srobertsphd/mit-labnetwork · Datasets at Hugging Face

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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Peter Lomax
Sent: Tuesday, September 12, 2023 5:57 PM
To: Fab Network <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] fiji G2 Loading
Hello all,
Has anybody got a Fiji G2 ALD, if so have you had any issues with the loading system.
Cheers
Peter
Sent from Outlook for iOS<https://urldefense.com/v3/__https:/aka.ms/o0ukef__;!!PAKc-5URQlI!8uDPAL94oEZ8WDD0STosnAAa7_cdSFKtHGFgU34XX-RaD94-aT5IyuqDCPO14GdhtYKTeH2P5P58jrpiW91QUFPtEUM$>
The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336. Is e buidheann carthannais a th' ann an Oilthigh Dh?n ?ideann, cl?raichte an Alba, ?ireamh cl?raidh SC005336.
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From beach at umich.edu Wed Sep 13 08:47:40 2023
From: beach at umich.edu (Katharine Beach)
Date: Wed, 13 Sep 2023 08:47:40 -0400
Subject: [labnetwork] Wafer Bond Alingment
Message-ID: <CABwiSAm+10A=uafog13QQVJ1HuJwsq8KBFqz2FtXe_tp2w8z=g@mail.gmail.com>
Following up on the bonding question from a few weeks ago. Does anyone have
an alignment/bonding system that they would recommend, and/or would willing
provide feedback on? We have been looking at the Suss, EVG and AML systems.
Thanks,
Katharine Beach
--
Katharine Beach
Research Engineer
Lurie Nanofabrication Facility
University of Michigan
beach at umich.edu <vpray at umich.edu>
(734) 255-9487 <7347638105>
Calendly <https://calendly.com/beachlnf>
1301 Beal Avenue, 1241 EECS Building
Ann Arbor, MI 48109-2122
LNF.umich.edu <http://www.lnf.umich.edu/>
<https://www.facebook.com/LurieNanofab>
<https://twitter.com/LurieNanoFab>
<https://www.linkedin.com/company/lurie-nanofabrication-facility>
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From jun.li at mcgill.ca Wed Sep 13 10:57:59 2023
From: jun.li at mcgill.ca (Jun Li, Mr)
Date: Wed, 13 Sep 2023 14:57:59 +0000
Subject: [labnetwork] fiji G2 Loading
In-Reply-To: <PAVPR05MB99049D5BEB9FEFB2B64780A7C8F0A@PAVPR05MB9904.eurprd05.prod.outlook.com>
References: <PAVPR05MB9904FFC528F6CEDA77FB6FAAC8F1A@PAVPR05MB9904.eurprd05.prod.outlook.com>
<834479b0851d42829e7848523f7d237a@tudelft.nl>
<PAVPR05MB99049D5BEB9FEFB2B64780A7C8F0A@PAVPR05MB9904.eurprd05.prod.outlook.com>
Message-ID: <QB1PR01MB3764AE3C9CB9C6CB784B444F8CF0A@QB1PR01MB3764.CANPRD01.PROD.OUTLOOK.COM>
HI Peter,
We have a new Fiji ALD system, we have not seen this problem so far. Just one piece recommendation from the person who did installation on site, mentioned that: periodically may need grease the load/unload transfer part. though it may not directly relate to your problem.
Best
Jun
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Peter Lomax
Sent: Wednesday, September 13, 2023 3:56 AM
To: Bas van Asten <B.vanAsten at tudelft.nl>; Fab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] fiji G2 Loading
Dear B. and Frank,
Thank you both for your reply, I think what we are seeing is the same as this:
https://snfexfab.stanford.edu/guide/docs/operating-instructions/fiji12and3-loading-and-unloading-videos
in the final video from Stanford. Seems to be happening very frequently though- (every few loads), and the video shows what happens but no solution.
Best regards
Peter
Dr Peter Lomax,
Principal Experimental Officer, The School of Engineering, The University of Edinburgh,
Scottish Microelectronics Centre,
Alexander Crum Brown Road, Edinburgh, EH9 3FF
Phone: +44 (0) 131 650 7146
[cid:image001.png at 01D9E630.F3F13430]
Facebook<https://www.facebook.com/SchoolOfEngineering.UoE> \| Twitter<https://twitter.com/SchoolOfEng_UoE> \| Youtube<https://www.youtube.com/SchoolOfEngUoE> \| LinkedIn<http://www.linkedin.com/company/university-of-edinburgh-school-of-engineering>
The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336.
From: Bas van Asten <B.vanAsten at tudelft.nl<mailto:B.vanAsten at tudelft.nl>>
Sent: 13 September 2023 08:12
To: Peter Lomax <Peter.Lomax at ed.ac.uk<mailto:Peter.Lomax at ed.ac.uk>>; Fab Network <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: RE: fiji G2 Loading
This email was sent to you by someone outside the University.
You should only click on links or attachments if you are certain that the email is genuine and the content is safe.
Dear Peter,
Yes, we have a Fiji G2 system with automatic hline loader.
We have problems loading the system every once in a while.
It's important to make sure the operators check that the sample plate is touching the prong base completely before loading.
If else over time it can move further and further out.
Best regards,
B. van Asten
Process Engineer
TU Delft
Faculty Applied Sciences
Lorentzweg 1
2628 CJ Delft
T +31 6 424 81091
E B.vanAsten at tudelft.nl<mailto:B.vanAsten at tudelft.nl>
Available on weekdays
From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Peter Lomax

From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Peter Lomax

Sent: Tuesday, September 12, 2023 5:57 PM

To: Fab Network <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>

Subject: [labnetwork] fiji G2 Loading

Hello all,

Has anybody got a Fiji G2 ALD, if so have you had any issues with the loading system.

