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{ "ToolName": "ブロックゲージ", "Size": "", "ToolOther": "", "WorkName": "B/S平面調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "平面度:10μm以下高さ各箇所:±15μ以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "B/S平行度調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平行度", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "平行度:20μm/60㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ツール研磨ユニット組付け&平面度調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "高さ各箇所:±10μ以下平面度:10μm以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
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null
{ "ToolName": "平面調整治具", "Size": "", "ToolOther": "FM-2748", "WorkName": "ツール研磨ユニット組付け&平面度調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "FM-2748", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "高さ各箇所:±10μ以下平面度:10μm以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
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null
{ "ToolName": "ブロックゲージ", "Size": "", "ToolOther": "", "WorkName": "ツール研磨ユニット組付け&平面度調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "高さ各箇所:±10μ以下平面度:10μm以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
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null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ボンディングヘッド平面・平行調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "【ツール取付け面平面度規格】:5μm/20㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
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null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングヘッド平面・平行調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "設定確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
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null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングヘッド平面・平行調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "-", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "-", "Method": "-", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ボンディングヘッド平面・平行調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平行度", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "【ヘッド平行度規格】:10μm/10㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ボンディングヘッド芯出し治具", "Size": "", "ToolOther": "FM-4812", "WorkName": "ボンディングヘッド平面・平行調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平行度", "ToolManageNo": "FM-4812", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "【ヘッド平行度規格】:10μm/10㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
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null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングヘッド平面・平行調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "設定確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングヘッド平面・平行調整④", "WorkItems": [ "2. プラス側オーバーランセンサ位置を調整する", "1. 下記手順にてメカストッパーブラケット位置を調整する" ], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "【...
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッド平行調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平行度", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "【P/Uヘッドツール平行度規格】:10μm/10㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ピックアップヘッド平面調整治具", "Size": "", "ToolOther": "FM-4811", "WorkName": "ピックアップヘッド平行調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平行度", "ToolManageNo": "FM-4811", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "【P/Uヘッドツール平行度規格】:10μm/10㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッド平行調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "塗布量", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "指示箇所に塗布ゴマ粒:1", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッド平面調整(上向き)①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "作業指示通り取付ている事", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ピックアップヘッド平面調整治具", "Size": "", "ToolOther": "FM-4811", "WorkName": "ピックアップヘッド平面調整(上向き)①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-4811", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "ピックアップヘッド平面調整治具", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッド平面調整(上向き)②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "平面度:10μ/10㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "シックネスゲージ", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッド平面調整(上向き)②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "隙間確認", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "隙間:20μが通り40μが止る", "Method": "シックネスゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッド平面調整(下向き)", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "ブレ防止無時:40μm/10㎜以下ブレ防止有時:60μm/10㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ピックアップヘッド平面調整治具", "Size": "", "ToolOther": "FM-4811", "WorkName": "ピックアップヘッド平面調整(下向き)", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "FM-4811", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "ブレ防止無時:40μm/10㎜以下ブレ防止有時:60μm/10㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "エジェクタヘッド高さ・平面度調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "平面度:20μ以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "エジェクターヘッド高さ治具", "Size": "", "ToolOther": "FM-4809", "WorkName": "エジェクタヘッド高さ・平面度調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "FM-4809", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "平面度:20μ以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "エジェクタヘッド高さ・平面度調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "高さ", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "高さ:+10μ~+40μm", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ウエハθ軸(AWC)原点復帰オフセット調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平行度", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "平行度:20μm/150㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "シートブロー確認", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "設定確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "75%±0.5%", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ウエハカセットリフター平面・平行調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平行度", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "平行度:50μm/150㎜以下", "Method": "てこ式ダイヤルゲージ", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "水準器", "Size": "", "ToolOther": "", "WorkName": "ウエハカセットリフター平面・平行調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "平面度", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "0.08㎜以下(4目盛り以下)", "Method": "水準器", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ブロックゲージ", "Size": "", "ToolOther": "", "WorkName": "ウエハリフタ基準位置Zティーチ①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ブロックゲージ", "Size": "", "ToolOther": "", "WorkName": "ウエハリフタ基準位置Zティーチ②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "設定確認", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ウエハリフタ基準位置Zティーチ②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "設定確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ウエハカセット位置調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "スケール", "Size": "300㎜", "ToolOther": "", "WorkName": "ウエハ交換位置ティーチ", "WorkItems": [ "1. 下記手順に従い、ウエハ交換位置のティーチを行う" ], "WorkPoints": [ "300㎜スケール", "手前側の搬送位置の確認", "搬送ライン" ], "Tolks": [], "InspectionNo": "WDWS-5400-004", "InspectionItems": [ "検査表①:ウエハ交換位...
