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In-Reply-To: <MN2PR07MB6526C0C512E36FF68083D2EBCB5BA@MN2PR07MB6526.namprd07.prod.outlook.com> |
References: <MN2PR07MB6526C0C512E36FF68083D2EBCB5BA@MN2PR07MB6526.namprd07.prod.outlook.com> |
Message-ID: <BY3PR05MB8260C7F8FE6EDC858C1793C2CE5BA@BY3PR05MB8260.namprd05.prod.outlook.com> |
Is there any real safety information on these substitutes, or it's just that they are not as common as TMAH hence not regulated? I cannot find as much as a proper SDS on any of these. |
Remember, TMAH was considered pretty benign until 2005-2010ish when 3 fatal accidents were brought up (hence quoted 75% mortality - 3 out of 4 for major exposure. Along with 20 minor chemical burns in the same dataset). Even then TMAH is a low priority for toxicological research with mostly anecdotal evidence... |
Mike |
_______________________________________________ |
Michael Yakimov |
Research scientist |
College of Nanoscale Science and Engineering |
SUNY Polytechnic Institute |
253 Fuller rd. |
Albany NY 12203 |
Phone: 518-437-8609 lab |
e-mail: yakimom at sunypoly.edu |
________________________________ |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Hathaway, Malcolm R <hathaway at cns.fas.harvard.edu> |
Sent: Thursday, June 15, 2023 2:20 PM |
To: Labnetwork Mailing List <labnetwork at mtl.mit.edu> |
Subject: [labnetwork] TMAH alternatives |
Hello Labnetworkers, |
Has anyone tried one of the TMAH substitutes that have become available? |
How do they work? Are your users satisfied with their results? |
For background, TMAH (tetramethylammonium hydroxide) is widely used in commercial resist developers (3%) and for HSQ developing (25%). In its 25% concentration, TMAH is a potent contact neurotoxin, which is fatal roughly 75% of the time, for exposures greater than 7.5% of body area. Nasty stuff. |
Several companies now have safer alternatives available, which we'd like to try out, such as: |
Envure 3330 (Sachem Chemical), |
E-Grade THEMAH SLM ((hydroxyethyl) methylammonium hydroxide, from Huntsman Chemical), and |
Novo-safe SE-33 (ethyl tri-methy ammonium hydroxide from Transene). |
We are particularly interested in using one of these as an HSQ developer, so we can do away with 25% TMAH. |
Any experiences, good or bad, will be most welcome. |
Thanks, |
Mac Hathaway |
Senior Process and Systems Engineer |
Harvard Center for Nanoscale Systems |
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From logshappill at gmail.com Thu Jun 15 20:08:40 2023 |
From: logshappill at gmail.com (Leslie George) |
Date: Thu, 15 Jun 2023 17:08:40 -0700 |
Subject: [labnetwork] Cleanroom consultant |
In-Reply-To: <YT1PR01MB87156D0CAD69F488AC3905508E5BA@YT1PR01MB8715.CANPRD01.PROD.OUTLOOK.COM> |
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From schweig at umich.edu Fri Jun 16 06:31:10 2023 |
From: schweig at umich.edu (Dennis Schweiger) |
Date: Fri, 16 Jun 2023 06:31:10 -0400 |
Subject: [labnetwork] Cleanroom consultant |
In-Reply-To: <YT1PR01MB87156D0CAD69F488AC3905508E5BA@YT1PR01MB8715.CANPRD01.PROD.OUTLOOK.COM> |
References: <YT1PR01MB87156D0CAD69F488AC3905508E5BA@YT1PR01MB8715.CANPRD01.PROD.OUTLOOK.COM> |
Message-ID: <CAKzi2_PNSmBoPj2KZVZnkiOD46+wA67d4fhLknMZZ8nUHqF5NA@mail.gmail.com> |
Joe, |
Good morning. We too used AGI (formerly Abbie Gregg), now with AM |
Technical Solutions, with great success. I would suggest you rally your |
group together and come up with a rough idea of what you'd like your fab to |
accomplish in the way of processing, then talk (lot's of talk) with peer |
institutions to see what worked for them, and what issues they had. We had |
almost 20 years of cleanroom operation under our belt before we did |
our expansion, and at the time of our expansion design we toured several |
larger production fabs to get an idea for what we could do with our |
facility. I will say that what we had originally laid out for as a tool |
set in our new fab, is not what we finally ended up with, however it was |
good enough to allow us to design the support infrastructure for our |
facility. |
As always, you're more than welcome to come out and take a look at our |
facility. I'd be happy to show you what we put together. |
Dennis Schweiger |
Facilities Manager |
Lurie nanofabrication Facility |
University of Michigan |
734.647.2055 Ofc |
"People can be divided into 3 groups - those that make things happen, those |
that watch things happen, and those that wonder what happened." Within |
which group do you belong? |
On Thu, Jun 15, 2023 at 5:15?PM Joseph Losby <joseph.losby at ucalgary.ca> |
wrote: |
> Hi everyone, |
> |
> I am wondering if you have ever sought the services of a cleanroom |
> consultant when building a new facility? We are contemplating going this |
> route. If so, do you have any recommendations? Any other words of advice |
> is appreciated. |
> |
> Cheers, |
> Joe |
> |
> *Joseph Losby, PhD* |
> Manager, qLab Operations |
> |
> |
> |
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