srobertsphd/mit-labnetwork · Datasets at Hugging Face

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Associate Director of Laboratory Operations
University of Minnesota \| Minnesota Nano Center
cse.umn.edu/mnc<http://cse.umn.edu/mnc>
612.626.3287
olms0025 at umn.edu<mailto:olms0025 at umn.edu>
The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336. Is e buidheann carthannais a th? ann an Oilthigh Dh?n ?ideann, cl?raichte an Alba, ?ireamh cl?raidh SC005336.
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From beaudoin at physics.ubc.ca Tue Jul 4 17:31:31 2023
From: beaudoin at physics.ubc.ca (Beaudoin, Mario)
Date: Tue, 4 Jul 2023 14:31:31 -0700
Subject: [labnetwork] Heidelberg MLA150 SU-8 Exposure Dose
In-Reply-To: <SA1PR01MB6544488F2AF7FBED45495CE2F322A@SA1PR01MB6544.prod.exchangelabs.com>
References: <SA1PR01MB6544488F2AF7FBED45495CE2F322A@SA1PR01MB6544.prod.exchangelabs.com>
Message-ID: <54d391c6-cbee-2f77-6b0f-504f7ef7253f@physics.ubc.ca>
We experience the same thing with our instrument.
Mario
On 2023-06-22 10:28 a.m., Hollingshead, Dave wrote:
> [CAUTION: Non-UBC Email]
>
> Dear Labnetwork,
>
> We have found that exposure of SU-8 on our MLA150 tool (using the
> 375nm laser) seems to require very high doses. Even thin ~500nm thick
> films (using SU-8 2000.5) have required doses on the order of
> 1200mJ/cm^2 to fully expose. This is 15-20x the recommended dosage
> from both the datasheet and what we estimate is the exposure dose used
> on our filtered contact aligners. Thicker films follow the same trend,
> but not necessarily in a linear fashion (5?m films require ~2000mJ/cm^2 ).
>
> I am sure the bump from 365nm to 375nm plays a role, but the magnitude
> of the change seems excessive. FWIW, our other negative resists (eg.
> nLOF2020) seem to expose properly at reasonable doses.
>
> Has anyone else experienced this? Does anyone have an explanation or
> any processing suggestions for using SU-8 with an MLA?
>
> Thanks,
>
> -Dave
>
> Dave Hollingshead
> Manager, Research Operations
>
> The Ohio State University
> Nanotech West Labs
> Suite 100, 1381 Kinnear Rd, Columbus, OH 43212
> 614.292.1355 Office
> hollingshead.19 at osu.edu <mailto:hollingshead.19 at osu.edu> /
> nanotech.osu.edu <http://nanotech.osu.edu>
>
> Pronouns: he/him/his
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
--
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From tucsonr at illinois.edu Wed Jul 5 09:37:40 2023
From: tucsonr at illinois.edu (Richelson, Tucson)
Date: Wed, 5 Jul 2023 13:37:40 +0000
Subject: [labnetwork] No water flow? - AccuThermo AW610M RTP
Message-ID: <MW4PR11MB582296CB00BAD874034C0FC9D92FA@MW4PR11MB5822.namprd11.prod.outlook.com>
Hello everyone,
We have a AW610 RTP and we noticed that the pyrometer coolant water wasn't flowing. We disconnected the chiller bath and tested it separately and confirmed that it was pumping water. Has anyone else experience this? Any suggestions on how to fix this?
https://allwin21.com/accuthermo-aw-610/
Best,
Tucson Richelson
-------------------------------------------------------------------------
Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)
University of Illinois
Rm 2118, MC-249
208 North Wright St. Urbana, IL 61801
Office: +1 (217) 244-5138
Web: http://mntl.illinois.edu/
Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com
Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
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From logshappill at gmail.com Wed Jul 5 12:31:54 2023
From: logshappill at gmail.com (Leslie George)
Date: Wed, 5 Jul 2023 09:31:54 -0700
Subject: [labnetwork] No water flow? - AccuThermo AW610M RTP
In-Reply-To: <MW4PR11MB582296CB00BAD874034C0FC9D92FA@MW4PR11MB5822.namprd11.prod.outlook.com>
References: <MW4PR11MB582296CB00BAD874034C0FC9D92FA@MW4PR11MB5822.namprd11.prod.outlook.com>
Message-ID: <7DC3F9D7-3B32-45FD-80EF-2FF066A81B89@gmail.com>
Hi Tucson,

Associate Director of Laboratory Operations

University of Minnesota | Minnesota Nano Center

cse.umn.edu/mnc<http://cse.umn.edu/mnc>

612.626.3287

olms0025 at umn.edu<mailto:olms0025 at umn.edu>

The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336. Is e buidheann carthannais a th? ann an Oilthigh Dh?n ?ideann, cl?raichte an Alba, ?ireamh cl?raidh SC005336.