{ "QualityItem": "設定確認", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "スケール", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "スケール", "Size": "300㎜", "ToolOther": "", "WorkName": "ウエハフレームトランスファー基準位置調整①", "WorkItems": [ "1. 下記手順に従い、エハフレームトランスファー基準位置を調整する" ], "WorkPoints": [ "ティーチに入る", "レート選択", "初期値へ移動", "300㎜スケール", "マガジンX方向規制面とトランスファー爪の根元をティーチする", "トランスファー爪の根元", "マガシ...
{ "QualityItem": "設定確認", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "スケール", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "スケール", "Size": "300㎜", "ToolOther": "", "WorkName": "ウエハフレームトランスファー基準位置調整②", "WorkItems": [ "1. 前ページの続き" ], "WorkPoints": [ "マガジンX方向規制面(300㎜スケール)", "爪先端とマガジンX方向規制面が一致した値から2.4㎜押し込む(面取り分も考慮)" ], "Tolks": [], "InspectionNo": "", "InspectionItems": [], ...
{ "QualityItem": "設定確認", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "スケール", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ブロックゲージ", "Size": "", "ToolOther": "", "WorkName": "ウエハフレームトランスファー基準位置調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ウエハリング検出センサ位置調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ウエハフレームセット確認センサ調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "正常な事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ウエハ飛び出し検出センサ調整", "WorkItems": [ "3. ウエハ飛び出し検出センサが指示通り動作することを確認する", "2. ウエハ飛び出し検出センサのしきい値を設定する", "1. 全段にウエハを詰めた状態でウエハマガジンをマガジンリフタへセットする" ], "WorkPoints": [ "ウエハフレーム飛び出し検出B0404", "ウエハ飛び出し検出センサが全投光した状態のアンプの値+100...
{ "QualityItem": "設定確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "検査書に従う", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ウエハカセット6inch", "Size": "", "ToolOther": "", "WorkName": "ウエハフレーム搬送動作確認", "WorkItems": [ "4. ウエハトランスファーX軸の速度を元に戻す", "2. ウエハカセットにウエハフラットリングをセットしウエハリフタに搭載する(サイズは仕様に従う)", "1. ウエハトランスファーX軸の軸速度を変更する", "3. ユニット操作画面でウエハーフレームの搬送動作確認を行う" ], "WorkPoints": [ "ウエハフレームトラ...
{ "QualityItem": "動作確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "検査書に従う", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ウエハカセット8inch", "Size": "", "ToolOther": "", "WorkName": "ウエハフレーム搬送動作確認", "WorkItems": [ "4. ウエハトランスファーX軸の速度を元に戻す", "2. ウエハカセットにウエハフラットリングをセットしウエハリフタに搭載する(サイズは仕様に従う)", "1. ウエハトランスファーX軸の軸速度を変更する", "3. ユニット操作画面でウエハーフレームの搬送動作確認を行う" ], "WorkPoints": [ "ウエハフレームトラ...
