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Is there any real safety information on these substitutes, or it's just that they are not as common as TMAH hence not regulated? I cannot find as much as a proper SDS on any of these.
Remember, TMAH was considered pretty benign until 2005-2010ish when 3 fatal accidents were brought up (hence quoted 75% mortality - 3 out of 4 for major exposure. Along with 20 minor chemical burns in the same dataset). Even then TMAH is a low priority for toxicological research with mostly anecdotal evidence...
Mike
_______________________________________________
Michael Yakimov
Research scientist
College of Nanoscale Science and Engineering
SUNY Polytechnic Institute
253 Fuller rd.
Albany NY 12203
Phone: 518-437-8609 lab
e-mail: yakimom at sunypoly.edu
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Hathaway, Malcolm R <hathaway at cns.fas.harvard.edu>
Sent: Thursday, June 15, 2023 2:20 PM
To: Labnetwork Mailing List <labnetwork at mtl.mit.edu>
Subject: [labnetwork] TMAH alternatives
Hello Labnetworkers,
Has anyone tried one of the TMAH substitutes that have become available?
How do they work? Are your users satisfied with their results?
For background, TMAH (tetramethylammonium hydroxide) is widely used in commercial resist developers (3%) and for HSQ developing (25%). In its 25% concentration, TMAH is a potent contact neurotoxin, which is fatal roughly 75% of the time, for exposures greater than 7.5% of body area. Nasty stuff.
Several companies now have safer alternatives available, which we'd like to try out, such as:
Envure 3330 (Sachem Chemical),
E-Grade THEMAH SLM ((hydroxyethyl) methylammonium hydroxide, from Huntsman Chemical), and
Novo-safe SE-33 (ethyl tri-methy ammonium hydroxide from Transene).
We are particularly interested in using one of these as an HSQ developer, so we can do away with 25% TMAH.
Any experiences, good or bad, will be most welcome.
Thanks,
Mac Hathaway
Senior Process and Systems Engineer
Harvard Center for Nanoscale Systems
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From logshappill at gmail.com Thu Jun 15 20:08:40 2023
From: logshappill at gmail.com (Leslie George)
Date: Thu, 15 Jun 2023 17:08:40 -0700
Subject: [labnetwork] Cleanroom consultant
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From schweig at umich.edu Fri Jun 16 06:31:10 2023
From: schweig at umich.edu (Dennis Schweiger)
Date: Fri, 16 Jun 2023 06:31:10 -0400
Subject: [labnetwork] Cleanroom consultant
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Joe,
Good morning. We too used AGI (formerly Abbie Gregg), now with AM
Technical Solutions, with great success. I would suggest you rally your
group together and come up with a rough idea of what you'd like your fab to
accomplish in the way of processing, then talk (lot's of talk) with peer
institutions to see what worked for them, and what issues they had. We had
almost 20 years of cleanroom operation under our belt before we did
our expansion, and at the time of our expansion design we toured several
larger production fabs to get an idea for what we could do with our
facility. I will say that what we had originally laid out for as a tool
set in our new fab, is not what we finally ended up with, however it was
good enough to allow us to design the support infrastructure for our
facility.
As always, you're more than welcome to come out and take a look at our
facility. I'd be happy to show you what we put together.
Dennis Schweiger
Facilities Manager
Lurie nanofabrication Facility
University of Michigan
734.647.2055 Ofc
"People can be divided into 3 groups - those that make things happen, those
that watch things happen, and those that wonder what happened." Within
which group do you belong?
On Thu, Jun 15, 2023 at 5:15?PM Joseph Losby <joseph.losby at ucalgary.ca>
wrote:
> Hi everyone,
>
> I am wondering if you have ever sought the services of a cleanroom
> consultant when building a new facility? We are contemplating going this
> route. If so, do you have any recommendations? Any other words of advice
> is appreciated.
>
> Cheers,
> Joe
>
> *Joseph Losby, PhD*
> Manager, qLab Operations
>
>
>