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From beaudoin at physics.ubc.ca Tue Jul 4 17:31:31 2023

From: beaudoin at physics.ubc.ca (Beaudoin, Mario)

Date: Tue, 4 Jul 2023 14:31:31 -0700

Subject: [labnetwork] Heidelberg MLA150 SU-8 Exposure Dose

In-Reply-To: <SA1PR01MB6544488F2AF7FBED45495CE2F322A@SA1PR01MB6544.prod.exchangelabs.com>

References: <SA1PR01MB6544488F2AF7FBED45495CE2F322A@SA1PR01MB6544.prod.exchangelabs.com>

Message-ID: <54d391c6-cbee-2f77-6b0f-504f7ef7253f@physics.ubc.ca>

We experience the same thing with our instrument.

Mario

On 2023-06-22 10:28 a.m., Hollingshead, Dave wrote:

> [*CAUTION:* Non-UBC Email]

>

> Dear Labnetwork,

>

> We have found that exposure of SU-8 on our MLA150 tool (using the

> 375nm laser) seems to require very high doses. Even thin ~500nm thick

> films (using SU-8 2000.5) have required doses on the order of

> 1200mJ/cm^2 to fully expose. This is 15-20x the recommended dosage

> from both the datasheet and what we estimate is the exposure dose used

> on our filtered contact aligners. Thicker films follow the same trend,

> but not necessarily in a linear fashion (5?m films require ~2000mJ/cm^2 ).

>

> I am sure the bump from 365nm to 375nm plays a role, but the magnitude

> of the change seems excessive. FWIW, our other negative resists (eg.

> nLOF2020) seem to expose properly at reasonable doses.

>

> Has anyone else experienced this? Does anyone have an explanation or

> any processing suggestions for using SU-8 with an MLA?

>

> Thanks,

>

> -Dave

>

> *Dave Hollingshead*

> Manager, Research Operations

>

> *The Ohio State University*

> Nanotech West Labs

> Suite 100, 1381 Kinnear Rd, Columbus, OH 43212

> 614.292.1355 Office

> hollingshead.19 at osu.edu <mailto:hollingshead.19 at osu.edu> /

> nanotech.osu.edu <http://nanotech.osu.edu>

>

> Pronouns: he/him/his

>

> _______________________________________________

> labnetwork mailing list

> labnetwork at mtl.mit.edu

> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

--

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From tucsonr at illinois.edu Wed Jul 5 09:37:40 2023

From: tucsonr at illinois.edu (Richelson, Tucson)

Date: Wed, 5 Jul 2023 13:37:40 +0000

Subject: [labnetwork] No water flow? - AccuThermo AW610M RTP

Message-ID: <MW4PR11MB582296CB00BAD874034C0FC9D92FA@MW4PR11MB5822.namprd11.prod.outlook.com>

Hello everyone,

We have a AW610 RTP and we noticed that the pyrometer coolant water wasn't flowing. We disconnected the chiller bath and tested it separately and confirmed that it was pumping water. Has anyone else experience this? Any suggestions on how to fix this?

https://allwin21.com/accuthermo-aw-610/

Best,

Tucson Richelson

-------------------------------------------------------------------------

Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)

University of Illinois

Rm 2118, MC-249

208 North Wright St. Urbana, IL 61801

Office: +1 (217) 244-5138

Web: http://mntl.illinois.edu/

Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com

Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.

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From logshappill at gmail.com Wed Jul 5 12:31:54 2023

From: logshappill at gmail.com (Leslie George)

Date: Wed, 5 Jul 2023 09:31:54 -0700

Subject: [labnetwork] No water flow? - AccuThermo AW610M RTP

In-Reply-To: <MW4PR11MB582296CB00BAD874034C0FC9D92FA@MW4PR11MB5822.namprd11.prod.outlook.com>

References: <MW4PR11MB582296CB00BAD874034C0FC9D92FA@MW4PR11MB5822.namprd11.prod.outlook.com>

Message-ID: <7DC3F9D7-3B32-45FD-80EF-2FF066A81B89@gmail.com>

Hi Tucson,