{ "QualityItem": "動作確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "検査書に従う", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ウエハフレーム6inch", "Size": "", "ToolOther": "", "WorkName": "ウエハフレーム搬送動作確認", "WorkItems": [ "4. ウエハトランスファーX軸の速度を元に戻す", "2. ウエハカセットにウエハフラットリングをセットしウエハリフタに搭載する(サイズは仕様に従う)", "1. ウエハトランスファーX軸の軸速度を変更する", "3. ユニット操作画面でウエハーフレームの搬送動作確認を行う" ], "WorkPoints": [ "ウエハフレームトラ...
{ "QualityItem": "動作確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "検査書に従う", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ウエハフレーム8inch", "Size": "", "ToolOther": "", "WorkName": "ウエハフレーム搬送動作確認", "WorkItems": [ "4. ウエハトランスファーX軸の速度を元に戻す", "2. ウエハカセットにウエハフラットリングをセットしウエハリフタに搭載する(サイズは仕様に従う)", "1. ウエハトランスファーX軸の軸速度を変更する", "3. ユニット操作画面でウエハーフレームの搬送動作確認を行う" ], "WorkPoints": [ "ウエハフレームトラ...
{ "QualityItem": "動作確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "検査書に従う", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "荷重校正用ツール", "Size": "", "ToolOther": "FM-3131", "WorkName": "ボンディングヘッド基準ブロック高さ調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "高さ", "ToolManageNo": "FM-3131", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "【基準ブロック高さ規格】:8㎜±0.1㎜以下", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングヘッド基準ブロック高さ調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ギャップ調整治具", "Size": "", "ToolOther": "FM-3177", "WorkName": "ボンディングヘッド基準ブロック高さ調整③", "WorkItems": [ "1. 規格外の場合は下記を参考に調整する" ], "WorkPoints": [ "調整ボルト", "当付けままでスライドさせて隙間確保", "-8.1㎜以下の場合", "-7.9㎜以上の場合", "㉗を使用して隙間確保" ], "Tolks": [], "Inspecti...
{ "QualityItem": "設定確認", "ToolManageNo": "FM-3177", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッドタッチ検出オフセット(下側)調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ノズル高さ基準出し治具", "Size": "", "ToolOther": "FM-2750", "WorkName": "ピックアップヘッドタッチ検出オフセット(下側)調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-2750", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッドタッチ検出オフセット(下側)調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "表示値:0.2㎜~0.5㎜", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッドタッチ検出オフセット(上側)調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ノズル高さ基準出し治具", "Size": "", "ToolOther": "FM-2750", "WorkName": "ピックアップヘッドタッチ検出オフセット(上側)調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-2750", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ノズル高さ基準出し荷重測定治具", "Size": "", "ToolOther": "FM-3131", "WorkName": "ピックアップヘッドタッチ検出オフセット(上側)調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-3131", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッドタッチ検出オフセット(上側)調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッドタッチ検出オフセット(上側)調整③", "WorkItems": [ "1. 前作業の続き" ], "WorkPoints": [ "ボルトを緩めて上下に調整。オフセットが規格値の範囲外の場合は上向きに調整して下さい。" ], "Tolks": [], "InspectionNo": "WDWS-5400-004", "InspectionItems": [ "検査表①:ピックアップヘット...