Cheers

Peter

Sent from Outlook for iOS<https://urldefense.com/v3/__https:/aka.ms/o0ukef__;!!PAKc-5URQlI!8uDPAL94oEZ8WDD0STosnAAa7_cdSFKtHGFgU34XX-RaD94-aT5IyuqDCPO14GdhtYKTeH2P5P58jrpiW91QUFPtEUM$>

The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336. Is e buidheann carthannais a th' ann an Oilthigh Dh?n ?ideann, cl?raichte an Alba, ?ireamh cl?raidh SC005336.

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From beach at umich.edu Wed Sep 13 08:47:40 2023

From: beach at umich.edu (Katharine Beach)

Date: Wed, 13 Sep 2023 08:47:40 -0400

Subject: [labnetwork] Wafer Bond Alingment

Message-ID: <CABwiSAm+10A=uafog13QQVJ1HuJwsq8KBFqz2FtXe_tp2w8z=g@mail.gmail.com>

Following up on the bonding question from a few weeks ago. Does anyone have

an alignment/bonding system that they would recommend, and/or would willing

provide feedback on? We have been looking at the Suss, EVG and AML systems.

Thanks,

Katharine Beach

--

Katharine Beach

Research Engineer

Lurie Nanofabrication Facility

University of Michigan

beach at umich.edu <vpray at umich.edu>

(734) 255-9487 <7347638105>

Calendly <https://calendly.com/beachlnf>

1301 Beal Avenue, 1241 EECS Building

Ann Arbor, MI 48109-2122

LNF.umich.edu <http://www.lnf.umich.edu/>

<https://www.facebook.com/LurieNanofab>

<https://twitter.com/LurieNanoFab>

<https://www.linkedin.com/company/lurie-nanofabrication-facility>

-------------- next part --------------

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From jun.li at mcgill.ca Wed Sep 13 10:57:59 2023

From: jun.li at mcgill.ca (Jun Li, Mr)

Date: Wed, 13 Sep 2023 14:57:59 +0000

Subject: [labnetwork] fiji G2 Loading

In-Reply-To: <PAVPR05MB99049D5BEB9FEFB2B64780A7C8F0A@PAVPR05MB9904.eurprd05.prod.outlook.com>

References: <PAVPR05MB9904FFC528F6CEDA77FB6FAAC8F1A@PAVPR05MB9904.eurprd05.prod.outlook.com>

<834479b0851d42829e7848523f7d237a@tudelft.nl>

<PAVPR05MB99049D5BEB9FEFB2B64780A7C8F0A@PAVPR05MB9904.eurprd05.prod.outlook.com>

Message-ID: <QB1PR01MB3764AE3C9CB9C6CB784B444F8CF0A@QB1PR01MB3764.CANPRD01.PROD.OUTLOOK.COM>

HI Peter,

We have a new Fiji ALD system, we have not seen this problem so far. Just one piece recommendation from the person who did installation on site, mentioned that: periodically may need grease the load/unload transfer part. though it may not directly relate to your problem.

Best

Jun

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Peter Lomax

Sent: Wednesday, September 13, 2023 3:56 AM

To: Bas van Asten <B.vanAsten at tudelft.nl>; Fab Network <labnetwork at mtl.mit.edu>

Subject: Re: [labnetwork] fiji G2 Loading

Dear B. and Frank,

Thank you both for your reply, I think what we are seeing is the same as this:

https://snfexfab.stanford.edu/guide/docs/operating-instructions/fiji12and3-loading-and-unloading-videos

in the final video from Stanford. Seems to be happening very frequently though- (every few loads), and the video shows what happens but no solution.

Best regards

Peter

Dr Peter Lomax,

Principal Experimental Officer, The School of Engineering, The University of Edinburgh,

Scottish Microelectronics Centre,

Alexander Crum Brown Road, Edinburgh, EH9 3FF

Phone: +44 (0) 131 650 7146

[cid:image001.png at 01D9E630.F3F13430]

Facebook<https://www.facebook.com/SchoolOfEngineering.UoE> | Twitter<https://twitter.com/SchoolOfEng_UoE> | Youtube<https://www.youtube.com/SchoolOfEngUoE> | LinkedIn<http://www.linkedin.com/company/university-of-edinburgh-school-of-engineering>

The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336.

From: Bas van Asten <B.vanAsten at tudelft.nl<mailto:B.vanAsten at tudelft.nl>>

Sent: 13 September 2023 08:12

To: Peter Lomax <Peter.Lomax at ed.ac.uk<mailto:Peter.Lomax at ed.ac.uk>>; Fab Network <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>

Subject: RE: fiji G2 Loading

This email was sent to you by someone outside the University.

You should only click on links or attachments if you are certain that the email is genuine and the content is safe.

Dear Peter,

Yes, we have a Fiji G2 system with automatic hline loader.

We have problems loading the system every once in a while.

It's important to make sure the operators check that the sample plate is touching the prong base completely before loading.

If else over time it can move further and further out.

Best regards,

B. van Asten

Process Engineer

TU Delft

Faculty Applied Sciences

Lorentzweg 1

2628 CJ Delft

T +31 6 424 81091

E B.vanAsten at tudelft.nl<mailto:B.vanAsten at tudelft.nl>

Available on weekdays

From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Peter Lomax