srobertsphd/mit-labnetwork · Datasets at Hugging Face

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or someone you know may be interested in working as a Tystar field service
engineer, please email careers at tystar.com <mailto:careers at tystar.com> .
Best Regards,
Wayne Choe, Ph.D.
CEO
7050 Lampson Ave., Garden Grove, CA 92841
Tel: 310-781-9219
Fax: 310-781-9438
<http://www.tystar.com/> www.tystar.com
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From robert.macdonald at ge.com Thu Aug 31 12:50:10 2023
From: robert.macdonald at ge.com (Macdonald, Robert (GE Aerospace, US))
Date: Thu, 31 Aug 2023 16:50:10 +0000
Subject: [labnetwork] Argon vs Krypton for sputtering
Message-ID: <b098163a36a24daf87ae9cfdbcd5fa9e@ge.com>
Hi all,
I'm wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier.
In practice I see Ar used for all materials.
Any thoughts or opinions would be of interest.
Thanks,
Rob
Robert MacDonald
MEMS Engineer
GE Research
1 Research Circle
Niskayuna, NY 12309
518 312-5646
Robert.macdonald at ge.com
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From rmorrison at draper.com Thu Aug 31 14:21:59 2023
From: rmorrison at draper.com (Morrison, Richard H., Jr)
Date: Thu, 31 Aug 2023 18:21:59 +0000
Subject: [labnetwork] [EXTERNAL] Argon vs Krypton for sputtering
In-Reply-To: <b098163a36a24daf87ae9cfdbcd5fa9e@ge.com>
References: <b098163a36a24daf87ae9cfdbcd5fa9e@ge.com>
Message-ID: <BN1P110MB06908DF4DFD62D650BFF2AEFCEE5A@BN1P110MB0690.NAMP110.PROD.OUTLOOK.COM>
HI,
At Draper we use Argon and Krypton. For sputtering on polymers we have found that Kr works better for the sputter clean and since it is larger atom it does not implant very far into the polymer and oxides.
Rick
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Macdonald, Robert (GE Aerospace, US)
Sent: Thursday, August 31, 2023 12:50 PM
To: labnetwork at mtl.mit.edu
Subject: [EXTERNAL] [labnetwork] Argon vs Krypton for sputtering
CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe.
Hi all,
I'm wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier.
In practice I see Ar used for all materials.
Any thoughts or opinions would be of interest.
Thanks,
Rob
Robert MacDonald
MEMS Engineer
GE Research
1 Research Circle
Niskayuna, NY 12309
518 312-5646
Robert.macdonald at ge.com<mailto:Robert.macdonald at ge.com>
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From bill_flounders at berkeley.edu Thu Aug 31 14:39:38 2023
From: bill_flounders at berkeley.edu (Albert William Flounders)
Date: Thu, 31 Aug 2023 11:39:38 -0700
Subject: [labnetwork] Argon vs Krypton for sputtering
In-Reply-To: <b098163a36a24daf87ae9cfdbcd5fa9e@ge.com>
References: <b098163a36a24daf87ae9cfdbcd5fa9e@ge.com>
Message-ID: <CAHxjSh=vaH8frGOQ8qKzXGCZY4U0Zgy_5bJKjM5Zsh8BzWrZVg@mail.gmail.com>
Robert,
Interesting question. I think it's driven by cost
Ar is almost 1% in air while all other noble gases are in the ppm range (Kr
~1ppm)
The ionization energy for Ar and Kr is similar (both much lower than Ne and
He)
so you get good ionization yield from Ar. I'm not sure that the sputter
yield gain of
Kr would be worth the significant additional cost.
I'm curious what other replies you receive.
Bill Flounders
UC Berkeley
On Thu, Aug 31, 2023 at 10:48?AM Macdonald, Robert (GE Aerospace, US) <
robert.macdonald at ge.com> wrote:
> Hi all,
>
>
>
> I?m wondering when folks use Krypton or other noble gasses for sputtering
> in their facilities, and why. I have read that ideally, one matches the
> atomic weight of the target with the gas. Thus, Neon for lighter targets,
> Krypton for heavier.

or someone you know may be interested in working as a Tystar field service

engineer, please email careers at tystar.com <mailto:careers at tystar.com> .

