/__http:/www.linkedin.com/in/davidgottfried/__;!!Nv3xtKNH_4uope0!gOTnr_EuysMNBaE0ir7bfplcsomqh_tA60QI_fnRzgmXcPhrFAczqd4VYgJm36zf80ldJt3L62-k3VRgeO16H_FjeKCtA9IfsM4$>
===================================================
[cid:62da936d-dd2b-44fc-8d28-ca5023c3242b]
Join us for the 2023 Workshop on Nanotechnology Infrastructure of the Future<https://urldefense.us/v3/__https:/nanoinfrastructureworkshop.sites.stanford.edu/__;!!Nv3xtKNH_4uope0!gOTnr_EuysMNBaE0ir7bfplcsomqh_tA60QI_fnRzgmXcPhrFAczqd4VYgJm36zf80ldJt3L62-k3VRgeO16H_FjeKCt-DyVhv0$> on September 12 & 13, 2023 in Washington D.C. or online.
The current NSF-funded National Nanotechnology Coordinated Infrastructure (NNCI)<https://urldefense.us/v3/__https:/nnci.net/__;!!Nv3xtKNH_4uope0!gOTnr_EuysMNBaE0ir7bfplcsomqh_tA60QI_fnRzgmXcPhrFAczqd4VYgJm36zf80ldJt3L62-k3VRgeO16H_FjeKCtfmWAfwQ$> ends in 2025, and we are looking ahead to the future and the next national resource in science and technology infrastructure. During this interactive workshop, you will provide essential insights and ideas towards shaping nanoscale research infrastructure. Please join us for a two-day, hybrid workshop featuring inspiring speakers from diverse disciplines and sectors, panel discussions, and idea generation.
Registration (free) is now open (until Sept. 1).<https://urldefense.us/v3/__https:/nanoinfrastructureworkshop.sites.stanford.edu/please-register-attend__;!!Nv3xtKNH_4uope0!gOTnr_EuysMNBaE0ir7bfplcsomqh_tA60QI_fnRzgmXcPhrFAczqd4VYgJm36zf80ldJt3L62-k3VRgeO16H_FjeKCt0vPC82w$>
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From rmorrison at draper.com Wed Aug 2 09:45:52 2023
From: rmorrison at draper.com (Morrison, Richard H., Jr)
Date: Wed, 2 Aug 2023 13:45:52 +0000
Subject: [labnetwork] MRL Furnace question
Message-ID: <BN1P110MB069088C91E9CBD18E7EC1854CE0BA@BN1P110MB0690.NAMP110.PROD.OUTLOOK.COM>
Hi All,
Happy summer,
We have a vintage 2014 MRL LPCVD furnace, we are trying to convert a SiC tube to PolySilicon and in the middle of this MRL was sold to YES. Our contact at MRL/YES Tom Beck retired and now there is confusion on how we are going to finish the conversion. Any of you guys heard of a good contact at YES for MRL issues or if there is a MRL FSE doing free- lance work?
Rick
Richard Morrison
DMTS
Draper Laboratory
555 Technology Square
Cambridge Ma 02139
Office: 617-258-3420
Cell: 508-930-3461
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From rreger at purdue.edu Thu Aug 3 15:43:39 2023
From: rreger at purdue.edu (Reger, Ronald K)

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From gau.tam at live.in Wed Sep 27 12:03:23 2023

From: gau.tam at live.in (Goutam Prakash)

Date: Wed, 27 Sep 2023 16:03:23 +0000

Subject: [labnetwork] PZT Etch- RIE selectivity between PZT and Pt

Message-ID: <SG2PR04MB55446FCAF67313287AFB7935E0C2A@SG2PR04MB5544.apcprd04.prod.outlook.com>

Lab Network,

I have a Sputtered PZT film on a seed layer/ bottom electrode of ~200nm Sputtered Pt (on thermal SiO2/ SOI- substrate). Any idea if I can use the Pt surface as an etch stop while using Ar (physical etch) in RIE?

In previous such devices involving this process, I have had difficulty wire bonding this Pt surface. Is it possible the Pt has eroded too much for wire bonding?

Does anyone have the etch selectivity data between sputtered PZT vs. Pt for Ar-RIE?

I have a PR mask of AZ4562 (~6um thickness).

Thank you!

--

Goutam P (Process Integration Engineer),

National Nano-fabrication Centre (NNfC),

Centre for Nano Science and Engineering (CeNSE),

Indian Institute of Science (IISc.), Bengaluru-560012

-------------- next part --------------

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From jmaduzi2 at illinois.edu Fri Sep 29 14:35:24 2023

From: jmaduzi2 at illinois.edu (Maduzia, Joe)

Date: Fri, 29 Sep 2023 18:35:24 +0000

Subject: [labnetwork] Metal protection in KOH

Message-ID: <DM6PR11MB410594270CBFD58BB69A01AAEDC0A@DM6PR11MB4105.namprd11.prod.outlook.com>

Hello,

Does anyone sell 4oz aliquots (or similar) of protek or allresist or other KOH masks? If so, i'd like to connect and purchase one.