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "表示値:0.2㎜~0.5㎜", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "P/U高さ測定治具", "Size": "", "ToolOther": "FM-2750", "WorkName": "ボンディングヘッドフリップ受渡し位置Zティーチ①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "表示確認", "ToolManageNo": "FM-2750", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "高さ測定用治具", "Size": "", "ToolOther": "FM-3131", "WorkName": "ボンディングヘッドフリップ受渡し位置Zティーチ①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "表示確認", "ToolManageNo": "FM-3131", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングヘッドフリップ受渡し位置Zティーチ②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "'入力範囲:-8.00±1.0㎜以内", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ノズル高さ基準出し治具(先端φ1.5)", "Size": "", "ToolOther": "FM-2750", "WorkName": "ピックアップヘッドエジェクタヘッド面高さティーチ①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-2750", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ピックアップヘッドエジェクタヘッド面高さティーチ②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "ヘッド面高さ", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "入力範囲:-5.00±0.5㎜以内", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "てこ式ダイヤルゲージ", "Size": "", "ToolOther": "", "WorkName": "ピックアップZ軸待機位置ティーチ", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "1回/半年", "ToolRecord": "校正成績書", "StdVal": "作業指示通り指示通り設定の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "B/S芯出し治具", "Size": "", "ToolOther": "FM-4813", "WorkName": "ボンディングステージカメラ光軸・ピント・θ調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "FM-4813", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "光軸ずれ無き事ピンとずれ無き事θずれ無き事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングステージカメラ光軸・ピント・θ調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "光軸ずれ無き事ピンとずれ無き事θずれ無き事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングステージカメラ光軸・ピント・θ調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "光軸ずれ無き事ピンとずれ無き事θずれ無き事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ヘッド・光学系芯出し治具", "Size": "", "ToolOther": "FM-3125", "WorkName": "ボンディングステージカメラ位置調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-3125", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ボンディングステージ芯出し用治具", "Size": "", "ToolOther": "FM-4813", "WorkName": "ボンディングステージカメラ位置調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-4813", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングステージカメラ位置調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングステージカメラ位置調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "中心ズレ量", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "X方向Y方向:±20μ以下", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "シックネスゲージ", "Size": "", "ToolOther": "", "WorkName": "BS搬送レール平行度調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "取付確認", "ToolManageNo": "-", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ボンディングステージ芯出し用治具", "Size": "", "ToolOther": "FM-4813", "WorkName": "BS搬送レール平行度調整", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-4813", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ボンディングステージ芯出し用治具", "Size": "", "ToolOther": "FM-4813", "WorkName": "ボンディングステージ基準位置ティーチ①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "FM-4813", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングステージ基準位置ティーチ②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ボンディングステージ芯出し用治具", "Size": "", "ToolOther": "FM-4813", "WorkName": "ボンディングステージカメラ斜方照明位置調整(OP)", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "FM-4813", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ボンディングヘッド芯出し治具", "Size": "", "ToolOther": "FM-4812", "WorkName": "アップルッキングカメラ光軸・ピント・θ調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "FM-4812", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "光軸ずれ無き事ピンとずれ無き事θずれ無き事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "アップルッキングカメラ光軸・ピント・θ調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "光軸ずれ無き事ピンとずれ無き事θずれ無き事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "アップルッキングカメラ光軸・ピント・θ調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "光軸ずれ無き事ピンとずれ無き事θずれ無き事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ボンディングヘッド芯出し治具", "Size": "1.6㎜", "ToolOther": "FM-4812", "WorkName": "アップルッキングカメラ位置調整①", "WorkItems": [ "1. 下記手順に従いカメラ位置の調整を行う" ], "WorkPoints": [ "光学テストでアップルッキングカメラを選択", "打痕治具でも可", "ボンディングヘッドY軸を+94.5㎜に移動", "同軸照明の光量を上げる", "X方向固定ボルト", "Y...
{ "QualityItem": "表示確認", "ToolManageNo": "FM-4812", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "B/H芯出し治具", "Size": "", "ToolOther": "FM-4812", "WorkName": "アップルッキングカメラ位置調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "中心ズレ量", "ToolManageNo": "FM-4812", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "P/U打痕治具", "Size": "", "ToolOther": "FM-2742", "WorkName": "アップルッキングカメラ位置調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "中心ズレ量", "ToolManageNo": "FM-2742", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "アップルッキングカメラ位置調整②", "WorkItems": [ "1. 前作業の続き" ], "WorkPoints": [ "カメラの中心付近に平面部分が来るように軸移動", "自動で打痕を付ける", "X方向だけ打痕の中心に緑十字線を移動させる", "Y方向は次でメカ調整するため移動させないこと" ], "Tolks": [], "InspectionNo": "WDWS-5400-004",...
