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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Peter Lomax |
Sent: Tuesday, September 12, 2023 5:57 PM |
To: Fab Network <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>> |
Subject: [labnetwork] fiji G2 Loading |
Hello all, |
Has anybody got a Fiji G2 ALD, if so have you had any issues with the loading system. |
Cheers |
Peter |
Sent from Outlook for iOS<https://urldefense.com/v3/__https:/aka.ms/o0ukef__;!!PAKc-5URQlI!8uDPAL94oEZ8WDD0STosnAAa7_cdSFKtHGFgU34XX-RaD94-aT5IyuqDCPO14GdhtYKTeH2P5P58jrpiW91QUFPtEUM$> |
The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336. Is e buidheann carthannais a th' ann an Oilthigh Dh?n ?ideann, cl?raichte an Alba, ?ireamh cl?raidh SC005336. |
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From beach at umich.edu Wed Sep 13 08:47:40 2023 |
From: beach at umich.edu (Katharine Beach) |
Date: Wed, 13 Sep 2023 08:47:40 -0400 |
Subject: [labnetwork] Wafer Bond Alingment |
Message-ID: <CABwiSAm+10A=uafog13QQVJ1HuJwsq8KBFqz2FtXe_tp2w8z=g@mail.gmail.com> |
Following up on the bonding question from a few weeks ago. Does anyone have |
an alignment/bonding system that they would recommend, and/or would willing |
provide feedback on? We have been looking at the Suss, EVG and AML systems. |
Thanks, |
Katharine Beach |
-- |
Katharine Beach |
Research Engineer |
Lurie Nanofabrication Facility |
University of Michigan |
beach at umich.edu <vpray at umich.edu> |
(734) 255-9487 <7347638105> |
Calendly <https://calendly.com/beachlnf> |
1301 Beal Avenue, 1241 EECS Building |
Ann Arbor, MI 48109-2122 |
LNF.umich.edu <http://www.lnf.umich.edu/> |
<https://www.facebook.com/LurieNanofab> |
<https://twitter.com/LurieNanoFab> |
<https://www.linkedin.com/company/lurie-nanofabrication-facility> |
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From jun.li at mcgill.ca Wed Sep 13 10:57:59 2023 |
From: jun.li at mcgill.ca (Jun Li, Mr) |
Date: Wed, 13 Sep 2023 14:57:59 +0000 |
Subject: [labnetwork] fiji G2 Loading |
In-Reply-To: <PAVPR05MB99049D5BEB9FEFB2B64780A7C8F0A@PAVPR05MB9904.eurprd05.prod.outlook.com> |
References: <PAVPR05MB9904FFC528F6CEDA77FB6FAAC8F1A@PAVPR05MB9904.eurprd05.prod.outlook.com> |
<834479b0851d42829e7848523f7d237a@tudelft.nl> |
<PAVPR05MB99049D5BEB9FEFB2B64780A7C8F0A@PAVPR05MB9904.eurprd05.prod.outlook.com> |
Message-ID: <QB1PR01MB3764AE3C9CB9C6CB784B444F8CF0A@QB1PR01MB3764.CANPRD01.PROD.OUTLOOK.COM> |
HI Peter, |
We have a new Fiji ALD system, we have not seen this problem so far. Just one piece recommendation from the person who did installation on site, mentioned that: periodically may need grease the load/unload transfer part. though it may not directly relate to your problem. |
Best |
Jun |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Peter Lomax |
Sent: Wednesday, September 13, 2023 3:56 AM |
To: Bas van Asten <B.vanAsten at tudelft.nl>; Fab Network <labnetwork at mtl.mit.edu> |
Subject: Re: [labnetwork] fiji G2 Loading |
Dear B. and Frank, |
Thank you both for your reply, I think what we are seeing is the same as this: |
https://snfexfab.stanford.edu/guide/docs/operating-instructions/fiji12and3-loading-and-unloading-videos |
in the final video from Stanford. Seems to be happening very frequently though- (every few loads), and the video shows what happens but no solution. |
Best regards |
Peter |
Dr Peter Lomax, |
Principal Experimental Officer, The School of Engineering, The University of Edinburgh, |
Scottish Microelectronics Centre, |
Alexander Crum Brown Road, Edinburgh, EH9 3FF |
Phone: +44 (0) 131 650 7146 |
[cid:image001.png at 01D9E630.F3F13430] |
Facebook<https://www.facebook.com/SchoolOfEngineering.UoE> | Twitter<https://twitter.com/SchoolOfEng_UoE> | Youtube<https://www.youtube.com/SchoolOfEngUoE> | LinkedIn<http://www.linkedin.com/company/university-of-edinburgh-school-of-engineering> |
The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336. |
From: Bas van Asten <B.vanAsten at tudelft.nl<mailto:B.vanAsten at tudelft.nl>> |
Sent: 13 September 2023 08:12 |
To: Peter Lomax <Peter.Lomax at ed.ac.uk<mailto:Peter.Lomax at ed.ac.uk>>; Fab Network <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>> |
Subject: RE: fiji G2 Loading |
This email was sent to you by someone outside the University. |
You should only click on links or attachments if you are certain that the email is genuine and the content is safe. |
Dear Peter, |
Yes, we have a Fiji G2 system with automatic hline loader. |
We have problems loading the system every once in a while. |
It's important to make sure the operators check that the sample plate is touching the prong base completely before loading. |
If else over time it can move further and further out. |
Best regards, |
B. van Asten |
Process Engineer |
TU Delft |
Faculty Applied Sciences |
Lorentzweg 1 |
2628 CJ Delft |
T +31 6 424 81091 |
E B.vanAsten at tudelft.nl<mailto:B.vanAsten at tudelft.nl> |
Available on weekdays |
From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Peter Lomax |
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