Best Regards,

Wayne Choe, Ph.D.

CEO

7050 Lampson Ave., Garden Grove, CA 92841

Tel: 310-781-9219

Fax: 310-781-9438

<http://www.tystar.com/> www.tystar.com

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From robert.macdonald at ge.com Thu Aug 31 12:50:10 2023

From: robert.macdonald at ge.com (Macdonald, Robert (GE Aerospace, US))

Date: Thu, 31 Aug 2023 16:50:10 +0000

Subject: [labnetwork] Argon vs Krypton for sputtering

Message-ID: <b098163a36a24daf87ae9cfdbcd5fa9e@ge.com>

Hi all,

I'm wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier.

In practice I see Ar used for all materials.

Any thoughts or opinions would be of interest.

Thanks,

Rob

Robert MacDonald

MEMS Engineer

GE Research

1 Research Circle

Niskayuna, NY 12309

518 312-5646

Robert.macdonald at ge.com

-------------- next part --------------

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From rmorrison at draper.com Thu Aug 31 14:21:59 2023

From: rmorrison at draper.com (Morrison, Richard H., Jr)

Date: Thu, 31 Aug 2023 18:21:59 +0000

Subject: [labnetwork] [EXTERNAL] Argon vs Krypton for sputtering

In-Reply-To: <b098163a36a24daf87ae9cfdbcd5fa9e@ge.com>

References: <b098163a36a24daf87ae9cfdbcd5fa9e@ge.com>

Message-ID: <BN1P110MB06908DF4DFD62D650BFF2AEFCEE5A@BN1P110MB0690.NAMP110.PROD.OUTLOOK.COM>

HI,

At Draper we use Argon and Krypton. For sputtering on polymers we have found that Kr works better for the sputter clean and since it is larger atom it does not implant very far into the polymer and oxides.

Rick

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Macdonald, Robert (GE Aerospace, US)

Sent: Thursday, August 31, 2023 12:50 PM

To: labnetwork at mtl.mit.edu

Subject: [EXTERNAL] [labnetwork] Argon vs Krypton for sputtering

CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe.

Hi all,

I'm wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier.

In practice I see Ar used for all materials.

Any thoughts or opinions would be of interest.

Thanks,

Rob

Robert MacDonald

MEMS Engineer

GE Research

1 Research Circle

Niskayuna, NY 12309

518 312-5646

Robert.macdonald at ge.com<mailto:Robert.macdonald at ge.com>

-------------- next part --------------

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From bill_flounders at berkeley.edu Thu Aug 31 14:39:38 2023

From: bill_flounders at berkeley.edu (Albert William Flounders)

Date: Thu, 31 Aug 2023 11:39:38 -0700

Subject: [labnetwork] Argon vs Krypton for sputtering

In-Reply-To: <b098163a36a24daf87ae9cfdbcd5fa9e@ge.com>

References: <b098163a36a24daf87ae9cfdbcd5fa9e@ge.com>

Message-ID: <CAHxjSh=vaH8frGOQ8qKzXGCZY4U0Zgy_5bJKjM5Zsh8BzWrZVg@mail.gmail.com>

Robert,

Interesting question. I think it's driven by cost

Ar is almost 1% in air while all other noble gases are in the ppm range (Kr

~1ppm)

The ionization energy for Ar and Kr is similar (both much lower than Ne and

He)

so you get good ionization yield from Ar. I'm not sure that the sputter

yield gain of

Kr would be worth the significant additional cost.

I'm curious what other replies you receive.

Bill Flounders

UC Berkeley

On Thu, Aug 31, 2023 at 10:48?AM Macdonald, Robert (GE Aerospace, US) <

robert.macdonald at ge.com> wrote:

> Hi all,

>

> I?m wondering when folks use Krypton or other noble gasses for sputtering

> in their facilities, and why. I have read that ideally, one matches the

> atomic weight of the target with the gas. Thus, Neon for lighter targets,

> Krypton for heavier.