{ "QualityItem": "中心ズレ量", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "アップルッキングカメラ位置調整②", "WorkItems": [ "1. 前作業の続き" ], "WorkPoints": [ "ティーチが反映されていることを確認", "ズレ量変更前と変更後のズレ量を確認", "前回の打痕", "今回の打痕" ], "Tolks": [], "InspectionNo": "WDWS-5400-004", "InspectionItems": [ ...
{ "QualityItem": "中心ズレ量", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "X:20μm以下Y:20μm以下", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ボンディングヘッド芯出し治具", "Size": "", "ToolOther": "FM-4812", "WorkName": "アップルッキングカメラ位置調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "中心ズレ量", "ToolManageNo": "FM-4812", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ボンディングヘッド芯出し治具", "Size": "", "ToolOther": "FM-4812", "WorkName": "アップルッキングカメラ位置調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "中心ズレ量", "ToolManageNo": "FM-4812", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "X:20μm以下Y:20μm以下", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ウエハカメラ光軸調整治具", "Size": "", "ToolOther": "FM-4809", "WorkName": "ウエハカメラ光軸・ピント・θ調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-4809", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ウエハカメラ光軸・ピント・θ調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "設定確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ダイエジェクタ(小径)用芯出し治具", "Size": "", "ToolOther": "FM-3537", "WorkName": "ウエハカメラ光軸・ピント・θ調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "FM-3537", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "光軸ずれ無き事ピンとずれ無き事θずれ無き事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ウエハカメラ光軸調整治具", "Size": "", "ToolOther": "FM-4809", "WorkName": "ウエハカメラ位置調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-4809", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "ノズル打痕治具", "Size": "", "ToolOther": "FM-2742", "WorkName": "ウエハカメラ位置調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-2742", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ウエハカメラ位置調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ウエハカメラ位置調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "中心ズレ量", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "X方向Y方向:±20μ以下", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "エジェクタ基準位置調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "エジェクタ基準位置調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り表示の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "エジェクタ基準位置調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "中心ズレ量", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "X方向Y方向:±20μ以下", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "P/U高さ測定治具", "Size": "", "ToolOther": "FM-2750", "WorkName": "エジェクタニードルエジェクタヘッド面高さティーチ", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "ヘッド面高さ", "ToolManageNo": "FM-2750", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "入力範囲:1.5±0.5㎜以内", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "フリップカメラ調整治具", "Size": "", "ToolOther": "FM-4814", "WorkName": "フリップカメラ光軸・ピント・θ調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "取付確認", "ToolManageNo": "FM-4814", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り取付ている事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "フリップカメラ光軸・ピント・θ調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "光軸ずれ無き事ピンとずれ無き事θずれ無き事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "フリップカメラ光軸・ピント・θ調整③", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "光軸ずれ無き事ピンとずれ無き事θずれ無き事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "フリップカメラ光軸・ピント・θ調整④", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "光軸ずれ無き事ピンとずれ無き事θずれ無き事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "フリップカメラ調整治具", "Size": "", "ToolOther": "FM-4814", "WorkName": "フリップカメラ位置調整①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [] }
{ "QualityItem": "設定確認", "ToolManageNo": "FM-4814", "ToolCycle": "校正対象外", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "目視", "RecordMethod": "-", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "フリップカメラ位置調整②", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "中心ズレ量", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "X方向Y方向:±20μ以下", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null
{ "ToolName": "-", "Size": "", "ToolOther": "", "WorkName": "ボンディングヘッド(アップルッキングカメラ)キャリブレーションマーク位置ティーチ①", "WorkItems": [], "WorkPoints": [], "Tolks": [], "InspectionNo": "", "InspectionItems": [], "WorkTypes": [], "Words": [ "WDWS-5400-004" ] }
{ "QualityItem": "表示確認", "ToolManageNo": "-", "ToolCycle": "-", "ToolRecord": "-", "StdVal": "作業指示通り指示通り設定の事", "Method": "目視", "RecordMethod": "WDWS-5400-004", "Other": "-", "ProcessNames": [] }
information_extraction
0
null