Thank You,

JOE MADUZIA

Interim Lab Coordinator, Grainger College of Engineering, MechSE, Univ of IL

Senior Research Engineer, Grainger College of Engineering, MechSE, Univ of IL

Lab Manager, Research Park & EnterpriseWorks, Univ of IL

2239 LuMEB | (P) 217.244.6302

https://cleanroom.mechse.illinois.edu/ | researchpark.illinois.edu<http://researchpark.illinois.edu/>

-------------- next part --------------

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From david.gottfried at ien.gatech.edu Tue Aug 1 17:04:08 2023

From: david.gottfried at ien.gatech.edu (Gottfried, David)

Date: Tue, 1 Aug 2023 21:04:08 +0000

Subject: [labnetwork] 2023 Workshop on Nanotechnology Infrastructure of the

Future

In-Reply-To: <BN8PR07MB5860F43250AFB0FF60D964BED40AA@BN8PR07MB5860.namprd07.prod.outlook.com>

References: <BN8PR07MB5860F43250AFB0FF60D964BED40AA@BN8PR07MB5860.namprd07.prod.outlook.com>

Message-ID: <BN8PR07MB58605D07D0316FB10069C749D40AA@BN8PR07MB5860.namprd07.prod.outlook.com>

Please see information below regarding an open workshop to discuss ideas about the next iteration of national nanotechnology infrastructure, after the end of the NNCI in 2025. Join us in person in DC or online.

David S. Gottfried, Ph.D.

Director, NNCI Coordinating Office

Director, SENIC

Regents Researcher, Institute for Electronics and Nanotechnology

Georgia Institute of Technology

(404) 894-0479

dsgottfried at gatech.edu<mailto:dsgottfried at gatech.edu>

http://www.linkedin.com/in/davidgottfried/<https://urldefense.us/v3/__http:/www.linkedin.com/in/davidgottfried/__;!!Nv3xtKNH_4uope0!gOTnr_EuysMNBaE0ir7bfplcsomqh_tA60QI_fnRzgmXcPhrFAczqd4VYgJm36zf80ldJt3L62-k3VRgeO16H_FjeKCtA9IfsM4$>

===================================================

[cid:62da936d-dd2b-44fc-8d28-ca5023c3242b]

Join us for the 2023 Workshop on Nanotechnology Infrastructure of the Future<https://urldefense.us/v3/__https:/nanoinfrastructureworkshop.sites.stanford.edu/__;!!Nv3xtKNH_4uope0!gOTnr_EuysMNBaE0ir7bfplcsomqh_tA60QI_fnRzgmXcPhrFAczqd4VYgJm36zf80ldJt3L62-k3VRgeO16H_FjeKCt-DyVhv0$> on September 12 & 13, 2023 in Washington D.C. or online.

The current NSF-funded National Nanotechnology Coordinated Infrastructure (NNCI)<https://urldefense.us/v3/__https:/nnci.net/__;!!Nv3xtKNH_4uope0!gOTnr_EuysMNBaE0ir7bfplcsomqh_tA60QI_fnRzgmXcPhrFAczqd4VYgJm36zf80ldJt3L62-k3VRgeO16H_FjeKCtfmWAfwQ$> ends in 2025, and we are looking ahead to the future and the next national resource in science and technology infrastructure. During this interactive workshop, you will provide essential insights and ideas towards shaping nanoscale research infrastructure. Please join us for a two-day, hybrid workshop featuring inspiring speakers from diverse disciplines and sectors, panel discussions, and idea generation.

Registration (free) is now open (until Sept. 1).<https://urldefense.us/v3/__https:/nanoinfrastructureworkshop.sites.stanford.edu/please-register-attend__;!!Nv3xtKNH_4uope0!gOTnr_EuysMNBaE0ir7bfplcsomqh_tA60QI_fnRzgmXcPhrFAczqd4VYgJm36zf80ldJt3L62-k3VRgeO16H_FjeKCt0vPC82w$>

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From rmorrison at draper.com Wed Aug 2 09:45:52 2023

From: rmorrison at draper.com (Morrison, Richard H., Jr)

Date: Wed, 2 Aug 2023 13:45:52 +0000

Subject: [labnetwork] MRL Furnace question

Message-ID: <BN1P110MB069088C91E9CBD18E7EC1854CE0BA@BN1P110MB0690.NAMP110.PROD.OUTLOOK.COM>

Hi All,

Happy summer,

We have a vintage 2014 MRL LPCVD furnace, we are trying to convert a SiC tube to PolySilicon and in the middle of this MRL was sold to YES. Our contact at MRL/YES Tom Beck retired and now there is confusion on how we are going to finish the conversion. Any of you guys heard of a good contact at YES for MRL issues or if there is a MRL FSE doing free- lance work?

Rick

Richard Morrison

DMTS

Draper Laboratory

555 Technology Square

Cambridge Ma 02139

Office: 617-258-3420

Cell: 508-930-3461

-------------- next part --------------

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From rreger at purdue.edu Thu Aug 3 15:43:39 2023

From: rreger at purdue.edu (Reger, Ronald K)